CN215864645U - Vertical high temperature furnace vacuum seal reflecting screen furnace structure - Google Patents
Vertical high temperature furnace vacuum seal reflecting screen furnace structure Download PDFInfo
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- CN215864645U CN215864645U CN202120551026.0U CN202120551026U CN215864645U CN 215864645 U CN215864645 U CN 215864645U CN 202120551026 U CN202120551026 U CN 202120551026U CN 215864645 U CN215864645 U CN 215864645U
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Abstract
The invention discloses a vacuum sealing reflecting screen hearth structure of a vertical high-temperature furnace, which comprises a furnace cover, a furnace shell, a furnace bottom flange, a vacuum sealing hearth, wherein the furnace bottom flange is fastened through bolts and sealed through a sealing ring, the furnace bottom flange is movably and hermetically provided with a sealing flange and a process pipe, a process chamber limited by the process pipe is arranged in the vacuum sealing hearth and used for carrying out the process of a process sheet, a furnace cover heat shield, a furnace shell heat shield and a furnace bottom heat shield are arranged in the vacuum sealing hearth and form a labyrinth-shaped sealing joint, and a heating cavity is arranged between the structure in the vacuum sealing hearth and the process pipe. According to the invention, the furnace cover heat shield, the furnace shell heat shield and the furnace bottom heat shield which are formed by stacking a plurality of heat shields at intervals are arranged in the vacuum sealed furnace chamber, and three groups of heat shield labyrinth-shaped sealing joints are arranged, so that heat diffused outwards in the vertical high-temperature oxidation furnace is reflected, the heated temperature can be stably maintained, the energy consumption is reduced, and the high-temperature influence on components outside the furnace is also reduced.
Description
Technical Field
The invention relates to the technical field of high-temperature oxidation furnaces and annealing furnaces, in particular to a vacuum sealing reflecting screen hearth structure of a vertical high-temperature furnace.
Background
SIC is a typical representative of third-generation semiconductor materials, and is an extremely ideal semiconductor material in high-temperature, high-frequency, radiation-resistant and high-power application occasions; because the silicon carbide power device can obviously reduce the energy consumption of electronic equipment, the silicon carbide device is also known as a green energy device which drives the 'new energy revolution'. The technological process of diffusion, oxidation, annealing and the like of the SIC material is mainly characterized in that high temperature or vacuum heating and process gas conditions are required, particularly the high temperature is generally 1400-2000 ℃, which cannot be realized by the components of the structure, the mode, the material and the like of a heater and a process chamber of the prior second-generation semiconductor equipment with the working temperature of 800-.
The conventional hearth structure is usually applied at 800-. Therefore, it is necessary to provide a vacuum-sealed reflecting screen hearth structure of a vertical high-temperature furnace to solve the above problems.
Disclosure of Invention
In order to solve the technical problems, the invention provides a vacuum sealing reflecting screen hearth structure of a vertical high-temperature furnace, which has multiple functions of high-temperature heating, strong heat preservation, reflecting temperature, ensuring that the temperature transmitted to a shell is low enough and the like.
The invention provides a vacuum sealing reflecting screen hearth structure of a vertical high-temperature furnace, which comprises a furnace cover, a furnace shell, a furnace bottom flange, a vacuum sealing hearth, wherein the furnace bottom flange is fastened through bolts and sealed through a sealing ring, the furnace bottom flange is movably and hermetically provided with a sealing flange and a process pipe, a process chamber limited by the process pipe is arranged in the vacuum sealing hearth and used for carrying out the process of a process piece,
a furnace cover heat shield, a furnace shell heat shield and a furnace bottom heat shield are arranged in the vacuum sealed furnace cavity, labyrinth-shaped sealing joints are formed among the furnace cover heat shield, the furnace shell heat shield and the furnace bottom heat shield, a heating cavity is arranged among the furnace cover heat shield, the furnace shell heat shield, the furnace bottom heat shield and the process tube, and a heater is arranged in the heating cavity;
the heater is through passing the heater electrode hoist and mount of bell and bell heat screen in the heating chamber, the heater electrode do not expose in heating chamber part cover is equipped with insulating cover.
As an improvement, a furnace shell vacuum tube is arranged through the furnace shell heat shield and the furnace shell and used for realizing the vacuum state of the vacuum sealed hearth, and a furnace shell air inlet tube is used for filling inert gas into the vacuum sealed hearth.
As an improvement, the furnace cover heat shield, the furnace shell heat shield and the furnace bottom heat shield are all composed of heat shields which are stacked at intervals.
As an improvement, the heat shield is fixedly installed on the heat shield installation plate through heat shield installation bolts, and the heat shield installation plate is fixedly connected with the furnace cover, the furnace shell and the furnace bottom flange through supporting components respectively.
As an improvement, the heat shield mounting bolt sleeve is provided with a heat shield spacer sleeve.
As an improvement, the heat shield comprises at least two of a tungsten heat shield, a molybdenum heat shield and a stainless steel heat shield.
As an improvement, an electrode insulating water-cooling sealing sleeve is sleeved on the outer portion of the heater electrode, the heater electrode and the electrode insulating water-cooling sealing sleeve are sealed through a sealing ring, the electrode water-cooling sealing sleeve is fixedly connected with the furnace cover, and a wiring assembly is further arranged at the end portion of the heater electrode and used for being externally connected with a power supply.
As an improvement, a thermocouple sealing seat is arranged outside the furnace shell, and a temperature control thermocouple is sleeved in the thermocouple sealing seat through a thermocouple sealing ring.
As a refinement, the inert gas includes Ar2Or N2One kind of (1).
As an improvement, the furnace shell is a single-layer plate or a double-layer plate with water cooling.
Compared with the prior art, the vacuum sealing reflecting screen hearth structure of the vertical high-temperature furnace has the following beneficial effects:
(1) according to the vacuum sealing reflecting screen hearth structure of the vertical high-temperature furnace, the furnace cover heat shield, the furnace shell heat shield and the furnace bottom heat shield are arranged in the vacuum sealing hearth, and the labyrinth-shaped sealing joint is adopted, so that the internal temperature is prevented from being radiated from a joint surface, the temperature reached by heating of the vertical high-temperature oxidation furnace can be stably maintained, and the energy consumption is reduced.
(2) According to the vacuum sealing reflecting screen hearth structure of the vertical high-temperature furnace, the furnace cover heat shield, the furnace shell heat shield and the furnace bottom heat shield adopt the mode of heat shields which are stacked at intervals, so that the temperature can be effectively reflected, and the influence of high temperature on external structures such as the furnace shell and the like is avoided; the cost can be reduced by selecting suitable materials for the heat shields at different positions.
(3) According to the vacuum sealing reflecting screen hearth structure of the vertical high-temperature furnace, the temperature in the furnace is effectively monitored by setting the temperature control thermocouple to measure the temperature in the furnace, and the safety of the technological process and the product percent of pass are ensured.
The above and other objects, advantages and features of the present invention will become more apparent to those skilled in the art from the following detailed description of specific embodiments thereof, taken in conjunction with the accompanying drawings.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of a vacuum-sealed reflecting screen hearth structure of a vertical high-temperature furnace according to the present invention;
FIG. 2 is a schematic view of the structure shown at A in FIG. 1;
FIG. 3 is a schematic view of the structure shown at B in FIG. 1;
the furnace comprises a furnace cover 1, a furnace cover 2, a furnace shell 3, a furnace bottom flange 4, a sealing flange 5, a process tube 6, a furnace cover heat shield 7, a furnace shell heat shield 8, a furnace bottom heat shield 9, a heater 10, a heater electrode 11, an insulating sleeve 12, a furnace shell vacuum tube 13, a furnace shell air inlet tube 14, a heat shield 15, a heat shield mounting bolt 16, a heat shield mounting plate 17, a heat shield spacer sleeve 18, an electrode insulating water-cooling sealing sleeve 19, a wiring assembly 20, a thermocouple sealing seat 21, a temperature control thermocouple 22 and angle steel.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-3, a vacuum-sealed reflection screen hearth structure of a vertical high-temperature furnace according to a first embodiment of the present invention includes a furnace cover 1, a furnace shell 2, a furnace bottom flange 3 fastened by bolts, sealed by a sealing ring, and a vacuum-sealed hearth in which a sealing flange 4 and a process tube 5 are movably and sealingly installed on the furnace bottom flange 3, and the vacuum-sealed hearth includes a process chamber defined by the process tube 5 for performing a process of a process piece.
Wherein, the sealing flange 4 and the process pipe 5 which are movably and hermetically arranged form two independent spaces which are respectively sealed when being in a sealing state with the furnace bottom flange 3, namely a hearth in a vacuum sealing state and a process chamber formed by the process pipe 5 and the sealing flange 4, in the state, a heater 9 in the hearth is used for heating in an oxygen-free environment, and the process chamber is used for carrying out the processes of oxidation and vacuum annealing of process pieces; after the technological process of the process piece is finished, the sealing flange 4 moves away through a certain technical means, at the moment, the hearth is still in a vacuum state, but the process chamber is in a non-vacuum state, and the process needing the vacuum environment cannot be carried out, but the process chamber can continue to carry out other processes without the vacuum environment, such as an oxidation process, by filling process gas; or the process gas is not filled, and the process piece is taken and put.
The furnace shell 2 can be a single-layer plate or a double-layer plate with water cooling, and only the form of the single-layer plate is shown in the drawing.
A furnace cover heat shield 6, a furnace shell heat shield 7 and a furnace bottom heat shield 8 are further arranged in the vacuum sealed furnace chamber, labyrinth-shaped sealing joints are formed among the furnace cover heat shield 6, the furnace shell heat shield 7 and the furnace bottom heat shield 8 and are used for preventing internal heat from being smoothly dissipated, a heating cavity is arranged among the furnace cover heat shield 6, the furnace shell heat shield 7, the furnace bottom heat shield 8 and the process tube 5, and a heater 9 is arranged in the heating cavity;
the heater 9 is hung in the heating cavity through a heater electrode 10 penetrating through the furnace cover 1 and the furnace cover heat shield 6, and an insulating sleeve 11 is sleeved on the part, not exposed out of the heating cavity, of the heater electrode 10.
It should be noted that, the labyrinth sealing joints of the three sets of heat shields are non-contact, so that the reflection of heat radiation in different directions is not disturbed, and the labyrinth sealing joints have gaps and heat is radiated out, but the heat is very little. In addition, the insulating sleeve 11 is sleeved on the part of the heater electrode 10 not exposed out of the heating cavity, so that the current in the heater electrode 10 can not be short-circuited with the heat shield (because the heat shield is made of metal).
In the second embodiment, the furnace cover heat shield 6, the furnace shell heat shield 7 and the furnace bottom heat shield 8 are all composed of heat shields 14 which are laminated at intervals. Wherein, the interval generally is between 8-10mm, so set up, first can be favorable to the formation of labyrinth seal seam, and second, also can prevent the heat shield between every layer to influence each other, because the heat shield 14's in the direction from inside to outside in every group heat shield material is changed, for example, from inside and outside be tungsten, molybdenum, stainless steel, the material kind can be two kinds, can be multiple, depend on the heat-resisting degree of stove highest temperature and heat shield material, in addition, select the material according to the temperature and also reduce the cost.
The heat shield 14 is fixedly mounted on a heat shield mounting plate 16 through a heat shield mounting bolt 15, and the heat shield mounting plate 16 is fixedly connected with the furnace cover 1, the furnace shell 2 and the furnace bottom flange 3 through a supporting component respectively. The supporting components may be of a common structure, for example, in fig. 1 to 3, the fixing structures of the furnace cover 1 and the furnace bottom flange 3 and the corresponding heat shield mounting plate 16 are reserved convex members, and the furnace shell 2 and the corresponding heat shield mounting plate 16 are fixed by the reserved convex members fixed by the angle steel 22, which are conventional technologies and are not repeated herein.
It should be noted that a heat shield spacer 17 is further sleeved outside the heat shield mounting bolt 15 for separating the heat shield layers.
In the third embodiment, based on the first embodiment, an electrode insulating water-cooling sealing sleeve 18 is sleeved on the outer part of the heater electrode 10, the heater electrode 10 and the electrode insulating water-cooling sealing sleeve 18 are sealed by a sealing ring, the electrode insulating water-cooling sealing sleeve 18 and the furnace cover 1 are fixedly connected by the sealing ring, and a wiring assembly 19 is further arranged at the end part of the heater electrode 10 and used for externally connecting a power supply.
The fourth embodiment is based on the first embodiment, wherein a furnace shell vacuum tube 12 is arranged through the furnace shell heat shield 7 and the furnace shell 2 for realizing the vacuum state of the vacuum sealed furnace chamber, and a furnace shell air inlet tube 13 is used for filling inert gas into the vacuum sealed furnace chamber, wherein the inert gas is Ar2Or N2One kind of (1). After the vacuum is formed by air exhaust, inert gas is filled again, the oxygen-free state in the furnace is further ensured, and the performances of the heater 9, the furnace cover heat shield 6, the furnace shell heat shield 7 and the furnace bottom heat shield 8 are protected.
In the fifth embodiment, based on the first embodiment, a thermocouple sealing seat 20 is arranged outside the furnace shell 2, and a temperature control thermocouple 21 is sleeved in the thermocouple sealing seat 20 through a thermocouple sealing ring. The temperature control thermocouple 21 is used for detecting the temperature in the furnace and performing accurate control.
The scope of the invention is indicated by the appended claims rather than by the foregoing description, and all changes that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. A vacuum sealing reflecting screen hearth structure of a vertical high-temperature furnace comprises a furnace cover (1), a furnace shell (2), a furnace bottom flange (3) which is fastened by bolts and sealed by a sealing ring, and a vacuum sealing hearth of which the furnace bottom flange (3) is movably and hermetically provided with a sealing flange (4) and a process pipe (5), wherein the inside of the vacuum sealing hearth comprises a process chamber limited by the process pipe (5) and is used for carrying out the process of a process piece,
the vacuum-sealed furnace is characterized in that a furnace cover heat shield (6), a furnace shell heat shield (7) and a furnace bottom heat shield (8) are arranged inside the vacuum-sealed furnace chamber, labyrinth-shaped sealing joints are formed among the furnace cover heat shield, the furnace shell heat shield and the furnace bottom heat shield, a heating chamber is arranged among the furnace cover heat shield, the furnace shell heat shield, the furnace bottom heat shield and the process pipe (5), and a heater (9) is arranged in the heating chamber;
the heater is through passing heater electrode (10) hoist and mount of bell and bell heat-shield in the heating chamber, the heater electrode do not expose in heating chamber part cover is equipped with insulating cover (11).
2. The vacuum-sealed reflecting-screen hearth structure of the vertical high-temperature furnace according to claim 1, characterized in that a furnace-shell vacuum tube (12) is provided through the furnace-shell heat shield and the furnace shell for realizing the vacuum state of the vacuum-sealed hearth, and a furnace-shell air inlet tube (13) for introducing inert gas into the vacuum-sealed hearth.
3. The vacuum sealing reflecting screen hearth structure of the vertical high-temperature furnace as claimed in claim 1, wherein the furnace cover heat shield, the furnace shell heat shield and the furnace bottom heat shield are all composed of heat shields (14) which are stacked at intervals.
4. The vacuum sealing reflecting screen hearth structure of the vertical high-temperature furnace according to claim 3, wherein the heat shield is fixedly mounted on a heat shield mounting plate (16) through a heat shield mounting bolt (15), and the heat shield mounting plate is fixedly connected with the furnace cover, the furnace shell and the furnace bottom flange through a support assembly respectively.
5. The vacuum sealed reflecting screen hearth structure of the vertical high temperature furnace according to claim 4, wherein said heat shield mounting bolts (15) are sleeved with heat shield spacers (17).
6. The vacuum sealed reflecting screen hearth structure of the vertical high temperature furnace according to any one of claims 3, 4 or 5, wherein said heat shield comprises at least two of a tungsten heat shield, a molybdenum heat shield and a stainless steel heat shield.
7. The vacuum sealing and reflecting screen hearth structure of the vertical high-temperature furnace as claimed in claim 1, wherein an electrode insulating water-cooling sealing sleeve (18) is sleeved outside the furnace of the heater electrode (10), the heater electrode and the electrode insulating water-cooling sealing sleeve are sealed through a sealing ring, the electrode insulating water-cooling sealing sleeve is fixedly connected with the furnace cover, and a wiring assembly (19) is further arranged at the end part of the heater electrode and used for an external power supply.
8. The vacuum sealing reflecting screen hearth structure of the vertical high temperature furnace according to claim 1, wherein a thermocouple sealing seat (20) is arranged outside the furnace shell, and a temperature control thermocouple (21) is sleeved in the thermocouple sealing seat (20) through a thermocouple sealing ring.
9. The vacuum-sealed reflecting screen hearth structure of the vertical high-temperature furnace according to claim 2, wherein the inert gas comprises Ar2Or N2One kind of (1).
10. The vacuum-tight reflecting screen hearth structure of the vertical high-temperature furnace according to claim 1, wherein said furnace shell is one of a single-layer plate or a double-layer plate with water cooling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120551026.0U CN215864645U (en) | 2021-03-17 | 2021-03-17 | Vertical high temperature furnace vacuum seal reflecting screen furnace structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120551026.0U CN215864645U (en) | 2021-03-17 | 2021-03-17 | Vertical high temperature furnace vacuum seal reflecting screen furnace structure |
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| Publication Number | Publication Date |
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| CN215864645U true CN215864645U (en) | 2022-02-18 |
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| CN202120551026.0U Active CN215864645U (en) | 2021-03-17 | 2021-03-17 | Vertical high temperature furnace vacuum seal reflecting screen furnace structure |
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2021
- 2021-03-17 CN CN202120551026.0U patent/CN215864645U/en active Active
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Effective date of registration: 20230626 Address after: 214000 workshop and office space on the south side of the first floor of Plant No. 4, precision machinery industrial park, Xishan District, Wuxi City, Jiangsu Province Patentee after: Sairuida Intelligent Electronic Equipment (Wuxi) Co.,Ltd. Address before: 826 Huadong Road, high tech Zone, Qingdao, Shandong Patentee before: QINGDAO SUNRED ELECTRONIC EQUIPMENT Co.,Ltd. |