CN112830670A - Quartz glass tube rod production furnace and quartz glass tube rod production method - Google Patents
Quartz glass tube rod production furnace and quartz glass tube rod production method Download PDFInfo
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- CN112830670A CN112830670A CN202110084062.5A CN202110084062A CN112830670A CN 112830670 A CN112830670 A CN 112830670A CN 202110084062 A CN202110084062 A CN 202110084062A CN 112830670 A CN112830670 A CN 112830670A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/04—Re-forming tubes or rods
- C03B23/047—Re-forming tubes or rods by drawing
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/04—Re-forming tubes or rods
- C03B23/043—Heating devices specially adapted for re-forming tubes or rods in general, e.g. burners
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Abstract
The invention provides a quartz glass tube rod production furnace and a production method of the quartz glass tube rod, wherein the production furnace comprises the following steps: the quartz smelting furnace is provided with a lifting device above; the base material fixing assembly can be installed on the lifting device after being connected with the quartz base material so as to lift the quartz base material above the quartz melting furnace, and comprises a replaceable connecting piece which can be replaced according to the specification of the quartz base material to be connected; the receiving mechanism is positioned below the quartz smelting furnace and used for receiving the quartz glass tube rod output by the quartz smelting furnace and slowly drawing out the quartz glass tube rod at a constant speed; and the central positioning system is arranged below the quartz smelting furnace and is used for positioning the formed quartz glass tube rod. The structure can realize the production of various quartz glass tube rods by replacing the replaceable connecting piece. The quartz base material is not contacted with the crucible, so that the quartz smelting furnace can be discontinuously produced in small batches, and the purity and the performance of the quartz glass tube rod are improved.
Description
Technical Field
The invention relates to the field of production of quartz glass tubes and rods, in particular to a quartz glass tube and rod production furnace and a quartz glass tube and rod production method.
Background
The demand of the existing quartz glass tube rods such as the quartz glass tube rods for semiconductors and optical fibers is less than that of the quartz glass products for common light sources, but the quartz glass tube rods have more specifications and varieties, and the span ranges of the external diameter and the wall thickness of the products are large, so that the following problems exist when the existing continuous melting furnace for production is used for production: the metal crucible, the material table and the forming device used in the furnace can be in direct contact with raw materials for producing quartz in the production process, so that products drawn by the raw materials have metal pollution and can not meet the requirements of purity indexes of products such as high-end light sources, semiconductors, optical fibers and the like. Meanwhile, when the existing continuous melting furnace is used for producing the quartz glass tube rod, the quartz raw material is in direct contact with the furnace body, so that the pollution of the furnace body to the quartz raw material is avoided, and after the continuous melting furnace stops production every time, a large amount of manpower and material resources are needed to clean and maintain the continuous melting furnace with large workload. Meanwhile, the existing continuous melting furnace needs to be used for producing various products with different types and types, so that the multiple products are difficult to be produced in a compatible manner, the waste of transformation transition production is large, part of specifications are the limit specifications of the melting furnace, and the tolerance of the produced products is difficult to control.
Therefore, how to design a production method and a corresponding system which do not require continuous production, have less metal pollution and can produce quartz glass tube rods with various specifications becomes a problem to be solved at present.
Disclosure of Invention
In order to solve the technical problems in the background art, according to an embodiment of the present invention, a furnace for producing a quartz glass tube rod and a method for producing a quartz glass tube rod are provided.
A first aspect of the present invention provides a furnace for producing a quartz glass tube rod, comprising:
a quartz furnace;
a lifting device which can be arranged above the quartz melting furnace in a lifting way;
the base material fixing assembly can be installed on the lifting device after being connected with the quartz base material so as to hoist the quartz base material above the quartz melting furnace along the vertical direction, and comprises a replaceable connecting piece connected with the quartz base material, and the replaceable connecting piece can be replaced correspondingly according to the specification of the quartz base material;
the receiving mechanism is positioned below the quartz smelting furnace and is used for receiving the quartz glass tube rod output from the bottom of the quartz smelting furnace and slowly drawing out the quartz glass tube rod at a constant speed;
and the center positioning system is arranged between the quartz melting furnace and the bearing mechanism, and the center of the center positioning system is aligned with the center of the discharge channel of the quartz melting furnace.
In the above technical solution, preferably, the replaceable connecting member is connected to an upper end of the quartz base material by an insertion manner, and is fixed by a graphite pin after the insertion connection.
Further preferably, a first pin hole adapted to the graphite pin is formed in the replaceable connecting piece, a second pin hole adapted to the graphite pin is formed in one end, inserted into the replaceable connecting piece, of the quartz base material, and after the quartz base material is fixed by the graphite pin, high-temperature casting materials are filled between the graphite pin and the inner wall of the first pin hole, and between the graphite pin and the inner wall of the second pin hole.
Further preferably, the replaceable connecting member comprises a closing cover for closing the feeding passage of the quartz melting furnace, and the feeding passage of the quartz melting furnace can be sealed by the closing cover after the quartz base material is inserted into the quartz melting furnace, so as to prevent the gas in the quartz melting furnace from being exposed. The size of the closing cover can be set reasonably according to the size of the feeding channel and the replaceable pipe of the quartz melting furnace.
In any of the above technical solutions, preferably, the base material fixing assembly further includes a fixing seat, the fixing seat can be placed or fixedly mounted on the lifting device, one end of the replaceable connecting member is mounted on the fixing seat, the other end of the replaceable connecting member is connected with a quartz base material, an air inlet channel is arranged on the fixing seat, the quartz base material is of a solid structure or a hollow structure, when the quartz base material is of a hollow structure, one end of the quartz base material is of an open structure and is in sealed communication with the air inlet channel through the replaceable connecting member, and the other end of the quartz base material is of a closed structure.
Further, the fixing base includes a support and a connecting rod, the support can be placed or fixedly mounted on the lifting device, one end of the connecting rod is fixedly mounted on the support, the replaceable connecting piece can be detachably mounted on the other end of the connecting rod, the connecting rod is a hollow tube with an open lower end, the replaceable connecting piece includes a replaceable tube which is in sealed communication with the connecting rod and a sealing cover which is mounted at the joint of the replaceable tube and the connecting rod, and the air inlet channel includes an air inlet hole which is arranged on the support or on the connecting rod. When the quartz base material is of a hollow structure, one end of the quartz base material is of an open structure and is communicated with the connecting rod in a sealing mode through the replaceable pipe, and the other end of the quartz base material is of a closed structure.
In any one of the above solutions, preferably, the quartz furnace includes: the furnace body comprises a furnace body and a furnace cover, wherein a crucible is arranged in the furnace body, a heat-insulating cover is arranged at a crucible opening of the crucible, a feeding channel penetrating through the furnace cover and the heat-insulating cover is arranged at the top of the furnace body, and a discharging channel penetrating through the bottom of the furnace body and the bottom of the crucible is arranged at the bottom of the furnace body; and the heating device is arranged in the furnace body and outside the crucible and is used for heating the crucible.
Further preferably, the quartz melting furnace further comprises a heat preservation device, wherein the heat preservation device is arranged around the crucible and comprises a heat preservation cover correspondingly arranged at the crucible opening of the crucible, a heat preservation side structure correspondingly arranged on the side wall of the crucible and a heat preservation bottom structure arranged at the bottom of the crucible.
Further preferably, the furnace for producing a quartz glass tube rod further comprises:
the temperature control system is connected with the heating device and controls the temperature in the crucible by controlling the heating power of the heating device;
the pressure control system comprises a gas charging port and a gas discharging port which are connected with the interior of the crucible, and the pressure in the crucible can be adjusted through the pressure control system;
and the cooling system is arranged between the furnace body and the crucible and is used for cooling the inside of the furnace body.
Further preferably, the graphite pin and the heating device are both made of a high purity graphite material.
Further preferably, the heat-insulating cover is made of a mixture of alumina and quartz sand.
Further preferably, the heating device is an induction heating device or a resistance heating device.
Further preferably, the temperature control precision of the temperature control system is ± 0.5 ℃.
A second aspect of the present invention provides a method for producing a quartz glass tube rod, comprising:
determining a matched quartz base material according to a quartz glass tube rod with a required specification, selecting a replaceable connecting piece according to the determined quartz base material, mounting the quartz base material on a base material fixing component through the selected replaceable connecting piece, and then mounting the base material fixing component on a lifting device above a quartz furnace so as to vertically lift the quartz base material above the quartz furnace;
heating the temperature in the quartz furnace to a preset temperature range matched with the determined quartz base material, then maintaining the temperature, introducing gas into the quartz furnace to adjust the pressure in the quartz furnace to a preset pressure condition matched with the determined quartz base material, and then maintaining the pressure;
after the temperature and the pressure in the quartz smelting furnace are adjusted, the quartz base material descends and enters the quartz smelting furnace from a feeding channel of the quartz smelting furnace, then the quartz base material passes through a heating area of the quartz smelting furnace and is fully melted, and the quartz base material is output from a discharging channel of the quartz smelting furnace under the action of gravity after being fully melted;
the quartz glass tube rod output by the discharge channel of the quartz smelting furnace moves downwards by gravity and enters a receiving mechanism arranged below the quartz smelting furnace, and the receiving mechanism enables the quartz glass tube rod to be slowly pulled out at a constant speed by extrusion friction force;
and changing the pulling-out speed of the quartz glass tube rod by adjusting the extrusion friction force between the bearing mechanism and the quartz glass tube rod to obtain the quartz glass tube rod with the required specification.
In the above technical solution, preferably, when the determined quartz base material has a hollow interior, an open upper end, and a closed lower end, the production method further includes:
after the quartz parent material starts to be heated and melted or the quartz glass tube rod starts to be drawn, gas is input into the quartz parent material from an opening at the upper end of the quartz parent material to adjust the pressure in the quartz parent material until the drawing of the quartz glass tube rod is finished.
In the above technical solution, preferably, the method for producing a quartz glass tube rod further includes:
before the lower end of the quartz parent metal is lowered to the discharge channel of the quartz furnace, the axis of the quartz parent metal is aligned with the central axis of the central positioning system below the quartz furnace.
In any of the above technical solutions, preferably, the method for producing a quartz glass tube rod further includes: when the extrusion friction force between the receiving mechanism and the quartz glass tube rod is adjusted to change the pulling rate of the quartz glass tube rod, the rotating speed of the traction wheel of the receiving mechanism is adjusted to be 500-.
In any one of the above technical solutions, preferably, the preset pressure condition includes: the pressure in the quartz furnace is 0.1-0.6MPa, and the gas flow is 0.8-1.5m3/hr。
In any of the above technical solutions, preferably, during the heating process of the quartz furnace, the temperature of the quartz furnace is raised to 1950-2100 ℃ at a speed of 15-70KW/10min, and then the temperature in the quartz furnace is maintained at 1950-2100 ℃. The arrangement can realize the differential accurate temperature control in the quartz melting furnace, thereby being capable of processing quartz base materials of various specifications into quartz glass tube rods of different specifications.
In any of the above embodiments, the lowering speed of the quartz base material is preferably 2 to 10 mm/min.
In any of the above technical solutions, preferably, the outer diameter of the quartz glass tube rod with the required specification is 2mm to 100mm, the wall thickness of the quartz glass tube rod with the required specification is 0.5mm to 14mm, the diameter of the quartz base material is 50mm to 350mm, and the weight is 10KG to 200 KG.
In any of the above embodiments, preferably, when the quartz base material has a structure in which the inside is hollow, the upper end is open, and the lower end is closed, the pressure in the quartz base material is controlled to be between 0.01Mpa and 0.7Mpa during the heating of the quartz base material.
In any of the above solutions, the length of the quartz glass tube rod with the required specification is preferably 0.5m to 3.5 m. The quartz glass tube rod comprises a quartz rod or a quartz tube, and therefore the length of the quartz rod or the quartz tube of the required specification is 0.5m to 3.5 m.
In any of the above technical solutions, preferably, the method for producing a quartz glass tube rod further includes performing a preparation operation before hoisting the quartz base material, where the preparation operation specifically includes:
inspecting and cleaning the furnace body: checking whether the parts in the furnace are intact, cleaning the furnace chamber, removing volatile substances deposited on the heating body, ensuring that the graphite door at the bottom of the furnace is closed and the furnace cover is in place, and cleaning the periphery of the furnace body;
detecting the cooling system: opening a circulating cooling water pipe of the cooling system, and checking the pressure of circulating water to ensure that each water pipe is circulated and has no water seepage phenomenon;
the furnace door and the cover are ensured to be closed, the furnace chamber is purged by air supply, and the purging time is more than 30 minutes. Wherein, in the purging process, the pressure in the furnace is adjusted to be 0.2-0.5MPa, and the gas flow is 1-3m3And/hr. The cleanliness in the furnace can be ensured by this step.
According to the quartz glass tube rod production furnace and the quartz glass tube rod production method provided by the embodiment of the invention, when quartz glass tube rods with different specifications are processed, the adaptive quartz base material can be selected, then replaceable connecting pieces with different specifications can be selected according to the quartz base material, and then the connection between the quartz base material with the corresponding specification and the base material fixing component can be realized through the selected replaceable connecting pieces. Then, the quartz base material can be hoisted to the lifting device through the base material fixing component, and the quartz base material is hoisted above the quartz smelting furnace along the vertical direction, and then the quartz glass tube and rod production furnace can be started to process the quartz glass tube and rod with the corresponding specification by utilizing the hoisted quartz base material. In the scheme of the application, the replaceable connecting piece on the base material fixing component can be replaced according to different specifications of the quartz base material, so that the quartz base materials with different specifications can be installed through the base material fixing component, quartz glass tube rods with various specifications can be processed through the quartz base materials with different specifications, and therefore production of various quartz glass tube rods can be achieved. Meanwhile, in the application, because the quartz base metal is not in contact with the inner wall of the crucible in the blanking process, the pollution of the crucible to the quartz glass tube rod is avoided, the purity of the produced quartz glass tube rod is improved, and a pollution-free product and a product with higher internal and external quality and better performance can be obtained. On the other hand, in the production and processing process of the quartz glass tube rod, raw materials for producing the quartz glass tube rod, namely the quartz base metal is not contacted with the inner wall of the crucible, so that after the production of the quartz glass tube rod production furnace is stopped, the next production can be carried out without cleaning and maintaining the quartz furnace with large workload, and thus, the quartz glass tube rod production furnace can carry out discontinuous production at any time in the production process without continuous production, and small-batch discontinuous production and rapid transformation of the quartz glass tube rod can be realized. In addition, the quartz base material with corresponding weight can be selected according to the quantity requirements of products such as quartz glass tubes, rods and the like, so that the accurate quantity production of the quartz glass tubes, the rods and the like can be realized.
In addition, the temperature measuring system of the quartz glass tube rod production furnace has high precision (can control +/-0.5 ℃) and can realize the adjustment of the temperature from 1950 ℃ to 2100 ℃, so that the temperature control interval is large, therefore, the quartz glass tube rod production furnace and the production method of the raw quartz glass tube rod provided by the application can process quartz base materials with the diameter of 50-350mm and the weight of 10-200KG, the produced quartz glass tube has wide production specification range and strong applicability, and the requirements of the existing quartz glass tube rods for semiconductors and optical fibers can be met.
It should be understood that the statements herein reciting aspects are not intended to limit the critical or essential features of any embodiment of the invention, nor are they intended to limit the scope of the invention. Other features of the present invention will become apparent from the following description.
Drawings
The above and other features, advantages and aspects of various embodiments of the present invention will become more apparent by referring to the following detailed description when taken in conjunction with the accompanying drawings. In the drawings, like or similar reference characters designate like or similar elements, and wherein:
FIG. 1 is a schematic view showing the construction of a furnace for producing a rod of quartz glass tube according to an embodiment of the present invention;
FIG. 2 is a schematic view showing an assembled structure of a parent material fixing assembly and a quartz parent material according to an embodiment of the present invention;
FIG. 3 is a schematic flow chart of a method for producing a rod of quartz glass tubing according to an embodiment of the present invention;
FIG. 4 is a flow chart showing a method for producing a rod of quartz glass tube according to another embodiment of the present invention.
FIG. 5 is a flow chart showing a method for producing a rod of quartz glass tube in an embodiment of the present invention.
Wherein, the correspondence between the reference numbers and the component names in fig. 1 and fig. 2 is:
1 quartz melting furnace, 12 furnace body, 14 furnace cover, 16 crucible, 18 heat preservation device, 19 heating device, 2 lifting device, 3 parent metal fixing component, 32 replaceable connecting piece, 322 sealing cover, 324 replaceable tube, 34 support, 36 connecting rod, 38 graphite pin, 39 air inlet hole, 4 bearing mechanism, 5 center positioning system, 6 quartz parent metal and 7 quartz glass tube rod.
Detailed Description
To make the objects, embodiments and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are a part of the embodiments of the present invention, but not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
A production furnace for a silica glass tube rod and a production method for a silica glass tube rod 7 according to an embodiment of the present invention will be described with reference to fig. 1 to 5.
As shown in fig. 1, a first aspect of the present invention provides a furnace for producing a quartz glass tube rod, comprising a quartz melting furnace 1, a lifting device 2, a base material fixing assembly 3, a receiving mechanism 4 and a central positioning system 5, wherein:
the elevating device 2 is installed above the quartz melting furnace 1 to be elevated and adapted to drive the quartz base material 6 to descend.
The base material fixing component 3 can be installed on the lifting device 2 after being connected with the quartz base material 6 so as to hoist the quartz base material 6 above the quartz melting furnace 1 along the vertical direction, the base material fixing component 3 comprises a replaceable connecting piece 32 used for being connected with the quartz base material 6, and the replaceable connecting piece 32 can be correspondingly replaced according to the specification of the quartz base material 6, so that the production furnace can replace the quartz base material 6 with different specifications according to actual requirements for processing.
The receiving mechanism 4 is positioned below the quartz melting furnace 1 and is used for receiving the quartz glass tube rod 7 output from the bottom of the quartz melting furnace 1 and slowly drawing out the quartz glass tube rod 7 at a constant speed. When drawing the quartz glass tube rod 7, the friction force between the bearing mechanism 4 and the quartz glass tube rod 7 can be changed, thereby adjusting the specification of the quartz glass tube rod 7. Specifically, the frictional force between the receiving mechanism 4 and the quartz glass tube rod 7 can be changed by changing the rotational speed of the traction wheel of the receiving mechanism 4.
The centering system 5 is installed between the quartz melting furnace 1 and the receiving mechanism 4, and the center of the centering system 5 is aligned with the center of the discharging channel of the quartz melting furnace 1. The formed quartz glass tube rod 7 can be accurately positioned by the center positioning system 5, so that the dimensional accuracy of the produced quartz glass tube rod 7 is ensured.
According to the quartz glass tube rod production furnace provided by the embodiment of the invention, when quartz glass tube rods 7 with different specifications are processed, the adaptive quartz base material 6 can be selected, then the replaceable connecting pieces 32 with different specifications can be selected according to the quartz base material 6, and then the connection between the quartz base material 6 with the corresponding specification and the base material fixing component 3 can be realized through the selected replaceable connecting pieces 32. Then, the quartz base material 6 can be hoisted to the lifting device 2 through the base material fixing component 3, and the quartz base material 6 is hoisted above the quartz melting furnace 1 along the vertical direction, and then the quartz glass tube and rod production furnace can be started to process the hoisted quartz base material 6 into a quartz glass tube and rod with corresponding specification. In the solution of the present application, since the replaceable connecting member 32 on the base material fixing assembly 3 can be replaced according to different specifications of the quartz base material 6, the quartz base material 6 with different specifications can be installed through the base material fixing assembly 3, so that quartz glass tube rods 7 with various specifications can be processed through the quartz base material 6 with different specifications, thereby realizing the production of various quartz glass tube rods 7. Meanwhile, in the application, the quartz parent metal 6 is not contacted with the inner wall of the crucible 16 in the blanking process, so that the pollution of the crucible 16 to the quartz glass tube rod 7 is avoided, the purity of the produced quartz glass tube rod 7 is improved, and pollution-free products and products with higher internal and external quality and better performance can be obtained. On the other hand, in the production and processing process of the quartz glass tube rod, the raw materials for producing the quartz glass tube rod, namely the quartz base metal 6 is not contacted with the inner wall of the crucible 16, so that after the production of the quartz glass tube rod production furnace is stopped, the next production can be carried out without cleaning and maintaining the quartz melting furnace 1 with large workload, and thus, the quartz glass tube rod production furnace can carry out discontinuous production at any time in the production process without continuous production, and thus, the small batch discontinuous production and rapid transformation of the quartz glass tube rod 7 can be realized. In addition, the quartz base material 6 with corresponding weight can be selected according to the quantity requirements of products such as quartz glass tubes, rods and the like, so that the production of accurate quantities of quartz glass tubes, rods and the like can be realized.
The specification production capacity of the quartz glass tube rod production furnace provided by the application and the prior art quartz glass tube rod production capacity of the furnace are shown in the table I. Wherein the unit of each dimension in table one is mm.
The first table shows that the quartz glass tube rod production furnace has wider specification production range and higher tolerance dimension control capability, can perform compatible production of various products, and avoids the problem that the conventional furnace needs a plurality of furnaces to meet the specification range of the upper table, thereby causing transformation transition production waste.
The comparison table of the limiting purity of the quartz glass tube rod produced by the present application and the quartz glass tube rod produced by the prior scheme is shown in table two. Wherein, the unit of the content of each impurity in the second table is ppb.
Watch two
From the second table, the purity of the quartz glass tube rod produced by the quartz glass tube rod production furnace and the quartz glass tube rod production method provided by the application is higher, and the quartz glass tube rod can meet the application field of high-end quartz glass.
In the above embodiment, as shown in fig. 2, the replaceable coupling member 32 is preferably connected to the upper end of the quartz base material 6 by insertion, and is fixed by the graphite pin 38 after the insertion. Specifically, the replaceable connecting member 32 and the quartz base material 6 are provided with pin holes respectively at the insertion portions, and after the replaceable connecting member 32 is inserted into the upper end of the quartz base material 6, the graphite pin 38 can be inserted into the pin holes to fix the replaceable connecting member 32 and the quartz base material 6.
In this embodiment, the fixing between the interchangeable attachment member 32 and the quartz base material 6 is performed by the graphite pin 38, which reduces metal contamination of the quartz glass rod 7 by other fixing members such as metal pins.
Further preferably, as shown in fig. 2, a first pin hole adapted to the graphite pin 38 is formed in the replaceable connector 32, a second pin hole adapted to the graphite pin 38 is formed in one end of the quartz base material 6 inserted into the replaceable connector 32, and after the quartz base material 6 is inserted into the replaceable connector 32 and fixed by the graphite pin 38, high-temperature casting materials are filled between the graphite pin 38 and an inner wall of the first pin hole and between the graphite pin 38 and an inner wall of the second pin hole. Preferably, the graphite pin 38 is made of a high purity graphite material.
In this embodiment, the replaceable connecting member 32 and the quartz base material 6 can be fixed more firmly by a high-temperature poured material, so that after the quartz base material 6 is connected with the base material fixing component 3, the quartz base material 6 is not easy to shake, and thus, the center positioning after the quartz base material 6 is installed is more accurate, so that the melting effect is more uniform when the quartz base material 6 is heated and melted, and the quality of the formed quartz glass tube rod 7 is better.
In any of the above embodiments, preferably, as shown in fig. 2, the parent material fixing assembly 3 further includes: a bracket 34 and a connecting rod 36, the bracket 34 being capable of being placed or fixedly mounted on the lifting device 2, one end of the connecting rod 36 being fixedly mounted on the bracket 34, the replaceable connecting member 32 being detachably mounted on the other end of the connecting rod 36, the connecting rod 36 being a hollow tube with an open lower end, the replaceable connecting member 32 including a replaceable tube 324 in sealed communication with the connecting rod 36 and a closing cap 322 mounted at the junction of the replaceable tube 324 and the connecting rod 36; the air inlet 39 is arranged on the bracket 34 or the connecting rod 36 and is communicated with the inside of the connecting rod 36 in a sealing way; the quartz base material 6 has a solid structure or a hollow structure, and when the quartz base material 6 has the hollow structure, one end of the quartz base material 6 has an open structure and is in sealed communication with the connecting rod 36 through the replaceable pipe 324, and the other end of the quartz base material 6 has a closed structure.
In this embodiment, the base material fixing unit 3 includes a bracket 34, a connecting rod 36, an exchangeable attachment 32, and an air inlet 39, and the bracket 34 is used for mounting and fixing with the lifting device 2. And the connecting rod 36 is used to effect the mounting of the interchangeable attachment piece 32 on the bracket 34. The replaceable connecting member 32 includes a closing cap 322 and a replaceable tube 324, a through gas passage is formed between the connecting rod 36 and the replaceable tube 324, a lower end of the replaceable tube 324 is connected to the hollow quartz base material, and gas can be introduced into the hollow quartz base material through a top portion of the connecting rod 36 to adjust a pressure in the hollow quartz base material. And the closing cap 322 is used for sealing the feed passage of the quartz crucible during the lowering of the quartz parent material 6 to prevent the pressure in the crucible from leaking. The air inlet holes 39 are used to introduce outside air directly into the connecting rod 36 or indirectly into the connecting rod 36 through the bracket 34. When the quartz parent material 6 is a hollow structure, the gas source connected to the gas inlet 39 can be opened to introduce gas into the hollow quartz parent material 6, and the melting rate of the quartz parent material 6 can be controlled by reasonably controlling the pressure and gas flow rate in the quartz parent material 6, so that the diameter of the formed quartz glass tube rod 7 can be controlled in combination with the drawing speed of the quartz glass tube rod 7. When the quartz base material 6 is of a solid structure, the gas source connected to the gas inlet 39 may not be opened, or the gas inlet 39 may not be connected to the gas source.
Preferably, the connecting rod 36 is threadedly connected to the interchangeable attachment member 32. The upper end of the connecting rod 36 is provided with a screw thread, and the connecting rod 36 is installed in the screw hole of the bracket 34 through the screw thread.
Preferably, as shown in fig. 2, the connecting rod 36 is a stepped tube having a thin upper portion and a thick lower portion.
In any of the above embodiments, preferably, as shown in fig. 1, the quartz furnace 1 includes: the furnace comprises a furnace body, wherein the furnace body comprises a furnace body 12 and a furnace cover 14, a crucible 16 is arranged in the furnace body 12, a heat-insulating cover is arranged at a crucible opening of the crucible 16, a feeding channel penetrating through the furnace cover 14 and the heat-insulating cover is arranged at the top of the furnace body, and a discharging channel penetrating through the bottom of the furnace body 12 and the bottom of the crucible 16 is arranged at the bottom of the furnace body; and a heating device 19 installed inside the furnace shell 12 and outside the crucible 16 for heating the crucible 16.
Further preferably, the quartz melting furnace 1 further comprises a heat preservation device 18, which is arranged around the crucible 16 and comprises a heat preservation cover corresponding to the crucible opening of the crucible 16, a heat preservation side structure corresponding to the side wall of the crucible 16 and a heat preservation bottom structure arranged at the bottom of the crucible 16. The heat loss in the crucible 16 can be prevented by the heat insulating device 18, so that the heating efficiency of the quartz production furnace can be improved.
Further preferably, the graphite pin 38 and the heating device 19 are both made of a high purity graphite material. This makes it possible to avoid contamination of the quartz preform 6 and thus of the quartz glass tube rod 7.
Further preferably, the heat-retaining cover is made of a mixture of alumina and quartz sand. Therefore, the heat insulation performance can be enhanced, and the cost can be reduced.
Further preferably, the heating device 19 is an inductive heating device or a resistive heating device. Of course, the heating device 19 may be configured to be infrared heating or the like according to actual needs.
Further preferably, the furnace for producing a quartz glass tube rod further comprises: and a temperature control system connected to the heating device 19, for controlling the temperature in the crucible 16 by controlling the heating power of the heating device 19. The temperature control precision of the temperature control system is +/-0.5 ℃, so that very accurate temperature control can be realized, and the quartz base material with larger diameter span and larger weight difference can be processed. Particularly, the quartz production furnace can process quartz parent metal with the diameter of 50-350mm and the weight of 10-200KG, so that the production specification range of the produced quartz glass tube is very wide, and the applicability is very strong.
Further preferably, the furnace for producing a quartz glass tube rod further comprises: a pressure control system including a gas fill port and a gas vent port connected to the interior of the crucible 16, by which the pressure within the crucible 16 can be regulated. The pressure in the furnace and the gas flow in the furnace, that is, the pressure in the crucible 16 and the gas flow in the crucible 16, can be adjusted by the pressure control system, and the heating and melting process of the quartz parent metal 6 can be controlled by reasonably controlling the pressure in the furnace and the gas flow in the furnace, so that the diameter or the wall thickness of the produced quartz glass tube rod 7 can be adjusted.
Further preferably, the furnace for producing a quartz glass tube rod further comprises: and a cooling system installed between the furnace shell 12 and the crucible 16 for cooling the inside of the furnace to enhance heat dissipation from the inside of the furnace.
In the above embodiment, the centering system 5 is preferably a high precision servo traction system. The quartz glass tube rod production furnace also comprises a pressure stabilizing system for inputting gas into the hollow quartz parent metal, and the gas source of the pressure stabilizing system is a nitrogen or helium gas source.
As shown in fig. 3, a second aspect of the present invention provides a method for producing a silica glass tube rod, comprising:
s302, determining a matched quartz base material according to a quartz glass tube rod with a required specification, selecting a replaceable connecting piece according to the determined quartz base material, installing the quartz base material on a base material fixing component through the selected replaceable connecting piece, and installing the base material fixing component on a lifting device above a quartz smelting furnace so as to vertically hoist the quartz base material above the quartz smelting furnace;
s304, heating the temperature in the quartz furnace to a preset temperature range matched with the determined quartz base material, keeping the temperature, introducing gas into the quartz furnace to adjust the pressure in the quartz furnace to a preset pressure condition matched with the determined quartz base material, and keeping the pressure;
s306, after the temperature and the pressure in the quartz smelting furnace are adjusted, the quartz base material descends and enters the quartz smelting furnace from a feeding channel of the quartz smelting furnace, then the quartz base material passes through a heating area of the quartz smelting furnace and is fully melted, and the quartz base material is output from a discharging channel of the quartz smelting furnace under the action of gravity after being fully melted;
s308, the quartz glass tube rod output by the discharge channel of the quartz smelting furnace moves downwards by gravity and enters a receiving mechanism arranged below the quartz smelting furnace, and the receiving mechanism enables the quartz glass tube rod to be slowly pulled out at a constant speed by extrusion friction force;
s310, the pulling-out speed of the quartz glass tube rod is changed by adjusting the extrusion friction force between the bearing mechanism and the quartz glass tube rod, and the quartz glass tube rod with the required specification is obtained.
In the above embodiment, it is preferable that the temperature of the quartz furnace is raised to 1950 to 2100 ℃ at a rate of 15 to 70KW/10min during the heating of the quartz furnace, and then the temperature inside the quartz furnace is maintained at 1950 to 2100 ℃. The arrangement can realize the differential accurate temperature control in the quartz melting furnace, thereby being capable of processing quartz base materials of various specifications into quartz glass tube rods of different specifications.
In the above embodiment, preferably, the method for producing a silica glass tube rod further includes: when the extrusion friction force between the receiving mechanism and the quartz glass tube rod is adjusted to change the pulling rate of the quartz glass tube rod, the rotating speed of the traction wheel of the receiving mechanism is adjusted to be 500-.
In the above embodiment, preferably, the outer diameter of the quartz glass tube rod of the desired specification is 2mm to 100mm, the wall thickness of the quartz glass tube rod of the desired specification is 0.5mm to 14mm, the diameter of the quartz parent material is 50mm to 350mm, and the weight is 10KG to 200 KG.
The preset pressure conditions include: the pressure in the quartz furnace is 0.1-0.6MPa, and the gas flow is 0.8-1.5m3/hr。
In the above embodiment, it is preferable that the lowering speed of the quartz base material is 2 to 10 mm/min.
According to the production method of the quartz glass tube rod provided by the embodiments of the invention, when the quartz glass tube rod with different specifications is processed, the adaptive quartz base material can be selected, then the replaceable connecting piece with different specifications can be selected according to the quartz base material, and then the connection between the quartz base material with the corresponding specification and the base material fixing component can be realized through the selected replaceable connecting piece. Then, the quartz base material can be hoisted to the lifting device through the base material fixing component, and the quartz base material is hoisted above the quartz smelting furnace along the vertical direction, and then the quartz glass tube and rod production furnace can be started, and the processes of heating and pressurizing, quartz glass tube and rod forming, quartz glass tube and rod drawing and quartz glass tube and rod size adjusting are sequentially completed. The hoisted quartz base material can be processed into a quartz glass tube rod with a corresponding specification through the process. In the process of producing the quartz glass tube rod, the pressure, the gas flow and the temperature in the furnace can be reasonably controlled, so that the quartz base material can be formed into the quartz glass tube rod with the required specification after being melted. In the scheme of the application, the replaceable connecting piece on the base material fixing assembly can be replaced according to different specifications of the quartz base material, so that the quartz base materials with different specifications can be hoisted to the lifting device through the base material fixing assembly, and quartz glass tube rods with various specifications can be processed through the quartz base materials with different specifications after subsequent combination of temperature and pressure control, so that the production of various quartz glass tube rods can be realized. Meanwhile, in the application, because the quartz base metal is not in contact with the inner wall of the crucible in the blanking process, the pollution of the crucible to the quartz glass tube rod is avoided, the purity of the produced quartz glass tube rod is improved, and a pollution-free product and a product with higher internal and external quality and better performance can be obtained. On the other hand, in the production and processing process of the quartz glass tube rod, raw materials for producing the quartz glass tube rod, namely the quartz base metal is not contacted with the inner wall of the crucible, so that after the production of the quartz glass tube rod production furnace is stopped, the next production can be carried out without cleaning and maintaining the quartz furnace with large workload, and thus, the quartz glass tube rod production furnace can carry out discontinuous production at any time in the production process without continuous production, and small-batch discontinuous production and rapid transformation of the quartz glass tube rod can be realized. In addition, the quartz base material with corresponding weight can be selected according to the quantity requirements of products such as quartz glass tubes, rods and the like, so that the accurate quantity production of the quartz glass tubes, the rods and the like can be realized.
In any of the above embodiments, preferably, the required gauge of the quartz glass tube rod has a length of 0.5m to 3.5 m. The quartz glass tube rod comprises a quartz rod or a quartz tube, and therefore the length of the quartz rod or the quartz tube of the required specification is 0.5m to 3.5 m.
In any of the above embodiments, preferably, the production method in the above embodiments further includes: before the lower end of the hollow quartz parent metal is lowered to the discharge channel of the quartz furnace, the axis of the hollow quartz parent metal is aligned with the central axis of the central positioning system below the quartz furnace.
In any of the above embodiments, preferably, the method for producing a quartz glass tube rod further includes performing a preparation operation before hoisting the quartz base material, the preparation operation specifically including:
inspecting and cleaning the furnace body: checking whether the parts in the furnace are intact, cleaning the furnace chamber, removing volatile substances deposited on the heating body, ensuring that the graphite door at the bottom of the furnace is closed and the furnace cover is in place, and cleaning the periphery of the furnace body;
detecting the cooling system: opening a circulating cooling water pipe of the cooling system, and checking the pressure of circulating water to ensure that each water pipe is circulated and has no water seepage phenomenon;
the furnace door and the cover are ensured to be closed, the furnace chamber is purged by air supply, and the purging time is more than 30 minutes. Wherein, in the blowing process, the pressure in the furnace is adjusted to be 0.2-0.5MPa, and the flow is 1-3m3And/hr. The cleanliness in the furnace can be ensured by this step. Meanwhile, in order to protect the temperature measuring probe, in the purging process, the pressure around the temperature measuring hole is 0.1-0.3MPa, and the flow around the temperature measuring hole is 1-3m3/hr。
Wherein, after the preparation work is finished, the gas pressure and the flow are adjusted to the normal state to heat and pressurize the quartz smelting furnace, and after the heating and pressurizing, the pressure around the temperature measuring hole is 0.01-0.1MPa, and the flow is 0.1-0.8Nm3Hr, pressure in the furnace is 0.2-0.6MPa, and flow rate is 0.8-1.5m3/hr。
The following further describes a method for producing a quartz glass tube rod according to the present application, taking an example of processing a hollow quartz base material into a quartz glass tube rod, as shown in fig. 4, the method specifically comprises the following steps:
s402, determining a matched hollow quartz base material according to a quartz glass tube rod with a required specification, selecting a replaceable connecting piece according to the determined hollow quartz base material, installing the hollow quartz base material on a base material fixing component through the selected replaceable connecting piece, and installing the base material fixing component on a lifting device above a quartz smelting furnace so as to hoist the hollow quartz base material above the quartz smelting furnace along the vertical direction;
s404, heating the temperature in the quartz furnace to a preset temperature range matched with the determined hollow quartz base material, keeping the temperature, introducing gas into the quartz furnace to adjust the pressure in the quartz furnace to a preset pressure condition matched with the determined hollow quartz base material, and keeping the pressure;
s406, inputting gas into the hollow quartz parent material from the opening at the upper end of the hollow quartz parent material to adjust the pressure in the hollow quartz parent material until the drawing of the quartz glass tube rod is finished, wherein the pressure in the hollow quartz parent material can be controlled between 0.01Mpa and 0.7Mpa according to the specification of the hollow quartz parent material;
s408, after the temperature and the pressure in the quartz furnace are adjusted, the hollow quartz base material descends and enters the quartz furnace from a feeding channel of the quartz furnace, before the lower end of the hollow quartz base material descends to a discharging channel of the quartz furnace, the axis of the hollow quartz base material is aligned with the central axis of a central positioning system below the quartz furnace, the hollow quartz base material passes through a heating area of the quartz furnace and is fully melted, and the hollow quartz base material is output from the discharging channel of the quartz furnace under the action of gravity after being fully melted;
s410, the quartz glass tube rod output by the discharge channel of the quartz smelting furnace moves downwards by gravity and enters a receiving mechanism arranged below the quartz smelting furnace, and the receiving mechanism enables the quartz glass tube rod to be slowly pulled out at a constant speed by extrusion friction force;
s412, the pulling-out speed of the quartz glass tube rod is changed by adjusting the extrusion friction force between the bearing mechanism and the quartz glass tube rod, and the quartz glass tube rod with the required specification is obtained.
The method for producing a quartz glass tube rod according to the present application will be further described with reference to specific parameters, as shown in FIG. 5, and comprises:
s502, checking whether the inner parts of the furnace are intact, cleaning the furnace chamber, removing volatile matters deposited on a heating body, ensuring that a graphite door at the bottom of the furnace is closed and a furnace cover is in place, and cleaning the periphery of the furnace body; opening a circulating cooling water pipe of the cooling system, and checking the pressure of circulating water to ensure that each water pipe is circulated and has no water seepage phenomenon; ensuring that the furnace door and the cover are closed, supplying air to purge the furnace chamber for more than 30 minutes, wherein the pressure in the furnace is 0.2-0.5MPa and the flow rate is 1-3m3/hr during purgingAfter the reaction is finished, the pressure in the quartz furnace is 0.1-0.6MPa, and the gas flow is 0.8-1.5m3/hr。
The purging effect in the furnace can be ensured by controlling the pressure and the gas flow in the purging process, and the temperature measuring device can be protected by controlling the pressure and the gas flow around the temperature measuring hole in the purging process, so that the temperature measuring device is prevented from moving or deforming in the cleaning process. After purging is completed, in the quartz heating process, the influence of gas flow on temperature can be avoided by controlling the pressure and the gas flow around the temperature measuring hole, so that the temperature measurement can be more accurate.
S504, heating the quartz furnace to 1950-2100 ℃ at the speed of 15-70KW/10min and then keeping the temperature.
S506, in the heating process, determining a matched quartz base material according to the quartz glass tube rod with the required specification, selecting an exchangeable connecting piece according to the determined quartz base material, installing the quartz base material on the base material fixing assembly through the selected exchangeable connecting piece, and then installing the base material fixing assembly on a lifting device above the quartz melting furnace so as to vertically lift the quartz base material above the quartz melting furnace and enable the bottom of the quartz base material to be 100-mm away from the top of the quartz melting furnace by 700 mm.
And S508, after the temperature and the pressure in the quartz furnace are adjusted, the quartz base material is lowered at the speed of 2-10 mm/min and enters the quartz furnace from a feeding channel of the quartz furnace, then the quartz base material passes through a heating area of the quartz furnace and is fully melted, and the quartz base material is output from a discharging channel of the quartz furnace under the action of gravity after being fully melted.
S510, the quartz glass tube rod output by the discharge channel of the quartz smelting furnace moves downwards by gravity and enters a receiving mechanism arranged below the quartz smelting furnace, the rotating speed of a traction wheel of the receiving mechanism is set to be 500 plus 9780 rpm, and the quartz glass tube rod is slowly pulled out at a constant speed so as to obtain the quartz glass tube rod with the required specification.
S512, cutting the quartz glass tube rod into a quartz glass tube rod with the length of 0.5-3.5 meters.
Wherein, when producing the quartz glass tube rod with other specifications, the quartz glass tube rod can be reasonably produced according to the specifications of the quartz glass tube rodAnd setting each parameter in the steps in a range corresponding to the parameter. Specifically, table three shows some of the parameter settings in various embodiments. Wherein, the pressure unit in the third table is MPa, the flow unit is m3The unit of outer diameter and wall thickness is mm, the unit of temperature is deg.C, the heating speed is KW/10min, and the rotation speed is rpm.
In different embodiments, the temperature rise speed in the furnace can be set according to actual requirements, generally, the temperature rise speed is relatively larger as the temperature is higher, and the pressure in the furnace is larger as the diameter of the quartz base material pipe is larger. The height of the bottom of the quartz parent material from the top of the quartz melting furnace can be set between 100mm and 700mm according to requirements. In various embodiments, the various parameters of step 502 may be substantially consistent with the parameters of step 502.
The above description is only a preferred embodiment of the present application and should not be taken as limiting the scope of the present application, and it should be understood that various changes and modifications can be made by those skilled in the art without departing from the spirit and scope of the present application.
Claims (10)
1. A furnace for producing a quartz glass tube rod, comprising:
a quartz furnace;
a lifting device which can be arranged above the quartz melting furnace in a lifting way;
the base material fixing assembly can be installed on the lifting device after being connected with the quartz base material so as to hoist the quartz base material above the quartz melting furnace along the vertical direction, and comprises a replaceable connecting piece connected with the quartz base material, and the replaceable connecting piece can be replaced correspondingly according to the specification of the quartz base material;
the receiving mechanism is positioned below the quartz smelting furnace and is used for receiving the quartz glass tube rod output from the bottom of the quartz smelting furnace and slowly drawing out the quartz glass tube rod at a constant speed;
and the center positioning system is arranged between the quartz melting furnace and the bearing mechanism, and the center of the center positioning system is aligned with the center of the discharge channel of the quartz melting furnace.
2. The furnace for producing a silica glass tube rod according to claim 1,
the replaceable connecting piece is connected with the upper end of the quartz base material in an inserting mode and is fixed by a graphite pin after the replaceable connecting piece is connected in the inserting mode; and/or
The parent material fixing assembly further comprises a fixing seat, the fixing seat can be placed or fixedly installed on the lifting device, one end of the replaceable connecting piece is installed on the fixing seat, the other end of the replaceable connecting piece is connected with a quartz parent material, an air inlet channel is formed in the fixing seat, the quartz parent material is of a solid structure or a hollow structure, when the quartz parent material is of a hollow structure, one end of the quartz parent material is of an open structure and is in sealed communication with the air inlet channel through the replaceable connecting piece, and the other end of the quartz parent material is of a closed structure; and/or
The replaceable connection comprises a closure cap for closing the feed channel of the quartz furnace.
3. The furnace for producing a silica glass tube rod according to claim 2,
the replaceable connecting piece is connected with the upper end of the quartz base material in an inserting mode and fixed by a graphite pin after the replaceable connecting piece is connected in an inserting mode, a first bolt hole matched with the graphite pin is formed in the replaceable connecting piece, a second bolt hole matched with the graphite pin is formed in one end, inserted into the replaceable connecting piece, of the quartz base material, and after the quartz base material is fixed by the graphite pin in an inserting mode, high-temperature pouring materials are filled between the graphite pin and the inner wall of the first bolt hole and between the graphite pin and the inner wall of the second bolt hole.
4. The furnace for producing a silica glass tube rod according to claim 2,
the fixing base comprises a support and a connecting rod, the support can be placed or fixedly mounted on the lifting device, one end of the connecting rod is fixedly mounted on the support, the replaceable connecting piece can be detachably mounted at the other end of the connecting rod, the connecting rod is a hollow tube with an open lower end, the replaceable connecting piece comprises a replaceable tube and a sealing cover, the replaceable tube is communicated with the connecting rod in a sealing mode, the sealing cover is mounted at the joint of the replaceable tube and the connecting rod, and the air inlet channel comprises an air inlet hole formed in the support or the connecting rod.
5. The furnace according to any of claims 1 to 4, wherein the quartz furnace comprises:
the furnace body comprises a furnace body and a furnace cover, wherein a crucible is arranged in the furnace body, a heat-insulating cover is arranged at a crucible opening of the crucible, a feeding channel penetrating through the furnace cover and the heat-insulating cover is arranged at the top of the furnace body, and a discharging channel penetrating through the bottom of the furnace body and the bottom of the crucible is arranged at the bottom of the furnace body;
the heating device is arranged in the furnace body and outside the crucible and is used for heating the crucible;
wherein, quartz glass tube stick production stove still includes:
the temperature control system is connected with the heating device and controls the temperature in the crucible by controlling the heating power of the heating device;
the pressure control system comprises a gas charging port and a gas discharging port which are connected with the interior of the crucible, and the pressure in the crucible can be adjusted through the pressure control system;
and the cooling system is arranged between the furnace body and the crucible and is used for cooling the inside of the furnace body.
6. The furnace for producing a silica glass tube rod according to claim 5,
the graphite pin and the heating device are both made of high-purity graphite materials; and/or
The heat-preservation cover is made of a mixture of aluminum oxide and quartz sand; and/or
The heating device is an induction type heating device or a resistance type heating device; and/or
The temperature control precision of the temperature control system is +/-0.5 ℃.
7. A method for producing a quartz glass tube rod is characterized by comprising the following steps:
determining a matched quartz base material according to a quartz glass tube rod with a required specification, selecting a replaceable connecting piece according to the determined quartz base material, mounting the quartz base material on a base material fixing component through the selected replaceable connecting piece, and then mounting the base material fixing component on a lifting device above a quartz furnace so as to vertically lift the quartz base material above the quartz furnace;
heating the temperature in the quartz furnace to a preset temperature range matched with the determined quartz base material, then maintaining the temperature, introducing gas into the quartz furnace to adjust the pressure in the quartz furnace to a preset pressure condition matched with the determined quartz base material, and then maintaining the pressure;
after the temperature and the pressure in the quartz smelting furnace are adjusted, the quartz base material descends and enters the quartz smelting furnace from a feeding channel of the quartz smelting furnace, then the quartz base material passes through a heating area of the quartz smelting furnace and is fully melted, and the quartz base material is output from a discharging channel of the quartz smelting furnace under the action of gravity after being fully melted;
the quartz glass tube rod output by the discharge channel of the quartz smelting furnace moves downwards by gravity and enters a receiving mechanism arranged below the quartz smelting furnace, and the receiving mechanism enables the quartz glass tube rod to be slowly pulled out at a constant speed by extrusion friction force;
and changing the pulling-out speed of the quartz glass tube rod by adjusting the extrusion friction force between the bearing mechanism and the quartz glass tube rod to obtain the quartz glass tube rod with the required specification.
8. The method for producing a silica glass tube rod as claimed in claim 7, wherein when the specified silica base material has a hollow inside, an open upper end and a closed lower end, the method further comprises:
after the quartz parent material starts to be heated and melted or the quartz glass tube rod starts to be drawn, gas is input into the quartz parent material from an opening at the upper end of the quartz parent material to adjust the pressure in the quartz parent material until the drawing of the quartz glass tube rod is finished.
9. The method for producing a rod of quartz glass tube according to claim 7, further comprising:
before the lower end of the quartz parent metal is lowered to the discharge channel of the quartz furnace, the axis of the quartz parent metal is aligned with the central axis of the central positioning system below the quartz furnace.
10. A production method of a silica glass tube rod according to any one of claims 7 to 9,
when the extrusion friction force between the receiving mechanism and the quartz glass tube rod is adjusted and the pulling-out speed of the quartz glass tube rod is changed, the rotating speed of a traction wheel of the receiving mechanism is adjusted to be 500-9780 revolutions per minute according to the quartz glass tube rod with the required specification;
the preset pressure conditions include: the pressure in the quartz furnace is 0.1-0.6MPa, and the gas flow is 0.8-1.5m3/hr；
In the heating process of the quartz furnace, the temperature of the quartz furnace is heated to 1950-2100 ℃ at the speed of 15-70KW/10min, and then the temperature in the quartz furnace is maintained at 1950-2100 ℃;
the descending speed of the quartz parent metal is 2-10 mm/min;
the outer diameter of the quartz glass tube rod with the required specification is 2mm-100mm, the wall thickness of the quartz glass tube rod with the required specification is 0.5mm-14mm, the diameter of the quartz base material is 50mm-350mm, and the weight is 10KG-200 KG;
when the quartz base material is hollow, has an open upper end and a closed lower end, the pressure in the quartz base material is controlled to be between 0.01Mpa and 0.7Mpa during the heating of the quartz base material.
The length of the quartz glass tube rod with the required specification is 0.5 m-3.5 m.
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