CN108017271A - OVD bandings torch equipment and OVD bar-producing systems and its application method - Google Patents
OVD bandings torch equipment and OVD bar-producing systems and its application method Download PDFInfo
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- CN108017271A CN108017271A CN201711470721.9A CN201711470721A CN108017271A CN 108017271 A CN108017271 A CN 108017271A CN 201711470721 A CN201711470721 A CN 201711470721A CN 108017271 A CN108017271 A CN 108017271A
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- blowtorch
- banding
- ovd
- gas
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
Abstract
The present invention relates to OVD bandings torch equipment and OVD bar-producing systems and its application method, the the first banding blowtorch for being used to spray material mixed gas that wherein OVD bandings torch equipment includes being set up in parallel, for spraying the second banding blowtorch of fuel gas and the 3rd banding blowtorch for spraying oxygen, first banding blowtorch, second banding blowtorch and the 3rd banding blowtorch respectively include interconnected banding gap nozzle and gas diffusion structure, the end of gas diffusion structure is connected with corresponding source of the gas, the middle part of gas diffusion structure is equipped with n grades of gas buffer diffusion chambers, the air pressure of the inside of every ribbon blowtorch when n grades of gas buffer diffusion chambers are for making work is uniform, wherein n >=3.The OVD bandings torch equipment and OVD bar-producing systems and its application method of the present invention can meet the requirement of high deposition rate, also have the advantages that reducing both ends scraps and be not required to movable lamps.
Description
Technical field
The present invention relates to optical fiber preparing technical field, more particularly to a kind of OVD bandings torch equipment and OVD bar-producing systems and
Its application method.
Background technology
Preform mainstream technology of preparing includes PCVD methods (Dutch Philips), MCVD methods (U.S. AT＆T), OVD methods
(U.S. Coring), VAD methods (Japanese NT＆T) and APVD methods (French Alcatel), wherein OVD (pipe Outside Vapor Deposition) method are
Early 1970s are used to prepare prefabricated rod mandrel by the research and development of Corning companies, by development in science and technology OVD methods by also extensive
Applied to preparing surrounding layer.The chemical reaction mechanism of OVD processes is flame hydrolysis process, is exactly gaseous halide (SiCl4Deng)
Reacted by oxyhydrogen flame or methane flame, " loosening body " powder of a large amount of nano-scales is produced, as barred body is past along blowtorch
It is multiple mobile, powder from level to level is deposited on plug gradually until being changed into a preliminary dimension, the prefabricated rods loosening body of pattern, is deposited
After loosening body will be in high-temperature electric resistance furnace by sintering and insulation finally obtains transparent, glassy prefabricated rods, sintering temperature
Generally at 1500 DEG C or so, He, Cl are uninterruptedly passed through in stove2It can remove the impurity in barred body Deng gas.
The advantages that OVD methods prepare the advantages of " loosening body " prefabricated rods mainly sedimentation rate are fast, deposition efficiency is high, it is pre- at present
Rod processed is prepared the casing used and is mainly prepared using OVD methods, and silica " loosening body " powder is deposited in target rod, is then sintered
Into transparent glass, take target rod away and obtain cylinder glass pipe (Cylinder), this cylinder glass pipe adds by machinery is deep
Work, stretching can obtain physical dimension and can accurately match various plugs.Sedimentation rate is as the improve and perfect of blowtorch is up to 200g/
Min, average deposition efficiency is up to 60%.And the improvement and optimization of modified technique above all blowtorch, initial OVD methods prepare light
Fine prefabricated rods only have a blowtorch, develop into more than two row's blowtorch, and a row, two rows of sprays are developed into by one group of single blowtorch
Lamp, this has been considerably improved deposition efficiency.And the optimization of Blowtorch structure, the uniformity of flame can be improved so that silica
" loosening body " powder is distributed the demand for more uniformly also meeting prefabricated rods refractive index accurate distribution in barred body, and it is heavy to improve
Product efficiency, the blowtorch gas flow after optimization is more smooth, will not produce flame conflict and cause blowtorch remained on surface silica
Particle, and the accumulation of remaining silica dioxide granule may seriously cause that blowtorch gas is obstructed, flame instability is uneven.Banding
The research and development of lamp device, directly increase spraying length, add sedimentation rate, however bring flame be difficult to control, uniformity
The correlative study such as the difficult points such as difference, United States Patent (USP) US5211732, US6047564, US4203553, US6837076 describes difference
Striplight designing scheme, wherein Corning Incorporated's patent US5211732 devises the blowtorch of more nozzles of a row, and the device is obvious
Than single lamp and single group lamp sedimentation rate soon and with the reduction of blowtorch spacing, porous preform effective length is added.Heraeus
What patent US6047564 was introduced is also row's Assembled lamp, be the patent describe reciprocal by varying target rod velocity of rotation and blowtorch
Movement velocity reduces barred body surface temperature difference, point temperature is sprayed by varying torch flame to improve barred body, by varying spray
Lamp and target rod distance spray point temperature difference to reduce barred body.Three groups of nozzles of patent US4203553 designs are angled, in
Between nozzle supply flame, two side nozzles provide silicon tetrachloride raw material, designer solve blowtorch surface silica dioxide it is remaining lack
Point is still since lamp body length is only 15 centimetres so can not be applied to prepare longer prefabricated rods.Corning Incorporated's patent
US6837076 has invented a kind of wide face blowtorch, which has used one group of buffering grid to carry out gas dispersion molecule, and nozzle uses grid
Venthole, blowtorch members are made of pure quartz glass, and lamp body micro-structure can provide the loosening body of convergence to reach
Preliminary dimension, micro-structure can control fuel gas and precursors to prepare preform.
The OVD method manufacturing process of single blowtorch is simple, and settled density is relatively uniform, but sedimentation rate is low.By a lamp
Increase to multi-lamp or row's blowtorch governing factor is relative complex, significantly improve deposition efficiency, but be reduction of loosening body
Deposition rod relative efficiency length.And the design of planar blowtorch solves the problems such as gas homogeneity using microcellular structure, do not have yet
Solve the technological difficulties of more than the 1 meter longer loosening body rod of manufacture.Preform, which is prepared, herein for OVD methods devises one kind newly
Clever banding blowtorch, the blowtorch had both met high deposition rate or had had the advantages that reducing both ends scraps and be not required to movable lamps.
The content of the invention
The purpose of the present invention is to solve at least one of problem above, the present invention provides a kind of OVD bandings torch equipment
With OVD bar-producing systems and its application method.
According to an aspect of the present invention, there is provided a kind of OVD bandings torch equipment, including be set up in parallel be used for spray original
Expect that the first banding blowtorch, the second banding blowtorch for spraying fuel gas and the 3rd banding for spraying oxygen of gaseous mixture spray
Lamp, the first banding blowtorch, the second banding blowtorch and the 3rd banding blowtorch respectively include interconnected banding gap nozzle and
Gas diffusion structure, the end of gas diffusion structure are connected with corresponding source of the gas, and the middle part of gas diffusion structure is equipped with n grades of gases
Diffusion chamber is buffered, the air pressure of the inside of every ribbon blowtorch when n grades of gas buffer diffusion chambers are for making work is uniform, wherein n
≥3。
Wherein, n grades of gas buffer diffusion chambers include n bar gas buffer passages with for connecting adjacent two gas buffer pipes
The shunting layer in road, gas buffer passage and shunting layer are arranged alternately in the short transverse of n grades of gas diffusion chambers, gas buffer passage
Width be more than the thickness of shunting layer, the volume of n bar gas buffer passages drops successively along source of the gas to the direction of banding gap nozzle
It is low.
Wherein, OVD bandings torch equipment further includes for the 4th banding blowtorch of ejection barrier gas and for spraying oxygen
5th banding blowtorch of gas, the second banding blowtorch, the 3rd banding blowtorch, the quantity of the 4th banding blowtorch and the 5th banding blowtorch are equal
For two, and distributing order is once the 5th banding blowtorch a, the second banding blowtorch a, the 3rd banding blowtorch a, the 4th banding blowtorch
A, the first banding blowtorch, the 4th banding blowtorch b, the 3rd banding blowtorch b, the second banding blowtorch b, the 5th banding blowtorch b.
Wherein, the outlet angle of the first banding blowtorch and two the 4th banding blowtorch is consistent, two the 3rd banding sprays
The outlet angle of lamp, two the second banding blowtorch and two the 5th banding blowtorch is inclined to first with 2~8 ° of relative angle respectively
The direction of banding blowtorch.
Wherein, material mixed gas include raw material vapor and auxiliary gas, and raw material vapor includes silica-base material steam or germanium
At least one of sill steam, auxiliary gas include at least one of hydrogen, methane or oxygen, fuel gas include hydrogen and
Methane, barrier gas include inert gas.
Wherein, OVD bandings torch equipment further includes cooling passage, narrow close to banding between every two neighboring banding blowtorch
The side of seam nozzle is equipped with cooling passage.
Wherein, gas buffer passage is circular pipe, and the pipe diameters of n bar gas buffer passages is along source of the gas to banding slit
The direction of nozzle is sequentially reduced；The height of gas buffer diffusion chamber is 1~2 meter, n=3.
According to the second aspect of the invention, there is provided a kind of OVD bar-producing systems for including the OVD banding torch equipments, including
Reaction cavity, OVD bandings torch equipment, target rod transmission and weight test system, the exhausting for controlling pressure difference in reaction cavity
System, control reponse system, removable camera, infrared temperature sensor and target rod, OVD bandings torch equipment, target rod transmission
It is respectively positioned on weight test system, removable camera, infrared temperature inductive pick-up and target rod in reaction cavity, moves and shine
Camera and infrared temperature sensor are by controlling reponse system to control to adjust feedstock amount and the air inlet of OVD banding torch equipments
The exhausting amount of amount and exhausting system, and then control the surface evenness of loose rod, shape and size.
According to the third aspect of the invention we, there is provided a kind of OVD rods method, comprises the following steps：
The fabrication schedule of set porous preform is inputted in reponse system is controlled.
Banding blowtorch produces the uniformly ribbon flame such as one, and precursors occur thermal-flame hydrolysis, obtain white
Color powdered silica, and be sprayed in the center target rod of rotation.
The temperature of the spraying point of infrared temperature inductive pick-up moment scanning porous preform, when temperature and control temperature difference
It is different exceed allow error range when, by varying air inflow finely tune flame size.
The appearance of removable camera moment scanning porous preform, when barred body size and the difference of the uniformity and pre-set dimension
It is different exceed allow error range when, by varying inlet amount, air inflow fine setting loosening body precasting bar appearance.
The invention has the advantages that：
1st, blowtorch need not move back and forth, and reduce section to greatest extent and scrap.Since blowtorch shape is a whole banding spray
Lamp, in the whole plug effective length of blowtorch all standing, therefore can be reduced since what blowtorch was brought scraps to greatest extent.
2nd, the design of blowtorch n grades of gas buffer passages, flame uniformity is preferable, the loose rod outside diameter uniformity of deposition compared with
It is good.Different from traditional blowtorch feeding system, it is each that traditional blowtorch is that independent mass flow controller and deposition formulation individually control
Blowtorch, since the reasons such as blowtorch cause loose rod outside diameter can not be made up in theory after there is defect.
3rd, design principle is simple, and stabilization of equipment performance is preferable, easy to maintain.By CCD camera, weight test system and blowtorch
Three mechanism cooperating complementaries so that the loose rod uniformity of deposition is preferable, due to less use quality flow controller, sets
Standby stability and convenient later maintenance.
Brief description of the drawings
By reading the detailed description of hereafter preferred embodiment, it is various other the advantages of and benefit it is common for this area
Technical staff will be clear understanding.Attached drawing is only used for showing the purpose of preferred embodiment, and is not considered as to the present invention
Limitation.And in whole attached drawing, identical component is denoted by the same reference numerals.In the accompanying drawings：
Fig. 1 shows the deposition schematic diagram of more blowtorch of general implementation；
Fig. 2 shows the deposition schematic diagram of row's blowtorch of general implementation；
Fig. 3 shows the sectional view of the OVD banding torch equipments of the first embodiment according to the present invention；
Fig. 4 shows the sectional view of the OVD banding torch equipments of second of embodiment according to the present invention；
Fig. 5 shows the top view of the OVD banding torch equipments of embodiment according to the present invention；
Fig. 6 shows the sectional view of the OVD banding torch equipments of embodiment in the 3rd according to the present invention；
Fig. 7 shows the schematic diagram of the OVD bar-producing systems of the OVD banding torch equipments of embodiment according to the present invention.
Embodiment
The illustrative embodiments of the disclosure are more fully described below with reference to accompanying drawings.Although this public affairs is shown in attached drawing
The illustrative embodiments opened, it being understood, however, that may be realized in various forms the disclosure without the reality that should be illustrated here
The mode of applying is limited.Conversely, there is provided these embodiments are to be able to be best understood from the disclosure, and can be by this public affairs
The scope opened completely is communicated to those skilled in the art.
It is blowtorch deposition that early stage OVD method, which prepares preform patent, and governing factor is relatively fewer, sedimentation rate compared with
Low, settled density is relatively uniform, later by improving and optimizing the combination blowtorch of one group of formation or row's banding so significantly
Sedimentation rate is improved, as depicted in figs. 1 and 2, the deposition length of more blowtorch and row's blowtorch is efficient as follows：
Effective length (more small cup blowtorch)=L- (n-1) * d
Total length (more blowtorch)=L+ (n-1) * d
Effective percentage (more blowtorch)=[L- (n-1) * d]/[L+ (n-1) * d]
Effective length (row's blowtorch)=(n-1) * d
Total length (row's blowtorch)=(n+1) * d
Effective percentage (row's blowtorch)=(n-1)/(n+1)
The deposition length effective percentage of one row's blowtorch increases as blowtorch quantity increases, it is assumed that and blowtorch quantity n is infinity,
So effective percentage is just close to 1, it is possible to if the blowtorch that imagination makes a ribbon slit can be thought in certain length
Upper blowtorch quantity n is infinity, and the effective percentage of deposition length has just been significantly greatly increased in this, and this patent devises one using this innovative point
The novel banding blowtorch of kind.The blowtorch includes banding slit venthole, since blowtorch banding gap nozzle length is more than 1 meter, is
Ensure that even flame requires the uniformity of venthole gas, a kind of three-level gas caching disperser of Patent design, base
This meets that gas is stablized relatively in 1-2 meters of length in the stream pressure of gas outlet.
As described above, this patent describes a kind of novel banding OVD torch equipments, using the device can quickly,
Efficiently prepare loose silica porous preform.The technology can be used for preparing Single mode communication optical fiber, can also prepare
Multimode fibre, the technology can be used for preparing prefabricated rods sandwich layer, covering, and the component of prefabricated rods can also be manufactured separately.Work as use
The device, which prepares loosening body sandwich layer loose during prefabricated rods sandwich layer, should include the higher SiO 2 powder of uniformly mixed purity
With the dopant powder such as germanium dioxide etc., when depositing surrounding layer, loosening body is usually the higher SiO 2 powder of purity.Remove
Beyond this, when being used to prepare bending loss insensitive single-mode fiber G.657A, it can be changed according to loose rod demand tapered
Index distribution section.
As shown in figure 3, torch equipment can be used for producing silica loosening body by flame hydrolysis, it is loose to deposit
Prefabricated rods, torch equipment include multiple banding blowtorch, and each banding blowtorch mainly includes five parts, component 210,211,212,
213rd, 214,215,216,217,218 be blowtorch first order gas buffer passage, component 219,220,221,222,223,224,
225th, 226,227 be blowtorch second level gas buffer passage, and component 228,229,230,231,232,233,234,235,236 is
Third level gas buffer passage, component 205 are silyl starting material steam and oxygen mixture banding gap nozzle, component 204,206
For inert gas group trapping banding gap nozzle, component 203,207 is blowtorch internal oxygen banding gap nozzle, component 202,
208 be that fuel gas banding gap nozzle, the components 201,209 such as hydrogen or methane are blowtorch external oxygen banding gap nozzle.Silicon
Based raw material steam and oxygen mixture can pass sequentially through component 232,223,214,205, and the inert gas such as argon gas can pass sequentially through
Component 231,222,213,204 and pass sequentially through 233,224,215,206, internal oxygen can pass sequentially through component 230,220,
211st, 202 and pass sequentially through component 234,225,216,207, hydrogen or methane gas can pass sequentially through component 229,220,
211st, 202 and 235,226,217,208.The quantity of the gas buffer passage of each blowtorch of this torch equipment is n bars, can basis
The specific depth of blowtorch and deposition requirement are adjusted, under normal conditions n >=3.
In the present embodiment, n=3, three-level gas buffer passage design the quantity for not only reducing gas flow controller
And it is more prone to maintain and safeguards by the torch equipment of pneumatics conceptual design.In addition, banding blowtorch length can be 1~2
Rice or so, the pressure that outlet is kept in 1~2 meter of long distance are uniformly a very big challenges, and the present invention is delayed by three-level
Flushing device ensure that the outlet pressure uniformity of venthole, and the design of banding blowtorch is on the one hand to increase sedimentation rate, separately
Outer one side reduces both ends loss.The material for preparing blowtorch can be aluminium alloy or titanium alloy, can be partly high purity quartz
Glass.
Reactant or fuel, oxygen material enter gas diffusion structure and travel further into n grades of gases and delay by material inlet
Diffusion chamber is rushed, each n grades of gas buffer diffusion chamber includes shunting layer and n bar gas buffer passages, and shunting layer is three-dimensional cavity knot
Structure, can effective diffusion gas molecule, wherein three gas buffer passages first gas buffer channel volume (228,229,
230th, 231,232,233,234,235,236) be more than Article 2 gas buffer passage (219,220,221,222,223,224,
225th, 226,227) it is more than Article 3 gas buffer passage (210,211,212,213,214,215,216,217,218).
OVD bandings torch equipment include be set up in parallel the first banding blowtorch, the second banding blowtorch, the 3rd banding blowtorch,
4th banding blowtorch and the 5th banding blowtorch.Wherein, the first banding blowtorch includes component 232,223,214,205, silyl starting material
Steam and oxygen mixture can pass sequentially through the ratio of component 232,223,214,205, silyl starting material steam and oxygen mixture
Controlled by the fluid flowmeter and gas flow meter in the gas diffusion structure of the first banding blowtorch；4th banding blowtorch
For two, respectively including component 231,222,213,204 and component 233,224,215,206, the inert gas such as argon gas can be successively
By component 231,222,213,204 and pass sequentially through 233,224,215,206；3rd banding blowtorch is two, is included respectively
Component 230,220,211,203 and component 234,225,216,207, internal oxygen can pass sequentially through component 230,220,211,
203 and pass sequentially through component 234,225,216,207；Second banding blowtorch be two, respectively including component 229,220,211,
202 and component 235,226,217,208, hydrogen or methane gas can pass sequentially through component 229,220,211,202 and 235,
226、217、208。
Wherein after silicon substrate raw material and oxygen mix, mixed gas is expanded by level-one secondary gas buffer channel body and shunting
Layer is dissipated to third level gas buffer passage, and gas pressure on same cross section is uniform, finally uniform from banding gap nozzle 205
Spray.Banding gap nozzle 202,208 is the fuel gas such as hydrogen, and diffusion is as above shunted by three-level gas buffer passage and three times
Layer, final fuel gas produce the water vapour of big calorimetric and abundance with oxygen vigorous reaction.Gaseous silicon of ejection etc. reacts
Presoma, is generated loosening body particle by flame hydrolysis (see formula 1,2) and is deposited on the center target rod rotated with given pace
On.The inert gases such as the argon gas that banding gap nozzle 204,206 sprays, on the one hand it is to maintain track raw material that the effect of argon gas, which is,
Without interruption, still further aspect is to protect loosening body air-flow to be deposited not around slit 205, and banding gap nozzle 201,209 sprays
On the one hand on the other hand the oxygen gone out can protect flame to be done from what external environment air-flow changed as the reactant of fuel gas
Disturb.
Hydrolysis：
Formula 1：SiCl4+O2+2H2=SiO2+4HCl
Formula 2：GeCl4+O2+2H2=GeO2+4HCl
Fig. 5 blowtorch for banding gap nozzle 201,202,203,204,205,206,207,208 and, 209 top plan view
Figure.Blowtorch length can be selected according to plug effective length, avoid the problems such as water peak taken over the baton and brought is higher.
Fig. 4 is the another embodiment of this technology, and the program optimizes the details of blowtorch, adds to blowtorch temperature
The cooling passage of protection is spent, wherein circulation canal 311,313,315,317,319,321,323,325,327 can be constant temperature
Recirculated water or other constant temperature coolants, constant temperature coolant can keep blowtorch lamp body to be maintained at a suitable temperature range
It is interior, with prevent due to blowtorch work long hours temperature sharply increase cause slit deformation cause even flame be deteriorated.After optimization
Blowtorch air inlet stability be better than the former, possess self-regulating function, gas buffer passage easily facilitates practical operation.
Fig. 6 is the blowtorch surface after further optimization, and banding gap nozzle 204,205,206 keeps relative position and angle
Constant, banding gap nozzle 201,202,203,207,208,209 is inclined to medium line with about 2~8 ° of relative angle respectively, this
The passage design of sample can produce the flame of convergence, and the flame of convergence is conducive to the generation of hydrolysis, the loosening body fluid of generation
Do not disperse, and scattered loosening body fluid is not easily because temperature decrease has viscosity to cause effectively be deposited on rotating target rod
On.510 and 511 constant temperature cooling passages are further increased after optimization, ensure blowtorch in rational temperature range (110~200
DEG C) work.
The torch equipment prepares preform applied to horizontal OVD methods, if Fig. 7 is rod platform schematic diagram processed, including spray
Lamp device 604, target rod transmission and weight test system 603, exhausting system 601, control reponse system 608, removable CCD photograph
Machine 605, infrared temperature inductive pick-up 606 and material air pipe 607, wherein, material air pipe 607 is in each banding slit spray of blowtorch
Mouth material gas source, multi-pipeline supply can pass through feedback regulation even flame.
Being inputted first in reponse system is controlled and both customize rod program, banding blowtorch produces the uniformly ribbon flame such as one,
The precursors such as silicon tetrachloride obtain certain temperature white loose by thermal-flame hydrolysis (water breakthrough solution reaction equation 1,2)
Shape silica, is sprayed in the center target rod 602 of rotation.Exhausting system control 601 keeps reaction cavity (being not drawn into figure)
Relative pressure is -600~-1400pa, it is embedding be attached to blowtorch side be CCD high-speed photographies instrument 605 and infrared temperature sensing sensing
Device 606.
Then work according to blas when the no appearance of prefabricated rods 5 is abnormal, controlled if dimensional defects occur in prefabricated rods
Reponse system 608 adjusts inlet amount, air inflow, exhausting fine setting appearance size, and infrared temperature inductive pick-up 606 then sweep by the moment
The temperature of preform body spraying point is retouched, will be micro- by varying air inflow more than the error range allowed once there is temperature difference
Adjust flame size.
The joint reponse system such as the banding blowtorch of the present invention and size, temperature can prepare uniform external diameter, large-scale optical fiber
Prefabricated rods.Preform is prepared using the torch equipment of the present invention, and the length of blowtorch is exactly the length of prefabricated rods so being not required to
Blowtorch is moved, reduces and is scrapped because moving back and forth the both ends that blowtorch is brought.
The foregoing is only a preferred embodiment of the present invention, but protection scope of the present invention be not limited thereto,
Any one skilled in the art the invention discloses technical scope in, the change or replacement that can readily occur in,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of the claim
Subject to enclosing.
Claims (9)
1. a kind of OVD bandings torch equipment, it is characterised in that what the OVD bandings torch equipment included being set up in parallel is used to spray
Go out the first banding blowtorch, the second banding blowtorch for spraying fuel gas and the 3rd band for spraying oxygen of material mixed gas
Shape blowtorch, the first banding blowtorch, the second banding blowtorch and the 3rd banding blowtorch respectively include being interconnected
Banding gap nozzle and gas diffusion structure, the end of the gas diffusion structure connects with corresponding source of the gas, the gas
The middle part of diffusion structure is equipped with n grades of gas buffer diffusion chambers, and the n grades of gas buffer diffusion chamber is used to make every band during work
The air pressure of the inside of shape blowtorch is uniform, wherein n >=3.
2. OVD bandings torch equipment as claimed in claim 1, it is characterised in that
The n grades of gas buffer diffusion chamber include n bar gas buffer passages with for connecting adjacent two gas buffer pipelines
Shunting layer, the gas buffer passage and the shunting layer are arranged alternately in the short transverse of the n grades of gas diffusion chamber, described
The width of gas buffer passage is more than the thickness of the shunting layer, and the volume of the n bars gas buffer passage is along source of the gas to banding
The direction of gap nozzle reduces successively.
3. OVD bandings torch equipment as claimed in claim 1, it is characterised in that
The OVD bandings torch equipment further includes the 4th banding blowtorch for spraying barrier gas and for spraying oxygen
Five banding blowtorch, the second banding blowtorch, the 3rd banding blowtorch, the quantity of the 4th banding blowtorch and the 5th banding blowtorch are
Two, and distributing order once for the 5th banding blowtorch a, the second banding blowtorch a, the 3rd banding blowtorch a, the 4th banding blowtorch a,
First banding blowtorch, the 4th banding blowtorch b, the 3rd banding blowtorch b, the second banding blowtorch b, the 5th banding blowtorch b.
4. OVD bandings torch equipment as claimed in claim 3, it is characterised in that
The outlet angle of the first banding blowtorch and two the 4th banding blowtorch is consistent, described two 3rd bandings
The outlet angle of blowtorch, two the second banding blowtorch and two the 5th banding blowtorch is respectively with 2~8 ° of relative angle deviation the
The direction of one banding blowtorch.
5. OVD bandings torch equipment as claimed in claim 3, it is characterised in that
The material mixed gas include raw material vapor and auxiliary gas, and the raw material vapor includes silica-base material steam or germanium base
At least one of material vapor, the auxiliary gas include at least one of hydrogen, methane or oxygen, and the fuel gas includes
Hydrogen and methane, the barrier gas include inert gas.
6. OVD bandings torch equipment as claimed in claim 1, it is characterised in that
The OVD bandings torch equipment further includes cooling passage, close to the spray of banding slit between every two neighboring banding blowtorch
The side of mouth is equipped with cooling passage.
7. OVD bandings torch equipment as claimed in claim 1, it is characterised in that
The gas buffer passage is circular pipe, and the pipe diameter of the n bars gas buffer passage is along source of the gas to banding slit
The direction of nozzle is sequentially reduced；
The height of the gas buffer diffusion chamber is 1~2 meter, n=3.
8. a kind of OVD bar-producing systems of the OVD banding torch equipments including as described in claim 1~7 is any, its feature exist
In, including reaction cavity, the OVD bandings torch equipment, target rod are driven and weight tests system, for controlling in reaction cavity
Exhausting system, control reponse system, removable camera, infrared temperature sensor and the target rod of pressure difference, the OVD bandings blowtorch
Device, target rod transmission and weight test system, removable camera, infrared temperature inductive pick-up and target rod are respectively positioned on described anti-
Answer in cavity, the removable camera and infrared temperature sensor control to adjust the OVD by the control reponse system
The feedstock amount and air inflow of banding torch equipment and the exhausting amount of exhausting system, and then control the equal of porous preform
Even, shape and size.
9. a kind of method that OVD bar-producing systems using described in claim 8 carry out OVD rods, it is characterised in that including following
Step：
The fabrication schedule of set porous preform is inputted in the control reponse system；
Banding blowtorch produces the uniformly ribbon flame such as one, and precursors occur thermal-flame hydrolysis, obtain white powder
Last shape silica, and be sprayed in the center target rod of rotation；
The temperature of the spraying point of infrared temperature inductive pick-up moment scanning porous preform, when temperature and control temperature difference surpass
When crossing the error range allowed, flame size is finely tuned by varying air inflow；
The appearance of removable camera moment scanning porous preform, when the difference of barred body size and the uniformity and pre-set dimension surpasses
When crossing the error range allowed, by varying inlet amount, the appearance of air inflow fine setting definite value rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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| CN111517633A (en) * | 2020-04-27 | 2020-08-11 | 通鼎互联信息股份有限公司 | High-speed deposition device for carrying out outer cladding on loose body of optical fiber preform |
| CN112830670A (en) * | 2021-01-21 | 2021-05-25 | 陈富伦 | Quartz glass tube rod production furnace and quartz glass tube rod production method |
| CN113248133A (en) * | 2021-05-31 | 2021-08-13 | 中天科技精密材料有限公司 | Optical fiber preform manufacturing equipment and manufacturing method of optical fiber preform using same |
| CN113548796A (en) * | 2019-07-15 | 2021-10-26 | 富通集团（嘉善）通信技术有限公司 | Optical fiber perform's deposition equipment |
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| CN113548796A (en) * | 2019-07-15 | 2021-10-26 | 富通集团（嘉善）通信技术有限公司 | Optical fiber perform's deposition equipment |
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| CN113248133A (en) * | 2021-05-31 | 2021-08-13 | 中天科技精密材料有限公司 | Optical fiber preform manufacturing equipment and manufacturing method of optical fiber preform using same |
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