Background technology
Preform mainstream technology of preparing includes PCVD methods (Dutch Philips), MCVD methods (U.S. AT&T), OVD methods
(U.S. Coring), VAD methods (Japanese NT&T) and APVD methods (French Alcatel), wherein OVD (pipe Outside Vapor Deposition) method are
Early 1970s are used to prepare prefabricated rod mandrel by the research and development of Corning companies, by development in science and technology OVD methods by also extensive
Applied to preparing surrounding layer.The chemical reaction mechanism of OVD processes is flame hydrolysis process, is exactly gaseous halide (SiCl4Deng)
It is reacted by oxyhydrogen flame or methane flame, " loosening body " powder of a large amount of nano-scales is produced, as barred body is past along blowtorch
It is multiple mobile, prefabricated rods loosening body of the powder up to becoming a predetermined size, pattern from level to level, deposition are deposited on plug gradually
After loosening body will be in high-temperature electric resistance furnace by being sintered and heat preservation finally obtains transparent, glassy prefabricated rods, sintering temperature
Generally at 1500 DEG C or so, He, Cl are uninterruptedly passed through in stove2Equal gases can remove the impurity in barred body.
The advantages that OVD methods prepare the advantages of " loosening body " prefabricated rods mainly deposition rate are fast, deposition efficiency is high, it is pre- at present
Stick processed prepares the casing used and mainly OVD methods is used to prepare, and silica " loosening body " powder is deposited in target rod, is then sintered
At transparent glass, takes target rod away and obtain cylinder glass pipe (Cylinder), this cylinder glass pipe adds by machinery is deep
Work, stretching can be obtained geometric dimension and can accurately match various plugs.Deposition rate is as the improve and perfect of blowtorch is up to 200g/
Min, average deposition efficiency is up to 60%.And the improvement and optimization of modified technique most importantly blowtorch, initial OVD methods prepare light
Fine prefabricated rods only have a blowtorch, develop to more than two row's blowtorch, and a row, two rows of sprays are developed to by one group of single blowtorch
Lamp, this has been considerably improved deposition efficiency.And the optimization of Blowtorch structure, the uniformity of flame can be improved so that silica
" loosening body " powder is distributed the demand for more uniformly also meeting prefabricated rods refractive index accurate distribution in barred body, and it is heavy to improve
Product efficiency, the blowtorch gas flow after optimization is more smooth, not will produce flame conflict and makes blowtorch remained on surface silica
Particle, and the accumulation of remaining silica dioxide granule may seriously lead to that blowtorch gas is obstructed, flame instability is uneven.It is band-like
The research and development of lamp device directly increase spraying length, increase deposition rate, however bring flame be difficult to control, uniformity
The difficult points such as difference, the correlative studys such as United States Patent (USP) US5211732, US6047564, US4203553, US6837076 describe difference
Striplight design scheme, wherein Corning Incorporated's patent US5211732 devises the blowtorch of more nozzles of a row, and the device is apparent
Than single lamp and single group lamp deposition rate soon and with the reduction of blowtorch spacing, porous preform effective length is increased.Heraeus
What patent US6047564 was introduced is also row's Assembled lamp, and the patent describe reciprocal by changing target rod velocity of rotation and blowtorch
Movement velocity reduces barred body surface temperature difference, improves barred body spraying point temperature by changing torch flame, is sprayed by changing
Lamp and target rod distance spray point temperature difference to reduce barred body.Three groups of nozzles of patent US4203553 designs are angled, in
Between nozzle supply flame, two side nozzles provide silicon tetrachloride raw material, designer solve blowtorch surface silica dioxide it is remaining lack
Point is still since lamp body length is only 15 centimetres so can not be applied to prepare longer prefabricated rods.Corning Incorporated's patent
US6837076 has invented a kind of wide face blowtorch, which has used one group of buffering grid to carry out gas dispersion molecule, and nozzle uses grid
Venthole, blowtorch members are made of pure quartz glass, and lamp body micro-structure can provide the loosening body of convergence to reach
Predetermined size, micro-structure can control fuel gas and precursors to prepare preform.
The OVD methods manufacture of single blowtorch is simple for process, and settled density is relatively uniform, but deposition rate is low.By a lamp
It increases to multi-lamp or row's blowtorch governing factor is relative complex, significantly improve deposition efficiency, but be reduction of loosening body
Deposition rod relative efficiency length.And the design of planar blowtorch solves the problems such as gas homogeneity using microcellular structure, does not also have
Solve the technological difficulties of 1 meter of manufacture or more longer loosening body stick.Preform, which is prepared, herein for OVD methods devises one kind newly
The band-like blowtorch of grain husk, the blowtorch had both met high deposition rate or had had many advantages, such as that reducing both ends scraps and be not required to movable lamps.
Utility model content
The purpose of this utility model is in order to solve the above problem at least one, and it is band-like that the utility model provides a kind of OVD
Torch equipment and OVD bar-producing systems.
One side according to the present utility model provides a kind of band-like torch equipments of OVD, including be set up in parallel for spraying
Go out the first band-like blowtorch, the second band-like blowtorch for spraying fuel gas and the third band for spraying oxygen of material mixed gas
Shape blowtorch, the first band-like blowtorch, the second band-like blowtorch and the band-like blowtorch of third include respectively that interconnected band-like slit sprays
Mouth and gas diffusion structure, the end of gas diffusion structure are connected to corresponding air source, and the middle part of gas diffusion structure is equipped with n grades
The air pressure of the inside of every ribbon blowtorch when gas buffer diffusion chamber, n grades of gas buffer diffusion chambers are used to make work is uniform,
Middle n >=3.
Wherein, n grades of gas buffer diffusion chambers include n gas buffer channel with for being connected to adjacent two gas buffer pipes
The shunting layer in road, gas buffer channel and shunting layer are arranged alternately in the short transverse of n grades of gas diffusion chambers, gas buffer channel
Width be more than the thickness of shunting layer, the volume in n gas buffer channel drops along air source to the direction of band-like gap nozzle successively
It is low.
Wherein, the band-like torch equipments of OVD further include obstructing the 4th band-like blowtorch of gas and for spraying oxygen for spraying
5th band-like blowtorch of gas, the second band-like blowtorch, the band-like blowtorch of third, the quantity of the 4th band-like blowtorch and the 5th band-like blowtorch are equal
It it is two, and distributing order is once the 5th band-like blowtorch a, the second band-like blowtorch a, the band-like blowtorch a of third, the 4th band-like blowtorch
A, the first band-like blowtorch, the 4th band-like blowtorch b, the band-like blowtorch b of third, the second band-like blowtorch b, the 5th band-like blowtorch b.
Wherein, the outlet angle of the first band-like blowtorch and two the 4th band-like blowtorch is consistent, two band-like sprays of third
The outlet angle of lamp, two the second band-like blowtorch and two the 5th band-like blowtorch is biased to first with 2~8 ° of relative angle respectively
The direction of band-like blowtorch.
Wherein, material mixed gas includes raw material vapor and auxiliary gas, and raw material vapor includes silica-base material steam or germanium
At least one of sill steam, auxiliary gas includes at least one of hydrogen, methane or oxygen, fuel gas include hydrogen and
Methane, barrier gas includes inert gas.
Wherein, the band-like torch equipments of OVD further include cooling passage, close to band-like narrow between the band-like blowtorch of each adjacent two
The side for stitching nozzle is equipped with cooling passage.
Wherein, gas buffer channel is circular pipe, and the pipe diameter in n gas buffer channel is along air source to band-like slit
The direction of nozzle is sequentially reduced;The height of gas buffer diffusion chamber is 1~2 meter, n=3.
Second aspect according to the present utility model provides a kind of OVD bar-producing systems including the band-like torch equipments of the OVD,
Including reaction cavity, the band-like torch equipments of OVD, target rod transmission and weight test system, for controlling pressure difference in reaction cavity
Exhausting system, control reponse system, removable camera, infrared temperature sensor and target rod, the band-like torch equipments of OVD, target rod
Transmission and weight test system, removable camera, infrared temperature inductive pick-up and target rod are respectively positioned in reaction cavity, removable
Dynamic camera and infrared temperature sensor by control reponse system control to adjust the band-like torch equipments of OVD feedstock amount and
The exhausting amount of air inflow and exhausting system, and then control the surface evenness of loose stick, shape and size.
The utility model has the advantages that:
1, blowtorch need not move back and forth, and reduce section to greatest extent and scrap.Since blowtorch shape is a whole band-like spray
Lamp in the entire plug effective length of blowtorch all standing, therefore can be reduced since what blowtorch was brought scraps to greatest extent.
2, the design in blowtorch n grades of gas buffer channels, flame consistency is preferable, the loose rod outside diameter uniformity of deposition compared with
It is good.Different from traditional blowtorch feeding system, it is each that traditional blowtorch is that independent mass flow controller and deposition formulation individually control
Blowtorch can not theoretically make up after causing loose rod outside diameter defect occur due to blowtorch etc..
3, design principle is simple, and stabilization of equipment performance is preferable, easy to maintain.By CCD camera, weight test system and blowtorch
Three mechanism cooperating complementaries so that the loose stick uniformity of deposition is preferable, due to less use quality flow controller, sets
Standby stability and convenient later maintenance.
Specific implementation mode
The illustrative embodiments of the disclosure are more fully described below with reference to accompanying drawings.Although showing this public affairs in attached drawing
The illustrative embodiments opened, it being understood, however, that may be realized in various forms the disclosure without the reality that should be illustrated here
The mode of applying is limited.It is to be able to be best understood from the disclosure on the contrary, providing these embodiments, and can be by this public affairs
The range opened completely is communicated to those skilled in the art.
It is blowtorch deposition that early stage OVD method, which prepares preform patent, and governing factor is relatively fewer, deposition rate compared with
Low, settled density is relatively uniform, so significantly by the band-like combination blowtorch of one group of improvement and optimization formation or a row later
Deposition rate is improved, as depicted in figs. 1 and 2, the deposition length of more blowtorch and row's blowtorch is efficient as follows:
Effective length (more small cup blowtorch)=L- (n-1) * d
Total length (more blowtorch)=L+ (n-1) * d
Effective percentage (more blowtorch)=[L- (n-1) * d]/[L+ (n-1) * d]
Effective length (row's blowtorch)=(n-1) * d
Total length (row's blowtorch)=(n+1) * d
Effective percentage (row's blowtorch)=(n-1)/(n+1)
The deposition length effective percentage of one row's blowtorch increases as blowtorch quantity increases, it is assumed that and blowtorch quantity n is infinity,
So effective percentage is just close to 1, it is possible to if the blowtorch that imagination makes a ribbon slit can be thought in certain length
Upper blowtorch quantity n is infinity, and the effective percentage of deposition length has just been significantly greatly increased in this, and this patent devises one using this innovative point
The novel band-like blowtorch of kind.The blowtorch includes band-like slit venthole, since the band-like gap nozzle length of blowtorch is more than 1 meter, is
Ensure that even flame requires the uniformity of venthole gas, a kind of three-level gas of Patent design caches disperser, base
This meets gas and stablizes relatively in the stream pressure of gas outlet in 1-2 meters of length.
As described above, this patent describes a kind of novel band-like OVD torch equipments, using the device can quickly,
Efficiently prepare loose silica porous preform.The technology can be used for preparing Single mode communication optical fiber, can also prepare
Multimode fibre, the technology can be used for preparing prefabricated rods sandwich layer, covering, and the component of prefabricated rods can also be prepared separately.Work as use
The device prepares the higher SiO 2 powder of purity that loosening body sandwich layer loose when prefabricated rods sandwich layer should include uniformly mixed
With the dopants powder such as germanium dioxide etc., when depositing surrounding layer, loosening body is usually the higher SiO 2 powder of purity.It removes
Other than this, when being used to prepare bending loss insensitive single-mode fiber G.657A, it can be changed according to loose stick demand tapered
Index distribution section.
As shown in figure 3, torch equipment can be used for generating silica loosening body by flame hydrolysis, it is loose to deposit
Prefabricated rods, torch equipment include multiple band-like blowtorch, and each band-like blowtorch includes mainly five parts, component 210,211,212,
213,214,215,216,217,218 be blowtorch first order gas buffer channel, component 219,220,221,222,223,224,
225,226,227 be blowtorch second level gas buffer channel, and component 228,229,230,231,232,233,234,235,236 is
Third level gas buffer channel, component 205 are silyl starting material steam and the band-like gap nozzle of oxygen mixture, component 204,206
For the band-like gap nozzle of inert gas group trapping, component 203,207 is the band-like gap nozzle of blowtorch internal oxygen, component 202,
208 be the band-like gap nozzles of fuel gas such as hydrogen or methane, and component 201,209 is the band-like gap nozzle of blowtorch external oxygen.Silicon
Based raw material steam and oxygen mixture can pass sequentially through component 232,223,214,205, and the inert gases such as argon gas can pass sequentially through
Component 231,222,213,204 and pass sequentially through 233,224,215,206, internal oxygen can pass sequentially through component 230,220,
211,202 and pass sequentially through component 234,225,216,207, hydrogen or methane gas can pass sequentially through component 229,220,
211,202 and 235,226,217,208.The quantity in the gas buffer channel of each blowtorch of this torch equipment is n items, can basis
The specific depth and deposition of blowtorch require to be adjusted, under normal conditions n >=3.
In the present embodiment, the quantity for not only reducing gas flow controller is designed in n=3, three-level gas buffer channel
And it is more prone to maintain and safeguards by the torch equipment of pneumatics conceptual design.In addition, band-like blowtorch length can be 1~2
Rice or so, it is uniformly a prodigious challenge that the pressure of outlet is kept in 1~2 meter of long distance, and the utility model passes through three
Grade buffer unit ensure that the outlet pressure uniformity of venthole, the design of band-like blowtorch are on the one hand to increase deposition speed
Rate, still further aspect reduce both ends loss.The material for preparing blowtorch can be aluminium alloy or titanium alloy, can be partly high-purity
Quartz glass.
Reactant or fuel, oxygen material enter gas diffusion structure by material inlet and travel further into n grades of gases and delay
Diffusion chamber is rushed, each n grades of gas buffer diffusion chamber includes shunting layer and n gas buffer channel, and shunting layer is three-dimensional cavity knot
Structure, can effective diffusion gas molecule, wherein three gas buffer channels first gas buffer channel volume (228,229,
230,231,232,233,234,235,236) be more than Article 2 gas buffer channel (219,220,221,222,223,224,
225,226,227) it is more than Article 3 gas buffer channel (210,211,212,213,214,215,216,217,218).
The band-like torch equipments of OVD include the first band-like blowtorch being set up in parallel, the second band-like blowtorch, the band-like blowtorch of third,
4th band-like blowtorch and the 5th band-like blowtorch.Wherein, the first band-like blowtorch includes component 232,223,214,205, silyl starting material
Steam and oxygen mixture can pass sequentially through component 232,223,214,205, the ratio of silyl starting material steam and oxygen mixture
It is controlled by the fluid flowmeter and gas flow meter in the gas diffusion structure of the first band-like blowtorch;4th band-like blowtorch
It is two, respectively includes component 231,222,213,204 and component 233,224,215,206, the inert gases such as argon gas can be successively
By component 231,222,213,204 and pass sequentially through 233,224,215,206;The band-like blowtorch of third is two, is respectively included
Component 230,220,211,203 and component 234,225,216,207, internal oxygen can pass sequentially through component 230,220,211,
203 and pass sequentially through component 234,225,216,207;Second band-like blowtorch be two, respectively include component 229,220,211,
202 and component 235,226,217,208, hydrogen or methane gas can pass sequentially through component 229,220,211,202 and 235,
226、217、208。
Wherein after silicon substrate raw material and oxygen mix, mixed gas is expanded by level-one secondary gas buffer channel body and shunting
Layer is dissipated to third level gas buffer channel, and gas pressure on same cross section is uniform, finally uniform from band-like gap nozzle 205
It sprays.Band-like gap nozzle 202,208 is the fuel gas such as hydrogen, the as above shunting diffusion by three-level gas buffer channel and three times
Layer, final fuel gas generate the water vapour of big calorimetric and abundance with oxygen vigorous reaction.The reactions such as the gaseous silicon of ejection
Presoma is generated loosening body particle by flame hydrolysis (see formula 1,2) and is deposited on the center target rod rotated with given pace
On.The inert gases such as the argon gas that band-like gap nozzle 204,206 sprays, it is to maintain track raw material that the effect of argon gas, which is one side,
Without interruption, still further aspect is that loosening body air-flow is protected to be deposited not around slit 205, and band-like gap nozzle 201,209 sprays
On the one hand on the other hand the oxygen gone out can protect flame not done by external environment air-flow variation as the reactant of fuel gas
It disturbs.
Hydrolysis:
Formula 1:SiCl4+O2+2H2=SiO2+4HCl
Formula 2:GeCl4+O2+2H2=GeO2+4HCl
Fig. 5 blowtorch is the top plan view of band-like gap nozzle 201,202,203,204,205,206,207,208 and 209
Figure.Blowtorch length can be selected according to plug effective length, avoid the problems such as water peak taken over the baton and brought is higher.
Fig. 4 is the another embodiment of this technology, and the program optimizes the details of blowtorch, increases to blowtorch temperature
The cooling passage of protection is spent, wherein circulation canal 311,313,315,317,319,321,323,325,327 can be constant temperature
Recirculated water or other constant temperature coolant liquids, constant temperature coolant liquid can keep blowtorch lamp body to be maintained at a suitable temperature range
It is interior, with prevent due to blowtorch work long hours temperature sharply increase cause slit deformation cause even flame be deteriorated.After optimization
Blowtorch air inlet stability be better than the former, have self-regulating function, gas buffer channel easily facilitates practical operation.
Fig. 6 is the blowtorch surface after advanced optimizing, and band-like gap nozzle 204,205,206 keeps relative position and angle
Constant, band-like gap nozzle 201,202,203,207,208,209 is biased to medium line with about 2~8 ° of relative angle respectively, this
The channel design of sample will produce the flame of convergence, and the flame of convergence is conducive to the generation of hydrolysis, the loosening body fluid of generation
The loosening body fluid for not disperseing, and disperseing is easy because temperature decrease does not have viscosity to lead to the target rod that cannot be effectively deposited on rotation
On.510 and 511 constant temperature cooling passages are further increased after optimization, ensure blowtorch in rational temperature range (110~200
DEG C) work.
The torch equipment prepares preform applied to horizontal OVD methods, if Fig. 7 is stick platform schematic diagram processed, including spray
Lamp device 604, target rod transmission and weight test system 603, exhausting system 601, control reponse system 608, removable CCD photograph
Machine 605, infrared temperature inductive pick-up 606 and material air pipe 607, wherein material air pipe 607 is in each band-like slit spray of blowtorch
Mouth material gas source, multi-pipeline supply can pass through feedback regulation even flame.
It being inputted in controlling reponse system first and both customizes stick program, band-like blowtorch generates the uniformly ribbon flame such as one,
The precursors such as silicon tetrachloride obtain certain temperature white loose by thermal-flame hydrolysis (water breakthrough solution reaction equation 1,2)
Shape silica is sprayed in the center target rod 602 of rotation.Exhausting system control 601 keeps reaction cavity (being not drawn into figure)
Relative pressure be -600~-1400pa, it is embedding be attached to blowtorch side be CCD high-speed photographies instrument 605 and infrared temperature induction sensing
Device 606.
It then works according to blas when the no appearance of prefabricated rods 5 is abnormal, is controlled if dimensional defects occur in prefabricated rods
Reponse system 608 adjusts inlet amount, air inflow, exhausting and finely tunes appearance size, and infrared temperature inductive pick-up 606 then sweep by the moment
The temperature of preform body spraying point is retouched, once temperature difference occur will be micro- by changing air inflow more than the error range allowed
Adjust flame size.
The joint reponse system such as the band-like blowtorch and size of the utility model, temperature can prepare uniform external diameter, large scale
Preform.Preform is prepared using the torch equipment of the utility model, the length of blowtorch is exactly the length of prefabricated rods
So blowtorch need not be moved, reduces and scrapped because moving back and forth the both ends that blowtorch is brought.
The preferable specific implementation mode of the above, only the utility model, but the scope of protection of the utility model is not
It is confined to this, any one skilled in the art within the technical scope disclosed by the utility model, can readily occur in
Change or replacement, should be covered within the scope of the utility model.Therefore, the scope of protection of the utility model should be with
Subject to the scope of the claims.