CN112799263A - Laser-based objective lens focusing method and system - Google Patents
Laser-based objective lens focusing method and system Download PDFInfo
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- CN112799263A CN112799263A CN202011626241.9A CN202011626241A CN112799263A CN 112799263 A CN112799263 A CN 112799263A CN 202011626241 A CN202011626241 A CN 202011626241A CN 112799263 A CN112799263 A CN 112799263A
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- 238000000034 method Methods 0.000 title claims abstract description 31
- 238000006073 displacement reaction Methods 0.000 claims abstract description 142
- 238000003384 imaging method Methods 0.000 claims description 18
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B13/00—Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
- G03B13/18—Focusing aids
- G03B13/20—Rangefinders coupled with focusing arrangements, e.g. adjustment of rangefinder automatically focusing camera
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/28—Systems for automatic generation of focusing signals
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B13/00—Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
- G03B13/32—Means for focusing
- G03B13/34—Power focusing
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Abstract
The application discloses a laser-based objective lens focusing method and a laser-based objective lens focusing system, wherein the method comprises the steps of utilizing a laser source to emit a first laser beam to an object to be observed so that the object to be observed reflects the first laser beam to a laser receiving device; receiving the reflected first laser beam by the laser receiving device and determining first laser intensity; determining the displacement of the object to be detected relative to the initial position according to the first laser intensity and the initial laser intensity, wherein the focus of the objective lens is at the initial position, and the initial laser intensity is determined according to the laser intensity of the second laser beam reflected when the object to be observed is at the initial position; determining the target displacement amount and the target displacement direction of the objective lens according to the displacement amount and the displacement direction of the object to be detected relative to the initial position; the driving device is used for driving the objective lens to displace the target displacement along the target displacement direction so as to enable the focus of the objective lens to be positioned on the object to be observed, the objective lens is used for realizing real-time following focusing of the object to be observed, and the focusing rate of the objective lens is improved.
Description
Technical Field
The invention relates to the field of image imaging, in particular to a laser-based objective lens focusing method and system.
Background
In automatic apparatuses such as semiconductor and electronic device manufacturing apparatuses, a vision system is required, and the vision system performs secondary processing on parameters such as the size, shape, and color of a manufactured device based on information such as pixel distribution and brightness of a captured image.
However, in the prior art, in the large-scale work of the vision system, when the manufactured element is displaced, the position of the objective lens of the vision system needs to be manually adjusted to focus the objective lens, so that a great deal of time is needed to adjust the position of the objective lens after each element displacement, which affects the manufacturing efficiency and the manufacturing cost.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention mainly aims to provide a laser-based objective lens focusing method and system so as to realize real-time follow focusing of an object to be observed by an objective lens.
In order to achieve the above object, the present invention provides a laser-based objective focusing method in a first aspect, the method comprising:
the method comprises the steps that a laser source is used for emitting a first laser beam to an object to be observed so that the object to be observed can reflect the first laser beam to a laser receiving device;
receiving the reflected first laser beam with the laser receiving device and determining a first laser intensity of the reflected first laser beam;
determining the displacement amount and the displacement direction of the object to be detected relative to the initial position according to the first laser intensity and the initial laser intensity, wherein the focus of the objective lens is located at the initial position, and the initial laser intensity is determined according to the laser intensity of a second laser beam reflected by the object to be observed when the object to be observed is located at the initial position;
determining the target displacement amount and the target displacement direction of the objective lens according to the displacement amount and the displacement direction of the object to be detected relative to the initial position;
and driving the objective lens by using a driving device to displace the target displacement amount along the target displacement direction so as to enable the focus of the objective lens to be positioned on the object to be observed.
In some embodiments, the method further comprises determining an initial laser intensity, the determining the initial laser intensity comprising:
driving the objective lens to displace by using a driving device so that the focal point of the objective lens is on the object to be observed positioned at the initial position;
emitting a second laser beam to the object to be observed at the initial position by using the laser source so that the object to be observed reflects the second laser beam to the laser receiving device;
and receiving the reflected second laser beam by using the laser receiving device and determining the initial laser intensity according to the laser intensity of the reflected second laser beam.
In some embodiments, the receiving, with the laser receiving device, the reflected second laser beam and determining the initial laser intensity according to the laser intensity of the reflected second laser beam includes:
storing the determined initial laser intensity in a preset register;
the determining the displacement amount and the displacement direction of the object to be detected relative to the initial position according to the first laser intensity and the initial laser intensity comprises:
acquiring initial laser intensity from the register;
determining a difference value between the first laser intensity and the initial laser intensity according to the obtained initial laser intensity and the first laser intensity;
and determining the displacement and the displacement direction of the object to be observed relative to the initial position according to the difference.
In some embodiments, the laser intensity comprises laser power.
In some embodiments, the driving device includes a motor controller and a motor, and driving the objective lens by the driving device in the target displacement direction by the target displacement amount so that the focal point of the objective lens is on the object to be observed includes:
and sending a displacement instruction comprising the target displacement direction and the target displacement amount to a motor controller, so that the motor controller controls the motor to drive the objective lens to displace the target displacement amount along the target displacement direction.
In some embodiments, the emitting the first laser beam to the object to be observed by the laser source to make the object to be observed reflect the first laser beam to the laser receiving device includes:
judging whether the focus of the objective lens is positioned on the object to be observed or not according to the imaging image of the objective lens;
and when the object to be observed is judged not to be positioned on the object to be observed, a first laser beam is emitted to the object to be observed by utilizing the laser source so that the object to be observed reflects the first laser beam to the laser receiving device.
In some embodiments, the method comprises:
and shooting an imaging image of the objective lens through a preset camera and storing the imaging image.
In a second aspect, the present application provides a laser-based focusing system, the system comprising:
the laser source is used for emitting a first laser beam to an object to be observed so that the object to be observed reflects the first laser beam to the laser receiving device;
a laser receiving device for receiving the reflected first laser beam and determining a first laser intensity of the reflected first laser beam;
the control device is used for determining the displacement of the object to be detected relative to the initial position according to the first laser intensity and the initial laser intensity, the focus of the objective lens is located at the initial position, and the initial laser intensity is determined according to the laser intensity of the second laser beam reflected when the object to be observed is located at the initial position; determining the target displacement amount and the target displacement direction of the objective lens according to the displacement amount of the object to be detected relative to the initial position;
and the driving device is used for driving the objective lens to displace the target displacement along the target displacement direction so as to enable the focus of the objective lens to be positioned on the object to be observed.
In some embodiments, the driving device may be further configured to drive the objective lens to displace so that the focal point of the objective lens is located on the object to be observed;
the laser source can also be used for emitting a second laser beam to the object to be observed at the initial position so that the object to be observed reflects the second laser beam to the laser receiving device;
the laser receiving device may be further configured to receive the reflected second laser beam and determine the initial laser intensity based on the laser intensity of the reflected second laser beam.
In some embodiments, the drive device includes a motor controller and a motor,
the control device may be further configured to send a displacement command including the target displacement direction and the target displacement amount to a motor controller,
the motor controller is configured to control the motor, and the motor is configured to drive the objective lens to displace the target displacement amount in the target displacement direction.
The invention has the following beneficial effects:
the application provides a laser-based objective lens focusing method, which comprises the steps of utilizing a laser source to emit a first laser beam to an object to be observed so that the object to be observed reflects the first laser beam to a laser receiving device; receiving the reflected first laser beam with the laser receiving device and determining a first laser intensity of the reflected first laser beam; determining the displacement of the object to be detected relative to an initial position according to the first laser intensity and the initial laser intensity, wherein the focus of the objective lens is located at the initial position, and the initial laser intensity is determined according to the laser intensity of a second laser beam reflected when the object to be observed is located at the initial position; determining the target displacement amount and the target displacement direction of the objective lens according to the displacement amount of the object to be detected relative to the initial position; the objective lens is driven by the driving device to displace along the target displacement direction by the target displacement amount so that the focus of the objective lens is positioned on the object to be observed, the displacement amount of the object to be observed is determined according to the intensity of laser reflected when the object to be observed is positioned at the initial position and the intensity of laser reflected after displacement, then the displacement direction and the displacement amount of the objective lens are determined according to the displacement amount of the object to be observed, the objective lens is driven to displace according to the determined displacement direction and the determined displacement amount, real-time following focusing of the object to be observed by the objective lens is realized, and the focusing speed of the objective lens is improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic view of an objective lens provided in an embodiment of the present application;
FIG. 2 is a schematic diagram of a position of an objective lens and an object to be observed according to an embodiment of the present disclosure;
FIG. 3 is a schematic diagram of a laser focusing system provided in an embodiment of the present application;
FIG. 4 is a flow chart of a method provided by an embodiment of the present application;
fig. 5 is a system configuration diagram provided in the embodiment of the present application.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example one
As described in the background art, the objective lens of the vision system in the prior art needs to be manually adjusted in focus, which is inconvenient to use.
In order to solve the problems, the application provides a laser-based objective lens focusing method and a laser-based objective lens focusing system, the displacement of an object to be observed is determined according to the intensity of laser reflected when the object to be observed is located at an initial position and the intensity of laser reflected after displacement, then the displacement direction and the displacement of an objective lens are determined according to the displacement of the object to be observed, the objective lens is driven to displace according to the determined displacement direction and displacement, real-time following focusing of the object to be observed by the objective lens is achieved, and the focusing rate of the objective lens is improved.
The system comprises a laser source, a laser receiving device, a driving device, an objective lens, a register and a control device, wherein the laser source is used for emitting laser, the laser receiving device is used for receiving laser reflected by an object to be observed to the system and identifying the laser intensity, the driving device is used for driving the objective lens to shift, the register is used for storing the initial laser intensity, and the control device can control all other devices to focus the objective lens.
Specifically, the process of focusing by using the method and the system comprises the following steps:
determining the initial laser intensity reflected by an object to be observed at an initial position and storing the initial laser intensity into a register;
the driving device can be manually adjusted when the object to be observed is at the initial position, and the driving device drives the displacement of the objective lens to enable the focus of the objective lens to be positioned on the object to be observed.
After the position of the objective lens is adjusted, laser can be emitted to an object to be observed through a laser source included in the focusing system, the object to be observed reflects the laser to a laser receiving device, the laser receiving device receives and determines the laser intensity of the reflected laser, and the laser intensity is the initial laser intensity of the object to be observed.
Specifically, the laser intensity may be determined according to the laser power of the laser.
For convenience of observation and adjustment, the relative positions of the laser source, the laser receiving device and the objective lens can be set to be the maximum laser intensity of the laser receiving device for receiving the reflected laser when the laser emitted by the laser source reaches the object to be observed at the initial position and is reflected to the laser receiving device. The initial laser intensity may be stored in a register for retrieval when needed.
When the focal point is judged not to be on the object to be observed, a first laser beam is emitted to the object to be observed by utilizing a laser source so that the object to be observed reflects the first laser beam to a laser receiving device;
specifically, a three-dimensional rectangular coordinate system may be established with a horizontal plane on which an object to be observed is located as an x-axis plane and a y-axis plane, and with a direction perpendicular to the horizontal plane as a z-axis. As shown in fig. 1 and 2, when the object to be observed moves along the z-axis direction, the focal point of the objective lens is not on the object to be observed, and the imaging image of the objective lens becomes relatively blurred, so that it can be determined whether the object to be observed moves along the z-axis direction relative to the initial position according to the imaging quality of the imaging image. And when the imaging quality of the imaging image is not changed but the observed object to be observed is reduced, the object to be observed can be judged to move in the x-axis and/or y-axis direction. When the object to be observed moves in the x-axis and/or y-axis direction, the driving device can be used for driving the laser receiving device and the laser source to synchronously move along with the displacement of the object to be observed so as to determine the real-time position of the object, and the horizontal displacement direction and the horizontal displacement amount of the object relative to the initial position are determined according to the real-time position. And then, determining the target displacement amount and the target displacement direction of the objective lens according to the horizontal displacement amount and the horizontal displacement direction of the object, and driving the objective lens to displace the target displacement amount along the target displacement direction by using a driving device so as to enable the focus of the objective lens to be positioned on the object to be observed.
When judging that the object to be observed has displacement parallel to the z axis, receiving the reflected first laser beam by using the laser receiving device and determining the first laser intensity of the reflected first laser beam;
the first laser intensity may include a laser power of the first laser beam.
Acquiring the initial laser intensity stored in the register, and calculating the difference value between the initial laser intensity and the first laser intensity;
as shown in fig. 3, when the object to be observed is at the initial position, i.e., the focal point, the intensity of the laser light reflected to the laser light receiving device is maximum. When the object to be observed is displaced, the laser reflected from the object to be observed back to the laser receiving device is scattered, so that the intensity of the laser is weakened relative to the initial position.
And determining the displacement direction and the displacement of the object to be observed along the z-axis direction according to the difference value of the first laser intensity and the initial laser intensity.
Fifthly, determining the target displacement direction and the target displacement of the objective lens according to the displacement direction and the displacement of the object to be observed;
for example, when the object to be observed is displaced downward by 1cm, the objective lens is also displaced downward by 1 cm.
Step six, sending a displacement instruction comprising the target displacement direction and the target displacement amount to a motor controller, so that the motor controller controls the motor to drive the objective lens to displace the target displacement amount along the target displacement direction;
the CCD camera can be used for shooting an imaging image of the objective lens, and the imaging image can be analyzed and stored so as to further adjust the object to be observed according to the shooting result of the CCD camera.
Example two
In correspondence to the above embodiments, as shown in fig. 4, the present application provides a laser-based objective lens focusing method, including:
410. the method comprises the steps that a laser source is used for emitting a first laser beam to an object to be observed so that the object to be observed can reflect the first laser beam to a laser receiving device;
preferably, the emitting the first laser beam to the object to be observed by the laser source so that the object to be observed reflects the first laser beam to the laser receiving device includes:
411. judging whether the focus of the objective lens is positioned on the object to be observed or not according to the imaging image of the objective lens;
412. and when the object to be observed is judged not to be positioned on the object to be observed, a first laser beam is emitted to the object to be observed by utilizing the laser source so that the object to be observed reflects the first laser beam to the laser receiving device.
420. Receiving the reflected first laser beam with the laser receiving device and determining a first laser intensity of the reflected first laser beam;
430. determining the displacement amount and the displacement direction of the object to be detected relative to the initial position according to the first laser intensity and the initial laser intensity, wherein the focus of the objective lens is located at the initial position, and the initial laser intensity is determined according to the laser intensity of a second laser beam reflected by the object to be observed when the object to be observed is located at the initial position;
440. determining the target displacement amount and the target displacement direction of the objective lens according to the displacement amount and the displacement direction of the object to be detected relative to the initial position;
450. and driving the objective lens by using a driving device to displace the target displacement amount along the target displacement direction so as to enable the focus of the objective lens to be positioned on the object to be observed.
Preferably, the driving device includes a motor controller and a motor, and the driving the objective lens by the driving device to displace the target displacement amount in the target displacement direction so that the focal point of the objective lens is located on the object to be observed includes:
451. and sending a displacement instruction comprising the target displacement direction and the target displacement amount to a motor controller, so that the motor controller controls the motor to drive the objective lens to displace the target displacement amount along the target displacement direction.
Preferably, the method further comprises determining an initial laser intensity, the determining the initial laser intensity comprising:
460. driving the objective lens to displace by using a driving device so that the focal point of the objective lens is on the object to be observed positioned at the initial position;
461. emitting a second laser beam to the object to be observed at the initial position by using the laser source so that the object to be observed reflects the second laser beam to the laser receiving device;
462. and receiving the reflected second laser beam by using the laser receiving device and determining the initial laser intensity according to the laser intensity of the reflected second laser beam.
Preferably, the receiving, by the laser receiving device, the reflected second laser beam and determining the initial laser intensity according to the laser intensity of the reflected second laser beam includes:
463. storing the determined initial laser intensity in a preset register;
the determining the displacement amount and the displacement direction of the object to be detected relative to the initial position according to the first laser intensity and the initial laser intensity comprises:
464. acquiring initial laser intensity from the register;
465. determining a difference value between the first laser intensity and the initial laser intensity according to the obtained initial laser intensity and the first laser intensity;
466. and determining the displacement and the displacement direction of the object to be observed relative to the initial position according to the difference.
Preferably, the laser intensity comprises laser power.
Preferably, the method comprises:
470. and shooting an imaging image of the objective lens through a preset camera and storing the imaging image.
EXAMPLE III
Corresponding to the above method, as shown in fig. 5, the present application provides a real-time focusing system based on laser, the system includes:
a laser source 510 for emitting a first laser beam to an object to be observed so that the object to be observed reflects the first laser beam to a laser receiving device;
a laser receiving device 520 for receiving the reflected first laser beam and determining a first laser intensity of the reflected first laser beam;
the control device 530 is configured to determine, according to the first laser intensity and the initial laser intensity, a displacement amount of the object to be detected relative to an initial position, where a focal point of the objective lens is located at the initial position, and the initial laser intensity is determined according to a laser intensity of a second laser beam reflected when the object to be observed is located at the initial position; determining the target displacement amount and the target displacement direction of the objective lens according to the displacement amount of the object to be detected relative to the initial position;
and a driving device 540, configured to drive the objective lens to shift the target displacement amount along the target displacement direction so that a focal point of the objective lens is located on the object to be observed.
Preferably, the driving device 540 is further configured to drive the objective lens to displace so that the focal point of the objective lens is located on the object to be observed;
the laser source 510 may also be configured to emit a second laser beam to the object to be observed at the initial position so that the object to be observed reflects the second laser beam to the laser receiving device;
the laser receiving device 520 may also be configured to receive the reflected second laser beam and determine the initial laser intensity based on the laser intensity of the reflected second laser beam.
Preferably, the driving device 540 includes a motor controller and a motor, the control device is further configured to send a displacement command including the target displacement direction and the target displacement amount to the motor controller, the motor controller is configured to control the motor, and the motor is configured to drive the objective lens to displace the target displacement amount along the target displacement direction.
Preferably, the control device 520 is further configured to store the determined initial laser intensity in a preset register; acquiring initial laser intensity from the register; determining a difference value between the first laser intensity and the initial laser intensity according to the obtained initial laser intensity and the first laser intensity; and determining the displacement and the displacement direction of the object to be observed relative to the initial position according to the difference.
Preferably, the control device 530 is further configured to determine whether the focal point of the objective lens is located on the object to be observed according to the imaging image of the objective lens; and when the object to be observed is judged not to be positioned on the object to be observed, a first laser beam is emitted to the object to be observed by utilizing the laser source so that the object to be observed reflects the first laser beam to the laser receiving device.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (10)
1. A method for focusing a laser-based objective lens, the method comprising:
the method comprises the steps that a laser source is used for emitting a first laser beam to an object to be observed so that the object to be observed can reflect the first laser beam to a laser receiving device;
receiving the reflected first laser beam with the laser receiving device and determining a first laser intensity of the reflected first laser beam;
determining the displacement amount and the displacement direction of the object to be detected relative to the initial position according to the first laser intensity and the initial laser intensity, wherein the focus of the objective lens is located at the initial position, and the initial laser intensity is determined according to the laser intensity of a second laser beam reflected by the object to be observed when the object to be observed is located at the initial position;
determining the target displacement amount and the target displacement direction of the objective lens according to the displacement amount and the displacement direction of the object to be detected relative to the initial position;
and driving the objective lens by using a driving device to displace the target displacement amount along the target displacement direction so as to enable the focus of the objective lens to be positioned on the object to be observed.
2. The method of claim 1, further comprising determining an initial laser intensity, the determining an initial laser intensity comprising:
driving the objective lens to displace by using a driving device so that the focal point of the objective lens is on the object to be observed positioned at the initial position;
emitting a second laser beam to the object to be observed at the initial position by using the laser source so that the object to be observed reflects the second laser beam to the laser receiving device;
and receiving the reflected second laser beam by using the laser receiving device and determining the initial laser intensity according to the laser intensity of the reflected second laser beam.
3. The method of claim 2, wherein the receiving the reflected second laser beam with the laser receiving device and determining the initial laser intensity from the laser intensity of the reflected second laser beam comprises:
storing the determined initial laser intensity in a preset register;
the determining the displacement amount and the displacement direction of the object to be detected relative to the initial position according to the first laser intensity and the initial laser intensity comprises:
acquiring initial laser intensity from the register;
determining a difference value between the first laser intensity and the initial laser intensity according to the obtained initial laser intensity and the first laser intensity;
and determining the displacement and the displacement direction of the object to be observed relative to the initial position according to the difference.
4. The method of any of claims 1-3, wherein the laser intensity comprises a laser power.
5. The method according to any one of claims 1 to 3, wherein the driving device includes a motor controller and a motor, and the driving the objective lens by the driving device in the target displacement direction by the target displacement amount to bring the focal point of the objective lens on the object to be observed includes:
and sending a displacement instruction comprising the target displacement direction and the target displacement amount to a motor controller, so that the motor controller controls the motor to drive the objective lens to displace the target displacement amount along the target displacement direction.
6. The method according to any one of claims 1 to 3, wherein the emitting the first laser beam toward the object to be observed by the laser source to cause the object to be observed to reflect the first laser beam to the laser receiving device comprises:
judging whether the focus of the objective lens is positioned on the object to be observed or not according to the imaging image of the objective lens;
and when the object to be observed is judged not to be positioned on the object to be observed, a first laser beam is emitted to the object to be observed by utilizing the laser source so that the object to be observed reflects the first laser beam to the laser receiving device.
7. A method according to any of claims 1-3, characterized in that the method comprises:
and shooting an imaging image of the objective lens through a preset camera and storing the imaging image.
8. A laser-based focusing system, the system comprising:
the laser source is used for emitting a first laser beam to an object to be observed so that the object to be observed reflects the first laser beam to the laser receiving device;
a laser receiving device for receiving the reflected first laser beam and determining a first laser intensity of the reflected first laser beam;
the control device is used for determining the displacement of the object to be detected relative to the initial position according to the first laser intensity and the initial laser intensity, the focus of the objective lens is located at the initial position, and the initial laser intensity is determined according to the laser intensity of the second laser beam reflected when the object to be observed is located at the initial position; determining the target displacement amount and the target displacement direction of the objective lens according to the displacement amount of the object to be detected relative to the initial position;
and the driving device is used for driving the objective lens to displace the target displacement along the target displacement direction so as to enable the focus of the objective lens to be positioned on the object to be observed.
9. The system of claim 8,
the driving device can also be used for driving the objective lens to displace so that the focal point of the objective lens is positioned on the object to be observed;
the laser source can also be used for emitting a second laser beam to the object to be observed at the initial position so that the object to be observed reflects the second laser beam to the laser receiving device;
the laser receiving device may be further configured to receive the reflected second laser beam and determine the initial laser intensity based on the laser intensity of the reflected second laser beam.
10. The system of claim 8 or 9, wherein the drive means comprises a motor controller and a motor,
the control device may be further configured to send a displacement command including the target displacement direction and the target displacement amount to a motor controller,
the motor controller is configured to control the motor, and the motor is configured to drive the objective lens to displace the target displacement amount in the target displacement direction.
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Application publication date: 20210514 |