CN112782938B - Movable slit device and photoetching system - Google Patents

Movable slit device and photoetching system Download PDF

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Publication number
CN112782938B
CN112782938B CN201911072975.4A CN201911072975A CN112782938B CN 112782938 B CN112782938 B CN 112782938B CN 201911072975 A CN201911072975 A CN 201911072975A CN 112782938 B CN112782938 B CN 112782938B
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Prior art keywords
blade
light blocking
movable slit
air
floating
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CN112782938A (en
Inventor
黄磊
李平欣
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Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70308—Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70316—Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

The invention belongs to the technical field of photoetching, and particularly discloses a movable slit device and a photoetching system. The movable slit device comprises a base, a Y-direction light blocking mechanism and an X-direction light blocking mechanism, the Y-direction light blocking mechanism comprises a Y-direction blade and a Y-direction driving mechanism, the Y-direction blade comprises a first connecting part and a first light blocking blade part, a first blade edge is formed at one end of the first light blocking blade part, and two groups of Y-direction light blocking mechanisms with the included angles of 60-120 degrees are arranged opposite to the first blade edges of the first light blocking blade part; the X-direction light blocking mechanisms comprise X-direction blades, and second knife edges of the two groups of X-direction light blocking mechanisms are arranged oppositely; the two second knife edges and the two first knife edges can form a rectangular slit window on the XY projection plane in an enclosing manner. The lithography system comprises the movable slit apparatus described above. The movable slit device and the photoetching system provided by the invention have the advantages that the heat dissipation performance of the knife edge of the movable slit device is improved, the half shadow of the knife edge is reduced, the quality of the knife edge imaging profile is improved, and the photoetching precision is improved.

Description

Movable slit device and photoetching system
Technical Field
The invention relates to the technical field of photoetching, in particular to a movable slit device and a photoetching system.
Background
Due to the development of very large scale integrated circuits, the lithography technology gradually transits from contact exposure to projection exposure, and simultaneously, the numerical aperture of the exposure system is also continuously increased along with the gradual improvement of the lithography resolution, which makes the manufacturing of the lithography projection objective more and more complicated. In order to reduce the design difficulty of the lithography projection objective, a modern lithography system generally adopts a step scanning mode to realize large-field exposure under high resolution. And at the initial and final positions of one exposure visual field, the position of partial illumination visual field is outside the exposure visual field, and the illumination visual field beyond the exposure visual field can irradiate the adjacent exposure visual field. In order to limit the size and the central position of the illumination field of the mask surface in the scanning exposure process and avoid the exposure of the imaging beam to the area outside the exposure field, a scanning blade in a movable slit device is required to be synchronously moved with the mask to carry out dynamic light interception, and a non-scanning blade is required to limit the size and the central position of the instantaneous illumination field of the mask surface.
In the light blocking process of the movable slit device, the image of the slit knife edge on the mask surface cannot exceed the width of each side of the mask, otherwise, the effective area of the mask is reduced, unnecessary exposure is caused, and therefore illumination integral uniformity, exposure efficiency and yield of adjacent fields are affected; the size of the imaged penumbra is mainly influenced by the distance between the scanning blade and the non-scanning blade in the movable slit device, the thickness of the knife edge, the shape error of the knife edge, the thermal deformation of the knife edge and the like. The smaller the distance between blades, the thickness of the knife edge, the shape error of the knife edge, the thermal deformation of the knife edge and the like, the smaller the half shadow of the knife edge.
The prior art discloses a movable knife edge device, which comprises an upper Y-direction blade, a lower Y-direction blade, a left X-direction blade and a right X-direction blade, wherein the four blades are combined to form a slit window, and an external illumination grating projects and exposes a mask pattern onto a silicon wafer through the slit window. The movable knife edge device also comprises a frame and four linear motors, wherein the four blades and the four linear motors are all arranged in the frame, and the left X-direction blade and the right Y-direction blade are arranged in the X direction and are all positioned in an X-direction moving layer; the upper Y-direction blades and the lower Y-direction blades are arranged in the Y direction and are all positioned in the Y-direction moving layer, the four blades are respectively driven by four linear motors to enable the X-direction blades to move in the frame along the X direction, and the Y-direction blades move in the frame along the Y direction.
In the movable knife edge device provided by the prior art, four blades are independently driven by four linear motors, so that better dynamic following precision at higher scanning speed can be ensured. However, in the prior art, the projection of the blade on the XY plane is in a rectangular structure, a non-scanning knife edge is formed on one side of the X-direction blade along the Y direction, a scanning knife edge is formed on one side of the Y-direction blade along the X direction, when the two non-scanning knife edges and the two scanning knife edges surround to form a slit window, the two X-direction blades are respectively located between the knife edge of the corresponding Y-direction blade and the linear motor, that is, in order to provide enough space for the X-direction blade, the distance that the Y-direction blade extends out of the linear motor is long, and in the process of scanning following movement of the Y-direction blade, the knife edge end is easy to vibrate and deform, thereby reducing the knife edge imaging quality and easily making the knife edge imaging exceed each side range; in addition, the arrangement mode of the X-direction blade and the Y-direction blade in the prior art enables the structure around the slit window to be high in compactness, the heat generated by long-time light blocking of the blades in the exposure process is slowly dissipated, and the thermal stress and thermal deformation generated by light blocking of the blades are increased, so that the width of a knife edge penumbra is increased, the quality of a knife edge imaging profile is reduced, and the development of a photoetching system with high precision and high yield is not facilitated.
Disclosure of Invention
The invention aims to provide a movable slit device, which can improve the heat dissipation performance of a knife edge of the movable slit device, reduce the width of a knife edge penumbra and improve the quality of a knife edge imaging profile.
It is another object of the present invention to provide a lithography system that improves the lithography accuracy and the lithography yield of the lithography system.
In order to achieve the purpose, the invention adopts the following technical scheme:
a movable slit apparatus comprising:
a base;
the Y-direction light blocking mechanism is arranged on the base and comprises Y-direction blades and Y-direction driving mechanisms, each Y-direction blade comprises a first connecting part and a first light blocking knife part arranged along the Y direction, a first knife edge is formed at one end of each first light blocking knife part, the other end of each first light blocking knife part is connected with one end of each first connecting part, the other end of each first connecting part is connected with the Y-direction driving mechanism, the included angle between each first light blocking knife part and each first connecting part ranges from 60 degrees to 120 degrees, the Y-direction light blocking mechanisms are divided into two groups, and the first knife edges of the two groups of Y-direction light blocking mechanisms are arranged oppositely;
the X-direction light blocking mechanisms are arranged on the base and comprise X-direction blades, second knife edges along the Y direction are formed at one ends of the X-direction blades, two groups of the X-direction light blocking mechanisms are arranged, and the second knife edges of the two groups of the X-direction light blocking mechanisms are arranged oppositely;
the two second knife edges and the two first knife edges can form a rectangular slit window on the XY projection plane in an enclosing manner.
As a preferable embodiment of the movable slit device, the first light blocking blade portion is perpendicular to the first connecting portion.
As a preferable technical solution of the movable slit device, the first connecting portion is provided with a plurality of heat dissipation holes.
As a preferable technical solution of the movable slit device, the first connecting portion is provided with a lightening hole.
As a preferable embodiment of the movable slit apparatus, the Y-direction blade is made of composite SiC.
As a preferable technical scheme of the movable slit device, the thickness of the Y-direction blade is 1.9 mm-2.1 mm.
As a preferable technical solution of the movable slit device, the two Y-direction blades are coplanar, the two X-direction blades are coplanar, and a distance between the Y-direction blade and the base is smaller than a distance between the X-direction blade and the base.
As a preferable embodiment of the movable slit apparatus, a distance between the Y-direction blade and the X-direction blade in the Z direction is 0.03mm to 0.1mm.
As a preferable technical solution of the movable slit device, the X-direction light blocking mechanism further includes an X-direction driving mechanism, and the X-direction driving mechanism is connected to the X-direction blade and is configured to drive the X-direction blade to move along the X-direction.
As a preferred technical scheme of the movable slit device, the X-direction blade includes a second connecting portion and a second light blocking knife portion disposed along the X-direction, one end of the second light blocking knife portion is formed with the second knife edge, the other end of the second light blocking knife portion is connected with one end of the second connecting portion, the other end of the second connecting portion is connected with the X-direction driving mechanism, and an included angle between the second connecting portion and the second light blocking knife portion is 60 ° to 120 °.
As a preferable technical solution of the movable slit apparatus, the base is provided with a light hole, the two Y-direction blades and the two X-direction blades are staggered around the light hole, an inner side corner of each Y-direction blade faces one X-direction blade, and an inner side corner of the X-direction blade faces the other Y-direction blade.
As a preferable embodiment of the movable slit apparatus, the Y-direction drive mechanism includes: and a Y-direction linear motor.
As a preferable embodiment of the movable slit apparatus, the Y-direction linear motor includes:
the magnetic track is arranged along the Y direction and comprises a first part and a second part which are connected to form an inverted L-shaped structure, the first part is vertically connected with the base, and the second part is parallel to and spaced from the base;
a first stator group arranged on one side of the second part facing the base;
the second stator group is arranged on the base, and the first stator group and the second stator group are parallel to each other in the Z direction and are arranged oppositely;
and the motor rotor comprises an insertion part parallel to the first stator group, and the insertion part is slidably inserted between the first stator group and the second stator group.
As a preferable embodiment of the movable slit device, the Y-direction light blocking mechanism further includes:
the air-floating slide block comprises a main air-floating part parallel to the base, the main air-floating part is arranged on one surface, far away from the base, of the magnetic track, a first air-floating hole is formed in one surface, facing the magnetic track, of the main air-floating part, and the Y-direction blade is connected with the motor rotor through the air-floating slide block.
As a preferred technical solution of the movable slit device, the air-floating slider further includes a lateral air-floating portion, one end of the lateral air-floating portion is perpendicular to the base, the other end of the lateral air-floating portion is connected to the main air-floating portion, the lateral air-floating portion is disposed outside the first portion, and a second air-floating hole is disposed on a surface of the lateral air-floating portion facing the first portion.
As a preferable embodiment of the movable slit device, the Y-direction light blocking mechanism further includes:
the first pre-tightening magnet is arranged on the main air floatation part and used for generating magnetic attraction force along the Z direction with the magnetic track; and/or
And the second pre-tightening magnet is arranged on the lateral air floatation part and used for generating magnetic attraction along the X direction between the magnetic track and the second pre-tightening magnet.
As a preferable embodiment of the movable slit device, the Y-direction light blocking mechanism further includes:
and the limiting buffer assembly is used for limiting two limit positions of the Y-direction blade moving along the Y direction.
As the preferred technical scheme of a movable slit device, there are two sets of spacing buffering subassembly, two sets of spacing buffering subassembly sets up respectively at the magnetic track along the both ends of Y direction, every group spacing buffering subassembly all includes:
the buffer cushion is made of a flexible material and is arranged on the end face of the magnetic track along the Y direction;
the stopper sets up the blotter is kept away from one side of magnetic track, just the stopper protrusion the magnetic track is kept away from a side surface of base.
As a preferable embodiment of the movable slit device, the Y-direction light blocking mechanism further includes:
and the Y-direction anti-collision frame is connected with the air floatation sliding block, faces one end of the other Y-direction light blocking mechanism and protrudes out of the first knife edge in the Y direction.
As a preferable aspect of the movable slit apparatus, the movable slit apparatus further includes:
a Y-direction detection assembly, which comprises a first emitter and a first sensor, wherein one of the first emitter and the first sensor is arranged on a Y-direction collision avoidance frame of one Y-direction light blocking mechanism, the other one of the first emitter and the first sensor is arranged on a Y-direction collision avoidance frame of the other Y-direction light blocking mechanism, and the emission signal of the first emitter can be received by the first sensor within a preset range;
and the controller is connected with the Y-direction detection assembly and the two Y-direction light blocking mechanisms, and controls the two Y-direction light blocking mechanisms to operate according to a received signal of the first sensor.
A lithographic system comprising a movable slit apparatus as described above.
The invention has the beneficial effects that:
according to the movable slit device provided by the invention, the first knife edge of the Y-direction knife is arranged at the end part of the first light blocking knife part instead of being arranged at the side part of the knife blade like a conventional knife blade, so that the contact range of the Y-direction knife blade and the X-direction knife blade on an XY projection surface when the Y-direction knife blade and the X-direction knife blade surround to form a slit window can be reduced, the structural density at the periphery of the slit window is reduced, the heat dissipation performance of the Y-direction knife blade in a long-time light blocking process is improved, the thermal stress and thermal deformation of the first knife edge are reduced, the half-image width of the knife edge is reduced, and the imaging profile quality of the knife edge is improved; meanwhile, a first included angle is formed between the first connecting part and the first light blocking part, and the first included angle can provide an avoidance space for the arrangement and operation of the X-direction blade, so that the first light blocking blade part does not need to extend out of an overlong distance, the rigidity of the Y-direction blade after being connected with the Y-direction driving mechanism is improved, the vibration amplitude and the vibration probability in the scanning motion process of the first knife edge are reduced, and the knife edge imaging profile quality is improved; moreover, an included angle is formed between the first light blocking cutter part and the first connecting part, and the first connecting part is connected with the Y-direction driving mechanism, so that the heat conductivity from the first light blocking cutter part to the Y-direction driving mechanism can be reduced, the thermal stress and the thermal deformation of the Y-direction driving mechanism are reduced, the dynamic error of the driving of the Y-direction driving mechanism is reduced, the better dynamic following performance at a better scanning speed is ensured, and the knife edge imaging quality is further improved.
The photoetching system provided by the invention improves the photoetching precision and the photoetching yield by adopting the movable slit device.
Drawings
FIG. 1 is a schematic block diagram of a lithography system according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a movable slit apparatus provided in an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a base provided in an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a Y-direction blade provided by an embodiment of the invention;
FIG. 5 is a simulation diagram of temperature distribution of a Y-direction light blocking mechanism provided in an embodiment of the present invention;
FIG. 6 is a schematic view of the projection of the Y-direction blade and the X-direction blade on the YZ plane according to the embodiment of the present invention
FIG. 7 is a schematic structural diagram of a Y-direction light-blocking mechanism provided in an embodiment of the present invention in a first direction;
fig. 8 is a schematic structural diagram of a Y-direction light blocking mechanism provided in an embodiment of the present invention in a second direction.
The figures are labeled as follows:
10-a movable slit means; 20-an integrating rod; 30-a laser beam; 40-a relay lens group; 50-a mask table; 60-mask plate; 70-projection objective; 80-a workbench; 90-a substrate;
1-Y direction light blocking mechanism; 11-Y direction blade; 111-a first connection; 1111-heat dissipation holes; 1112-lightening holes; 112-a first light barrier cutter portion; 1121-first edge; 11211-a first straight portion; 11212-a first inclined portion; a 12-Y direction driving mechanism; 121-track; 1211-first part; 1212-a second portion; 122-a first set of stators; 1221-a first stator; 123-a second stator group; 1231-a second stator; 124-motor mover; 1241-insert part; 1242-head; 13-a transfer block; 14-an air-floating slide block; 141-main air flotation part; 1411-pre-tightening magnetic grooves; 142-a lateral air flotation part; 15-a displacement detection assembly; 151-grating strips; 152-a grating read head; 153-a fixed seat; 16-a limit cushioning assembly; 161-a cushion pad; 162-a stop block; 17-a first preloaded magnet; 18-a second preloaded magnet; 19-Y direction anti-collision frame; 191-an anti-collision part; 120-a transition strip;
2-X direction light blocking mechanism; a 21-X direction blade; 211-a second connection; 212-a second light obstructing cutter portion; 2121-second knife edge; 21211-a second straight portion; 21212-a second inclined portion; a 22-X direction drive mechanism; 23-X direction collision avoidance frame; 231-first X bumper strip; 232-second X bumper strip; 233-reinforcing bumper strips;
3-a base; 31-a light-transmitting hole; 32-a mounting surface; 321-X direction mounting part; 322-Y direction mounting part; 323-first detent; 324-a second detent;
a 4-Y direction detection component; 41-a first emitter; 42-a first inductor;
a 5-X direction detection component; 51-a second transmitter; 52-second inductor.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings, not all of them.
In the description of the present invention, unless otherwise explicitly specified or limited, the terms "connected," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. "beneath," "under" and "beneath" a first feature includes the first feature being directly beneath and obliquely beneath the second feature, or simply indicating that the first feature is at a lesser elevation than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "right", etc. are used in an orientation or positional relationship based on that shown in the drawings only for convenience of description and simplicity of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to be limiting.
Fig. 1 is a schematic view illustrating an exposure principle of a lithography system according to an embodiment of the present invention, and as shown in fig. 1, the embodiment of the present invention provides a lithography system for step-and-scan exposure of a substrate 90, such as a silicon wafer, to form a lithography pattern on the substrate 90. The lithography system includes a light source, a movable slit apparatus 10, a relay lens group 40, a mask stage 50, a stage 80, and the like. The movable slit device 10 can form a slit window, the mask plate 60 is arranged on the mask table 50, the base plate 90 for photoetching is arranged on the workbench 80, the laser beam 30 emitted by the light source is converged by the integrating rod 20 and then passes through the slit window formed by the movable slit device 10 to form a beam with a certain field of view, the beam passes through the middle lens group, the formed field of view outline is projected onto the mask plate 60 of the mask table 50, and finally reaches the position on the workbench 80 after passing through the projection objective 70, the mask pattern on the mask plate 60 is imaged onto the base plate 90 of the workbench 80, and the base plate 90 is exposed.
Fig. 2 is a schematic structural diagram of the movable slit apparatus 10 according to an embodiment of the present invention, and as shown in fig. 2, a coordinate system for describing the movable slit apparatus 10 is established. In the present embodiment, the direction opposite to the propagation direction of the principal ray (optical axis direction) is taken as the Z direction, and the slit window, the mask 60 and the substrate 90 are all perpendicular to the optical axis direction. The scanning direction of the movable slit apparatus 10 is defined as a Y direction, the X direction is defined as a non-scanning direction, and the X direction, the Y direction, and the Z direction satisfy the right-hand rule.
As shown in fig. 2, the movable slit apparatus 10 provided in the present embodiment mainly includes: the device comprises a base 3, two groups of Y-direction light blocking mechanisms 1 and two groups of X-direction light blocking mechanisms 2. The Y-direction light blocking mechanism 1 is arranged on the base 3 and comprises a Y-direction blade 11 and a Y-direction driving mechanism 12 for driving the Y-direction blade 11 to move along the Y direction, the end part of the Y-direction blade 11 is provided with a first blade 1121 arranged along the X direction, and the Y-direction blades 11 of the two groups of Y-direction light blocking mechanisms 1 are arranged in parallel and opposite to each other. The X-direction light blocking mechanism 2 comprises an X-direction blade 21 and an X-direction driving mechanism 22 for driving the X-direction blade 21 to move along the X direction, the X-direction blade 21 is provided with second knife edges 2121 arranged along the Y direction, and the second knife edges 2121 of the two groups of X-direction light blocking mechanisms 2 are parallel and oppositely arranged. The two first knife edges 1121 form a scanning knife edge group, the two second knife edges 2121 form a non-scanning knife edge group, and the two first knife edges 1121 and the two second knife edges 2121 can form a rectangular slit window.
The exposure principle using the movable slit apparatus 10 is as follows: the mask 60 is provided with an alignment area and a plurality of pattern areas arranged in a periodic array, the alignment area is located on two sides of the mask 60 and symmetrically distributed, and the alignment area is provided with alignment marks for aligning the mask with the substrate 90 during exposure. Each pattern area corresponds to a print area on the substrate 90, and an exposure area is formed by a pattern area on the reticle 60 and the corresponding print area on the substrate 90. During exposure, the scanning edge follows the mask stage 50 at the same speed and direction, keeping the scanning edge stationary with the alignment marks of the reticle 60. If the exposure is full-field exposure, the non-scanning knife edge group does not need to move; if the exposure is the local exposure, the non-scanning knife edge is moved to the field of view of the local exposure, the shape of the illumination light spot is controlled by a slit window formed by the non-scanning knife edge and the scanning knife edge, then the non-scanning knife edge group can be kept still, the exposure field of view can be removed from one exposure area by only moving the mask table 50 and the working table 80, then the other exposure area is moved into the exposure field of view, and the exposure is continued, so that the exposure of all the exposure areas is completely carried out.
Specifically, fig. 3 is a schematic structural diagram of a base according to an embodiment of the present invention, as shown in fig. 3, in this embodiment, the base 3 is hexahedral, which facilitates processing and installation of the Y-direction light blocking mechanism 1 and the X-direction light blocking mechanism 2 on the base 3. The base 3 has a mounting surface 32 parallel to the XY plane, and the Y-direction light blocking mechanism 1 and the X-direction light blocking mechanism 2 are mounted on the mounting surface 32. The middle of the mounting surface 32 is provided with a light transmitting hole 31 penetrating the base 3 in the Z direction, and light is irradiated to the rear end device of the movable slit device 10 through the slit window and the light transmitting hole 31. Preferably, the mounting surface 32 has four mounting portions including two X-direction mounting portions 321 disposed along the X-direction and two Y-direction mounting portions 322 disposed along the Y-direction. The two Y-direction mounting portions 322 and the two X-direction mounting portions 321 are disposed in a staggered manner around the light transmission hole 31, and an end portion of each mounting portion is connected to a side portion of the other mounting portion perpendicular thereto. By arranging the mounting surface 32, the area of the mounting surface 32 can be reduced, so that the area of the surface finish machining surface of the base 3 is reduced, the flatness of the mounting surface 32 is more favorably ensured, and the machining cost is reduced. Through setting up four installation departments, can realize Y to blocking light mechanism 1 and X to blocking light mechanism 2's installation location on the one hand, on the other hand improves and can avoid Y to blocking light mechanism 1 and X to blocking the interference between the light mechanism 2, improves the overall arrangement rationality.
Fig. 4 is a schematic structural diagram of a Y-direction blade according to an embodiment of the present invention, and as shown in fig. 2 and 4, the Y-direction driving mechanism 12 drives the Y-direction blade 11 to move along the Y direction, so that the Y-direction blade 11 serves as a scanning blade and can move synchronously with the mask stage 50 along the scanning direction during the scanning exposure process. In this embodiment, the Y-direction blade 11 includes a first connection portion 111 and a first light blocking blade portion 112 arranged along the Y-direction, one end of the first light blocking blade portion 112 is provided with a first blade opening 1121, the other end of the first light blocking blade portion 112 is connected to one end of the first connection portion 111, the other end of the first connection portion 111 is connected to the Y-direction driving mechanism 12, a first included angle is formed between the first light blocking blade portion 112 and the first connection portion 111, the first included angle ranges from 60 ° to 120 °, and the first light blocking blade portions 112 of the two Y-direction blades 11 are located on the same straight line.
In the present embodiment, by disposing the first blade 1121 of the Y-directional blade 11 at the end of the first light blocking blade portion 112, rather than at the side of the blade as in a conventional blade, when the Y-directional blade 11 and the X-directional blade 21 surround to form a slit window, the contact range of the Y-directional blade 11 and the X-directional blade 21 on the XY projection plane can be reduced, the structural density at the periphery of the slit window is reduced, the heat dissipation performance of the Y-directional blade 11 in a long-time light blocking process is improved, the thermal stress and the thermal deformation of the first blade 1121 are reduced, the blade penumbra width is reduced, and the blade imaging profile quality is improved; meanwhile, a first included angle is formed between the first connecting portion 111 and the first light blocking knife portion 112, and the first included angle can provide an avoidance space for the setting and operation of the X-direction blade 21, so that the first light blocking knife portion 112 does not need to extend out of an excessively long distance, the rigidity of the Y-direction blade 11 after being connected with the Y-direction driving mechanism 12 is improved, the vibration amplitude and the vibration probability in the scanning movement process of the first knife edge 1121 are reduced, and the knife edge imaging profile quality is improved; moreover, because an included angle is formed between the first light blocking knife part 112 and the first connecting part 111, and the first connecting part 111 is connected with the Y-direction driving mechanism 12, the heat conductivity from the first light blocking knife part 112 to the Y-direction driving mechanism 12 can be reduced, the thermal stress and the thermal deformation of the Y-direction driving mechanism 12 can be reduced, the dynamic error of the driving of the Y-direction driving mechanism 12 can be reduced, the better dynamic following performance at a better scanning speed can be ensured, and the knife edge imaging quality can be further improved.
In this embodiment, the first included angle is preferably 90 °, that is, the first light blocking knife portion 112 is perpendicular to the first connection portion 111, so as to facilitate the processing of the Y-direction blade 11 and the connection between the Y-direction blade 11 and the Y-direction driving mechanism 12, and meanwhile, to further ensure the structural rigidity and the heat conduction performance of the Y-direction blade 11. More preferably, the Y-direction blade 11 is provided with an inclined chamfer at the outer side connection part of the first light blocking knife part 112 and the first connection part 111, which is beneficial to reducing the mass of the Y-direction blade 11 and providing avoidance for the arrangement of the X-direction light blocking mechanism 2. Further, in order to reduce the edge angle of the Y-direction blade 11, the inclined chamfer portion is connected with the first light blocking blade portion 112 and the first connecting portion 111 in an arc transition manner in sequence, and the inner side connecting portion of the first light blocking blade portion 112 and the first connecting portion 111 is connected in an arc transition manner.
More preferably, in the present embodiment, the first connecting portion 111 is opened with a plurality of heat dissipation holes 1111. The heat dissipation holes 1111 are disposed to improve the heat dissipation of the Y-direction blade 11 without reducing the structural rigidity and strength of the first light blocking blade 112, reduce the thermal stress and thermal deformation at the first blade 1121, and at the same time reduce the heat transfer efficiency from the Y-direction blade 11 to the Y-direction driving mechanism 12, so that the Y-direction blade 11 has good heat insulation and conduction performance, and reduce the thermal deformation of the Y-direction driving mechanism 12. Fig. 5 is a temperature simulation analysis diagram of the Y-direction light blocking mechanism 1 according to the embodiment of the present invention, as shown in fig. 5, the temperature at the first knife edge 1121 is the highest, the high temperature region of the Y-direction light blocking mechanism 1 is substantially distributed at the first knife edge 112, and the Y-direction driving mechanism 12 is substantially not affected by the high temperature at the first knife edge 1121, so that the Y-direction driving mechanism 12 is effectively ensured to be within an appropriate temperature range, and the dynamic performance of the Y-direction driving mechanism 12 is ensured.
In this embodiment, more preferably, the end of the first connecting portion 111 away from the first light blocking blade portion 112 is provided with a lightening hole 1112, which can further reduce the mass of the Y-direction blade 11, thereby reducing the mass of the whole Y-direction light blocking mechanism 1, further reducing the X-direction eccentric torque of the Y-direction light blocking mechanism 1, improving the dynamic following performance of the Y-direction light blocking mechanism 1 under the high-speed scanning motion, and further facilitating the improvement of the structural stability and following motion precision of the movable slit device 10; meanwhile, as the mass of the Y-direction light blocking mechanism 1 is reduced, the reaction force generated in the high-speed movement process is correspondingly reduced, and the vibration influence of the Y-direction light blocking mechanism 1 on the illumination optical system at a high speed is reduced.
As shown in fig. 2, in the present embodiment, the X-direction light blocking mechanism 2 includes an X-direction blade 21 and an X-direction driving mechanism 22, so that the X-direction blade 21 is a non-scanning blade, and can be driven by the X-direction driving mechanism 22 to move along the X direction before scanning exposure, and the width and position of the slit window in the X direction are adjusted to adjust and determine the size and position of the exposure field corresponding to the slit window. In other embodiments, the X-directional blade 21 in the X-directional light blocking mechanism 2 may also be a non-moving blade, that is, the positions of the two X-directional blades 21 are fixed, so that the exposure field is adjustable only in the Y direction.
In this embodiment, it is preferable that the X-direction blade 21 includes a second connecting portion 211 and a second light blocking blade portion 212 along the X-direction, one end of the second light blocking blade portion 212 is provided with a second blade edge 2121, the other end is connected to one end of the second connecting portion 211, and one end of the second connecting portion 211 is connected to the X-direction driving mechanism 22. A second included angle is formed between the second light blocking knife part 212 and the second connecting part 211, and the range of the second included angle is 60 degrees to 120 degrees. In this arrangement, the second blade edge 2121 can be formed at the blade portion of the X-direction blade 21, not at the side portion of the X-direction blade 21, and the contact range between the Y-direction blade 11 and the X-direction blade 21 on the XY projection plane can be further reduced, thereby improving the heat dissipation performance at the first blade edge 1121 and the second blade edge 2121.
More preferably, in the present embodiment, the second connecting portion 211 and the second light barrier blade portion 212 are perpendicular, and the X-direction blade 21 is provided with a second inclined chamfered portion at a connection portion of the second connecting portion 211 and an outer side of the second light barrier blade portion 212. The second oblique chamfer part is respectively in arc transition connection with the second light blocking knife part 212 and the second connecting part 211.
In the present embodiment, since the two X-direction blades 21 and the two Y-direction blades 11 are arranged around the light transmission hole 31 in a staggered manner, the inner corner of each X-direction blade 21 faces the Y-direction blade 11 adjacent thereto, and the inner corner of each Y-direction blade 11 faces the other X-direction blade 21 adjacent thereto. This arrangement of the X-direction blade 21 and the Y-direction blade 11 can effectively reduce the degree of coincidence of the X-direction blade 21 and the Y-direction blade 11 on the XY projection plane, and at the same time, can reduce the overall size of the movable slit device 10 and can avoid structural interference between the X-direction blade 21 and the Y-direction blade 11. In the present embodiment, the inside corner of each blade faces the other blade in the counterclockwise direction, and in other embodiments, when the X-direction driving mechanism 22 and the Y-direction driving mechanism 12 on the same side are exchanged to the installation position on the base 3, the inside corner of each blade may face the other blade in the clockwise direction.
Fig. 6 is a schematic projection view of a Y-direction blade and an X-direction blade on a YZ plane according to an embodiment of the present invention, and as shown in fig. 6, the first blade 1121 includes a first flat portion 11211 and a first inclined portion 11212 arranged along the Z direction, the second inclined portion 21212 is located on a side of the first flat portion 11211 facing the base 3, the first flat portion 11211 is perpendicular to the XY plane, the first inclined portion 11212 is inclined with respect to the XY plane, and an inclination direction of the first inclined portion 11212 is facing the base 3. The thickness of the first straight portion 11211 is 0.05mm to 0.15mm, and most preferably 0.1mm. The thickness of the Y-direction blade 11 is 1.5mm to 2mm, and preferably 1.9mm to 2mm. The first inclined portion 11212 has an angle a of 30 to 60 ° with respect to the XY plane.
The second blade edge 2121 includes a second straight portion 21211 and a second inclined portion 21212, the second inclined portion 21212 is located on a side of the second straight portion 21211 away from the base 3, the second straight portion 21211 is perpendicular to the XY plane, and the second inclined portion 21212 is inclined with respect to the XY plane in a direction away from the base 3.
In the present embodiment, the distance from the base 3 to the X-direction blade 21 is greater than the distance from the base 3 to the Y-direction blade 11, so that the X-direction blade 21 and the Y-direction blade 11 are not coplanar in the Z-direction, thereby avoiding interference between the X-direction blade 21 and the Y-direction blade 11 during movement. In the present embodiment, the distance from the surface of the X-direction blade 21 facing the base 3 to the surface of the Y-direction blade 11 away from the base 3 is defined as the coplanar distance a, and in the present embodiment, the coplanar distance a is 0.03mm to 0.1mm, so that the coplanar distance is reduced as much as possible, the off-focus distance of the blade is reduced, and the imaging penumbra width of the blade is reduced.
In this embodiment, the Y-direction blade 11 is made of a composite SiC material, and has the advantages of high hardness, light weight, low thermal expansion coefficient, high wear resistance, high hardness, high precision of the shape of the blade edge, small blade edge thickness, and the like, and can reduce the blade edge penumbra width of the Y-direction blade 11 and improve the blade edge imaging profile quality. More preferably, the X-direction blade and the Y-direction blade are made of the same material.
Fig. 7 is a schematic structural diagram of a Y-direction light blocking mechanism provided in an embodiment of the present invention in a first direction, and fig. 8 is a schematic structural diagram of the Y-direction light blocking mechanism provided in an embodiment of the present invention in a second direction, as shown in fig. 7 and 8, in the embodiment, the Y-direction driving mechanism 12 includes a Y-direction linear motor, and the Y-direction linear motor includes a magnetic track 121, a first stator group 122, a second stator group 123, and a motor mover 124. The magnetic track 121 is disposed in the Y direction, and the magnetic track 121 includes a first portion 1211 and a second portion 1212 that are perpendicular to each other. One end of the first portion 1211 is vertically connected to the base 3, and the base 3 is provided with a second positioning groove 324 for mounting and positioning the magnetic track 121. The other end of the first portion 1211 is perpendicularly connected to the second portion 1212, and the second portion 1212 is parallel to the base 3 and spaced apart from the base 3 by a predetermined distance, so that an accommodating space is formed between the magnetic track 121 and the base 3.
The first stator group 122 and the second stator group 123 are disposed in the accommodating space, and the first stator group 122 and the second stator group 123 are disposed in parallel and spaced in the Z direction. The first stator group 122 includes a plurality of first stators 1221 arranged at regular intervals in the Y direction, and the second stator group 123 includes a plurality of second stators 1231 arranged at regular intervals in the Y direction. Each of the first stators 1221 and the second stators 1231 is disposed along the X direction, and the number and the positions of the first stators 1221 and the second stators 1231 are in one-to-one correspondence.
In the present embodiment, second stator group 123 is provided on base 3, and first stator group 122 is mounted on magnetic track 121. Specifically, the base 3 is provided with a plurality of first positioning grooves 323 on the Y-direction mounting portion 322, the first positioning grooves 323 are uniformly spaced along the Y-direction and are arranged corresponding to the second stators 1231 one to one, and each second stator 1231 is installed in the corresponding first positioning groove 323. The magnetic track 121 has a plurality of third positioning grooves formed in an inner surface of the second portion 1212, the plurality of third mounting grooves are in one-to-one correspondence with the first stators 1221, and the second stators 1221 are mounted in the third positioning grooves. The first stator group 122 is mounted on the base 3, and the second stator group 123 is mounted on the magnetic track 121, so that the mass of the magnetic track 121 can be reduced, the dimension in the Z direction of the Y-direction light blocking mechanism 1 can be reduced, the Z-direction eccentricity of the mass center of the Y-direction light blocking mechanism 1 can be further reduced, the eccentric torque of the Y-direction light blocking mechanism 1 can be further reduced, and the motion acceleration and the control accuracy of the Y-direction light blocking mechanism 1 can be further improved. In other embodiments, magnetic track 121 may also be in a U-shaped structure, and first stator group 122 and second stator group 123 are respectively disposed on the inner sides of two sides of the U-shaped structure.
An insertion groove is formed in the inner side wall of the first portion 1211 along the Y direction, a surface of the first stator group 122 facing away from the base 3 is parallel to a side wall of the insertion groove, and a surface of the second stator group 123 facing the base 3 is parallel to the other side wall of the insertion groove. The motor mover 124 includes an insertion portion 1241 and a head portion 1242 which are vertically connected, the insertion portion 1241 is parallel to the first stator set 122, and is inserted into a gap between the first stator set 122 and the second stator set 123, and maintains a certain installation gap with both the first stator set 122 and the second stator set 123, and an end of the insertion portion 1241, which is far away from the head portion 1242, extends into the insertion slot. The head 1242 is located outside the receiving space to enable connection of the motor mover 124 with other structures.
The linear electric motor that this embodiment provided is U type slot linear electric motor's improvement, except that above-mentioned structure sets up, but U type slot linear electric motor can be referred to Y to linear electric motor's theory of operation and other structure settings, and U type slot linear electric motor is the mature technique in this field, and this embodiment is no longer repeated.
In the present embodiment, the Y-directional blade 11 is connected to the motor mover 124. In order to reduce the resistance of the Y-blade 11 moving along with the motor stator 124 and improve the following accuracy of the Y-blade 11 in high-speed scanning movement, the Y-blade 11 is preferably connected to the motor stator 124 through the air-bearing slider 14. Specifically, the air-bearing slider 14 includes a lateral air-bearing portion 142 and a main air-bearing portion 141 that are perpendicular to each other and have an L-shape, the main air-bearing portion 141 is parallel to the base 3, and the main air-bearing portion 141 is located on a side of the magnetic track 121 away from the base 3. The side air-floating portion 142 is disposed with one end perpendicular to the base 3 and the other end perpendicular to the main air-floating portion 141, and the side air-floating portion 142 is located outside the first portion 1211 of the magnetic track 121.
The one side of main air supporting portion 141 towards magnetic track 121 and the one side of side direction air supporting portion 142 towards magnetic track 121 have all seted up the air supporting hole, and air supporting slider 14 is inside to be provided with the passageway of aerifing, aerifys the passageway and passes through the outside air supply intercommunication of pipeline air supporting slider 14, and every air supporting hole evenly aerifys the passageway intercommunication. When the air is inflated into the air bearing along the inflation channel by the air source, the positive pressure air enters between the main air bearing portion 141 and the lateral air bearing portion 142 and the magnetic track 121 through the air bearing holes, so that an air film is formed between the magnetic track 121 and two inner side surfaces of the air bearing slider 14, and thus the friction force between the magnetic track 121 and the air bearing slider 14 when the air bearing slider 14 slides relative to the magnetic track 121 is reduced, and the movement accuracy of the Y-direction blade 11 during high-speed follow-up movement is improved.
In this embodiment, the arrangement of the inflation air passage and the air-floating hole in the air-floating slider 14 and the communication between the inflation air passage and the external air source are conventional in the art, and are not described in detail in this embodiment.
In this embodiment, since the air-floating slider 14 is directly disposed outside the magnetic track 121, both outer surfaces of the magnetic track 121 are used as air-floating surfaces of the air-floating slider 14, which can increase the size of the air-floating slider 14, increase the air-floating action area, and significantly improve the air-floating stiffness, thereby increasing the structural mode of the Y-direction light-blocking mechanism 1, and improving the Y-direction motion acceleration and control precision. In other embodiments, the air-bearing slider 14 may include only the main air-bearing portion 141.
In this embodiment, it is more preferable that the length of the air-bearing slider 14 along the Y direction is equal to the length of the motor mover 124 along the Y direction, so as to further increase the air-bearing area. In this embodiment, one end of the main air flotation portion 141 is located on a side of the motor mover 124 away from the base 3, a transfer block 13 is disposed between the main air flotation portion 141 and the head 1242 of the motor mover 124, and the transfer block 13 is respectively in threaded connection with the motor mover 124 and the main air flotation portion 141, which is beneficial to simplifying the structural arrangement of the main air flotation portion 141. In other embodiments, the main air float 141 may also be directly connected to the motor mover 124.
In this embodiment, in order to improve the static stability of the Y-direction light blocking mechanism 1, a first pre-tightening assembly is preferably disposed between the main air floating portion 141 and the magnetic track 121 for achieving a tight connection between the air floating slider 14 and the magnetic track 121 when the air floating slider 14 is stationary relative to the magnetic track 121. More preferably, the first pretensioning assembly comprises a first pretensioning magnet 17. The surface of one side of the main air floating part 141, which is far away from the magnets, is provided with a pre-tightening magnetic groove 1411, and the first pre-tightening magnet 17 is arranged in the pre-tightening magnetic groove 1411. Magnetic attraction perpendicular to the Y direction is generated between the first pre-tightening magnet 17 and the magnetic track 121 made of metal, so that the air slider 14 is stably arranged outside the magnetic track 121, and static disturbance of the air slider 14 and the Y-direction blade 11 under the influence of gravity, air buoyancy, cable tension and the like is resisted. More preferably, in order to increase the magnetic attraction force between the air bearing slider 14 and the magnetic track 121, a plurality of pre-tightening magnetic grooves 1411 are formed in the main air bearing portion 141, and each pre-tightening magnetic groove 1411 is provided with a group of first pre-tightening magnets 17.
More preferably, a second preload assembly is disposed outside of lateral air bearing 142 to further improve the static stability between air bearing slider 14 and magnetic track 121. The second pre-tightening component comprises an adapter plate and second pre-tightening magnets 18, the adapter plate is connected to the outer side of the lateral air flotation portion 142 in a detachable and washable connection mode through threads and the like, and the second pre-tightening magnets 18 are installed on the lateral air flotation portion 142. Magnetic attraction force along the X direction is formed between the second pre-tightening magnet 18 and the magnetic track 121, and this magnetic attraction force can prevent the air bearing block from being separated from the magnetic track 121 along the X direction under the action of gravity, air buoyancy, etc., and further improve the static stability between the magnetic track 121 and the air bearing slider 14. In this embodiment, since the magnetic attraction force between first preload magnet 17 and magnetic track 121 and the magnetic attraction force between second preload magnet 18 and magnetic track 121 are perpendicular to the Y direction, the first magnetic attraction force and the second magnetic attraction force do not hinder the sliding of air slider 14 with respect to magnetic track 121.
In order to detect the movement displacement of the Y-blade 11, the Y-damming mechanism 1 further includes a Y-displacement detecting assembly 15. In this embodiment, the Y-displacement detection assembly 15 comprises a grating detection assembly comprising grating strips 151 and a grating reader head 152. Preferably, the grating strip 151 is disposed on the adapting strip 120 by means of bonding or screwing, and can move with the air floating slider 14, and the grating reading head 152 is fixed on the base 3 by the fixing seat 153 and disposed for the grating strip 151. In other embodiments, grating strips 151 are disposed on the base 3 along the Y-direction, and the grating reader 152 is disposed on the air-bearing slider 14 and moves with the air-bearing slider 14. The principle and the detection mode of using the grating detection assembly to perform displacement detection are mature technologies in the field, and are not described in detail in this embodiment. In other embodiments, a photoelectric sensor, a distance sensor, and the like may also be used to detect the movement displacement of the Y-direction blade 11, which is not described in detail in this embodiment.
In order to limit the limit position of the motor mover 124 sliding relative to the magnetic track 121, in this embodiment, the Y-direction light blocking mechanism 1 further includes a limit buffer assembly 16. Preferably, magnetic track 121 all is provided with a set of spacing buffer module 16 along two terminal surfaces in the Y to, and spacing buffer module 16 includes flexible blotter 161 and stopper 162, and the one side of blotter 161 is connected with the terminal surface of magnetic track 121, and the another side and the stopper 162 of blotter 161 are connected, and stopper 162 bulges the surface of magnetic track 121 far away from base 3 one side. When the air-floating slider 14 moves to the first limit position or the second limit position relative to the magnetic track 121, the corresponding end surface of the air-floating slider 14 contacts with the limit block 162 to limit the air-floating slider 14 to move continuously; and because the limit block 162 is connected with the flexible buffer pad 161, the buffer pad 161 can relieve the impact caused by the contact between the air-floating slider 14 and the limit block 162, and protect the air-floating slider 14 and the magnetic track 121. In another embodiment, the limiting buffer assembly 16 can be disposed at the base 3 corresponding to the first limiting position and the second limiting position. In other embodiments, the positive stop buffer assembly 16 may also be a hydraulic buffer.
In the present embodiment, as shown in fig. 2, since the two Y-direction blades 11 are disposed opposite to each other, and during the Y-direction scanning following movement, the two Y-direction blades 11 can move toward each other. In order to avoid collision between the two Y-direction blades 11, the Y-direction light blocking mechanism 1 further includes an anti-collision assembly. In this embodiment, the collision avoidance assembly includes a Y-direction collision avoidance frame 19, the Y-direction collision avoidance frame 19 is located between the Y-direction blade 11 and the base 3, and the Y-direction collision avoidance frame 19 protrudes from the first notch 1121 of the Y-direction blade 11 in the Y-direction near the end of the other Y-direction blade 11, so that when the two Y-direction blades 11 move towards each other, the two Y-direction collision avoidance frames 19 of the two Y-direction light blocking mechanisms 1 abut against the two Y-direction blades 11 before the two Y-direction blades 11, so that when the two Y-direction collision avoidance frames 19 contact, a gap is still formed between the two Y-direction blades 11, and the two Y-direction blades 11 are prevented from contacting and colliding with each other.
In this embodiment, since the Y-frame 19 protrudes beyond the front end of the first blade 1121 in the Y direction, in order to prevent the Y-frame 19 from interfering with the light passing through the slit window, in this embodiment, the Y-frame 19 includes the bump protection portion 191 located on one side of the Y-blade 11 along the X direction, so as to prevent the bump protection portion 191 from falling into the slit window. In the present embodiment, the Y-direction bumper 19 has two bumper portions 191, and the two bumper portions 191 are respectively located on both sides of the Y-direction blade 11 in the X direction. More specifically, the Y-direction bumper bracket 19 is a right-angled triangle structure composed of three bumper strips, the bumper strip forming one right-angled side of the right-angled triangle is connected to the air-bearing slider 14, and the tail end extends outward to form a bumper portion 191; the bumper strip forming the other right-angle side of the right-angle triangle is positioned on the inner side of the first blade 1121 and arranged along the X direction; the two ends of the bumper strip forming the hypotenuse of the right triangle are respectively connected with the other two bumper strips, and the tail end of the blade 11 adjacent to the other Y-direction extends outwards to form another bumper portion 191.
In this embodiment, preferably, the two Y-direction light blocking mechanisms 1 have the same structure, so as to reduce the design difficulty of the movable slit device 10, reduce the centroid shift of the movable slit device 10, and reduce the X-direction torque of the two sets of Y-direction light blocking mechanisms 1.
In this embodiment, preferably, the setting direction of the other structures of the X-direction light blocking mechanism 2 except for the X-direction blade 21 and the X-direction collision avoidance frame 23 can be changed correspondingly with reference to the Y-direction light blocking mechanism 1, and this embodiment is not described again. In this embodiment, the X-direction anti-collision frame 23 is used for preventing the two X-direction blades 21 from colliding when moving towards each other, and includes two first X-direction anti-collision strips 231 disposed along the X-direction, the two first X-direction anti-collision strips 231 are respectively located at two sides of the second knife edge 2121 along the Y-direction, the two first X-direction anti-collision strips 231 are respectively located at the outer side of the light-transmitting hole 31 along the Y-direction range, and the end portion of each first X-direction anti-collision strip protrudes out of the first knife edge 1121, so that the two X-direction anti-collision frames 23 are prevented from falling into the slit window while being capable of contacting with each other before the two X-direction blades 21. The X-direction bumper 23 further includes a second X bumper strip 232 connecting the two first X bumper strips 231 and a reinforcing bumper strip 233 for reinforcing the X-direction bumper 23.
In the present embodiment, in order to improve the reliability and controllability of the movable slit apparatus 10, in the present embodiment, the movable slit apparatus 10 further includes a Y-direction detecting unit 4, an X-direction detecting unit 5, and a controller. The Y-direction detecting assembly 4 includes a first emitter 41 and a first sensor 42, one of the two Y-direction collision avoidance frames 19 is provided with the first emitter 41, the other is provided with the first sensor 42, when the first emitter 41 and the first sensor 42 are within a certain distance range, light emitted by the first emitter 41 can be received by the first sensor 42, and the controller receives a signal of the first sensor, controls the Y-direction driving mechanisms 12 of the two Y-direction light blocking mechanisms 1 to stop moving, prevents the two Y-direction blades 11 from continuously approaching, realizes emergency braking of the movement of the Y-direction blade 11, and avoids collision between the two Y-direction blades 11.
The X-direction detection assembly 5 includes a second emitter 51 and a second sensor 52, two of the two X-direction collision avoidance frames 23 are provided with the second emitter 51, the other two X-direction collision avoidance frames are provided with the second sensor 52, when the second emitter 51 and the second sensor 52 are within a certain distance range, light emitted by the second emitter 51 can be received by the second sensor 52, and after the controller receives a signal of the second sensor 52, the controller controls the X-direction driving mechanisms 22 of the two X-direction light blocking mechanisms 2 to stop moving, so as to prevent the two X-direction blades 21 from continuously approaching, thereby realizing emergency braking of movement of the X-direction blades 21 and avoiding collision between the two X-direction blades 21.
In this embodiment, the Y-direction detecting assembly 4 and the X-direction detecting assembly 5 may be both split type photoelectric sensors, and in another embodiment, the Y-direction detecting assembly 4 and the X-direction detecting assembly 5 may also be devices capable of realizing Y-direction or X-direction collision avoidance detection, such as an electrical interlock switch, a micro sensor, and the like.
In the embodiment, the coplanar distance between the X-direction blade 21 and the Y-direction blade 11 is ensured by the assembly of four light blocking mechanisms and the processing consistency of the blades; the Y-direction light blocking mechanism 1 and the X-direction light blocking mechanism 2 are compact and simple in structure, and assembly error accumulation is reduced; meanwhile, the shape precision of the blades is high, the thermal deformation is small, and the coplanar distance A between the blades can be made very small, so that the width of a knife edge penumbra is reduced, and the quality of a knife edge imaging profile is improved. Because the X-direction blade 21 and the Y-direction blade 11 are directly arranged on the air-floating slide block 14, repeated Z-direction installation errors of the blades are extremely small, and the subsequent blade replacement can be ensured without adjustment under the condition of good machining consistency of the blades, so that the coplanar distance adjustment time of the blades is saved, the blade maintenance and replacement efficiency is improved, the downtime of a production line is further reduced, and the yield is improved; meanwhile, the four blades are independently driven by the four driving mechanisms in the embodiment, so that each blade can independently move and is not influenced by linkage of adjacent blades, the influence of disturbance of the adjacent blades can be eliminated in the high-speed scanning process, the reliability is improved, only the blade with a fault is required to be replaced and adjusted when the blades are replaced, and the maintenance and adjustment time is greatly shortened.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. Those skilled in the art will appreciate that the present invention is not limited to the particular embodiments described herein, and that various obvious changes, rearrangements and substitutions will now be apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims (20)

1. A movable slit apparatus, comprising:
a base (3);
the Y-direction light blocking mechanism (1) is arranged on the base (3), the Y-direction light blocking mechanism (1) comprises a Y-direction blade (11) and a Y-direction driving mechanism (12), the Y-direction blade (11) comprises a first connecting portion (111) and a first light blocking blade portion (112) arranged along the Y direction, a first knife edge (1121) is formed at one end of the first light blocking blade portion (112), the other end of the first light blocking blade portion (112) is connected with one end of the first connecting portion (111), the other end of the first connecting portion (111) is connected with the Y-direction driving mechanism (12), an included angle between the first light blocking blade portion (112) and the first connecting portion (111) ranges from 60 degrees to 120 degrees, two groups of Y-direction light blocking mechanisms (1) are arranged, and the first knife edges (1121) of the two groups of Y-direction light blocking mechanisms (1) are arranged oppositely;
the X-direction light blocking mechanism (2) is arranged on the base (3), the X-direction light blocking mechanism (2) comprises X-direction blades (21), second knife edges (2121) along the Y direction are formed at one ends of the X-direction blades (21), two groups of X-direction light blocking mechanisms (2) are arranged, and the second knife edges (2121) of the two groups of X-direction light blocking mechanisms (2) are arranged oppositely;
the two second knife edges (2121) and the two first knife edges (1121) can form rectangular slit windows on an XY projection surface in a surrounding mode;
the first connecting part (111) is connected with the Y-direction driving mechanism (12) through an air floatation sliding block (14);
a plurality of heat dissipation holes (1111) are formed in the first connecting portion (111), part of the heat dissipation holes (1111) are located on the outer side of the air-floating slide block (14), and part of the heat dissipation holes (1111) are located above the air-floating slide block (14).
2. A movable slit arrangement according to claim 1, wherein the first fence portion (112) is perpendicular to the first connection portion (111).
3. A movable slit arrangement according to claim 1, characterized in that the first connection portion (111) is provided with lightening holes (1112).
4. A movable slit arrangement according to claim 1, characterized in that the Y-blade (11) is made of composite SiC.
5. A movable slit arrangement according to claim 1, characterized in that the thickness of the Y-blade (11) is 1.9-2.1 mm.
6. A movable slit arrangement according to any of claims 1-5, characterized in that two of the Y-direction blades (11) are coplanar, two of the X-direction blades (21) are coplanar, and the distance of the Y-direction blades (11) from the base (3) is smaller than the distance of the X-direction blades (21) from the base (3).
7. The movable slit apparatus according to claim 6, wherein the distance between the Y-direction blade (11) and the X-direction blade (21) in the Z direction is 0.03mm to 0.1mm.
8. A movable slit device according to any one of claims 1-5, characterized in that the X-direction light blocking mechanism (2) further comprises an X-direction driving mechanism (22), and the X-direction driving mechanism (22) is connected with the X-direction blade (21) and is used for driving the X-direction blade (21) to move along the X direction.
9. The movable slit apparatus according to claim 8, wherein the X-directional blade (21) comprises a second connecting portion (211) and a second light blocking blade portion (212) disposed along the X-direction, one end of the second light blocking blade portion (212) is formed with the second blade edge (2121), the other end of the second light blocking blade portion (212) is connected to one end of the second connecting portion (211), the other end of the second connecting portion (211) is connected to the X-direction driving mechanism (22), and an included angle between the second connecting portion (211) and the second light blocking blade portion (212) is 60 ° to 120 °.
10. The movable slit apparatus as claimed in claim 9, wherein the base (3) is formed with a light-transmitting hole (31), two of the Y-direction blades (11) and two of the X-direction blades (21) are alternately arranged around the light-transmitting hole (31), and an inner corner of each of the Y-direction blades (11) faces one of the X-direction blades (21) and an inner corner of the X-direction blade (21) faces the other Y-direction blade (11).
11. A movable slit arrangement according to any one of claims 1-5, characterized in that the Y-drive mechanism (12) comprises: and a Y-direction linear motor.
12. The movable slit apparatus of claim 11, wherein the Y-direction linear motor comprises:
a magnetic track (121) arranged along the Y direction, wherein the magnetic track (121) comprises a first part (1211) and a second part (1212) which are connected to form an inverted L-shaped structure, the first part (1211) is vertically connected with the base (3), and the second part (1212) is parallel to the base (3) and is arranged at intervals;
a first stator group (122) provided on a side of the second portion (1212) facing the base (3);
a second stator group (123) arranged on the base (3), wherein the first stator group (122) and the second stator group (123) are arranged in parallel and opposite to each other in the Z direction;
and the motor rotor (124) comprises an insertion part (1241) parallel to the first stator group (122), and the insertion part (1241) is slidably inserted between the first stator group (122) and the second stator group (123).
13. A movable slit arrangement according to claim 12, wherein the Y-direction light blocking mechanism (1) further comprises:
the air-floating slide block (14) comprises a main air-floating part (141) parallel to the base (3), the main air-floating part (141) is arranged on one surface, away from the base (3), of the magnetic track (121), a first air-floating hole is formed in one surface, facing the magnetic track (121), of the main air-floating part (141), and the Y-direction blade (11) is connected with the motor rotor (124) through the air-floating slide block (14).
14. The movable slit apparatus according to claim 13, wherein the air-floating slider (14) further comprises a lateral air-floating portion (142), one end of the lateral air-floating portion (142) is perpendicular to the base (3), the other end of the lateral air-floating portion (142) is connected to the main air-floating portion (141), the lateral air-floating portion (142) is disposed outside the first portion (1211), and a second air-floating hole is opened on a surface of the lateral air-floating portion (142) facing the first portion (1211).
15. A movable slit arrangement according to claim 14, wherein the Y-bar mechanism (1) further comprises:
a first pre-tightening magnet (17) which is arranged on the main air floating part (141) and is used for generating magnetic attraction force along the Z direction with the magnetic track (121); and/or
And the second pre-tightening magnet (18) is arranged on the lateral air floating part (142) and is used for generating magnetic attraction force along the X direction with the magnetic track (121).
16. A movable slit arrangement according to claim 12, wherein the Y-direction light blocking mechanism (1) further comprises:
and the limiting buffer assembly (16) is used for limiting two limiting positions of the Y-direction blade (11) moving along the Y direction.
17. A movable slit device according to claim 16, wherein the position-limiting buffer assemblies (16) are provided in two sets, the two sets of position-limiting buffer assemblies (16) are respectively provided at both ends of the magnetic track (121) in the Y direction, and each set of position-limiting buffer assemblies (16) includes:
a buffer pad (161) made of a flexible material, the buffer pad (161) being disposed on an end surface of the magnetic track (121) in the Y direction;
the limiting block (162) is arranged on one side, away from the magnetic track (121), of the buffer pad (161), and the limiting block (162) protrudes out of the surface, away from the base (3), of the magnetic track (121).
18. A movable slit arrangement according to claim 13, characterized in that the Y-direction light blocking mechanism (1) further comprises:
and the Y-direction anti-collision frame (19) is connected with the air floatation slide block (14), faces one end of the other Y-direction light blocking mechanism (1), and protrudes out of the first knife edge (1121) in the Y direction.
19. A movable slit arrangement according to claim 18, characterized in that the movable slit arrangement (10) further comprises:
a Y-direction detection assembly (4) comprising a first emitter (41) and a first sensor (42), wherein one of the first emitter (41) and the first sensor (42) is arranged on a Y-direction anti-collision frame (19) of one Y-direction light blocking mechanism (1), the other one of the first emitter (41) and the first sensor (42) is arranged on a Y-direction anti-collision frame (19) of the other Y-direction light blocking mechanism (1), and within a preset range, a transmission signal of the first emitter (41) can be received by the first sensor (42);
and the controller is connected with the Y-direction detection assembly (4) and the two Y-direction light blocking mechanisms (1), and the controller controls the two Y-direction light blocking mechanisms (1) to operate according to the received signals of the first sensor (42).
20. A lithography system comprising a movable slit apparatus according to any one of claims 1-19.
CN201911072975.4A 2019-11-05 2019-11-05 Movable slit device and photoetching system Active CN112782938B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1482363A1 (en) * 2003-05-30 2004-12-01 ASML Netherlands B.V. Lithographic apparatus
US7382439B2 (en) * 2005-05-31 2008-06-03 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
CN102087476A (en) * 2009-12-08 2011-06-08 上海微电子装备有限公司 Shutter device for exposure subsystem of photoetching machine
CN102444670A (en) * 2010-10-15 2012-05-09 上海微电子装备有限公司 Gas floating structure
CN103901731B (en) * 2012-12-28 2016-02-03 上海微电子装备有限公司 Movable knife edge device
CN205374983U (en) * 2015-12-30 2016-07-06 上海微电子装备有限公司 Movable edge of a knife device and litho machine system
CN108345157B (en) * 2017-01-25 2019-07-23 上海微电子装备（集团）股份有限公司 Shutter device and its control method, litho machine and its exposure dose control method
CN108646402B (en) * 2018-05-09 2019-05-31 哈尔滨工业大学 A kind of iris diaphgram based on twin shaft guiding

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