CN112777114A - Protection device for instrument chip and use method thereof - Google Patents

Protection device for instrument chip and use method thereof Download PDF

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Publication number
CN112777114A
CN112777114A CN202110158744.6A CN202110158744A CN112777114A CN 112777114 A CN112777114 A CN 112777114A CN 202110158744 A CN202110158744 A CN 202110158744A CN 112777114 A CN112777114 A CN 112777114A
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China
Prior art keywords
box
protection
fixedly connected
instrument chip
instrument
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Granted
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CN202110158744.6A
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Chinese (zh)
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CN112777114B (en
Inventor
武英杰
雷明珠
李德红
李党裔
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Shandong Kuailv Technology Development Co ltd
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Zhejiang Kuailyv Technology Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/02Internal fittings
    • B65D25/10Devices to locate articles in containers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/02Internal fittings

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Accommodation For Nursing Or Treatment Tables (AREA)

Abstract

The invention relates to the technical field of protection devices of instrument chips, in particular to a protection device of an instrument chip and a using method thereof. The invention aims to solve the technical problem of a protection device of an instrument chip. In order to solve the technical problems, the invention provides a protection device of an instrument chip and a using method thereof. The automatic feeding mechanism is convenient for quickly feeding the instrument chip, avoids the pain of manual feeding, and has the advantages of simple structure and reasonable design; the protection mechanism who sets up is convenient for protect instrument chip at the in-process that removes, avoids instrument chip at the in-process of transportation, because the striking that ground is uneven and lead to, and its protection mechanism has the advantage that the design is simple, low cost and automatic locking instrument chip.

Description

Protection device for instrument chip and use method thereof
Technical Field
The invention relates to a protection device of an instrument chip, in particular to a protection device of an instrument chip and a using method thereof, belonging to the technical field of protection devices of instrument chips.
Background
After the invention of the transistor is produced in large quantities, various solid semiconductor components such as diodes, transistors and the like are used in large quantities, and the functions and roles of the vacuum tube in the circuit are replaced. By the middle and late 20 th century, semiconductor manufacturing technology advances, making integrated circuits possible. It is a great advance that integrated circuits can integrate a very large number of micro-transistors into a single small chip, as opposed to manually assembling the circuits using individual discrete electronic components. The large-scale production capacity, reliability and modularity of circuit design of integrated circuits ensures that standardized integrated circuits are rapidly adopted instead of discrete transistors used for the design.
In the transportation process of the instrument chip, the instrument chip is easy to fall off in the transportation process, so that the instrument chip is damaged, the service life is greatly shortened, and waste is caused; meanwhile, in the manual delivery process of the instrument chip, the delivery speed is low, and the delivery effect is poor, so that the delivery speed is reduced directly.
Disclosure of Invention
The present invention is directed to solving the above problems and providing a protection device for a meter chip and a method for using the same.
The invention achieves the aim through the following technical scheme, and the protection device for the instrument chip comprises a movable box, an automatic releasing mechanism and a protection mechanism.
The automatic feeding mechanism comprises a crank, fluted discs, chains, a protection box and sliding groove blocks, the inner walls of two corresponding sides of the movable box are fixedly connected with the fluted discs, the fluted discs are in transmission connection with the chains and are in corresponding two circles, the protection box is fixedly connected between the chains together, the crank is horizontally and fixedly penetrated between the two fluted discs in the same central position, the crank is fixedly connected with the two fluted discs in the same central position, the inner walls of two corresponding sides of the movable box are fixedly connected with the sliding groove blocks, the sliding groove blocks are in sliding connection with the two sliding groove blocks, the two sliding blocks are fixedly connected with a numerical control sliding table together, the bottom end face of the sliding block of the numerical control sliding table is fixedly connected with a feeding box, the front face of the movable box is hinged with a sliding groove block, two small air cylinders are fixedly installed on the inner wall of one side of the movable box, which is far away from the inner side of, the bottom through connection of feeding case has the ejection of compact pipeline, ejection of compact pipeline installs two small-size solenoid valves with one side outer wall, two the equal fixedly connected with restrictor plate of output of small-size solenoid valve.
The protection mechanism comprises a sliding cover, a limiting groove, shaft rods and a balance ring, wherein the limiting groove with a plurality of equal distances is formed in the protection box, the limiting groove is connected to the sliding cover in a sliding mode, two corresponding shaft rods are horizontally arranged in the middle of the limiting groove, the balance ring is sleeved on the surfaces of the shaft rods and comprises a first connecting piece and a second connecting piece, and locking springs are sleeved on the bottom surfaces and the top surfaces of the first connecting piece and the second connecting piece.
Preferably, the movable box comprises an observation mirror, the inner structure of the movable box is of a 'return' shape structure, four universal wheels are fixedly connected to the outer walls of the four corners of the bottom of the movable box, and a handle and a structure are of a 'C' shape structure and are fixedly connected to the outer wall of one side of the movable box.
Preferably, the number of the protection boxes is a plurality of, the protection boxes are all arranged between the two chains, and the protection boxes are the same in size.
Preferably, the inner wall of one side of the movable box far away from the box door is fixedly connected with a telescopic rod, the tip of one end of the telescopic rod is fixedly connected with a supporting plate, and the telescopic rod is composed of a plurality of connecting rods with different diameters.
Preferably, a limiting bin is arranged on the feeding box, and the internal structure of the limiting bin is of a half-convex structure.
Preferably, a plurality of the limiting grooves are correspondingly provided with a group of shaft rods, a balance ring, a first connecting piece, a second connecting piece and a locking spring.
Preferably, the rear side outer wall fixedly connected with counter of feeding case, small-size cylinder, numerical control slip table and two small-size solenoid valves all external power supply.
Preferably, the outer wall of one side of the box door is fixedly connected with a handle, the handle is of a C-shaped structure, and the outer wall of one side of the box door is fixedly provided with a control panel.
A use method of a protection device of an instrument chip comprises the following steps:
first step, the check-up, whether the operation of debugging numerical control slip table at first is normal, can not remove 15MM according to numerical control requirement every 3S, whether simultaneously can be accurate with the accurate spacing groove that falls into of instrument chip, observe the instrument chip that falls into the spacing groove simultaneously, whether when dropping, first connecting piece can be touched to instrument chip, makes the locking spring card in the spacing groove simultaneously.
The second step, the input of instrument chip at first opens the chamber door, passes through a plurality of instrument chip in the spacing storehouse, and the small-size solenoid valve in back opens in proper order and closes, ensures like this that the joint has an instrument chip between two current-limiting plates, ensures like this that instrument chip flows out from ejection of compact pipeline one by one.
And thirdly, the protection box is used, the telescopic rod is pulled out at first, and the supporting plate is supported at the bottom of the protection box to ensure that the supporting plate is parallel.
The fourth step, the count when numerical control slip table removes 15MM every 3S, ensures that an instrument chip has been placed to the inside of every spacing groove, ensures the speed of flowing like this, can ensure the flexible number of times of ejection of compact pipeline simultaneously at ejection of compact pipeline electric connection counter to this quantity of coming accurate clear input.
And fifthly, when the observation mirror is observed manually by one protection box and the protection box is filled with the observation mirror, the sliding cover slides on the protection box, and the supporting plate is rotated manually only to drive the two fluted discs to rotate together, so that the protection box is arranged at the bottom of the discharge pipeline.
The invention has the beneficial effects that:
1. the automatic feeding mechanism is convenient for quickly feeding the instrument chip, avoids the pain of manual feeding, greatly improves the feeding efficiency, and has the advantages of simple structure and reasonable design;
2. the protection mechanism who sets up is convenient for protect instrument chip at the in-process that removes, avoids instrument chip at the in-process of transportation, because the striking that ground is uneven and lead to, and its protection mechanism has the advantage that the design is simple, low cost and automatic locking instrument chip.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
FIG. 1 is a schematic sectional front view of the present invention;
FIG. 2 is a schematic left side sectional view of the present invention;
FIG. 3 is a schematic top sectional view of the feed box of the present invention;
FIG. 4 is an enlarged view of a portion of FIG. 2A;
FIG. 5 is an enlarged view of a portion of FIG. 7B;
FIG. 6 is an enlarged view of a portion of FIG. 2 at C;
FIG. 7 is a schematic view of the protection case of the present invention in partial cross section;
in the figure: 1. a mobile box; 101. an observation mirror; 2. a crank; 3. a fluted disc; 4. a chain; 5. a protection box; 501. a sliding cover; 502. a limiting groove; 6. a shaft lever; 7. a balance ring; 701. a first connecting piece; 702. a second connecting sheet; 8. a locking spring; 9. a chute block; 10. a slider; 11. a small cylinder; 12. a numerical control sliding table; 13. a feeding box; 1301. a limiting bin; 14. a counter; 15. a discharge pipeline; 16. a small-sized solenoid valve; 17. a restrictor plate; 18. a control panel; 19. a telescopic rod; 20. and (7) a supporting plate.
Detailed Description
In order to make the objects, features and advantages of the present invention more obvious and understandable, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the embodiments described below are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
Referring to fig. 1-7, a protection device for an instrument chip includes a movable box 1, an automatic release mechanism, and a protection mechanism.
The automatic throwing mechanism comprises a crank 2, a fluted disc 3, a chain 4, a protection box 5 and a sliding groove block 9, wherein the inner walls of two corresponding sides of the movable box 1 are fixedly connected with the fluted disc 3, the fluted disc 3 is in transmission connection with the chain 4, the protection box 5 is fixedly connected between the chains 4 in two corresponding circles, the two fluted discs 3 in the same central position are horizontally and fixedly penetrated by the crank 2, the crank 2 is fixedly connected with the two fluted discs 3 in the same central position, the inner walls of two corresponding sides of the movable box 1 are fixedly connected with the sliding groove block 9, the two sliding groove blocks 9 are respectively in sliding connection with a sliding block 10, the two sliding blocks 10 are respectively and fixedly connected with a numerical control sliding table 12, the bottom end surface of the sliding block of the numerical control sliding table 12 is fixedly connected with a feeding box 13, the front surface of the movable box 1 is hinged with a box door, and the inner wall of one side of the movable box 1, two the output of small-size cylinder 11 corresponds one side of fixed connection numerical control slip table 12 respectively, the bottom through connection of feeding case 13 has ejection of compact pipeline 15, two small-size solenoid valves 16, two are installed with one side outer wall to ejection of compact pipeline 15 the equal fixedly connected with restrictor plate 17 of output of small-size solenoid valve 16.
The protection mechanism includes sliding cover 501, spacing groove 502, axostylus axostyle 6 and balance ring 7, the inside of protection box 5 is provided with the spacing groove 502 of a plurality of equidistance, sliding connection has spacing groove 502 on the sliding cover 501, the middle part position level of spacing groove 502 is provided with two corresponding axostylus axostyles 6, two balance ring 7 has been cup jointed on the surface of axostylus axostyle 6, balance ring 7 includes first connection piece 701 and second connection piece 702, locking spring 8 has all been cup jointed to the bottom surface and the top surface of first connection piece 701 and second connection piece 702.
Specifically, the movable box 1 includes the sight glass 101, the inner structure of movable box 1 is "back" style of calligraphy structure, the outer wall fixedly connected with four universal wheels of four corners of the bottom of movable box 1, one side outer wall fixedly connected with handle and the structure of movable box 1 are "C" style of calligraphy structure.
Specifically, the number of the protection boxes 5 is a plurality of the protection boxes 5 are arranged between the two chains 4, and the protection boxes 5 are the same in size.
Specifically, the inner wall of one side of moving box 1, far away from the chamber door, is fixedly connected with telescopic link 19, the one end tip department fixedly connected with layer board 20 of telescopic link 19, telescopic link 19 comprises the connecting rod of a plurality of diameters difference.
Specifically, a limiting bin 1301 is arranged on the feeding box 13, and the internal structure of the limiting bin 1301 is in a half-convex structure.
Specifically, a limiting bin 1301 is arranged on the feeding box 13, and the internal structure of the limiting bin 1301 is in a half-convex structure.
Specifically, the rear side outer wall fixedly connected with counter 14 of feeding case 13, small-size cylinder 11, numerical control slip table 12 and two small-size solenoid valves 16 all external power supply.
Specifically, the outer wall of one side of the box door is fixedly connected with a handle, the handle is of a C-shaped structure, and the outer wall of one side of the box door is fixedly provided with a control panel 18.
A use method of a protection device of an instrument chip comprises the following steps:
first, the check-up, whether the operation of debugging numerical control slip table 12 at first is normal, can not remove 15MM every 3S according to the numerical control requirement, whether simultaneously can be accurate with the accurate gauge chip fall into spacing groove 502, observe the gauge chip that falls into spacing groove 502 simultaneously, whether when dropping, first connecting piece 701 can be touched to the gauge chip, makes locking spring 8 card in spacing groove 502 simultaneously.
The second step, the input of instrument chip at first opens the chamber door, passes through a plurality of instrument chip in spacing storehouse 1301, and back small-size solenoid valve 16 opens in proper order and closes, ensures like this that the joint has an instrument chip between two restrictor plates 17, ensures like this that instrument chip flows out from ejection of compact pipeline 15 one by one.
And thirdly, when the protection box 5 is used, firstly, the telescopic rod 19 is pulled out, and the supporting plate 20 is supported at the bottom of the protection box 5 to ensure that the supporting plate is parallel.
Fourthly, counting, when the numerical control sliding table 12 moves 15S every 3S, an instrument chip is placed in each limiting groove 502, so that the flowing speed is ensured, and meanwhile, the telescopic times of the discharging pipeline 15 can be ensured by electrically connecting the counter 14 with the discharging pipeline 15, so that the quantity of the materials to be accurately and clearly put in is obtained.
Fifthly, when one protection box 5 manually observes the observation mirror 101 and is filled with the observation mirror, the sliding cover 501 slides on the protection box 5, and only the supporting plate 20 needs to be manually rotated, so that the supporting plate 20 drives the two fluted discs 3 to rotate together, and the protection box 5 is arranged at the bottom of the discharging pipeline 15.
The electrical components appearing in the present document are all connected externally to a power supply and a control switch when in use, and the related circuits, electronic components and control modules are all prior art, and can be realized completely by those skilled in the art without needless to say, the protection content of the present invention does not relate to the improvement of software and methods.
In the description of the invention, it is to be understood that the terms "center", "middle", "eccentric", "longitudinal", "lateral", "length", "width", "thickness", "height", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate orientations and positional relationships based on the orientations and positional relationships shown in the drawings, and are used merely for convenience of describing the invention and for simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the invention.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
The above-mentioned embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (9)

1. A protection device of instrument chip is characterized in that: comprises a mobile box (1), an automatic feeding mechanism and a protection mechanism;
the automatic feeding mechanism comprises a crank (2), a fluted disc (3), a chain (4), a protection box (5) and sliding groove blocks (9), the corresponding two side inner walls of the movable box (1) are fixedly connected with the fluted disc (3), the fluted disc (3) is in transmission connection with the chain (4) and two corresponding circles, the chain (4) is fixedly connected with the protection box (5) and the crank (2) horizontally and fixedly penetrates the fluted disc (3) and the crank (2) is fixedly connected with the two fluted discs (3) which are in the same central position, the corresponding two side inner walls of the movable box (1) are fixedly connected with the sliding groove blocks (9) and the sliding groove blocks (9) respectively, the sliding groove blocks (9) are in sliding connection with a sliding block (10) and the sliding block (10) are fixedly connected with a numerical control sliding table (12) respectively, and the bottom end surface of the sliding block of the numerical control sliding table (12) is fixedly connected with a feeding box (, the front of the movable box (1) is hinged with a box door, the inner wall of one side, away from the inner side surface of the box door, of the movable box (1) is fixedly provided with two small cylinders (11), the output ends of the two small cylinders (11) are respectively and correspondingly fixedly connected with one side of a numerical control sliding table (12), the bottom of the feeding box (13) is connected with a discharging pipeline (15) in a penetrating manner, the outer wall of the same side of the discharging pipeline (15) is provided with two small electromagnetic valves (16), and the output ends of the two small electromagnetic valves (16) are both fixedly connected with a flow limiting plate (17);
the protection mechanism comprises a sliding cover (501), a limiting groove (502), shaft rods (6) and a balance ring (7), wherein the limiting groove (502) with a plurality of equal distances is arranged inside a protection box (5), the limiting groove (502) is connected to the sliding cover (501) in a sliding mode, two corresponding shaft rods (6) are horizontally arranged at the middle position of the limiting groove (502), the balance ring (7) is sleeved on the surface of the shaft rods (6), the balance ring (7) comprises a first connecting piece (701) and a second connecting piece (702), and locking springs (8) are sleeved on the bottom surfaces and the top surfaces of the first connecting piece (701) and the second connecting piece (702).
2. The protection device of an instrument chip according to claim 1, wherein: the movable box (1) comprises an observation mirror (101), the internal structure of the movable box (1) is of a 'return' type structure, four universal wheels are fixedly connected to the outer walls of four corners of the bottom of the movable box (1), and a handle and a structure are of a 'C' type structure fixedly connected to the outer wall of one side of the movable box (1).
3. The protection device of an instrument chip according to claim 1, wherein: the number of the protection boxes (5) is a plurality of, the protection boxes (5) are arranged between the two chains (4), and the protection boxes (5) are the same in size.
4. The protection device of an instrument chip according to claim 1, wherein: the movable box is characterized in that a telescopic rod (19) is fixedly connected to the inner wall of one side, away from the box door, of the movable box (1), a supporting plate (20) is fixedly connected to the tip of one end of the telescopic rod (19), and the telescopic rod (19) is composed of a plurality of connecting rods with different diameters.
5. The protection device of an instrument chip according to claim 1, wherein: a limiting bin (1301) is arranged on the feeding box (13), and the internal structure of the limiting bin (1301) is of a half-convex structure.
6. The protection device of an instrument chip according to claim 1, wherein: a group of shaft rods (6), a balance ring (7), a first connecting piece (701), a second connecting piece (702) and a locking spring (8) are correspondingly arranged on the limiting grooves (502).
7. The protection device of an instrument chip according to claim 1, wherein: the rear side outer wall fixedly connected with counter (14) of feeding case (13), small-size cylinder (11), numerical control slip table (12) and two small-size solenoid valves (16) all external power supply.
8. The protection device of an instrument chip according to claim 1, wherein: the outer wall of one side face of the box door is fixedly connected with a handle, the handle is of a C-shaped structure, and a control panel (18) is fixedly mounted on the outer wall of one side of the box door.
9. A method of using a protection device for a meter chip according to any one of claims 1 to 8, characterized in that: the using method comprises the following steps:
firstly, checking, namely firstly debugging whether the operation of the numerical control sliding table (12) is normal, whether 15MM can be moved every 3S according to numerical control requirements, whether an instrument chip can accurately fall into the limiting groove (502) or not, and observing the instrument chip falling into the limiting groove (502), wherein if the instrument chip falls, the instrument chip can touch the first connecting piece (701), and meanwhile, the locking spring (8) is clamped in the limiting groove (502);
secondly, putting the instrument chips, namely opening a box door, enabling a plurality of instrument chips to pass through a limiting bin (1301), and sequentially opening and closing a rear small electromagnetic valve (16), so that one instrument chip is clamped between two flow limiting plates (17), and the instrument chips are enabled to flow out of a discharge pipeline (15) one by one;
thirdly, the protection box (5) is used, firstly, the telescopic rod (19) is pulled out, and the supporting plate (20) is supported at the bottom of the protection box (5) to ensure that the supporting plate is parallel;
fourthly, counting, namely when the numerical control sliding table (12) moves 15S every 3S, ensuring that an instrument chip is placed in each limiting groove (502), so that the flow discharge speed is ensured, and meanwhile, the discharge pipeline (15) is electrically connected with a counter (14) to ensure the telescopic times of the discharge pipeline (15), so that the quantity of the materials to be accurately and clearly thrown is ensured;
fifthly, when one protection box (5) manually observes the observation mirror (101) and is filled with the observation mirror, the sliding cover (501) slides on the protection box (5), and only the supporting plate (20) needs to be manually rotated, so that the supporting plate (20) drives the two fluted discs (3) to rotate together, and the protection box (5) is arranged at the bottom of the discharge pipeline (15).
CN202110158744.6A 2021-02-04 2021-02-04 Protection device for instrument chip and use method thereof Active CN112777114B (en)

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Application Number Priority Date Filing Date Title
CN202110158744.6A CN112777114B (en) 2021-02-04 2021-02-04 Protection device for instrument chip and use method thereof

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Application Number Priority Date Filing Date Title
CN202110158744.6A CN112777114B (en) 2021-02-04 2021-02-04 Protection device for instrument chip and use method thereof

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CN112777114B CN112777114B (en) 2022-07-15

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54152479U (en) * 1978-04-14 1979-10-23
US5273244A (en) * 1990-10-31 1993-12-28 Tokyo Electron Sagami Limited Plate-like member conveying apparatus
CN101033041A (en) * 2006-03-09 2007-09-12 精工爱普生株式会社 Workpiece conveyor and method of conveying workpiece
TW201244898A (en) * 2010-09-16 2012-11-16 Tokyo Electron Ltd Conveyance device, substrate processing system, and attitude control mechanism
CN205589844U (en) * 2016-04-29 2016-09-21 徐州工程学院 Commodity circulation warehouse supporter

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54152479U (en) * 1978-04-14 1979-10-23
US5273244A (en) * 1990-10-31 1993-12-28 Tokyo Electron Sagami Limited Plate-like member conveying apparatus
CN101033041A (en) * 2006-03-09 2007-09-12 精工爱普生株式会社 Workpiece conveyor and method of conveying workpiece
TW201244898A (en) * 2010-09-16 2012-11-16 Tokyo Electron Ltd Conveyance device, substrate processing system, and attitude control mechanism
CN205589844U (en) * 2016-04-29 2016-09-21 徐州工程学院 Commodity circulation warehouse supporter

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Address after: Room 204, Building 17, Zhongjing Intelligent Industrial Park, Ningyang County Economic Development Zone, Tai'an City, Shandong Province, 271000

Patentee after: Shandong KuaiLv Technology Development Co.,Ltd.

Address before: 310030 room 205, 2nd floor, building 1, 12 Xiyuan 1st Road, Xihu science and technology economic Park, Sandun Town, Xihu District, Hangzhou City, Zhejiang Province

Patentee before: ZHEJIANG KUAILYV TECHNOLOGY CO.,LTD.

CP03 Change of name, title or address