CN112760597A - Aluminum plate with multilayer reflective film and vacuum coating process thereof - Google Patents
Aluminum plate with multilayer reflective film and vacuum coating process thereof Download PDFInfo
- Publication number
- CN112760597A CN112760597A CN202011486477.7A CN202011486477A CN112760597A CN 112760597 A CN112760597 A CN 112760597A CN 202011486477 A CN202011486477 A CN 202011486477A CN 112760597 A CN112760597 A CN 112760597A
- Authority
- CN
- China
- Prior art keywords
- layer
- film
- aluminum plate
- films
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/221—Ion beam deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
Abstract
The invention discloses an aluminum plate with multiple layers of reflecting films, which comprises an aluminum material body, wherein multiple layers of films are sequentially plated on the surface of the aluminum material body from inside to outside, the multiple layers of films comprise twenty-five layers of films, the first layer of film is a connecting layer, the second layer of film is a transition layer, the third layer of film is an absorption layer, the fourth layer to the eighteenth layer of film are reflecting film stack layers, the nineteenth layer to the twentieth layer are toning film stack layers, and the twenty-fourth layer to the twenty-fifth layer are protective layers. The invention belongs to the technical field of metal medium coating, and particularly provides an aluminum plate with multiple layers of reflecting films and a vacuum coating process thereof, wherein the aluminum plate has high reflection, high temperature resistance and high film layer firmness, is applied to ultraviolet curing lamp equipment, and effectively improves the ultraviolet light reflection energy efficiency of the equipment.
Description
Technical Field
The invention belongs to the technical field of metal medium coating, and particularly relates to an aluminum plate with a multilayer reflective film and a vacuum coating process thereof.
Background
During semiconductor manufacturing processes, it is often necessary to cure the deposited film to achieve desired film properties. The purpose of curing the film is achieved by heating and baking conventionally, but the heat curing speed is slow, the energy consumption is high, the equipment and the process are complex, and ultraviolet curing (UVcure) is gradually replaced at present.
Ultraviolet curing is to utilize the photosensitivity of a photoinitiator, under the irradiation of ultraviolet light, the photoinitiator forms excited ecological molecules by photoinitiation, and the molecules are decomposed into free radicals or ions, so that unsaturated organic matters undergo chemical reactions such as polymerization, grafting, crosslinking and the like to achieve the purpose of curing.
The existing ultraviolet curing lamp generally adopts two rows of light sources of lamp beads, and ultraviolet focusing is carried out through refraction of a single-layer lens to cure an object. In order to improve the curing efficiency of the ultraviolet curing lamp, a reflective cover made of aluminum material is usually arranged on the ultraviolet curing lamp. However, the conventional ultraviolet curing lamp uses the common aluminum material as the reflecting cover, the reflecting energy is low, generally only reaches 70%, the reflecting infrared heat is high, the surface hardness of the aluminum material is low, and the corrosion resistance is poor.
Disclosure of Invention
In order to overcome the technical defects, the invention provides the aluminum plate with the multilayer reflective film and the vacuum coating process thereof, wherein the aluminum plate has high reflection, high temperature resistance and high film layer firmness, is applied to ultraviolet curing lamp equipment, and effectively improves the ultraviolet light reflection energy efficiency of the equipment.
The technical scheme adopted by the invention is as follows: the invention relates to an aluminum plate with a multilayer reflective film, which comprises an aluminum material body, wherein the surface of the aluminum material body is sequentially plated with a plurality of films from inside to outside, the plurality of films totally comprise twenty-five films, the first film is a connecting layer, the second film is a transition layer, the third film is an absorbing layer, the fourth film to the eighteenth film are reflective film stack layers, the nineteenth film to the twentieth film are toning film stack layers, the toning film stack layers aim to enable the appearance of the product to be bluish purple and correspond to ultraviolet reflection color, and the twenty-fourth film to the twenty-fifth film are protective layers.
Furthermore, the connecting layer is a metal chromium film, the metal chromium film is selected as the connecting layer, the direct flexible connection effect of the film layer and the aluminum plate is achieved, and the foundation is laid for the subsequent cutting and arc pressing process.
Further, the transition layer is a silicon dioxide film.
Furthermore, the absorption layer is one of a titanium nitride film or a titanium oxide film, the titanium nitride film or the titanium oxide film is selected as the absorption layer, the near infrared light is absorbed, the effect of low reflection heat is achieved, meanwhile, the film layer has certain toughness, and the requirement of an arc pressing process can be met.
Furthermore, the reflecting film stack layer is composed of hafnium and silicon, and the reflecting film stack layer composed of hafnium and silicon is selected, so that the ultraviolet light reflectivity of the aluminum plate is improved to 90% by 70%.
Furthermore, the protective layer is a silicon dioxide film, and the protective layer uses the silicon dioxide film, so that the product achieves the technical effects of wear resistance and wiping.
Preferably, the aluminum material body is a polished aluminum material.
A vacuum coating process of an aluminum plate with a multilayer reflection film specifically comprises the following steps:
(1) placing aluminum material in a vacuum furnace, and vacuumizing 2 x 10-3Pa, no heating;
(2) filling 50sccm argon gas to carry out ion bombardment cleaning for 10 minutes;
(3) using a 10kv electron gun, controlling the thickness by a crystal control instrument, plating a multilayer film according to the designed thickness of a film system, and using an ion auxiliary process in the process;
(4) after the plating is finished, the film is heated to 120 ℃ and kept for 20 minutes to release the stress of the film.
The invention with the structure has the following beneficial effects: according to the aluminum plate with the multilayer reflective films and the vacuum coating process thereof, the multilayer reflective films are coated on the aluminum material through the vacuum coating technology, the reflectivity of the aluminum material to an ultraviolet waveband is improved to over 90 percent, visible and near infrared light is absorbed, the reflection heat is reduced by 80 percent, the low-temperature high-reflection effect of the ultraviolet light is achieved, the film layer presents bluish purple, the firmness of the film layer is high, and the film layer is wear-resistant, erasable and strong in corrosion resistance.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic structural diagram of a novel composite wall according to the present invention;
FIG. 2 is a graph of a spectrum test according to an embodiment of the present invention.
The aluminum material comprises an aluminum material body 1, an aluminum material body 2, a connecting layer 3, a transition layer 4, an absorption layer 5, a reflection film stack layer 6, a color mixing film stack layer 7 and a protective layer.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments; all other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1:
the utility model provides an aluminum plate with multilayer reflective coating, includes aluminum product body 1, multilayer film has been plated in proper order from inside to outside on aluminum product body surface, multilayer film includes twenty five tuns altogether, and first tun is articulamentum 2, articulamentum 2 is the chromium metal membrane, and the second tun is transition layer 3, transition layer 3 is the silica film, and the third tun is absorbed layer 4, absorbed layer 4 is the titanium nitride film, and fourth layer-eighteenth tun are reflective coating pile layer 5, reflective coating pile layer 5 comprises hafnium and silicon, and nineteenth layer-twenty third layer are mixing of colors membrane pile layer 6, and the twenty fourth-twenty fifth layer are protective layer 7, protective layer 7 is the silica film, wherein, the aluminum product body is the polishing aluminum product.
A vacuum coating process of an aluminum plate with a multilayer reflection film specifically comprises the following steps:
(1) placing aluminum material in a vacuum furnace, and vacuumizing 2 x 10-3Pa, no heating;
(2) filling 50sccm argon gas to carry out ion bombardment cleaning for 10 minutes;
(3) using a 10kv electron gun, controlling the thickness by a crystal control instrument, plating a multilayer film according to the designed thickness of a film system, and using an ion auxiliary process in the process;
(4) after the plating is finished, the film is heated to 120 ℃ and kept for 20 minutes to release the stress of the film.
Example 2:
the utility model provides an aluminum plate with multilayer reflective coating, includes the aluminum product body, multilayer film has been plated in proper order from inside to outside on aluminum product body surface, multilayer film includes twenty five tuns altogether, and first tun is articulamentum 2, articulamentum 2 is the chromium metal membrane, and the second tun is transition layer 3, transition layer 3 is the silica film, and the third tun is absorbed layer 4, absorbed layer 4 is the titanium oxide film, and fourth layer-eighteenth tun are reflective coating pile layer 5, reflective coating pile layer 5 comprises hafnium and silicon, and nineteenth layer-twenty third layer are toning coating 6, and the twenty fourth-twenty fifth layer are protective layer 7, protective layer 7 is the silica film, wherein, the aluminum product body is the polishing aluminum product.
A vacuum coating process of an aluminum plate with a multilayer reflection film specifically comprises the following steps:
(1) placing aluminum material in a vacuum furnace, and vacuumizing 2 x 10-3Pa, no heating;
(2) filling 50sccm argon gas to carry out ion bombardment cleaning for 10 minutes;
(3) using a 10kv electron gun, controlling the thickness by a crystal control instrument, plating a multilayer film according to the designed thickness of a film system, and using an ion auxiliary process in the process;
(4) after the plating is finished, the film is heated to 120 ℃ and kept for 20 minutes to release the stress of the film.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The aluminum plate with the multilayer reflective films is characterized by comprising an aluminum body, wherein the surface of the aluminum body is sequentially plated with the multilayer films from inside to outside, the multilayer films comprise twenty-five layers of films, the first layer of film is a connecting layer, the second layer of film is a transition layer, the third layer of film is an absorption layer, the fourth layer to the eighteenth layer of film are reflective film stack layers, the nineteenth layer to the twentieth layer are color mixing film stack layers, and the twenty-fourth layer to the twenty-fifth layer are protective layers.
2. The aluminum plate with the multilayer reflective film as claimed in claim 1, wherein said connecting layer is a metal chromium film.
3. The aluminum plate with the multilayer reflective film as claimed in claim 1, wherein said transition layer is a silica film.
4. The aluminum plate with the multilayer reflective film as claimed in claim 1, wherein the absorption layer is one of a titanium nitride film or a titanium oxide film.
5. The aluminum plate with multilayer reflective films as claimed in claim 1, wherein the reflective film stack layer is composed of hafnium and silicon.
6. The aluminum plate with the multilayer reflective film as claimed in claim 1, wherein said protective layer is a silicon dioxide film.
7. The aluminum plate with the multilayer reflective film according to claim 1, wherein the aluminum material body is a polished aluminum material.
8. A vacuum coating process for an aluminum plate with a multilayer reflective film is characterized by comprising the following steps:
(1) placing aluminum material in a vacuum furnace, and vacuumizing 2 x 10-3Pa, no heating;
(2) filling 50sccm argon gas to carry out ion bombardment cleaning for 10 minutes;
(3) using a 10kv electron gun, controlling the thickness by a crystal control instrument, plating a multilayer film according to the designed thickness of a film system, and using an ion auxiliary process in the process;
(4) after the plating is finished, the film is heated to 120 ℃ and kept for 20 minutes to release the stress of the film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011486477.7A CN112760597A (en) | 2020-12-16 | 2020-12-16 | Aluminum plate with multilayer reflective film and vacuum coating process thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011486477.7A CN112760597A (en) | 2020-12-16 | 2020-12-16 | Aluminum plate with multilayer reflective film and vacuum coating process thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112760597A true CN112760597A (en) | 2021-05-07 |
Family
ID=75695406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011486477.7A Pending CN112760597A (en) | 2020-12-16 | 2020-12-16 | Aluminum plate with multilayer reflective film and vacuum coating process thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112760597A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4798960A (en) * | 1986-07-17 | 1989-01-17 | Ferd. Ruesch Ag | Device for the treatment of substances by UV radiation |
| TW201411198A (en) * | 2012-09-13 | 2014-03-16 | Xxentria Technology Materials Co Ltd | Weather-proof highly reflecting plate and manufacturing method thereof |
| JP2015008283A (en) * | 2013-05-31 | 2015-01-15 | Hoya株式会社 | Reflective mask blank, reflective mask, method for manufacturing the same, and method for manufacturing semiconductor device |
| US20160077346A1 (en) * | 2014-09-17 | 2016-03-17 | Corning Incorporated | High-efficiency multiwavelength beam expander employing dielectric-enhanced mirrors |
-
2020
- 2020-12-16 CN CN202011486477.7A patent/CN112760597A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4798960A (en) * | 1986-07-17 | 1989-01-17 | Ferd. Ruesch Ag | Device for the treatment of substances by UV radiation |
| TW201411198A (en) * | 2012-09-13 | 2014-03-16 | Xxentria Technology Materials Co Ltd | Weather-proof highly reflecting plate and manufacturing method thereof |
| JP2015008283A (en) * | 2013-05-31 | 2015-01-15 | Hoya株式会社 | Reflective mask blank, reflective mask, method for manufacturing the same, and method for manufacturing semiconductor device |
| US20160077346A1 (en) * | 2014-09-17 | 2016-03-17 | Corning Incorporated | High-efficiency multiwavelength beam expander employing dielectric-enhanced mirrors |
Non-Patent Citations (1)
| Title |
|---|
| 薛春荣 等: "真空紫外光学薄膜及薄膜材料", 《激光与光电子学进展》 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108093628B (en) | Polymer substrate with hard coating layer and method for producing same | |
| JP2578416B2 (en) | Composite organic mineral compound film deposited on a glass substrate optionally coated with one or more thin metal layers | |
| CN109971382B (en) | Energy-saving cooling heat-insulating car cover film and preparation method thereof | |
| CN108914069B (en) | RPVD green film coating process | |
| JP7375271B2 (en) | Primer layer forming composition, barrier film, wavelength conversion sheet, and method for producing wavelength conversion sheet | |
| CN107227460A (en) | A kind of anti-reflection DLC film by substrate of chalcogenide infrared glass and preparation method thereof | |
| CN111334794A (en) | Modified film containing Ti transition layer and titanium-doped diamond-like carbon deposited on surface of substrate and method | |
| CN103269991B (en) | The method of coating glass | |
| CN112760597A (en) | Aluminum plate with multilayer reflective film and vacuum coating process thereof | |
| CN104459835A (en) | Infrared glass GASIR1 antireflection film and preparation method thereof | |
| CN204331075U (en) | A kind of infrared glass GASIR1 anti-reflection film | |
| JPS63265844A (en) | Production of bent heat ray reflecting glass | |
| RU2235802C1 (en) | Method for manufacture of flexible symmetrically reflecting structure and structure manufactured by method | |
| JP3723682B2 (en) | Anti-reflective film | |
| EP0136450B1 (en) | Process for producing a mirror layer, especially for search light reflectors | |
| JPS63111167A (en) | Production of plastic article coated with inorganic thin film | |
| CN104608441A (en) | Island structure metal film coating glass and preparation method thereof | |
| CN212410893U (en) | Film | |
| KR20190027562A (en) | A system and a method for manufacturing pre-coated metal color steel sheets | |
| KR102244873B1 (en) | Functional coating film for display substrate and manufacturing method thereof | |
| JPS63265846A (en) | Bent heat ray reflection glass and production thereof | |
| CN116479377B (en) | Method for improving film cracking of plastic surface optical film in xenon lamp irradiation test | |
| CN212864647U (en) | Safe heat-insulating vehicle roof clothing film | |
| CN116430498B (en) | Infrared stealth coating with spectral selectivity and low emissivity as well as preparation method and application thereof | |
| US5421976A (en) | Oxidation resistant diamond composite and method of forming the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210507 |
|
| RJ01 | Rejection of invention patent application after publication |