CN112758696B - Vacuum sample driving device - Google Patents
Vacuum sample driving device Download PDFInfo
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- CN112758696B CN112758696B CN202110069780.5A CN202110069780A CN112758696B CN 112758696 B CN112758696 B CN 112758696B CN 202110069780 A CN202110069780 A CN 202110069780A CN 112758696 B CN112758696 B CN 112758696B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G54/00—Non-mechanical conveyors not otherwise provided for
- B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
Abstract
The invention discloses a vacuum sample driving device, which comprises a first magnetic component, a second magnetic component and a first magnetic component, wherein the first magnetic component is arranged in a vacuum chamber and is connected with a sample bearing table; a second magnetic member disposed outside the vacuum chamber; the second magnetic component and the first magnetic component are mutually and magnetically coupled through magnetic field force, and the cavity wall of the vacuum cavity between the first magnetic component and the second magnetic component is of an integrated structure; the second magnetic component is a magnetic component with adjustable magnetic field force applied to the first magnetic component; when the magnetic force of the first magnetic component is changed by the magnetic force of the second magnetic component, the first magnetic component is driven by the changed magnetic force to drive the sample carrying platform to move so as to drive the sample on the sample carrying platform to move to a set position. The device for transferring samples in the vacuum environment does not need to package driving equipment such as a driving motor and a bearing in the vacuum environment, and the tightness of a vacuum chamber and the cleanliness of the vacuum environment are improved.
Description
Technical Field
The invention relates to the technical field of vacuum processing control, in particular to a vacuum sample driving device.
Background
In various high-precision devices such as semiconductor chips and semiconductor epitaxial wafers, the production and processing processes are required to be completed in a vacuum environment. High cleanliness, oxygen and moisture isolation, high precision operation, etc. are required in vacuum environments. In the process of processing the sample in the vacuum environment, the sample is inevitably required to be transferred, moved or returned, and the like, which requires a relatively complex transmission mechanical structure to be arranged in a vacuum chamber for maintaining the vacuum environment.
For some transmission devices which are carried out through a mechanical structure in the market at present, the problem is that the air tightness of the mechanical structure cannot be well ensured in the transmission process of the mechanical structure. If the relevant sealant is not timely replenished, the air tightness of the vacuum environment can be affected during movement.
Disclosure of Invention
The invention aims to provide a vacuum sample driving device which can ensure the air tightness of a vacuum environment in a vacuum chamber to a certain extent.
In order to solve the technical problems, the invention provides a vacuum sample driving device, which comprises a first magnetic component arranged in a vacuum chamber and connected with a sample bearing table; a second magnetic member disposed outside the vacuum chamber; the second magnetic component and the first magnetic component are mutually and magnetically coupled through magnetic field force, and the cavity wall of the vacuum cavity between the first magnetic component and the second magnetic component is of an integrated structure;
wherein the second magnetic component is a magnetic component with adjustable magnetic field force applied to the first magnetic component;
when the magnetic force of the first magnetic component is changed by the magnetic force of the second magnetic component, the first magnetic component is driven by the changed magnetic force to drive the sample bearing table to move so as to drive the sample on the sample bearing table to move to a set position.
Optionally, the second magnetic component comprises at least two sets of winding coils; when the energizing current in the winding coils changes, the superimposed magnetic field force of each group of winding coils changes.
Optionally, a driving component is connected to the second magnetic component and is used for driving the second magnetic component to move relative to the first magnetic component so as to change the magnetic field force of the second magnetic component on the first magnetic component.
Optionally, the first magnetic component is further connected with a clamping component, and the clamping component is used for limiting the movable position point of the first magnetic component to at least two fixed position points.
Optionally, the clamping component comprises a first clamping component and a second clamping component which are both provided with concave-convex structures, and the concave-convex structures of the first clamping component and the second clamping component can be mutually matched and clamped; the first clamping part is fixedly connected with the first magnetic part;
when the first magnetic component is subjected to the magnetic force change of the second magnetic component, the first clamping component and the second clamping component have the relative movement that the two surfaces of the concave-convex structure are mutually attached.
Optionally, the sample carrier further comprises a gear component connected with the first magnetic component and a rack component fixedly connected with the sample carrier; the gear component and the rack component are meshed with each other;
the first magnetic component is connected with the gear component, and when the first magnetic component is subjected to the change of the magnetic force direction of the second magnetic component, the first magnetic component drives the gear component to rotate.
Optionally, the second magnetic component comprises at least two magnets, and the second magnetic component is connected with the driving component; the driving component is used for driving each magnet to rotate on a circular track with the same center and the same radius; the first magnetic component is located on the circle center.
Optionally, the vacuum chamber includes a convex chamber wall having a protrusion toward the vacuum chamber, each of the magnets is disposed around the convex chamber wall, and the first magnetic member is disposed within the convex chamber wall.
Optionally, the vacuum chamber is a tempered glass chamber.
Optionally, a scale is arranged on the cavity wall of the vacuum cavity along the movement direction of the first magnetic component.
The invention provides a vacuum sample driving device, which comprises a first magnetic component arranged in a vacuum chamber and connected with a sample bearing table; a second magnetic member disposed outside the vacuum chamber; the second magnetic component and the first magnetic component are mutually and magnetically coupled through magnetic field force, and the cavity wall of the vacuum cavity between the first magnetic component and the second magnetic component is of an integrated structure; wherein the second magnetic component is a magnetic component with adjustable magnetic field force applied to the first magnetic component; when the magnetic force of the first magnetic component is changed by the magnetic force of the second magnetic component, the first magnetic component is driven by the changed magnetic force to drive the sample carrying platform to move so as to drive the sample on the sample carrying platform to move to a set position.
In the application, a first magnetic component and a second magnetic component which can be mutually and magnetically coupled are respectively arranged outside and inside the vacuum chamber, that is to say, acting force can be mutually applied between the first magnetic component and the second magnetic component without direct contact connection; therefore, the acting force of the second magnetic part on the first magnetic part can be changed in the atmosphere outside the vacuum chamber, the acting force of the second magnetic part on the first magnetic part is changed, the first magnetic part can start to move under the action of the changed magnetic field force, and then the sample carrying table carrying the sample is driven to move, and obviously, as long as the magnetic field force direction of the second magnetic part is changed in a set mode, the second magnetic part can also drive the sample carrying table to move to a set position, so that sample transfer is realized.
The device that sample among the vacuum environment was transported that this application provided does not need to encapsulate driving motor, driving equipment such as bearing in vacuum environment, avoids because driving equipment self leakproofness is not enough to and reasons such as bearing oil leakage reduce vacuum environment's leakproofness and cleanliness factor's problem, is favorable to improving vacuum processing sample's product quality.
Drawings
For a clearer description of embodiments of the invention or of the prior art, the drawings that are used in the description of the embodiments or of the prior art will be briefly described, it being apparent that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained from them without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a vacuum sample driving device according to an embodiment of the present application;
FIG. 2 is a schematic view of the partial component structure of FIG. 1;
FIG. 3 is a schematic diagram of a layout of a second magnetic component according to the present embodiment;
FIG. 4 is a schematic diagram of another layout of a second magnetic component according to the present embodiment;
fig. 5 is a schematic structural diagram of another layout of the second magnetic component according to the present embodiment.
Detailed Description
At present, a through hole is generally arranged on the cavity wall of a conventional vacuum cavity, the driving device is fixed at the position of the through hole, and the position of the through hole is connected with the driving device in a sealing way through a flange plate, so that the driving device positioned outside the vacuum cavity can be connected with a sample to be moved and transported in the vacuum cavity through the through hole; and then the driving device is operated and controlled outside the vacuum chamber to drive the sample in the vacuum chamber to move, so that the sample in the vacuum chamber can be transported.
For the conventional scheme for transferring samples in the vacuum chamber, the tightness of the flange plate is gradually reduced along with the extension of the service time, frequent glue supplementing is needed, and once glue supplementing is not in time, the vacuum degree in the vacuum chamber obviously decreases; in addition, the driving equipment inevitably needs to use parts such as a bearing, an oil cylinder and the like, and once oil stains overflow, the cleanliness in the vacuum chamber can be greatly reduced, so that the processing quality of a device processed in the vacuum chamber is influenced.
Therefore, the technical scheme for realizing sample transportation in the vacuum chamber on the basis of reducing adverse effects on the vacuum environment in the vacuum chamber is provided.
In order to better understand the aspects of the present invention, the present invention will be described in further detail with reference to the accompanying drawings and detailed description. It will be apparent that the described embodiments are only some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1 and fig. 2, fig. 1 is a schematic structural diagram of a vacuum sample driving device provided in an embodiment of the present application, and fig. 2 is a schematic structural diagram of a partial component in fig. 1, where the vacuum sample driving device may include:
a first magnetic member 4 disposed in the vacuum chamber 1 and connected to the sample stage 2;
a second magnetic member 5 disposed outside the vacuum chamber 1;
the second magnetic part 5 and the first magnetic part 4 are mutually and magnetically coupled by magnetic field force, and the cavity wall 11 of the vacuum cavity 1 between the first magnetic part 4 and the second magnetic part 5 is of an integral structure;
wherein the second magnetic component 5 is a magnetic component with adjustable magnetic field force applied to the first magnetic component 4;
when the magnetic force of the first magnetic component 4 changes under the magnetic force of the second magnetic component 5, the first magnetic component 4 is driven by the changing magnetic force to drive the sample carrying platform 2 to move so as to drive the sample 3 on the sample carrying platform 2 to move to a set position.
Based on the common knowledge that the magnetic objects repel each other and attract each other, when the first magnetic object in the two magnetic objects attracted to each other moves away from the second magnetic object, the second magnetic object obviously moves along the moving direction of the first magnetic object; for two mutually exclusive magnetic objects, the second magnetic object will move away from the first magnetic object when the first magnetic object moves closer to the second magnetic object. For two mutually magnetically coupled objects, one of the objects moves and the other object will produce a follow-up motion, while the magnetic field force between the two objects changes when the nature of the follow-up motion is produced.
Thus, in this application, the first magnetic component 4 and the second magnetic component 5 are respectively disposed inside and outside the vacuum chamber 1, and the first magnetic component 4 and the second magnetic component 5 are magnetically coupled with each other, and there is no need to provide a through hole on the cavity wall 11 of the vacuum chamber 1 between the first magnetic component 4 and the second magnetic component 5, and the cavity wall 11 is a complete integral structure; the first magnetic part 4 and the second magnetic part 5 may even each directly not make any contact connection with the cavity wall 11. When the magnitude and direction of the magnetic field force generated by the second magnetic component 5 located outside the vacuum chamber 1 are controlled so as to change the magnetic field force, it is obvious that the magnetic field force received by the first magnetic component 4 also changes correspondingly, so that the second magnetic component 5 is driven to move in the vacuum chamber 1 by the changed magnetic field force, and the second magnetic component 5 is connected with the sample carrying table 2 carrying the sample 3, and when the second magnetic component 5 moves, the sample carrying table 2 can be driven to move, so that the sample carrying table 2 can transfer the sample 3.
Therefore, the through hole is not required to be arranged in the vacuum chamber 1, driving equipment such as a driving motor and an oil cylinder are not required to be placed in an environment communicated with the vacuum environment, the cleanliness and the tightness of the vacuum environment in the vacuum chamber 1 are improved to a great extent, and the processing quality of a processed sample in the vacuum chamber is further ensured.
To sum up, utilize this application to produce the characteristic of interact force through non-contact mode between two magnetism coupled magnetic part, set up first magnetic part and second magnetic part respectively in the inside and the outside of vacuum chamber, and then realize the drive to first magnetic part through the magnetic field force of the second magnetic part that is arranged in atmospheric environment, and then drive sample objective table drives the sample and remove, on guaranteeing the vacuum environment's that vacuum chamber indoor pollution degree is low, the leakproofness is good basis, realize the sample and transport, the processingquality of vacuum environment processing high-precision sample has been promoted.
The specific components of the vacuum sample drive will be discussed in detail below. For the second magnetic part 2 located outside the vacuum chamber 1, a variety of different forms may be used to achieve a variation of the magnetic field force of the second magnetic part 2.
In an alternative embodiment of the present application, the second magnetic part 2 comprises at least two sets of winding coils; when the energizing current in the winding coils changes, the superimposed magnetic field force of each set of winding coils changes.
Referring to fig. 3, fig. 3 is a schematic structural diagram of a second magnetic component layout according to the present embodiment. In fig. 3, the magnetic fields of the first winding coil 51 and the second winding coil 52 are oriented perpendicular to each other, and the first magnetic member 4 is located in the superimposed magnetic field generated by the two winding coils, taking as an example the attractive force of both the first winding coil 51 and the second winding coil 52 to the first magnetic member 4. Obviously, when the magnetic force of the first winding coil 51 at the position of the first magnetic component 4 is gradually increased and the magnetic force of the second winding coil 52 at the position of the first magnetic component 4 is gradually decreased by changing the coil current, the first magnetic component 4 can be controlled to rotate clockwise in fig. 2 centering around the position of the first winding coil, whereas when the magnetic force of the first winding coil 51 is decreased and the magnetic force of the second winding coil 52 is increased, the first magnetic component 4 can rotate counterclockwise.
For example, the first winding coil 51 and the second winding coil 52 may be both supplied with sinusoidal alternating currents of equal magnitude, and the current phase difference is pi/2, and the magnitude of the superimposed magnetic field force of the first winding coil 51 and the second winding coil 52 is unchanged and the direction is rotated clockwise or counterclockwise, so that the first magnetic member 4 can be continuously kept rotated clockwise and counterclockwise.
Of course, it is not necessary for the second magnetic part 5 to include only two winding coils, but three, four or more winding coils may be provided around the first magnetic part 4 in a circular ring shape, and the first magnetic part 4 is located at the center of the circular ring. It will be appreciated that the phase difference of the alternating currents fed to the winding coils should also be suitably changed in order to achieve a different arrangement of a different number of winding coils for the rotational movement of the first magnetic part 4. For example, the central angle of the adjacent winding coil in the three winding coils is 120 degrees relative to the central angle of the first magnetic component, correspondingly, the phase difference of the accessed sinusoidal alternating current should also be 2 pi/3, and the arrangement mode and the current switching mode of other winding coils can be adaptively changed by taking the above embodiment as a reference, so that the detailed description of this embodiment is omitted.
In the above embodiment, the motion control of the plurality of winding coils on the first magnetic component 4 is a rotation motion, and in the practical application process, the motion of the first magnetic component 4 driving the sample carrying table is not necessarily a rotation motion, but may be a translational linear motion.
As shown in fig. 4, fig. 4 is a schematic structural diagram of another layout of the second magnetic component according to the present embodiment. In fig. 4 the first magnetic part 4 is arranged at both ends of the two winding coils, while at the same time a slideway 9 may be provided for the first magnetic part 4; when the magnetic forces of the two winding coils in the direction along the slideway 9 are all leftward, the first magnetic part 4 slides leftward along the slideway, whereas when the magnetic forces of the two winding coils in the direction along the slideway are all rightward, the first magnetic part 4 slides rightward along the slideway.
It follows that in the present application both a rotational movement of the first magnetic part 4 and a translational movement of the first magnetic part 4 can be achieved by varying the coil current of the winding coil. The first magnetic component 4 specifically realizes that the sample carrying platform 2 drives the sample 3 to transfer according to the rotary motion or realizes that the sample carrying platform 2 drives the sample 3 to transfer according to the linear motion, and the connection mode between the first magnetic component 4 and the sample carrying platform 2 is determined.
For the second magnetic member 5, a plurality of magnets may be employed in addition to the winding coil. Optionally, in another optional embodiment of the present application, the method may further include:
the second magnetic part is connected with a driving part for driving the second magnetic part to move relative to the first magnetic part so as to change the magnetic field force of the second magnetic part to the first magnetic part.
Referring to fig. 2, the second magnetic member 5 includes a plurality of magnets disposed around the first magnetic member 4, each of the magnets is fixed to a ring bracket 50, the ring bracket 50 is connected to a driving member, and the driving member drives the ring bracket 50 to rotate the magnets, thereby driving the first magnetic member 4 located at the center of the ring bracket to rotate, and further realizing the rotation movement of the first magnetic member 4.
As shown in fig. 5, fig. 5 is a schematic structural diagram of another layout of the second magnetic component according to the present embodiment. In fig. 5, a vacuum chamber 1 is provided between the second magnetic member 5 and the first magnetic member 4 with a space 11 therebetween, the second magnetic member 5 has an attraction force to the first magnetic member 4, and the first magnetic member 4 follows along with the left-right movement of the second magnetic member 5.
Based on the above discussion, it is known that the rotational movement or the translational movement of the first magnetic member 4 can be achieved by controlling the change in the direction or the magnitude of the magnetic field of the second magnetic member 5.
Based on any of the above embodiments, considering that hysteresis or even hysteresis occurs inevitably resulting in movement of the first magnetic part 4 as the magnetic field force of the second magnetic part 5 varies due to the non-contact force between the first magnetic part 4 and the second magnetic part 5, eventually, when the magnetic field force of the second magnetic part 5 has stopped varying, the first magnetic part 4 may not accurately reach a predetermined position or repeatedly oscillate in movement at a predetermined position, resulting in a reduction in sample transfer accuracy. To this end, in an alternative embodiment of the present application, it may further include:
the first magnetic part 4 is also connected with a clamping part for limiting the movable position point of the first magnetic part 4 to at least two fixed position points.
Taking the example of a sample 3 that is only transported back and forth between two fixed points, two stops may be provided on the predetermined trajectory of the first magnetic part 4, as shown in fig. 4. Taking fig. 4 as an example, when the first magnetic member 4 needs to be moved to the position of the left stopper 91, the first magnetic member 4 is made to stay stably at the position of abutting the left stopper 91. Similarly, the movement of the first magnetic member 4 to the right stopper 92 can be controlled in a similar manner. And in a similar manner also for the embodiment of the rotational movement of the first magnetic part 4, a stop is provided limiting the angular range of rotation of the first magnetic part 4.
When the sample 3 is to be transported to a plurality of fixed position points, it is necessary to provide a plurality of restriction points in the movable direction of the first magnetic member 4.
In an alternative embodiment of the present application, the detent member includes a first detent member 71 and a second detent member 72 each having a concave-convex structure, the concave-convex structures of the first detent member 71 and the second detent member 72 being mutually fittingly engageable; the first positioning member 71 is fixedly connected with the first magnetic member 72;
when the first magnetic member 4 is subjected to a change in the magnetic field force of the second magnetic member 5, the first and second detent members 71, 72 have a relative movement in which both surfaces of the concave-convex structure are fitted to each other.
As shown in fig. 5, the first positioning member 71 is connected to the first magnetic member 4, a protruding structure is provided on the first positioning member 71, a recessed structure is provided on the second positioning member 72, and the surface of the first positioning member 71 having the protruding structure is attached to the surface of the second positioning member 72 having the recessed structure.
When the second magnetic component 5 drives the first magnetic component 4 to move, the first clamping component 71 also moves relative to the second clamping component 72, and the protruding structure of the first clamping component 71 can be sequentially clamped into the recessed structure of the second clamping component 72 in the moving process, so that the limit of the first magnetic component 4 is realized.
In addition, when the first magnetic member 4 moves in a straight line, the second detent member 72 is a bar-shaped member, and when the first magnetic member 4 moves in a rotation, the second detent member 72 is a ring-shaped member surrounding the second magnetic member 5.
As shown in fig. 5, the concave-convex structure between the first clamping part 71 and the second clamping part 72 can be clamped with each other, so that when the first clamping part 71 and the second clamping part 72 are clamped with each other, the position of the first magnetic part 4 is limited, the oscillating movement of the first magnetic part 4 caused by hysteresis is avoided, and the accuracy of controlling the movement position of the first magnetic part 4 is improved.
As mentioned above, in practice, the first magnetic member 4 is rotated or moved in translation, and the connection manner of the first magnetic member 4 and the sample carrying stage 3 is related. In the embodiment of the translational movement of the first magnetic part 4, the first magnetic part 4 and the sample carrying table 3 only need to be fixedly connected; when the first magnetic part 4 is rotated, then a translational movement of the sample carrier 3 is required by the rotational movement of the first magnetic part 4.
In another alternative embodiment of the present application, it may further include:
a gear member 61 connected to the first magnetic member 4, and a rack member 62 fixedly connected to the sample stage 3; the gear member 61 and the rack member 62 are engaged with each other;
the first magnetic part 4 is connected with the gear part 61, and when the direction of the magnetic force of the first magnetic part 4 under the magnetic force of the second magnetic part 5 changes, the first magnetic part 4 acts to drive the gear part 61 to rotate.
Referring to fig. 2, with the rotation of the first magnetic component 4, the gear component 61 can be driven to rotate by the transmission rod 8, and the gear component 61 and the rack component 62 are meshed with each other, so that the rack component 62 translates, and then the sample carrying table 3 on the rack component 62 translates, and further the sample 2 of the sample carrying table 3 is transported. The gear part 61 and the rack part 62 are meshed with each other, so that a certain limiting effect can be generated on the movement of the first magnetic part 4 to a certain extent, and the first magnetic part 4 is prevented from generating oscillating movement after rotating by a preset angle due to hysteresis.
As mentioned before, there are various ways to achieve a rotational movement of the first magnetic part 4, as shown in fig. 2, the second magnetic part 5 comprises at least two magnets, the second magnetic part 5 being connected to the drive part; the driving component is used for driving each magnet to rotate on a circular track with the same center and the same radius; the first magnetic part 4 is located on the center of the circle.
Further, the cavity wall 11 of the vacuum chamber 1 between the first magnetic member 4 and the second magnetic member 5 may be provided with a convex cavity wall 10 protruding outward of the vacuum chamber 1, the respective magnets of the second magnetic member 5 being provided around the convex cavity wall 10, the first magnetic member 5 being provided in the convex cavity wall 10.
In fig. 1, the outer convex cavity wall 10 is in a cylindrical convex cavity wall structure, the first magnetic component 4 is extended and arranged in the outer convex cavity wall 10 through the transmission rod 8, the second magnetic component 5 comprises a plurality of magnets, the second magnetic component 5 is arranged around the annular bracket 50, when the driving component drives the second magnetic component 5 to rotate, the rotation of each magnet can drive the second magnetic component 5 to rotate at any time, the second magnetic component 5 drives the gear structure 61 to rotate through the transmission rod 8 which is fixedly connected, the rack structure 62 is driven to rotate, and the rack structure 62 drives the sample stage 3 to move, so that the transfer of the sample 2 is realized.
It should be noted that, for the first magnetic component 4 in any embodiment of the present application, a magnet, a permanent magnet or other components that can be driven by magnetic force may be used, which is not specifically limited in the present application.
Based on any of the above embodiments, considering that the first magnetic part 4 and the second magnetic part 5 are interacted based on magnetic coupling between the two, in order to avoid electromagnetic induction generated by the cavity wall 11 of the metal vacuum chamber 1 during magnetic field change between the two, the interaction force between the first magnetic part 4 and the second magnetic part 5 is affected, in an alternative embodiment of the present application, the method may further comprise: the vacuum chamber 1 is a toughened glass chamber. Of course, in the practical application process, only the chamber wall 44 between the first magnetic member 4 and the second magnetic member 5 may be provided with a Cheng Ganghua glass chamber wall.
Since the tempered glass is a light permeable material, the movement position of the first magnetic member 4 can be clearly seen through the tempered glass, and for this purpose, in another alternative embodiment of the present application, it may further comprise: a scale is arranged on the cavity wall 11 of the vacuum chamber 1 along the movement direction of the first magnetic part 4.
Based on this scale, it can be more clearly determined whether the first magnetic part 4 is moved to the set position, and if the set position is not reached, the position of the first magnetic part 4 can be adjusted here by the second magnetic part 5, thereby improving the control accuracy of the transportation of the sample 3.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements is inherent to. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element. In addition, the parts of the above technical solutions provided in the embodiments of the present application, which are consistent with the implementation principles of the corresponding technical solutions in the prior art, are not described in detail, so that redundant descriptions are avoided.
The principles and embodiments of the present invention have been described herein with reference to specific examples, the description of which is intended only to facilitate an understanding of the core concepts of the invention. It should be noted that it will be apparent to those skilled in the art that various modifications and adaptations of the invention can be made without departing from the principles of the invention and these modifications and adaptations are intended to be within the scope of the invention as defined in the following claims.
Claims (8)
1. The vacuum sample driving device is characterized by comprising a first magnetic component which is arranged in a vacuum chamber and is connected with a sample bearing table; a second magnetic member disposed outside the vacuum chamber; the second magnetic component and the first magnetic component are mutually and magnetically coupled through magnetic field force, and the cavity wall of the vacuum cavity between the first magnetic component and the second magnetic component is of an integrated structure;
wherein the second magnetic component is a magnetic component with adjustable magnetic field force applied to the first magnetic component;
when the magnetic force of the first magnetic component is changed by the magnetic force of the second magnetic component, the first magnetic component is driven by the changed magnetic force to drive the sample carrying table to move so as to drive the sample on the sample carrying table to move to a set position;
the first magnetic component is also connected with a clamping component and is used for limiting the movable position point of the first magnetic component to at least two fixed position points;
the clamping component comprises a first clamping component and a second clamping component which are both provided with concave-convex structures, and the concave-convex structures of the first clamping component and the second clamping component can be mutually matched and clamped; the first clamping part is fixedly connected with the first magnetic part;
when the magnetic force of the first magnetic component changes under the magnetic force of the second magnetic component, the concave-convex structure of the first clamping component and the two surfaces of the concave-convex structure of the second clamping component are mutually attached to relatively move.
2. The vacuum sample driving device according to claim 1 wherein said second magnetic means comprises at least two sets of winding coils; when the energizing current in the winding coils changes, the superimposed magnetic field force of each group of winding coils changes.
3. The vacuum sample driving device according to claim 1 wherein a driving member is connected to the second magnetic member for driving the second magnetic member to move relative to the first magnetic member to vary the magnetic field force of the second magnetic member to the first magnetic member.
4. The vacuum sample driving device according to claim 1, further comprising a gear member connected to said first magnetic member, and a rack member fixedly connected to said sample carrier; the gear component and the rack component are meshed with each other;
the first magnetic component is connected with the gear component, and when the first magnetic component is subjected to the change of the magnetic force direction of the second magnetic component, the first magnetic component drives the gear component to rotate.
5. The vacuum sample driving device according to claim 4 wherein said second magnetic member comprises at least two magnets, said second magnetic member being connected to the driving member; the driving component is used for driving each magnet to rotate on a circular track with the same center and the same radius; the first magnetic component is located on the circle center.
6. The vacuum sample driving device according to claim 5 wherein said vacuum chamber includes a male chamber wall having a projection toward said vacuum chamber, each of said magnets being disposed around said male chamber wall, said first magnetic member being disposed within said male chamber wall.
7. The vacuum sample driving device according to any one of claims 1 to 6 wherein the vacuum chamber is a tempered glass chamber.
8. The vacuum sample driving device according to claim 7 wherein a scale is provided on a wall of said vacuum chamber along a direction of movement of said first magnetic member.
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| CN202110069780.5A CN112758696B (en) | 2021-01-19 | 2021-01-19 | Vacuum sample driving device |
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| CN202110069780.5A CN112758696B (en) | 2021-01-19 | 2021-01-19 | Vacuum sample driving device |
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| CN112758696B true CN112758696B (en) | 2023-07-11 |
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Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5365241A (en) * | 1992-06-24 | 1994-11-15 | Williams Lawrence I S | Method and apparatus for performing planar near-field antenna measurement using bi-polar geometry |
| JPH06100164A (en) * | 1992-08-27 | 1994-04-12 | Hitachi Ltd | Magnetically coupled carrying device |
| JP2000133693A (en) * | 1998-08-19 | 2000-05-12 | Shibaura Mechatronics Corp | Vacuum device and mechanism for driving the same |
| US6207964B1 (en) * | 1999-02-19 | 2001-03-27 | Axcelis Technologies, Inc. | Continuously variable aperture for high-energy ion implanter |
| DE10203457A1 (en) * | 2002-01-28 | 2003-07-31 | Cfs Gmbh Kempten | System for driving funding |
| KR100485943B1 (en) * | 2002-03-05 | 2005-04-29 | (주)에스티아이 | Roller Conveyer Equipped with Separated Disk Type Motor |
| CN1388330A (en) * | 2002-07-06 | 2003-01-01 | 宋崇伦 | Magnetic device for transferring mechanical orbiting |
| JP4363064B2 (en) * | 2003-03-07 | 2009-11-11 | 株式会社安川電機 | In-vacuum drive device and substrate transfer device using the same |
| KR100661908B1 (en) * | 2005-02-07 | 2006-12-28 | 세메스 주식회사 | Apparatus for treating substrates |
| CN2783306Y (en) * | 2005-04-15 | 2006-05-24 | 浙江三雄机械制造有限公司 | Vacuum sampler |
| CN101202491A (en) * | 2006-12-11 | 2008-06-18 | 谭晛 | Vibrator wave power generator |
| CN101726161A (en) * | 2008-10-30 | 2010-06-09 | 上海舒博拉尼制药设备有限公司 | Method for fully-automatic on-line sampling of freeze dryer |
| CN203416053U (en) * | 2013-07-26 | 2014-01-29 | 深圳市合元科技有限公司 | Coil movement-type wireless charging device |
| CN204162083U (en) * | 2014-10-17 | 2015-02-18 | 湖州浙宝冶金辅料有限公司 | A kind of conveying arrangement being convenient to metallurgic auxiliary materials transport |
| ES2729526T3 (en) * | 2016-01-07 | 2019-11-04 | Fagor Arrasate S Coop | Parts transport device and method for transporting parts |
| CN106542312A (en) * | 2016-10-26 | 2017-03-29 | 安徽新荣钢构有限公司 | A kind of neat device of streamline product |
| CN107284937A (en) * | 2017-06-21 | 2017-10-24 | 贵州航天南海科技有限责任公司 | A kind of conveying mechanism of five kinematic pairs intelligent delivery wagon |
| CN107516970B (en) * | 2017-07-25 | 2019-03-26 | 山东科技大学 | A kind of permanent-magnet coupler of adjustable speed |
| CN108006084B (en) * | 2017-11-20 | 2019-08-16 | 北京鼎臣世纪超导科技有限公司 | Zero friction super-conductive magnetic suspension bearing arrangement of one kind |
| CN208022332U (en) * | 2018-02-08 | 2018-10-30 | 广东富全来恩机械有限公司 | Panel turnover machine and panel production line |
| CN110937379B (en) * | 2019-11-12 | 2021-07-23 | 芜湖市恒浩机械制造有限公司 | Auxiliary mounting table for heavy workpiece |
| CN214269374U (en) * | 2021-01-19 | 2021-09-24 | 埃特曼(深圳)半导体技术有限公司 | Vacuum sample driving device |
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2021
- 2021-01-19 CN CN202110069780.5A patent/CN112758696B/en active Active
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