CN112729580B - Flexible temperature sensor and preparation method thereof - Google Patents
Flexible temperature sensor and preparation method thereof Download PDFInfo
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- CN112729580B CN112729580B CN202011547272.5A CN202011547272A CN112729580B CN 112729580 B CN112729580 B CN 112729580B CN 202011547272 A CN202011547272 A CN 202011547272A CN 112729580 B CN112729580 B CN 112729580B
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- thermocouple film
- positive
- insulating substrate
- film
- temperature sensor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M1/00—Inking and printing with a printer's forme
- B41M1/12—Stencil printing; Silk-screen printing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M1/00—Inking and printing with a printer's forme
- B41M1/26—Printing on other surfaces than ordinary paper
- B41M1/30—Printing on other surfaces than ordinary paper on organic plastics, horn or similar materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K15/00—Testing or calibrating of thermometers
- G01K15/005—Calibration
Abstract
The invention discloses a flexible temperature sensor and a preparation method thereof, the flexible temperature sensor comprises a flexible insulating substrate, and a positive thermocouple film and a negative thermocouple film which are arranged on the flexible insulating substrate, wherein one end of the positive thermocouple film and one end of the negative thermocouple film are overlapped to be used as a temperature sensitive area, and the other end of the positive thermocouple film and the other end of the negative thermocouple film are used as cold ends.
Description
Technical Field
The invention belongs to the field of temperature measurement, and relates to a flexible temperature sensor and a preparation method thereof.
Background
The touch sensing units of the human body are divided into three types, namely a mechanical sensing unit, a temperature sensing unit and a pain injury sensing unit. Based on the demands of the service industry in industrial application environments as well as in non-manufacturing environments, extensive research has been conducted on the tactile perception of temperature.
In the manufacturing environment, in order to realize intelligent manufacturing, a tactile sensing system is additionally arranged at the tail end of an actuator of the robot, but the tactile sensing of the end effector of the robot at present only has a part of temperature sensors integrated with a part of actuator systems to realize temperature measurement, and the method can only be applied to occasions with poor universality, less sensing parameters and no need of fine operation. Therefore, the sensor capable of realizing temperature measurement can be researched and prepared to promote the capture of the working state information of the robot to the greatest extent, and corresponding tasks are further executed according to the acquired information.
In the medical rehabilitation field under a non-manufacturing environment, the touch, particularly temperature touch sensor can realize bionic touch function to a great extent, is used for preparing a bionic artificial limb system, can realize remodeling of human function perception to a great extent, and helps patients realize rehabilitation. Therefore, it is necessary to develop a temperature detection sensor which is easy to prepare, so as to solve the problems of complex preparation process and high preparation cost of the existing sensor.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a flexible temperature sensor and a preparation method thereof, wherein the sensor has a simple structure and a preparation process and low preparation cost.
In order to achieve the above purpose, the flexible temperature sensor of the invention comprises a flexible insulating substrate, and a positive thermocouple film and a negative thermocouple film which are arranged on the flexible insulating substrate, wherein one end of the positive thermocouple film is overlapped with one end of the negative thermocouple film to serve as a temperature sensitive area, and the other end of the positive thermocouple film and the other end of the negative thermocouple film are used as cold ends.
The flexible insulating substrate is made of polyimide, and the negative thermocouple film is made of indium oxide.
The material of the positive thermocouple film is indium tin oxide.
The material of the negative thermocouple film is indium oxide.
The preparation method of the flexible temperature sensor comprises the following steps: and preparing an anode thermocouple film and a cathode thermocouple film on the flexible insulating substrate based on a screen printing technology.
The method specifically comprises the following steps:
1) Mixing a first part of terpineol solvent, a first part of epoxy resin and a first part of polyether amine with indium tin oxide powder to obtain a first printing slurry, and mixing a second part of terpineol solvent, a second part of epoxy resin and a second part of polyether amine with indium oxide powder to obtain a second printing slurry;
2) Cleaning the flexible insulating substrate;
3) Patterning the positive thermocouple film 2 by using a positive screen printing mask plate by adopting a screen printing technology, and placing the positive thermocouple film on a thermal platform with the temperature of 60-80 ℃ for curing;
4) Carrying out graphical preparation on the positive thermocouple film 2 by using a negative screen printing mask plate by adopting a screen printing technology, and placing the positive thermocouple film on a thermal platform with the temperature of 60-80 ℃ for curing to obtain a temperature sensor sample;
5) Sintering the temperature sensor sample for 1-5h in an atmospheric environment at 200-300 ℃;
6) And calibrating the temperature sensor sample to obtain the flexible temperature sensor.
The specific operation of the step 2) is as follows: and cleaning the flexible insulating substrate by using acetone, ethanol and deionized water in sequence, and then treating the surface of the flexible insulating substrate by using an oxygen ion cleaner.
The diameter of the indium tin oxide powder is 5-10 microns.
The invention has the following beneficial effects:
when the flexible temperature sensor and the preparation method thereof are specifically operated, the positive thermocouple film and the negative thermocouple film are prepared on the flexible insulating substrate 1 based on the screen printing technology, the preparation process is simple, the requirements on instruments and equipment are low, and in-situ preparation and measurement can be realized.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic diagram showing the middle cross-sectional structure of the temperature-sensitive area 4 according to the present invention;
FIG. 3 is a graph of the test results of the present invention.
Wherein, 1 is a flexible insulating substrate, 2 is a positive thermocouple film, 3 is a negative thermocouple film, 4 is a temperature sensitive area, and 5 is a cold end.
Detailed Description
The invention is described in further detail below with reference to the attached drawing figures:
referring to fig. 1, the flexible temperature sensor according to the present invention includes a flexible insulating substrate 1, and a positive thermocouple film 2 and a negative thermocouple film 3 disposed on the flexible insulating substrate 1, wherein one end of the positive thermocouple film 2 overlaps one end of the negative thermocouple film 3 to serve as a temperature sensitive area 4, and the other end of the positive thermocouple film 2 and the other end of the negative thermocouple film 3 serve as a cold end 5.
The flexible insulating substrate 1 is made of polyimide, and the negative thermocouple film 3 is made of indium oxide.
The material of the positive thermocouple film 2 is indium tin oxide.
The material of the negative thermocouple film 3 is indium oxide.
The preparation method of the flexible temperature sensor comprises the following steps: positive electrode thermocouple film 2 and negative electrode thermocouple film 3 were prepared on flexible insulating substrate 1 based on screen printing technology.
The method specifically comprises the following steps:
1) Mixing a first part of terpineol solvent, a first part of epoxy resin and a first part of polyether amine with indium tin oxide powder to obtain a first printing slurry, and mixing a second part of terpineol solvent, a second part of epoxy resin and a second part of polyether amine with indium oxide powder to obtain a second printing slurry;
2) Cleaning the flexible insulating substrate 1;
3) Patterning the positive thermocouple film 2 by using a positive screen printing mask plate by adopting a screen printing technology, and placing the positive thermocouple film on a thermal platform with the temperature of 60-80 ℃ for curing;
4) Carrying out graphical preparation on the positive thermocouple film 2 by using a negative screen printing mask plate by adopting a screen printing technology, and placing the positive thermocouple film on a thermal platform with the temperature of 60-80 ℃ for curing to obtain a temperature sensor sample;
5) Sintering the temperature sensor sample for 1-5h in an atmospheric environment at 200-300 ℃;
6) And calibrating the temperature sensor sample to obtain the flexible temperature sensor.
The specific operation of the step 2) is as follows: and cleaning the flexible insulating substrate 1 by using acetone, ethanol and deionized water in sequence, and then treating the surface of the flexible insulating substrate 1 by using an oxygen ion cleaner, wherein the diameter of the indium tin oxide powder and the diameter of the indium oxide powder are 5-10 microns.
The specific process for calibrating the temperature sensor sample comprises the following steps:
the temperature sensitive area 4 is placed on a heating platform, the cold end 5 is placed outside the heating platform, the temperature is kept at room temperature, the temperature sensitive area 4 is heated by the heating platform, meanwhile, the temperature sensitive area 4 and the cold end 5 are respectively monitored by two K-type standard thermocouples, so that the cold end 5 and the temperature sensitive area 4 generate a temperature gradient, a temperature difference potential difference is generated based on a Seebeck effect, the temperature of the cold end 5, the temperature sensitive position temperature and the voltage difference of the cold end 5 of two materials are acquired by a data acquisition device, and the temperature sensor is calibrated according to the acquired data such as the voltage difference and the temperature difference.
The flexible material polyimide is selected as a substrate material to ensure the flexibility of the sensor, the positive and negative electrodes of the sensor are prepared by a screen printing process, the characteristic that the flexible substrate is not high-temperature resistant is adopted, and the mixed solution of epoxy resin and polyetheramine is selected as a curing agent of the powder material of the positive and negative electrodes of the sensor, so that sintering and curing can be completed at the temperature of 200-300 ℃ for 1-5 hours, the flexible substrate is not damaged by high temperature, and the powder of the electrode material can be cured into a film. The sensor has the characteristics of simple preparation process, low requirements on instruments and equipment, capability of realizing in-situ preparation, measurement and the like. In addition, the invention is based on the thermocouple principle, and does not need external energy supply.
Claims (1)
1. The utility model provides a flexible temperature sensor, a serial communication port, including flexible insulating substrate (1) and positive pole thermocouple film (2) and negative pole thermocouple film (3) of setting on flexible insulating substrate (1), wherein, one end of positive pole thermocouple film (2) overlaps as temperature sensitive area (4) with one end of negative pole thermocouple film (3), the other end of positive pole thermocouple film (2) and the other end of negative pole thermocouple film (3) are cold junction (5), the material of flexible insulating substrate (1) is polyimide, flexible temperature sensor's preparation method includes: preparing an anode thermocouple film (2) and a cathode thermocouple film (3) on a flexible insulating substrate (1) based on a screen printing technology;
the preparation method of the flexible temperature sensor specifically comprises the following steps:
1) Mixing a first part of terpineol solvent, a first part of epoxy resin and a first part of polyether amine with anode thermocouple material powder to obtain a first printing paste, and mixing a second part of terpineol solvent, a second part of epoxy resin and a second part of polyether amine with cathode thermocouple material powder to obtain a second printing paste;
2) Cleaning the flexible insulating substrate (1);
3) Patterning the positive thermocouple film (2) by using a positive screen printing mask plate by adopting a screen printing technology, and placing the positive thermocouple film on a thermal platform with the temperature of 60-80 ℃ for curing;
4) Carrying out graphical preparation on the positive thermocouple film (2) by using a negative screen printing mask plate by adopting a screen printing technology, and placing the positive thermocouple film on a thermal platform with the temperature of 60-80 ℃ for curing to obtain a temperature sensor sample;
5) Sintering the temperature sensor sample for 1-5h in an atmospheric environment at 200-300 ℃;
the specific operation of the step 2) is as follows: and cleaning the flexible insulating substrate (1) by using acetone, ethanol and deionized water in sequence, and then treating the surface of the flexible insulating substrate (1) by using an oxygen ion cleaner.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011547272.5A CN112729580B (en) | 2020-12-23 | 2020-12-23 | Flexible temperature sensor and preparation method thereof |
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| CN202011547272.5A CN112729580B (en) | 2020-12-23 | 2020-12-23 | Flexible temperature sensor and preparation method thereof |
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| CN113959574B (en) * | 2021-09-26 | 2022-12-09 | 西安交通大学 | Thin-film thermocouple based on indium oxide composite material and preparation method thereof |
| CN113984235B (en) * | 2021-11-10 | 2024-04-19 | 武汉大学 | Flexible stretchable thermocouple based on ionic thermoelectric hydrogel and preparation method thereof |
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| CN105318983A (en) * | 2015-10-30 | 2016-02-10 | 中国电子科技集团公司第四十八研究所 | Flexible thin film thermocouple temperature sensor and preparation method thereof |
| CN105294074B (en) * | 2015-11-12 | 2017-10-20 | 西安交通大学 | A kind of method that use silk-screen printing technique prepares sull type thermocouple |
| CN105823569B (en) * | 2016-04-27 | 2018-10-30 | 西安交通大学 | A kind of doping chromic acid lanthanum film type thermocouple and preparation method thereof |
| CN106225959A (en) * | 2016-07-04 | 2016-12-14 | 电子科技大学 | A kind of fexible film heat flow transducer and preparation method thereof |
| CN109781287A (en) * | 2019-03-04 | 2019-05-21 | 西安交通大学 | A kind of fexible film thermocouple temperature sensor with high spatial resolution |
| CN110954230B (en) * | 2019-11-27 | 2021-07-20 | 东华大学 | Flexible thermocouple temperature sensor and preparation method thereof |
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