CN112729168B - F-P etalon interference imaging quality evaluation method for micro angle measurement - Google Patents

F-P etalon interference imaging quality evaluation method for micro angle measurement Download PDF

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CN112729168B
CN112729168B CN202011533267.9A CN202011533267A CN112729168B CN 112729168 B CN112729168 B CN 112729168B CN 202011533267 A CN202011533267 A CN 202011533267A CN 112729168 B CN112729168 B CN 112729168B
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CN112729168A (en
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刘源
沈小燕
李东升
禹静
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China Jiliang University
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    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
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Abstract

The invention discloses an F-P etalon interference imaging quality evaluation method for measuring a tiny angle, which greatly improves the imaging quality by measuring and evaluating the light intensity distribution uniformity evaluation, the image definition evaluation, the image ovalization evaluation and the optimal selection evaluation between imaging rings of images of an interference imaging image of the F-P etalon.

Description

F-P etalon interference imaging quality evaluation method for micro angle measurement
Technical Field
The invention relates to the field of micro-angle measurement methods, in particular to an F-P etalon interference imaging quality evaluation method for micro-angle measurement.
Background
The micro angle measurement technology is widely applied to the occasions of precision mechanical component installation, precision and ultra-precision machining, aiming and positioning and the like, and has extremely important significance and function in the fields of machinery, aerospace, military and the like. The F-P etalon interference method is one of the technical means for realizing high-precision measurement of the tiny angle at present, and the method utilizes the interference imaging principle of the F-P etalon, uses an objective lens to project the deflection angle of incident light onto an image plane, and uses an area array device to receive the circle center displacement of a concentric interference ring so as to realize the measurement of the deflection angle.
For the F-P etalon interferometry to measure the tiny angle, the previous measurement research mostly focuses on the improvement of the measurement principle, the improvement of the processing algorithm of the interference image and the like, and the research on the imaging quality aspects such as the imaging light intensity distribution uniformity, the imaging definition degree, the ovalization of the imaging ring, the optimal selection between the imaging rings and the like of the interference image is lacked, so that the tracing to the tiny angle measured by the F-P etalon interferometry is not facilitated, and the accuracy of the tiny angle measurement is influenced.
In order to solve the existing problems, a novel F-P etalon interference imaging quality evaluation method for measuring a tiny angle is needed.
Disclosure of Invention
Aiming at the defects of the prior art and a processing method, the invention provides an F-P etalon interference imaging quality evaluation method for micro-angle measurement, solves the imaging quality problems of the uniformity of imaging light intensity distribution, the imaging definition degree, the imaging ring ovalization degree, the optimal selection between imaging rings and the like of an F-P etalon interference image in micro-angle measurement, makes up for the defect that an interference image quality evaluation method is lacked in the process of measuring micro-angles by an F-P etalon interference method, and has the advantages of low cost, high efficiency and high cost performance.
In order to solve the problems, the invention is realized by the following technical scheme:
an F-P etalon interference imaging quality evaluation method for micro-angle measurement comprises the following steps:
the method comprises the following steps: and acquiring a concentric interference circular ring image. Receiving a concentric interference circular ring image before a deflection angle is generated by an area array device;
step two: and judging the light intensity uniformity of the concentric interference circular ring image. Taking the obtained concentric interference ring image as central axes along the horizontal direction and the vertical direction, measuring the maximum light intensity of all rings on the two central axes, establishing a rectangular coordinate system, taking the horizontal central axis as an x axis, the vertical central axis as a y axis, and the intersection point of the two central axes as an origin, respectively calculating the average value of the maximum light intensity value of each ring in the positive direction of the x axis, the negative direction of the x axis, the positive direction of the y axis and the negative direction of the y axis, respectively
Figure BDA0002852373500000021
By comparison
Figure BDA0002852373500000022
Figure BDA0002852373500000023
The proximity between the four values is to a threshold L 2 Comparing, and judging whether the uniformity of the image light intensity is qualified or not, as follows;
Figure BDA0002852373500000024
Figure BDA0002852373500000025
calculating out
Figure BDA0002852373500000026
Arithmetic mean of
Figure BDA0002852373500000027
Respectively calculate
Figure BDA0002852373500000028
Figure BDA0002852373500000029
And
Figure BDA00028523735000000210
so that the absolute value of the largest difference is equal to
Figure BDA00028523735000000211
Is divided to obtain L 1 I.e. the light intensity distribution uniformity parameter of the image, when L 1 >L 2 And judging that the uniformity of the light intensity distribution of the image is unqualified, otherwise, judging that the uniformity is qualified.
Step three: and judging the definition of the concentric interference circular ring image. The full width at half maximum FWHM of the interference fringe, i.e. the phase difference corresponding to when the light intensity falls to half of the maximum. And moving the area array device near the ideal focal plane, receiving the concentric interference ring images of the area array device at different positions, and calculating the FWHM values of the rings with the assigned serial numbers in all the concentric interference ring images, wherein the FWHM values are respectively FWHMx +, FWHMx-, FWHMy + and FWHMy-. Comparing the FWHM arithmetic mean values of all the images, wherein the image with the minimum FWHM arithmetic mean value is the closest to an ideal focal plane, so as to obtain the clearest image, and the method comprises the following steps;
FWHMn＝(FWHMx+n)+(FWHMx-n)+(FWHMy+n)+(FWHMy-n)(n＝1,2,3…)
FWHM min＝min(FWHM1，FWHM2，FWHM3，FWHM4…FWHMn)
the n serial numbers are used for marking different focusing positions, and the FWHMn is an arithmetic mean value of FWHM values of the serial number rings passing through the vicinity of two central axes in the concentric interference ring image at the same focusing position. FWHMmin is the minimum FWHMn value of concentric interference circular ring images at different focusing positions, namely the definition parameter of the images, and at the moment, the corresponding n is the serial number of the optimal focusing position, so that the clearest images can be obtained.
Step four: and judging the ovalization degree of the concentric interference circular ring image. And calculating the FWHM values of the designated sequence number rings passing through the vicinity of the two central axes in the concentric interference ring image, namely FWHMx +, FWHMx-, FWHMy + and FWHMy-. By comparing the closeness between four values FWHMx +, FWHMx-, FWHMy +, FWHMy-with a threshold T 2 And comparing, and judging whether the ovalization of the circular ring is qualified or not, wherein the ovalization of the circular ring is as follows:
Figure BDA0002852373500000031
Figure BDA0002852373500000032
calculating the arithmetic mean of FWHMx +, FWHMx-, FWHMy +, FWHMy-)
Figure BDA0002852373500000033
FWHMx +, FWHMx-, FWHMy +, FWHMy-and
Figure BDA0002852373500000041
so that the absolute value of the largest difference is equal to
Figure BDA0002852373500000042
Is divided to obtain T 1 I.e. the parameter of the degree of ovalization of the image, when T 1 >T 2 And judging that the ovalization degree of the image is unqualified, otherwise, judging that the ovalization degree is qualified.
Step five: and judging the optimal selection among the imaging rings of the concentric interference ring image. Respectively establishing an x-axis rectangular coordinate system and a y-axis rectangular coordinate system in the horizontal direction and the vertical direction of the diameters of the approximate concentric interference rings, and rotating counterclockwiseAnd (3) rotating the coordinate system by 45 degrees to obtain an x '-axis and y' -axis rectangular coordinate system, and adopting a method for interpolating, subdividing and smoothing the planar array virtual pixels and the signals, wherein the method is disclosed in the patent application specification with the application number of 201710374595.0. And respectively establishing N parallel lines on two sides of the approximate diameter of the circular ring of the coordinate axis of the x 'axis and the y' axis, wherein N is a positive integer. For the same ring, after parallel lines are intersected with each ring, there are 8N +4 small photoelectric signal line segments, and the peak position coordinates and the standard deviation S of the peak position coordinates of the photoelectric signals on each small line segment of all the rings in the concentric interference ring image are solved by adopting the method for solving the peak position coordinates of the photoelectric signals in the patent application specification with the application number of 201510217472.7. Calculating the arithmetic mean value of the standard deviation of the peak position coordinates of the small line segments of 8N +4 photoelectric signals in each ring
Figure BDA0002852373500000043
Comparing all rings
Figure BDA0002852373500000044
Value, select minimum
Figure BDA0002852373500000045
The circle where the value is located is used as the optimal circle for subsequently calculating the radius of the circle center, and the method comprises the following steps:
Figure BDA0002852373500000046
(m =1,2,3 … 8N +4, N is a natural number, k =1,2,3 …)
Figure BDA0002852373500000047
And m is the peak position coordinate and the standard deviation number on one circular ring. k is the serial number of the circular ring,
Figure BDA0002852373500000048
and calculating the arithmetic mean value of all the peak position coordinate standard deviations on the circular ring where the designated circular ring serial number is located in the clearest concentric interference circular ring image.
Figure BDA0002852373500000049
For each ring in the image of the most clearly concentric interfering rings
Figure BDA00028523735000000410
And the minimum value is the optimal selection parameter between the imaging rings of the image, and the corresponding k is the optimal ring serial number at the moment and is used for calculating the diameter of the subsequent circle center.
The invention has the following beneficial effects:
(1) The F-P etalon interference imaging quality evaluation method for measuring the tiny angle overcomes the defect that an interference image quality evaluation method is lacked in the process of measuring the tiny angle by the F-P etalon interference method.
(2) The evaluation process is standardized, the influence of human factors is reduced, the accuracy of image quality judgment is high, and a foundation is laid for the improvement of the accuracy of the measurement of the tiny angle by the F-P etalon interference method in the future.
(3) The evaluation process is easy to program, the image quality can be conveniently and rapidly judged, and the efficiency is high.
(4) The method has strong universality, can carry out measurement under different conditions by replacing a light source, an F-P etalon, an imaging objective lens and the like, and provides a certain foundation for the deep research of the technology for measuring the tiny angle by the F-P etalon interferometry.
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FIG. 1 is a flow chart of the F-P etalon interference imaging quality evaluation method in the invention.
FIG. 2 is a diagram of an apparatus used in an embodiment of the present invention.
FIG. 3 is a detailed flowchart of a specific process for recording evaluation parameters according to the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings.
As shown in fig. 2, the apparatus used in the embodiment of the present invention includes a point light source 1, an interference filter 2, a converging lens 3, an F-P etalon 4, a mirror 5, an imaging objective lens 6, and an area array device 8, the point light source 1 being a mercury lamp; the interference filter 2 is a monochromatic filter with the wavelength of 546 nm; the F-P etalon 5 is a 2mm spaced air gap F-P etalon; the flatness of the reflector 5 is better than lambda/20; the imaging objective 6 is an industrial fixed-focus lens with a focal length of 80 mm; the area array size of the area array device 9 is 22.16mm multiplied by 15.22mm, the area array pixel number is 7904 multiplied by 5432, and the average pixel pitch of the area array is w ≈ 2.8 μm. When the reflector 5 deflects, the area array device 9 obtains two concentric interference ring images with changed circle center positions, the circle center displacement δ and the focal length f of the imaging objective lens 6, and the deflection angle α = δ/f of the reflector 5. Experiments show that within the rotation angle measurement range 600 ″, the angle is not determined to be greater than 0.132 ″. The components can be stably measured in real time and have high precision, and the device is only used for explaining the specific technical scheme of the invention.
Specifically, the F-P etalon interference imaging quality evaluation method for measuring a minute angle, as shown in fig. 1 and 3, includes the following steps:
the method comprises the following steps: acquiring a concentric interference circular ring image through an area array device 9;
step two: taking the obtained concentric interference ring image as central axes along the horizontal direction and the vertical direction, measuring the maximum light intensity of all rings on the two central axes, establishing a rectangular coordinate system, taking the horizontal central axis as an x axis, the vertical central axis as a y axis, and the intersection point of the two central axes as an origin, respectively calculating the average value of the maximum light intensity value of each ring in the positive direction of the x axis, the negative direction of the x axis, the positive direction of the y axis and the negative direction of the y axis, respectively
Figure BDA0002852373500000061
By comparison
Figure BDA0002852373500000062
The proximity between the four values is to a threshold L 2 Comparing the parameters of the color space and the intensity of the light beam with the value of 0.200 to judge whether the uniformity of the light intensity of the image is qualified or not, and judging whether the uniformity of the light intensity of the image is qualified or not as follows;
Figure BDA0002852373500000063
Figure BDA0002852373500000064
computing
Figure BDA0002852373500000065
Arithmetic mean of
Figure BDA0002852373500000066
Respectively calculate
Figure BDA0002852373500000067
Figure BDA0002852373500000068
And
Figure BDA0002852373500000069
so that the absolute value of the largest difference is equal to
Figure BDA00028523735000000610
Is divided to obtain L 1 =0.038, which is the intensity distribution uniformity parameter of the image, since L 1 <L 2 Judging that the uniformity of the light intensity distribution of the image is qualified;
step three: and judging the definition of the concentric interference circular ring image. The full width at half maximum FWHM of the interference fringe, i.e. the phase difference corresponding to when the light intensity falls to half of the maximum. And moving the area array device near the ideal focal plane, receiving the concentric interference ring images of the area array device at different positions, and calculating the FWHM values of the rings with the assigned serial numbers in all the concentric interference ring images, wherein the FWHM values are respectively FWHMx +, FWHMx-, FWHMy + and FWHMy-. By comparing the FWHM arithmetic mean values of all the images, the image with the smallest FWHM arithmetic mean value is the closest ideal focal plane, thereby obtaining the clearest image, and FWHMx +, FWHMx-, FWHMy +, FWHMy-, and are calculated for the specified 10 th circle at 11 focus positions as shown in table 1 below
Figure BDA0002852373500000071
TABLE 1 FWHM values at different focus positions
w
Figure BDA0002852373500000072
FWHMmin＝min(FWHM1，FWHM2，FWHM3，FWHM4…FWHM10)＝5.681
FWHMmin =5.681 is the concentric interference ring image minimum for these 11 focus positions
Figure BDA0002852373500000073
The value is the definition parameter of the image, and the most clear image can be obtained by taking the number of the optimal focusing position corresponding to n =6 at the moment;
step four: and judging the ovalization degree of the concentric interference circular ring image. And calculating the FWHM values of the designated sequence number rings passing through the vicinity of the two central axes in the concentric interference ring image, namely FWHMx +, FWHMx-, FWHMy + and FWHMy-. By comparing the closeness between four values FWHMx +, FWHMx-, FWHMy +, FWHMy-with a threshold T 2 =0.200, and judges whether or not the ovalization of the ring is acceptable, as follows:
Figure BDA0002852373500000081
Figure BDA0002852373500000082
calculating the arithmetic mean of FWHMx +, FWHMx-, FWHMy +, FWHMy-)
Figure BDA0002852373500000083
FWHMx +, FWHMx-, FWHMy +, FWHMy-and
Figure BDA0002852373500000084
so that the absolute value of the largest difference isTo the value and
Figure BDA0002852373500000085
is divided to obtain T 1 Is 0.065, i.e. the ovalization parameter of the image, due to T 1 <T 2 And judging that the ovalization degree of the image is qualified.
Step five: and judging the optimal selection among the imaging rings of the concentric interference ring image. Respectively establishing an x-axis rectangular coordinate system and a y-axis rectangular coordinate system in the horizontal direction and the vertical direction of the diameter of the approximate concentric interference circular ring, rotating the coordinate systems by 45 degrees anticlockwise to obtain the x '-axis rectangular coordinate system and the y' -axis rectangular coordinate system, and adopting a method for interpolating, subdividing and smoothing the planar array virtual pixels by adopting the patent application specification with the application date of 201710374595.0. And respectively establishing N parallel lines on two sides of the approximate diameter of the circular ring of the coordinate axis of the coordinate system of the x 'axis and the y' axis, wherein N is 1. For the same ring, after parallel lines and each ring are intersected, there are 8N +4=12 photoelectric signal small line segments, and the peak position coordinates and the standard deviation S of the photoelectric signals on each small line segment of all rings in the concentric interference ring image are obtained by adopting the method for obtaining the peak value coordinate values of the photoelectric signals in the patent application specification with the application number of 201510217472.7 on the application date. Calculating the arithmetic mean value of the standard deviation of the peak position coordinates of 8N +4=12 photoelectric signal small line segments in each circle
Figure BDA0002852373500000091
Comparing all rings
Figure BDA0002852373500000092
Value, select minimum
Figure BDA0002852373500000093
And taking the ring with the value as the optimal ring for subsequently calculating the radius of the circle center as follows:
Figure BDA0002852373500000094
Figure BDA0002852373500000095
and m is the peak position coordinate on one circular ring and the standard deviation number 12.k is the serial number of the ring, 3 rings are provided in total,
Figure BDA0002852373500000096
and calculating the arithmetic mean value of all the peak position coordinate standard deviations on the circular ring where the designated circular ring serial number is located in the clearest concentric interference circular ring image.
Figure BDA0002852373500000097
For 3 rings in the clearest concentric interference ring image
Figure BDA0002852373500000098
The optimal selection parameter is the optimal selection parameter between the imaging rings of the image, and the optimal ring serial number corresponding to k =2 is used for calculating the subsequent circle center displacement.
Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present invention, which are used for illustrating the technical solutions of the present invention and not for limiting the same, and the protection scope of the present invention is not limited thereto, although the present invention is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the embodiments of the present invention, and they should be construed as being included therein. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.

Claims (1)

1. An F-P etalon interference imaging quality evaluation method for micro-angle measurement comprises the following steps:
the method comprises the following steps: acquiring a concentric interference circular ring image; receiving a concentric interference circular ring image before a deflection angle is generated by an area array device;
step two: judging the light intensity uniformity of the concentric interference circular ring image; taking the obtained concentric interference ring image as central axes along the horizontal direction and the vertical direction, measuring the maximum light intensity of all rings on the two central axes, establishing a rectangular coordinate system, taking the horizontal central axis as an x axis, the vertical central axis as a y axis, and the intersection point of the two central axes as an origin, respectively calculating the average value of the maximum light intensity value of each ring in the positive direction of the x axis, the negative direction of the x axis, the positive direction of the y axis and the negative direction of the y axis, respectively
Figure FDA0003838234690000018
By comparison
Figure FDA0003838234690000019
The proximity between the four values is to a threshold L 2 And comparing to judge whether the uniformity of the image light intensity is qualified or not, and comprising the following steps:
Figure FDA0003838234690000011
Figure FDA0003838234690000012
computing
Figure FDA0003838234690000013
Arithmetic mean of
Figure FDA00038382346900000110
Respectively calculate
Figure FDA0003838234690000014
Figure FDA0003838234690000015
And
Figure FDA0003838234690000016
such that the absolute value of the largest difference is equal to
Figure FDA0003838234690000017
Is divided to obtain L 1 I.e. the light intensity distribution uniformity parameter of the image, when L 1 >L 2 Judging that the uniformity of the light intensity distribution of the image is unqualified, otherwise, judging that the uniformity is qualified;
step three: judging the definition of the concentric interference circular ring image; the full width at half maximum FWHM of the interference fringes, namely the phase difference corresponding to the light intensity when the light intensity is reduced to half of the maximum value; moving the area array device near an ideal focal plane, receiving concentric interference ring images of the area array device at different positions, and calculating FWHM values of rings with assigned serial numbers passing through the vicinity of two central axes in all the concentric interference ring images, wherein the FWHM values are respectively FWHMx +, FWHMx-, FWHMy + and FWHMy-; by comparing the FWHM arithmetic mean size of all images, the image with the smallest FWHM arithmetic mean is the closest to the ideal focal plane, so as to obtain the clearest image, as follows:
FWHMn＝(FWHMx+n)+(FWHMx-n)+(FWHMy+n)+(FWHMy-n)(n＝1,2,3…)
FWHM min＝min(FWHM1，FWHM2，FWHM3，FWHM4…FWHMn)
n is used for marking different focusing positions, and FWHMn is the arithmetic mean value of FWHM values of rings with the same numerical index in the concentric interference ring image at the same focusing position when two central axes pass through the vicinity; FWHMmin is the minimum FWHMn value of concentric interference circular ring images at different focusing positions, namely the definition parameter of the images, and at the moment, the corresponding n is the serial number of the optimal focusing position, so that the clearest images can be obtained;
step four: judging the ovalization degree of the concentric interference circular ring image; calculating FWHM values of the designated sequence number rings passing through the vicinity of the two central axes in the concentric interference ring image, wherein the FWHM values are respectively FWHMx +, FWHMx-, FWHMy + and FWHMy-; by comparing the closeness between four values FWHMx +, FWHMx-, FWHMy +, FWHMy-with a threshold T 2 Comparing and judging the circular ringWhether the ovalization of (a) is qualified or not is as follows:
Figure FDA0003838234690000021
Figure FDA0003838234690000022
calculating the arithmetic mean of FWHMx +, FWHMx-, FWHMy +, FWHMy-)
Figure FDA0003838234690000031
FWHMx +, FWHMx-, FWHMy +, FWHMy-and
Figure FDA0003838234690000032
so that the absolute value of the largest difference is equal to
Figure FDA0003838234690000033
Is divided to obtain T 1 I.e. the parameter of the degree of ovalization of the image, when T 1 >T 2 Judging that the ovalization degree of the image is unqualified, otherwise, judging that the ovalization degree is qualified;
step five: judging the optimal selection among imaging rings of the concentric interference ring images; respectively establishing an x-axis rectangular coordinate system and a y-axis rectangular coordinate system in the horizontal direction and the vertical direction of the diameter of the approximate concentric interference circular ring, rotating the coordinate system by 45 degrees anticlockwise to obtain an x '-axis rectangular coordinate system and a y' -axis rectangular coordinate system, and explaining the interpolation subdivision and signal smoothing of virtual pixels by adopting a method for the interpolation subdivision and signal smoothing of the virtual pixels for an area array; establishing N parallel lines on two sides of the approximate diameter of the circular ring of the coordinate axis of the x 'axis coordinate system and the y' axis coordinate system, wherein N is a positive integer; for the same ring, after parallel lines are intersected with each ring, 8N +4 photoelectric signal small line segments can be generated, and the method for solving the photoelectric signal peak value coordinate values in the patent of the method for measuring the focal length and the rotation angle by using the Fabry-Perot etalon is adopted to solve all the rings in the concentric interference ring imagePhotoelectric signal peak position coordinates and peak position coordinate standard deviation S on each small line segment; calculating the arithmetic mean value of the standard deviation of the peak position coordinates of the small line segments of 8N +4 photoelectric signals in each ring
Figure FDA0003838234690000034
Comparing all rings
Figure FDA0003838234690000035
Value, select minimum
Figure FDA0003838234690000036
The circle where the value is located is used as the optimal circle for subsequently calculating the radius of the circle center, and the method comprises the following steps:
Figure FDA0003838234690000037
Figure FDA0003838234690000038
m is the peak position coordinate and the standard deviation number on a circular ring; k is the serial number of the circular ring,
Figure FDA0003838234690000039
calculating the arithmetic mean value of all the peak position coordinate standard deviations on the circular ring where the designated circular ring serial number is located in the clearest concentric interference circular ring image;
Figure FDA0003838234690000041
for each ring in the image of the most clearly concentric interfering rings
Figure FDA0003838234690000042
And the minimum value is the optimal selected parameter between the imaging rings of the image, and the corresponding k is the optimal ring serial number at the moment and is used for calculating the subsequent circle center displacement.
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TWI596446B (en) * 2016-04-08 2017-08-21 Luminous uniformity correction equipment and its correction method
CN113177935A (en) * 2021-05-21 2021-07-27 陕西利丰恒信生物科技发展有限公司 Near-infrared light intensity uniformity detection method and device and computer equipment

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