CN112729168A - F-P etalon interference imaging quality evaluation method for micro angle measurement - Google Patents
F-P etalon interference imaging quality evaluation method for micro angle measurement Download PDFInfo
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- CN112729168A CN112729168A CN202011533267.9A CN202011533267A CN112729168A CN 112729168 A CN112729168 A CN 112729168A CN 202011533267 A CN202011533267 A CN 202011533267A CN 112729168 A CN112729168 A CN 112729168A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02062—Active error reduction, i.e. varying with time
Abstract
The invention discloses an F-P etalon interference imaging quality evaluation method for measuring a tiny angle, which greatly improves the imaging quality by measuring and evaluating the light intensity distribution uniformity evaluation, the image definition evaluation, the image ovalization evaluation and the optimal selection evaluation between imaging rings of images of an interference imaging image of the F-P etalon.
Description
Technical Field
The invention relates to the field of micro-angle measurement methods, in particular to an F-P etalon interference imaging quality evaluation method for micro-angle measurement.
Background
The micro angle measurement technology is widely applied to the occasions of precision mechanical component installation, precision and ultra-precision machining, aiming and positioning and the like, and has extremely important significance and effect in the fields of machinery, aerospace, military and the like. The F-P etalon interference method is one of the technical means for realizing high-precision measurement of the tiny angle at present, and the method utilizes the interference imaging principle of the F-P etalon, uses an objective lens to project the deflection angle of incident light onto an image plane, and uses an area array device to receive the circle center displacement of a concentric interference ring so as to realize the measurement of the deflection angle.
For the F-P etalon interferometry to measure the tiny angle, the previous measurement research mostly focuses on the improvement of the measurement principle, the improvement of the processing algorithm of the interference image and the like, and the research on the imaging quality aspects such as the imaging light intensity distribution uniformity, the imaging definition degree, the ovalization of the imaging ring, the optimal selection between the imaging rings and the like of the interference image is lacked, so that the tracing to the tiny angle measured by the F-P etalon interferometry is not facilitated, and the accuracy of the tiny angle measurement is influenced.
In order to solve the existing problems, a novel F-P etalon interference imaging quality evaluation method for measuring a tiny angle is needed.
Disclosure of Invention
Aiming at the defects of the prior art and a processing method, the invention provides an F-P etalon interference imaging quality evaluation method for micro-angle measurement, solves the imaging quality problems of the uniformity of imaging light intensity distribution, the imaging definition degree, the imaging ring ovalization degree, the optimal selection between imaging rings and the like of an F-P etalon interference image in micro-angle measurement, makes up for the defect that an interference image quality evaluation method is lacked in the process of measuring micro-angles by an F-P etalon interference method, and has the advantages of low cost, high efficiency and high cost performance.
In order to solve the problems, the invention is realized by the following technical scheme:
an F-P etalon interference imaging quality evaluation method for micro-angle measurement comprises the following steps:
the method comprises the following steps: and acquiring a concentric interference circular ring image. Receiving a concentric interference circular ring image before a deflection angle is generated by an area array device;
step two: and judging the light intensity uniformity of the concentric interference circular ring image. Taking the acquired concentric interference circular ring image as central axes along the horizontal direction and the vertical direction, measuring the maximum light intensity of all circular rings on the two central axes, establishing a rectangular coordinate system, taking the horizontal central axis as an x axis, the vertical central axis as a y axis, and the intersection point of the two central axes as an origin, and respectively calculating the positive direction, the negative direction and the light intensity of the x axis,The average value of the maximum light intensity value of each circular ring in the positive direction of the y axis and the negative direction of the y axis is respectively
By comparison
The proximity between the four values is to a threshold L2Comparing, and judging whether the uniformity of the image light intensity is qualified or not, as follows;
computing
Arithmetic mean of
Respectively calculate
And
so that the absolute value of the largest difference is equal to
Is divided to obtain L1I.e. the light intensity distribution uniformity parameter of the image, when L1>L2Then, the light intensity distribution of the image is judgedAnd if not, the uniformity is qualified.
Step three: and judging the definition of the concentric interference circular ring image. The full width at half maximum FWHM of the interference fringe, i.e. the phase difference corresponding to when the light intensity falls to half of the maximum. And moving the area array device near the ideal focal plane, receiving the concentric interference ring images of the area array device at different positions, and calculating the FWHM values of the rings with the assigned serial numbers in all the concentric interference ring images, wherein the FWHM values are respectively FWHMx +, FWHMx-, FWHMy + and FWHMy-. Comparing the FWHM arithmetic mean values of all the images, wherein the image with the minimum FWHM arithmetic mean value is the closest to an ideal focal plane, so as to obtain the clearest image, and the method comprises the following steps;
FWHMn＝(FWHMx+n)+(FWHMx-n)+(FWHMy+n)+(FWHMy-n)(n＝1,2,3…)
FWHM min＝min(FWHM1，FWHM2，FWHM3，FWHM4…FWHMn)
the n serial numbers are used for marking different focusing positions, and the FWHMn is an arithmetic mean value of FWHM values of the serial number rings passing through the vicinity of two central axes in the concentric interference ring image at the same focusing position. FWHMmin is the minimum FWHMn value of concentric interference circular ring images at different focusing positions, namely the definition parameter of the images, and at the moment, the corresponding n is the serial number of the optimal focusing position, so that the clearest images can be obtained.
Step four: and judging the ovalization degree of the concentric interference circular ring image. And calculating the FWHM values of the designated sequence number rings passing through the vicinity of the two central axes in the concentric interference ring image, namely FWHMx +, FWHMx-, FWHMy + and FWHMy-. By comparing the closeness between four values FWHMx +, FWHMx-, FWHMy +, FWHMy-with a threshold T2And comparing to judge whether the ovalization of the ring is qualified or not, and the method comprises the following steps:
calculating the arithmetic mean of FWHMx +, FWHMx-, FWHMy +, FWHMy-)
FWHMx +, FWHMx-, FWHMy +, FWHMy-and
so that the absolute value of the largest difference is equal to
Is divided to obtain T1I.e. the ovalization parameter of the image, when T1>T2And judging that the ovalization degree of the image is unqualified, otherwise, judging that the ovalization degree is qualified.
Step five: and judging the optimal selection among the imaging rings of the concentric interference ring image. Respectively establishing an x-axis rectangular coordinate system and a y-axis rectangular coordinate system in the horizontal direction and the vertical direction of the diameter of the approximate concentric interference circular ring, rotating the coordinate systems by 45 degrees anticlockwise to obtain the x '-axis rectangular coordinate system and the y' -axis rectangular coordinate system, and adopting a method for interpolating, subdividing and smoothing the array virtual pixels, which is disclosed in the patent application specification with the application date of 201710374595.0. And respectively establishing N parallel lines on two sides of the approximate diameter of the circular ring of the coordinate axis of the x 'axis and the y' axis, wherein N is a positive integer. For the same ring, after the parallel line intersects with each ring, there are 8N +4 photoelectric signal small line segments, and the peak position coordinates and the standard deviation S of the photoelectric signals on each small line segment of all the rings in the concentric interference ring image are obtained by adopting the method for obtaining the peak coordinate values of the photoelectric signals in the patent application specification with the application number of 201510217472.7. Calculating the arithmetic mean value of the standard deviation of the peak position coordinates of 8N +4 small segments of the photoelectric signals in each circle
Comparing all rings
Value, select minimum
The circle where the value is located is used as the optimal circle for subsequently calculating the radius of the circle center, and the method comprises the following steps:
And m is the peak position coordinate and the standard deviation number on one circular ring. k is the serial number of the circular ring,
and calculating the arithmetic mean value of all the peak position coordinate standard deviations on the circular ring where the designated circular ring serial number is located in the clearest concentric interference circular ring image.
For each ring in the image of the most clearly concentric interfering rings
And the minimum value is the optimal selected parameter between the imaging rings of the image, and the corresponding k is the optimal ring serial number at the moment and is used for calculating the diameter of the subsequent circle center.
The invention has the following beneficial effects:
(1) the F-P etalon interference imaging quality evaluation method for measuring the tiny angle overcomes the defect that an interference image quality evaluation method is lacked in the process of measuring the tiny angle by the F-P etalon interference method.
(2) The evaluation process is standardized, the influence of human factors is reduced, the accuracy of image quality judgment is high, and a foundation is laid for the improvement of the accuracy of the measurement of the tiny angle by the F-P etalon interference method in the future.
(3) The evaluation process is easy to program, the image quality can be conveniently and rapidly judged, and the efficiency is high.
(4) The method has strong universality, can carry out measurement under different conditions by replacing a light source, an F-P etalon, an imaging objective lens and the like, and provides a certain foundation for the deep research of the technology for measuring the tiny angle by the F-P etalon interferometry.
Drawings
FIG. 1 is a flow chart of the F-P etalon interference imaging quality evaluation method in the invention.
FIG. 2 is a diagram of an apparatus used in an embodiment of the present invention.
FIG. 3 is a detailed flowchart of a specific process for recording evaluation parameters according to the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings.
As shown in fig. 2, the apparatus used in the embodiment of the present invention includes a point light source 1, an interference filter 2, a converging lens 3, an F-P etalon 4, a mirror 5, an imaging objective lens 6, and an area array device 8, the point light source 1 being a mercury lamp; the interference filter 2 is a monochromatic filter with the wavelength of 546 nm; the F-P etalon 5 is a 2mm spaced air gap F-P etalon; the flatness of the reflector 5 is better than lambda/20; the imaging objective 6 is an industrial fixed-focus lens with a focal length of 80 mm; the area array size of the area array device 9 is 22.16mm multiplied by 15.22mm, the area array pixel number is 7904 multiplied by 5432, and the average pixel pitch of the area array is w ≈ 2.8 μm. The reflector 5 deflects, the area array device 9 obtains two concentric interference ring images with changed circle center positions, the circle center displacement δ and the focal length f of the imaging objective lens 6, and the deflection angle α of the reflector 5 is δ/f. Experiments show that within the rotation angle measurement range 600 ″, the angle is not determined to be greater than 0.132 ″. The components can be stably measured in real time and have high precision, and the device is only used for explaining the specific technical scheme of the invention.
Specifically, the F-P etalon interference imaging quality evaluation method for measuring a minute angle, as shown in fig. 1 and 3, includes the following steps:
the method comprises the following steps: acquiring a concentric interference circular ring image through an area array device 9;
step two: for the obtained concentric stemsRegarding a ring image, taking the horizontal direction and the vertical direction as central axes, measuring the maximum light intensity of all rings on the two central axes, establishing a rectangular coordinate system, taking the horizontal central axis as an x axis, the vertical central axis as a y axis, taking the intersection point of the two central axes as an origin, respectively calculating the average value of the maximum light intensity value of each ring in the positive direction of the x axis, the negative direction of the x axis, the positive direction of the y axis and the negative direction of the y axis, respectively
By comparison
The proximity between the four values is to a threshold L2Comparing the image intensity values with 0.200 to judge whether the uniformity of the image intensity is qualified or not, as follows;
computing
Arithmetic mean of
Respectively calculate
And
so that the absolute value of the largest difference is equal to
Is divided to obtain L10.038 is the light intensity distribution uniformity parameter of the image, since L1<L2Judging that the uniformity of the light intensity distribution of the image is qualified;
step three: and judging the definition of the concentric interference circular ring image. The full width at half maximum FWHM of the interference fringe, i.e. the phase difference corresponding to when the light intensity falls to half of the maximum. And moving the area array device near the ideal focal plane, receiving the concentric interference ring images of the area array device at different positions, and calculating the FWHM values of the rings with the assigned serial numbers in all the concentric interference ring images, wherein the FWHM values are respectively FWHMx +, FWHMx-, FWHMy + and FWHMy-. By comparing the FWHM arithmetic mean size of all the images, the image with the smallest FWHM arithmetic mean is the closest to the ideal focal plane, thereby obtaining the clearest image, and FWHMx +, FWHMx-, FWHMy +, FWHMy-, and FWHMy-of the specified 10 th circle are calculated for 11 focus positions as shown in table 1 below
TABLE 1 FWHM values at different focus positions
w
FWHMmin＝min(FWHM1，FWHM2，FWHM3，FWHM4…FWHM10)＝5.681
FWHMmin 5.681 is the concentric interference ring image minimum for these 11 focus positions
The value is the definition parameter of the image, and at this time, the corresponding n is 6 and is the serial number of the optimal focusing position, so that the clearest image can be obtained;
step four: and judging the ovalization degree of the concentric interference circular ring image. Calculating the FWHM values of the designated sequence number rings passing through the vicinity of the two central axes in the concentric interference ring image, wherein the FWHM values are respectively FWHMx +, (zero mean square root and zero mean square root),FWHMx-, FWHMy +, FWHMy-. By comparing the closeness between four values FWHMx +, FWHMx-, FWHMy +, FWHMy-with a threshold T2And (5) comparing the two values to be 0.200, and judging whether the ovalization of the circular ring is qualified or not, wherein the ovalization is as follows:
calculating the arithmetic mean of FWHMx +, FWHMx-, FWHMy +, FWHMy-)
FWHMx +, FWHMx-, FWHMy +, FWHMy-and
so that the absolute value of the largest difference is equal to
Is divided to obtain T1Is 0.065, i.e. the ovalization parameter of the image, due to T1<T2And judging that the ovalization degree of the image is qualified.
Step five: and judging the optimal selection among the imaging rings of the concentric interference ring image. Respectively establishing an x-axis rectangular coordinate system and a y-axis rectangular coordinate system in the horizontal direction and the vertical direction of the diameter of the approximate concentric interference circular ring, rotating the coordinate systems by 45 degrees anticlockwise to obtain the x '-axis rectangular coordinate system and the y' -axis rectangular coordinate system, and adopting a method for interpolating, subdividing and smoothing the array virtual pixels, which is disclosed in the patent application specification with the application date of 201710374595.0. And respectively establishing N parallel lines on two sides of the approximate diameter of the circular ring of the coordinate axis of the x 'axis and the y' axis, wherein N is 1. For the same ring, after the parallel line intersects with each ring, there are 8N + 4-12 photoelectric signal small line segments, and the method for solving the peak coordinate value of the photoelectric signal is adopted in the patent application specification with application number 201510217472.7,and solving the peak position coordinates and the standard deviation S of the peak position coordinates of the photoelectric signals on each small line segment of all the rings in the concentric interference ring image. Calculating the standard deviation arithmetic mean value of the peak position coordinates of 8N + 4-12 photoelectric signal small line segments in each circle
Comparing all rings
Value, select minimum
The circle where the value is located is used as the optimal circle for subsequently calculating the radius of the circle center, and the method comprises the following steps:
m is the peak position coordinate on a circle and the number of standard deviations 12. k is the serial number of the ring, 3 rings are provided in total,
and calculating the arithmetic mean value of all the peak position coordinate standard deviations on the circular ring where the designated circular ring serial number is located in the clearest concentric interference circular ring image.
For 3 rings in the clearest concentric interference ring image
The optimal selection parameter between the imaging rings of the image is obtained, and the corresponding k is 2 at the moment and is the optimal ring serial number for calculating the subsequent circle center displacement.
Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present invention, which are used for illustrating the technical solutions of the present invention and not for limiting the same, and the protection scope of the present invention is not limited thereto, although the present invention is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: any person skilled in the art can modify or easily conceive the technical solutions described in the foregoing embodiments or equivalent substitutes for some technical features within the technical scope of the present disclosure; such modifications, changes or substitutions do not depart from the spirit and scope of the embodiments of the present invention, and they should be construed as being included therein. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.
Claims (1)
1. An F-P etalon interference imaging quality evaluation method for micro-angle measurement comprises the following steps:
the method comprises the following steps: and acquiring a concentric interference circular ring image. Receiving a concentric interference circular ring image before a deflection angle is generated by an area array device;
step two: and judging the light intensity uniformity of the concentric interference circular ring image. Taking the obtained concentric interference ring image as central axes along the horizontal direction and the vertical direction, measuring the maximum light intensity of all rings on the two central axes, establishing a rectangular coordinate system, taking the horizontal central axis as an x axis, the vertical central axis as a y axis, and the intersection point of the two central axes as an origin, respectively calculating the average value of the maximum light intensity value of each ring in the positive direction of the x axis, the negative direction of the x axis, the positive direction of the y axis and the negative direction of the y axis, respectively
By comparison
The proximity between the four values is to a threshold L2Comparing, and judging whether the uniformity of the image light intensity is qualified or not, as follows;
computing
Arithmetic mean of
Respectively calculate
And
so that the absolute value of the largest difference is equal to
Is divided to obtain L1I.e. the light intensity distribution uniformity parameter of the image, when L1>L2And judging that the uniformity of the light intensity distribution of the image is unqualified, otherwise, judging that the uniformity is qualified.
Step three: and judging the definition of the concentric interference circular ring image. The full width at half maximum FWHM of the interference fringe, i.e. the phase difference corresponding to when the light intensity falls to half of the maximum. And moving the area array device near the ideal focal plane, receiving the concentric interference ring images of the area array device at different positions, and calculating the FWHM values of the rings with the assigned serial numbers in all the concentric interference ring images, wherein the FWHM values are respectively FWHMx +, FWHMx-, FWHMy + and FWHMy-. Comparing the FWHM arithmetic mean values of all the images, wherein the image with the minimum FWHM arithmetic mean value is the closest to an ideal focal plane, so as to obtain the clearest image, and the method comprises the following steps;
FWHMn＝(FWHMx+n)+(FWHMx-n)+(FWHMy+n)+(FWHMy-n)(n＝1,2,3…)
FWHMmin＝min(FWHM1，FWHM2，FWHM3，FWHM4…FWHMn)
the n serial numbers are used for marking different focusing positions, and the FWHMn is an arithmetic mean value of FWHM values of the serial number rings passing through the vicinity of two central axes in the concentric interference ring image at the same focusing position. FWHMmin is the minimum FWHMn value of concentric interference circular ring images at different focusing positions, namely the definition parameter of the images, and at the moment, the corresponding n is the serial number of the optimal focusing position, so that the clearest images can be obtained.
Step four: and judging the ovalization degree of the concentric interference circular ring image. And calculating the FWHM values of the designated sequence number rings passing through the vicinity of the two central axes in the concentric interference ring image, namely FWHMx +, FWHMx-, FWHMy + and FWHMy-. By comparing the closeness between four values FWHMx +, FWHMx-, FWHMy +, FWHMy-with a threshold T2And comparing to judge whether the ovalization of the ring is qualified or not, and the method comprises the following steps:
calculating the arithmetic mean of FWHMx +, FWHMx-, FWHMy +, FWHMy-)
FWHMx +, FWHMx-, FWHMy +, FWHMy-and
so that the absolute value of the largest difference is equal to
Is divided to obtain T1I.e. the ovalization parameter of the image, when T1>T2And judging that the ovalization degree of the image is unqualified, otherwise, judging that the ovalization degree is qualified.
Step five: and judging the optimal selection among the imaging rings of the concentric interference ring image. Respectively establishing an x-axis rectangular coordinate system and a y-axis rectangular coordinate system in the horizontal direction and the vertical direction of the diameter of the approximate concentric interference circular ring, rotating the coordinate systems by 45 degrees anticlockwise to obtain the x '-axis rectangular coordinate system and the y' -axis rectangular coordinate system, and adopting a method for interpolating, subdividing and smoothing the array virtual pixels, which is disclosed in the patent application specification with the application date of 201710374595.0. And respectively establishing N parallel lines on two sides of the approximate diameter of the circular ring of the coordinate axis of the x 'axis and the y' axis, wherein N is a positive integer. For the same ring, after the parallel line intersects with each ring, there are 8N +4 photoelectric signal small line segments, and the peak position coordinates and the standard deviation S of the photoelectric signals on each small line segment of all the rings in the concentric interference ring image are obtained by adopting the method for obtaining the peak coordinate values of the photoelectric signals in the patent application specification with the application number of 201510217472.7. Calculating the arithmetic mean value of the standard deviation of the peak position coordinates of 8N +4 small segments of the photoelectric signals in each circle
Comparing all rings
Value, select minimum
The circle where the value is located is used as the optimal circle for subsequently calculating the radius of the circle center, and the method comprises the following steps:
and m is the peak position coordinate and the standard deviation number on one circular ring. k is the serial number of the circular ring,
and calculating the arithmetic mean value of all the peak position coordinate standard deviations on the circular ring where the designated circular ring serial number is located in the clearest concentric interference circular ring image.
For each ring in the image of the most clearly concentric interfering rings
And the minimum value is the optimal selected parameter between the imaging rings of the image, and the corresponding k is the optimal ring serial number at the moment and is used for calculating the subsequent circle center displacement.
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