CN112713138A - Flexible substrate and display panel - Google Patents
Flexible substrate and display panel Download PDFInfo
- Publication number
- CN112713138A CN112713138A CN202011583929.3A CN202011583929A CN112713138A CN 112713138 A CN112713138 A CN 112713138A CN 202011583929 A CN202011583929 A CN 202011583929A CN 112713138 A CN112713138 A CN 112713138A
- Authority
- CN
- China
- Prior art keywords
- flexible substrate
- layer
- amorphous silicon
- silicon layer
- electrostatic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 183
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 79
- 230000003068 static effect Effects 0.000 claims abstract description 59
- 230000005611 electricity Effects 0.000 claims abstract description 47
- 230000004888 barrier function Effects 0.000 claims abstract description 45
- 238000012545 processing Methods 0.000 claims abstract description 30
- 239000010410 layer Substances 0.000 claims description 181
- 230000000903 blocking effect Effects 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 18
- 229910010272 inorganic material Inorganic materials 0.000 claims description 14
- 239000011147 inorganic material Substances 0.000 claims description 14
- 239000010409 thin film Substances 0.000 claims description 7
- 239000011229 interlayer Substances 0.000 claims description 6
- 238000002161 passivation Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 15
- 238000012360 testing method Methods 0.000 abstract description 10
- 238000000034 method Methods 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/60—Protection against electrostatic charges or discharges, e.g. Faraday shields
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/301—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/33—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being semiconductor devices, e.g. diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1218—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or structure of the substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Theoretical Computer Science (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
Claims (20)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011583929.3A CN112713138B (en) | 2020-12-28 | 2020-12-28 | Flexible substrate and display panel |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011583929.3A CN112713138B (en) | 2020-12-28 | 2020-12-28 | Flexible substrate and display panel |
Publications (2)
Publication Number | Publication Date |
---|---|
CN112713138A true CN112713138A (en) | 2021-04-27 |
CN112713138B CN112713138B (en) | 2024-05-17 |
Family
ID=75545939
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202011583929.3A Active CN112713138B (en) | 2020-12-28 | 2020-12-28 | Flexible substrate and display panel |
Country Status (1)
Country | Link |
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CN (1) | CN112713138B (en) |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009163247A (en) * | 2008-12-07 | 2009-07-23 | Sakae Tanaka | High-performance display apparatus and method for manufacturing the same |
KR20130014181A (en) * | 2011-07-29 | 2013-02-07 | 삼성디스플레이 주식회사 | Flat display apparatus and method for manufacturing the same |
CN205609532U (en) * | 2016-05-17 | 2016-09-28 | 京东方科技集团股份有限公司 | Thin film transistor and array substrate , display device |
CN106972008A (en) * | 2017-05-15 | 2017-07-21 | 上海天马有机发光显示技术有限公司 | Organic EL display panel and display device |
CN107768530A (en) * | 2017-11-15 | 2018-03-06 | 武汉华星光电半导体显示技术有限公司 | Flexible base board and preparation method thereof |
CN107818988A (en) * | 2017-09-27 | 2018-03-20 | 武汉华星光电半导体显示技术有限公司 | Flexible display panels and preparation method thereof |
CN108074864A (en) * | 2017-12-26 | 2018-05-25 | 武汉华星光电半导体显示技术有限公司 | Array substrate and preparation method thereof, flexible OLED display part |
US20190064614A1 (en) * | 2017-08-31 | 2019-02-28 | Wuhan China Star Optoelectronics Technology Co., Ltd. | Array substrate and liquid crystal display panel |
US20190074276A1 (en) * | 2017-09-07 | 2019-03-07 | Samsung Display Co., Ltd. | Display apparatus |
US20190131551A1 (en) * | 2017-10-30 | 2019-05-02 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Flexible oled display panel and manufacturing method thereof |
WO2020140285A1 (en) * | 2019-01-04 | 2020-07-09 | 京东方科技集团股份有限公司 | Electrostatic discharge protection circuit, display substrate, and display device |
CN111739923A (en) * | 2020-07-03 | 2020-10-02 | 上海天马有机发光显示技术有限公司 | Display panel and display device |
-
2020
- 2020-12-28 CN CN202011583929.3A patent/CN112713138B/en active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009163247A (en) * | 2008-12-07 | 2009-07-23 | Sakae Tanaka | High-performance display apparatus and method for manufacturing the same |
KR20130014181A (en) * | 2011-07-29 | 2013-02-07 | 삼성디스플레이 주식회사 | Flat display apparatus and method for manufacturing the same |
CN205609532U (en) * | 2016-05-17 | 2016-09-28 | 京东方科技集团股份有限公司 | Thin film transistor and array substrate , display device |
CN106972008A (en) * | 2017-05-15 | 2017-07-21 | 上海天马有机发光显示技术有限公司 | Organic EL display panel and display device |
US20190064614A1 (en) * | 2017-08-31 | 2019-02-28 | Wuhan China Star Optoelectronics Technology Co., Ltd. | Array substrate and liquid crystal display panel |
US20190074276A1 (en) * | 2017-09-07 | 2019-03-07 | Samsung Display Co., Ltd. | Display apparatus |
CN107818988A (en) * | 2017-09-27 | 2018-03-20 | 武汉华星光电半导体显示技术有限公司 | Flexible display panels and preparation method thereof |
US20190131551A1 (en) * | 2017-10-30 | 2019-05-02 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Flexible oled display panel and manufacturing method thereof |
CN107768530A (en) * | 2017-11-15 | 2018-03-06 | 武汉华星光电半导体显示技术有限公司 | Flexible base board and preparation method thereof |
CN108074864A (en) * | 2017-12-26 | 2018-05-25 | 武汉华星光电半导体显示技术有限公司 | Array substrate and preparation method thereof, flexible OLED display part |
WO2020140285A1 (en) * | 2019-01-04 | 2020-07-09 | 京东方科技集团股份有限公司 | Electrostatic discharge protection circuit, display substrate, and display device |
CN111739923A (en) * | 2020-07-03 | 2020-10-02 | 上海天马有机发光显示技术有限公司 | Display panel and display device |
Also Published As
Publication number | Publication date |
---|---|
CN112713138B (en) | 2024-05-17 |
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Legal Events
Date | Code | Title | Description |
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: 201201 No. 3809, Lingkong North Road, Pudong New Area, Shanghai Applicant after: SHANGHAI TIANMA AM-OLED Co.,Ltd. Address before: Room 509, building 1, No. 6111, Longdong Avenue, Pudong New Area, Shanghai, 201201 Applicant before: SHANGHAI TIANMA AM-OLED Co.,Ltd. |
|
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20211027 Address after: No.8, liufangyuan Henglu, Donghu New Technology Development Zone, Wuhan City, Hubei Province Applicant after: WUHAN TIANMA MICRO-ELECTRONICS Co.,Ltd. Applicant after: Wuhan Tianma Microelectronics Co.,Ltd. Shanghai Branch Address before: 201201 No. 3809, Lingkong North Road, Pudong New Area, Shanghai Applicant before: SHANGHAI TIANMA AM-OLED Co.,Ltd. |
|
GR01 | Patent grant | ||
GR01 | Patent grant |