CN112694248B - Lifting device for glass base material - Google Patents
Lifting device for glass base material Download PDFInfo
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- CN112694248B CN112694248B CN202110011779.7A CN202110011779A CN112694248B CN 112694248 B CN112694248 B CN 112694248B CN 202110011779 A CN202110011779 A CN 202110011779A CN 112694248 B CN112694248 B CN 112694248B
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- base material
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/01202—Means for storing or carrying optical fibre preforms, e.g. containers
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
The invention discloses a lifting device of a glass base material, which prevents the failure of the lifting device caused by corrosion of the components of the driving mechanism part of the lifting device due to the intrusion of silica particles and corrosive gas into the lifting device of a glass base material manufacturing device. A lifting device (10) for lifting a glass base material (6) comprises: an elevating mechanism part (20) which elevates the glass base material (6); a drive mechanism unit (12) for operating the lift mechanism unit (20); a partition mechanism (27) that partitions an internal space (S) of the lifting device (10) that at least includes the drive mechanism unit (12) from the outside; and a pressure maintaining mechanism (30) which maintains the pressure of the internal space (S) to be higher than the pressure outside.
Description
This application is a divisional application based on chinese application No. 201610861030.0 (lifting apparatus for glass preform) filed on 29/9/2016, and the contents of which are incorporated below.
Technical Field
The present invention relates to a lifting device for a glass base material.
Background
In the process of manufacturing the glass base material, if the corrosive gas leaks, metal parts of the manufacturing apparatus are corroded, metal-based dust in the indoor atmosphere increases, and a large amount of metal impurities may be mixed into the glass base material. Therefore, patent document 1 discloses a top lid structure for preventing leakage of a corrosive gas such as a chlorine-based gas or a fluorine-based gas in a sintering step of a glass base material.
Further, in the case where the glass parent material manufacturing apparatus is abnormally stopped, in the case where an unstable operation is performed due to recovery after the abnormal stop or in the case where maintenance is performed for maintenance management, the glass parent material lifting apparatus and the gas supply apparatus can be independently operated, and therefore, when the operation is performed improperly, there is a possibility that the harmful gas in the furnace core tube leaks to the outside. Therefore, patent document 2 discloses a method of preventing leakage of corrosive gas due to an erroneous operation even during maintenance by detecting that the upper lid is closed in the sintering furnace by using an encoder count value of the elevating device.
Patent document 1: japanese patent laid-open No. 2008-105904
Patent document 2: japanese laid-open patent publication No. 2012-121737
Disclosure of Invention
The optical fiber preform manufacturing apparatus described in patent document 1 discloses prevention of gas leakage from the muffle tube, but if gas leakage is assumed, a driving portion inside the elevating device may corrode. Further, patent document 2 discloses that even if the operating method in the unstable state is mistaken, the corrosive gas is not leaked, but the driving unit in the elevating device may be deteriorated by the corrosive gas or the like which is stably leaked in a slight amount.
The invention aims to prevent silica particles and corrosive gas from entering the interior of a lifting device of a glass base material manufacturing device and prevent the failure of the lifting device caused by the corrosion of a driving mechanism part and the lifting mechanism part of the lifting device.
The glass base material lifting device of the invention comprises:
an elevating mechanism for elevating the glass base material;
a drive mechanism unit for operating the lift mechanism unit;
a partition mechanism that partitions an internal space of the lifting device including at least the driving mechanism portion from an outside; and
a pressure maintaining mechanism that maintains a pressure of the internal space to be higher than an outside pressure.
Further, the glass base material lifting device of the present invention includes:
an elevating mechanism unit that elevates the glass base material;
a drive mechanism unit for operating the lift mechanism unit;
and a partition mechanism for partitioning an internal space of the lifting device including the driving mechanism unit and the sliding unit of the lifting mechanism unit from the outside.
Effects of the invention
According to the present invention, it is possible to prevent the intrusion of silica fine particles and corrosive gas into the inside of the lifting device provided in the glass base material manufacturing apparatus, and to prevent the failure of the lifting device due to the corrosion of at least the components of the drive mechanism.
Drawings
Fig. 1 is a schematic view of a glass parent material manufacturing apparatus including a glass parent material lifting apparatus according to the present invention.
FIG. 2 isbase:Sub>A sectional view taken along line A-A of the glass parent material lifting and lowering apparatus shown in FIG. 1.
Fig. 3 is a schematic view showing a modified example of the glass base material lifting and lowering apparatus according to the present invention.
Description of the reference numerals
1: glass base material manufacturing device
2: reaction vessel
3: composite burner
5: glass rod
6: glass base material
10. 110: lifting device
11. 111: frame body
12: drive mechanism unit
13: electric motor
14: gear box
20: lifting mechanism part
21: lifting chuck
22: base plate
23: sliding rail
24: ball screw
27: rolling screen
30: blower fan
40: piping
Detailed Description
< summary of embodiments of the invention of the present application >
First, an outline of an embodiment of the present invention will be described.
The lifting device for a glass base material according to the present embodiment,
(1) Comprising:
an elevating mechanism for elevating the glass base material;
a drive mechanism unit for operating the lift mechanism unit;
a partition mechanism that partitions an internal space of the lifting device including at least the driving mechanism portion from an outside; and
a pressure maintaining mechanism that maintains a pressure of the internal space to be higher than an outside pressure.
According to this configuration, it is possible to prevent silica particles and corrosive gas from entering the inside of the lifting device provided in the glass base material manufacturing apparatus, and to prevent a failure of the lifting device due to corrosion of the components of the drive mechanism.
(2) Preferably, the sliding portion of the elevating mechanism is housed in the internal space.
With this configuration, deterioration and failure of the sliding portion of the elevating mechanism portion can be prevented.
(3) Preferably the partition means is a roller blind.
According to this structure, the intrusion of gas and the like can be reliably prevented with a simple structure.
(4) Preferably, the pressure maintaining mechanism is a blower for sending air into the inner space.
According to this configuration, the air outside the elevating device is continuously sent into the internal space by the blower, so that the pressure in the internal space is increased with respect to the pressure in the external space, and the intrusion of gas or the like can be more reliably prevented.
(5) Preferably, the pressure maintaining means is a means for introducing a compressed gas into the internal space.
According to this configuration, by introducing the compressed gas into the internal space, the pressure of the internal space is set higher than that of the outside, and the intrusion of the gas or the like can be prevented more reliably.
In the lifting and lowering device of the glass base material according to another example of the present embodiment,
(6) Comprising: an elevating mechanism unit that elevates the glass base material;
a drive mechanism unit for operating the lift mechanism unit;
and a partition mechanism for partitioning an internal space of the lifting device including the driving mechanism unit and the sliding unit of the lifting mechanism unit from the outside.
According to this configuration, it is possible to prevent silica particles and corrosive gas from entering the inside of the lifting device provided in the glass base material manufacturing apparatus, and to prevent a failure of the lifting device due to corrosion of the driving mechanism portion of the lifting device and the constituent members of the lifting mechanism portion.
The partition mechanism described in (6) is preferably a roll screen. This makes it possible to reliably prevent the intrusion of gas or the like with a simple structure.
Detailed description of embodiments of the invention
Next, an example of an embodiment of the glass base material lifting device according to the present invention will be described with reference to the drawings. In the drawings used in the following description, the scale is appropriately changed for convenience of description.
As a method for producing a glass base material, there is known a method in which a glass raw material gas such as silicon tetrachloride is first supplied to an oxyhydrogen burner to produce silica microparticles, and the silica microparticles are jetted to a glass rod in a reaction vessel to produce a glass microparticle deposit (VAD method, OVD method). After the glass soot body is produced, the glass soot body is inserted into a core tube in a dehydration and sintering step, the temperature of the core tube is raised by filling the core tube with a dehydration gas atmosphere such as chlorine gas, the glass soot body is dehydrated, and then the temperature is raised to sinter the glass soot body.
Fig. 1 isbase:Sub>A schematic view ofbase:Sub>A glass parent material manufacturing apparatus includingbase:Sub>A glass parent material lifting device, and fig. 2 isbase:Sub>A sectional view of the glass parent material lifting device shown in fig. 1 taken along linebase:Sub>A-base:Sub>A. In fig. 2, a reaction vessel and a composite burner (clad burner) to be described later are not shown.
As shown in fig. 1 and 2, the glass base material manufacturing apparatus 1 according to the present embodiment is an apparatus for manufacturing a glass base material 6 by depositing silica fine particles around a glass rod 5 by, for example, an OVD method. The glass base material manufacturing apparatus 1 includes a reaction vessel 2, and a glass rod 5 is suspended from the upper side of the reaction vessel 2 to the inside.
A composite burner 3 as a burner for generating glass microparticles is disposed in the reaction vessel 2. The raw material gas and the flame forming gas are supplied to the composite burner 3 by a gas supply device not shown. SiCl is introduced into the composite burner 3 as a raw material gas 4 H is introduced as a flame forming gas 2 、O 2 N is introduced as a burner seal gas 2 And the like. In the oxyhydrogen flame formed by the composite burner 3, silica fine particles are generated by a flame hydrolysis reaction. The generated silica microparticles are deposited around the glass rod 5 to form a glass microparticle deposit, thereby producing a glass base material 6 having a predetermined outer diameter. In the process of manufacturing the glass base material 6, corrosive gas such as HCI gas as a by-product or silica particles not deposited around the glass rod 5 are transported from the reaction vessel 2 to a detoxifying device (not shown) and treated.
An elevating device 10 for the glass base material 6 (glass rod 5) is disposed above the reaction vessel 2. The lifting device 10 includes a housing 11, a driving mechanism 12, and a lifting mechanism 20.
The driving mechanism 12 is disposed in the internal space S of the lifting device 10, the driving mechanism 12 includes a motor 13 and a gear box 14, and the gear box 14 accommodates a speed reducer and a clutch, not shown. A pulley 15 is fixed to an output shaft of the motor 13. A pulley 16 is fixed to the gear case 14. A timing belt 17 is wound around a pulley 15 fixed to the motor 13 and a pulley 16 fixed to the gear case 14.
The elevating mechanism 20 includes an elevating chuck 21 projecting laterally from the elevating device 10. The upper end of the glass rod 5 is held by the lifting chuck 21. The lifting mechanism 20 has a base plate 22 that partitions the driving mechanism 12 and the lifting mechanism 20 in the internal space S of the lifting device 10. The base plate 22 is provided with a pair of slide rails 23. The lifting chuck 21 is supported by a pair of slide rails 23 so as to be movable in the vertical direction. In addition, in the plan view of fig. 2, a ball screw 24 extending in the vertical direction is provided at the center of the elevating chuck 21. A pulley 25 is disposed below the ball screw 24. Power is transmitted from the gear box 14 to the pulley 25 via the rotary shaft 19 around which the timing belt 18 is wound. A brake 26 is provided at a lower end of the ball screw 24. The ball screw 24 is driven by the motor 13 of the driving mechanism 12 to rotate forward and backward, and thereby the elevating chuck 21 supported by the slide rail 23 is elevated. The glass rod 5, which is held at the upper end thereof by the elevating chuck 21, is elevated and rotated by the elevating device 10. The portion of the lift chuck 21 supported by the slide rail 23 and the portion penetrated by the ball screw 24, the slide rail 23, and the ball screw 24 are defined as "sliding portions".
As shown in fig. 1, a rolling screen 27 (an example of a partition mechanism) is provided outside the ball screw 24 provided in the elevating chuck 21. The roller shutters 27 are disposed above and below the elevating chuck 21, and are fixed to the elevating chuck 21 by bolts or the like so as to maintain airtightness. Further, rollers 28 are provided on the upper and lower surfaces of the frame 11, respectively, and the roller 28 is rotated as the elevating chuck 21 is elevated, thereby winding or unwinding the roller blind 27.
As shown in fig. 2, an opening 11B is provided in the front surface 11A of the housing 11, the elevating chuck 21 protrudes outward from the opening 11B, and a rolling screen 27 is provided so as to close the opening 11B except for the elevating chuck 21. By configuring as described above, the internal space S of the housing 11 in which the driving mechanism 12 and the elevating mechanism 20 are disposed can be partitioned so as not to be open to the outside of the housing 11. Further, the space between the roll screen 27 and the front surface 11A of the housing 11 may not be completely sealed, and some gap may be formed when the roll screen 27 is wound and unwound.
The housing 11 is provided with a blower 30 (an example of a pressure maintaining mechanism) on a back surface portion opposite to the elevating chuck 21. In the present example, 2 upper and lower blowers 30 are disposed on the rear surface of the housing 11, but the number and arrangement of the blowers 30 are not limited to this. Air is sent from the outside to the internal space S of the housing 11 by the blower 30. The air sent into the internal space S by the blower 30 is discharged to the outside through a gap formed between the roller shutter 27 and the front surface 11A of the housing 11. This can prevent corrosive gas and silica particles from entering the internal space S from a gap formed between the roller shutter 27 and the front surface 11A of the housing 11 while maintaining the internal space S of the housing 11 at a higher pressure than the outside.
Further, the blower 30 is preferably disposed on the back surface or the side surface of the frame 11 separated from the reaction vessel 2 so that corrosive gas and silica microparticles generated from the reaction vessel 2 and the glass microparticle deposition body (glass base material 6) are not introduced into the elevating device 10 by the blower 30.
As described above, in the process of producing the glass base material, the generation of the silica fine particles and the deposition on the glass rod are performed in the reaction vessel, and the corrosive gas such as HCI gas or the silica fine particles that are not deposited are transported from the reaction vessel to the detoxifying device and are treated, but due to the pressure fluctuation in the reaction vessel, the corrosive gas or the silica fine particles may leak from the upper portion of the reaction vessel or the like in a slight amount.
Therefore, the lifting device 10 of the present embodiment includes: a rolling screen 27 for partitioning an internal space S of the housing 11 from the outside, the housing accommodating the lifting mechanism section 20 for lifting the glass base material 6 and the driving mechanism section 12 for operating the lifting mechanism section 20; and a blower 30 for maintaining the pressure in the internal space S at a pressure higher than the outside, and the lift device 10 prevents corrosive gas and silica particles leaking from the reaction vessel 2 from entering the housing 11 of the lift device 10. This prevents corrosive gas and silica particles from coming into contact with the motor 13, the pulleys 15 and 16 of the driving mechanism 12, the slide rail 23, the ball screw 24, and the like of the elevating mechanism 20. As a result, corrosion and trouble of the lifting device 10 can be avoided, and stable production of the glass base material 6 can be performed over a long period of time.
In particular, the slide rail 23 and the ball screw 24 of the elevating mechanism section 20 have a sliding section for moving the elevating chuck 21 up and down, and if rust or silica particles adhere to the surface of the sliding section, the sliding section deteriorates or wears, resulting in a decrease in accuracy or a failure.
In contrast, according to the present embodiment, the sliding portion of the elevating mechanism 20 (the portion of the elevating chuck 21 supported by the slide rail 23 and the portion penetrated by the ball screw 24, the slide rail 23, and the ball screw 24) is disposed in the internal space S partitioned from the outside by the rolling shutter 27. Therefore, deterioration of the sliding portion is prevented, and the accuracy of the up-and-down operation of the glass rod 5 can be maintained.
The structure of the present embodiment has been described by taking the lifting device 10 of the glass base material manufacturing apparatus 1 in the glass fine particle deposition step as an example, but the structure of the present embodiment can be applied to a lifting device of a glass base material in, for example, a dehydration sintering step of a glass base material. In the dehydration sintering structure, the dehydration gas in the core tube may leak from the upper part of the core tube in a slight amount, and in such a case, the structure of the present embodiment can be applied to prevent corrosion and failure of the glass base material lifting device.
The structure of the lifting device according to the present embodiment can also be applied to a vertical flame polisher used in a process of flame polishing the surface of a glass base material. The flame polishing step is a step of heating the glass base material with an oxyhydrogen burner to thereby form SiO on the surface of the glass base material 2 SiO (gas) is performed to smooth the surface irregularities of the glass base material, and this is a cleaning and smoothing step. In the flame polishing step, siO is formed on the surface of the glass base material 2 When vaporized, the silica fine particles are generated and released to the outside. Therefore, the configuration of the present embodiment is adopted for the glass base material lifting device used in the vertical flame polishing machine, and is very effective for preventing the silica microparticles from entering the lifting device.
(examples)
In a vertical flame polishing machine used in a glass base material or flame polishing process, a driving mechanism part and an elevating mechanism part of an elevating device of the glass base material are separated by a roller shutter, and a blower for blowing outside air into the separated interior is provided. In such a vertical flame polishing machine, flame polishing of the surface of the glass base material is continuously performed while periodically performing oil injection to the rotating portion and the sliding portion of the driving mechanism. As a result, even when 100 glass base materials were continuously subjected to flame polishing, no trouble occurred in the drive mechanism section or the like.
(comparative example)
On the other hand, using a vertical flame polishing machine in which the driving mechanism section and the elevating mechanism section are not separated from the outside air, flame polishing of the surface of the glass base material was continuously performed while periodically performing oil injection to the rotating section of the driving mechanism section and the sliding section of the elevating mechanism section, as in the above-described examples. As a result, when 30 glass base materials are continuously subjected to flame polishing, the vibration of the glass base materials becomes large, and the glass base materials cannot be polished to a desired thickness. As a cause of this, it is conceivable that the vibration is increased by rusting of the slide rail and the ball screw due to the intrusion of the silica fine particles into the driving mechanism portion and the elevating mechanism portion, and adhesion of the silica fine particles.
According to the above-described embodiment and comparative example, it was confirmed that the entry of silica fine particles and corrosive gas into the elevating device can be prevented by providing a rolling screen and a blower in the elevating device for the glass base material, and the failure of the elevating device due to corrosion or deterioration of the rotating portion of the driving mechanism portion, the sliding portion of the elevating mechanism portion, and the like can be prevented.
While the present invention has been described in detail and with reference to the specific embodiments, it is apparent to one skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope thereof. The number, position, shape, and the like of the components described above are not limited to those in the above embodiments, and can be changed to appropriate numbers, positions, shapes, and the like in carrying out the present invention.
In the above embodiment, the blower 30 is provided as the pressure maintaining means for maintaining the pressure in the internal space S of the housing 11 at a higher level than the pressure outside the housing 11, but the present invention is not limited to this example.
As in the lifting device 110 shown in fig. 3, the pipe 40 may be connected to the housing 111 instead of the blower 30, and the compressed gas such as compressed air may be introduced into the internal space S from the outside of the housing 111 through the pipe 40. The compressed gas introduced into the housing 111 through the pipe 40 is released to the outside from the housing 111 (for example, from a gap generated between the roller shutter 27 and the housing 111), and thereby the pressure in the internal space S of the elevating device 110 can be maintained higher than the pressure in the outside. Further, it is preferable to provide an air filter inside the piping 40 or the like to remove dust and the like from the compressed gas passing through the piping 40 so as to be clean air.
Instead of the roller blind 27, for example, a bellows-type cover may be provided above and below the lifting chuck 21, and the bellows-type cover may be used as a partition mechanism from the outside.
In the above embodiment, the rolling shutter 27 is provided above and below the elevating chuck 21 outside the ball screw 24 so as to separate the driving mechanism 12 and the elevating mechanism 20 from the outside, but the present invention is not limited to this example. The base plate 22 that partitions the space between the driving mechanism 12 and the elevating mechanism 20 may be used as a partition mechanism from the outside, and at least the corrosive gas and the silica fine particles may be prevented from entering the driving mechanism 12.
In the above embodiment, the blower 30 is provided in the housing 11 of the elevator apparatus 10 so that the pressure in the internal space S of the elevator apparatus 10 is higher than the outside. The fan 30 is not provided, and only the rolling screen 27 may be provided to prevent the intrusion of corrosive gas and silica fine particles.
Claims (8)
1. An elevating device for elevating a glass base material, comprising:
an elevating mechanism unit that elevates the glass base material;
a drive mechanism unit for operating the lift mechanism unit;
a partition mechanism that partitions an internal space of the lifting device including at least the driving mechanism portion from an outside; and
a pressure maintaining mechanism that maintains a pressure of the internal space to be higher than an external pressure,
the lifting device is used in the flame polishing process of the glass parent material,
the flame polishing step is a step of heating the glass base material with an oxyhydrogen burner to form SiO on the surface of the glass base material 2 A step of gasifying the glass to smooth the surface irregularities of the glass base material, cleaning and smoothing the glass base material,
in the flame polishing step, siO on the surface of the glass base material is polished 2 Silica fine particles are generated during vaporization and released to the outside,
the silica fine particles do not intrude into the elevating device.
2. The apparatus for lifting/lowering a glass parent material according to claim 1, wherein,
the sliding portion of the lifting mechanism portion is accommodated in the internal space.
3. The apparatus for lifting/lowering a glass parent material according to claim 1, wherein,
the partition means is a roller shutter.
4. The glass parent material lifting and lowering device according to claim 2,
the partition means is a roller shutter.
5. The apparatus for lifting/lowering a glass parent material according to any one of claims 1 to 4,
the pressure maintaining mechanism is a blower for sending air into the internal space.
6. The apparatus for lifting/lowering a glass parent material according to any one of claims 1 to 4,
the pressure maintaining mechanism is a mechanism for introducing compressed gas into the internal space.
7. An elevating device for elevating a glass base material, comprising:
an elevating mechanism for elevating the glass base material;
a drive mechanism unit for operating the lift mechanism unit; and
a partition mechanism for partitioning an internal space of the lifting device including the driving mechanism portion and the sliding portion of the lifting mechanism portion from an outside,
the lifting device is used in the flame polishing process of the glass parent material,
the flame polishing step is a step of heating the glass base material by an oxyhydrogen burner to form SiO on the surface of the glass base material 2 A step of gasifying the glass to smooth the surface irregularities of the glass base material, cleaning and smoothing the glass base material,
in the flame polishing step, siO on the surface of the glass base material is polished 2 Silica fine particles are generated at the time of vaporization and released to the outside,
the silica fine particles do not intrude into the lifting device.
8. The glass parent material lifting and lowering device according to claim 7,
the partition means is a roller shutter.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-193906 | 2015-09-30 | ||
| JP2015193906A JP6565556B2 (en) | 2015-09-30 | 2015-09-30 | Glass base material lifting device |
| CN201610861030.0A CN106865976B (en) | 2015-09-30 | 2016-09-28 | Lifting device for glass base material |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610861030.0A Division CN106865976B (en) | 2015-09-30 | 2016-09-28 | Lifting device for glass base material |
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| Publication Number | Publication Date |
|---|---|
| CN112694248A CN112694248A (en) | 2021-04-23 |
| CN112694248B true CN112694248B (en) | 2023-02-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610861030.0A Active CN106865976B (en) | 2015-09-30 | 2016-09-28 | Lifting device for glass base material |
| CN202110011779.7A Active CN112694248B (en) | 2015-09-30 | 2016-09-28 | Lifting device for glass base material |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610861030.0A Active CN106865976B (en) | 2015-09-30 | 2016-09-28 | Lifting device for glass base material |
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| JP (1) | JP6565556B2 (en) |
| CN (2) | CN106865976B (en) |
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| JP7093732B2 (en) * | 2019-02-13 | 2022-06-30 | 信越化学工業株式会社 | Manufacturing method of glass base material for optical fiber |
| JP7404931B2 (en) * | 2020-02-26 | 2023-12-26 | 住友電気工業株式会社 | Glass base material manufacturing equipment |
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| CN102432169A (en) * | 2010-09-14 | 2012-05-02 | 住友电气工业株式会社 | Apparatus and method for producing porous glass preform |
| CN102643020A (en) * | 2011-02-16 | 2012-08-22 | 住友电气工业株式会社 | Glass particle stacking body manufacturing method |
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| CN103708718A (en) * | 2012-10-05 | 2014-04-09 | 信越化学工业株式会社 | Apparatus for elongating a glass optical fiber preform |
| CN104125933A (en) * | 2012-12-28 | 2014-10-29 | 住友电气工业株式会社 | Method for manufacturing fine glass particle deposit and method for manufacturing glass base material |
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| CN104710102A (en) * | 2013-12-12 | 2015-06-17 | 住友电气工业株式会社 | Method for producing glass particulate deposit and method for producing glass preform |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2017065979A (en) | 2017-04-06 |
| JP6565556B2 (en) | 2019-08-28 |
| CN106865976A (en) | 2017-06-20 |
| CN112694248A (en) | 2021-04-23 |
| CN106865976B (en) | 2021-01-26 |
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