CN108147656B - Device and method for protecting OVD transmission screw rod - Google Patents

Device and method for protecting OVD transmission screw rod Download PDF

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Publication number
CN108147656B
CN108147656B CN201711467010.6A CN201711467010A CN108147656B CN 108147656 B CN108147656 B CN 108147656B CN 201711467010 A CN201711467010 A CN 201711467010A CN 108147656 B CN108147656 B CN 108147656B
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screw rod
ovd
protecting
protecting cover
deposition
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CN108147656A (en
Inventor
沈小平
崔德运
向德成
何炳
贺程程
谈悠儒
刘建忠
王兵钦
满小忠
朱坤
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Jiangsu Tongding Optical Wand Co ltd
Tongding Interconnection Information Co Ltd
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Jiangsu Tongding Optical Wand Co ltd
Tongding Interconnection Information Co Ltd
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Priority to CN201711467010.6A priority Critical patent/CN108147656B/en
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

The invention provides a device for protecting an OVD transmission screw rod, which comprises a blow lamp platform which is slidably arranged on a guide rail, wherein a plurality of blow lamps are arranged on the blow lamp platform; the device comprises a driving screw rod corresponding to a blowtorch platform, and is characterized in that a screw rod protecting cover is arranged, a plurality of vent holes are formed in the screw rod protecting cover, nitrogen is introduced into the screw rod protecting cover, and a positive pressure cavity is formed in the screw rod protecting cover; and a temperature sensor and a pressure sensor for controlling the nitrogen inlet flow are arranged in the screw rod protective cover. The invention optimizes the levelness of the screw rod, and the outer diameter of the loose body is more uniform. The scrappage caused by the fluctuation of the wire diameter in the drawing process is reduced, and the drawing qualification rate of the optical fiber is improved. In addition, the risk of cracking of the preform during the deposition process is reduced. Through the optimization to the levelness of lead screw, the torch platform is at the more uniform velocity of the in-process of fore-and-aft movement, and loose body density distribution is more even, has reduced the fracture that leads to because of loose body density inequality and has scrapped.

Description

Device and method for protecting OVD transmission screw rod
Technical Field
The invention belongs to the technical field of manufacturing and research and development of optical fiber preforms, and particularly relates to a device and a method for protecting an OVD transmission screw rod.
Background
The OVD (outside vapor deposition) process is one of the most excellent process methods for preparing the low-water-peak or zero-water-peak single-mode optical fiber preform at present, and is widely adopted by mainstream optical fiber preform manufacturers at home and abroad. The core rod prepared by the OVD process consists of a core layer and an optical cladding layer.
The OVD process equipment mainly comprises a chemical vapor reaction cavity, a deposition cavity, a gas blowtorch and a loose body preform rotating mechanism. OVD process burner systems are typically designed with multiple groups of burners. The core layer blast lamp and the blast lamp platform are arranged under the prefabricated rod in a linkage way through a screw rod below the platform. SiO produced after reaction of gas blown in blowtorch 2 The dust particles move towards the loose body preform under the action of the initial gas velocity and thermophoresis, and adhere to the surface of the loose body preform. The torch platform moves back and forth along the torch guide rail through the linkage of the screw rod, and the prefabricated rod is rotated at a certain speed by a rotary bearing structure. Under the above process conditions, siO 2 The particles are uniformly deposited on the surface of the mother rod rotating at a uniform speed layer by layer, and finally a cylindrical loose preform is formed. The OVD technology has the unique technical advantage as a process for producing the preform cladding, and the combustion gas blown in the burner is generally CH 4 /O 2 The raw material gas is SiCl 4 . The chemical equation for generating dust particles includes:
SiCl 4 +2H 2 O→SiO 2 +4HCl (2)
SiCl 4 +O 2 →2SiO 2 +2Cl 2 (3)
the pressure in the chemical gas phase reaction and deposition cavity needs to be controlled stably, and the pressure is regulated by an air draft and air supplement device.
The loose body preform passes through a vitreous handleThe rod is fixed on the chuck, and the chuck is rotated by the motor. The torch platform carries out back and forth and lifting movement through the screw rod, along with the fact that the outer diameter of the prefabricated rod continuously becomes larger, the distance between the torch and the loose body prefabricated rod is adjusted through the lifting screw rod, and meanwhile, the torch platform is driven by the transmission screw rod to carry out back and forth uniform motion, and further the loose body with uniform density and diameter is obtained. However, in general, since the screw is long, deformation is likely to occur in a high-temperature environment of the deposition process, and in addition, the deposition cavity is an acidic environment, and SiO is generated by reaction 2 Particles are easy to adsorb on the surface of a transmission screw rod, the screw rod precision is poor after long-time use, defects of uneven density distribution, easy cracking, large diameter difference, even gas line generation and the like of loose bodies are generated, and in addition, the deposition efficiency is also reduced. Meanwhile, iron ions generated by corrosion of acid gas on the screw rod volatilize under the high-temperature condition and can be carried by air flow to infiltrate into the optical fiber perform, and the quality of the optical fiber perform is affected, so that the optical fiber perform is unqualified, the rejection rate is increased, and the production cost of the optical fiber perform is increased.
Disclosure of Invention
In view of the above, the present invention is directed to overcoming the defects in the prior art and providing a device and a method for protecting an OVD driving screw.
In order to achieve the above purpose, the technical scheme of the invention is realized as follows:
the device for protecting the OVD transmission screw rod comprises a blast lamp platform which is slidably arranged on a guide rail, wherein a plurality of blast lamps are arranged on the blast lamp platform; the device comprises a driving screw rod corresponding to a blowtorch platform, and is characterized in that a screw rod protecting cover is arranged, a plurality of vent holes are formed in the screw rod protecting cover, nitrogen is introduced into the screw rod protecting cover, and a positive pressure cavity is formed in the screw rod protecting cover; and a temperature sensor and a pressure sensor for controlling the nitrogen inlet flow are arranged in the screw rod protective cover.
Further, the screw rod protective cover adopts a stainless steel cover.
Further, the blast lamp platform is U-shaped structure.
Further, the vent holes are directed to the OVD deposition chamber.
Further, the ventilation holes are uniformly distributed, and the diameter of the ventilation holes is 1-1.5cm.
A method for protecting a screw rod in an OVD deposition process by using the device comprises the following steps:
(1) before the deposition starts, nitrogen is introduced into the screw rod protective cover, and the screw rod is kept to be always subjected to purging and cooling of the nitrogen in the deposition process;
(2) in the deposition process, according to the temperature and pressure changes in the screw rod protecting cover, the flow of nitrogen is adjusted, so that the pressure in the screw rod protecting cover is always maintained to be higher than the positive pressure environment in the OVD deposition cavity.
Further, the pressure in the screw rod protecting cover is maintained at 5-10Pa.
Compared with the prior art, the invention has the following advantages:
the invention optimizes the levelness of the screw rod, and the outer diameter of the loose body is more uniform. The scrappage caused by the fluctuation of the wire diameter in the drawing process is reduced, and the drawing qualification rate of the optical fiber is improved. In addition, the risk of cracking of the preform during the deposition process is reduced. Through the optimization to the levelness of lead screw, the torch platform is at the more uniform velocity of the in-process of fore-and-aft movement, and loose body density distribution is more even, has reduced the fracture that leads to because of loose body density inequality and has scrapped.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and do not constitute an undue limitation on the invention. In the drawings:
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic view of a sealed cooling conveyor system according to an embodiment of the present invention;
FIG. 3 is a top view of a portion of a seal cooling conveyor system in accordance with an embodiment of the present invention;
FIG. 4 is a schematic view of a portion of a conveyor belt shaft according to an embodiment of the present invention;
fig. 5 is a schematic structural view of a connection portion between a conveyor belt and a torch platform according to an embodiment of the present invention.
Reference numerals illustrate:
1-a guide rail; 2-a torch platform; 3-a torch; 4-driving a screw rod; 5-a screw rod protecting cover; 6-ventilation holes; 7-a temperature sensor; 8-a pressure sensor; 9-a conveyor belt rotating shaft; 10-a transmission belt; 11-Teflon fixing plate; 12-screw motor; 13-a nut; 14-a guide rail seat; 15-a screw base; 16-connection point.
Detailed Description
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other.
In the description of the invention, it should be understood that the terms "center," "longitudinal," "transverse," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships that are based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the invention and simplify the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be configured and operate in a particular orientation, and therefore should not be construed as limiting the invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the creation of the present invention can be understood by those of ordinary skill in the art in a specific case.
The invention will be described in detail below with reference to the drawings in connection with embodiments.
The device for protecting the OVD transmission screw rod comprises a torch platform 2 which is slidably arranged on a guide rail 1, wherein the guide rail is arranged on a guide rail seat 14, and a plurality of torches 3 are arranged on the torch platform 2; a screw rod protecting cover 5 is arranged corresponding to a transmission screw rod 4 of the platform of the blast lamp 3, a plurality of vent holes 6 are arranged on the screw rod protecting cover 5, nitrogen is introduced into the screw rod protecting cover 5, and a positive pressure cavity is formed inside the screw rod protecting cover; a temperature sensor 7 and a pressure sensor 8 for controlling the nitrogen inlet flow are arranged in the screw rod protecting cover 5.
It should be noted that the nitrogen gas can be supplied by extending the corresponding pipeline into the screw rod protective cover for supplying air, the flow of the nitrogen gas is controlled by the valve on the pipeline, an actuator (such as an electric push rod) for adjusting the opening of the valve can be arranged on the valve, a controller electrically connected with the temperature sensor and the pressure sensor is connected to the actuator, the controller receives feedback signals of the temperature sensor and the pressure sensor, and the actuator is controlled to act so as to achieve the purpose of adjusting and controlling the opening of the valve.
Wherein, the lead screw protection cover 5 adopts a stainless steel cover, is firm and durable, and is rust-proof. In addition, the blast lamp platform is U type structure, makes things convenient for the structure to arrange. The interior of the blast lamp platform is provided with a plurality of process gas branch pipelines, and each process gas branch pipeline is connected with a main pipe of the process gas by adopting a hose.
Wherein the vent 6 is directed towards the OVD deposition chamber. In general, the ventilation holes 6 are uniformly distributed, the diameter of the ventilation holes is 1-1.5cm, and the ventilation holes are used as ventilation holes for cooling and blowing, so that air curtains blowing to one side of an OVD deposition cavity are formed, and the screw rod is isolated from a strong acid and high temperature environment during the deposition of the OVD through air sealing, so that the screw rod is effectively prevented from being corroded.
In an alternative embodiment, the device provided by the invention can be designed into a sealed cooling transmission system for protecting the precision of the screw rod, and in particular, the sealed cooling transmission system can comprise four conveyor belt rotating shafts 9, a conveyor belt 10, a Teflon fixing plate 11, an air seal baffle plate, a blast lamp platform and temperature and pressure sensors in a screw rod protecting cover. The pivot passes through the screw fixation on the lead screw protection cover, and the conveyer belt encircles the pivot setting that is located transmission lead screw homonymy, and the conveyer belt is connected in the bottom of blowtorch platform (the conveyer belt can be connected with blowtorch platform bottom through connecting pieces such as screw, in order to guarantee the reliability of connection, can set up a plurality of tie points 16, is fixed with a plurality of screw connection promptly), forms a inclosed space with the lead screw protection cover, can form a inclosed space can, specific transmission form and connection structure also can be according to actual need, the suitable change or improvement.
In order to ensure that the torch platform stably moves at a constant speed in the moving process and is used for a long time. The concentricity and levelness of the rotating shaft are required to be high. And materials with high rigidity and good wear resistance are required to be selected. The invention also designs a rotating shaft fixing and adjusting device. When the tightness of the conveyor belt and the screw rod protective cover is poor, the tightness of the rotating shaft in the X direction can be adjusted to improve the sealing effect. When the temperature in the sealing device exceeds 70 ℃, the temperature sensor feeds back to the system to timely adjust the N2 flow to ensure that the temperature in the sealing device is below 70 ℃, and when the pressure in the sealing device is less than 5Pa, the pressure sensor feeds back to the system to timely adjust the N2 gas flow to adjust the pressure in the sealing device to be between 5 and 10Pa.
The screw rod protection cover is made of stainless steel, is fixed at the bottom of the cavity through screws, and is provided with two overhanging baffles at the upper and lower parts respectively. The conveyor belt moves above the baffle plate, and the teflon cushion block is fixed above the baffle plate to form a running track of the conveyor belt.
The OVD deposition cavity, the screw rod protecting cover and the conveyor belt form a cavity structure. In the deposition process, N2 below the screw rod starts to be purged and cooled, the cavity structure forms a positive pressure environment, N2 can move from a gap of the conveyor belt guide rail to the deposition cavity, and the cavity structure of the screw rod is protected to be in a continuous positive pressure environment. The pressure in the cavity is controlled to be about-30 Pa to-40 Pa in the OVD deposition process.
Because the pressure difference exists between the cavity structure and the OVD deposition cavity, the internal environment of the cavity structure is effectively isolated from the external environment, and the screw rod is positioned in a sealed cavity isolated from the external strong acid and high temperature environment, so that the screw rod is prevented from being contacted with acid gas, and the screw rod is effectively protected from being corroded. The sealing cooling conveying system in the embodiment is matched with corresponding temperature and pressure sensors to effectively improve the uniformity of the apparent diameter of the OVD deposited loose body, thereby optimizing the density, the outer diameter fluctuation, the air line and other relevant parameters and performances of the loose body of the OVD preform and improving the deposition rate of the preform
A method for protecting a screw rod in an OVD deposition process by using the device comprises the following steps:
(1) before the deposition starts, nitrogen is introduced into the screw rod protective cover, and the screw rod is kept to be always subjected to purging and cooling of the nitrogen in the deposition process;
(2) in the deposition process, according to the temperature and pressure changes in the screw rod protecting cover, the flow of nitrogen is adjusted, so that the pressure in the screw rod protecting cover is always maintained to be higher than the positive pressure environment in the OVD deposition cavity.
Wherein, the pressure in the screw rod protecting cover is maintained at 5Pa to 10Pa.
The OVD deposition process by using the device is as follows:
after the appearance of the core rod is checked to be free of problems, rod hanging is started, and a torque wrench is used for fixing the chuck nut firmly. The surface of the core rod is wiped clean by clean cloth, the surface of the blast lamp is wiped clean, the blast lamp cover is installed and fixed, the cavity door is closed, and the deposition is started by igniting.
The screw motor drives the screw to rotate, the blast lamp platform moves back and forth along with the screw through the screw 13 (the screw is arranged on the screw), and CH 4 、O 2 Process gas and SiCl 4 From a torchAnd forming a preform loose body along with the continuous rotation of the core rod on the surface of the core rod. The exhaust valve at the top of the cavity is gradually opened to deposit SiO which cannot be deposited on the surface of the preform 2 Particles are pumped out of the deposition cavity, HCl gas and water vapor generated by the reaction are pumped out at the same time, and SiO 2 The particles are corrosive, HCl acid gas generated by deposition reaction is also corrosive, and SiO 2 Particles drop on the surface of the screw rod under the high-temperature acidic environment to influence the precision of the surface of the screw rod, so that the running speed of the torch platform is uneven in the running process of the screw rod, and the uniformity of the outer diameter of the preform rod is influenced.
After the deposition process is started, the screw rod starts to rotate under the drive of the screw rod motor 12 (one end of the screw rod is driven by the screw rod motor, and the other end of the screw rod is arranged on the screw rod base 15), the conveyor belt bypasses a rotating shaft positioned on the same side of the screw rod and is linked on the blast lamp platform through screws, and the blast lamp platform moves back and forth in the deposition cavity along with the rotation of the screw rod.
The screw rod protection covers are fixed at the bottom of the deposition cavity through screws, and a gap of 0.5-1 cm is reserved between every two Teflon fixing blocks positioned at the upper end of the screw rod protection covers, so that an operation guide rail of the conveyor belt is formed. A relatively sealed system is formed by a screw rod protecting cover and a conveyor belt, and the screw rod is protected from corrosive gases of HCl and SiO 2 Damage to the particles.
Along with the gradual rise of the cavity temperature of the deposition process, the temperature of the screw rod driving the blast lamp platform to move gradually rises under the influence of self heat generation and the cavity thermal environment. N below the screw rod 2 The flow of N2 is increased from the hole, the pressure of the system in the screw rod protection is ensured to be between 5 and 10pa, the pressure of the deposition cavity is about-30 pa under the adjustment of the air draft system, and corrosive gas HCl and SiO can be effectively prevented under the action of the pressure difference between the deposition cavity and the screw rod protection cover 2 Particles enter the screw rod protecting device.
The pressure sensor positioned below the screw rod can feed back the real-time pressure in the screw rod protecting device in real time, and when the pressure in the protecting device is less than 5Pa, the system automatically increases N 2 Hole opening and closing degree, pressure in the regulating and protecting device. When the pressure in the protection device is more than 10Pa, the system automatically reduces N 2 And the opening and closing degree of the hole is used for adjusting the pressure in the protection device.
For example, when the temperature in the protection device is higher than 70 ℃, the temperature sensor positioned below the screw rod is fed back to the system, and the system automatically increases N 2 Hole opening and closing degree, increase N 2 Flow accelerates the cooling of the screw rod temperature and prevents the screw rod from deforming due to overhigh temperature. And when the temperature is lower than 60 ℃, the system automatically reduces N 2 The flow rate forms a device with controllable working temperature and working environment pressure of the screw rod. Effectively reduce the corrosive gases of HCl and SiO 2 The particles damage the surface precision of the screw rod, so that the slight deformation of the screw rod caused by overhigh working temperature of the screw rod is reduced, the uniformity of the apparent diameter of the loose body of the preform rod is further optimized, and the wiredrawing qualification rate is improved.
The protective cover positioned at the outer side of the screw rod can not only avoid SiO 2 The particles damage the precision of the screw rod and N is sprayed out of the vent hole below the screw rod 2 The working temperature of the screw rod can be effectively reduced by the gas, and the precision of the screw rod is ensured. The cooperation of the pressure sensor and the temperature sensor can effectively ensure the working temperature of the screw rod and avoid SiO (silicon dioxide) 2 Damage to the surface of the screw rod caused by particles and corrosive gas.
After the deposition process is finished, the cavity of the deposition equipment begins to be cooled, and N is positioned below the screw rod 2 The gas continuously cools the screw rod, and meanwhile, the pressure in the screw rod protective cover is higher than the pressure of the cavity, so that the entry of HCl corrosive gas is prevented. After cooling, taking out the loose preform from the cavity by using a mechanical arm, performing sanitary cleaning, and positioning N below the screw rod 2 The continuous ejection of gas ensures the pressure in the screw rod protecting device to be 5-10pa, and prevents loose dust in the cavity from entering the screw rod protecting device.
The invention optimizes the levelness of the screw rod, and the outer diameter of the loose body is more uniform. The scrappage caused by the fluctuation of the wire diameter in the drawing process is reduced, and the drawing qualification rate of the optical fiber is improved. In addition, the risk of cracking of the preform during the deposition process is reduced. Through the optimization to the levelness of lead screw, the torch platform is at the more uniform velocity of the in-process of fore-and-aft movement, and loose body density distribution is more even, has reduced the fracture that leads to because of loose body density inequality and has scrapped.
Meanwhile, the deposition rate and the deposition efficiency of the prefabricated rod are also effectively improved. Through optimizing the level and deformation prevention of the screw rod, the preform rod is always stabilized under the flame of the blast lamp in the deposition process, so that the deposition efficiency and the deposition efficiency of the preform rod are improved. And the output of the equipment is improved, and the standby time of the equipment is shortened. Through the sealing protection of the screw rod, the SiO can be effectively reduced 2 The lead screw is damaged by corrosive particles such as HCl, so that the maintenance period and the replacement period of equipment are prolonged, and the standby caused by the maintenance and the replacement of the lead screw of the equipment is shortened.
The above embodiments are merely preferred embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalent substitutions, improvements, etc. within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (6)

1. A device for protecting an OVD drive screw, characterized by: the device comprises a blast lamp platform which is slidably arranged on a guide rail, wherein a plurality of blast lamps are arranged on the blast lamp platform; the device comprises a driving screw rod corresponding to a blowtorch platform, and is characterized in that a screw rod protecting cover is arranged, a plurality of vent holes are formed in the screw rod protecting cover, nitrogen is introduced into the screw rod protecting cover, and a positive pressure cavity is formed in the screw rod protecting cover; a temperature sensor and a pressure sensor for controlling the nitrogen inlet flow are arranged in the screw rod protective cover; the sealing cooling transmission system comprises a rotating shaft, a transmission belt, teflon fixing plates and an air seal baffle plate, wherein the rotating shaft is fixed at the lower end of the screw rod protecting cover through screws, and a gap between every two Teflon fixing plates positioned at the upper end of the screw rod protecting cover forms an operation guide rail of the transmission belt; the transmission belt is arranged around the rotating shaft positioned on the same side of the transmission screw rod, and is connected to the bottom of the torch platform, so that a closed space is formed between the transmission belt and the screw rod protective cover; the air vent points to the OVD deposition cavity, a pipeline stretches into the interior of the screw rod protective cover to supply air, a valve used for controlling nitrogen flow is arranged on the pipeline, an actuator used for adjusting the opening of the valve is arranged on the valve, a controller electrically connected with a temperature sensor and a pressure sensor is connected to the actuator, and the controller receives feedback signals of the temperature sensor and the pressure sensor and controls the actuator to act so as to achieve the purpose of adjusting and controlling the opening of the valve; the air flow blown out from each vent hole forms an air curtain blowing to one side of the OVD deposition cavity, and the screw rod is isolated from the strong acid and high temperature environment during the OVD deposition by the air seal formed at the vent hole so as to prevent the screw rod from being corroded and reduce the working temperature of the screw rod in real time.
2. A device for protecting an OVD driving screw as defined in claim 1, wherein: the screw rod protective cover adopts a stainless steel cover.
3. A device for protecting an OVD driving screw as defined in claim 1, wherein: the blast lamp platform is U-shaped structure.
4. A device for protecting an OVD driving screw as defined in claim 1, wherein: the ventilation holes are uniformly distributed, and the diameter of the ventilation holes is 1-1.5cm.
5. A method of protecting a lead screw during OVD deposition using the apparatus of claim 1, comprising the steps of:
(1) before the deposition starts, nitrogen is introduced into the screw rod protective cover, and the screw rod is kept to be always subjected to purging and cooling of the nitrogen in the deposition process;
(2) in the deposition process, according to the temperature and pressure changes in the screw rod protecting cover, the flow of nitrogen is adjusted, so that the pressure in the screw rod protecting cover is always maintained to be higher than the positive pressure environment in the OVD deposition cavity.
6. A method of protecting a lead screw during OVD deposition according to claim 5, wherein: the pressure in the screw rod protecting cover is maintained at 5-10Pa.
CN201711467010.6A 2017-12-28 2017-12-28 Device and method for protecting OVD transmission screw rod Active CN108147656B (en)

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Application Number Priority Date Filing Date Title
CN201711467010.6A CN108147656B (en) 2017-12-28 2017-12-28 Device and method for protecting OVD transmission screw rod

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CN108147656B true CN108147656B (en) 2023-11-24

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7343685B2 (en) * 2020-02-28 2023-09-12 京セラ株式会社 Components for optical glass manufacturing equipment

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103755135A (en) * 2013-12-25 2014-04-30 中天科技精密材料有限公司 Efficient preparation method of external coating layer of optical fiber preform and equipment thereof
CN105271701A (en) * 2015-11-16 2016-01-27 江苏通鼎光棒有限公司 Device and method for protecting blow lamp guide rail in OVD sedimentation process
CN105313191A (en) * 2015-11-10 2016-02-10 东莞市南兴家具装备制造股份有限公司 Cantilever type Y-axis driving mechanism of wood combined machining center
CN207987042U (en) * 2017-12-28 2018-10-19 江苏通鼎光棒有限公司 A kind of device of protection OVD drive lead screws

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103755135A (en) * 2013-12-25 2014-04-30 中天科技精密材料有限公司 Efficient preparation method of external coating layer of optical fiber preform and equipment thereof
CN105313191A (en) * 2015-11-10 2016-02-10 东莞市南兴家具装备制造股份有限公司 Cantilever type Y-axis driving mechanism of wood combined machining center
CN105271701A (en) * 2015-11-16 2016-01-27 江苏通鼎光棒有限公司 Device and method for protecting blow lamp guide rail in OVD sedimentation process
CN207987042U (en) * 2017-12-28 2018-10-19 江苏通鼎光棒有限公司 A kind of device of protection OVD drive lead screws

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