A kind of high purity quartz process units
Technical field
The present invention relates to a kind of process units of high purity quartz, the dress of high purity quartz is generated more particularly, to a kind of CVD
Put.
Background technology
The industrial production technology of quartz glass mainly include electric smelting technique, gas sweetening process, synthetic quartz glass manufacturing process,
High frequency plasma flame melting technology.Wherein synthetic quartz glass technology includes chemical vapor deposition (CVD) technique, gas phase axle again
To deposition (VAD) technique, plasma chemical vapor deposition (PCVD) etc..Quartzy glass of the CVD techniques in production large-diameter high-purity
There is greater advantage compared with other method in terms of glass, the quartz glass production of current large-diameter high-purity is general to be given birth to using CVD techniques
Production.
The quartz glass apparatus of CVD technique productions large-diameter high-purities is mainly made up of two large divisions, and a part is to provide
The reacting furnace of pyroreaction environment a, part is fixation, support, rotation, the tower body equipment of mobile product, and burner hearth is installed on tower body
Its upper side point.Large scale high purity quartz product because diameter, length, weight are all than larger, therefore production be usually on toward
Lower to carry out, i.e., blowtorch is arranged on upper furnace, and product is constantly deposited, constantly elongated, moves down, to make certain shape,
Sometimes left and right or movable is also carried out, product needs constantly to be rotated simultaneously in growth, these movements, rotation are all
Completed by accessories such as motor, guide rails, certainly because product is located at eminence, in addition it is also necessary to the device such as support, fix.These are matched somebody with somebody
Part, device etc. are referred to as tower body equipment.
Existing CVD production high purity quartz reacting furnace-e/or all uses single layer structure, and insulating brick is directly exposed to outside, held very much
Easy laying dust, does not allow easy to clean yet.Dust is easy to drop and entered in the product in burner hearth when therefore producing, and operating personnel need frequency
Numerous carry out inspection, chooses except the dust impurities in product in time, it is impossible to chooses the particle removed and directly results in product rejection, while insulating brick
Material is directly exposed to indoor not clean and tidy enough, attractive in appearance.Furnace high-temperature heat is directly radiated by blowtorch gap enters workshop condition
It is interior, indoor temperature can be caused too high, increase cooling cost.Using single layer structure, while to keep the air draft in furnace high-temperature, stove
Amount requires to keep the hydrogen chloride emission and silica dust that production is produced in seldom amount, such reacting furnace to be easy to spill into
In workshop, larger harm is produced to personal safety and company property.
The tower body equipment of CVD technique productions is all open type, does not form sealed nacelle and gas flowfield, and tower body etc. is filled
Residing bad environments are put, high temperature and perishable gas all have presence, and equipment easily produces exception, while dust etc. compares in environment
It is more, have influence on product quality.CVD technique tower body equipment traditional at present mainly has following defect:(1) by burner hearth temperature in tower body
Radiation effect is spent, temperature is higher, each device and accessory short life, exception easily occur, while fluctuation of service, influences product
Quality;(2) influenceed, each device and accessory easily corrode, short life, easily occurred by the hydrogen chloride tail gas that burner hearth overflows in tower body
It is abnormal, while fluctuation of service, influences product quality;(3) it is open environment, the particle such as dust in environment is easily accessible tower
In body, and then enter in the burner hearth room of product reaction, reduce product quality.
The content of the invention
The high purity quartz process units of dust interference and tail gas pollution is reduced it is an object of the invention to provide a kind of.
The technical scheme that the present invention is provided is:A kind of high purity quartz process units:Including for providing pyroreaction environment
Reacting furnace and the tower body that is arranged on below reacting furnace:
The reacting furnace is cylinder, the stove being made from inside to outside by burner hearth, thermal insulation layer, heat-insulation layer and metal material
Cover composition, the bonnet is attached to stove seat, the bell and furnace roof of heat-insulation layer upper surface of heat-insulation layer outer surface comprising bag, described
Furnace roof is arranged at the top of the reacting furnace, and furnace roof chamber is formed between the bell;The burner hearth is provided with least one burner hearth
Exhaust outlet, the burner hearth exhaust outlet passes through thermal insulation layer, heat-insulation layer and stove seat;The furnace roof is vented provided with furnace roof air inlet, furnace roof
Mouthful;The furnace roof vent position is equal to or higher than furnace roof air inlet position, and positioned at the both sides of furnace roof, the furnace roof air inlet
Inside it is provided with air filter;The tip position of the thermal insulation layer, heat-insulation layer and bell offers UNICOM's burner hearth and furnace roof chamber
Through hole, it is material inlet to be provided with the through hole at the top of blowtorch, the blowtorch, and bottom is material outlet;The burner hearth exhaust
Mouth and the furnace roof exhaust outlet are connected respectively to emission-control equipment;
The tower body is arranged on the bottom of the burner hearth;Including being vertically arranged tower body support on the ground, tower is arranged on
The guide rail of body support frame side, is arranged on the pedestal on guide rail, and the pedestal can be in the presence of motor, along above and below the guide rail
It is mobile;The pedestal is provided with product seat, and the product seat can be moved and rotate in the presence of motor on pedestal.
Device interior center is located at using above-mentioned technical proposal burner hearth, is 800 DEG C -2000 DEG C of high temperature cavity, is high-purity
The reactor of quartz production, environment is provided for production reaction.Burner hearth is built into by insulating brick forms thermal insulation layer, thermal insulation layer make burner hearth with
External world's isolation, keeps burner hearth hot environment.Heat-insulation layer is installed close to insulating brick outer layer, heat-insulation layer is inner layer heat-insulation brick and outer layer stove
Cover buffering area, plays buffering heat-blocking action.Bonnet is arranged on outermost, is metal material, and wherein stove seat is installed on surrounding, bell
It is installed at the top of heat-insulation layer, stove seat and bell are attached by flange, fixed.Top cover is installed on whole body of heater top, makes
An independent cavity is formed between bell.Air admission hole, steam vent, observation window etc. are installed, wherein air admission hole is pacified on top cover
Equipped with filter, the air for entering cavity is filtered, keeps internal clean and tidy, steam vent connection enterprise exhaust gas processing device,
To being evacuated in bonnet cavity, bonnet cavity is set to keep to be formed in negative pressure, such bonnet cavity from air admission hole to exhaust
The wind field in hole.Burner hearth bottom is also provided with steam vent simultaneously.It is gas, raw material to be installed at the positive top of furnace roof at the top of blowtorch, blowtorch
Import, bottom is outlet, and raw material and gas enter after blowtorch regulation and control shunting to be reacted in burner hearth, generation high purity quartz production
Product.
Further, the tower body also includes upper pyller, lower pyller, the pyller company for being arranged on the guide rail side of tower body support
Fitting, forms upper tower chamber between the upper pyller, pyller connector and tower body support, the lower pyller, pyller connector with
And lower tower chamber is formed between tower body support;The tower body support is provided with the upper tower chamber air inlet towards upper tower chamber, the pyller
Connector is provided with the lower tower chamber air inlet towards lower tower chamber, and the upper pyller is set provided with upper pyller exhaust outlet, the lower pyller
There is a lower pyller exhaust outlet, the upper pyller exhaust outlet is connected to emission-control equipment, the lower pyller exhaust outlet is directly and air
It is connected, the tower body support, upper pyller, the connecting portion of lower pyller and pyller connector each other are provided with seal, institute
Tower chamber air inlet and lower tower chamber air inlet are stated by blower fan air feed, malleation is provided to the upper tower chamber and lower tower chamber.
Further, the upper pyller exhaust outlet is arranged on the epimere of pyller, and the lower pyller exhaust outlet is arranged on down
The hypomere of pyller.
Further, pyller connector is made up of two-ply up and down, forms pyller connector cavity, wherein pyller connector
Lower plate is evenly distributed with some apertures, and the lower tower chamber air inlet is connected with pyller connector cavity.
Further, the furnace roof is provided with furnace roof observation window, and the upper pyller is provided with upper pyller observation window.
Assembling is provided with powered air-purifying device in tower body bracket outer, blower fan air intake part, and powered air-purifying device being capable of mistake
0.1 μm and above particle are filtered, clean air is then formed after filtering, pressure fan air outlet passes through pipeline and tower body support front upper point
It is connected with pyller connector.So pressure fan is delivered to tower body frame upper point and pyller connection by environment exhausting after filtering
In part.Pyller connector fresh air inlet is communicated with lower tower chamber, and pyller connector bottom is provided with the connector exhaust vent of lower tower chamber, clean
Wind enters in lower tower chamber after being come out from pyller connector, and then flow down, is finally emitted into from two exhaust outlets of lower pyller
In environment, the wind field being formed in tower chamber from top to down is so descended, the lower tower chamber of sealing gland is formd, can effectively prevent outside
Air enters in cavity, keeps cavity cleanliness factor, while the heat that burner hearth and product are radiated can persistently be taken away, keeps cavity
It is interior to be in low temperature environment, protect accessory.
Another road clean air comes out from tower body support top half, enters in tower chamber, because air intake device is arranged at top,
Wherein majority up flows, and is then emitted into by the waste discharge hole opened at the top of upper pyller in exhaust gas processing device, so on
Tower chamber is to form wind field from bottom to top.At the top of device, because temperature is high in burner hearth, upper tower chamber is communicated with burner hearth, is had big
The heat radiation of amount, simultaneously because technological requirement negative-pressure design obtains smaller in burner hearth, has part from burner hearth enters upper tower chamber
Hydrogen chloride tail gas enter in tower chamber.So because there is wind field from bottom to top in upper tower chamber, when radiation of burner hearth comes out
Heat and overflow come hydrogen chloride tail gas enter cavity at the top of when can be flowed immediately with wind field, eventually through waste discharge hole enter
Into tail gas treatment device, the other positions that will not be diffused in cavity.Low temperature that so can be in holding chamber body and cleaning
Environment, protection equipment and accessory, ensure that equipment is normally run, the heat and tail gas emitted enters vent gas treatment system of plant area
Handled in system it is qualified after be discharged into again in air, environmental protection.Another small part clean gas is then entered by pyller connector
In lower tower chamber, the clean air come out with pyller connector is collectively forming lower tower chamber wind field.
Lower tower intracavitary is blown, thus keeps malleation, higher than air pressure outside fire door, it is ensured that the outer gas of fire door does not enter cavity
In.Upper tower chamber middle and lower part air-supply, top air draught makes middle and lower part keep malleation, and top keeps negative pressure, so ensures containment portion gas
Body does not enter in cavity, while the hydrogen chloride gas of top burner hearth spilling and the heat of radiation can be discharged in time.
Brief description of the drawings
Fig. 1 is high purity quartz generating means schematic diagram of the present invention;
Fig. 2 is reacting furnace structural representation of the present invention
Fig. 3 is tower body external side view of the present invention;
Fig. 4 is the upward view of Fig. 3 A-A parts;
Fig. 5 is axonometric drawing when tower body pedestal is located at bottom;
Fig. 6 is axonometric drawing when tower body pedestal is located at top.
Fig. 7 is wind field schematic diagram inside tower body;
In figure:1- reacting furnaces, 2- tower bodies, 101- burner hearths, 102- thermal insulation layers, 103- heat-insulation layers, 104- stoves seat, 105- stoves
Lid, 106- furnace roofs, 107- furnace roofs chamber, 108- burner hearths exhaust outlet, 109- furnace roofs air inlet, 110- furnace roofs exhaust outlet, 111- furnace roofs
Observation window, 112- blowtorch, 201- tower bodies support, 202- guide rails, 203- pedestals, 204- motors, 205- product seats, the upper towers of 206-
Door, tower under tower chamber, the upper tower chamber air inlets of 211-, 212- under pyller, 208- pyllers connector, the upper tower chambers of 209-, 210- under 207-
Pyller exhaust outlet under the upper pyller exhaust outlet of chamber air inlet, 213-, 214-, 215- pyller connectors cavity, 216- apertures, on 217-
Pyller observation window, 218- blower fans.
Embodiment
1-7 further describes the present invention below in conjunction with the accompanying drawings:
As shown in figure 1, high purity quartz process units of the present invention includes reacting furnace 1 and tower body 2, wherein reaction furnace structure is as schemed
Shown in 2:Reacting furnace 1 is cylinder, is made from inside to outside by burner hearth 101, thermal insulation layer 102, heat-insulation layer 103 and metal material
Bonnet composition, bonnet comprising bag be attached to the outer surface of heat-insulation layer 103 stove seat 104, the bell 105 of the upper surface of heat-insulation layer 103
And furnace roof 106, furnace roof 106 is arranged at the top of reacting furnace 1, and furnace roof chamber 107 is formed between bell 105;Burner hearth 101 is set
There is at least one burner hearth exhaust outlet 108, burner hearth exhaust outlet 108 passes through thermal insulation layer 102, heat-insulation layer 103 and stove seat 104;Furnace roof 106
Provided with furnace roof air inlet 109, furnace roof exhaust outlet 110;The position of furnace roof exhaust outlet 110 is equal to or higher than the position of furnace roof air inlet 109,
And it is provided with air filter in the both sides of furnace roof 106, furnace roof air inlet 109;Thermal insulation layer 102, heat-insulation layer 103 and stove
The top center of lid 105, which is offered, is provided with blowtorch 112, blowtorch in the through hole of connection burner hearth 101 and furnace roof chamber 107, through hole
112 tops are material inlet, and bottom is material outlet;Burner hearth exhaust outlet 108 and furnace roof exhaust outlet 110 are connected respectively to waste gas
Processing unit;Furnace roof 106 is provided with furnace roof observation window 111.
As shown in fig. 3 to 7:Tower body 2 is arranged on the bottom of burner hearth 101;Including being vertically arranged tower body support on the ground
201, the guide rail 202 of the side of tower body support 201 is arranged on, the pedestal 203 on guide rail 202 is arranged on, pedestal 203 can be in motor
In the presence of 204, moved up and down along the guide rail 202;Pedestal 203 is provided with product seat 205, and product seat 205 can be in motor
In the presence of 204, move and rotate on pedestal 203.
The upper pyller 206, lower pyller 207, pyller that tower body 2 also includes being arranged on the side of guide rail 202 of tower body support 201 connect
Fitting 208, forms upper tower chamber 209, lower pyller 207, tower between upper pyller 206, pyller connector 208 and tower body support 201
Lower tower chamber 210 is formed between door connector 208 and tower body support 201;Tower body support 201 is provided with towards upper tower chamber 209
Upper tower chamber air inlet 211, pyller connector is provided with the lower tower chamber air inlet 212 towards lower tower chamber 210, and upper pyller 206 is provided with
Upper pyller exhaust outlet 213, lower pyller 207 are provided with lower pyller exhaust outlet 214, and upper pyller exhaust outlet 213 is connected to exhaust-gas treatment dress
Put, lower pyller exhaust outlet 214 is directly connected with air;Tower body support 201, upper pyller 206, lower pyller 207 and pyller connector
208 connecting portion each other is provided with seal, and upper tower chamber air inlet 211 and lower tower chamber air inlet 212 are by blower fan 218
Air feed, malleation is provided to upper tower chamber 209 and lower tower chamber 210.Wherein, upper pyller exhaust outlet 213 is arranged on the upper of pyller 206
Section, lower pyller exhaust outlet 214 is arranged on the hypomere of lower pyller 207.Pyller connector 208 is made up of two-ply up and down, forms tower
Door connector cavity 215, wherein pyller connector lower plate is evenly distributed with some apertures 216, lower tower chamber air inlet 212 and pyller
Connector cavity 215 is connected.Upper pyller 206 is provided with upper pyller observation window 217.
Tower body is installed on the bottom (800-2000 DEG C inside burner hearth) of high purity quartz production burner hearth, when product just starts production
When, as shown in fig. 6, pedestal 203 is located at the top of tower body, product seat 205 is goed deep into burner hearth 101.Product is constantly deposited after production
In on product seat 205, pedestal 203 starts persistently to move down after product reaches intended diameter requirement, and such product constantly increases
It is long, after product reaches design length requirement, then stop deposition in burner hearth, then pedestal 203 is moved to bottommost, take out production
Product, then product deposition production is completed.
Guide rail, screw mandrel, pedestal 203 be also all mounted in tower body support just before, be fixed on tower body support, while
All it is mounted in lower pyller and upper pyller cavity.Wherein pedestal 203 is controlled by motor 204, can be by screw mandrel along guide rail
Moved up and down between lower pyller cavity and upper pyller cabin cavity.Product seat 205 is partly installed on pedestal 203, product seat 205 it is upper
Face then directly carries out production, and the rotation and movement of product are all driven by product seat 205.Pacify 203 times parts of pedestal
Dress rotation and mobile motor 204.
The technical concepts and features of above-mentioned case study on implementation only to illustrate the invention, its object is to allow be familiar with technique
Personage can understand present disclosure and implement according to this, and it is not intended to limit the scope of the present invention.It is all according to this hair
The equivalent change or modification that bright Spirit Essence is made, should all be included within the scope of the present invention.