CN206591033U - A kind of high purity quartz process units - Google Patents

A kind of high purity quartz process units Download PDF

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Publication number
CN206591033U
CN206591033U CN201720273989.2U CN201720273989U CN206591033U CN 206591033 U CN206591033 U CN 206591033U CN 201720273989 U CN201720273989 U CN 201720273989U CN 206591033 U CN206591033 U CN 206591033U
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CN
China
Prior art keywords
pyller
furnace roof
exhaust outlet
burner hearth
tower body
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201720273989.2U
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Chinese (zh)
Inventor
单兰英
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Hangzhou Yongtong Smart Manufacturing Technology Co ltd
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Wuxi Fu Ai Technology Co Ltd
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Priority to CN201720273989.2U priority Critical patent/CN206591033U/en
Application granted granted Critical
Publication of CN206591033U publication Critical patent/CN206591033U/en
Withdrawn - After Issue legal-status Critical Current
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00Other methods of shaping glass
    • C03B19/14Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1407Deposition reactors therefor

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)

Abstract

The utility model provides a kind of high purity quartz process units, including reacting furnace and tower body:The bonnet being made from inside to outside by burner hearth, thermal insulation layer, heat-insulation layer and metal material is constituted, and burner hearth is provided with least one burner hearth exhaust outlet, and the burner hearth exhaust outlet passes through thermal insulation layer, heat-insulation layer and stove seat;Furnace roof is provided with furnace roof air inlet, furnace roof exhaust outlet;The furnace roof vent position is equal to or higher than furnace roof air inlet position, and positioned at the both sides of furnace roof;Burner hearth exhaust outlet and the furnace roof exhaust outlet are connected respectively to emission-control equipment;Tower body is arranged on the bottom of the burner hearth;Including being vertically arranged tower body support on the ground, the guide rail of tower body support side is arranged on, the pedestal on guide rail is arranged on, pedestal can be moved up and down in the presence of motor along the guide rail;Pedestal is provided with product seat, and product seat can move and rotate in the presence of motor on pedestal, and process units of the present utility model can be effectively prevented from the pollution in the external world and the safe handling of waste gas in production process.

Description

A kind of high purity quartz process units
Technical field
The present invention relates to a kind of process units of high purity quartz, the dress of high purity quartz is generated more particularly, to a kind of CVD Put.
Background technology
The industrial production technology of quartz glass mainly include electric smelting technique, gas sweetening process, synthetic quartz glass manufacturing process, High frequency plasma flame melting technology.Wherein synthetic quartz glass technology includes chemical vapor deposition (CVD) technique, gas phase axle again To deposition (VAD) technique, plasma chemical vapor deposition (PCVD) etc..Quartzy glass of the CVD techniques in production large-diameter high-purity There is greater advantage compared with other method in terms of glass, the quartz glass production of current large-diameter high-purity is general to be given birth to using CVD techniques Production.
The quartz glass apparatus of CVD technique productions large-diameter high-purities is mainly made up of two large divisions, and a part is to provide The reacting furnace of pyroreaction environment a, part is fixation, support, rotation, the tower body equipment of mobile product, and burner hearth is installed on tower body Its upper side point.Large scale high purity quartz product because diameter, length, weight are all than larger, therefore production be usually on toward Lower to carry out, i.e., blowtorch is arranged on upper furnace, and product is constantly deposited, constantly elongated, moves down, to make certain shape, Sometimes left and right or movable is also carried out, product needs constantly to be rotated simultaneously in growth, these movements, rotation are all Completed by accessories such as motor, guide rails, certainly because product is located at eminence, in addition it is also necessary to the device such as support, fix.These are matched somebody with somebody Part, device etc. are referred to as tower body equipment.
Existing CVD production high purity quartz reacting furnace-e/or all uses single layer structure, and insulating brick is directly exposed to outside, held very much Easy laying dust, does not allow easy to clean yet.Dust is easy to drop and entered in the product in burner hearth when therefore producing, and operating personnel need frequency Numerous carry out inspection, chooses except the dust impurities in product in time, it is impossible to chooses the particle removed and directly results in product rejection, while insulating brick Material is directly exposed to indoor not clean and tidy enough, attractive in appearance.Furnace high-temperature heat is directly radiated by blowtorch gap enters workshop condition It is interior, indoor temperature can be caused too high, increase cooling cost.Using single layer structure, while to keep the air draft in furnace high-temperature, stove Amount requires to keep the hydrogen chloride emission and silica dust that production is produced in seldom amount, such reacting furnace to be easy to spill into In workshop, larger harm is produced to personal safety and company property.
The tower body equipment of CVD technique productions is all open type, does not form sealed nacelle and gas flowfield, and tower body etc. is filled Residing bad environments are put, high temperature and perishable gas all have presence, and equipment easily produces exception, while dust etc. compares in environment It is more, have influence on product quality.CVD technique tower body equipment traditional at present mainly has following defect:(1) by burner hearth temperature in tower body Radiation effect is spent, temperature is higher, each device and accessory short life, exception easily occur, while fluctuation of service, influences product Quality;(2) influenceed, each device and accessory easily corrode, short life, easily occurred by the hydrogen chloride tail gas that burner hearth overflows in tower body It is abnormal, while fluctuation of service, influences product quality;(3) it is open environment, the particle such as dust in environment is easily accessible tower In body, and then enter in the burner hearth room of product reaction, reduce product quality.
The content of the invention
The high purity quartz process units of dust interference and tail gas pollution is reduced it is an object of the invention to provide a kind of.
The technical scheme that the present invention is provided is:A kind of high purity quartz process units:Including for providing pyroreaction environment Reacting furnace and the tower body that is arranged on below reacting furnace:
The reacting furnace is cylinder, the stove being made from inside to outside by burner hearth, thermal insulation layer, heat-insulation layer and metal material Cover composition, the bonnet is attached to stove seat, the bell and furnace roof of heat-insulation layer upper surface of heat-insulation layer outer surface comprising bag, described Furnace roof is arranged at the top of the reacting furnace, and furnace roof chamber is formed between the bell;The burner hearth is provided with least one burner hearth Exhaust outlet, the burner hearth exhaust outlet passes through thermal insulation layer, heat-insulation layer and stove seat;The furnace roof is vented provided with furnace roof air inlet, furnace roof Mouthful;The furnace roof vent position is equal to or higher than furnace roof air inlet position, and positioned at the both sides of furnace roof, the furnace roof air inlet Inside it is provided with air filter;The tip position of the thermal insulation layer, heat-insulation layer and bell offers UNICOM's burner hearth and furnace roof chamber Through hole, it is material inlet to be provided with the through hole at the top of blowtorch, the blowtorch, and bottom is material outlet;The burner hearth exhaust Mouth and the furnace roof exhaust outlet are connected respectively to emission-control equipment;
The tower body is arranged on the bottom of the burner hearth;Including being vertically arranged tower body support on the ground, tower is arranged on The guide rail of body support frame side, is arranged on the pedestal on guide rail, and the pedestal can be in the presence of motor, along above and below the guide rail It is mobile;The pedestal is provided with product seat, and the product seat can be moved and rotate in the presence of motor on pedestal.
Device interior center is located at using above-mentioned technical proposal burner hearth, is 800 DEG C -2000 DEG C of high temperature cavity, is high-purity The reactor of quartz production, environment is provided for production reaction.Burner hearth is built into by insulating brick forms thermal insulation layer, thermal insulation layer make burner hearth with External world's isolation, keeps burner hearth hot environment.Heat-insulation layer is installed close to insulating brick outer layer, heat-insulation layer is inner layer heat-insulation brick and outer layer stove Cover buffering area, plays buffering heat-blocking action.Bonnet is arranged on outermost, is metal material, and wherein stove seat is installed on surrounding, bell It is installed at the top of heat-insulation layer, stove seat and bell are attached by flange, fixed.Top cover is installed on whole body of heater top, makes An independent cavity is formed between bell.Air admission hole, steam vent, observation window etc. are installed, wherein air admission hole is pacified on top cover Equipped with filter, the air for entering cavity is filtered, keeps internal clean and tidy, steam vent connection enterprise exhaust gas processing device, To being evacuated in bonnet cavity, bonnet cavity is set to keep to be formed in negative pressure, such bonnet cavity from air admission hole to exhaust The wind field in hole.Burner hearth bottom is also provided with steam vent simultaneously.It is gas, raw material to be installed at the positive top of furnace roof at the top of blowtorch, blowtorch Import, bottom is outlet, and raw material and gas enter after blowtorch regulation and control shunting to be reacted in burner hearth, generation high purity quartz production Product.
Further, the tower body also includes upper pyller, lower pyller, the pyller company for being arranged on the guide rail side of tower body support Fitting, forms upper tower chamber between the upper pyller, pyller connector and tower body support, the lower pyller, pyller connector with And lower tower chamber is formed between tower body support;The tower body support is provided with the upper tower chamber air inlet towards upper tower chamber, the pyller Connector is provided with the lower tower chamber air inlet towards lower tower chamber, and the upper pyller is set provided with upper pyller exhaust outlet, the lower pyller There is a lower pyller exhaust outlet, the upper pyller exhaust outlet is connected to emission-control equipment, the lower pyller exhaust outlet is directly and air It is connected, the tower body support, upper pyller, the connecting portion of lower pyller and pyller connector each other are provided with seal, institute Tower chamber air inlet and lower tower chamber air inlet are stated by blower fan air feed, malleation is provided to the upper tower chamber and lower tower chamber.
Further, the upper pyller exhaust outlet is arranged on the epimere of pyller, and the lower pyller exhaust outlet is arranged on down The hypomere of pyller.
Further, pyller connector is made up of two-ply up and down, forms pyller connector cavity, wherein pyller connector Lower plate is evenly distributed with some apertures, and the lower tower chamber air inlet is connected with pyller connector cavity.
Further, the furnace roof is provided with furnace roof observation window, and the upper pyller is provided with upper pyller observation window.
Assembling is provided with powered air-purifying device in tower body bracket outer, blower fan air intake part, and powered air-purifying device being capable of mistake 0.1 μm and above particle are filtered, clean air is then formed after filtering, pressure fan air outlet passes through pipeline and tower body support front upper point It is connected with pyller connector.So pressure fan is delivered to tower body frame upper point and pyller connection by environment exhausting after filtering In part.Pyller connector fresh air inlet is communicated with lower tower chamber, and pyller connector bottom is provided with the connector exhaust vent of lower tower chamber, clean Wind enters in lower tower chamber after being come out from pyller connector, and then flow down, is finally emitted into from two exhaust outlets of lower pyller In environment, the wind field being formed in tower chamber from top to down is so descended, the lower tower chamber of sealing gland is formd, can effectively prevent outside Air enters in cavity, keeps cavity cleanliness factor, while the heat that burner hearth and product are radiated can persistently be taken away, keeps cavity It is interior to be in low temperature environment, protect accessory.
Another road clean air comes out from tower body support top half, enters in tower chamber, because air intake device is arranged at top, Wherein majority up flows, and is then emitted into by the waste discharge hole opened at the top of upper pyller in exhaust gas processing device, so on Tower chamber is to form wind field from bottom to top.At the top of device, because temperature is high in burner hearth, upper tower chamber is communicated with burner hearth, is had big The heat radiation of amount, simultaneously because technological requirement negative-pressure design obtains smaller in burner hearth, has part from burner hearth enters upper tower chamber Hydrogen chloride tail gas enter in tower chamber.So because there is wind field from bottom to top in upper tower chamber, when radiation of burner hearth comes out Heat and overflow come hydrogen chloride tail gas enter cavity at the top of when can be flowed immediately with wind field, eventually through waste discharge hole enter Into tail gas treatment device, the other positions that will not be diffused in cavity.Low temperature that so can be in holding chamber body and cleaning Environment, protection equipment and accessory, ensure that equipment is normally run, the heat and tail gas emitted enters vent gas treatment system of plant area Handled in system it is qualified after be discharged into again in air, environmental protection.Another small part clean gas is then entered by pyller connector In lower tower chamber, the clean air come out with pyller connector is collectively forming lower tower chamber wind field.
Lower tower intracavitary is blown, thus keeps malleation, higher than air pressure outside fire door, it is ensured that the outer gas of fire door does not enter cavity In.Upper tower chamber middle and lower part air-supply, top air draught makes middle and lower part keep malleation, and top keeps negative pressure, so ensures containment portion gas Body does not enter in cavity, while the hydrogen chloride gas of top burner hearth spilling and the heat of radiation can be discharged in time.
Brief description of the drawings
Fig. 1 is high purity quartz generating means schematic diagram of the present invention;
Fig. 2 is reacting furnace structural representation of the present invention
Fig. 3 is tower body external side view of the present invention;
Fig. 4 is the upward view of Fig. 3 A-A parts;
Fig. 5 is axonometric drawing when tower body pedestal is located at bottom;
Fig. 6 is axonometric drawing when tower body pedestal is located at top.
Fig. 7 is wind field schematic diagram inside tower body;
In figure:1- reacting furnaces, 2- tower bodies, 101- burner hearths, 102- thermal insulation layers, 103- heat-insulation layers, 104- stoves seat, 105- stoves Lid, 106- furnace roofs, 107- furnace roofs chamber, 108- burner hearths exhaust outlet, 109- furnace roofs air inlet, 110- furnace roofs exhaust outlet, 111- furnace roofs Observation window, 112- blowtorch, 201- tower bodies support, 202- guide rails, 203- pedestals, 204- motors, 205- product seats, the upper towers of 206- Door, tower under tower chamber, the upper tower chamber air inlets of 211-, 212- under pyller, 208- pyllers connector, the upper tower chambers of 209-, 210- under 207- Pyller exhaust outlet under the upper pyller exhaust outlet of chamber air inlet, 213-, 214-, 215- pyller connectors cavity, 216- apertures, on 217- Pyller observation window, 218- blower fans.
Embodiment
1-7 further describes the present invention below in conjunction with the accompanying drawings:
As shown in figure 1, high purity quartz process units of the present invention includes reacting furnace 1 and tower body 2, wherein reaction furnace structure is as schemed Shown in 2:Reacting furnace 1 is cylinder, is made from inside to outside by burner hearth 101, thermal insulation layer 102, heat-insulation layer 103 and metal material Bonnet composition, bonnet comprising bag be attached to the outer surface of heat-insulation layer 103 stove seat 104, the bell 105 of the upper surface of heat-insulation layer 103 And furnace roof 106, furnace roof 106 is arranged at the top of reacting furnace 1, and furnace roof chamber 107 is formed between bell 105;Burner hearth 101 is set There is at least one burner hearth exhaust outlet 108, burner hearth exhaust outlet 108 passes through thermal insulation layer 102, heat-insulation layer 103 and stove seat 104;Furnace roof 106 Provided with furnace roof air inlet 109, furnace roof exhaust outlet 110;The position of furnace roof exhaust outlet 110 is equal to or higher than the position of furnace roof air inlet 109, And it is provided with air filter in the both sides of furnace roof 106, furnace roof air inlet 109;Thermal insulation layer 102, heat-insulation layer 103 and stove The top center of lid 105, which is offered, is provided with blowtorch 112, blowtorch in the through hole of connection burner hearth 101 and furnace roof chamber 107, through hole 112 tops are material inlet, and bottom is material outlet;Burner hearth exhaust outlet 108 and furnace roof exhaust outlet 110 are connected respectively to waste gas Processing unit;Furnace roof 106 is provided with furnace roof observation window 111.
As shown in fig. 3 to 7:Tower body 2 is arranged on the bottom of burner hearth 101;Including being vertically arranged tower body support on the ground 201, the guide rail 202 of the side of tower body support 201 is arranged on, the pedestal 203 on guide rail 202 is arranged on, pedestal 203 can be in motor In the presence of 204, moved up and down along the guide rail 202;Pedestal 203 is provided with product seat 205, and product seat 205 can be in motor In the presence of 204, move and rotate on pedestal 203.
The upper pyller 206, lower pyller 207, pyller that tower body 2 also includes being arranged on the side of guide rail 202 of tower body support 201 connect Fitting 208, forms upper tower chamber 209, lower pyller 207, tower between upper pyller 206, pyller connector 208 and tower body support 201 Lower tower chamber 210 is formed between door connector 208 and tower body support 201;Tower body support 201 is provided with towards upper tower chamber 209 Upper tower chamber air inlet 211, pyller connector is provided with the lower tower chamber air inlet 212 towards lower tower chamber 210, and upper pyller 206 is provided with Upper pyller exhaust outlet 213, lower pyller 207 are provided with lower pyller exhaust outlet 214, and upper pyller exhaust outlet 213 is connected to exhaust-gas treatment dress Put, lower pyller exhaust outlet 214 is directly connected with air;Tower body support 201, upper pyller 206, lower pyller 207 and pyller connector 208 connecting portion each other is provided with seal, and upper tower chamber air inlet 211 and lower tower chamber air inlet 212 are by blower fan 218 Air feed, malleation is provided to upper tower chamber 209 and lower tower chamber 210.Wherein, upper pyller exhaust outlet 213 is arranged on the upper of pyller 206 Section, lower pyller exhaust outlet 214 is arranged on the hypomere of lower pyller 207.Pyller connector 208 is made up of two-ply up and down, forms tower Door connector cavity 215, wherein pyller connector lower plate is evenly distributed with some apertures 216, lower tower chamber air inlet 212 and pyller Connector cavity 215 is connected.Upper pyller 206 is provided with upper pyller observation window 217.
Tower body is installed on the bottom (800-2000 DEG C inside burner hearth) of high purity quartz production burner hearth, when product just starts production When, as shown in fig. 6, pedestal 203 is located at the top of tower body, product seat 205 is goed deep into burner hearth 101.Product is constantly deposited after production In on product seat 205, pedestal 203 starts persistently to move down after product reaches intended diameter requirement, and such product constantly increases It is long, after product reaches design length requirement, then stop deposition in burner hearth, then pedestal 203 is moved to bottommost, take out production Product, then product deposition production is completed.
Guide rail, screw mandrel, pedestal 203 be also all mounted in tower body support just before, be fixed on tower body support, while All it is mounted in lower pyller and upper pyller cavity.Wherein pedestal 203 is controlled by motor 204, can be by screw mandrel along guide rail Moved up and down between lower pyller cavity and upper pyller cabin cavity.Product seat 205 is partly installed on pedestal 203, product seat 205 it is upper Face then directly carries out production, and the rotation and movement of product are all driven by product seat 205.Pacify 203 times parts of pedestal Dress rotation and mobile motor 204.
The technical concepts and features of above-mentioned case study on implementation only to illustrate the invention, its object is to allow be familiar with technique Personage can understand present disclosure and implement according to this, and it is not intended to limit the scope of the present invention.It is all according to this hair The equivalent change or modification that bright Spirit Essence is made, should all be included within the scope of the present invention.

Claims (5)

1. a kind of high purity quartz process units:Including the reacting furnace (1) for providing pyroreaction environment and it is arranged on reaction Tower body (2) below stove (1), it is characterised in that:
The reacting furnace (1) is cylinder, from inside to outside by burner hearth (101), thermal insulation layer (102), heat-insulation layer (103) and metal material Expect the bonnet composition being made, the bonnet is attached to the stove seat (104), heat-insulation layer of heat-insulation layer (103) outer surface comprising bag (103) bell (105) and furnace roof (106) of upper surface, the furnace roof (106) is arranged at the top of the reacting furnace (1), Furnace roof chamber (107) is formed between the bell (105);The burner hearth (101) is provided with least one burner hearth exhaust outlet (108), The burner hearth exhaust outlet (108) passes through thermal insulation layer (102), heat-insulation layer (103) and stove seat (104);The furnace roof (106) is provided with stove Jacking gas port (109), furnace roof exhaust outlet (110);Furnace roof exhaust outlet (110) position is equal to or higher than furnace roof air inlet (109) position, and it is provided with air filter in the both sides of furnace roof (106), the furnace roof air inlet (109);It is described The tip position of thermal insulation layer (102), heat-insulation layer (103) and bell (105) offers connection burner hearth (101) and furnace roof chamber (107) Through hole, it is material inlet to be provided with the through hole at the top of blowtorch (112), the blowtorch (112), and bottom is material outlet;Institute State burner hearth exhaust outlet (108) and the furnace roof exhaust outlet (110) is connected respectively to emission-control equipment;
The tower body (2) is arranged on the bottom of the burner hearth (101);Including being vertically arranged tower body support (201) on the ground, The guide rail (202) of tower body support (201) side is arranged on, the pedestal (203) on guide rail (202), the pedestal (203) is arranged on It can be moved up and down in the presence of motor (204) along the guide rail (202);The pedestal (203) is provided with product seat (205), the product seat (205) can be moved and rotate on pedestal (203) in the presence of motor (204).
2. a kind of high purity quartz process units according to claim 1, it is characterised in that the tower body (2) also includes setting Put upper pyller (206), lower pyller (207), the pyller connector (208), institute in guide rail (202) side of tower body support (201) State and upper tower chamber (209), the lower pyller are formed between pyller (206), pyller connector (208) and tower body support (201) (207) lower tower chamber (210), is formed between pyller connector (208) and tower body support (201);On the tower body support (201) Provided with the upper tower chamber air inlet (211) towards upper tower chamber (209), the pyller connector (208), which is provided with, leads to lower tower chamber (210) lower tower chamber air inlet (212), the upper pyller (206) is provided with upper pyller exhaust outlet (213), the lower pyller (207) Provided with lower pyller exhaust outlet (214), the upper pyller exhaust outlet (213) is connected to emission-control equipment, the lower pyller exhaust Mouth (214) is directly connected with air;The tower body support (201), upper pyller (206), lower pyller (207) and pyller connector (208) connecting portion each other is provided with seal, the upper tower chamber air inlet (211) and lower tower chamber air inlet (212) by blower fan (218) air feed, malleation is provided to the upper tower chamber (209) and lower tower chamber (210).
3. a kind of high purity quartz process units according to claim 2, it is characterised in that the upper pyller exhaust outlet (213) epimere of pyller (206) is arranged on, the lower pyller exhaust outlet (214) is arranged on the hypomere of lower pyller (207).
4. a kind of high purity quartz process units according to claim 2, it is characterised in that pyller connector (208) is by upper Lower two-ply composition, forms pyller connector cavity (215), wherein pyller connector lower plate is evenly distributed with some apertures (216), the lower tower chamber air inlet (212) and pyller connector cavity (215) UNICOM.
5. a kind of high purity quartz process units according to one of claim 2-4, it is characterised in that the furnace roof (106) Provided with furnace roof observation window (111), the upper pyller (206) is provided with upper pyller observation window (217).
CN201720273989.2U 2017-03-20 2017-03-20 A kind of high purity quartz process units Withdrawn - After Issue CN206591033U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720273989.2U CN206591033U (en) 2017-03-20 2017-03-20 A kind of high purity quartz process units

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720273989.2U CN206591033U (en) 2017-03-20 2017-03-20 A kind of high purity quartz process units

Publications (1)

Publication Number Publication Date
CN206591033U true CN206591033U (en) 2017-10-27

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CN201720273989.2U Withdrawn - After Issue CN206591033U (en) 2017-03-20 2017-03-20 A kind of high purity quartz process units

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106810056A (en) * 2017-03-20 2017-06-09 无锡市孚艾科技有限公司 A kind of high purity quartz process units

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106810056A (en) * 2017-03-20 2017-06-09 无锡市孚艾科技有限公司 A kind of high purity quartz process units
CN106810056B (en) * 2017-03-20 2022-11-15 杭州永通智造科技有限公司 High-purity quartz production device

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Effective date of registration: 20181217

Address after: No. 18 Yongdao Road, Dongzhou Street, Fuyang District, Hangzhou City, Zhejiang Province, 311400

Patentee after: HANGZHOU YONGTONG SMART MANUFACTURING TECHNOLOGY Co.,Ltd.

Address before: 214000 Xihu East Road, Wuxi City, Jiangsu Province, 8-1122

Patentee before: WUXI FUAI TECHNOLOGY Co.,Ltd.

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AV01 Patent right actively abandoned

Granted publication date: 20171027

Effective date of abandoning: 20221115

AV01 Patent right actively abandoned

Granted publication date: 20171027

Effective date of abandoning: 20221115

AV01 Patent right actively abandoned
AV01 Patent right actively abandoned