CN112684488B - High-vacuum semiconductor X-ray detector with extension rod - Google Patents
High-vacuum semiconductor X-ray detector with extension rod Download PDFInfo
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- CN112684488B CN112684488B CN202011595597.0A CN202011595597A CN112684488B CN 112684488 B CN112684488 B CN 112684488B CN 202011595597 A CN202011595597 A CN 202011595597A CN 112684488 B CN112684488 B CN 112684488B
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
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- 238000001816 cooling Methods 0.000 abstract description 3
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- 238000011160 research Methods 0.000 description 4
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Abstract
The invention discloses an extension bar high-vacuum semiconductor X-ray detector, which is characterized in that the X-ray detector comprises: the sensor, the sensor is fixed in the detector head, integrated with the electric refrigeration piece that is used for the cooling in the sensor, this sensor converts the X ray into the induced electrical signal, and this sensor exports the electrical signal to the circuit board, the circuit board is fixed inside the extension pole, and this circuit board is the PCB, the PCB includes multilayer wiring and copper-clad structure, and this PCB passes through signal transmission terminal with the transmission of electrical signal to pre-amplifier circuit, signal transmission terminal fixes inside the vacuum flange, pre-amplifier circuit fixes inside the pre-circuit casing, and this pre-amplifier circuit passes through FPC and is connected to digital multichannel analyzer, digital multichannel analyzer fixes inside the digital multichannel analyzer casing.
Description
Technical Field
The invention relates to the technical field of X-ray energy spectrum analysis, in particular to a high-vacuum semiconductor X-ray detector with an extension rod.
Background
The X-ray detector is widely applied to the industries of instruments and meters and scientific research, wherein a plurality of application scenes are required to be used under high vacuum degree (lower than 10 < -9 > mbar), and long distance is required to go deep into a vacuum cavity so as to be as close to a detection point as possible, and the detection efficiency is improved. Such as synchrotron radiation experiments, trace light element analysis and the like in the scientific research field.
The X-ray detector itself is composed of a sensor, a pre-amplifying circuit and a post-stage digital multi-channel analysis circuit, so that the energy and the count of X-ray photons are statistically analyzed and presented in the form of a spectrogram. Because the signal of the X-ray sensor is extremely weak and is easily interfered by the outside and the peripheral circuit thereof, a preamplifier is generally arranged near the X-ray sensor, and the signal is amplified and then transmitted, so that the anti-interference capability of the signal is improved. However, in the ultra-high vacuum environment, the electronic components are invalid, the circuit cannot work normally, and the pre-amplifying circuit can only be arranged outside the vacuum cavity, so that weak signals of the X-ray sensor are required to be transmitted outside the vacuum cavity in a long distance under the condition of no amplification, and then the amplification treatment can be performed. This presents challenges for electromagnetic compatibility design of signal transmissions. At present, the longest rod of the semiconductor X-ray detector with high vacuum degree at home and abroad is 200mm, and long-distance detection is difficult to perform, so that an X-ray detector capable of solving the problems is urgently needed in the market.
Disclosure of Invention
Aiming at the defects in the prior art, the high-vacuum semiconductor X-ray detector with the extension rod is good in electromagnetic compatibility and stable in performance, can adapt to complex electromagnetic environment, can stably work for a long time, and can meet the requirements of various scientific research experiments.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows: the utility model provides an extension bar high vacuum semiconductor X-ray detector which characterized in that, the X-ray detector includes: the sensor, the sensor is fixed in the detector head, integrated with the electric refrigeration piece that is used for the cooling in the sensor, this sensor converts the X ray into the induced electrical signal, and this sensor exports the electrical signal to the circuit board, the circuit board is fixed inside the extension pole, and this circuit board is the PCB, the PCB includes multilayer wiring and copper-clad structure, and this PCB passes through signal transmission terminal with the transmission of electrical signal to pre-amplifier circuit, signal transmission terminal fixes inside the vacuum flange, pre-amplifier circuit fixes inside the pre-circuit casing, and this pre-amplifier circuit passes through FPC and is connected to digital multichannel analyzer, digital multichannel analyzer fixes inside the digital multichannel analyzer casing.
As a preferable scheme, two ends of the extension rod are processed by secondary conduction, two ends of the extension rod are mirror surfaces, and the fixing seat of the X-ray sensor and the fixing seat of the vacuum flange are respectively provided with a connecting surface meshed with the mirror surfaces.
As a preferable scheme, the X-ray sensor transmits a signal to the pre-amplifying circuit, the signal is amplified and filtered by the digital multi-channel analyzer after being amplified by the pre-amplifying circuit, the signal is subjected to ADC (analog to digital converter), is subjected to digital pulse forming after being converted, and is subjected to statistical analysis to form a spectrogram, and the spectrogram is transmitted to the upper computer software through a USB (universal serial bus) or RS232 transmission interface.
As a preferred scheme, the electric refrigerating sheet monitors the temperature of the sensor through a DPA closed-loop refrigerating circuit and provides current refrigeration for the electric refrigerating sheet.
As a preferable scheme, the circuit board and the sensor and the circuit board and the vacuum flange are connected by gold-plated metal pins.
As a preferred embodiment, the circuit board may be further configured as an FPC.
Preferably, the extension rod is an aluminum metal rod with a length of not less than 287 mm.
As a preferable scheme, the side wall of the extension rod is provided with a ventilation small hole.
As a preferable scheme, the vacuum flange is a high vacuum CF interface.
As a preferred solution, the pre-amplifying circuit is connected with a DPA, and the DPA provides power, bias voltage and signal processing for the pre-amplifying circuit.
Compared with the prior art, the invention has the beneficial effects that: the PCB wiring can effectively control a signal path, avoid an interference source, and electromagnetically shield key signals through copper coating and multilayer design by PCB wiring design. Effectively reducing and avoiding the crosstalk between signals. The whole circuit is packaged in the extension rod, and the electric contact surface of the extension rod and each component adopts secondary electric conduction processing, so that the electric contact is ensured to be full, the smooth ground loop is effectively ensured, and the external electromagnetic interference is shielded. The problems that the high vacuum degree and long extension rod X-ray detector cannot work are solved, the resolution is good, the FWHM can reach 130ev, the counting rate is high and reaches the theoretical highest value, the forming time is 1 microsecond, the output counting rate can reach more than 180Kcps, the device is suitable for complex electromagnetic environment, can work stably for a long time, and can meet the requirements of various scientific research experiments.
Drawings
FIG. 1 is a block diagram of an extension bar high vacuum semiconductor X-ray detector.
Fig. 2 is a split view of an extension bar high vacuum semiconductor X-ray detector.
Fig. 3 is a view showing a structure of a vacuum flange.
Fig. 4 is a flow chart of the high vacuum semiconductor X-ray detector signal for the extension bar.
Detailed Description
The invention is further described below in connection with specific embodiments. The following examples are only for more clearly illustrating the technical aspects of the present invention, and are not intended to limit the scope of the present invention.
Examples:
As shown in fig. 1, 2 and 3, an extension bar high vacuum semiconductor X-ray detector, characterized in that the X-ray detector comprises: the sensor, the sensor is fixed in the detector head, integrated with the electric refrigeration piece that is used for the cooling in the sensor, this sensor converts the X ray into the induced electric signal, and this sensor exports the electric signal to the circuit board, the circuit board is fixed inside extension rod 2, and this circuit board is the PCB, the PCB includes multilayer wiring and copper-clad structure, and this PCB passes through signal transmission terminal with electric signal transmission to pre-amplifier circuit, signal transmission terminal 8 is fixed inside vacuum flange 3, pre-amplifier circuit fixes inside pre-circuit housing 4, and this pre-amplifier circuit passes through FPC and connects to digital multichannel analyzer, digital multichannel analyzer fixes inside digital multichannel analyzer housing 5.
In the invention, preferably, two ends of the extension rod 2 are processed by secondary conduction, two ends of the extension rod 2 are mirror surfaces 6, and the fixing seat of the sensor 1 and the fixing seat of the vacuum flange 3 are respectively provided with a connecting surface 7 meshed with the mirror surfaces 6.
As shown in fig. 4, the X-ray sensor of the present invention preferably transmits a signal to the pre-amplifying circuit, the pre-amplifying circuit is provided with a power supply, the power supply includes a high-voltage power supply and a refrigeration power supply, the signal is amplified by the pre-amplifying circuit, then amplified and filtered by the digital multi-channel analyzer, the signal is ADC-converted, and then subjected to digital pulse forming and statistical analysis to form a spectrogram, and the spectrogram is transmitted to the upper computer software through the USB or RS232 transmission interface.
The electric refrigerating sheet is preferably used for monitoring the temperature of the sensor through a DPA closed-loop refrigerating circuit and providing current refrigeration for the electric refrigerating sheet.
In the present invention, gold-plated metal pins are preferably used to connect the circuit board to the sensor and the circuit board to the vacuum flange 3.
The circuit board according to the present invention may be provided with an FPC.
The extension rod 2 of the present invention is preferably an aluminum metal rod having a length of not less than 287 mm.
The side wall of the extension rod 2 is preferably provided with ventilation holes.
The vacuum flange 3 is preferably a high vacuum CF interface
In the invention, the pre-amplifying circuit is preferably connected with a DPA, and the DPA provides power for the pre-amplifying circuit.
Working principle:
1. the signal transmission scheme of the vacuum area of the detector,
PCB (hard board/FPC) wiring design:
Compared with the traditional transmission line (signal transmission wire) scheme, the design adopts a PCB wiring mode to replace the transmission line, the PCB wiring can effectively control a signal path, avoid an interference source, and carry out electromagnetic shielding on key signals through copper coating and multilayer design through the PCB wiring design. The crosstalk between signals is effectively reduced and avoided, and a Flexible Printed Circuit (FPC) manufacturing process can be adopted for the bending requirement.
2. EMC design for X-ray sensor:
Interference source suppression: output signal is an Output signal of the X-ray sensor, the signal amplitude is mv level, the rising time is ns level, the Output signal is a typical weak signal, the Output signal is very easy to interfere in long-distance transmission, and is influenced by distributed capacitance, so that the problems of signal noise increase, oscillation and the like are caused, and the resolution of the detector is seriously reduced.
The Peltier signal is a power supply signal, has larger current and is a switching power supply signal, the Peltier signal carries switching noise and is an internal main interference source, the Peltier+ and Peltier-are wired on the power supply layer of the PCB, and parallel small-space wires are adopted to reduce loop interference. The two sides of the wiring are wrapped by the ground wire, and the ground wire, the ground layer and the bottom layer are covered with copper to form a shielding layer, so that the interference of the shielding layer to the high-voltage signal wire and the output signal of the sensor is effectively controlled, the whole circuit is packaged in the extension rod, the electric contact surface of the extension rod and each component is processed by secondary electric conduction, the electric contact is ensured to be full, the smooth ground loop is effectively ensured, and the external electromagnetic interference is shielded.
3. The detector temperature control system comprises:
because the detector needs a certain high-temperature environment tolerance, the extension rod is long, and the heat dissipation resistance is increased, the temperature control of the detector is processed as follows,
And (3) designing a refrigerating circuit: an electric refrigerating sheet is integrated in the X-ray sensor, the temperature of the X-ray sensor is monitored through a DPA closed-loop refrigerating circuit, current refrigeration is provided, and the temperature of the sensor is kept constant at a set value all the time. Because of the large current and long distance wiring, the impedance of the transmission line becomes a problem, the refrigeration voltage reaching the sensor is severely reduced, and the refrigeration efficiency is greatly reduced. So that the sensor temperature does not reach the desired value. Peltier+ and Peltier-adopt 5mm large line width wiring, effectively reduce the transmission resistance of long-distance transmission, and control the transmission line resistance within 0.1 ohm so as to ensure the refrigeration efficiency of the refrigeration circuit;
And (3) heat radiation mechanical design: the internal temperature of the sensor is also increased and cannot be maintained at an ideal value (-25 ℃ to-50 ℃), and the resolution of the sensor is greatly reduced or cannot work normally. The heat radiating fin and the extension rod are made of aluminum, and have high heat conduction performance and electromagnetic shielding performance, and the heat conducting contact surface of the heat radiating fin and the sensor and the heat radiating fin and the contact surface of the extension rod are designed by adopting a tight-fit mirror surface, so that the heat conducting contact area is fully ensured, the heat radiating efficiency of the X-ray sensor is improved, and the X-ray sensor has certain high-temperature environment tolerance.
4. The vacuum design method of the detector comprises the following steps:
Customizing a high vacuum connector, and adopting a standard CF interface to ensure the compatibility of the detector in the installation of the detector and the cavity; the signal transmission terminal adopts a gold plating and glass fusion sealing process, so that the high tightness which is lower than 10 < -9 > mbar is fully ensured while the signal integrity is ensured. The internal vent hole prevents the detector from being detained and slowly released in the extension rod, so that the vacuum degree cannot meet the requirement.
5. The circuit design outside the vacuum cavity of the detector:
The digital multichannel pulse analyzer (Digital Pulse Analyzer) adopts a digital trapezoidal forming algorithm to provide accurate amplitude analysis and statistics for the X-ray sensor, has the advantages of high resolution and high counting passing rate, DPA is connected with a pre-amplifying circuit of the X-ray sensor to provide power for the X-ray sensor, and amplifies, filters, forms and screens signals output by the DPA, and finally transmits data such as energy and counting of X-ray photons entering the X-ray sensor to the upper computer software through a USB or RS232 interface, wherein the upper computer software presents in a spectrogram form and intuitively displays the energy and intensity characteristics of the X-ray to be detected.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that modifications and variations could be made by those skilled in the art without departing from the technical principles of the present invention, and such modifications and variations should also be regarded as being within the scope of the invention.
Claims (8)
1. An extension bar high vacuum semiconductor X-ray detector, the X-ray detector comprising: the sensor (1), the sensor (1) is fixed on the head of the detector, an electric refrigerating sheet for reducing temperature is integrated in the sensor, the sensor converts X-rays into induction electric signals, the sensor outputs the electric signals to a circuit board, the circuit board is fixed inside an extension rod (2), the circuit board is a PCB, the PCB comprises a multilayer wiring and a copper-clad structure, the PCB transmits the electric signals to a pre-amplifying circuit through a signal transmission terminal, the signal transmission terminal (8) is fixed inside a vacuum flange (3), the pre-amplifying circuit is fixed inside a pre-circuit shell (4), the pre-amplifying circuit is connected to a digital multi-channel analyzer through an FPC, and the digital multi-channel analyzer is fixed inside a digital multi-channel analyzer shell (5);
the two ends of the extension rod (2) are subjected to secondary conductive processing, the two ends of the extension rod (2) are mirror surfaces (6), and the fixing seat of the sensor (1) and the fixing seat of the vacuum flange (3) are respectively provided with a connecting surface (7) meshed with the mirror surfaces (6);
The sensor transmits signals to the pre-amplifying circuit, the signals are amplified by the pre-amplifying circuit, the digital multichannel analyzer amplifies and filters the signals, the signals are converted by the ADC, and then are subjected to digital pulse forming and statistical analysis to form a spectrogram, and the spectrogram is transmitted to the upper computer software through the USB or RS232 transmission interface.
2. An extension bar high vacuum semiconductor X-ray detector according to claim 1, wherein: the electric refrigerating sheet monitors the temperature of the sensor through a DPA closed-loop refrigerating circuit and provides current refrigeration for the electric refrigerating sheet.
3. An extension bar high vacuum semiconductor X-ray detector according to claim 1, wherein: and the circuit board is connected with the sensor and the vacuum flange (3) through gold-plated metal pins.
4. An extension bar high vacuum semiconductor X-ray detector according to claim 1, wherein: the circuit board may also be provided as an FPC.
5. An extension bar high vacuum semiconductor X-ray detector according to claim 1, wherein: the extension rod (2) is an aluminum metal rod with the length not less than 287 mm.
6. An extension bar high vacuum semiconductor X-ray detector according to claim 1, wherein: the side wall of the extension rod (2) is provided with a ventilation small hole.
7. An extension bar high vacuum semiconductor X-ray detector according to claim 1, wherein: the vacuum flange (3) is a high vacuum CF interface.
8. An extension bar high vacuum semiconductor X-ray detector according to claim 1, wherein: the pre-amplifying circuit is connected with a DPA, and the DPA provides power supply, bias voltage and signal processing for the pre-amplifying circuit.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011595597.0A CN112684488B (en) | 2020-12-29 | 2020-12-29 | High-vacuum semiconductor X-ray detector with extension rod |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011595597.0A CN112684488B (en) | 2020-12-29 | 2020-12-29 | High-vacuum semiconductor X-ray detector with extension rod |
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| CN112684488A CN112684488A (en) | 2021-04-20 |
| CN112684488B true CN112684488B (en) | 2024-05-17 |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1152058A (en) * | 1997-07-30 | 1999-02-26 | Shimadzu Corp | Two dimensional radiation detector |
| CN101526622A (en) * | 2008-03-05 | 2009-09-09 | 清华大学 | Detector device used for radiation monitoring |
| CN101937092A (en) * | 2009-06-30 | 2011-01-05 | 同方威视技术股份有限公司 | Detector equipment for radiation imaging |
| CN105842726A (en) * | 2015-05-21 | 2016-08-10 | 成都理工大学 | Cadmium zinc telluride (CdZnTe) X-ray detector for nitrogen thermoelectric cooling |
| CN105866155A (en) * | 2016-04-11 | 2016-08-17 | 中国科学院声学研究所 | X-ray fluorescent logging exploring tube for deep well detection |
| CN210575986U (en) * | 2019-11-25 | 2020-05-19 | 苏州兀象科学仪器有限公司 | Semiconductor X-ray detector packaging structure |
| CN111930166A (en) * | 2020-09-27 | 2020-11-13 | 深圳市海创光学有限公司 | Control circuit, linear compensation method and solid-state photomultiplier module |
-
2020
- 2020-12-29 CN CN202011595597.0A patent/CN112684488B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1152058A (en) * | 1997-07-30 | 1999-02-26 | Shimadzu Corp | Two dimensional radiation detector |
| CN101526622A (en) * | 2008-03-05 | 2009-09-09 | 清华大学 | Detector device used for radiation monitoring |
| CN101937092A (en) * | 2009-06-30 | 2011-01-05 | 同方威视技术股份有限公司 | Detector equipment for radiation imaging |
| CN105842726A (en) * | 2015-05-21 | 2016-08-10 | 成都理工大学 | Cadmium zinc telluride (CdZnTe) X-ray detector for nitrogen thermoelectric cooling |
| CN105866155A (en) * | 2016-04-11 | 2016-08-17 | 中国科学院声学研究所 | X-ray fluorescent logging exploring tube for deep well detection |
| CN210575986U (en) * | 2019-11-25 | 2020-05-19 | 苏州兀象科学仪器有限公司 | Semiconductor X-ray detector packaging structure |
| CN111930166A (en) * | 2020-09-27 | 2020-11-13 | 深圳市海创光学有限公司 | Control circuit, linear compensation method and solid-state photomultiplier module |
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