CN112676705B - Silicon wafer etching method - Google Patents
Silicon wafer etching method Download PDFInfo
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- CN112676705B CN112676705B CN202011447375.4A CN202011447375A CN112676705B CN 112676705 B CN112676705 B CN 112676705B CN 202011447375 A CN202011447375 A CN 202011447375A CN 112676705 B CN112676705 B CN 112676705B
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- discharging
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 70
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 70
- 239000010703 silicon Substances 0.000 title claims abstract description 70
- 238000005530 etching Methods 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000007599 discharging Methods 0.000 claims abstract description 34
- 238000010329 laser etching Methods 0.000 claims abstract description 8
- 230000007246 mechanism Effects 0.000 claims description 13
- 238000005192 partition Methods 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 abstract description 57
- 230000008569 process Effects 0.000 abstract description 6
- 230000010354 integration Effects 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 5
- 238000005096 rolling process Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a silicon wafer etching method, which comprises the following steps: s1, conveying the silicon wafer to be processed to a feeding groove of the etching device through a feeding conveyer belt and guiding the silicon wafer into a placing groove, so that the silicon wafer slides into the space between two clamping blocks; s2, starting the stepping motor, driving the gear to rotate, driving the gear ring to rotate, further driving the rotating disc to rotate, rotating the fed silicon wafer away from one side of the feeding along with the rotation of the rotating disc, rotating the abutting block away from the flange at the moment, wherein the flange does not generate abutting supporting force on the abutting block any more, further pulling the two movable blocks to move close to each other by the tension spring, and driving the two clamping blocks to close and clamp the silicon wafer; and S3, starting the vertical electric guide rail and the horizontal electric guide rail to drive the laser etching machine head to operate to finish etching. The silicon wafer feeding and discharging device can realize automatic feeding and discharging of silicon wafers, improve feeding and discharging efficiency, realize stable feeding, etching processing and discharging of the silicon wafers, reduce working intensity of manual feeding, and is time-saving and labor-saving due to the integration of feeding and fixing processes of the silicon wafers.
Description
Technical Field
The invention relates to the technical field of silicon wafer production and processing, in particular to a silicon wafer etching method.
Background
Silicon wafers, also known as wafers, are processed from silicon ingots, millions of transistors can be etched on silicon wafers by a special process, and are widely used in the manufacture of integrated circuits, and silicon carbide wafers are mainly used in the fields of LED solid lighting and high frequency devices. The method has irreplaceable advantages in the electronic application field and extreme environment applications such as aerospace, military industry, nuclear energy and the like.
The processing process of the silicon wafer comprises the steps of doping, melting, cutting, grinding, etching, cleaning and the like, the silicon wafer needs to be manually loaded and unloaded in the etching process, the operation amount is large, time and labor are wasted, and the silicon wafer needs to be additionally positioned and fixed after the loading and unloading process, so the processing efficiency is reduced.
Disclosure of Invention
The invention aims to solve the defects in the prior art and provides a silicon wafer etching method.
In order to achieve the purpose, the invention adopts the following technical scheme:
a silicon wafer etching method comprising the steps of:
s1, conveying the silicon wafer to be processed to a feeding groove of the etching device through a feeding conveying belt and guiding the silicon wafer into a placing groove, wherein on the feeding side, as the abutting blocks abut against the flange, the two movable blocks are driven outwards through the two connecting rods, so that the two clamping blocks keep a larger distance, and the fed silicon wafer can smoothly slide into the space between the two clamping blocks;
s2, starting a stepping motor of the etching device, driving the gear to rotate, driving the gear ring to rotate, further driving the rotating disc to rotate, rotating the fed silicon wafer away from one side of the feeding along with the rotation of the rotating disc, rotating the abutting block away from the flange at the moment, and enabling the flange not to generate abutting supporting force on the abutting block any more, further pulling the two movable blocks to move close to each other by the tension spring, and driving the two clamping blocks to close to each other to clamp and fix the silicon wafer;
and S3, starting the vertical electric guide rail and the horizontal electric guide rail of the etching device to drive the laser etching machine head to operate to complete etching.
Preferably, the method further comprises the following steps:
s4, starting a stepping motor of the etching device, driving the rotating disc to rotate, enabling the etched silicon wafer to rotate to one side of a discharging material, enabling the abutting block to be in contact with the flange, enabling the flange to abut against the abutting block to move, driving the two movable blocks to move away from the flange, enabling the distance between the two clamping blocks to be increased, enabling the silicon wafer to fall onto the discharging conveying belt through the discharging pipe and discharging the silicon wafer.
Preferably, the etching device comprises a processing table, a vertical frame is arranged on one side of the upper end of the processing table, a vertical electric guide rail is mounted on the side wall of the vertical frame, a transverse frame is fixedly connected to the moving end of the vertical electric guide rail, a transverse electric guide rail is mounted on the side wall of the transverse frame, a laser etching machine head is mounted on the moving end of the transverse electric guide rail, a rotating groove is formed in the top of the processing table, an annular rotating disc is connected in the rotating groove in a rotating mode, four placing grooves are formed in the upper disc surface of the rotating disc at equal intervals along the circumferential direction of the rotating disc, fixing mechanisms for fixing silicon wafers are arranged in the four placing grooves, a cavity is formed in the processing table, a partition plate is arranged in the cavity and divides the cavity into a driving cavity and a discharging cavity which are arranged on the left and right, a fixing column is fixedly connected to the bottom wall of the driving cavity and upwards inserted into the inner side of the rotating disc, the utility model discloses a processing platform, including processing platform, drive intracavity, unloading chamber, feeding frame, feeding trough, rotating disc, processing platform, feeding frame, feeding trough, feeding conveyer belt, the drive intracavity is equipped with and is used for driving rotating disc pivoted actuating mechanism, it is equipped with the unloading pipe that will rotate groove and ejection of compact chamber intercommunication to inlay on the interior top in ejection of compact chamber, install the ejection of compact conveyer belt that extends the processing platform in the ejection of compact intracavity, processing platform one side is equipped with the feeding frame, be connected with the feeding trough on the feeding frame, and the feeding trough other end extends to the rotating disc top, install feeding conveyer belt on the feeding frame, be equipped with numerical control system on the lateral wall of processing platform.
Preferably, the fixing mechanism includes a mounting groove formed in the inner side of the placing groove, a guide rod is arranged in the mounting groove, two ends of the guide rod are fixedly connected to the inner wall of the mounting groove, two movable blocks are sleeved on the guide rod in a sliding mode, a tension spring is sleeved on the guide rod, two ends of the tension spring are connected to the two movable blocks respectively, two clamping blocks located in the placing groove are fixedly connected to the side wall of each movable block, a limiting sliding groove is formed in the position, close to the fixed column, of the disc surface on the rotating disc, a limiting sliding block is connected to the disc surface in the limiting sliding groove in a sliding mode, a supporting block is fixedly connected to the upper end of the limiting sliding block, two connecting rods are rotatably connected to the upper end of the supporting block, two ends, far away from the supporting block, of the connecting rods are rotatably connected to the two movable blocks respectively, and flanges corresponding to the supporting block are fixedly sleeved on the fixed column.
Preferably, the driving mechanism comprises a stepping motor fixedly mounted on the top wall in the driving cavity, a gear is fixedly connected to the tail end of an output shaft of the stepping motor, a gear ring extending into the driving cavity is fixedly connected to the lower end of the rotating disc, and the gear is meshed with the gear ring.
Preferably, a retainer ring is connected between the two clamping blocks, and the retainer ring is of an arc-shaped structure.
Preferably, the clamping block is connected with a guide film at one end far away from the movable block, and the other end of the guide film is connected to the opening of the placing groove.
Preferably, the outer side of the clamping block is wrapped with a non-slip mat.
The invention has the beneficial effects that:
through setting up feeding conveyer belt, rolling disc, ejection of compact conveyer belt, realize the fast transmission feeding of silicon wafer through feeding conveyer belt, ejection of compact conveyer belt carries out the fast transmission ejection of compact, realizes unloading automatically, is favorable to improving material loading efficiency, realizes that the silicon wafer stabilizes material loading, etching processing, the ejection of compact, reduces artifical material loading's working strength.
Through setting up fixed establishment, carry the silicon wafer of treating processing to the feed chute and leading-in standing groove through the feeding conveyer belt, and in feeding one side, because support the piece and offset with the flange, and then drive two movable blocks to the outside through two connecting rods, make two press from both sides tight piece and keep great interval, and then make the silicon wafer of feeding slide smoothly between two tight pieces of clamp, the rethread starts step motor, drive gear rotates, it rotates to drive the ring gear, and then drive the rolling disc and rotate, along with the rolling disc rotates, the silicon wafer of feeding changes from feeding one side, support the piece and change from the flange this moment, it no longer produces to support the pressure holding power to support the piece to the flange, and then two movable blocks of extension spring pulling are close to the removal, can drive two and press from both sides tight piece and be close to silicon wafer clamp and decide, and then guarantee the stability when etching.
The silicon wafer feeding and discharging device can realize automatic feeding and discharging of silicon wafers, improve feeding and discharging efficiency, realize stable feeding, etching processing and discharging of the silicon wafers, reduce working intensity of manual feeding, and is time-saving and labor-saving due to the integration of feeding and fixing processes of the silicon wafers.
Drawings
FIG. 1 is a schematic structural view of a silicon wafer etching apparatus according to the present invention;
FIG. 2 is a schematic diagram showing a top view of a rotating disk of an apparatus for etching a silicon wafer according to the present invention;
FIG. 3 is a schematic configuration view of a holding mechanism of a silicon wafer etching apparatus according to the present invention;
FIG. 4 is a schematic structural diagram of a supporting block, a limiting slide block and a limiting slide groove of the silicon wafer etching device according to the present invention.
In the figure: 1 processing table, 2 driving chambers, 3 partition plates, 4 discharging chambers, 5 discharging conveying belts, 6 discharging pipes, 7 gear rings, 8 gears, 9 stepping motors, 10 rotating grooves, 11 rotating discs, 12 fixed columns, 13 feeding grooves, 14 feeding frames, 15 feeding conveying belts, 16 laser etching machine heads, 17 transverse electric guide rails, 18 transverse frames, 19 vertical electric guide rails, 20 vertical frames, 21 placing grooves, 22 flanges, 23 clamping blocks, 24 retainer rings, 25 mounting grooves, 26 guide rods, 27 movable blocks, 28 connecting rods, 29 abutting blocks, 30 limiting sliding grooves, 31 tension springs, 32 guide films, 33 limiting sliding blocks and 34 numerical control systems.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
Referring to fig. 1-4, a silicon wafer etching device comprises a processing table 1, a vertical frame 20 is arranged on one side of the upper end of the processing table 1, a vertical electric guide rail 19 is arranged on the side wall of the vertical frame 20, a transverse frame 18 is fixedly connected to the moving end of the vertical electric guide rail 19, a transverse electric guide rail 17 is arranged on the side wall of the transverse frame 18, a laser etching machine head 16 is arranged on the moving end of the transverse electric guide rail 17, a rotating groove 10 is arranged on the top of the processing table 1, an annular rotating disc 11 is rotationally connected in the rotating groove 10, four placing grooves 21 are arranged on the upper disc surface of the rotating disc 11 at equal intervals along the circumferential direction of the upper disc surface, fixing mechanisms for fixing silicon wafers are arranged in the four placing grooves 21, a cavity is arranged in the processing table 1, a partition plate 3 is arranged in the cavity, the partition plate 3 divides the cavity into a driving cavity 2 and a discharging cavity 4 which are arranged on the left and right, a fixed column 12 is fixedly connected to the bottom wall in the driving cavity 2, the fixed column 12 is upwards inserted into the inner side of the rotating disc 11, a driving mechanism for driving the rotating disc 11 to rotate is arranged in the driving cavity 2, a blanking pipe 6 for communicating the rotating groove 10 with the discharging cavity 4 is embedded on the inner top of the discharging cavity 4, a discharging conveyer belt 5 extending out of the processing table 1 is arranged in the discharging cavity 4, a feeding frame 14 is arranged on one side of the processing table 1, a feeding groove 13 is connected onto the feeding frame 14, the other end of the feeding groove 13 extends to the upper side of the rotating disc 11, a feeding conveyer belt 15 is arranged on the feeding frame 14, a numerical control system 34 is arranged on the side wall of the processing table 1, and the numerical control system 34 controls the vertical electric guide rail 19 and the horizontal electric guide rail 17 to feed and controls the parameters of the rotating period, the angle and the speed of the stepping motor 9.
In the invention, the fixing mechanism comprises a mounting groove 25 arranged on the inner side of a placing groove 21, a guide rod 26 is arranged in the mounting groove 25, two ends of the guide rod 26 are fixedly connected on the inner wall of the mounting groove 25, two movable blocks 27 are slidably sleeved on the guide rod 26, a tension spring 31 is sleeved on the guide rod 26, two ends of the tension spring 31 are respectively connected on the two movable blocks 27, clamping blocks 23 positioned in the placing groove 21 are fixedly connected on the side walls of the two movable blocks 27, a retaining ring 24 is connected between the two clamping blocks 23, the retaining ring 24 is of an arc structure, the retaining ring 24 of the arc structure can assist in limiting and positioning the silicon wafer when the silicon wafer enters the placing groove 21, the outer side of each clamping block 23 is coated with an anti-skid pad, a limiting sliding groove 30 is arranged on the disc surface of a rotating disc 11 and close to a fixed column 12, a limiting sliding block 33 is slidably connected in the limiting sliding groove 30, and a resisting block 29 is fixedly connected at the upper end of the limiting sliding block 33, the cross sections of the limiting sliding chute 30 and the limiting sliding block 33 are of T-shaped structures which are matched with each other, the upper end of the abutting block 29 is rotatably connected with two connecting rods 28, one ends of the two connecting rods 28, which are far away from the abutting block 29, are respectively rotatably connected to the two movable blocks 27, and the fixed column 12 is fixedly sleeved with the flange 22 corresponding to the abutting block 29.
Concretely, actuating mechanism includes step motor 9 of fixed mounting on the roof in drive chamber 2, and step motor 9 output shaft end fixedly connected with gear 8, and the lower extreme fixedly connected with of rolling disc 11 extends to the ring gear 7 in the drive chamber 2, and gear 8 and the meshing of ring gear 7 can drive rolling disc 11 through step motor 9 and rotate, realize unloading in the automation.
Furthermore, one end of the clamping block 23, which is far away from the movable block 27, is connected with a guide film 32, and the other end of the guide film 32 is connected with an opening of the placing groove 21, so as to guide the silicon wafer to enter the placing groove 21.
A silicon wafer etching method comprising the steps of:
silicon wafers to be processed are conveyed to the feeding groove 13 through the feeding conveying belt 15 and are guided into the placing groove 21, and on the feeding side, because the abutting blocks 29 abut against the flanges 22, and then the two movable blocks 27 are driven outwards through the two connecting rods 28, so that the two clamping blocks 23 keep a larger distance, the fed silicon wafers can smoothly slide into the space between the two clamping blocks 23, then the stepping motor 9 is started, the driving gear 8 rotates to drive the gear ring 7 to rotate, and further the rotating disc 11 rotates, and the fed silicon wafers rotate away from the feeding side along with the rotation of the rotating disc 11, at the moment, the abutting blocks 29 rotate away from the flanges 22, namely the flanges 22 do not generate abutting supporting force on the abutting blocks 29, and then the tension spring 31 pulls the two movable blocks 27 to move, so that the two clamping blocks 23 can be driven to approach to clamp and fix the silicon wafers, and further the stability during etching is ensured;
then, the vertical electric guide rail 19 and the horizontal electric guide rail 17 are started, the laser etching machine head 16 can be driven to operate to complete etching, the stepping motor 9 is started again, the rotating disc 11 is driven to rotate, the etched silicon wafer rotates to one side of the discharging material, the supporting block 29 is in contact with the flange 22 at the moment, the flange 22 supports the supporting block 29 to move, the two movable blocks 27 are driven to move away, the distance between the two clamping blocks 23 can be increased, and the silicon wafer can fall onto the discharging conveying belt 5 through the discharging pipe 6 and can be discharged.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be able to cover the technical scope of the present invention and the equivalent alternatives or modifications according to the technical solution and the inventive concept of the present invention within the technical scope of the present invention.
Claims (5)
1. A silicon wafer etching method is characterized by comprising the following steps:
s1, conveying the silicon wafer to be processed to a feeding groove (13) of the etching device through a feeding conveying belt (15) and guiding the silicon wafer into a placing groove (21), wherein on the feeding side, as a resisting block (29) is propped against a flange (22), two movable blocks (27) are driven outwards through two connecting rods (28), so that two clamping blocks (23) keep a larger distance, and the fed silicon wafer slides into the space between the two clamping blocks (23);
s2, starting a stepping motor (9) of the etching device, driving a gear (8) to rotate, driving a gear ring (7) to rotate, further driving a rotating disc (11) to rotate, rotating the fed silicon wafer away from one side of the feeding along with the rotation of the rotating disc (11), rotating a resisting block (29) away from a flange (22), enabling the flange (22) not to generate resisting and pressing supporting force on the resisting block (29), further pulling two movable blocks (27) to move close to each other by a tension spring (31), and driving two clamping blocks (23) to clamp and fix the silicon wafer close to each other;
s3, starting a vertical electric guide rail (19) and a horizontal electric guide rail (17) of the etching device to drive a laser etching machine head (16) to operate to complete etching;
s4, starting a stepping motor (9) of the etching device, driving a rotating disc (11) to rotate, enabling the etched silicon wafer to rotate to one side of a discharging side, enabling a supporting block (29) to be in contact with a flange (22), enabling the flange (22) to be supported against the supporting block (29) to move, driving two movable blocks (27) to move away, enabling the distance between two clamping blocks (23) to be increased, and enabling the silicon wafer to fall onto a discharging conveying belt (5) through a discharging pipe (6) and discharging;
the etching device comprises a processing table (1), wherein a vertical frame (20) is arranged on one side of the upper end of the processing table (1), a vertical electric guide rail (19) is installed on the side wall of the vertical frame (20), a transverse frame (18) is fixedly connected to the moving end of the vertical electric guide rail (19), a transverse electric guide rail (17) is installed on the side wall of the transverse frame (18), a laser etching machine head (16) is installed on the moving end of the transverse electric guide rail (17), a rotating groove (10) is formed in the top of the processing table (1), an annular rotating disc (11) is rotationally connected in the rotating groove (10), four placing grooves (21) are formed in the upper disc surface of the rotating disc (11) at equal intervals along the circumferential direction of the upper disc surface, fixing mechanisms for fixing the silicon wafer are arranged in the four placing grooves (21), a cavity is formed in the processing table (1), and a partition plate (3) is arranged in the cavity, the cutting machine is characterized in that the cavity is divided into a driving cavity (2) and a discharging cavity (4) which are arranged on the left and right by a partition plate (3), a fixed column (12) is fixedly connected to the inner bottom wall of the driving cavity (2), the fixed column (12) is upwards inserted into the inner side of a rotating disc (11), a driving mechanism for driving the rotating disc (11) to rotate is arranged in the driving cavity (2), a discharging pipe (6) for communicating a rotating groove (10) with the discharging cavity (4) is embedded on the inner top of the discharging cavity (4), a discharging conveying belt (5) extending out of a processing table (1) is arranged in the discharging cavity (4), a feeding frame (14) is arranged on one side of the processing table (1), a feeding groove (13) is connected to the feeding frame (14), the other end of the feeding groove (13) extends to the upper side of the rotating disc (11), and a feeding conveying belt (15) is arranged on the feeding frame (14), a numerical control system (34) is arranged on the side wall of the processing table (1);
the fixing mechanism comprises a mounting groove (25) arranged on the inner side of the placing groove (21), a guide rod (26) is arranged in the mounting groove (25), two ends of the guide rod (26) are fixedly connected to the inner wall of the mounting groove (25), two movable blocks (27) are connected to the guide rod (26) in a sliding and sleeving manner, a tension spring (31) is sleeved on the guide rod (26), two ends of the tension spring (31) are respectively connected to the two movable blocks (27), two clamping blocks (23) located in the placing groove (21) are fixedly connected to the side walls of the two movable blocks (27), a limiting sliding groove (30) is formed in the position, close to the fixing column (12), of the disc surface of the rotating disc (11), a limiting sliding block (33) is connected to the limiting sliding groove (30) in a sliding manner, a resisting block (29) is fixedly connected to the upper end of the limiting sliding block (33), and two connecting rods (28) are rotatably connected to the upper end of the resisting block (29), one ends, far away from the abutting blocks (29), of the two connecting rods (28) are respectively connected to the two movable blocks (27) in a rotating mode, and flanges (22) corresponding to the abutting blocks (29) are fixedly sleeved on the fixed column (12).
2. A silicon wafer etching method according to claim 1, characterized in that the driving mechanism comprises a stepping motor (9) fixedly installed on the inner top wall of the driving chamber (2), a gear (8) is fixedly connected to the end of the output shaft of the stepping motor (9), a gear ring (7) extending into the driving chamber (2) is fixedly connected to the lower end of the rotating disc (11), and the gear (8) is meshed with the gear ring (7).
3. A silicon wafer etching method according to claim 1, characterized in that a retainer ring (24) is connected between two of said clamping blocks (23), said retainer ring (24) having an arc-shaped configuration.
4. A silicon wafer etching method according to claim 1, characterized in that a guide film (32) is attached to one end of the clamp block (23) away from the movable block (27), and the other end of the guide film (32) is attached to an opening of the placement groove (21).
5. The silicon wafer etching method according to claim 1, wherein the clamping blocks (23) are coated with anti-slip pads on the outer sides.
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| CN202011447375.4A CN112676705B (en) | 2020-12-09 | 2020-12-09 | Silicon wafer etching method |
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| CN202011447375.4A CN112676705B (en) | 2020-12-09 | 2020-12-09 | Silicon wafer etching method |
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| CN112676705B true CN112676705B (en) | 2022-09-13 |
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| EP4290564A1 (en) * | 2022-06-07 | 2023-12-13 | Siltronic AG | Gripper for transporting an upright semiconductor wafer and method for cleaning the semiconductor wafer |
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