CN112660692A - Automatic unloading machine conveying mechanism of going up of ALD - Google Patents
Automatic unloading machine conveying mechanism of going up of ALD Download PDFInfo
- Publication number
- CN112660692A CN112660692A CN202110112065.5A CN202110112065A CN112660692A CN 112660692 A CN112660692 A CN 112660692A CN 202110112065 A CN202110112065 A CN 202110112065A CN 112660692 A CN112660692 A CN 112660692A
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- Prior art keywords
- supporting frame
- transmission
- transmission shaft
- driving motor
- ald
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- 230000005540 biological transmission Effects 0.000 claims abstract description 68
- 238000007689 inspection Methods 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 12
- 238000000231 atomic layer deposition Methods 0.000 abstract description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000007599 discharging Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 230000003139 buffering effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Images
Abstract
The invention discloses a conveying mechanism for an ALD (atomic layer deposition) automatic loading and unloading machine, which comprises a supporting frame, a plurality of guide rollers, bearing supporting seats, a driving motor, a transmission shaft, a conveying roller and an in-place checking photoelectric switch, wherein the top end surface of the supporting frame is fixedly provided with a plurality of guide rollers through screws, one side of the end surface of the supporting frame is provided with the driving motor, one side of the top of the supporting frame and the central position of the supporting frame are fixedly provided with a plurality of bearing supporting seats, the transmission shaft is inserted and installed between the bearing supporting seats, and one end of the transmission shaft close to one side of the driving motor is connected with the; the two sides of the supporting frame are positioned at the outer side of the transmission shaft and are fixedly provided with in-place checking photoelectric switches through bolts; the conveying mechanism for the ALD automatic loading and unloading machine is stable in structure and firm in support; have stable transmission conveying capacity, simultaneously, the direction is effectual, can effectively avoid carrying the condition that the material takes place the skew.
Description
Technical Field
The invention relates to the field of automatic feeding and discharging machine equipment, in particular to a conveying mechanism for an ALD automatic feeding and discharging machine.
Background
When the silicon wafer is processed, an automatic feeding and discharging machine is used for feeding and discharging; in the conveying process, the conveying mechanism is used for conveying the silicon wafers; the conveying mechanism in the prior art is simple and crude in structure and single in function, and easily causes the conveying deviation of the silicon wafer during conveying, so that the silicon wafer is separated from the conveying mechanism, and therefore, the conveying mechanism for the ALD automatic loading and unloading machine is necessary to design.
Disclosure of Invention
The invention aims to provide a conveying mechanism for an ALD (atomic layer deposition) automatic loading and unloading machine, which is stable in structure and firm in support; have stable transmission conveying capacity, simultaneously, the direction is effectual, can effectively avoid carrying the condition that the material takes place the skew.
The purpose of the invention can be realized by the following technical scheme:
the utility model provides an automatic unloading machine conveying mechanism of going up of ALD, includes braced frame, guide roller, bearing support seat, driving motor, transmission shaft, delivery roller and the inspection photoelectric switch that targets in place, braced frame's top end face has a plurality of guide roller through screw fixed mounting, braced frame's terminal surface one side is provided with driving motor, braced frame's top one side and the equal fixed mounting of central position department have a plurality of bearing support seat, the transmission shaft is installed in the grafting between the bearing support seat, and is close to the one end and the driving motor of the transmission shaft of driving motor one side and be connected, two delivery roller are installed in the cup jointing in the outside of transmission shaft, braced frame's both sides are located the outside position department of transmission shaft and all have the inspection photoelectric switch.
As a further scheme of the invention: the top center of the supporting frame is provided with an auxiliary supporting frame, and six bottoms of the bearing supporting seats are fixedly connected with the top end face of the auxiliary supporting frame through bolt fixing.
As a further scheme of the invention: a transmission plate is fixedly mounted on one side end face of the supporting frame through bolts, and one end, close to a transmission shaft on one side of the driving motor, of the transmission plate penetrates through the transmission plate.
As a further scheme of the invention: the bottom of the driving motor is connected with a transmission, the transmission is fixedly installed on one side of the transmission plate, a driving shaft of the driving motor is connected with a power input shaft of the transmission, and a power output shaft of the transmission is fixedly connected with one end of a transmission shaft penetrating through the transmission plate.
As a further scheme of the invention: the end face center of the bearing supporting seat is fixedly provided with a transmission bearing, and the outer walls of the two ends of the transmission shaft are connected with the inner wall of the transmission bearing in a laminating mode.
As a further scheme of the invention: the end faces of two sides of the bottom of the supporting frame are fixedly provided with buffering supports through bolts.
The invention has the beneficial effects that: this automatic unloading machine conveying mechanism of going up of ALD, overall structure is stable, and it is firm to support, at the in-process of carrying, has stable transmission conveying capacity, simultaneously, through the guide roll of braced frame top both sides installation and the inspection photoelectric switch that targets in place, can effectively lead to the transport to the transported substance material, and it is effectual to lead, not only can effectively avoid transported substance material to take place the skew, moreover, also can guarantee the accuracy that the material was carried.
Drawings
In order to facilitate understanding for those skilled in the art, the present invention will be further described with reference to the accompanying drawings.
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is an overall top view of the present invention;
in the figure: 1. a support frame; 2. a guide roller; 3. a bearing support seat; 4. a drive motor; 5. a drive shaft; 6. a conveying roller; 7. and checking the photoelectric switch in place.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1-2, a conveying mechanism for an ALD automatic loading and unloading machine comprises a supporting frame 1, guide rollers 2, bearing supporting seats 3, a driving motor 4, a transmission shaft 5, conveying rollers 6 and an in-place checking photoelectric switch 7, wherein the top end surface of the supporting frame 1 is fixedly provided with a plurality of guide rollers 2 through screws, one side of the end surface of the supporting frame 1 is provided with the driving motor 4, one side of the top and the central position of the supporting frame 1 are respectively and fixedly provided with a plurality of bearing supporting seats 3, the top center of the supporting frame 1 is provided with an auxiliary supporting frame, and the bottoms of the six bearing supporting seats 3 are fixedly connected with the top end surface of the auxiliary supporting frame through bolt fixing, so that the supporting stability is; a transmission shaft 5 is inserted between the bearing supporting seats 3, one end of the transmission shaft 5 close to one side of the driving motor 4 is connected with the driving motor 4, a transmission plate is fixedly installed on one side end face of the supporting frame 1 through a bolt, one end of the transmission shaft 5 close to one side of the driving motor 4 penetrates through the transmission plate, a transmission is installed at the bottom of the driving motor 4 in a connected mode, the transmission is fixedly installed on one side of the transmission plate, a driving shaft of the driving motor 4 is connected with a power input shaft of the transmission, and a power output shaft of the transmission is fixedly connected with one end of the transmission shaft 5 penetrating through the transmission plate, so that power adjustment; the transmission is convenient; a transmission bearing is fixedly arranged in the center of the end face of the bearing supporting seat 3, and the outer walls of the two ends of the transmission shaft 5 are in fit connection with the inner wall of the transmission bearing, so that the transmission shaft 5 can conveniently rotate in the bearing supporting seat 3; two conveying rollers 6 are sleeved on the outer side of the transmission shaft 5, and in-place inspection photoelectric switches 7 are fixedly mounted on the two sides of the supporting frame 1 at the outer side positions of the transmission shaft 5 through bolts; the bottom both sides terminal surface of braced frame 1 all has the buffering support through bolt fixed mounting, is convenient for fix braced frame 1 installation, simultaneously, has good buffering effect to braced frame 1 more.
The working principle of the invention is as follows: the material to be conveyed is placed on a plurality of conveying rollers 6 at the top of the supporting frame 1, a driving motor 4 at one side of a transmission plate works, after the rotating speed is adjusted through a speed changer, a transmission shaft 5 connected with the transmission shaft is driven to rotate through a power output shaft, the transmission shaft 5 rotates in a transmission manner inside a bearing supporting seat 3, so that the conveying rollers 6 can be driven to rotate, the conveying material at the top of the conveying rollers 6 can be conveyed to the conveying rollers 6 at adjacent positions along with the continuous rotation of the conveying rollers 6, the driving motor 4 continuously works, so that the material at the top of the conveying rollers 6 can be conveyed, and the material to be conveyed can be guided through the guide rollers 2 in the conveying process, avoid the material to take place the skew, after the one end of braced frame 1 was carried to the material, can carry out the inspection that targets in place through inspection photoelectric switch 7 that targets in place to guarantee the accuracy that the material was carried.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.
Claims (6)
1. The conveying mechanism for the ALD automatic loading and unloading machine is characterized by comprising a supporting frame (1), guide rollers (2), bearing supporting seats (3), a driving motor (4), a transmission shaft (5), conveying rollers (6) and an in-place inspection photoelectric switch (7), wherein a plurality of guide rollers (2) are fixedly installed on the top end face of the supporting frame (1) through screws, the driving motor (4) is arranged on one side of the end face of the supporting frame (1), the bearing supporting seats (3) are fixedly installed on one side of the top of the supporting frame (1) and the central position of the supporting frame, the transmission shaft (5) is installed between the bearing supporting seats (3) in an inserting mode, one end, close to one side of the driving motor (4), of the transmission shaft (5) is connected with the driving motor (4), and the two conveying rollers (6) are installed on the outer side of the transmission shaft (5), and the two sides of the supporting frame (1) are positioned at the outer side positions of the transmission shaft (5) and are fixedly provided with in-place inspection photoelectric switches (7) through bolts.
2. The conveying mechanism for the ALD automatic loading and unloading machine, as recited in claim 1, wherein an auxiliary supporting frame is disposed at the top center of the supporting frame (1), and the bottoms of the six bearing supporting seats (3) are fixedly connected with the top end face of the auxiliary supporting frame through bolt fastening.
3. The conveying mechanism for the ALD automatic loading and unloading machine, according to claim 1, wherein a transmission plate is fixedly mounted on one side end face of the supporting frame (1) through a bolt, and one end of the transmission shaft (5) close to one side of the driving motor (4) penetrates through the transmission plate.
4. The conveying mechanism for the ALD automatic loading and unloading machine according to claim 3, wherein a transmission is connected and mounted at the bottom of the driving motor (4) and is fixedly mounted on one side of the transmission plate, a driving shaft of the driving motor (4) is connected with a power input shaft of the transmission, and a power output shaft of the transmission is fixedly connected with one end of a transmission shaft (5) penetrating through the transmission plate.
5. The conveying mechanism for the ALD automatic loading and unloading machine, as recited in claim 1, wherein a transmission bearing is fixedly installed in the center of the end face of the bearing support seat (3), and outer walls of two ends of the transmission shaft (5) are both attached to the inner wall of the transmission bearing.
6. The conveying mechanism for the ALD automatic loading and unloading machine, as recited in claim 1, wherein the bottom two side end faces of the supporting frame (1) are fixedly provided with buffer brackets through bolts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110112065.5A CN112660692A (en) | 2021-01-27 | 2021-01-27 | Automatic unloading machine conveying mechanism of going up of ALD |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110112065.5A CN112660692A (en) | 2021-01-27 | 2021-01-27 | Automatic unloading machine conveying mechanism of going up of ALD |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112660692A true CN112660692A (en) | 2021-04-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110112065.5A Pending CN112660692A (en) | 2021-01-27 | 2021-01-27 | Automatic unloading machine conveying mechanism of going up of ALD |
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| CN (1) | CN112660692A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1179336A (en) * | 1997-09-16 | 1999-03-23 | Daifuku Co Ltd | Driving roller conveyor |
| CN101525085A (en) * | 2009-04-02 | 2009-09-09 | 大连现代辅机开发制造有限公司 | Method and equipment for region-type raceway conveying |
| US20120076620A1 (en) * | 2010-09-28 | 2012-03-29 | Institute Of Nuclear Energy Research, Atomic Energy Council, Executive Yuan | Auxiliary feed-in mechanism |
| CN106956929A (en) * | 2017-04-21 | 2017-07-18 | 佛山市顺德区高力威机械有限公司 | Glass horizontal linear transfer table and its control method |
| CN107010358A (en) * | 2017-05-27 | 2017-08-04 | 杭州易闻科技有限公司 | A kind of weighing system based on intelligent conveying process |
| CN206511486U (en) * | 2016-12-28 | 2017-09-22 | 无锡明珠增压器制造有限公司 | Roller conveying device |
| CN110316540A (en) * | 2019-07-24 | 2019-10-11 | 江苏长虹机械设计院有限公司 | A kind of lower part rolling bed |
| CN209567463U (en) * | 2019-02-06 | 2019-11-01 | 山西焦煤集团有限责任公司东曲煤矿 | Adopt the shockproof firm banking of mine belt conveyor |
-
2021
- 2021-01-27 CN CN202110112065.5A patent/CN112660692A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1179336A (en) * | 1997-09-16 | 1999-03-23 | Daifuku Co Ltd | Driving roller conveyor |
| CN101525085A (en) * | 2009-04-02 | 2009-09-09 | 大连现代辅机开发制造有限公司 | Method and equipment for region-type raceway conveying |
| US20120076620A1 (en) * | 2010-09-28 | 2012-03-29 | Institute Of Nuclear Energy Research, Atomic Energy Council, Executive Yuan | Auxiliary feed-in mechanism |
| CN206511486U (en) * | 2016-12-28 | 2017-09-22 | 无锡明珠增压器制造有限公司 | Roller conveying device |
| CN106956929A (en) * | 2017-04-21 | 2017-07-18 | 佛山市顺德区高力威机械有限公司 | Glass horizontal linear transfer table and its control method |
| CN107010358A (en) * | 2017-05-27 | 2017-08-04 | 杭州易闻科技有限公司 | A kind of weighing system based on intelligent conveying process |
| CN209567463U (en) * | 2019-02-06 | 2019-11-01 | 山西焦煤集团有限责任公司东曲煤矿 | Adopt the shockproof firm banking of mine belt conveyor |
| CN110316540A (en) * | 2019-07-24 | 2019-10-11 | 江苏长虹机械设计院有限公司 | A kind of lower part rolling bed |
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Application publication date: 20210416 |