CN1126529A - Device for positioning IC - Google Patents
Device for positioning IC Download PDFInfo
- Publication number
- CN1126529A CN1126529A CN95190207A CN95190207A CN1126529A CN 1126529 A CN1126529 A CN 1126529A CN 95190207 A CN95190207 A CN 95190207A CN 95190207 A CN95190207 A CN 95190207A CN 1126529 A CN1126529 A CN 1126529A
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- Prior art keywords
- chip
- registration arm
- pin
- positioning table
- positioning
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
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- Environmental & Geological Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
Abstract
The present invention provides a rotary stage (53) having a narrow rectangular plate member (51) and legs (52) formed integrally at both ends of the plate member. A square IC-positioning plate (55) is mounted on the upper surface of the plate member of the rotary stage. To the rotary stage is attached a shaft (54) which rotatably supports the rotary stage and the IC-positioning plate. Positioning arms (57) are rotatably attached to support shafts (56) that are mounted on the inside of the legs of the rotary stage, and a flat acutator (58) is provided on the rear ends of the positioning arms to simultaneously rotate them. The positioning arms have such weight that their rear ends fall in their free state and come into a halt in a state where the IC contact portions formed at the ends of the positioning arms come into contact with the corners of he IC-positioning plate. Therefore, the IC placed on the IC-positioning plate is positioned by being depressed by the positioning arms' own weight. When the actuators come into contact with the rear end of the positioning arms to push them up, the IC contact portions of the positioning arms separate outwardly from the IC-positioning plate and move down, permitting the whole side surfaces of the positioning plate to be exposed.
Description
The present invention relates to a kind of chip positioner tool or device (to call locator in the following text), be used for (typically being chip in chip transmission and treatment system (being also referred to as the chip processing unit usually) transmission semiconductor device, be semiconductor integrated circuit) pass a test section, and according to test result chip is classified.Particularly, relate to a kind of chip positioner, this chip positioner can be to carrying out accurate in locating as having the very thin and easily deformable chips of pin such as a plurality of Fine Mapping pins, and chip pin is out of shape, so can make the chip location, carry out visual examination from the outside to chip, to check the pin distortion whether occurs.
The device that a kind of chip processing unit transmission that is used for adorning in normal use of semiconductor testing apparatus (so-called chip testing equipment) of test chip will be tested, promptly device under test (being commonly referred to DUT) carries out predetermined test.
Fig. 1 illustrates an a kind of example that is called the prior art of the chip processing unit of forcing the horizontal transport system.Shown in chip processing unit 10 comprise a loading area 11, a thermostatic chamber 20 and a unload zone 12.At loading area 11, the user is placed on the chip that will test 15 on the user disk 13 in advance and is transferred and is loaded in one and can bear on the test panel 14 of high/low temperature.Thermostatic chamber 20 comprises that one holds and tests test section 21 from the chip of loading area 11.At unload zone 12, be contained in chip under test 15 on the test panel 14 in test section 21, shift out through test successively thermostatic chamber 20 backs transferred to from test panel 14 one on the user disk 13 that will load once more (general normal the chip of test is classified and transfer on the relative users dish 13) according to test result data.According to the type of want test chip (as be contained in the direct insertion plane shell of a biserial surface mounted type chip or similar chip), each chip is loaded on the chip carrier, and the chip carrier that is loaded with chip then is placed on the user disk.
Test panel 14 moves in the mode of a circulation, and from loading area 11, order is returned loading area 11 then by thermostatic chamber 20 and unload zone 12.Specifically, the test panel 14 that is mounted with a plurality of (as 64) test chip of wanting 15 is transported to moist closet 22 thermostatic chamber 20 from loading area 11, and the chip 15 that is placed in this thermostatic chamber on the dish 14 is heated or cooled to a predetermined constant temperature.Generally speaking, moist closet is suitable for depositing a plurality of (as 9), and 14, one of test panels pile up on another, leave the bottom of lamination in as the test panel 14 that newly transports from loading area 11, and the test panel of topmost are transported to test section 21.
In moist closet 22, when test panel 14 when laminated bottom moves to the top, the chip 15 that test is heated or cooled a predetermined constant temperature.Then, chip 15 that has been heated or cooled and test panel are transported to test section 21 from moist closet 22 together when keeping constant temperature.In the test section 21, tested chip is electrically connected with socket (not shown) in being located at test section 21, and measures its electrical property.
After finishing above-mentioned test, tested chip 15 21 is transported to a downstream chamber (exit chamber) 23 from the test section, and in the downstream chamber 23, chip 15 returns to ambient temperature.With similar in thermostatic chamber 22, downstream chamber 23 also is suitable for depositing test panel is stacked.For example, can design like this, promptly in downstream chamber 23, when dependence test dish order when the top of lamination moves to the bottom, the temperature of test chip 15 is got back to ambient temperature.Then, the test chip 15 that is loaded on the test panel 14 is transported to unload zone 12.At unload zone 12, according to test result with test chip classification and reprint on the relative users dish 13.Send loading area 11 back at unload zone 12 emptied test panels 14,, loaded from user disk 13 again and gone up the chip 15 that to test, to repeat operating procedure same as described above at loading area 11.
Should be noted that between user disk and test panel 14 reprinting of test chip and chip to be measured is finished by the suction conveyer typically.This suction conveyer uses vacuum pump, can once draw one to a plurality of chips when transmitting.
Chip processing unit 10 shown in Figure 1 belongs to and is designed to transmit the type that is placed on the test chip on the dish, but also having of using at present is suitable for transmitting the chip processing unit of the chip type of independent test.
In illustrated example, test section 21 is set to make the test chip test earlier that is contained on the test panel 14 in the odd-numbered line for example, and then the chip of test even number line.Therefore, two test panels 14 have been shown in the test section 21.This be because apparatus for testing chip once the number of chips of surveying be limited (as 32 at the most), and in this example, the chip to be tested that test panel once loads is (as 64) too much.A test panel is suitable for holding 4 row * 16 row arrays totally 64 chips.
Another point it should be noted that other has a kind of chip processing unit, and in test section 21, chip to be measured once sequentially is transferred on one or several socket from dish.Test is when finishing, and chip is passed on back dish again.
As mentioned above, chip core piece treating apparatus to be measured 10 is transferred to the test section from loading area, and after finishing test, chip is transferred to unload zone 12.In the test section 21, chip to be measured with by for there being chip carrier socket to be electrically connected from the presumptive test waveform signal of apparatus for testing chip, carry out electric performance test.Chip to be measured and oneself survey chip when the core piece treating apparatus is carried, and in different positions, are transferred to another dish from a dish as required, transfer to grass-hopper or transfer to dish from grass-hopper from dish.For chip to be measured with surveyed chip, require reliable and location exactly in course of conveying, but distortion can not appear in each pin of chip.
Therefore, according to the intensity of the chip pin that will locate, existing different locator is used at the chip processing unit chip being positioned.For the chip to be positioned of pin, used a kind of as Fig. 2, chip positioning device or locator 30 shown in Figure 3 with relatively large intensity.This chip positioner 30 comprises the box-like frame 31 that is generally rectangle, and the pit 33 that this box-like frame 31 has an opening to make progress is to hold chip 32.Pit 33 comprises that a rectangle hangs down recess 33a, and this low recess 33a has four vertical sidewalls and a bottom surface, and its configuration is consistent with the package casing 32M and the pin 32L of chip 32, the outward-dipping stretching, extension that makes progress from the upper end of recess 33a upright side walls of its upper side wall portion 34.The chip 32 of locating carries or transfers to a position of locator 30 pits 33 tops from the another location, discharged from the suction pick device in this position, makes its whereabouts.Chip 32 falls into the 33a of concave bottom portion that holds pit 33 because gravity fall slides with its pin 32L along inclined wall 34 on inclined wall 34 as a result.Like this, chip 32 is placed the location.If the chip profile of locating is square, it is foursquare shape that self-evident this recess 33a forms plane graph, and four vertical sidewalls are arranged.
When the chip pin that will locate is softer relatively, the pin of chip of being located is out of shape with the inclined wall sliding contact of pit the time.Therefore, use Fig. 4, chip positioning device shown in Figure 5 or chip positioner to replace Fig. 2, gravity fall cake core locator 30 shown in Figure 3.
When wanting positioning chip, movable bottom plug portion 44 moves to chip " loaded " position as shown in Figure 4, the chip that will locate is by other local position of carrying or being transferred to locator 40 movable bottom plug portions 44 tops, under this place discharges from the suction pick device then.Therefore make chip 32 fall, drop on the upper surface of bottom plug portion 44 (as Fig. 4).From this position, movable bottom plug portion 44 moves downward together with contained chip, reaches chip deposit position (as Fig. 5), and at this place, chip 32 is placed the location.In this process, for example how much exceed the edge of bottom plug portion 44 upper surfaces on one side at it as fruit chip 32 pin 32L, then these pins move downward when reaching the chip deposit position and corresponding inclined lateral side 34 sliding contacts (as Fig. 5), but thereby chip 32 placement positioning.
Should be noted that when testing the chip that finishes is transported to unload zone 12 in the downstream chamber 23 from thermostatic chamber 20 and will carry out visual examination chip pin.This visual examination is generally undertaken by end (end face of the horizontal leg) shooting of chip pin being stretched out from the side with video camera.The situation of stretching out to four direction with chip pin is an example, owing to usually only take with a video camera, by rotary chip four times the pin order of stretching out from four sides of chip is taken, at every turn half-twist.Therefore, for carrying out visual examination, chip need be positioned at exactly predetermined inspection position.In prior art, above-mentioned locator 30,40 also is used for this purpose.Certainly, these locators are used for the various places of requirement chip location.
Along with the raising of the integrated degree of modern chips (density), the number of pins of stretching out from chip carrier increases, and (pin-pitch minimizing) reduced in the pin gap, and the thickness of pin reduces greatly.If utilize in aforementioned locator 30 or 40 pin of chip of locating and one or several arranged owing to other reason in locator or the course of conveying causes distortion, then chip will be divided in the waste product class at unload zone, this is because for example in surface mounted type chip, and the pin of one or several distortion will cause chip to be difficult to install on printed circuit board (PCB).Owing to be divided into four class qualified product and four class waste products as chips such as memories subtly at unload zone 12, thereby the chip pin visual examination is extremely important.
For chip positioner with Fig. 2 and formation shown in Figure 3, the chip that it not only can not be used for effectively pin-pitch being reduced positions, and owing to chip leaves in by in the pit 33 of side walls enclose all around, thereby can not carry out visual examination to chip pin.Therefore, need in next step, from pit 33, take out chip, to realize visual examination.This has not only increased step, and when chip is also further increased the possibility of chip pin distortion when pit takes out.
For chip positioner,, movable bottom plug portion 44 can carry out the chip pin visual examination by being moved to chip " loaded " position shown in Figure 4 with Fig. 4 and formation shown in Figure 5.But, discuss as above-mentioned, more or less laterally exceed outside the top surface edge of bottom plug portion 44 as the pin 32L of fruit chip 32, these pins are moving downward when reaching chip deposit position shown in Figure 5 so, will with sloped sidewall 34 sliding contacts.Therefore, when very close and pin was very soft when the chip pin spacing, pin was easily deformable, and the result causes can being marked as waste product in the visual examination in stage in the end.Another problem is, if be out of shape in the positioning action of chip pin before being transported to thermostatic chamber, and electrical ties failure between chip pin and the socket in the time of then may causing the electrical testing in follow-up test section 21, the result causes the interference to electrical testing.
The object of the present invention is to provide a kind of chip positioner, even chip has a plurality of thin and very little pins of spacing, this chip positioner also can reliably and accurately locate chip, and does not cause chip pin to be out of shape.
Another object of the present invention provides a kind of chip positioner, and this locator can reliably and easily carry out visual examination to chip pin by accurately locating the back shirtsleeve operation at chip, making.
According to the present invention, a kind of chip positioner that is used for the chip processing unit is provided, this chip processing unit is used to transmit chip by a test section, and classifies to surveying chip according to test result.Described chip positioner comprises: a base portion, comprise a long rod, and this long rod two ends longitudinally is formed with a pair of leg; One chip positioning table generally is contained in the central authorities of described excellent upper surface, be used for placing thereon the chip that will locate thereon; One supports the support of described base portion; A pair of inner surface from described relevant leg is generally the rotational pin that flatly stretches out relatively; A pair of registration arm is installed in respectively on each rotational pin, and to rotate around described rotational pin, each described registration arm has a chip adjacency section at its front end, and the rearward end of each the described registration arm that extends back from corresponding rotational pin is than its leading section weight; One actuator, be suitable for described registration arm rearward end against, drive the untie-sell that rotates simultaneously of described registration arm and rotate; The chip adjacent part of described registration arm is configured as when the rear end of described registration arm is in its lower free position at its front end, described front end stop motion, and lean against on the respective corners of described chip positioning table, and, described actuator contacts with the lower end of described registration arm when raising described rear end when being driven, described registration arm is rotated, so the chip adjacency section of described arm front end is outwards reduced downwards, and leaves described chip positioning table, is all come out in all sides of chip positioning table.
In a preferred embodiment, the support of the described base portion of described support is a column support, and described actuator is the plane tabular form, and an opening is wherein arranged, so that described column support to be installed loosely, and be suitable for respect to described support in the vertical direction motion.Described described base portion of column support rotatably support and described chip positioning table.Each described registration arm all is generally L shaped, described chip adjacency section is formed on the front end of a pin of described L shaped registration arm, and another pin of L shaped registration arm is by relevant described rotational pin rotatably support, each described adjacency section is formed has a groove that is generally the right angle, with cooperate with described chip positioning table respective corners between contact complementaryly.
Described base portion, chip positioning table and a pair of registration arm preferably are made into one group of external member, by this group of external member removably is installed on described support, may the chip of various models, configuration and size be carried out locating accurately and reliably.
In addition, described chip positioning table 55 profiles are square or rectangle, its overall dimension be a bit larger tham the external dimensions of the chip pin that will place thereon, thereby described angle can be used as the shut-down mechanism of the described registration arm respective chip of restriction adjacency section motion simultaneously, to prevent on pin, applying excessive power, cause to place the distortion of chip pin.
Owing to used said structure of the present invention, when the relative chip adjacency section of two registration arm only since self gravitation and mutually near the time, the right angle groove of described chip adjacency section pushes away on chip pin with a very little strength, and described chip adjacency section can be controlled by the speed that limits described actuator reduction to the speed of its closed position motion.At this moment, because each right angle groove pushes away simultaneously on a plurality of pins of each adjacent side of chip, compare with the positioner of prior art, the power that is applied on each pin reduces considerablely.Therefore be appreciated that locator of the present invention can position and can not make chip pin to be out of shape exactly to chip.
In addition, after chip is placed the location, by the actuator that moves up, can make the chip adjacency section outwards motion downwards of registration arm, disengage with the chip positioning table, all sides of chip that are placed on the positioning table all are exposed, thereby can use a video camera that chip pin is carried out visual examination at an easy rate.In addition, by rotating described column support, can carry out visual examination to the chip pin on the arbitrary side of chip.
Fig. 1 is for forcing the general layout of conventional chip processing unit of horizontal feed system form;
Figure 2 shows that the perspective elevation of a kind of prior art chip positioner example that is used for the bigger chip of pin intensity;
Figure 3 shows that the sectional view of Fig. 2 chips locator, its chips places therein;
Figure 4 shows that the sectional view of a kind of prior art chip positioner example that is used for the less chip of pin intensity, wherein this locator is in the position when chip is loaded;
Figure 5 shows that the sectional view of Fig. 4 chips locator, wherein this locator is in the position behind the positioning chip;
Figure 6 shows that the perspective elevation of chip positioner according to an embodiment of the invention, wherein this locator is in the position that chip is loaded;
Figure 7 shows that the perspective elevation of chip positioner shown in Figure 6, wherein this locator is in visual examination is carried out in permission to chip pin position;
Figure 8 shows that the perspective elevation of a turntable that uses in the chip positioner shown in Figure 6, a pair of registration arm and a chip positioning table.
Below with reference to accompanying drawing one embodiment of the present of invention are described in detail, wherein similarly parts are represented with identical label in the drawings.
Fig. 6 and Fig. 7 have shown the structure of chip positioner according to an embodiment of the invention.Though at this description of this invention only at the chip positioner that is used to be transferred on the device of checking the chip outward appearance on the chip path that being located at of unload zone 12 (see figure 1)s carry out electrical testing, but should be appreciated that the present invention can be applicable to any other place outside the visual examination in the chip processing unit.
As shown in Figure 6 and Figure 7, diagram chip positioning device or locator 50 comprise: a turntable or base 53, this turntable 53 comprises that one is basic for rectangular long by excellent 51, this length rod 51 has a pair of and long rod 51 legs that become one 52,52 (can only see one of them among the figure), and long rod 51 two legs with two ends are supporting; One is foursquare chip positioning table 55 substantially, generally is contained in excellent 51 upper face center places; A rotation axis 54 generally is contained in excellent 51 centre, supports turntable 53 and chip positioning table 55 to rotate at a horizontal plane with dwang; A pair of registration arm 57,57 is contained in rotationally on each rotational pin 56,56 and (sees one among the figure only), and rotational pin 56,56 stretches out to the other side mutually from the inner surface of relevant leg 52, to be used for the rotation of vertical direction; And a tabular planar actuator 58, rotation axis 54 can be moved along axis direction, and be suitable for rotating to drive rotate the simultaneously untie-sell 56 of two described arms against registration arm 57.
Rotation axis 54 is driven by the unshowned common drive unit that any one is suitable for, and can be turned to unspecified angle.When turntable 53 and positioning table 55 rotated with dwang 54, positioning table 55 can be positioned on arbitrary desired angular position.Positioning table 55 is chips from other local takes out and thereon estrade is put in the location, utilizes its wall can be further used as the retaining device of restriction registration arm 57 motions.For this consideration on the one hand, the external dimensions of positioning table 55 is a bit larger tham the size of the chip pin 32L outermost end that is placed in one, to prevent the chip pin distortion.
In illustrated embodiment, tabular planar actuator 58 has an opening that therefrom passes 59, so that rotation axis 54 to be installed loosely, and to be suitable for driving this bar by any suitable common drive unit (not shown) and to move both vertically.The chip positioning table 55 of embodiment shown in the figure is generally square from plane graph, and this is that its pin stretches out from four limits that it is generally foursquare molded case because the chip 32 that will place is a kind of surface mounted type chips.Even so, positioning table 55 naturally can be made change and tackle its shape and size mutually according to the size and dimension of the chip that will place.
In fact, as shown in Figure 8, turntable 53, chip positioning table 55 and a pair of registration arm 57 can make an assembly, and an alignment hole 62 passes turntable 53 and chip positioning table 55 so that dwang to be installed.This assembly is removable external member, and these external members assign to removably be fixed on the dwang 54, to rotate with dwang by the upper end that the bar installing hole is fixed on dwang.Therefore, can place the various chips of various models, shape and size by changing these external members.
It should be noted that, chip positioning table 55 is installed on the upper surface of rod 51 of turntable 53, the angular bisector at a pair of relative right angle (or drift angle) of platform 55 is with overlapping with the vertical line of rod 51 the longitudinal axis or parallel like this, and platform 55 another to the longitudinal axis coincidence of angular bisectors of relative right angle (or drift angle) and rod 51 or parallel.Among the embodiment shown in the figure, chip positioning table 55 is a square, and platform 55 is installed on the rod 51, and like this, a diagonal of square platform is parallel to the longitudinal axis of rod 51, and the longitudinal axis quadrature of another diagonal and rod 51.
Because described registration arm is identical on profile and structure to 57, so following is elaborated to one of them.In illustrated embodiment, registration arm 57 flat shapes are generally the L type, and the L type arm longer arm 57a of portion puts the position supporting therein by rotational pin 56, and can rotate on a perpendicular.L type registration arm 57 to be made into its thickness than the 57b of galianconism portion thicker than long-armed, and be integrally formed therewith a chip adjacency section 61 at its front end, this adjacency section 61 has the groove that is generally the right angle (one two wall be mutually 90 ° back into portion).Will discuss as described later, this configuration to the chip adjacency section 61 of registration arm 57 makes that described right angle groove can be adjacent with two diagonal angles of chip, so that chip is moved to the appropriate location in the time will positioning chip.As shown in Figure 8, the distribution of weight of each registration arm 57 makes that (that is actuator 58 reduced when this registration arm 57 only was in normal free turned position by rotational pin 56 supportings, disengage with registration arm), the lower end of the 57a of longer arm portion is in lower position, and adjacent than an angle of the right angle groove of the chip adjacency section 61 of the 57b of galianconism portion and chip positioning table 55.In other words, with respect to rotational pin 56, the 57a of the longer arm portion relatively galianconism 57b of portion is heavy.
The operation of the chip positioner of setting up according to foregoing description is as follows:
When not having chip to be placed on the positioning table 55, tabular planar actuator 58 is upwards driven by the drive unit that links to each other, and makes the upper surface of actuator 58 contact with the lower end of described registration arm to 57 57a of longer arm portion.Like this, along with actuator 58 moves upward, rise on the lower end of registration arm 57 57a of longer arm portion, registration arm 57 is rotated around separately rotational pin, the adjacent part 61 that therefore is positioned at front end outwards reduces downwards, disengages with positioning table 55.As shown in Figure 7, when actuator 58 rose to its extreme higher position, this a pair of chip adjacency section 61 was reduced to below the upper surface of positioning table 55, and leaves positioning table 55.In this position, the upper surface of the 57a of longer arm portion bottom part contacts with the lower surface of the long rod 51 of turntable 53, and like this, actuator 58 can not continue to move upward.
The chip that will place is placed on the positioning table 55 by other suitable conveying device or tumbler.In this operating process, in the time of on the position of chip on being transferred or being transferred to platform 55, discharged by (not shown) from suction means, like this, the position that chip drops on the positioning table 55 may be with respect to some skew (see figure 7) of platform on angle, vertical or horizontal direction.Having certain part when therefore, chip is on just being placed on platform 55 sometimes stretches out outside the profile of platform.
Begin by this state, along with actuator 58 moves down gradually, described a pair of registration arm is slowly rotated round about because the end portion of the 57a of its longer arm portion is heavier, makes that the chip adjacency section 61 of registration arm 57 fore-ends is also close mutually towards the motion of positioning table 55 directions.Along with the chip adjacency section 61 of registration arm 57 is close gradually mutually, they contact with the pin 32L of chip 32, and promote chip pin 32L with very little strength.The horizontal length size of right angle groove 60 each side is designed to make it can cover a plurality of chip pins and less than half of positioning table 55 1 edge lengths.Therefore, each side of right angle groove 60 all contacts with a plurality of pin 32L of chip 32, to promote chip, makes it to align with the center of positioning table 55.Simultaneously, because right angle groove 60 engages with the respective corners of chip 32, revised the angle position of chip 32 equally.Like this, the rotation that is appreciated that two registration arm 57 is owing to chip adjacency section 61 contacts and stops in the angle at the right angle relative with positioning table 55 respectively, thereby chip can be positioned on the desirable correct angle position that accurately aligns.Shown among Fig. 6 through being accurately positioned in the chip 32 on the positioning table 55 behind the aforesaid operations of locator.
After finishing positioning action, actuator 58 is return movement upwards, makes the lower end abutment of the 57a of longer arm portion of its upper surface and described a pair of registration arm 57.Along with actuator 58 continues to move up, cause that two registration arm 57 rotate around separately rotational pin 56, thereby the chip adjacency section 61 of its front end is outwards reduced downwards, disengage with positioning table 55.Because two chip adjacency sections 61 are lowered to below the upper surface of positioning table 55, and leave the positioning table (see figure 7), all coming out fully in all sides of the chip on the positioning table 55, like this, is easy to observe chip pin 32L from the outside.So, can make a video recording with the pin 32L configuration that is located at positioning table 55 1 sides as 70 pairs of chips 32 of camera head of CCD (charge coupled device) video camera.For this consideration, camera head 70 is positioned on the position of can be best the configuration of chip 32 pin 32L being made a video recording.Dwang 54 can rotate, and makes on the position before each side of chip 32 is positioned at video camera 70.Dwang keeps static in order to make a video recording in a period of time.
Video camera 70 is used for carrying out automatically visual examination, that is the configuration of chip pin 32L is inspected.Whether the image that video camera 70 is photographed, that is the image of chip pin is carried out image processing the pin bending occurs or contact appears in adjacent leads to check.Using video camera is technology well known in the art to the method that chip carries out visual examination, is not further described at this.
Although in the above-described embodiments, its structural design is along with the chip adjacent part 61 of registration arm 57 is more and more close mutually, they contact with the pin 32L of chip 32 and promote chip pin 32L with very little strength, so that chip is accurately positioned in desired position, but, should be understood that, if 61 of the chip adjacency sections of registration arm 57 are contacted with the package casing 32M of chip 32, thereby realize the location, so just can get rid of the possibility that when the location, makes the chip pin distortion fully.Yet the package casing of modern chips can be thinned to for example 1.2 millimeters.In this case, 61 of the chip adjacency sections of registration arm 57 are contacted be very difficulty with package casing 32M, this also is that the present invention considers just to promote pin by the very little strength that weight produced of registration arm 57 self, thereby prevents one of chip pin deformation reason.
Although to illustrated embodiment, illustrated that just it is used for the location operating position of stretching out the chip of chip pin to four direction to having, for those skilled in the art, obviously can be applicable to equally the chip that chip pin stretches out to both direction is positioned situation with visual examination according to locator of the present invention.Locator of the present invention also can be used for semiconductor device and other analog beyond the no pin-type chip that does not have pin, the chip are positioned.In addition, should be noted that, any place that need position chip outside the work station that chip is carried out visual examination, locator of the present invention all is useful.When not carrying out visual examination, needn't rotate chip usually, therefore do not need rotation axis and device of rotation driving.And, no matter whether carry out visual examination, as long as needn't rotational positioning platform 55, just do not need rotation axis and device of rotation driving.The required device that can merely support turntable 53 and chip positioning table 55 that only provides.
Can obviously find out by above-mentioned description, for locator of the present invention, along with the chip adjacency section 61 of registration arm 57 only because the weight of arm self is close mutually gradually, 60 of the right angle grooves of chip adjacency section 61 push away on the pin 32L of chip 32 with very weak strength.In addition, by control actuator 58 decrease speeds, can be any desired speed to the speed setting of its make position motion with chip adjacency section 61.In addition, because the right angle groove 60 of each chip adjacency section 61 all pushes away simultaneously on a plurality of pins of chip two adjacent sidewalls, compare with the positioner of prior art, the power that may act on each pin can obviously reduce, thereby accurate positioning chip and do not make chip pin distortion.In other words, the present invention can control to the minimum degree that does not make the chip pin distortion with the thrust of the chip adjacency section 61 of registration arm 57 according to the model of want positioning chip.
In addition, chip positioning table 55 external dimensions sizes is big slightly for the chip outline profile that will place thereon than institute, and like this, the relative angle of platform can be used as the shut-down mechanism that the corresponding registration arm of restriction is moved, thereby prevent the excessive power of effect on pin, cause the distortion of chip pin.
In case chip is had good positioning, by the actuator 58 that moves up, the chip adjacent part 61 of registration arm 57 can outwards move downwards, disengages with positioning table 55.Therefore, each side that is placed on the chip on the positioning table 55 is all exposed fully, uses video camera to carry out visual examination to chip pin at an easy rate.In addition, by rotating rotation axis 54, can carry out visual examination to the pin on any side of chip.
Claims (6)
1, a kind ofly be used to transmit the chip positioner that chip passes a test section and uses on to the chip processing unit of classifying through the chip of test according to test result, this chip positioner comprises:
One base portion comprises a long rod, and this long rod is formed with a pair of leg on the two ends longitudinally;
One chip positioning table generally is contained in the central authorities of described excellent upper surface, be used for placing thereon the chip that will locate thereon;
One supports the support of described base portion;
The a pair of rotational pin that stretches out relatively from the inner surface approximate horizontal ground of described relevant leg;
A pair of registration arm is installed in respectively on each rotational pin, and to rotate around described rotational pin, each described registration arm has a chip adjacency section at its front end, and the rearward end of each described registration arm is heavier than its leading section with respect to each related rotation pin;
One actuator is suitable for contacting with described registration arm rearward end, drives described registration arm and rotates around described rotational pin simultaneously;
The chip adjacent part of described registration arm is configured as when the rear end of described registration arm is in its lower free position at its front end, described front end stop motion, and lean against on the respective corners of described chip positioning table;
When being driven, described actuator contacts with the lower end of described registration arm when raising described rear end, described registration arm is rotated, so the chip adjacency section of described arm front end is outwards reduced downwards, and leave described chip positioning table, all come out in all sides of chip positioning table.
2, chip positioner according to claim 1, wherein, the described support of supporting described base portion is a column support, described actuator is the plane tabular form, one opening is wherein arranged, so that described column support to be installed loosely, and be suitable for respect to described support in the vertical direction motion.
3, chip positioner according to claim 2, wherein, described column support is supported described base portion and described chip positioning table rotationally.
4, chip positioner according to claim 1, wherein, each described registration arm all is roughly L shaped, described chip adjacency section is formed on the front end of a pin of described L shaped registration arm, and another pin of L shaped registration arm is by relevant described rotational pin rotatably support, each described adjacency section is formed has a groove that is generally the right angle, with cooperate with described chip positioning table respective corners between contact complementaryly.
5, chip positioner according to claim 1, wherein, described base portion, chip positioning table and a pair of registration arm are made into one group of external member, and described external member group is removably mounted on the described support.
6, chip positioner according to claim 1, wherein, described chip positioning table profile is square or rectangle, its overall dimension be a bit larger tham the external dimensions of the chip pin that will place thereon, thereby described angle can be used as the shut-down mechanism of the described registration arm respective chip of restriction adjacency section motion simultaneously.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP230669/94 | 1994-08-31 | ||
| JP23066994 | 1994-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1126529A true CN1126529A (en) | 1996-07-10 |
Family
ID=16911450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN95190207A Pending CN1126529A (en) | 1994-08-31 | 1995-08-30 | Device for positioning IC |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP2831853B2 (en) |
| KR (1) | KR0171485B1 (en) |
| CN (1) | CN1126529A (en) |
| DE (1) | DE19580944C2 (en) |
| MY (1) | MY131968A (en) |
| WO (1) | WO1996007201A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102795363A (en) * | 2012-08-24 | 2012-11-28 | 深圳市华腾半导体设备有限公司 | Component positioning method and device |
| CN105300333A (en) * | 2015-11-24 | 2016-02-03 | 杭州士兰微电子股份有限公司 | Chip tester, and chip tester monitoring device and method |
| CN114074204A (en) * | 2022-01-19 | 2022-02-22 | 深圳市恒讯通电子有限公司 | Intelligent debugging positioning mechanism is used in circuit board processing |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10358691B4 (en) * | 2003-12-15 | 2012-06-21 | Qimonda Ag | A method of loading a socket device with a corresponding semiconductor device |
| DE10359648B4 (en) | 2003-12-18 | 2013-05-16 | Qimonda Ag | A socket device for use in testing semiconductor devices, and an apparatus and method for loading a socket device with a corresponding semiconductor device |
| DE102005033870A1 (en) * | 2005-07-20 | 2007-01-25 | Robert Bosch Gmbh | Device for removing pharmaceutical products, e.g. tablets has unit for electromagnetically and/or pneumatically producing mechanical impact force that is caused by products in order to feed products to a suction device |
| DE102007022690B4 (en) * | 2007-05-11 | 2010-11-18 | Multitest Elektronische Systeme Gmbh | Centering device for electronic components |
| JP2020034368A (en) * | 2018-08-29 | 2020-03-05 | セイコーエプソン株式会社 | Electronic component conveyance device, unit for electronic component conveyance, and electronic component inspection device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6375905A (en) * | 1986-09-19 | 1988-04-06 | Hitachi Ltd | Positioning device for parts |
| DD300993A7 (en) * | 1989-02-20 | 1992-09-17 | Halbleiterwerk Frankfurt Gmbh | ARRANGEMENT FOR LOCATION POSITIONING AND FORMING OF GEHAEUSEN |
-
1995
- 1995-08-30 WO PCT/JP1995/001715 patent/WO1996007201A1/en active Application Filing
- 1995-08-30 MY MYPI95002571A patent/MY131968A/en unknown
- 1995-08-30 KR KR1019950704760A patent/KR0171485B1/en not_active IP Right Cessation
- 1995-08-30 DE DE19580944T patent/DE19580944C2/en not_active Expired - Fee Related
- 1995-08-30 CN CN95190207A patent/CN1126529A/en active Pending
- 1995-08-30 JP JP7526251A patent/JP2831853B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102795363A (en) * | 2012-08-24 | 2012-11-28 | 深圳市华腾半导体设备有限公司 | Component positioning method and device |
| CN102795363B (en) * | 2012-08-24 | 2015-04-08 | 深圳市华腾半导体设备有限公司 | Component positioning method and device |
| CN105300333A (en) * | 2015-11-24 | 2016-02-03 | 杭州士兰微电子股份有限公司 | Chip tester, and chip tester monitoring device and method |
| CN114074204A (en) * | 2022-01-19 | 2022-02-22 | 深圳市恒讯通电子有限公司 | Intelligent debugging positioning mechanism is used in circuit board processing |
| CN114074204B (en) * | 2022-01-19 | 2022-05-20 | 深圳市恒讯通电子有限公司 | Intelligent debugging positioning mechanism is used in circuit board processing |
Also Published As
| Publication number | Publication date |
|---|---|
| WO1996007201A1 (en) | 1996-03-07 |
| JP2831853B2 (en) | 1998-12-02 |
| DE19580944T1 (en) | 1998-01-22 |
| KR0171485B1 (en) | 1999-03-30 |
| DE19580944C2 (en) | 1999-07-29 |
| MY131968A (en) | 2007-09-28 |
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| C01 | Deemed withdrawal of patent application (patent law 1993) | ||
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