CN112638608A

CN112638608A - Scribing head and scribing device

Info

Publication number: CN112638608A
Application number: CN201980057020.3A
Authority: CN
Inventors: 中垣智贵
Original assignee: Mitsuboshi Diamond Industrial Co Ltd
Current assignee: Mitsuboshi Diamond Industrial Co Ltd
Priority date: 2018-09-28
Filing date: 2019-08-26
Publication date: 2021-04-09
Also published as: WO2020066411A1; TW202012327A; KR20210039434A; JP7095913B2; JPWO2020066411A1

Abstract

So that no force in the direction of crossing the axis is applied to the bar during the scribing process. The scribing head (1) of the present invention comprises: a holder (6) that holds the scribing tool (4); a cylinder (3) for moving the holder (6) toward and away from the workpiece; and a support body (7) that supports the holder (6) and the cylinder (3), wherein the cylinder (3) has a cylinder body (3b) and a shaft body that is configured to be able to advance and retreat from the cylinder body (3b), the shaft body has a structure that is air-tight with respect to the cylinder body (3b), the holder (6) is moved closer to the workpiece by advancing the shaft body from the cylinder body (3b), the holder (6) is moved away from the workpiece by retreating the shaft body toward the cylinder body (3b), and the tip of the shaft body is not coupled to the holder (6), and only a force in the longitudinal direction of the shaft body can be transmitted to the holder (6).

Description

Scribing head and scribing device

Technical Field

The present invention relates to a scribing head for scribing a brittle material substrate such as a semiconductor or glass substrate and a scribing apparatus using the same, and more particularly, to a technology capable of accurately forming a scribing line on a brittle material substrate by suppressing a load (torque) from acting on a rod of a cylinder for pressurizing a scribing tool in a direction intersecting an axis.

Background

Conventionally, in a process of manufacturing a flat panel display such as a liquid crystal display panel or a liquid crystal projector substrate, a mother glass substrate is cut into panels of a predetermined size after being bonded.

When cutting a brittle material substrate such as a mother glass substrate, a scribing step of forming a scribe line (vertical crack) on the substrate and a breaking step of completely penetrating the vertical crack are performed. In the scribing step, a scribing head is used for forming a scribing line.

Specifically, the scribing head includes a scribing tool using a scribing wheel, a diamond tip, or the like. The scribing tool is held by the holder so that the cutting edge faces downward, and is pressed toward the substrate by the cylinder. That is, in the scribing head, a cylinder is used to apply a load to the brittle material substrate by the scribing tool to form a vertical crack in the brittle material substrate.

Recently, however, the brittle material substrate to be scribed is becoming thinner, and scribing at a low contact pressure, i.e., a low processing pressure, is increasing.

In this case, the problem is the characteristics of the cylinder.

A typical cylinder is provided with a seal member made of metal, rubber, or the like between a cylinder body and a rod (shaft body) that can advance and retreat within a range of a stroke determined by the cylinder body, to prevent air inside the cylinder from being discharged. With this seal member, a certain degree of sliding resistance is inevitably generated to the rod when the rod advances and retreats. Therefore, when the lever is advanced or retracted, the thrust of the lever varies due to uncontrollable sliding resistance, and it is difficult to advance the lever at a low contact pressure to perform precise control.

In order to overcome such a drawback of the conventional type, it has been proposed to use a cylinder having an air seal system (also referred to as an air bearing mechanism).

In the air cylinder having the air seal system, a seal member formed of rubber or the like is not present between the cylinder main body and the rod, and the rod is floated from the cylinder main body by air. Therefore, the sliding resistance of the rod with respect to the cylinder main body during the advance and retreat is zero, and the rod can be pushed with a small force or can be precisely controlled.

As a scribing head using an air cylinder of an air seal system (air bearing mechanism), there is one shown in patent document 1.

That is, patent document 1 discloses a glass cutting device including a cutter (scribing tool) that moves relatively on a surface of a glass substrate to be cut. The cutter is directly provided at the tip of the rod of the cylinder, and is configured to abut against the glass substrate surface at a predetermined pressure by the force of the cylinder.

Documents of the prior art

Patent document

Patent document 1: japanese laid-open patent publication No. 9-295822

Disclosure of Invention

Problems to be solved by the invention

However, in the glass cutting device of patent document 1, when the cutter is moved along the surface of the glass substrate, a force (moment) perpendicular to the longitudinal direction of the rod is applied to the support shaft of the cutter, that is, the rod of the air cylinder.

However, the cylinder of patent document 1 supports the rod in an air-tight manner so that the rod floats up with respect to the cylinder body. The operation of applying the above-described moment to the lever in the floating state is the most unavoidable operation, and there is a possibility that the lever does not smoothly operate or the cylinder itself is damaged in a serious case due to the force in the direction in which the axis intersects, that is, the moment with respect to the lever.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a scribing head and a scribing apparatus which have high responsiveness under low load and strong torque without applying torque to a rod of an air-tight cylinder even when a scribing tool is moved along a surface of a brittle material substrate.

Means for solving the problems

In order to solve the above problems, the scribing head of the present invention adopts the following technical means.

That is, the scribing head of the present invention includes: a holder for holding a scribing tool for scribing a workpiece; a holder holding member provided with the holder at a tip end; a cylinder that applies a load to the scribing tool; and a support body that supports the scribing head and the air cylinder, wherein the air cylinder has a cylinder body and a shaft body, the shaft body is configured to be movable back and forth from the cylinder body by air introduced into the cylinder body, the shaft body is configured to be air-tight with respect to the cylinder body, a load is applied to the workpiece from the scribing head by the shaft body moving forward from the cylinder body, the load applied to the workpiece is removed from the scribing head by the shaft body moving backward to the cylinder body, and a tip end of the shaft body is configured to be not coupled to the holder, and only a force in a longitudinal direction of the shaft body can be transmitted to the scribing tool.

In addition, it is preferable that the retainer has a flat contact surface on a side facing the shaft, a tip end of the shaft is formed as a ball contact, and the ball contact is in point contact with the contact surface.

The scribing apparatus of the present invention is a scribing apparatus for scribing a workpiece, and the scribing apparatus of the present invention is characterized by comprising: a scribe head including a holder for holding a scribe tool, a holder having the holder provided at a distal end thereof, a cylinder for moving the holder closer to and away from a workpiece, and a support body for supporting the holder and the cylinder; a table on which a workpiece is placed; and a driving mechanism that moves the scribing head and the table relative to each other, wherein the cylinder includes a cylinder body and a shaft body that is movable back and forth from the cylinder body by air introduced into the cylinder body, the shaft body is configured to be air-tight to the cylinder body, the holder is moved closer to the workpiece by moving the shaft body forward from the cylinder body, and the holder is moved away from the workpiece by moving the shaft body backward from the cylinder body, and a tip end of the shaft body is not coupled to the holder, and only force in a longitudinal direction of the shaft body is transmitted to the holder.

Effects of the invention

According to the scribing head and the scribing apparatus of the present invention, even if the scribing tool is moved along the surface of the brittle material substrate, the brittle material substrate can be precisely scribed with a minute force without applying a torque to the rod of the air cylinder as the pressing mechanism.

Drawings

Fig. 1 is a diagram showing a scribing step of a brittle material substrate by using a scribing head.

Fig. 2 is a front view of the scribing head of the first embodiment.

Fig. 3 is a diagram comparing a backward movement state and a forward movement state of the cylinder of the first embodiment at a cross section taken along line a-a of fig. 2.

Fig. 4 is an enlarged view of a part of the structure of the scribing head according to the second embodiment.

Detailed Description

[ first embodiment ]

Hereinafter, an embodiment of the scribing head 1 of the present invention will be described in detail based on the drawings.

Fig. 1 schematically shows a substrate B (brittle material substrate as a workpiece) cutting process performed using the scribing head 1 of the present invention.

The scribing head 1 is provided in a scribing apparatus (not shown) provided with a table 2 on which a substrate B is placed. A beam (not shown) is provided on the table 2 in a horizontal direction, and the scribing head 1 is movable in the horizontal direction along the beam by a driving mechanism (not shown) for relatively moving the scribing head 1 and the substrate B. The scribing head 1 can also be moved in the vertical direction by a mechanism such as a servo motor. The scribing head 1 is also structured as follows: the scribing tool 4 is pressed toward the substrate B by generating a downward force using a cylinder 3 described later, whereby a scribing line can be formed on the substrate B.

Fig. 2 shows only the scribing head 1 in an enlarged scale.

As shown in fig. 2, the scribing head 1 of the first embodiment includes: a holder 5 that holds a scribing tool 4 that scribes a substrate B; a holder 6 provided with a holder 5 at a tip end; a cylinder 3 that pressurizes the holder 6; and a support body 7 that supports the holder 6 and the cylinder 3.

The support body 7, the holder 6, the holder 5, the scribing tool 4, and the cylinder 3 will be described in detail.

The left-right direction in fig. 2 is the right-left direction in describing the scribe head 1. The vertical direction in fig. 2 is used as the vertical direction for explaining the scribing head 1. The left-right direction in fig. 3 is the front-back direction in describing the scribing head 1. These directions are properly illustrated in the drawings.

As shown in fig. 2, the support body 7 is a plate-shaped member having a rectangular shape when viewed from the front, and is a member to which the holder 6 and the cylinder 3 constituting the scribing head 1 are attached. A cylinder 3 is provided on the upper side of the front surface of the support body 7, and a holder holding member 6 is provided on the lower side of the front surface of the support body 7.

Specifically, as shown in fig. 3, a protruding portion 8 protruding forward is formed slightly above the center of the support body 7 in the vertical direction in a side view. A through hole 9 penetrating the extension portion 8 in the vertical direction is formed in the center of the extension portion 8. Further, the cylinder 3 is attached to the upper side of the extension portion 8 in such a posture that the tip end of the rod 3a is directed downward (downward standing posture). That is, when the rod 3a (shaft body) of the cylinder 3 is extended, the tip end of the rod 3a passes through the through hole 9 and extends downward of the protruding portion 8, and the retainer holder 6 is pushed downward.

The holder 6 is a substantially angular member formed of metal such as aluminum, and is provided to be movable in the vertical direction with respect to the support body 7.

Specifically, as shown in fig. 3, a rod contact member 10 that contacts the tip end of the rod 3a of the cylinder 3 is provided on the upper portion of the holder 6. Further, a guide body 11 for guiding the holder 6 in the vertical direction with respect to the support body 7 is provided on the rear surface (the surface facing the front surface of the support body 7) of the holder 6. The holder 6 and the guide body 11 constitute a thrust transmission mechanism for transmitting the thrust from the cylinder 3 to the scribing tool 4.

A mounting hole 12 is provided in a lower portion of the holder 6, and a holder joint for holding the holder 5 can be mounted in the mounting hole 12, and the holder joint is fixed to be detachable by fastening a fastening tool using a screw or the like. The holder joint is a member provided with a bearing at an upper portion thereof and holding the holder 5 by a screw or the like at a lower portion thereof. The holder 5 held by the holder joint is an angular member made of metal or the like, and a groove capable of fixing the scribing tool 4 after the scribing tool 4 is inserted is formed in the lower surface of the holder 5.

The scribing tool 4 is a member for forming a scribing line on the substrate B. For the scribing tool 4, various tools such as a scribing wheel, a diamond tip, and the like can be used.

The holder 6 is movable slidably in the vertical direction with respect to the support body 7 via the guide body 11.

The guide body 11 is a member that guides the holder 6 in the vertical direction with respect to the support body 7, and is provided between the lower portion of the front surface of the support body 7 and the rear surface of the holder 6.

Specifically, as shown in fig. 3, the guide body 11 includes: a guide rail 13 formed on the front surface of the support body 7 in the vertical direction; and a slider 14 that is movable in the vertical direction along the laying direction of the guide rail 13 and is attached to the rear surface of the holder holding member 6. Further, an upper positioning member 15 provided at an upper end of the guide rail 13 is provided to restrict upward movement of the slider 14.

The guide rail 13 is screwed to the support body 7, and the slider 14 is screwed to the holder holding member 6. When the slider 14 moves in the up-down direction with respect to the guide rail 13, the holder holding member 6 moves in the up-down direction with respect to the support body 7.

Further, the present invention is characterized in that the distal end of the rod 3a advanced and retracted from the cylinder 3 is not connected to the holder 6, and only the force in the longitudinal direction of the rod 3a can be transmitted to the holder 6.

In order to realize this structure, the tip of the lever 3a is provided as a ball contact, and a lever contact member 10 is provided on the upper portion of the holder 6. The lever contact member 10 is a member having a bolt shape and is threadably attached to the upper surface of the holder 6. The upper surface of the head of the rod contact member 10 is formed flat by polishing, and can be brought into contact with the tip end of the rod 3a of the cylinder 3. Since the tip of the rod 3a is formed in a hemispherical shape, the tip of the rod 3a is brought into point contact with the head of the rod contact member 10. Further, since the head of the lever contact member 10 is ground, frictional resistance between the distal end portion of the lever 3a and the head of the lever contact member 10 can be reduced. Further, since the upper surface of the head portion of the lever contact member 10 is flat, the force from the lever 3a can be reliably transmitted to the holder in the longitudinal direction. The shape may be any shape as long as the frictional resistance at the contact surface between the distal end portion of the rod 3a and the rod contact member 10 is small and the force in the longitudinal direction is stable.

On the other hand, as shown in fig. 2, a vertically long spring member 16 is provided on the left side of the holder 6 as viewed from the front. The lower end of the spring member 16 is attached to the left upper surface of the holder 6, and the upper end of the spring member 16 is coupled to the support body 7 via an attachment member 17.

The spring member 16 is configured to exhibit an acting force that acts on the holder 6 on the upper side. With such a configuration, it is possible to prevent the weight of the retainer holder 6 from being further added to the load applied by the cylinder 3 during scribing under a low load (to cancel the weight).

However, in the scribing head 1 of the first embodiment, the cylinder 3 is provided downward directly above the holder 6 so that the rod 3a advances and retreats in the vertical direction.

The cylinder 3 includes a cylinder body 3b and a rod 3a (shaft body), the rod 3a is freely advanced and retreated from the cylinder body 3b by the air introduced into the cylinder body 3b, and the rod 3a has a structure (air bearing mechanism) air-sealed with respect to the cylinder body 3 b.

Since the air-tight system is adopted, high-pressure air exists in the gap between the rod 3a and the cylinder body 3b, and the rod 3a is in a floating state. Therefore, even if the rod 3a is advanced and retreated from the cylinder main body 3b, sliding resistance is not generated with respect to the rod 3a, and the rod 3a can be advanced and retreated from the cylinder main body 3b with a minute force by precise control.

The tip of the rod 3a is formed into a hemispherical shape (spherical contact) and is in a point contact state with respect to the head (head which is a flat surface) of the rod contact member 10, and the cylinder 3 and the holder 6 are in a non-coupled state.

In the scribing head 1 of the first embodiment described above, the tip end (lower end) of the rod 3a is formed in a spherical shape facing downward. On the other hand, the upper surface of the holder 6 is formed as a flat surface and can be in contact with the curved distal end of the rod 3a in a point-like manner. If the structure is adopted such that the rod 3a and the holder 6 are in point contact with each other, the holder 6 can move in the horizontal direction with respect to the rod 3a even though force can be transmitted in the vertical direction from the rod 3a toward the holder 6, and even if a moment (for example, force in the direction of the axis crossing at the time of scribing) acts on the rod 3a of the holder 6, the moment is not transmitted to the rod 3a and the holder 6.

Since the rod 3a of the air-tight cylinder 3 is in a floating state with respect to the cylinder body 3b, when a moment acts on the rod 3a, the rod 3a is twisted to adversely affect the cylinder body 3b, and in a serious case, the cylinder 3 itself may be damaged. However, in the case of the holder 6 of the first embodiment, the distal end of the rod 3a and the holder 6 are formed so as not to be coupled, and only the force in the longitudinal direction of the rod 3a can be transmitted to the holder 6, and the influence of the moment can be eliminated. Therefore, even if the scribing tool 4 is moved along the surface of the substrate B, the substrate B can be precisely scribed with a minute force without applying a force in the direction of the axis crossing the rod 3 a.

Note that, as described in the second embodiment, a method of making the rod 3a of the cylinder 3 and the retainer holder 6 in a non-coupled state is also conceivable.

[ second embodiment ]

Fig. 4 is an enlarged view of a part of the structure of the scribing head according to the second embodiment. The holder 6 of the second embodiment is of a cantilever type, and is configured to be swung to prevent a moment applied to the scribing tool 4 from being transmitted to the rod 3a of the cylinder 3.

As shown in fig. 4, the holder holding member 6 of the second embodiment is provided in a hook shape with the longitudinal direction being horizontal. The holder 6 has a left end supported by the support body 7 to be swingable about a swing shaft 18 oriented in the front-rear direction, and a right end slightly swingably in the up-down direction. A mounting hole 12 is formed in the lower surface of the holder 6, the holder joint can be mounted in the mounting hole 12, and the tip end of the rod 3a of the cylinder 3 contacts the upper surface of the holder 6.

In this way, the scribing head 1 moves up and down around the swinging shaft 18, thereby absorbing the moment applied to the scribing tool 4 and preventing the moment from being transmitted to the rod 3a of the cylinder 3.

In order to more effectively prevent the transmission of torque to the rod 3a, the rolling elements 19 may be provided at the tip end of the rod 3 a. By bringing the rod 3a into contact with the upper surface of the scribing head 1 via the rolling bodies 19, even if the holder 6 swings greatly, the contact point of the rod 3a with respect to the holder 6 can be changed in position in the left-right direction, and the transmission of torque to the rod 3a can be prevented as much as possible.

Thus, even in the scribing head 1 of the second embodiment, even if the scribing tool 4 is moved along the surface of the substrate B, the substrate B can be precisely scribed with a minute force without applying a force in the direction of the axis crossing the rod 3 a.

Since the other configurations are substantially the same as the scribing head 1 of the first embodiment, the scribing head 1 of the second embodiment is not described in detail.

As described above, the scribing head of the present invention includes: a holder for holding a scribing tool for scribing a workpiece; a holder holding member provided with a holder at a tip end; a cylinder that brings the holder closer to the workpiece; and a support body that supports the holder and the cylinder. The cylinder includes a cylinder body and a shaft body that is configured to be freely advanced and retracted from the cylinder body by air introduced into the cylinder body, and the shaft body is air-sealed with respect to the cylinder body. In addition, the following features are also provided: the shaft body advances from the cylinder body to bring the holder closer to the workpiece, and the tip of the shaft body is not connected to the holder, and only a force in the longitudinal direction of the shaft body can be transmitted to the holder.

The scribing head is characterized in that the scribing head has a flat contact surface on the side facing the shaft, the tip of the shaft is formed as a spherical contact, and the spherical contact makes point contact with the contact surface.

The scribing device of the present invention is characterized by comprising the scribing head, and the scribing device of the present invention is further characterized by comprising: a scribing head including a holder for holding a scribing tool, a holder having the holder provided at a tip end thereof, a cylinder for moving the holder closer to and away from a workpiece, and a support body for supporting the holder and the cylinder; a table on which a workpiece is placed; and a drive mechanism which relatively moves the scribing head and the workbench, wherein in the scribing head, the air cylinder is provided with a cylinder body and a shaft body, the shaft body freely advances and retreats from the cylinder body under the action of air introduced into the cylinder body, the shaft body is provided with a structure sealed relative to the cylinder body, the shaft body advances from the cylinder body to enable the retainer to approach relative to the processed object, the top end of the shaft body is not connected with the retainer, and only force along the length direction of the shaft body can be transmitted to the retainer.

The embodiments disclosed herein are to be considered in all respects as illustrative and not restrictive. In particular, in the embodiments disclosed herein, the values that can be easily assumed by a person skilled in the art are adopted for items that are not explicitly disclosed, such as operating conditions, various parameters, and the size, weight, volume, and the like of the structure, without departing from the range that the person skilled in the art normally performs.

Description of reference numerals:

1 scribing head

2 working table

3 air cylinder

3a rod (shaft body)

3b Cylinder body

4 scribing tool

5 holder

6 holder

7 support body

8 projecting part

9 through hole

10-bar contact member

11 guide body

12 mounting hole

13 guide rail

14 slide block

15 upper side positioning member

16 spring component

17 mounting member

18 oscillating axle

19 rolling element

And B, a substrate.

Claims

1. A scribing head, comprising: a holder for holding a scribing tool for scribing a workpiece; a holder holding member provided with the holder at a tip end; a cylinder that brings the holder closer to the workpiece; and a support body that supports the holder and the cylinder, the scribing head being characterized in that,

the cylinder includes a cylinder body and a shaft body that is configured to be freely advanced and retracted from the cylinder body by air introduced into the cylinder body and is air-sealed with respect to the cylinder body,

the retainer holding member is brought close to the workpiece by advancing the shaft body from the cylinder main body,

the tip of the shaft body is not connected to the retainer holder, and only a force in the longitudinal direction of the shaft body can be transmitted to the retainer holder.

2. The score head of claim 1,

the scribing head has a flat contact surface on a side facing the shaft, a tip end of the shaft is formed as a ball contact, and the ball contact makes point contact with the contact surface.

3. A scribing device for scribing a processed object, the scribing device is characterized in that,

the scribing device comprises:

a scribe head including a holder for holding a scribe tool, a holder having the holder provided at a distal end thereof, a cylinder for bringing the holder close to a workpiece, and a support body for supporting the holder and the cylinder;

a table on which a workpiece is placed; and

a drive mechanism that moves the scribing head and the table relative to each other,

in the scribing head, the cylinder includes a cylinder body and a shaft body, the shaft body is freely advanced and retreated from the cylinder body by the action of air introduced into the cylinder body, and the shaft body is air-sealed with respect to the cylinder body,