CN112630884B - Waveguide grating antenna array for optical phased array and preparation method thereof - Google Patents
Waveguide grating antenna array for optical phased array and preparation method thereof Download PDFInfo
- Publication number
- CN112630884B CN112630884B CN202011529276.0A CN202011529276A CN112630884B CN 112630884 B CN112630884 B CN 112630884B CN 202011529276 A CN202011529276 A CN 202011529276A CN 112630884 B CN112630884 B CN 112630884B
- Authority
- CN
- China
- Prior art keywords
- waveguide grating
- grating antenna
- substrate
- waveguide
- array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12038—Glass (SiO2 based materials)
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12061—Silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D30/00—Reducing energy consumption in communication networks
- Y02D30/70—Reducing energy consumption in communication networks in wireless communication networks
Abstract
The invention provides a waveguide grating antenna array for an optical phased array and a preparation method thereof, wherein the waveguide grating antenna array comprises the following steps: a substrate; the waveguide grating antenna array is positioned on the substrate, and each waveguide grating antenna comprises a substrate waveguide and a plurality of grating teeth; the cover layer is covered on the waveguide grating antenna array and the substrate, and the cover layer positioned on the waveguide grating antenna array is in a space curved surface shape, and the refractive index of the cover layer is between the refractive indexes of the waveguide grating antenna and the air. By covering the cover layer on the waveguide grating antenna and enabling the cover layer on the waveguide grating antenna to be in a space curved surface shape, when a light beam emitted from the waveguide grating antenna passes through an interface between the curved surface part and air, according to the refraction law of the light, the light beam emergence angle is increased, so that the light power emitted from the waveguide grating antenna is distributed to a larger angle range, the optical phased array still has larger emergence power when scanning to a large angle, and the performance of the optical phased array when the light beam is turned to a large angle is improved.
Description
Technical Field
The invention relates to the technical field of photoelectricity, in particular to a waveguide grating antenna array for an optical phased array and a preparation method thereof.
Background
An optical phased array (Optical Phased Arrays, OPA) based on waveguide technology is one of the important components of a photonic integrated circuit. The solid state beamforming and steering capabilities provided by the optical phased array play a critical role in free space applications, including optical communications, holographic displays, light detection and ranging (LiDAR), and the like. Optical phased array technology has gained widespread attention and rapid development in recent years, thanks to advances in silicon photonics. Due to the low integration density of the emitting units in the array, the two-dimensional optical phased array has a large number of higher-order diffraction, and meanwhile, due to the large number of the required emitting units, the phase control requirement is complex. Although recent studies have utilized non-uniform distribution of the transmit elements and pulse width modulation based control schemes to alleviate this constraint, the parameters of current two-dimensional optical phased arrays are not well suited for practical use. In comparison, a one-dimensional optical phased array is a more viable solution.
For a one-dimensional array optical phased array, strip waveguide grating (Waveguide Grating Antenna, WAG) antennas are arranged in parallel along the transverse direction to form a phased array, and two-dimensional steering of an emergent beam in space is realized by tuning the optical phase and the laser wavelength of each channel in the phase-shifting array. However, in the prior art, since most of the optical power emitted by the single waveguide grating antenna is concentrated in a small lateral angle range, and the optical power is greatly reduced along with the increase of the lateral emission angle, when the optical phased array beam is turned to a larger angle, the emitted optical power is greatly reduced, so that the emission efficiency of the optical phased array antenna at a large angle is greatly reduced, and the performance of the optical phased array in ranging and imaging applications is affected.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a waveguide grating antenna array for an optical phased array and a method for manufacturing the same, which are used for solving the problems in the prior art that the optical power is low when a single waveguide grating antenna in a one-dimensional array optical phased array exits at a large angle in a lateral direction, so that the performance of the optical phased array in ranging and imaging applications is affected.
To achieve the above and other related objects, the present invention provides a waveguide grating antenna array for an optical phased array, comprising:
a substrate;
the waveguide grating antennas are arranged in a one-dimensional array along the transverse direction and are positioned on the substrate, and each waveguide grating antenna comprises a substrate waveguide and a plurality of grating teeth;
the cover layer covers the waveguide grating antennas and the substrate, the cover layer positioned on the waveguide grating antennas is in a space curved surface shape, and the refractive index of the cover layer is between the refractive index of the waveguide grating antennas and the refractive index of air.
Optionally, the substrate is an SOI substrate, including a bottom monocrystalline silicon layer, a buried oxide layer, and a top monocrystalline silicon layer; the waveguide grating antenna is formed in the top monocrystalline silicon layer; or the substrate waveguide of the waveguide grating antenna is formed in the top monocrystalline silicon layer, and the grating teeth of the waveguide grating antenna are formed above the top monocrystalline silicon layer.
Further, the material of the covering layer is a silicon dioxide material.
Optionally, the curvature of the cover layer on the waveguide grating antenna is between 9.9X10 5 m -1 ～4.4×10 6 m -1 Between them.
Optionally, the curvature of the cover layer on the waveguide grating antenna is between 2.4X10 6 m -1 ～4.4×10 6 m -1 Between them.
The invention also provides a preparation method of the waveguide grating antenna array for the optical phased array, which comprises the following steps:
providing a substrate;
forming a plurality of waveguide grating antennas which are arranged in a one-dimensional array along the transverse direction on the substrate, wherein each waveguide grating antenna comprises a substrate waveguide and a plurality of grating teeth;
and forming a cover layer on the waveguide grating antenna and the substrate, wherein the cover layer on the waveguide grating antenna is in a space curved surface shape, and the refractive index of the cover layer is between the refractive index of the waveguide grating antenna and the refractive index of air.
Optionally, the substrate is an SOI substrate, including a bottom monocrystalline silicon layer, a buried oxide layer, and a top monocrystalline silicon layer; the waveguide grating antenna is formed in the top monocrystalline silicon layer; or the substrate waveguide of the waveguide grating antenna is formed in the top monocrystalline silicon layer, and the grating teeth of the waveguide grating antenna are formed above the top monocrystalline silicon layer.
Further, the material of the covering layer is a silicon dioxide material.
Optionally, the cover layer is formed by adopting a chemical vapor deposition process, and the cover layer on the waveguide grating antenna is in a space curved surface shape by means of the height difference between the substrate and the waveguide grating antenna.
Optionally, the curvature of the cover layer on the waveguide grating antenna is between 9.9X10 5 m -1 ～4.4×10 6 m -1 Between them.
As described above, the waveguide grating antenna array for an optical phased array and the method of manufacturing the same of the present invention include: a substrate; the waveguide grating antennas are arranged in a one-dimensional array along the transverse direction and are positioned on the substrate, and each waveguide grating antenna comprises a substrate waveguide and a plurality of grating teeth; the cover layer covers the waveguide grating antennas and the substrate, the cover layer positioned on the waveguide grating antennas is in a space curved surface shape, and the refractive index of the cover layer is between the refractive index of the waveguide grating antennas and the refractive index of air. By covering the covering layer on the waveguide grating antenna, and enabling the covering layer on the waveguide grating antenna to be in a space curved surface shape, the light beam emergent from the waveguide grating antenna passes through the curved surface part and the air interface, similar to a lens structure, when the light beam emergent from the waveguide grating antenna passes through the curved surface part and the air interface, according to the refraction law of light, the light beam emergent angle is increased, so that the light power emergent from the waveguide grating antenna is distributed to a larger angle range, the optical phased array still has larger emergent power when scanning to a large angle, and the performance of the optical phased array when the light beam is turned to a large angle is improved.
Drawings
Fig. 1 shows an optical phased array schematic of a waveguide grating antenna array for an optical phased array in accordance with the present invention.
Fig. 2 is a schematic plan view of a waveguide grating antenna in a waveguide grating antenna array for an optical phased array according to the present invention, wherein the waveguide grating antenna has a lateral full-etching structure.
Fig. 3 is a schematic perspective view of a waveguide grating antenna of fig. 2.
Fig. 4 is a schematic diagram of a three-dimensional structure of a waveguide grating antenna in a waveguide grating antenna array for an optical phased array according to the present invention, where the waveguide grating antenna is a shallow etched structure above a substrate waveguide.
Fig. 5 is a schematic diagram showing a three-dimensional structure of a waveguide grating antenna in a waveguide grating antenna array for an optical phased array according to the present invention, wherein the waveguide grating antenna is a perturbation structure above a substrate waveguide.
Fig. 6 shows a transverse cross-section of a waveguide grating antenna array for an optical phased array along the AA direction in fig. 1.
Fig. 7 is a schematic cross-sectional view showing the divergence angle of the outgoing beam of each waveguide grating antenna in the waveguide grating antenna array for an optical phased array according to the present invention.
Fig. 8 shows a schematic diagram of beam steering for an optical phased array implementation of a waveguide grating antenna array for an optical phased array in accordance with the present invention.
Fig. 9 and 10 are schematic cross-sectional views of a waveguide grating antenna array for an optical phased array according to an embodiment of the invention.
Description of element reference numerals
10. Substrate and method for manufacturing the same
101. Bottom monocrystalline silicon layer
102. Oxygen-buried layer
103. Top monocrystalline silicon layer
11. Waveguide grating antenna
111. Matrix waveguide
112. Grating tooth
12. Cover layer
121. Curved surface portion
13. Tunable laser
14. Optical phased array chip
15. Cascade optical beam splitter
16. Phase shifter array
17. Waveguide grating antenna array
Detailed Description
Other advantages and effects of the present invention will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present invention with reference to specific examples. The invention may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present invention.
Please refer to fig. 1 to 10. It should be noted that, the illustrations provided in the present embodiment merely illustrate the basic concept of the present invention by way of illustration, and only the components related to the present invention are shown in the drawings rather than the number, shape and size of the components in actual implementation, and the form, number and proportion of each component in actual implementation may be arbitrarily changed, and the layout of the components may be more complex. In addition, in order to facilitate the direction understanding in the present embodiment, the extending direction along the length of the substrate waveguide is defined as the longitudinal direction Y, and the arrangement direction of the adjacent waveguide grating antennas is defined as the transverse direction X.
As shown in fig. 1 to 8, the present embodiment provides a waveguide grating antenna array for an optical phased array, the waveguide grating antenna array including:
a substrate 10;
a plurality of waveguide grating antennas 11 arranged in a one-dimensional array along the transverse X direction and located on the substrate 10 (as shown in fig. 6 and 7), each waveguide grating antenna 11 including a base waveguide 111 and a plurality of grating teeth 112 (as shown in fig. 2);
the cover layer 12 covers the waveguide grating antennas 11 and the substrate 10, and the cover layer 12 on the waveguide grating antennas 11 has a space curved shape, that is, a curved surface portion 121 in fig. 3, and the refractive index of the cover layer 12 is between the refractive index of the waveguide grating antennas 11 and the refractive index of air.
As shown in fig. 1, the working principle of the optical phased array of the waveguide grating antenna array for the optical phased array according to the present embodiment is: the tunable laser 13 emits a beam of narrow linewidth laser, and then the laser is injected into the optical phased array chip 14; the laser light incident on the optical phased array chip 14 first enters the cascade optical splitter 15 to be split into a plurality of channels (for example, a 1×2 coupler of level 2 is used to split the laser light into 4 channels in fig. 1); the laser of each channel enters the phase shifter of the phase shifter array 16 connected with the laser to receive phase modulation, so that the phase of the laser of each channel reaches a preset value; the phase-shifted laser light of each channel is finally emitted into space through the waveguide grating antenna array 17, and the outgoing beam is emitted to a specific angle (as shown in fig. 8) according to the phase relationship of the laser light of each channel. It is known that the optical power of a light beam emitted to a specific angle is related to the shape of the outgoing light field of a single waveguide grating antenna, and the outgoing optical power is generally smaller at a position with a larger outgoing angle, which is determined by the material and the geometry of the waveguide grating antenna, and the optical power of the outgoing light field of the single waveguide grating antenna is mainly concentrated at a position with a smaller outgoing angle. In this embodiment, by covering the cover layer 12 on the waveguide grating antenna and making the cover layer 12 on the waveguide grating antenna 11 have a space curved surface shape, that is, the curved surface portion 121 in fig. 6, similar to a lens structure, when the light beam emitted from the waveguide grating antenna 11 passes through the interface between the curved surface portion 121 and the air, according to the refraction law of the light, the light beam emergence angle will become larger, so that the light power emitted from the waveguide grating antenna 11 is distributed to a larger angle range, so that the optical phased array still has a larger emergence power when scanning to a large angle, and the performance of the optical phased array light beam steering to a large angle operation is improved.
In this embodiment, the specific form of the waveguide grating antenna is not limited, and any existing waveguide grating antenna form suitable for an optical phased array can be selected. As shown in fig. 2 and 3, a lateral full-etching structure may be adopted, specifically: etching the materials on both sides of the matrix waveguide 111, and retaining only the materials in the grating teeth 112 region to form a plurality of grating teeth 112 in the length direction of the matrix waveguide 111, that is, in the longitudinal direction Y, where the materials of the matrix waveguide 111 and the grating teeth 112 are the same; as shown in fig. 4, a shallow etching structure above the substrate waveguide may also be used, specifically: shallow etching is performed on the upper surface of the substrate waveguide 111, and the substrate waveguide 111 cannot be etched through, so that a plurality of grating teeth 112 are formed in the length direction, i.e., the longitudinal direction Y, of the substrate waveguide 111, and at this time, the substrate waveguide 111 and the grating teeth 112 are made of the same material; as shown in fig. 5, a perturbation structure above the substrate waveguide may also be used, specifically: a grating tooth material layer is deposited on the upper surface of the substrate waveguide 111, and patterned to form a plurality of grating teeth 112 in the length direction of the substrate waveguide 111, that is, in the longitudinal direction Y, where the materials of the substrate waveguide 111 and the grating teeth 112 may be the same or different. As shown in fig. 6 and 7, as an example, the material of the waveguide grating antenna 11 may be any material suitable for an optical phased array, for example, a single crystal silicon material and/or a silicon nitride material, and in this embodiment, the material of the waveguide grating antenna 11 is preferably a single crystal silicon material.
As shown in fig. 6 and 9, as an example, the material of the substrate 10 may be any material suitable for an optical phased array, which is not limited herein, and in this embodiment, the substrate 10 is preferably an SOI substrate, including a bottom monocrystalline silicon layer 101, an oxygen-buried layer 102, and a top monocrystalline silicon layer 103, and more preferably, the oxygen-buried layer 102 is a silicon dioxide oxygen-buried layer; the waveguide grating antenna 11 is formed in the top monocrystalline silicon layer 103, such as the lateral full etched structure or the shallow etched structure above the substrate waveguide in fig. 2-4. As a further preferable aspect, the material of the cover layer 12 is selected to be a silicon dioxide material, the refractive index of the silicon dioxide material is between that of the single crystal silicon material and that of air, so that the light power emitted from the waveguide grating antenna can be distributed to a larger and more suitable angle range, and the silicon dioxide material hardly absorbs light, so that the light emission power is not affected.
As shown in fig. 7, as an example, the curvature of the cover layer 12, i.e., the curved surface portion 121, on the waveguide grating antenna 11 is 9.9×10 5 m -1 ～4.4×10 6 m -1 Between them. Preferably, the curvature of the curved surface 121 is 2.4x10 6 m -1 ～4.4×10 6 m -1 Between them. The range values herein include end point values at both ends.
The embodiment also provides a preparation method of the waveguide grating antenna array for the optical phased array, which is used for preparing the waveguide grating antenna array for the optical phased array. The preparation method of the present embodiment is described taking the substrate 10 as an SOI substrate as an example, but this is not limited to the substrate material of the present invention being SOI only, and other materials suitable for preparing the waveguide grating antenna array of the optical phased array are suitable for use in the preparation method of the present invention.
The preparation method comprises the following steps:
as shown in fig. 9, step S1 is performed to provide an SOI substrate 10, the SOI substrate 10 including a bottom monocrystalline silicon layer 101, a buried oxide layer 102, and a top monocrystalline silicon layer 103. Preferably, the buried oxide layer 102 is a silicon dioxide buried oxide layer.
It should be noted that the size of the SOI substrate 10 is set according to the requirements of the specific optical phased array chip 14, and is not limited herein.
As shown in fig. 2 to 5, step S2 is performed to form a plurality of waveguide grating antennas 11 arranged in a one-dimensional array along the transverse X direction on the top monocrystalline silicon layer 103 of the SOI substrate 10, where each waveguide grating antenna 11 includes a base waveguide 111 and a plurality of grating teeth 112.
As shown in fig. 2, 3 and 10, the waveguide grating antenna 11 is formed by a lateral full etching structure, and the specific steps are as follows: firstly, a patterned photoresist layer is formed on the top monocrystalline silicon layer 103 by adopting a photoetching process, then, a plurality of waveguide grating antennas 11 which are arranged in a one-dimensional array along the X direction are formed on the basis of the patterned photoresist layer by etching the top monocrystalline silicon layer 103, finally, the patterned photoresist layer is removed, wherein the formed substrate waveguide 111 extends along the Y direction, and the grating teeth 112 extend along the X direction. As shown in fig. 4, as another example, the waveguide grating antenna 11 is formed as a shallow etched structure above a substrate waveguide, and the specific steps are as follows: firstly, a patterned photoresist layer is formed on the top monocrystalline silicon layer 103 by adopting a photoetching process, then, a plurality of base waveguides 111 of the waveguide grating antenna 11 which are arranged in a one-dimensional array along the X direction are formed on the basis of the patterned photoresist layer by etching the top monocrystalline silicon layer 103, then, the patterned photoresist layer is removed, then, a patterned photoresist layer is formed on the base waveguides 111 by adopting a photoetching process, then, a plurality of grating teeth 112 protruding out of the surface of the base waveguides are formed on the basis of the patterned photoresist layer by etching the base waveguides 111, and finally, the patterned photoresist layer is removed. As shown in fig. 5, as a further example, the waveguide grating antenna 11 is formed as a perturbation structure above the substrate waveguide, and the specific steps are as follows: firstly, a patterned photoresist layer is formed on the top monocrystalline silicon layer 103 by adopting a photoetching process, then, a plurality of base waveguides 111 of the waveguide grating antenna 11 which are arranged in a one-dimensional array along the X direction are formed by etching the top monocrystalline silicon layer 103 based on the patterned photoresist layer, then, the patterned photoresist layer is removed, and then, a grating tooth material layer is deposited on the base waveguides 111 and patterned to form a plurality of grating teeth 112.
As shown in fig. 6, finally, step S3 is performed to form a cover layer 12 on the waveguide grating antenna 11 and the substrate 10, wherein the cover layer 12 on the waveguide grating antenna 11 has a space curved shape, that is, the curved portion 121 has a space curved shape, and the refractive index of the cover layer 12 is between the refractive index of the waveguide grating antenna 11 and the refractive index of the air.
As an example, the material of the cover layer 12 is selected to be a silicon dioxide material.
As an example, the cover layer 12 is formed by a chemical vapor deposition process, and since there is a height difference between the etched waveguide grating antenna 11 and the buried oxide layer 102, when the chemical vapor deposition process is used, the cover layer 12 with a curved structure having an arc can be naturally formed on the waveguide grating antenna 11 by the height difference, and the process is simple and easy to implement.
As an example, the curvature of the curved surface portion 121 is 9.9x10 5 m -1 ～4.4×10 6 m -1 Between them. Preferably, the curvature of the curved surface 121 is 2.4x10 6 m -1 ～4.4×10 6 m -1 Between them. The range values herein include end point values at both ends.
In summary, the present invention provides a waveguide grating antenna array for an optical phased array and a method for manufacturing the same, including: a substrate; the waveguide grating antennas are arranged in a one-dimensional array along the transverse direction and are positioned on the substrate, and each waveguide grating antenna comprises a substrate waveguide and a plurality of grating teeth; the cover layer covers the waveguide grating antennas and the substrate, the cover layer positioned on the waveguide grating antennas is in a space curved surface shape, and the refractive index of the cover layer is between the refractive index of the waveguide grating antennas and the refractive index of air. By covering the covering layer on the waveguide grating antenna, and enabling the covering layer on the waveguide grating antenna to be in a space curved surface shape, the light beam emergent from the waveguide grating antenna passes through the curved surface part and the air interface, similar to a lens structure, when the light beam emergent from the waveguide grating antenna passes through the curved surface part and the air interface, according to the refraction law of light, the light beam emergent angle is increased, so that the light power emergent from the waveguide grating antenna is distributed to a larger angle range, the optical phased array still has larger emergent power when scanning to a large angle, and the performance of the optical phased array when the light beam is turned to a large angle is improved. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the invention. Accordingly, it is intended that all equivalent modifications and variations of the invention be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.
Claims (7)
1. A waveguide grating antenna array for an optical phased array, the waveguide grating antenna array comprising:
a substrate;
the waveguide grating antennas are arranged in a one-dimensional array along the transverse direction and are positioned on the substrate, and each waveguide grating antenna comprises a substrate waveguide and a plurality of grating teeth;
the covering layer covers the waveguide grating antennas and the substrate, and the covering layer positioned on the waveguide grating antennas is in a space curved surface shape; forming the cover layer based on a chemical vapor deposition process; the refractive index of the cover layer is between the refractive index of the waveguide grating antenna and the refractive index of air; the curvature of the cover layer is 9.9X10 5 m -1 ~4.4×10 6 m -1 Between them.
2. A waveguide grating antenna array for an optical phased array according to claim 1, wherein: the substrate is an SOI substrate and comprises a bottom monocrystalline silicon layer, a buried oxide layer and a top monocrystalline silicon layer; the waveguide grating antenna is formed in the top monocrystalline silicon layer; or the substrate waveguide of the waveguide grating antenna is formed in the top monocrystalline silicon layer, and the grating teeth of the waveguide grating antenna are formed above the top monocrystalline silicon layer.
3. A waveguide grating antenna array for an optical phased array as claimed in claim 2, wherein: the material of the covering layer is silicon dioxide material.
4. A waveguide grating antenna array for an optical phased array according to claim 1, wherein: the curvature of the cover layer on the waveguide grating antenna is 2.4X10 6 m -1 ~4.4×10 6 m -1 Between them.
5. A method for manufacturing a waveguide grating antenna array for an optical phased array, the method comprising:
providing a substrate;
forming a plurality of waveguide grating antennas which are arranged in a one-dimensional array along the transverse direction on the substrate, wherein each waveguide grating antenna comprises a substrate waveguide and a plurality of grating teeth;
forming a cover layer on the waveguide grating antenna and the substrate, wherein the cover layer on the waveguide grating antenna is in a space curved surface shape;
the cover layer is formed by adopting a chemical vapor deposition process, and the cover layer on the waveguide grating antenna is in a space curved surface shape by means of the height difference between the substrate and the waveguide grating antenna; the refractive index of the cover layer is between the refractive index of the waveguide grating antenna and the refractive index of air; the curvature of the cover layer is 9.9X10 5 m -1 ~4.4×10 6 m -1 Between them.
6. The method for manufacturing a waveguide grating antenna array for an optical phased array according to claim 5, wherein: the substrate is an SOI substrate and comprises a bottom monocrystalline silicon layer, a buried oxide layer and a top monocrystalline silicon layer; the waveguide grating antenna is formed in the top monocrystalline silicon layer; or the substrate waveguide of the waveguide grating antenna is formed in the top monocrystalline silicon layer, and the grating teeth of the waveguide grating antenna are formed above the top monocrystalline silicon layer.
7. The method of manufacturing a waveguide grating antenna array for an optical phased array of claim 6, wherein: the material of the covering layer is silicon dioxide material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011529276.0A CN112630884B (en) | 2020-12-22 | 2020-12-22 | Waveguide grating antenna array for optical phased array and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011529276.0A CN112630884B (en) | 2020-12-22 | 2020-12-22 | Waveguide grating antenna array for optical phased array and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112630884A CN112630884A (en) | 2021-04-09 |
| CN112630884B true CN112630884B (en) | 2023-09-08 |
Family
ID=75321226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011529276.0A Active CN112630884B (en) | 2020-12-22 | 2020-12-22 | Waveguide grating antenna array for optical phased array and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112630884B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113608197B (en) * | 2021-07-30 | 2024-04-02 | 联合微电子中心有限责任公司 | Optical antenna, manufacturing method thereof and optical phased array chip |
| CN113985679A (en) * | 2021-11-16 | 2022-01-28 | 吉林大学 | Optical phased array system and preparation method thereof |
| CN116661059B (en) * | 2023-07-20 | 2023-09-26 | 上海铭锟半导体有限公司 | High-directivity waveguide grating antenna and preparation method thereof |
| CN117148500B (en) * | 2023-11-01 | 2024-01-12 | 赛丽科技(苏州)有限公司 | Grating antenna |
Citations (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW558658B (en) * | 2002-08-07 | 2003-10-21 | Broptics Comm Corp | Apparatus and method for fabricating a light waveguide grating with index of refraction having symmetric distribution |
| CN1521974A (en) * | 2003-01-27 | 2004-08-18 | 张立国 | A temperature insensitive folding array wave-guide grating (AWG) |
| CN102073186A (en) * | 2011-01-21 | 2011-05-25 | 哈尔滨工业大学 | Large-angle, continuous and high-resolution beam deflection scanning device based on liquid crystal optical phased array and scanning method |
| CN104865740A (en) * | 2015-06-23 | 2015-08-26 | 深圳市华星光电技术有限公司 | Viewing angle extending film and wide viewing angle thin film transistor LCD (Liquid Crystal Display) device including same |
| CN106053388A (en) * | 2016-05-24 | 2016-10-26 | 昆明理工大学 | Fiber sensor-based self-powered bridge damage condition real-time monitoring device |
| KR20170115903A (en) * | 2016-04-08 | 2017-10-18 | 한국과학기술원 | Radiator for adjusting emission angle of light wave emitted to free space |
| CN107589584A (en) * | 2017-09-21 | 2018-01-16 | 深圳市华星光电半导体显示技术有限公司 | Colored filter substrate, liquid crystal panel and liquid crystal display |
| CN108089262A (en) * | 2018-01-04 | 2018-05-29 | 中国人民解放军火箭军工程大学 | A kind of chip type integrated optics antenna for laser communication |
| CN108700790A (en) * | 2016-01-22 | 2018-10-23 | 国立大学法人横浜国立大学 | Light deflector and laser radar apparatus |
| CN109143673A (en) * | 2018-09-30 | 2019-01-04 | 惠科股份有限公司 | Structure of polarized light, display panel and display device |
| CN109164532A (en) * | 2018-09-30 | 2019-01-08 | 惠科股份有限公司 | Structure of polarized light and display device |
| CN109541743A (en) * | 2017-09-22 | 2019-03-29 | 北京万集科技股份有限公司 | A kind of silicon-based optical antenna and preparation method |
| CN109581330A (en) * | 2018-12-29 | 2019-04-05 | 中科天芯科技（北京）有限公司 | A kind of integrated optics phased array chip |
| CN109901263A (en) * | 2019-01-29 | 2019-06-18 | 浙江大学 | A kind of silicon substrate integrated optics phased array chip based on common electrode |
| CN109920936A (en) * | 2019-03-19 | 2019-06-21 | 合肥鑫晟光电科技有限公司 | A kind of display panel, its production method and display device |
| CN110323249A (en) * | 2018-03-30 | 2019-10-11 | 上海和辉光电有限公司 | A kind of organic elctroluminescent device |
| JP2019184649A (en) * | 2018-04-02 | 2019-10-24 | 株式会社豊田中央研究所 | Optical deflection element |
| CN110389407A (en) * | 2018-04-19 | 2019-10-29 | 北京万集科技股份有限公司 | The preparation method of optical antenna, phased-array laser radar and optical antenna |
| CN111580070A (en) * | 2020-05-28 | 2020-08-25 | 香港中文大学（深圳） | Optical phased array laser radar |
| CN111856481A (en) * | 2020-07-29 | 2020-10-30 | 杭州视光半导体科技有限公司 | Scanner and coaxial and non-coaxial radar system applying same |
| CN111897051A (en) * | 2020-08-24 | 2020-11-06 | 国科光芯(海宁)科技股份有限公司 | Waveguide grating structure and preparation method thereof |
| CN112068244A (en) * | 2020-09-18 | 2020-12-11 | 联合微电子中心有限责任公司 | Athermal arrayed waveguide grating |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7106920B2 (en) * | 2001-11-13 | 2006-09-12 | Zhongshan Liu | Laser array for generating stable multi-wavelength laser outputs |
| US7295581B2 (en) * | 2003-09-29 | 2007-11-13 | Intel Corporation | External cavity tunable optical transmitters |
| DE602004023641D1 (en) * | 2003-11-27 | 2009-11-26 | Asahi Glass Co Ltd | OPTICAL ELEMENT WITH A LIQUID CRYSTAL WITH OPTICAL ISOTROPY |
| US8164531B2 (en) * | 2008-05-20 | 2012-04-24 | Lockheed Martin Corporation | Antenna array with metamaterial lens |
| GB2464111B (en) * | 2008-10-02 | 2011-06-15 | Cambridge Display Tech Ltd | Organic electroluminescent device |
| WO2017218291A1 (en) * | 2016-06-14 | 2017-12-21 | The Charles Stark Draper Laboratory, Inc. | Wide angle steering with phase array with wide-element spacing and lens array |
| WO2017223299A1 (en) * | 2016-06-22 | 2017-12-28 | Massachusetts Institute Of Technology | Methods and systems for optical beam steering |
| US10295741B2 (en) * | 2017-03-31 | 2019-05-21 | Nokia Solutions And Networks Oy | Single mode grating coupler with vertical coupling direction and small back reflection |
| KR101924890B1 (en) * | 2017-09-28 | 2018-12-04 | 광주과학기술원 | Optical Phased Array Antenna and LiDAR Having The Same |
| US10545275B1 (en) * | 2018-07-16 | 2020-01-28 | Shenzhen Guangjian Technology Co., Ltd. | Light projecting method and device |
-
2020
- 2020-12-22 CN CN202011529276.0A patent/CN112630884B/en active Active
Patent Citations (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW558658B (en) * | 2002-08-07 | 2003-10-21 | Broptics Comm Corp | Apparatus and method for fabricating a light waveguide grating with index of refraction having symmetric distribution |
| CN1521974A (en) * | 2003-01-27 | 2004-08-18 | 张立国 | A temperature insensitive folding array wave-guide grating (AWG) |
| CN102073186A (en) * | 2011-01-21 | 2011-05-25 | 哈尔滨工业大学 | Large-angle, continuous and high-resolution beam deflection scanning device based on liquid crystal optical phased array and scanning method |
| CN104865740A (en) * | 2015-06-23 | 2015-08-26 | 深圳市华星光电技术有限公司 | Viewing angle extending film and wide viewing angle thin film transistor LCD (Liquid Crystal Display) device including same |
| CN108700790A (en) * | 2016-01-22 | 2018-10-23 | 国立大学法人横浜国立大学 | Light deflector and laser radar apparatus |
| KR20170115903A (en) * | 2016-04-08 | 2017-10-18 | 한국과학기술원 | Radiator for adjusting emission angle of light wave emitted to free space |
| CN106053388A (en) * | 2016-05-24 | 2016-10-26 | 昆明理工大学 | Fiber sensor-based self-powered bridge damage condition real-time monitoring device |
| CN107589584A (en) * | 2017-09-21 | 2018-01-16 | 深圳市华星光电半导体显示技术有限公司 | Colored filter substrate, liquid crystal panel and liquid crystal display |
| CN109541743A (en) * | 2017-09-22 | 2019-03-29 | 北京万集科技股份有限公司 | A kind of silicon-based optical antenna and preparation method |
| CN108089262A (en) * | 2018-01-04 | 2018-05-29 | 中国人民解放军火箭军工程大学 | A kind of chip type integrated optics antenna for laser communication |
| CN110323249A (en) * | 2018-03-30 | 2019-10-11 | 上海和辉光电有限公司 | A kind of organic elctroluminescent device |
| JP2019184649A (en) * | 2018-04-02 | 2019-10-24 | 株式会社豊田中央研究所 | Optical deflection element |
| CN110389407A (en) * | 2018-04-19 | 2019-10-29 | 北京万集科技股份有限公司 | The preparation method of optical antenna, phased-array laser radar and optical antenna |
| CN109164532A (en) * | 2018-09-30 | 2019-01-08 | 惠科股份有限公司 | Structure of polarized light and display device |
| CN109143673A (en) * | 2018-09-30 | 2019-01-04 | 惠科股份有限公司 | Structure of polarized light, display panel and display device |
| CN109581330A (en) * | 2018-12-29 | 2019-04-05 | 中科天芯科技（北京）有限公司 | A kind of integrated optics phased array chip |
| CN109901263A (en) * | 2019-01-29 | 2019-06-18 | 浙江大学 | A kind of silicon substrate integrated optics phased array chip based on common electrode |
| CN109920936A (en) * | 2019-03-19 | 2019-06-21 | 合肥鑫晟光电科技有限公司 | A kind of display panel, its production method and display device |
| CN111580070A (en) * | 2020-05-28 | 2020-08-25 | 香港中文大学（深圳） | Optical phased array laser radar |
| CN111856481A (en) * | 2020-07-29 | 2020-10-30 | 杭州视光半导体科技有限公司 | Scanner and coaxial and non-coaxial radar system applying same |
| CN111897051A (en) * | 2020-08-24 | 2020-11-06 | 国科光芯(海宁)科技股份有限公司 | Waveguide grating structure and preparation method thereof |
| CN112068244A (en) * | 2020-09-18 | 2020-12-11 | 联合微电子中心有限责任公司 | Athermal arrayed waveguide grating |
Non-Patent Citations (1)
| Title |
|---|
| Josu＇e J. L ＇opez等.Planar-lens Enabled Beam Steering for Chip-scale LIDAR.《2018 Conference on Lasers and Electro-Optics (CLEO)》.2018, * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112630884A (en) | 2021-04-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112630884B (en) | Waveguide grating antenna array for optical phased array and preparation method thereof | |
| US8515217B2 (en) | Vertical optically emitting photonic devices with electronic steering capability | |
| EP3065235B1 (en) | Hybrid vertical cavity laser for photonic integrated circuit | |
| US7205941B2 (en) | Composite material with powered resonant cells | |
| KR101834015B1 (en) | Hybrid vertical-cavity laser | |
| US20180175501A1 (en) | Beam steering optical phased arrays | |
| KR100852388B1 (en) | Semiconductor laser device having an insulating region | |
| WO2004042440A1 (en) | Photonic crystal waveguide | |
| US20180006372A1 (en) | Subminiature photo phased array antenna | |
| US7587118B2 (en) | Resonator and device having the same | |
| JP4954992B2 (en) | Semiconductor light reflecting element, semiconductor laser using the semiconductor light reflecting element, and optical transponder using the semiconductor laser | |
| JPH0318086A (en) | Emitted-light coupling system of semiconductor radiation element and emitted-light processing array using said system | |
| US7751669B2 (en) | Waveguide and device including the same | |
| CN216529834U (en) | Topological cavity surface emitting laser, monolithic integrated laser array comprising same and electronic equipment | |
| EP1785755B1 (en) | Waveguide and device including the same | |
| CN109038216B (en) | Multi-beam vertical cavity surface emitting laser chip and manufacturing method thereof | |
| EP1892545B1 (en) | Waveguide and light emitting device having the same | |
| KR101718240B1 (en) | Ultra-compact photonic phased array antenna | |
| EP1936412B1 (en) | Optoelectronic component comprising a diffraction grating with a transverse structure | |
| CN116073231A (en) | Multi-wavelength topological cavity surface emitting laser array | |
| Zhou et al. | Design of a low-crosstalk sub-wavelength-pitch silicon waveguide array for optical phased array | |
| CN111969413B (en) | Wide-stripe semiconductor laser and manufacturing method thereof | |
| JP2686219B2 (en) | Photon band structure mirror | |
| WO2023275285A1 (en) | Integrated optical phased array | |
| CN116780334A (en) | Laser structure preparation method and laser structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |