CN112621552B - Multi-energy-field-assisted chemical mechanical polishing equipment - Google Patents
Multi-energy-field-assisted chemical mechanical polishing equipment Download PDFInfo
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- CN112621552B CN112621552B CN202011463726.0A CN202011463726A CN112621552B CN 112621552 B CN112621552 B CN 112621552B CN 202011463726 A CN202011463726 A CN 202011463726A CN 112621552 B CN112621552 B CN 112621552B
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- 238000005498 polishing Methods 0.000 title claims abstract description 32
- 239000000126 substance Substances 0.000 title claims abstract description 23
- 238000005192 partition Methods 0.000 claims abstract description 28
- 238000010438 heat treatment Methods 0.000 claims abstract description 25
- 238000007517 polishing process Methods 0.000 claims description 6
- 238000010030 laminating Methods 0.000 claims 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 230000001808 coupling effect Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000009210 therapy by ultrasound Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a multi-energy-field-assisted chemical mechanical polishing device which comprises a machine shell, a rotating system component, an up-down moving system component, a main shaft system, a container, a heating module, an ultrasonic vibration module, a control system and a lifting platform, wherein a partition plate is arranged in the machine shell, the rotating system component, the up-down moving system component and the main shaft system are fixedly connected through the partition plate, the lifting platform is fixed on a bottom plate in the machine shell, the ultrasonic vibration module is arranged on the lifting platform, the container is placed and fixed on the ultrasonic vibration module, the heating module is fixedly attached to the wall of the container, and the control system can control parameters of the device such as rotating motion, up-down movement, ultrasonic vibration, heating and the like. The equipment designed by the invention can realize the multi-energy field auxiliary chemical mechanical polishing of workpieces, particularly complex structural parts by carrying out independent rotary motion, up-and-down motion or coupled motion of the two, and simultaneously carrying out heating and ultrasonic vibration.
Description
Technical Field
The invention belongs to the technical field of machining equipment, and relates to a multi-energy-field auxiliary chemical mechanical polishing device.
Background
Chemical mechanical polishing is a process for obtaining an ultra-smooth surface by utilizing the coupling action of chemical corrosion of polishing solution and mechanical removal of abrasive particles, but the conventional polishing equipment can only polish plane small parts and cannot polish complex components. Parts such as similar blade, wheel hub all belong to complicated structure, and the surface all need polish, mainly adopts artifical polishing at present, and artifical polishing efficiency is low, can't guarantee the homogeneity of polishing surface quality, and the polishing is with high costs, and is unfavorable for that the operator is healthy.
The conventional polishing equipment is not provided with an ultrasonic vibration and heating module and is low in polishing efficiency, so that the equipment capable of polishing the complex structural part at high quality and high efficiency, namely the multi-energy-field auxiliary chemical mechanical polishing equipment is provided.
Disclosure of Invention
The invention aims to provide equipment capable of performing high-quality and high-efficiency chemical mechanical polishing on a workpiece, in particular to a complex structural member, and provides multi-energy field-assisted chemical mechanical polishing equipment for the purpose.
In order to achieve the purpose, the invention adopts the following technical scheme:
a multi-energy field-assisted chemical mechanical polishing apparatus, comprising: the device comprises a shell, a rotating system component, an up-down moving system component, a spindle system, a container, a heating module, an ultrasonic vibration module, a lifting platform and a control system, wherein a horizontal partition plate is arranged in the shell, the rotating system component, the up-down moving system component and the spindle system are connected and fixed through the partition plate, the lifting platform is fixed on a bottom plate in the shell, the ultrasonic vibration module is installed on the lifting platform, the container is placed and fixed on the ultrasonic vibration module, the heating module is attached and fixed on a container wall, the control system is connected with the rotating system component, the up-down moving system component, the spindle system, the heating module, the ultrasonic vibration module and the lifting platform, parameters such as rotating motion, up-down movement, ultrasonic vibration, heating temperature and the like of the adjusting equipment are controlled, and an operation panel of the control system is installed on one side face of the shell;
preferably, the whole machine shell is cuboid and is provided with a door capable of being opened and closed, and a transparent area is arranged on the door and can observe the polishing process of parts inside the equipment; in addition, a partition board is arranged in the shell, and two stepped through holes and a rectangular through hole are formed in the partition board;
preferably, the rotating system component comprises a first motor, a first bearing module, a first pulley, a belt, a second pulley, and a second bearing module; the first bearing module and the second bearing module are respectively arranged on two stepped through holes of the partition plate, the first bearing module is used for matching with a first motor shaft, and the second bearing module is used for matching with a rotating shaft of a main shaft system; the first motor is vertically arranged below the partition plate, and a shaft of the first motor is vertically upwards connected with the first belt pulley through the first bearing module; the second belt pulley is fixedly connected with a rotating shaft of the main shaft system and is connected with the first belt pulley through a belt, and the rotating motion of the main shaft system can be realized under the driving of the first motor;
preferably, the up-down moving system component comprises a second motor, a first connecting plate, a second connecting plate and a connecting shaft; the second motor is horizontally arranged on the partition plate, a shaft of the second motor is fixedly connected with one end of the first connecting plate, the other end of the first connecting plate penetrates through the rectangular through hole in the partition plate to be connected with the second connecting plate through a bearing, the two connecting plates can rotate relative to each other, the other end of the second connecting plate is connected with one end of the connecting shaft through a bearing, the connecting shaft and the second connecting plate can rotate relative to each other, the other end of the connecting shaft is provided with threads and is fixedly connected with the first sleeve of the spindle system, and the spindle system can move up and down under the driving of the second motor;
preferably, the spindle system comprises a rotating shaft, a first end cover, a third bearing module, a first sleeve, a second sleeve, a key, a second end cover, a bolt, a flange plate, a guide rail block and a retainer; the rotating shaft is provided with a shaft shoulder and two key grooves, the long end of the rotating shaft penetrates through the second bearing module, the shaft shoulder is supported by the second bearing module, the key groove at the tail end of the rotating shaft is used for key connection and fixation of a second belt pulley, and the other key groove is arranged at the other side of the shaft shoulder, close to the tail end, and used for key connection of a second sleeve; the two ends of the second sleeve are step-shaped and are provided with a central hole, the step is used for being matched with the third bearing module, the central hole is matched with the long end of the rotating shaft, and the inner wall of the central hole is provided with a key groove which is completely communicated, so that the second sleeve can be ensured to move up and down along the axis of the rotating shaft when the rotating shaft drives the second sleeve to rotate; the first sleeve center hole is matched with the outer surface of the second sleeve and the third bearing module, the first end cover center hole is matched with the rotating shaft, the second end cover center hole is matched with the second sleeve, the first end cover, the first sleeve and the second end cover are fixedly connected with the first sleeve by bolts, the third bearing module can be precisely matched with the second sleeve under the action of the first end cover and is limited in the first sleeve, the third bearing module can be precisely matched with the second sleeve under the action of the second end cover, and one part of the tail end of the second sleeve needs to penetrate through the second end cover center hole; one side of the first sleeve is fixedly connected with the connecting shaft through threads, the other side of the first sleeve is fixedly connected with the guide rail block through screws, one end of the retainer is matched with the guide rail block, and the other end of the retainer is fixedly connected to the partition plate, so that the guide rail block can stably move up and down, namely the motion stability of the main shaft system is indirectly ensured;
the workpiece to be processed can be connected and fixed at the tail end of the flange plate, the flange plate is locked and fixed at the tail end of the second sleeve, the height of the container is adjusted through the lifting platform, the workpiece can be immersed in the container, and the ultrasonic vibration, the heating temperature and relevant parameters of the first motor and the second motor are set through the control system, so that the multi-energy field auxiliary chemical mechanical polishing of the workpiece can be realized.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the invention, by designing the rotating system component, the up-down moving system component and the main shaft system, the rotation and up-down coupling motion of the workpiece can be realized, the distance between the container and the workpiece is adjusted by the lifting platform, and polishing liquid is added into the container and is subjected to ultrasonic treatment and heating at the same time, so that the multi-energy field-assisted chemical mechanical polishing process of the workpiece is realized, especially the polishing of a complex structural member can be realized, and the problem that the polishing of the complex structural member cannot be realized by the traditional chemical mechanical polishing is solved.
2. The invention integrates the rotary motion, the up-and-down movement, the ultrasonic vibration and the heating into a whole and introduces the chemical mechanical polishing process, thereby improving the quality and the efficiency of workpiece polishing.
Drawings
FIG. 1 is a front view of the present invention;
FIG. 2 is an isometric view of the present invention;
FIG. 3 is a cross-sectional view of the spindle system of the present invention.
In the figure: 1, rotating a system component, 2, a machine shell, 3, an up-down moving system component, 4, a main shaft system, 5 containers, 6 heating modules, 7 ultrasonic vibration modules, 8 lifting platforms and 9 control systems;
the device comprises a first motor 1a, a first bearing module 1b, a first belt pulley 1c, a belt 1d, a second belt pulley 1e, a second bearing module 1f, a door 2a, a transparent area 2b, a partition plate 2c, a second motor 3a, a first connecting plate 3b, a second connecting plate 3c, a connecting shaft 3d, a rotating shaft 4a, a first end cover 4b, a third bearing module 4c, a first sleeve 4d, a second sleeve 4e, a key 4f, a second end cover 4g, a bolt 4h, a flange plate 4i, a guide rail block 4j and a retainer 4 k.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
1-3, a multi-energy field assisted chemical mechanical polishing apparatus, comprising: the device comprises a shell 2, a rotating system component 1, an up-down moving system component 3, a spindle system 4, a container 5, a heating module 6, an ultrasonic vibration module 7, a lifting platform 8 and a control system 9, wherein a horizontal partition plate 2c is arranged in the shell 2, the rotating system component 1, the up-down moving system component 3 and the spindle system 4 are fixedly connected through the partition plate 2c, the lifting platform 8 is fixed on the bottom plate in the shell 2, the ultrasonic vibration module 7 is installed on the lifting platform 8, the container 5 is placed and fixed on the ultrasonic vibration module 7, the heating module 6 is attached and fixed on the wall of the container 5, the parameters of the equipment such as rotating motion, up-down movement, ultrasonic vibration, heating temperature and the like are controlled and adjusted through the control system 9, and an operation panel of the control system 9 is installed on one side face of the shell 2;
the casing 2 is in a cuboid shape integrally and is provided with a door 2a which can be opened and closed, the door 2a is provided with a transparent area 2b, and the transparent area 2b can observe the polishing process of the internal parts of the equipment; in addition, a partition plate 2c is arranged in the shell 2, and two stepped through holes and a rectangular through hole are formed in the partition plate 2 c;
the rotating system component 1 comprises a first motor 1a, a first bearing module 1b, a first belt pulley 1c, a belt 1d, a second belt pulley 1e and a second bearing module 1 f; the first bearing module 1b and the second bearing module 1f are respectively installed on two stepped through holes of the partition plate 2c, the first bearing module 1b is used for matching with a first motor 1a shaft, and the second bearing module 1f is used for matching with a rotating shaft 4a of the spindle system 4; the first motor 1a is vertically arranged below the partition plate 2c, and the shaft of the first motor 1a is vertically upwards connected with the first belt pulley 1c through the first bearing module 1 b; the second belt pulley 1e is fixedly connected with the rotating shaft 4a and connected with the first belt pulley 1c through a belt 1d, and the rotating motion of the main shaft system 4 can be realized under the driving of the first motor 1 a;
the up-down moving system component 3 comprises a second motor 3a, a first connecting plate 3b, a second connecting plate 3c and a connecting shaft 3 d; the second motor 3a is horizontally arranged on the partition board 2c, the shaft of the second motor 3a is fixedly connected with one end of the first connecting board 3b, the other end of the first connecting board 3b penetrates through a rectangular through hole in the partition board 2c to be connected with the second connecting board 3c through a bearing, the first connecting board 3b and the second connecting board 3c can rotate relatively, the other end of the second connecting board 3c is connected with one end of the connecting shaft 3d through a bearing, the connecting shaft 3d and the second connecting board 3c can rotate relatively, the other end of the connecting shaft 3d is provided with threads and is fixedly connected with the first sleeve 4d of the spindle system 4, and the spindle system 4 can move up and down under the driving of the second motor 3 a;
the spindle system 4 comprises a rotating shaft 4a, a first end cover 4b, a third bearing module 4c, a first sleeve 4d, a second sleeve 4e, a key 4f, a second end cover 4g, a bolt 4h, a flange plate 4i, a guide rail block 4j and a retainer 4 k; the rotating shaft 4a is provided with a shaft shoulder and two key grooves, the long end of the rotating shaft 4a penetrates through the second bearing module 1f, the shaft shoulder is supported by the second bearing module 1f, the key groove at the tail end of the rotating shaft 4a is used for being in key connection with and fixing the second belt pulley 1e, and the other key groove is arranged at the other side, close to the tail end, of the shaft shoulder and used for being in key connection with the second sleeve 4 e; the two ends of the second sleeve 4e are step-shaped and provided with a central hole, wherein the step is used for being matched with the third bearing module 4c, the central hole is matched with the long end of the rotating shaft 4a, and the inner wall of the central hole is provided with a completely through key groove, so that the second sleeve 4e can move up and down along the axis of the rotating shaft 4a while the rotating shaft 4a drives the second sleeve 4e to rotate; a central hole of the first sleeve 4d is matched with the outer surface of the second sleeve 4e and the third bearing module 4c, a central hole of the first end cover 4b is matched with the rotating shaft 4a, a central hole of the second end cover 4g is matched with the second sleeve 4e, the first end cover 4b is fixedly connected with the first sleeve 4d and the second end cover 4g is fixedly connected with the first sleeve 4d by bolts 4h, the third bearing module 4c is precisely matched with the second sleeve 4e under the action of the first end cover 4b and is limited in the first sleeve 4d, the third bearing module 4c is precisely matched with the second sleeve 4e under the action of the second end cover 4g, and a part of the tail end of the second sleeve 4e needs to penetrate through the central hole of the second end cover 4 g; one side of the first sleeve 4d is fixedly connected with the connecting shaft 3d through threads, the other side of the first sleeve is fixedly connected with the guide rail block 4j through a screw, one end of the retainer 4k is matched with the guide rail block 4j, and the other end of the retainer is fixedly connected to the partition plate 2c, so that the guide rail block 4j can be stably moved up and down, namely the movement stability of the main shaft system 4 is indirectly ensured;
the workpiece can be connected and fixed at the tail end of the flange plate 4i, the flange plate 4i is locked and fixed at the tail end of the second sleeve 4e, the height of the container 5 is adjusted through the lifting platform 8, the workpiece can be immersed in the container 5, and the ultrasonic vibration of the ultrasonic vibration module 7, the heating temperature of the heating module 6, the parameters of the first motor 1a and the second motor 3a are set through the control system 9, so that the multi-energy field auxiliary chemical mechanical polishing of the workpiece can be realized.
In summary, the following steps: the multi-energy field assisted chemical mechanical polishing equipment integrates rotary motion, up-and-down movement, ultrasonic vibration and heating and introduces a chemical mechanical polishing process, so that the problem of high-quality and high-efficiency chemical mechanical polishing of workpieces, particularly complex structural members, is solved.
Claims (1)
1. A multi-energy field-assisted chemical mechanical polishing apparatus, the multi-energy field-assisted chemical mechanical polishing apparatus comprising: casing (2), rotating system subassembly (1), reciprocate system unit spare (3), main shaft system (4), container (5), heating module (6), ultrasonic vibration module (7), lift platform (8) and control system (9), wherein be equipped with a horizontal baffle (2c) in casing (2), rotating system subassembly (1), it is fixed through baffle (2c) to reciprocate system unit spare (3) and main shaft system (4), lift platform (8) are fixed on casing (2) infrabasal plate, install on lift platform (8) ultrasonic vibration module (7), container (5) are placed and are fixed on ultrasonic vibration module (7), heating module (6) laminating is fixed on container (5) wall, control system (9) and rotating system subassembly (1), reciprocate system unit spare (3), main shaft system (4), The heating module (6) and the ultrasonic vibration module (7) are connected with the lifting platform (8) to control and adjust the rotary motion, the up-down motion, the ultrasonic vibration and the heating temperature parameters of the equipment, and an operation panel of the control system (9) is arranged on one side surface of the shell (2);
the machine shell (2) is integrally rectangular and is provided with a door (2a) which can be opened and closed, and a transparent area (2b) is arranged on the door (2a) so as to observe the polishing process of parts in the equipment; two step through holes and a rectangular through hole are arranged on a partition plate (2c) in the shell (2);
the rotating system component (1) comprises a first motor (1a), a first bearing module (1b), a first belt pulley (1c), a belt (1d), a second belt pulley (1e) and a second bearing module (1 f); the first bearing module (1b) and the second bearing module (1f) are respectively installed on two stepped through holes of the partition plate (2c), the first bearing module (1b) is used for matching with a first motor (1a) shaft, and the second bearing module (1f) is used for matching with a rotating shaft (4a) of the spindle system (4); the first motor (1a) is vertically arranged below the partition plate (2c), and the shaft of the first motor (1a) is vertically upwards connected with the first belt pulley (1c) through the first bearing module (1 b); the second belt pulley (1e) is fixedly connected with a rotating shaft (4a) of the main shaft system (4), is connected with the first belt pulley (1c) through a belt (1d), and is driven by the first motor (1a) to realize the rotary motion of the main shaft system (4);
the up-and-down moving system component (3) comprises a second motor (3a), a first connecting plate (3b), a second connecting plate (3c) and a connecting shaft (3 d); the spindle system comprises a partition plate (2c), a second motor (3a), a first connecting plate (3b), a second connecting plate (3d), a connecting shaft (3d), a first sleeve (4d) and a second motor (3a), wherein the second motor (3a) is horizontally arranged on the partition plate (2c), the shaft of the second motor (3a) is fixedly connected with one end of the first connecting plate (3b), the other end of the first connecting plate (3b) penetrates through a rectangular through hole in the partition plate (2c) to be connected with the second connecting plate (3c) through a bearing, the first connecting plate (3b) and the second connecting plate (3c) can rotate relative to each other, the other end of the connecting shaft (3d) is provided with threads and is fixedly connected with the first sleeve (4d) of the spindle system (4), and the spindle system (4) can move up and down under the driving of the second motor (3 a);
the main shaft system (4) comprises a rotating shaft (4a), a first end cover (4b), a third bearing module (4c), a first sleeve (4d), a second sleeve (4e), a key (4f), a second end cover (4g), a bolt (4h), a flange plate (4i), a guide rail block (4j) and a retainer (4 k); the rotating shaft (4a) is provided with a shaft shoulder and two key grooves, the long end of the rotating shaft (4a) penetrates through the second bearing module (1f), the shaft shoulder is supported through the second bearing module (1f), the key groove at the tail end of the rotating shaft (4a) is used for key connection and fixation of the second belt pulley (1e), and the other key groove is arranged at the other side of the shaft shoulder, close to the tail end, and used for key connection (4f) with the second sleeve (4 e); the two ends of the second sleeve (4e) are step-shaped and provided with a center hole, the step is used for being matched with the third bearing module (4c), the center hole is matched with the long end of the rotating shaft (4a), and the inner wall of the center hole is provided with a key groove which is completely communicated, so that the second sleeve (4e) is ensured to move up and down along the axis of the rotating shaft (4a) while the rotating shaft (4a) drives the second sleeve (4e) to rotate; a central hole of a first sleeve (4d) is matched with the outer surface of a second sleeve (4e) and a third bearing module (4c), a central hole of a first end cover (4b) is matched with a rotating shaft (4a), a central hole of a second end cover (4g) is matched with the second sleeve (4e), the first end cover (4b) is connected and fixed with the first sleeve (4d) and the second end cover (4g) is connected and fixed with the first sleeve (4d) by bolts (4h), the third bearing module (4c) is matched with the second sleeve (4e) and limited in the first sleeve (4d) under the action of the first end cover (4b), the third bearing module (4c) is matched with the second sleeve (4e) under the action of the second end cover (4g), and a part of the tail end of the second sleeve (4e) penetrates through the central hole of the second end cover (4 g); one side of the first sleeve (4d) is fixedly connected with the connecting shaft (3d) through threads, the other side of the first sleeve is fixedly connected with the guide rail block (4j) through a screw, one end of the retainer (4k) is matched with the guide rail block (4j), and the other end of the retainer is fixedly connected to the partition plate (2c), so that the guide rail block (4j) can move up and down stably;
the workpiece to be processed is connected and fixed at the tail end of the flange plate (4i), the flange plate (4i) is locked and fixed at the tail end of the second sleeve (4e), the height of the container (5) is adjusted through the lifting platform (8), the workpiece is immersed in the container (5), and then the ultrasonic vibration of the ultrasonic vibration module (7), the heating temperature of the heating module (6), the parameters of the first motor (1a) and the second motor (3a) are set through the control system (9), so that the multi-energy field auxiliary chemical mechanical polishing of the workpiece can be realized.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011463726.0A CN112621552B (en) | 2020-12-14 | 2020-12-14 | Multi-energy-field-assisted chemical mechanical polishing equipment |
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| CN202011463726.0A CN112621552B (en) | 2020-12-14 | 2020-12-14 | Multi-energy-field-assisted chemical mechanical polishing equipment |
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| CN112621552A CN112621552A (en) | 2021-04-09 |
| CN112621552B true CN112621552B (en) | 2021-11-19 |
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| CN114670111B (en) * | 2022-04-21 | 2022-11-04 | 哈尔滨工业大学 | Fixed abrasive combined ultrasonic atomization polishing CaF 2 Apparatus and method for crystals |
| CN114589616B (en) * | 2022-04-21 | 2022-10-04 | 哈尔滨工业大学 | Heating and vibration synergistic chemical mechanical polishing (CaF) 2 Wafer device and method |
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