CN112615600A - 一种上下埋电极比例相反兰姆波谐振器 - Google Patents
一种上下埋电极比例相反兰姆波谐振器 Download PDFInfo
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- CN112615600A CN112615600A CN202011503388.9A CN202011503388A CN112615600A CN 112615600 A CN112615600 A CN 112615600A CN 202011503388 A CN202011503388 A CN 202011503388A CN 112615600 A CN112615600 A CN 112615600A
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- wave resonator
- lamb wave
- piezoelectric layer
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- 235000019687 Lamb Nutrition 0.000 title claims abstract description 44
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- 230000000694 effects Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010897 surface acoustic wave method Methods 0.000 description 3
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
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CN202011503388.9A CN112615600B (zh) | 2020-12-18 | 2020-12-18 | 一种上下埋电极比例相反兰姆波谐振器 |
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10236003A1 (de) * | 2002-08-06 | 2004-02-19 | Epcos Ag | Bauelement mit leistungsverträglicher Elektrodenstruktur und Verfahren zur Herstellung |
DE102013221030A1 (de) * | 2012-10-18 | 2014-04-24 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Volumen akustische wellen (baw) resonator vorrichtung aufweisend einen akustischen reflektor und eine brücke |
CN103795369A (zh) * | 2012-10-26 | 2014-05-14 | 安华高科技通用Ip(新加坡)公司 | 具有低微调敏感度的温度补偿谐振器装置及制造所述装置的方法 |
US20180219525A1 (en) * | 2017-01-30 | 2018-08-02 | Zhuohui Chen | Surface acoustic wave device |
WO2019185363A1 (en) * | 2018-03-29 | 2019-10-03 | Frec'n'sys | Surface acoustic wave device on composite substrate |
CN111316566A (zh) * | 2017-11-15 | 2020-06-19 | 华为技术有限公司 | 表面声波设备 |
CN112054781A (zh) * | 2020-09-11 | 2020-12-08 | 广东广纳芯科技有限公司 | 具有双层同向叉指换能器结构的高性能谐振器 |
-
2020
- 2020-12-18 CN CN202011503388.9A patent/CN112615600B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10236003A1 (de) * | 2002-08-06 | 2004-02-19 | Epcos Ag | Bauelement mit leistungsverträglicher Elektrodenstruktur und Verfahren zur Herstellung |
DE102013221030A1 (de) * | 2012-10-18 | 2014-04-24 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Volumen akustische wellen (baw) resonator vorrichtung aufweisend einen akustischen reflektor und eine brücke |
CN103795369A (zh) * | 2012-10-26 | 2014-05-14 | 安华高科技通用Ip(新加坡)公司 | 具有低微调敏感度的温度补偿谐振器装置及制造所述装置的方法 |
US20180219525A1 (en) * | 2017-01-30 | 2018-08-02 | Zhuohui Chen | Surface acoustic wave device |
CN111316566A (zh) * | 2017-11-15 | 2020-06-19 | 华为技术有限公司 | 表面声波设备 |
WO2019185363A1 (en) * | 2018-03-29 | 2019-10-03 | Frec'n'sys | Surface acoustic wave device on composite substrate |
CN112054781A (zh) * | 2020-09-11 | 2020-12-08 | 广东广纳芯科技有限公司 | 具有双层同向叉指换能器结构的高性能谐振器 |
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