CN112611342B - Five-degree-of-freedom error measuring device of machine tool based on thermal stability design - Google Patents
Five-degree-of-freedom error measuring device of machine tool based on thermal stability design Download PDFInfo
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- CN112611342B CN112611342B CN202011347318.9A CN202011347318A CN112611342B CN 112611342 B CN112611342 B CN 112611342B CN 202011347318 A CN202011347318 A CN 202011347318A CN 112611342 B CN112611342 B CN 112611342B
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- 238000013461 design Methods 0.000 title claims abstract description 21
- 230000003287 optical effect Effects 0.000 claims abstract description 23
- 238000005259 measurement Methods 0.000 claims description 50
- 230000017525 heat dissipation Effects 0.000 claims description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 claims description 10
- 239000010949 copper Substances 0.000 claims description 10
- 230000008646 thermal stress Effects 0.000 claims description 10
- 239000013307 optical fiber Substances 0.000 claims description 6
- 238000004804 winding Methods 0.000 claims description 6
- 239000012774 insulation material Substances 0.000 claims description 4
- 238000005096 rolling process Methods 0.000 claims description 3
- 238000002955 isolation Methods 0.000 abstract description 5
- 230000008642 heat stress Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 10
- 238000011161 development Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 229910001018 Cast iron Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
- H01S5/02476—Heat spreaders, i.e. improving heat flow between laser chip and heat dissipating elements
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- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a five-degree-of-freedom error measuring device of a machine tool based on thermal stability design, which comprises a laser transmitting end and a laser receiving end, wherein the laser transmitting end consists of a laser transmitting end upper panel, a laser transmitting end rear panel, a laser transmitting end lower panel, a laser transmitting end front panel, an optical window, a laser transmitting end light path part and a laser transmitting end circuit part; the laser receiving end consists of a laser receiving end upper panel, a laser receiving end front panel, a laser receiving end rear panel, a laser receiving end lower panel, a lens cone, a laser receiving end circuit part and a laser receiving end light path part; the invention integrates the circuit part and the light path part into a whole at the transmitting end and the receiving end, and simultaneously carries out layered isolation design, thereby reducing the volume of the measuring device; through the design of shell heat conduction, the mechanical deformation of the reflecting elements such as a laser, a pyramid prism, a plane mirror and the like caused by heat stress is weakened, and the heat stability of the device is improved.
Description
Technical Field
The invention belongs to the technical field of precision measurement, and particularly relates to a five-degree-of-freedom error measurement device of a machine tool based on thermal stability design.
Background
The machine tool is an important carrier in the manufacturing industry, has rapid development and wide popularization range, and injects new vitality for the development of the manufacturing industry. Along with the rapid development of modern mechanical manufacturing technology, higher requirements are put forward on the machining precision of various numerical control machine tools, and the adoption of a proper method for improving the precision of the machine tools has very important significance. A typical three-axis machine tool includes 21 geometric errors, namely a six-degree-of-freedom error corresponding to each axis and an orthogonal error between each two axes, and the six-degree-of-freedom error includes a positioning error, a two-dimensional straightness error, a pitch angle, a yaw angle, and a roll angle. At present, common measurement means such as a laser interferometer, a laser tracking interferometer, a club instrument and the like can only measure one parameter at a time, and measurement of all parameters is time-consuming and labor-consuming, production efficiency is greatly reduced, and economic benefits are further affected. Therefore, the rapid and effective measurement of the machine tool error is a key for improving the machining precision of the numerical control machine tool.
The method for realizing multi-degree-of-freedom measurement based on the laser collimation and auto-collimation principles is simple in structure, easy to integrate and low in cost. At present, a plurality of laser collimation methods and techniques appear at home and abroad, but the methods and techniques or measurement systems are complex, so that the volume of a measurement head is large, or reasonable thermal stability design is not considered, and the measurement precision is insufficient, so that the method and the technique only stay in a laboratory stage and cannot be applied to field measurement of a machine tool. Patent number 2019109776237, a receiving and transmitting split type five-degree-of-freedom measuring device and method with optical path drift compensation, which is based on the laser collimation and auto-collimation principle to realize the measurement, provides a three-axis five-degree-of-freedom measuring head of a machine tool, can simultaneously measure the laser angle drift to realize the compensation, realizes the measurement of multiple degrees of freedom and can be integrated in a numerical control machine tool. At present, the measurement accuracy and stability of the method are affected by factors such as air disturbance, laser drift, mechanical deformation, calibration errors of a photoelectric sensor and the like, wherein the mechanical deformation of a laser, a pyramid prism, a plane mirror and other reflecting elements is one of main factors affecting multiple free errors and measuring accuracy at the same time, and the mechanical deformation of the laser, the pyramid prism, the plane mirror and other reflecting elements is mainly affected by thermal deformation generated by heating of a circuit of a measuring device. Meanwhile, in order to ensure the precision and reliability of five-degree-of-freedom error measurement of the machine tool, higher requirements are put on machining and design assembly of mechanical parts. Therefore, the development of the five-degree-of-freedom error measuring device of the machine tool based on the thermal stability design has important significance.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides a five-degree-of-freedom error measurement device of a machine tool based on a thermal stability design, which is used for realizing five-degree-of-freedom error measurement of a field machine tool, wherein the five-degree-of-freedom error measurement device is suitable for remote measurement, can compensate laser angle drift, is convenient to integrate in a numerical control machine tool and has low cost. According to the invention, through a layered isolation design, the circuit part and the light path part of the five-degree-of-freedom error measuring device of the machine tool are isolated in layers, a heat insulation material is filled between the two layers, heat is isolated outside the light path part, and meanwhile, the circuit part and the light path part are integrated into a whole, so that the volume of the measuring device is reduced; the heat generated by the circuit part is conducted outside the measuring device through the heat conduction design of the shell, and the heat is dissipated through the convection of the air outside the device, so that the mechanical deformation of the laser, the pyramid prism, the plane mirror and other reflecting elements caused by thermal stress is weakened, and the thermal stability of the device is improved. The invention can be popularized and applied to the field measurement occasion of various machine tools, and realizes the high-precision, long-distance and online multi-degree-of-freedom machine tool error measurement.
The invention aims at realizing the following technical scheme:
The five-degree-of-freedom error measuring device of the machine tool based on the thermal stability design comprises a laser transmitting end and a laser receiving end, wherein the laser transmitting end consists of a laser transmitting end upper panel, a laser transmitting end rear panel, a laser transmitting end lower panel, a laser transmitting end front panel, an optical window, a laser transmitting end light path part and a laser transmitting end circuit part;
the laser emission end circuit part consists of a laser, a laser emission end printed circuit board and a laser emission end radiating plate;
the laser emission end light path part consists of an optical fiber winding disc, a laser emission end light path bottom plate, a laser collimator, a first prism reflector, a first spectroscope, a second convex lens, a second two-dimensional position sensitive detector, a second prism reflector, a fourth spectroscope, a third convex lens and a third two-dimensional position sensitive detector;
The laser receiving end consists of a laser receiving end upper panel, a laser receiving end front panel, a laser receiving end rear panel, a laser receiving end lower panel, a lens cone, a laser receiving end circuit part and a laser receiving end light path part;
The laser receiving end circuit part consists of a laser receiving end radiating plate and a laser receiving end printed circuit board;
The light path part of the laser receiving end consists of a third spectroscope, a first convex lens, a first two-dimensional position sensitive detector, a first four-quadrant detector and a second four-quadrant detector;
The laser emission end forms a sealed box structure through the laser emission end upper panel, the laser emission end rear panel, the laser emission end lower panel and the laser emission end front panel, and the optical window is arranged on the laser emission end front panel;
The laser receiving end forms a sealed box structure through a laser receiving end upper panel, a laser receiving end lower panel, a laser receiving end front panel and a laser receiving end rear panel, and the lens cone extends out of the laser receiving end front panel; the laser is emitted from the optical window of the laser emission end and received by the lens cone of the laser receiving end, so that the five degrees of freedom of the machine tool are measured;
The laser emission end light path part and the laser emission end circuit part are arranged in a layered and isolated manner, a heat insulation material is filled between the two parts, the laser emission end light path part is independently provided with a shell, the laser emission end printed circuit board is arranged above the laser emission end heat dissipation plate through a copper column, and the laser emission end heat dissipation plate is used for conducting heat generated by the laser emission end printed circuit board to each panel of the laser emission end;
The laser receiving end circuit part and the laser receiving end light path part are arranged in a layered and isolated mode, the laser receiving end printed circuit board is arranged above the laser receiving end radiating plate through a copper column, and the laser receiving end radiating plate is used for conducting heat generated by the laser receiving end printed circuit board to each panel of the laser receiving end;
The laser transmitting end light path bottom plate is arranged on the upper surface of the laser transmitting end lower panel, the optical fiber winding disc and the laser are sequentially arranged on the upper surface of the laser transmitting end light path bottom plate, the laser emits laser, the laser is reflected by the first prism reflector and then is divided into two beams of laser through the first spectroscope, the laser passing through the first spectroscope is divided into two beams of laser through the second spectroscope and then is divided into two beams of laser through the third spectroscope of the laser receiving end, and the laser passing through the third spectroscope irradiates the first four-quadrant detector to realize the measurement of horizontal straightness and vertical straightness and serve as a two-dimensional straightness measurement result of the measuring device; the laser reflected by the third spectroscope is focused on the first two-dimensional position sensitive detector through the first convex lens, so that pitch angle and yaw angle measurement is realized; the laser reflected by the second beam splitter is focused on a second two-dimensional position sensitive detector through a second convex lens, so that the measurement of the laser angle drift passing through the second beam splitter is realized; the laser reflected by the first spectroscope is reflected by the second prism reflector, the laser reflected by the second prism reflector is divided into two beams of laser through the fourth spectroscope, the laser after passing through the fourth spectroscope irradiates the second four-quadrant detector at the laser receiving end, the measurement of the horizontal straightness and the vertical straightness is realized, and the device only utilizes the vertical straightness of the second four-quadrant detector and combines the vertical straightness of the first four-quadrant detector to realize the rolling angle measurement; the laser reflected by the fourth spectroscope is focused on the third two-dimensional position sensitive detector through the third convex lens, so that the laser angle drift measurement through the fourth spectroscope is realized.
Further, the laser receiving end radiating plate and the laser transmitting end radiating plate are both copper plates.
Furthermore, the lower panel of the laser emission end can be connected with the machine tool through the flange, heat generated by the circuit part is conducted outside the measuring device in a shell heat conduction mode, and the heat is dissipated through convection of air outside the measuring device, so that the thermal stress born by an optical element inside a light path part of the laser emission end is reduced, the thermal stability of the laser emission end is improved, and the mechanical deformation is prevented;
The rear panel of the laser receiving end can be connected with a machine tool through the flange, heat generated by the circuit part is conducted outside the measuring device in a shell heat conduction mode, and the heat is dissipated through convection of air outside the measuring device, so that the thermal stress received by an optical element inside a light path part of the laser receiving end is reduced, the thermal stability of the laser receiving end is improved, and mechanical deformation is prevented.
Compared with the prior art, the technical scheme of the invention has the following beneficial effects:
The measuring device can be used for realizing simultaneous measurement of the pitch angle, the yaw angle, the roll angle, the horizontal straightness and the vertical straightness of a machine tool on site, eliminating the influence of laser angle drift on five-degree-of-freedom measurement and improving the measurement precision; the thermal stress of each optical element in the laser receiving end and the laser transmitting end is reduced by the layered isolation design of the circuit part and the light path part of the laser receiving end and the heat conduction design of the shell, and the thermal stability of the measuring device is improved, so that the accuracy and the reliability of field measurement are improved; through the integrated design of the mechanical structures of the circuit part and the light path part of the laser receiving end and the laser transmitting end, the space is fully utilized, the structure is compact, the volume is small, the laser measuring device can be integrated in a numerical control machine tool, and the on-line measurement is realized. Compared with the traditional measuring device, the device has the advantages of large volume, difficult integration, low precision caused by the influence of environmental thermal stress on site measurement, and the like, and the device for measuring the five-degree-of-freedom error of the machine tool is high in precision, integrated, easy to install and high in reliability.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a laser emitting end of a measuring device according to the present invention.
Fig. 2 is a schematic diagram of the overall structure of a laser receiving end of the measuring device of the present invention.
FIG. 3 is a schematic view of the internal structure of the laser emitting end of the measuring device of the present invention.
Fig. 4 is a schematic diagram of the internal structure of the laser receiving end of the measuring device of the present invention.
Fig. 5 is a schematic view of the optical path structure of the laser emitting end of the measuring device of the present invention.
Reference numerals: the laser light source comprises a 1-laser light emitting end upper panel, a 2-laser light emitting end rear panel, a 3-laser light emitting end upper and lower panel, a 4-laser light emitting end front panel, a 5-optical window, a 6-laser light emitting end light path part, a 7-laser light receiving end upper panel, a 8-laser light receiving end front panel, a 9-laser light receiving end radiating plate, a 10-lens barrel, a 11-laser light receiving end printed circuit board, a 12-laser light emitting end circuit part, a 13-laser, a 14-laser light emitting end printed circuit board, a 15-laser light emitting end radiating plate, a 16-optical fiber winding disc, a 17-laser light receiving end rear panel, a 18-laser light receiving end lower panel, a 19-third spectroscope, a 20-first convex lens, a 21-first two-dimensional position sensitive detector, a 22-first four-quadrant detector, a 23-second four-quadrant detector, a 24-laser light receiving end circuit part, a 25-laser light receiving end light path part, a 26-laser light emitting end light path bottom plate, a 27-laser collimator, a 28-first prism reflector, a 29-first spectroscope, a 30-second convex lens, a 31-second convex lens, a 32-third two-dimensional position sensitive lens, a 33-third two-dimensional position sensitive lens, a 35-third two-dimensional position sensitive lens.
Detailed Description
The invention is described in further detail below with reference to the drawings and the specific examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
The invention provides a five-degree-of-freedom error measuring device for a machine tool based on thermal stability design. The measuring device is divided into a laser transmitting end and a laser receiving end. The laser emission end is composed of a laser emission end upper panel 1, a laser emission end rear panel 2, a laser emission end lower panel 3, a laser emission end front panel 4, an optical window 5, a laser emission end light path part 6 and a laser emission end circuit part 12;
the laser emission end circuit part 12 is composed of a laser 13, a laser emission end printed circuit board 14 and a laser emission end heat dissipation plate 15;
The laser emission end light path part 6 is composed of an optical fiber winding disc 16, a laser emission end light path bottom plate 26, a laser collimator 27, a first prism reflector 28, a first spectroscope 29, a second spectroscope 30, a second convex lens 31, a second two-dimensional position sensitive detector 32, a second prism reflector 33, a fourth spectroscope 34, a third convex lens 35 and a third two-dimensional position sensitive detector 36;
The laser receiving end consists of a laser receiving end upper panel 7, a laser receiving end front panel 8, a laser receiving end rear panel 17, a laser receiving end lower panel 18, a lens cone 10, a laser receiving end circuit part 24 and a laser receiving end light path part 25;
The laser receiving end circuit part 24 is composed of a laser receiving end heat radiation plate 9 and a laser receiving end printed circuit board 11;
The laser receiving end optical path portion 25 is constituted by a third spectroscope 19, a first convex lens 20, a first two-dimensional position-sensitive detector 21, a first four-quadrant detector 22, and a second four-quadrant detector 23.
Because the machine tool processing field environment is complex, in order to ensure the practical application of the five-degree-of-freedom error measuring device of the machine tool in the field environment, the light path part and the circuit part of the laser transmitting end and the laser receiving end need to be integrated and sealed. As shown in fig. 1, the laser emission end is sealed with an optical window 5 through a laser emission end upper panel 1, a laser emission end rear panel 2, a laser emission end lower panel 3, a laser emission end front panel 4; as shown in fig. 2, the laser receiving end is sealed by the laser receiving end upper panel 7, the laser receiving end lower panel 18, the laser receiving end front panel 8, the laser receiving end rear panel 17, the laser receiving end lower panel 18 and the lens barrel 10. Because the machine tool is made of cast iron, the materials of each panel of the laser emitting section and the laser receiving end need to be selected from stainless steel with the thermal expansion coefficient similar to that of the cast iron. When the measuring device is used, the laser transmitting end is arranged at the fixed position of the to-be-measured shaft of the numerical control machine tool, the laser receiving end is arranged on the sliding table of the to-be-measured shaft of the numerical control machine tool, laser is emitted from the optical window 5 of the laser transmitting end and received by the lens cone 10 of the laser receiving end, and the five-degree-of-freedom error measurement of the machine tool is completed.
The internal structure of the laser emitting end is shown in fig. 3, and the main heat sources are the laser 13 and the printed circuit board 14 in the circuit part 12 of the laser emitting end, so that the laser emitting end light path part 6 and the circuit part 12 of the laser emitting end are designed in a layered isolation way, and the laser emitting end light path part 6 is designed into a single shell, so that the interference of temperature and air flow on measurement is reduced. And simultaneously, the gap between the laser emission end light path part 6 and the laser emission end circuit part 12 is filled by the heat insulation material, so that the heat conduction of the laser emission end circuit part 12 to the laser emission end light path part 6 is further reduced. Meanwhile, the laser emission end printed circuit board 14 is connected with the laser emission end radiating plate 15 through copper columns, the laser emission end radiating plate 15 is made of copper plates with high heat conductivity, heat generated by the laser emission end printed circuit board 14 is conducted to the laser emission end rear panel 2, the laser emission end lower panel 3 and the laser emission end front panel 4 through the laser emission end radiating plate 15, the laser emission end lower panel 3 can be connected with a machine tool through a design of heat conduction of a shell, heat generated by a circuit part is conducted outside a measuring device, heat dissipation is conducted through external air convection of the device, thermal stress received by a laser, a pyramid prism, a plane mirror and other reflecting elements in the laser emission end light path part 6 is reduced, the thermal stability of the laser emission end is improved, and mechanical deformation is prevented.
As shown in FIG. 4, the internal structure of the laser receiving end is shown in FIG. 4, the number of optical components of the laser receiving end is less than that of the transmitting end, and meanwhile, the angle error caused by mechanical deformation generated by thermal stress at the receiving end is small, and as the receiving end circuit part has no larger heat generating element such as the laser 13, the main heat source is the laser receiving end printed circuit board 11 in the laser receiving end circuit part 24, so that the layered isolation design is carried out on the laser receiving end circuit part 24 and the laser receiving end optical path part 25, and the heat conduction of the laser receiving end circuit part 24 to the laser receiving end optical path part 25 is reduced. Meanwhile, the laser receiving end printed circuit board 11 is connected with the laser receiving end heat dissipation plate 9 through copper columns, the laser receiving end heat dissipation plate 9 is made of copper plates with high heat conductivity, heat generated by the laser receiving end printed circuit board 11 is conducted to the laser receiving end rear panel 17, the laser receiving end lower panel 18 and the laser receiving end upper panel 7 through the laser receiving end heat dissipation plate 9, the laser receiving end rear panel 17 can be connected with a machine tool through a design of heat conduction of a shell, heat generated by a circuit part is conducted outside a measuring device, and heat dissipation is achieved through convection of air outside the device, so that the thermal stress received by optical elements in the laser receiving end light path part 25 is reduced, the thermal stability of the laser receiving end is improved, and mechanical deformation is prevented.
The internal structure of the light path part 6 of the laser emission end is shown in fig. 5, and referring to fig. 4, the laser 27 emits laser, the laser is reflected by the first prism reflector 28 and then divided into two beams of laser through the first beam splitter 29, the laser transmitted through the first beam splitter 29 is divided into two beams of laser through the second beam splitter 30, the laser transmitted through the second beam splitter 30 is divided into two beams of laser through the third beam splitter 19 of the laser receiving end, and the laser transmitted through the third beam splitter 19 irradiates the first four-quadrant detector 22, so that the measurement of the horizontal straightness and the vertical straightness is realized, and the two-dimensional straightness measurement result of the device is obtained; the laser reflected by the third spectroscope 19 is focused on the first two-dimensional position sensitive detector 21 through the first convex lens 20, so as to realize pitch angle and deflection angle measurement; the laser reflected by the second beam splitter 30 is focused on a second two-dimensional position sensitive detector 32 through a second convex lens 31, so that the measurement of the angle drift of the laser transmitted through the second beam splitter 30 is realized; the laser reflected by the first spectroscope 29 is reflected by the second prism reflector 33, the laser reflected by the second prism reflector 33 is divided into two beams of laser after passing through the fourth spectroscope 34, the laser after passing through the fourth spectroscope 34 irradiates the second four-quadrant detector 23 at the laser receiving end, the measurement of the horizontal straightness and the vertical straightness is realized, the device only uses the vertical straightness of the second four-quadrant detector 23 and combines the vertical straightness of the first four-quadrant detector 22 to realize the rolling angle measurement; the laser reflected by the fourth spectroscope 34 is focused on a third two-dimensional position sensitive detector 36 through a third convex lens 35, so as to realize the measurement of the laser angle drift passing through the fourth spectroscope 34;
the invention is not limited to the embodiments described above. The above description of specific embodiments is intended to describe and illustrate the technical aspects of the present invention, and is intended to be illustrative only and not limiting. Numerous specific modifications can be made by those skilled in the art without departing from the spirit of the invention and scope of the claims, which are within the scope of the invention.
Claims (1)
1. The five-degree-of-freedom error measuring device of the machine tool based on the thermal stability design is characterized by comprising a laser transmitting end and a laser receiving end, wherein the laser transmitting end consists of a laser transmitting end upper panel (1), a laser transmitting end rear panel (2), a laser transmitting end lower panel (3), a laser transmitting end front panel (4), an optical window (5), a laser transmitting end light path part (6) and a laser transmitting end circuit part (12);
the laser emission end circuit part (12) consists of a laser (13), a laser emission end printed circuit board (14) and a laser emission end radiating plate (15);
The laser emission end light path part (6) is composed of an optical fiber winding disc (16), a laser emission end light path bottom plate (26), a laser collimator (27), a first prism reflector (28), a first spectroscope (29), a second spectroscope (30), a second convex lens (31), a second two-dimensional position sensitive detector (32), a second prism reflector (33), a fourth spectroscope (34), a third convex lens (35) and a third two-dimensional position sensitive detector (36);
The laser receiving end consists of a laser receiving end upper panel (7), a laser receiving end front panel (8), a laser receiving end rear panel (17), a laser receiving end lower panel (18), a lens cone (10), a laser receiving end circuit part (24) and a laser receiving end light path part (25);
the laser receiving end circuit part (24) consists of a laser receiving end radiating plate (9) and a laser receiving end printed circuit board (11);
The laser receiving end light path part (25) is composed of a third spectroscope (19), a first convex lens (20), a first two-dimensional position sensitive detector (21), a first four-quadrant detector (22) and a second four-quadrant detector (23);
The laser emission end forms a sealed box structure through the laser emission end upper panel (1), the laser emission end rear panel (2), the laser emission end lower panel (3) and the laser emission end front panel (4), and the optical window (5) is arranged on the laser emission end front panel (4);
The laser receiving end forms a sealed box structure through a laser receiving end upper panel (7), a laser receiving end lower panel (18), a laser receiving end front panel (8) and a laser receiving end rear panel (17), and the lens cone (10) extends out of the laser receiving end front panel (8); the laser is emitted from a laser emission end optical window (5) and received by a laser receiving end lens cone (10), so that the five degrees of freedom of the machine tool are measured;
The laser emission end light path part (6) and the laser emission end circuit part (12) are arranged in a layered and isolated manner, a heat insulation material is filled between the two gaps, the laser emission end light path part (6) is independently provided with a shell, the laser emission end printed circuit board (14) is arranged above the laser emission end heat dissipation plate (15) through a copper column, and the laser emission end heat dissipation plate (15) is used for conducting heat generated by the laser emission end printed circuit board (14) to each panel of the laser emission end;
The laser receiving end circuit part (24) and the laser receiving end light path part (25) are arranged in a layered and isolated mode, the laser receiving end printed circuit board (11) is arranged above the laser receiving end radiating plate (9) through a copper column, and the laser receiving end radiating plate (9) is used for conducting heat generated by the laser receiving end printed circuit board (11) to each panel of the laser receiving end;
The laser emission end light path bottom plate (26) is arranged on the upper surface of the laser emission end lower panel (3), the optical fiber winding disc (16) and the laser collimator (27) are sequentially arranged on the upper surface of the laser emission end light path bottom plate (26), the laser collimator (27) emits laser, the laser is reflected by the first prism reflector (28) and then is divided into two beams of laser through the first beam splitter (29), the laser passing through the first beam splitter (29) is divided into two beams of laser through the second beam splitter (30), the laser passing through the second beam splitter (30) is divided into two beams of laser through the third beam splitter (19) at the laser receiving end, and the laser passing through the third beam splitter (19) irradiates the first quadrant detector (22) to realize the measurement of the horizontal straightness and the vertical straightness and is used as a two-dimensional straightness measurement result of the measurement device; the laser reflected by the third spectroscope (19) is focused on a first two-dimensional position sensitive detector (21) through a first convex lens (20) to realize pitch angle and deflection angle measurement; the laser reflected by the second beam splitter (30) is focused on a second two-dimensional position sensitive detector (32) through a second convex lens (31), so that the measurement of the laser angle drift passing through the second beam splitter (30) is realized; the laser reflected by the first spectroscope (29) is reflected by the second prism reflector (33), the laser reflected by the second prism reflector (33) is divided into two beams of laser after passing through the fourth spectroscope (34), the laser after passing through the fourth spectroscope (34) irradiates onto a second four-quadrant detector (23) at a laser receiving end, so as to realize the measurement of horizontal straightness and vertical straightness, and the device only uses the vertical straightness of the second four-quadrant detector (23) and combines the vertical straightness of the first four-quadrant detector (22) to realize the rolling angle measurement; the laser reflected by the fourth spectroscope (34) is focused on a third two-dimensional position sensitive detector (36) through a third convex lens (35), so that the laser angle drift measurement through the fourth spectroscope (34) is realized, the laser receiving end radiating plate (9) and the laser transmitting end radiating plate (15) are both copper plates, the lower laser transmitting end panel (3) can be connected with a machine tool through a flange, the heat generated by a circuit part is conducted outside a measuring device in a shell heat conduction mode, and the heat is dissipated through the external air convection of the measuring device, so that the thermal stress on optical elements in the optical path part (6) of the laser transmitting end is reduced, the thermal stability of the laser transmitting end is improved, and the mechanical deformation is prevented;
The rear panel (17) of the laser receiving end can be connected with a machine tool through a flange, heat generated by the circuit part is conducted outside the measuring device in a shell heat conduction mode, and heat dissipation is conducted through air convection outside the measuring device, so that the thermal stress received by an optical element in a light path part (25) of the laser receiving end is reduced, the thermal stability of the laser receiving end is improved, and mechanical deformation is prevented.
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