CN112611342A - Machine tool five-degree-of-freedom error measuring device designed based on thermal stability - Google Patents
Machine tool five-degree-of-freedom error measuring device designed based on thermal stability Download PDFInfo
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- CN112611342A CN112611342A CN202011347318.9A CN202011347318A CN112611342A CN 112611342 A CN112611342 A CN 112611342A CN 202011347318 A CN202011347318 A CN 202011347318A CN 112611342 A CN112611342 A CN 112611342A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
- H01S5/02476—Heat spreaders, i.e. improving heat flow between laser chip and heat dissipating elements
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a machine tool five-degree-of-freedom error measuring device based on thermal stability design, which comprises a laser transmitting end and a laser receiving end, wherein the laser transmitting end consists of a laser transmitting end upper panel, a laser transmitting end rear panel, a laser transmitting end lower panel, a laser transmitting end front panel, an optical window, a laser transmitting end light path part and a laser transmitting end circuit part; the laser receiving end consists of a laser receiving end upper panel, a laser receiving end front panel, a laser receiving end rear panel, a laser receiving end lower panel, a lens cone, a laser receiving end circuit part and a laser receiving end light path part; the invention integrates the circuit part and the optical path part into a whole at the transmitting end and the receiving end and simultaneously carries out the layered isolation design, thereby reducing the volume of the measuring device; through the design of shell heat conduction, mechanical deformation of reflecting elements such as a laser, a pyramid prism and a plane mirror caused by thermal stress is weakened, and the thermal stability of the device is improved.
Description
Technical Field
The invention belongs to the technical field of precision measurement, and particularly relates to a machine tool five-degree-of-freedom error measuring device based on thermal stability design.
Background
The machine tool is an important carrier in the manufacturing industry, has rapid development and wide popularization range, and injects new vitality for the development of the manufacturing industry. With the rapid development of modern mechanical manufacturing technology, higher requirements are put forward on the machining precision of various numerical control machines, and the adoption of an appropriate method for improving the precision of the machine tool has very important significance. A typical three axis machine includes 21 geometric errors, namely a six degree of freedom error for each axis, including positioning error, two dimensional straightness error, pitch angle, yaw angle, and roll angle, and an orthogonality error between each two axes. At present, common measurement means such as a laser interferometer, a laser tracking interferometer, a ball rod instrument and the like can only measure one parameter at a time, and the measurement of all the parameters is time-consuming and labor-consuming, so that the production efficiency is greatly reduced, and the economic benefit is further influenced. Therefore, the rapid and effective measurement of the machine tool error is the key for improving the machining precision of the numerical control machine tool.
The method for realizing multi-degree-of-freedom measurement based on the laser collimation and auto-collimation principles is simple in structure, easy to integrate and low in cost. At present, many laser collimation methods and technologies appear at home and abroad, but the methods and technologies or measurement systems are complex, so that the measurement head is large in size, or reasonable thermal stability design is not considered, so that the measurement accuracy is insufficient, and the method only stays in a laboratory stage and cannot be applied to field measurement of machine tools. Patent No. 2019109776237, a "split type five-degree-of-freedom measuring device and method with optical path drift compensation" provides a machine tool three-axis five-degree-of-freedom measuring head for realizing measurement based on laser collimation and auto-collimation principles, which can simultaneously measure the drift of laser angles to realize compensation, realize multi-degree-of-freedom measurement and can be integrated in a numerical control machine tool. At present, the measurement accuracy and stability of the method are affected by factors such as air disturbance, laser drift, mechanical deformation, calibration error of a photoelectric sensor, and the like, wherein the mechanical deformation of the reflecting elements such as the laser, the pyramid prism, the plane mirror, and the like is one of the main factors affecting the multi-free-error simultaneous measurement accuracy, and the mechanical deformation of the reflecting elements such as the laser, the pyramid prism, the plane mirror, and the like is mainly affected by the thermal deformation generated by the heating of the circuit of the measurement device. Meanwhile, in order to ensure the precision and the reliability of the five-degree-of-freedom error measurement of the machine tool, higher requirements are put forward on the machining and the design assembly of mechanical parts. Therefore, the development of the machine tool five-degree-of-freedom error measuring device based on the thermal stability design is of great significance.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides a machine tool five-degree-of-freedom error measuring device designed based on thermal stability, which is used for realizing field machine tool five-degree-of-freedom error measurement suitable for remote measurement, capable of compensating laser angle drift, convenient to integrate in a numerical control machine tool and low in cost. According to the invention, through a layered isolation design, the circuit part and the optical path part of the machine tool five-degree-of-freedom error measuring device are separated in a layered manner, a heat insulating material is filled between the two layers, the heat is isolated outside the optical path part, and meanwhile, the circuit part and the optical path part are integrated into a whole, so that the volume of the measuring device is reduced; through shell heat conduction design, conduct the heat that the circuit part produced outside measuring device, through the outside air convection heat dissipation of device, the mechanical deformation of reflecting elements such as laser instrument and pyramid prism, level crossing that has weakened the thermal stress and lead to has improved the thermal stability of device. The invention can be popularized and used in various machine tool field measurement occasions, and realizes high-precision, long-distance and online multi-degree-of-freedom machine tool error measurement.
The purpose of the invention is realized by the following technical scheme:
a machine tool five-degree-of-freedom error measuring device based on thermal stability design comprises a laser emitting end and a laser receiving end, wherein the laser emitting end consists of a laser emitting end upper panel, a laser emitting end rear panel, a laser emitting end lower panel, a laser emitting end front panel, an optical window, a laser emitting end light path part and a laser emitting end circuit part;
the laser emitting end circuit part consists of a laser, a laser emitting end printed circuit board and a laser emitting end cooling plate;
the laser emission end light path part consists of an optical fiber winding disc, a laser emission end light path bottom plate, a laser collimator, a first prism reflector, a first spectroscope, a second convex lens, a second two-dimensional position sensitive detector, a second prism reflector, a fourth spectroscope, a third convex lens and a third two-dimensional position sensitive detector;
the laser receiving end consists of a laser receiving end upper panel, a laser receiving end front panel, a laser receiving end rear panel, a laser receiving end lower panel, a lens cone, a laser receiving end circuit part and a laser receiving end light path part;
the laser receiving end circuit part consists of a laser receiving end heat dissipation plate and a laser receiving end printed circuit board;
the laser receiving end light path part consists of a third beam splitter, a first convex lens, a first two-dimensional position sensitive detector, a first four-quadrant detector and a second four-quadrant detector;
the laser emission end forms a sealed box structure through the laser emission end upper panel, the laser emission end rear panel, the laser emission end lower panel and the laser emission end front panel, and the optical window is arranged on the laser emission end front panel;
the laser receiving end forms a sealed box structure through a laser receiving end upper panel, a laser receiving end lower panel, a laser receiving end front panel and a laser receiving end rear panel, and the lens cone extends out of the laser receiving end front panel; laser is emitted from the optical window of the laser emitting end and is received by the lens barrel of the laser receiving end, and the measurement of five degrees of freedom of the machine tool is completed;
the laser emission end printed circuit board is arranged above a laser emission end cooling plate through a copper column, and the laser emission end cooling plate is used for conducting heat generated by the laser emission end printed circuit board to each panel of the laser emission end;
the laser receiving end printed circuit board is arranged above a laser receiving end heat dissipation plate through copper columns, and the laser receiving end heat dissipation plate is used for conducting heat generated by the laser receiving end printed circuit board to each panel of the laser receiving end;
the laser device emits laser, the laser is reflected by the first prism reflector and then is divided into two beams of laser through the first spectroscope, the laser penetrating through the first spectroscope is divided into two beams of laser through the second spectroscope, the laser penetrating through the second spectroscope is divided into two beams of laser through the third spectroscope at the laser receiving end, and the laser penetrating through the third spectroscope is irradiated on the first four-quadrant detector, so that the measurement of horizontal straightness and vertical straightness is realized and is used as a two-dimensional straightness measurement result of the measuring device; laser reflected by the third beam splitter is focused on the first two-dimensional position sensitive detector through the first convex lens to realize measurement of a pitch angle and a yaw angle; the laser reflected by the second spectroscope is focused on a second two-dimensional position sensitive detector through a second convex lens to realize the measurement of the laser angle drift through the second spectroscope; the laser reflected by the first spectroscope is reflected by the second prism reflector, the laser reflected by the second prism reflector is divided into two beams of laser after passing through the fourth spectroscope, the laser after passing through the fourth spectroscope is irradiated on a second four-quadrant detector at a laser receiving end, so that the measurement of the horizontal straightness and the vertical straightness is realized, and the device only utilizes the vertical straightness of the second four-quadrant detector and combines the vertical straightness of the first four-quadrant detector to realize the roll angle measurement; and laser reflected by the fourth spectroscope is focused on a third two-dimensional position sensitive detector through a third convex lens, so that the measurement of the laser angle drift through the fourth spectroscope is realized.
Furthermore, the laser receiving end heat dissipation plate and the laser emitting end heat dissipation plate are both copper plates.
Furthermore, the lower panel of the laser emission end can be connected with a machine tool through a flange, heat generated by the circuit part is conducted to the outside of the measuring device in a shell heat conduction mode, heat is dissipated by convection through the outside air of the measuring device, thermal stress on optical elements in the light path part of the laser emission end is reduced, the thermal stability of the laser emission end is improved, and mechanical deformation is prevented;
the rear panel of the laser receiving end can be connected with a machine tool through a flange, heat generated by the circuit part is conducted to the outside of the measuring device in a shell heat conduction mode, heat dissipation is achieved through air convection outside the measuring device, thermal stress on an optical element inside the optical path part of the laser receiving end is reduced, thermal stability of the laser receiving end is improved, and mechanical deformation is prevented.
Compared with the prior art, the technical scheme of the invention has the following beneficial effects:
the measuring device can be used for simultaneously measuring the field pitch angle, the yaw angle, the roll angle, the horizontal straightness and the vertical straightness of the machine tool, eliminating the influence of laser angle drift on five-degree-of-freedom measurement and improving the measurement precision; through the layered isolation design and the shell heat conduction design of the circuit part and the light path part of the laser receiving end and the laser emitting end, the thermal stress on each internal optical element is reduced, and the thermal stability of the measuring device is improved, so that the precision and the reliability of field measurement are improved; through the mechanical structure integrated design of the circuit part and the optical path part of the laser receiving end and the laser emitting end, the space is fully utilized, the structure is compact, the size is small, and the laser receiving end and the laser emitting end can be integrated in a numerical control machine tool to realize online measurement. Compare in traditional measuring device bulky, be difficult to integrate, the field measurement receives the influence of environmental thermal stress to lead to the low scheduling problem of precision, provides a high accuracy, integrates, easy installation and the high five degree of freedom error measurement devices of lathe of reliability.
Drawings
FIG. 1 is a schematic view of the overall structure of the laser emitting end of the measuring device of the present invention.
FIG. 2 is a schematic view of the overall structure of the laser receiving end of the measuring device of the present invention.
FIG. 3 is a schematic diagram of the internal structure of the laser emitting end of the measuring device of the present invention.
FIG. 4 is a schematic diagram of the internal structure of the laser receiving end of the measuring device of the present invention.
FIG. 5 is a schematic diagram of the optical path structure of the laser emitting end of the measuring device of the present invention.
Reference numerals: 1-laser emitting end upper panel, 2-laser emitting end rear panel, 3-laser emitting end upper and lower panels, 4-laser emitting end front panel, 5-optical window, 6-laser emitting end optical path section, 7-laser receiving end upper panel, 8-laser receiving end front panel, 9-laser receiving end heat sink, 10-lens barrel, 11-laser receiving end printed circuit board, 12-laser emitting end circuit section, 13-laser, 14-laser emitting end printed circuit board, 15-laser emitting end heat sink, 16-optical fiber winding disc, 17-laser receiving end rear panel, 18-laser receiving end lower panel, 19-third beam splitter, 20-first convex lens, 21-first two-dimensional position sensitive detector, 22-a first four-quadrant detector, 23-a second four-quadrant detector, 24-a laser receiving end circuit part, 25-a laser receiving end optical path part, 26-a laser emitting end optical path bottom plate, 27-a laser collimator, 28-a first prism reflector, 29-a first beam splitter, 30-a second beam splitter, 31-a second convex lens, 32-a second two-dimensional position sensitive detector, 33-a second prism reflector, 34-a fourth beam splitter, 35-a third convex lens and 36-a third two-dimensional position sensitive detector.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The invention provides a machine tool five-degree-of-freedom error measuring device designed based on thermal stability. The measuring device is divided into a laser transmitting end and a laser receiving end. The laser transmitting end consists of a laser transmitting end upper panel 1, a laser transmitting end rear panel 2, a laser transmitting end lower panel 3, a laser transmitting end front panel 4, an optical window 5, a laser transmitting end optical path part 6 and a laser transmitting end circuit part 12;
the laser emitting end circuit section 12 is constituted by a laser 13, a laser emitting end printed circuit board 14, a laser emitting end heat radiation plate 15;
the laser emission end optical path part 6 consists of an optical fiber winding disc 16, a laser emission end optical path bottom plate 26, a laser collimator 27, a first prism reflector 28, a first spectroscope 29, a second spectroscope 30, a second convex lens 31, a second two-dimensional position sensitive detector 32, a second prism reflector 33, a fourth spectroscope 34, a third convex lens 35 and a third two-dimensional position sensitive detector 36;
the laser receiving end consists of a laser receiving end upper panel 7, a laser receiving end front panel 8, a laser receiving end rear panel 17, a laser receiving end lower panel 18, a lens barrel 10, a laser receiving end circuit part 24 and a laser receiving end optical path part 25;
the laser receiving end circuit part 24 consists of a laser receiving end heat dissipation plate 9 and a laser receiving end printed circuit board 11;
the laser receiving end light path part 25 is composed of a third beam splitter 19, a first convex lens 20, a first two-dimensional position sensitive detector 21, a first four-quadrant detector 22 and a second four-quadrant detector 23.
Because the machining field environment of the machine tool is complex, in order to ensure the practical application of the five-degree-of-freedom error measuring device of the machine tool in the field environment, the light path parts and the circuit parts of the laser transmitting end and the laser receiving end need to be integrated and sealed. As shown in fig. 1, the laser emitting end is sealed with an optical window 5 through a laser emitting end upper panel 1, a laser emitting end rear panel 2, a laser emitting end lower panel 3, and a laser emitting end front panel 4; as shown in fig. 2, the laser receiving end is sealed by a laser receiving end upper panel 7, a laser receiving end lower panel 18, a laser receiving end front panel 8, a laser receiving end rear panel 17, a laser receiving end lower panel 18, and a lens barrel 10. Because the machine tool is made of cast iron, the materials of the panels of the laser emitting section and the laser receiving end need to be stainless steel with the thermal expansion coefficient similar to that of the cast iron. When the measuring device is used, the laser emitting end is installed at the fixed position of the shaft to be measured of the numerical control machine tool, the laser receiving end is installed on the sliding table of the shaft to be measured of the numerical control machine tool, laser is emitted from the optical window 5 of the laser emitting end and is received by the lens barrel 10 of the laser receiving end, and measurement of five-degree-of-freedom errors of the machine tool is completed.
The internal structure of the laser transmitting end is shown in fig. 3, the main heat sources are a laser 13 and a printed circuit board 14 in a laser transmitting end circuit part 12, so that a laser transmitting end optical path part 6 and the laser transmitting end circuit part 12 are designed in a layered isolation mode, and the laser transmitting end optical path part 6 is designed into a single shell to reduce the interference of temperature and air flow on measurement. At the same time, the gap between the laser emitting end optical path portion 6 and the laser emitting end circuit portion 12 is filled with a heat insulating material, further reducing the heat conduction of the laser emitting end circuit portion 12 to the laser emitting end optical path portion 6. Meanwhile, the laser emission end printed circuit board 14 is connected with the laser emission end heat dissipation plate 15 through a copper column, the laser emission end heat dissipation plate 15 is made of a copper plate with high heat conductivity, heat generated by the laser emission end printed circuit board 14 is conducted to the laser emission end rear panel 2 through the laser emission end heat dissipation plate 15, the laser emission end lower panel 3 and the laser emission end front panel 4 are manufactured, the laser emission end lower panel 3 can be connected with a machine tool through a flange, through the shell heat conduction design, heat generated by a circuit part is conducted to the outside of the measuring device, through the convection heat dissipation of air outside the device, the heat stress on reflecting elements such as a laser, a pyramid prism and a plane mirror inside the laser emission end optical path part 6 is reduced, the heat stability of the laser emission end is improved, and the mechanical deformation is prevented.
As shown in fig. 4, the internal structure of the laser receiving end is less than that of the transmitting end, and meanwhile, the angle error caused by the mechanical deformation generated by the thermal stress at the receiving end is smaller, and because the receiving end circuit part does not have components with large heat generation, such as the laser 13, and the like, the main heat source of the receiving end circuit part is the laser receiving end printed circuit board 11 in the laser receiving end circuit part 24, the laser receiving end circuit part 24 and the laser receiving end optical path part 25 are designed in a layered isolation manner, so that the heat conduction of the laser receiving end circuit part 24 to the laser receiving end optical path part 25. Meanwhile, the laser receiving end printed circuit board 11 is connected with the laser receiving end heat dissipation plate 9 through a copper column, the laser receiving end heat dissipation plate 9 is made of a copper plate with high heat conductivity, heat generated by the laser receiving end printed circuit board 11 is conducted to the laser receiving end rear panel 17 through the laser receiving end heat dissipation plate 9, the laser receiving end lower panel 18 and the laser receiving end upper panel 7, the laser receiving end rear panel 17 can be designed into a flange to be connected with a machine tool, through the shell heat conduction design, heat generated by a circuit part is conducted to the outside of the measuring device, heat dissipation is achieved through air convection outside the device, thermal stress on optical elements inside the laser receiving end optical path part 25 is reduced, thermal stability of the laser receiving end is improved, and mechanical.
The internal structure of the optical path part 6 of the laser emitting end is shown in fig. 5, and referring to fig. 4, the laser 27 emits laser, the laser is reflected by the first prism reflector 28, then passes through the first spectroscope 29 and is divided into two laser beams, the laser passing through the first spectroscope 29 passes through the second spectroscope 30 and is divided into two laser beams, the laser passing through the second spectroscope 30 passes through the laser receiving end and is divided into two laser beams by the third spectroscope 19, and the laser passing through the third spectroscope 19 irradiates the first four-quadrant detector 22, so that the measurement of the horizontal linearity and the vertical linearity is realized, and the measurement result is used as the two-dimensional linearity measurement result of the device; laser reflected by the third beam splitter 19 is focused on a first two-dimensional position sensitive detector 21 through a first convex lens 20, so that measurement of a pitch angle and a yaw angle is realized; the laser reflected by the second beam splitter 30 is focused on a second two-dimensional position sensitive detector 32 through a second convex lens 31, so that the angle drift measurement of the laser penetrating through the second beam splitter 30 is realized; the laser reflected by the first beam splitter 29 is reflected by the second prism reflector 33, the laser reflected by the second prism reflector 33 is divided into two beams of laser after passing through the fourth beam splitter 34, the laser after passing through the fourth beam splitter 34 irradiates on the second four-quadrant detector 23 at the laser receiving end, and the measurement of the horizontal straightness and the vertical straightness is realized, and the device only utilizes the straightness in the vertical direction of the second four-quadrant detector 23 and combines the straightness in the vertical direction of the first four-quadrant detector 22 to realize the roll angle measurement; the laser reflected by the fourth light splitting mirror 34 is focused on a third two-dimensional position sensitive detector 36 through a third convex lens 35, so that the angle drift measurement of the laser penetrating through the fourth light splitting mirror 34 is realized;
the present invention is not limited to the above-described embodiments. The foregoing description of the specific embodiments is intended to describe and illustrate the technical solutions of the present invention, and the above specific embodiments are merely illustrative and not restrictive. Those skilled in the art can make many changes and modifications to the invention without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (3)
1. A machine tool five-degree-of-freedom error measuring device designed based on thermal stability is characterized by comprising a laser emitting end and a laser receiving end, wherein the laser emitting end consists of a laser emitting end upper panel (1), a laser emitting end rear panel (2), a laser emitting end lower panel (3), a laser emitting end front panel (4), an optical window (5), a laser emitting end optical path part (6) and a laser emitting end circuit part (12);
the laser emitting end circuit part (12) is composed of a laser (13), a laser emitting end printed circuit board (14) and a laser emitting end heat dissipation plate (15);
the laser emission end light path part (6) is composed of an optical fiber winding disc (16), a laser emission end light path bottom plate (26), a laser collimator (27), a first prism reflector (28), a first spectroscope (29), a second spectroscope (30), a second convex lens (31), a second two-dimensional position sensitive detector (32), a second prism reflector (33), a fourth spectroscope (34), a third convex lens (35) and a third two-dimensional position sensitive detector (36);
the laser receiving end comprises a laser receiving end upper panel (7), a laser receiving end front panel (8), a laser receiving end rear panel (17), a laser receiving end lower panel (18), a lens cone (10), a laser receiving end circuit part (24) and a laser receiving end optical path part (25);
the laser receiving end circuit part (24) is composed of a laser receiving end heat radiation plate (9) and a laser receiving end printed circuit board (11);
the laser receiving end light path part (25) is composed of a third beam splitter (19), a first convex lens (20), a first two-dimensional position sensitive detector (21), a first four-quadrant detector (22) and a second four-quadrant detector (23);
the laser transmitting end forms a sealed box structure through the laser transmitting end upper panel (1), the laser transmitting end rear panel (2), the laser transmitting end lower panel (3) and the laser transmitting end front panel (4), and the optical window (5) is arranged on the laser transmitting end front panel (4);
the laser receiving end forms a sealed box structure through a laser receiving end upper panel (7), a laser receiving end lower panel (18), a laser receiving end front panel (8) and a laser receiving end rear panel (17), and the lens cone (10) extends out of the laser receiving end front panel (8); laser is emitted from the optical window (5) of the laser emitting end and is received by the lens barrel (10) of the laser receiving end, and the five-degree-of-freedom measurement of the machine tool is completed;
the laser emission end light path part (6) and the laser emission end circuit part (12) are arranged in a layered and isolated mode, a heat insulation material is filled in a gap between the laser emission end light path part and the laser emission end circuit part, the laser emission end light path part (6) is separately provided with a shell, the laser emission end printed circuit board (14) is installed above a laser emission end heat dissipation plate (15) through a copper column, and the laser emission end heat dissipation plate (15) is used for conducting heat generated by the laser emission end printed circuit board (14) to each panel of the laser emission end;
the laser receiving end circuit part (24) and the laser receiving end optical path part (25) are arranged in a layered and isolated mode, the laser receiving end printed circuit board (11) is installed above the laser receiving end heat dissipation plate (9) through copper columns, and the laser receiving end heat dissipation plate (9) is used for conducting heat generated by the laser receiving end printed circuit board (11) to each panel of the laser receiving end;
the laser device comprises a laser transmitting end light path bottom plate (26), an optical fiber winding disc (16) and a laser device (27), wherein the laser transmitting end light path bottom plate (26) is arranged on the upper surface of a laser transmitting end lower panel (3), the optical fiber winding disc (16) and the laser device (27) are sequentially arranged on the upper surface of the laser transmitting end light path bottom plate (26), the laser device (27) emits laser, the laser is reflected by a first prism reflector (28) and then is divided into two laser beams through a first spectroscope (29), the laser penetrating through the first spectroscope (29) passes through a second spectroscope (30) and then is divided into two laser beams, the laser penetrating through the second spectroscope (30) passes through a laser receiving end third spectroscope (19) and then is divided into two laser beams, and the laser beam penetrating through the third spectroscope (19) is irradiated onto a first four-quadrant detector (22), so that the measurement of horizontal; laser reflected by the third beam splitter (19) is focused on a first two-dimensional position sensitive detector (21) through a first convex lens (20) to realize measurement of a pitch angle and a yaw angle; the laser reflected by the second spectroscope (30) is focused on a second two-dimensional position sensitive detector (32) through a second convex lens (31), so that the laser angle drift measurement penetrating through the second spectroscope (30) is realized; the laser reflected by the first spectroscope (29) is reflected by a second prism reflector (33), the laser reflected by the second prism reflector (33) is divided into two beams of laser after passing through a fourth spectroscope (34), the laser penetrating through the fourth spectroscope (34) irradiates a second four-quadrant detector (23) at a laser receiving end, and the measurement of horizontal straightness and vertical straightness is realized, and the device only utilizes the straightness in the vertical direction of the second four-quadrant detector (23) and combines the straightness in the vertical direction of the first four-quadrant detector (22) to realize the roll angle measurement; the laser reflected by the fourth spectroscope (34) is focused on a third two-dimensional position sensitive detector (36) through a third convex lens (35), and the laser angle drift measurement of the laser penetrating through the fourth spectroscope (34) is realized.
2. The five-degree-of-freedom error measurement device designed based on thermal stability as claimed in claim 1, wherein the laser receiving end heat dissipation plate (9) and the laser emitting end heat dissipation plate (15) are both copper plates.
3. The machine tool five-degree-of-freedom error measuring device designed based on thermal stability as claimed in claim 1, wherein the lower panel (3) of the laser emission end can be connected with the machine tool through a flange, heat generated by the circuit part is conducted to the outside of the measuring device through a shell heat conduction mode, and heat dissipation is achieved through air convection outside the measuring device, so that thermal stress on optical elements inside the optical path part (6) of the laser emission end is reduced, thermal stability of the laser emission end is improved, and mechanical deformation is prevented;
the laser receiving end rear panel (17) can be connected with a machine tool through a flange, heat generated by the circuit part is conducted to the outside of the measuring device in a shell heat conduction mode, heat is dissipated through convection of air outside the measuring device, thermal stress on an optical element inside the laser receiving end optical path part (25) is reduced, thermal stability of the laser receiving end is improved, and mechanical deformation is prevented.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114199147A (en) * | 2021-12-10 | 2022-03-18 | 中国工程物理研究院流体物理研究所 | Measuring device and method for measuring bore inner diameter and coaxiality of gun barrel |
-
2020
- 2020-11-26 CN CN202011347318.9A patent/CN112611342A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114199147A (en) * | 2021-12-10 | 2022-03-18 | 中国工程物理研究院流体物理研究所 | Measuring device and method for measuring bore inner diameter and coaxiality of gun barrel |
| CN114199147B (en) * | 2021-12-10 | 2023-05-30 | 中国工程物理研究院流体物理研究所 | Measuring device, gun barrel bore inner diameter and coaxiality measuring method |
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