CN112582501A - Silicon solar cell RENA polycrystalline texturing processing method - Google Patents
Silicon solar cell RENA polycrystalline texturing processing method Download PDFInfo
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- CN112582501A CN112582501A CN202011467049.XA CN202011467049A CN112582501A CN 112582501 A CN112582501 A CN 112582501A CN 202011467049 A CN202011467049 A CN 202011467049A CN 112582501 A CN112582501 A CN 112582501A
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 64
- 239000010703 silicon Substances 0.000 title claims abstract description 64
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 63
- 241000084978 Rena Species 0.000 title claims abstract description 19
- 238000003672 processing method Methods 0.000 title claims abstract description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 78
- 239000000377 silicon dioxide Substances 0.000 claims description 39
- 238000007254 oxidation reaction Methods 0.000 claims description 35
- 230000003647 oxidation Effects 0.000 claims description 34
- 235000012239 silicon dioxide Nutrition 0.000 claims description 27
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 26
- 238000010521 absorption reaction Methods 0.000 claims description 26
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 13
- 229910017604 nitric acid Inorganic materials 0.000 claims description 13
- 239000007788 liquid Substances 0.000 claims description 12
- IOVCWXUNBOPUCH-UHFFFAOYSA-N Nitrous acid Chemical compound ON=O IOVCWXUNBOPUCH-UHFFFAOYSA-N 0.000 claims description 11
- 238000004090 dissolution Methods 0.000 claims description 7
- 229920000742 Cotton Polymers 0.000 claims description 6
- 238000002360 preparation method Methods 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 235000008216 herbs Nutrition 0.000 claims 1
- 230000001737 promoting effect Effects 0.000 claims 1
- 210000002268 wool Anatomy 0.000 claims 1
- 238000012545 processing Methods 0.000 abstract description 12
- 239000002699 waste material Substances 0.000 abstract description 2
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 230000002146 bilateral effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a silicon solar cell RENA polycrystalline texturing processing method, and particularly relates to the technical field of silicon solar cell processing. The invention is beneficial to accurately controlling the processing steps of the battery, improves the processing accurate efficiency of the battery, is convenient for recovering the solution, reduces the waste of the solution, is also convenient for absorbing the solution on the surface of the battery, and improves the processing efficiency of the battery.
Description
Technical Field
The invention relates to the technical field of silicon solar cell processing, in particular to a silicon solar cell RENA polycrystalline texturing processing method.
Background
The silicon solar cell refers to a solar cell using silicon as a base material. According to the crystalline form of silicon materials, there are classified into single crystalline silicon solar cells, polycrystalline silicon solar cells and amorphous silicon solar cells.
In the prior art, when the existing silicon solar cell is subjected to RENA polycrystalline texturing, the cell is generally put into a nitric acid solution and a hydrofluoric acid solution in sequence to perform silicon oxidation reaction and dissolution reaction, so that the excess solution on the surface of the cell is not absorbed and recovered conveniently, the solution is wasted, and the nitric acid solution and the hydrofluoric acid solution are mixed, so that the dissolution reaction efficiency of the cell is reduced, and the processing efficiency is low.
Disclosure of Invention
In order to overcome the above defects in the prior art, an embodiment of the present invention provides a method for texturing a silicon solar cell RENA polycrystal, and the technical problem to be solved by the present invention is: the problems that the solution is easily wasted and the processing efficiency is low when the existing silicon solar cell is subjected to RENA polycrystalline texturing processing are solved.
In order to achieve the purpose, the invention provides the following technical scheme: the silicon solar cell RENA polycrystalline texturing processing method comprises a hanging conveying station, a cell conveying station, a silicon oxidation station, a silicon dioxide dissolving station, a finished product conveying station, a lifting cylinder and a vacuum chuck, wherein the cell conveying station, the silicon oxidation station, the silicon dioxide dissolving station and the finished product conveying station are all located below the hanging conveying station, the lifting cylinder is connected to the lower side of the hanging conveying station, and the vacuum chuck is fixedly connected to the bottom end of the lifting cylinder, and the silicon solar cell RENA polycrystalline texturing processing method comprises the following preparation steps:
step 3, continuously conveying the battery through the hanging conveying station, and absorbing the nitric acid and nitrous acid solution attached to the surface of the battery through the first absorption station;
and 6, continuously conveying the battery through the hanging conveying station, moving the battery to the position above the finished product conveying station, then operating the lifting cylinder so as to drive the vacuum chuck and the battery to move downwards, separating the vacuum chuck from the battery after the battery is contacted with the finished product conveying station, resetting the lifting cylinder, and then conveying the battery through the finished product conveying station.
In a preferred embodiment, hang and carry station downside fixedly connected with first infrared receiver, second infrared receiver, third infrared receiver, fourth infrared receiver, fifth infrared receiver and sixth infrared receiver, first infrared receiver is located battery transport station top, second infrared receiver is located silicon oxidation station top, third infrared receiver is located first absorption station top, fourth infrared receiver is located silicon dioxide and dissolves the station top, fifth infrared receiver is located second absorption station top, sixth infrared receiver is located finished product transport station top, the cup joint is fixed with the fixed plate on the lift cylinder, inlay on the fixed plate and be fixed with first infrared transmitter, emit infrared light through first infrared transmitter to through first infrared receiver, and through first infrared receiver, The second infrared receiver, the third infrared receiver, the fourth infrared receiver, fifth infrared receiver and sixth infrared receiver receive infrared light in proper order, the operation of battery transport station has been controlled through first infrared receiver, control the operation of the promotion cylinder on the silicon oxidation station through the second infrared receiver, control the operation of first absorption station through the third infrared receiver, control the operation of the promotion cylinder on the silicon dioxide dissolves the station through the fourth infrared receiver, control the operation of second absorption station through the fifth infrared receiver, control the operation of finished product transport station through the sixth infrared receiver.
In a preferred embodiment, two connecting blocks are fixedly connected to the battery conveying station in a bilateral symmetry manner, a seventh infrared receiver is fixedly connected to the right side of the connecting block on the left side, a second infrared transmitter is fixedly connected to the left side of the connecting block on the right side, infrared light is emitted through the second infrared transmitter, and the infrared light is received through the seventh infrared receiver, so that the movement of the battery on the battery conveying station is controlled.
In a preferred embodiment, the battery conveying station and the outer side surface of the finished product conveying station are fixedly connected with positioning seats, and the batteries are conveniently placed through the positioning seats.
In a preferred embodiment, the outer side surfaces of the first absorption station and the second absorption station are respectively bonded and fixed with absorbent cotton pads, so that the absorbent cotton pads can conveniently absorb the nitric acid solution, the nitrous acid solution and the hydrofluoric acid solution on the surface of the battery, the surface of the battery is kept dry, and the reaction precision of the battery is improved.
In a preferred embodiment, the upper side surfaces of the silicon oxidation station and the silicon dioxide dissolving station are fixedly connected with liquid level measuring sensors, and the liquid levels of the nitric acid solution, the nitrous acid solution and the hydrofluoric acid solution are conveniently controlled through the liquid level measuring sensors.
In a preferred embodiment, silicon oxidation station and silica dissolve the inside shutoff push pedal that all is provided with of station, and silicon oxidation station and silica dissolve the equal fixedly connected with of station downside and promote the cylinder, two hydraulic stem on the promotion cylinder respectively with two shutoff push pedal downside fixed connection, be convenient for drive shutoff push pedal rebound through the operation that promotes the cylinder, and then be convenient for drive nitric acid solution, nitrous acid solution and hydrofluoric acid solution and carry out rebound, realized being convenient for carry out accurate control to the liquid level height of nitric acid solution, nitrous acid solution and hydrofluoric acid solution.
In a preferred embodiment, the right sides of the silicon oxidation station and the silicon dioxide dissolving station are provided with liquid collecting tanks, the lower side surfaces of the liquid collecting tanks are fixedly connected with positioning columns, the positioning columns are respectively inserted into the supports on the lower sides of the silicon oxidation station and the silicon dioxide dissolving station, and the nitric acid solution, the nitrous acid solution and the hydrofluoric acid solution are respectively collected through the liquid collecting tanks.
The invention has the technical effects and advantages that:
according to the invention, the first infrared receiver, the second infrared receiver, the third infrared receiver, the fourth infrared receiver, the fifth infrared receiver, the sixth infrared receiver, the absorption station, the liquid level measurement sensor and the absorbent cotton pad are arranged, so that the processing steps of the battery can be accurately controlled, the processing accuracy efficiency of the battery is improved, the solution can be conveniently recovered, the waste of the solution is reduced, the solution on the surface of the battery can be conveniently absorbed, and the processing efficiency of the battery is improved.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a schematic view of the overall structure of the battery conveying station of the present invention.
FIG. 3 is a schematic view showing the overall structure of a silicon oxidation station according to the present invention.
FIG. 4 is a schematic view of the overall construction of the sump of the present invention.
Fig. 5 is a schematic view of the overall structure of the lifting cylinder according to the present invention.
Fig. 6 is a schematic view showing the overall structure of the first absorption station in the present invention.
The reference signs are: 1. hanging a conveying station; 2. a first infrared receiver; 3. a second infrared receiver; 4. a third infrared receiver; 5. a fourth infrared receiver; 6. a fifth infrared receiver; 7. a sixth infrared receiver; 8. a battery transport station; 9. a silicon oxidation station; 10. a first absorption station; 11. a silica dissolution station; 12. a lifting cylinder; 13. a second absorption station; 14. a finished product conveying station; 15. a liquid collecting tank; 16. a positioning column; 17. a liquid level measuring sensor; 18. plugging the push plate; 19. a push cylinder; 20. a first infrared emitter; 21. a vacuum chuck; 22. a water absorbent cotton pad; 23. positioning seats; 24. a second infrared emitter; 25. and a seventh infrared receiver.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention provides a silicon solar cell RENA polycrystalline texturing processing method which comprises a suspension conveying station 1, a cell conveying station 8, a silicon oxidation station 9, a silicon dioxide dissolving station 11, a finished product conveying station 14, a lifting cylinder 12 and a vacuum chuck 21, wherein the cell conveying station 8, the silicon oxidation station 9, the silicon dioxide dissolving station 11 and the finished product conveying station 14 are all positioned below the suspension conveying station 1, the lower side of the suspension conveying station 1 is connected with the lifting cylinder 12, and the bottom end of the lifting cylinder 12 is fixedly connected with the vacuum chuck 21, and the method comprises the following preparation steps:
step 3, continuously conveying the battery through the hanging conveying station 1, and absorbing nitric acid and nitrous acid solution attached to the surface of the battery through the first absorption station 10;
and 6, continuously conveying the battery through the hanging conveying station 1, moving the battery to the position above the finished product conveying station 14, then operating the lifting cylinder 12 to drive the vacuum chuck 21 and the battery to move downwards, separating the vacuum chuck 21 from the battery after the battery is contacted with the finished product conveying station 14, resetting the lifting cylinder 12, and then conveying the battery through the finished product conveying station 14.
The lower side face of the hanging conveying station 1 is fixedly connected with a first infrared receiver 2, a second infrared receiver 3, a third infrared receiver 4, a fourth infrared receiver 5, a fifth infrared receiver 6 and a sixth infrared receiver 7, the first infrared receiver 2 is located above the battery conveying station 8, the second infrared receiver 3 is located above the silicon oxidation station 9, the third infrared receiver 4 is located above the first absorption station 10, the fourth infrared receiver 5 is located above the silicon dioxide dissolving station 11, the fifth infrared receiver 6 is located above the second absorption station 13, and the sixth infrared receiver 7 is located above the finished product conveying station 14.
A fixed plate is sleeved and fixed on the lifting cylinder 12, and a first infrared emitter 20 is embedded and fixed on the fixed plate.
The side bilateral symmetry fixedly connected with two connecting blocks on 8 battery transport stations, left connecting block right flank fixedly connected with seventh infrared receiver 25, connecting block left flank fixedly connected with second infrared emitter 24 on right side.
Positioning seats 23 are fixedly connected to the outer side surfaces of the battery conveying station 8 and the finished product conveying station 14.
And the outer sides of the first absorption station 10 and the second absorption station 13 are fixedly bonded with absorbent cotton pads 22.
Liquid level measuring sensors 17 are fixedly connected to the upper side surfaces of the silicon oxidation station 9 and the silicon dioxide dissolving station 11.
The silicon oxidation station 9 and the silicon dioxide dissolving station 11 are internally provided with plugging push plates 18, the lower side surfaces of the silicon oxidation station 9 and the silicon dioxide dissolving station 11 are fixedly connected with pushing cylinders 19, and hydraulic rods on the two pushing cylinders 19 are fixedly connected with the lower side surfaces of the two plugging push plates 18 respectively.
As shown in fig. 1 to 6, the embodiment specifically is as follows: a user places a battery on the positioning seat 23 on the battery conveying station 8, the battery conveying station 8 is operated, then the moving position of the battery is accurately controlled through the second infrared transmitter 24 and the seventh infrared receiver 25, then the lifting cylinder 12 and the vacuum chuck 21 are driven to move through the hanging conveying station 1, when infrared light emitted by the first infrared transmitter 20 is received by the first infrared light, the moving position of the lifting cylinder 12 is controlled, then the battery is adsorbed and fixed through the vacuum chuck 21, then the battery is driven to move rightwards in sequence through the hanging conveying station 1, then the second infrared receiver 3, the third infrared receiver 4, the fourth infrared receiver 5, the fifth infrared receiver 6 and the sixth infrared receiver 7 sequentially receive the infrared light, and further the position of the lifting cylinder 12 is accurately controlled, the battery sequentially enters the silicon oxidation station 9, the first absorption station 10, the silicon dioxide dissolution station 11, the second absorption station 13 and the finished product conveying station 14, the battery is accurately processed, the processing efficiency of the battery is improved, and the using effect is good.
The points to be finally explained are: first, in the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "mounted," "connected," and "connected" should be understood broadly, and may be a mechanical connection or an electrical connection, or a communication between two elements, and may be a direct connection, and "upper," "lower," "left," and "right" are only used to indicate a relative positional relationship, and when the absolute position of the object to be described is changed, the relative positional relationship may be changed;
secondly, the method comprises the following steps: in the drawings of the disclosed embodiments of the invention, only the structures related to the disclosed embodiments are referred to, other structures can refer to common designs, and the same embodiment and different embodiments of the invention can be combined with each other without conflict;
and finally: the above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that are within the spirit and principle of the present invention are intended to be included in the scope of the present invention.
Claims (9)
1. The utility model provides a silicon solar cell RENA polycrystal making herbs into wool processing method, includes hangs and carries station (1), battery transport station (8), silicon oxidation station (9), silica and dissolves station (11), finished product transport station (14), lift cylinder (12) and vacuum chuck (21), battery transport station (8), silicon oxidation station (9), silica dissolve station (11) and finished product transport station (14) and all are located and hang and carry station (1) below, and hang and carry station (1) downside and be connected with lift cylinder (12), lift cylinder (12) bottom fixedly connected with vacuum chuck (21), its characterized in that: the preparation method comprises the following preparation steps:
step 1, placing a battery which is not subjected to polycrystalline texturing on a battery conveying station (8), conveying a lifting cylinder (12) and a vacuum chuck (21) through a hanging conveying station (1), and adsorbing and fixing the battery through the vacuum chuck (21) when the vacuum chuck (21) moves to the position above the battery;
step 2, conveying the lifting cylinder (12) and the battery to a silicon oxidation station (9) through the hanging conveying station (1), and driving the battery to move downwards through the lifting cylinder (12), so that the battery is reacted with nitric acid and nitrous acid in the silicon oxidation station (9), and silicon is oxidized into silicon dioxide;
step 3, continuously conveying the battery through the hanging conveying station (1), and absorbing nitric acid and nitrous acid solution attached to the surface of the battery through the first absorption station (10);
step 4, continuously conveying the battery through the hanging conveying station (1), and driving the battery to move downwards through the lifting cylinder (12) when the battery moves to the position above the silicon dioxide dissolving station (11), so that the battery reacts with hydrofluoric acid in the silicon dioxide dissolving station (11), the silicon dioxide is dissolved, and silicon is newly exposed;
step 5, continuously conveying the batteries through the hanging conveying station (1), and absorbing the hydrofluoric acid solution attached to the surfaces of the batteries through a second absorption station (13);
and 6, continuously conveying the battery through the hanging conveying station (1), moving the battery to the position above the finished product conveying station (14), and then operating the lifting cylinder (12), so that the vacuum chuck (21) and the battery are driven to move downwards, separating the vacuum chuck (21) from the battery after the battery is contacted with the finished product conveying station (14), resetting the lifting cylinder (12), and then conveying the battery through the finished product conveying station (14).
2. The silicon solar cell RENA polycrystalline texturing processing method according to claim 1, characterized in that: hang and carry station (1) downside fixedly connected with first infrared receiver (2), second infrared receiver (3), third infrared receiver (4), fourth infrared receiver (5), fifth infrared receiver (6) and sixth infrared receiver (7), first infrared receiver (2) are located battery transport station (8) top, second infrared receiver (3) are located silicon oxidation station (9) top, third infrared receiver (4) are located first absorption station (10) top, fourth infrared receiver (5) are located silica and dissolve station (11) top, fifth infrared receiver (6) are located second and absorb station (13) top, sixth infrared receiver (7) are located finished product transport station (14) top.
3. The silicon solar cell RENA polycrystalline texturing processing method according to claim 1, characterized in that: the lifting cylinder (12) is fixedly sleeved with a fixed plate, and a first infrared emitter (20) is embedded and fixed on the fixed plate.
4. The silicon solar cell RENA polycrystalline texturing processing method according to claim 1, characterized in that: the battery conveying station (8) is provided with two connecting blocks which are symmetrically and fixedly connected with the left side and the right side, the right side of the left connecting block is fixedly connected with a seventh infrared receiver (25), and the left side of the right connecting block is fixedly connected with a second infrared emitter (24).
5. The silicon solar cell RENA polycrystalline texturing processing method according to claim 4, characterized in that: and positioning seats (23) are fixedly connected with the outer side surfaces of the battery conveying station (8) and the finished product conveying station (14).
6. The silicon solar cell RENA polycrystalline texturing processing method according to claim 1, characterized in that: and the outer side surfaces of the first absorption station (10) and the second absorption station (13) are fixedly bonded with water absorption cotton pads (22).
7. The silicon solar cell RENA polycrystalline texturing processing method according to claim 1, characterized in that: the upper side surfaces of the silicon oxidation station (9) and the silicon dioxide dissolution station (11) are fixedly connected with liquid level measuring sensors (17).
8. The silicon solar cell RENA polycrystalline texturing processing method according to claim 7, characterized in that: silicon oxidation station (9) and silica dissolve station (11) inside all be provided with shutoff push pedal (18), and silicon oxidation station (9) and silica dissolve equal fixedly connected with of station (11) downside and promote cylinder (19), two hydraulic stem on promoting cylinder (19) respectively with two shutoff push pedal (18) downside fixed connection.
9. The silicon solar cell RENA polycrystalline texturing processing method according to claim 7, characterized in that: silicon oxidation station (9) and silica dissolve station (11) right side and all be provided with collecting tank (15), collecting tank (15) downside fixedly connected with reference column (16), reference column (16) are pegged graft respectively on the support of silicon oxidation station (9) and silica dissolve station (11) downside.
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| CN202011467049.XA CN112582501A (en) | 2020-12-14 | 2020-12-14 | Silicon solar cell RENA polycrystalline texturing processing method |
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| CN202011467049.XA CN112582501A (en) | 2020-12-14 | 2020-12-14 | Silicon solar cell RENA polycrystalline texturing processing method |
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| CN205916392U (en) * | 2016-08-24 | 2017-02-01 | 浙江绿远光伏科技有限公司 | Silicon chip collection device of crystalline silicon solar cells making herbs into wool processing |
| CN205954114U (en) * | 2016-08-24 | 2017-02-15 | 东莞市安石金属科技有限公司 | Metal substrate etching system |
| CN206541843U (en) * | 2017-03-24 | 2017-10-03 | 刘一锋 | A kind of solar cell surface making herbs into wool cutting equipment |
| CN108615679A (en) * | 2018-03-27 | 2018-10-02 | 中山大学 | A kind of automation process production line towards novel standard optical assembly |
| CN109872964A (en) * | 2019-04-04 | 2019-06-11 | 乐山新天源太阳能科技有限公司 | The fluff making device and process for etching of black silicon solar cell |
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