CN112569623A - Continuous rectification device of nitrogen trifluoride - Google Patents
Continuous rectification device of nitrogen trifluoride Download PDFInfo
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- CN112569623A CN112569623A CN202011531168.7A CN202011531168A CN112569623A CN 112569623 A CN112569623 A CN 112569623A CN 202011531168 A CN202011531168 A CN 202011531168A CN 112569623 A CN112569623 A CN 112569623A
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- tank
- cooling pipe
- nitrogen trifluoride
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- water
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- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 title claims abstract description 50
- 238000001816 cooling Methods 0.000 claims abstract description 67
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 64
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims abstract description 53
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 24
- 239000007788 liquid Substances 0.000 claims description 20
- 238000000926 separation method Methods 0.000 claims description 13
- 229910052757 nitrogen Inorganic materials 0.000 claims description 12
- 238000005452 bending Methods 0.000 claims description 4
- 238000011049 filling Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 238000004821 distillation Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 19
- 230000000694 effects Effects 0.000 description 8
- 238000001914 filtration Methods 0.000 description 6
- 235000011149 sulphuric acid Nutrition 0.000 description 5
- 239000001117 sulphuric acid Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000009835 boiling Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- -1 fluorine ions Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 208000001034 Frostbite Diseases 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000009965 odorless effect Effects 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 150000003658 tungsten compounds Chemical class 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
- B01D3/14—Fractional distillation or use of a fractionation or rectification column
- B01D3/143—Fractional distillation or use of a fractionation or rectification column by two or more of a fractionation, separation or rectification step
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
- C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
- C01B21/0832—Binary compounds of nitrogen with halogens
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Separation By Low-Temperature Treatments (AREA)
Abstract
The invention relates to a continuous rectification device for nitrogen trifluoride, and belongs to the technical field of nitrogen trifluoride rectification. The utility model provides a nitrogen trifluoride's continuous rectification device, the device includes main frame, control cabinet, feed inlet, removes water pitcher, rectifying tank, well rectification tank, cooling tube, circulating pump, water separating tank, water storage tank, connecting pipe, outlet duct, steam pipe, pipeline and check valve. The device heats the sulfuric acid through the water leaving tank, so that water vapor in the sulfuric acid solution is evaporated and enters the water storage tank, the sulfuric acid solution can be recycled, the times of manually replacing the sulfuric acid are reduced, the test cost is reduced, and the test safety is improved; the device is reasonable in structure and simple to operate, can prepare high-purity nitrogen trifluoride, and is an ideal device for preparing high-purity nitrogen trifluoride.
Description
Technical Field
The invention relates to a continuous rectification device for nitrogen trifluoride, and belongs to the technical field of nitrogen trifluoride rectification.
Background
The chemical formula of nitrogen trifluoride is NF3The boiling point is-129.0 deg.C, and the product is a colorless, odorless, stable gas at room temperature, and is a strong oxidant. Nitrogen trifluoride is used as an excellent plasma etching gas in the microelectronic industry, is cracked into active fluorine ions during ion etching, and the fluorine ions have excellent etching rate and selectivity on silicon and tungsten compounds, high-purity nitrogen trifluoride has no residue on the surface of an etching object during etching, is a very good cleaning agent, and is widely applied to chip manufacturing and high-energy lasers.
Patent No. CN203112506U, a device for preparing high-purity nitrogen trifluoride by rectifying and adsorbing nitrogen trifluoride. Aiming at the defects of the structure of the existing device for preparing nitrogen trifluoride, impurities in crude nitrogen trifluoride cannot be well removed to obtain high-purity nitrogen trifluoride, and the requirement of production cannot be met. In order to improve nitrogen trifluoride purity, can carry out the dewatering through sulphuric acid, sulphuric acid absorbs water can concentration depreciation, needs often to be changed, and it has certain danger to change sulphuric acid, and the nitrogen trifluoride boiling point is low, needs the liquid nitrogen cooling, and the frostbite easily, the manual operation degree of difficulty is great in the laboratory.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a continuous rectification device for nitrogen trifluoride, which has reasonable structure and simple operation, can prepare high-purity nitrogen trifluoride and is an ideal device for preparing high-purity nitrogen trifluoride.
In order to achieve the purpose of the invention, the following technical scheme is provided.
A continuous rectification apparatus for nitrogen trifluoride, said apparatus comprising a main frame; the top of the main frame is provided with a control console, and the bottom of the main frame is connected with a feeding inlet in a penetrating way; the tail end of the feeding inlet is communicated with the dewatering tank; the sulfuric acid solution is filled in the dewatering tank, and the upper part of the dewatering tank is connected with the rectifying tank through a connecting pipe; the top of the rectifying tank is connected with an air outlet pipe in a run-through manner, the middle rectifying tank is arranged on the outer side of the rectifying tank, the top of the middle rectifying tank is connected with the upper part of the rectifying tank through a pipeline, and the bottom of the middle rectifying tank is connected with the lower part of the rectifying tank through a pipeline; the outer wall of the rectifying tank is provided with a cooling pipe, liquid nitrogen is filled in the cooling pipe, the cooling pipe is communicated with the filling port, the upper end and the lower end of the cooling pipe are communicated with a circulating pump positioned on one side of the cooling pipe through a pipeline, the circulating pump drives the liquid nitrogen in the cooling pipe, and the bottom of the cooling pipe is provided with a flow dividing port; the water separation tank is connected with the lower part of the water removal tank through a communicating pipe; the top of the water leaving tank is connected with the top of the water storage tank through a steam pipe; the lower part of the water separation tank is connected with the water removal tank through a cooling pipe.
The connecting pipe is provided with a check valve, the gas outlet pipe is provided with a check valve, the steam pipe is provided with a check valve, and a pipeline connecting the middle distillation tank and the rectification tank is provided with a check valve; the check valve is provided with a motor valve.
The preferable check valve comprises a check groove and a motor valve, the check valve is in through connection with the motor valve, the motor valve is located at the inflow end, the inner side of the check valve is connected with two check grooves in a surrounding mode, the check grooves are arc-shaped strips protruding inwards and bent, the bending direction is the same as the flow direction, and the check grooves are located at the rear end of the motor valve.
Preferably, the cooling pipe is closely surrounded on the outer wall of the rectifying tank.
Preferably, five connecting pipelines are arranged at the tail end of the feeding inlet and are dispersed into the sulfuric acid solution in the dewatering tank.
Preferably, a heating furnace wire is arranged at the bottom of the water separating tank, and the water separating tank is communicated with sulfuric acid liquid in the water removing tank.
The middle part of the optimized cooling pipe is an arc-shaped circular pipeline, the middle part of the cooling pipe is arc-shaped and has the same radian with the cooling pipe, and the middle part of the cooling pipe and the bottom of the cooling pipe are adjacently distributed.
Advantageous effects
1. The invention provides a continuous rectification device of nitrogen trifluoride, wherein a check groove is arranged in a check valve in the device, the bending direction of the check groove is the same as the flow direction, the bent check groove prevents gas in the check groove from flowing back, the backflow gas returns to the positive direction under the guidance of the check groove, the diameter width of the inside of the check groove is reduced by the check groove, the gas speed is accelerated, the pressure is increased, the backflow is reduced, and the backflow gas is taken away from the check groove to guide the backflow gas.
2. The invention provides a continuous rectification device of nitrogen trifluoride, wherein five connecting pipelines are arranged at the tail end of a feeding inlet in the device and are dispersed into sulfuric acid liquid in a water removal tank, so that the effect of filtering water vapor in gas is improved, the water removal tank is connected with a water removal tank, sulfuric acid is heated through the water removal tank, the water vapor in the sulfuric acid liquid is evaporated and enters a water storage tank, the residual sulfuric acid liquid is purified and flows back to the water removal tank through a cooling pipe, the sulfuric acid liquid can be recycled, the frequency of manually replacing the sulfuric acid is reduced, the test cost is reduced, and the test safety is improved.
3. The invention provides a continuous rectification device of nitrogen trifluoride, wherein cooling pipes in the device are distributed outside a rectification tank in a surrounding manner, the contact area between the cooling pipes and the rectification tank is increased and decreased, the cooling effect is enhanced, the temperature of the rectification tank is reduced through internal liquid nitrogen, the internal liquid nitrogen is circularly controlled through a circulating pump, the nitrogen trifluoride is conveniently cooled and liquefied, manual contact operation is not needed, the safety of personnel is improved, the operation difficulty is reduced, the nitrogen trifluoride can be circularly returned to the rectification tank through a middle rectification tank, multiple reactions and filtration of the nitrogen trifluoride are realized, and the purity of the nitrogen trifluoride is improved.
Drawings
FIG. 1 is a schematic view showing the external configuration of a continuous rectification apparatus for nitrogen trifluoride in example 1.
FIG. 2 is a schematic view showing the internal structure of a continuous rectification apparatus for nitrogen trifluoride in example 1.
FIG. 3 is a schematic view of the check valve according to embodiment 1.
FIG. 4 is a schematic view showing the internal structure of a continuous rectification apparatus for nitrogen trifluoride in example 1.
FIG. 5 is a schematic view showing the main structure of the feed inlet, the dewatering tank and the dewatering tank in example 1.
FIG. 6 is a schematic view of the structure of a cooling pipe in example 1.
FIG. 7 is a schematic view of the structure of a rectification tank in example 1.
FIG. 8 is a schematic diagram showing a comparison between the external structure and the internal structure of a continuous rectification apparatus for nitrogen trifluoride in example 1.
The device comprises a main frame 1, a feeding inlet 2, a water removing tank 3, a connecting pipe 301, a rectifying tank 4, a gas outlet pipe 401, a middle distilling tank 402, a water leaving tank 5, a communicating pipe 501, a steam pipe 502, a steam pipe 503, a water storage tank 504, a cooling pipe 6, a cooling pipe 601, a filling port 602, a circulating pump 603, a shunting port 7, a check valve 701, a check groove 702 and a motor valve
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Example 1
A continuous rectification device of nitrogen trifluoride is disclosed, as shown in figures 1-8, the device comprises a main frame 1; the top of the main frame 1 is provided with a control console, and the bottom of the main frame 1 is connected with a feeding inlet 2 in a penetrating way; the tail end of the feeding inlet 2 is communicated with the dewatering tank 3; sulfuric acid solution is filled in the water removal tank 3, and the upper part of the water removal tank 3 is connected with the rectification tank 4 through a connecting pipe 301; the top of the rectification tank 4 is connected with an air outlet pipe 401 in a penetrating way, the middle rectification tank 402 is arranged on the outer side of the rectification tank 4, the top of the middle rectification tank 402 is connected with the upper part of the rectification tank 4 through a pipeline, the bottom of the middle rectification tank 402 is connected with the lower part of the rectification tank 4 through a pipeline, and nitrogen trifluoride can be circulated back to the rectification tank 4 through the middle rectification tank 402, so that multiple reactions and filtration of nitrogen trifluoride are realized, and the purity of the nitrogen trifluoride is improved; the outer wall of the rectifying tank 4 is provided with a cooling pipe 6, liquid nitrogen is filled in the cooling pipe 6, the cooling pipe 6 is tightly attached to the outer wall of the rectifying tank 4 to surround, the contact area with the rectifying tank 4 is increased, the cooling effect is enhanced, the cooling pipe 6 is communicated with the filling port 601, the upper end and the lower end of the cooling pipe 6 are communicated with a circulating pump 602 positioned on one side of the cooling pipe through a pipeline, the cooling pipe 6 reduces the temperature of the rectifying tank 4 through the liquid nitrogen in the cooling pipe, the liquid nitrogen in the cooling pipe is circularly controlled through the circulating pump 602, and the bottom of the cooling pipe 6 is provided with a; the water separation tank 5 is connected with the lower part of the water removal tank 3 through a communicating pipe 501; the top of the water separation tank 5 is connected with the top of a water storage tank 503 through a steam pipe 502; the lower part of the dewatering tank 5 is connected with the dewatering tank 3 through a cooling pipe 504.
A check valve 7 is arranged on the connecting pipe 301, a check valve 7 is arranged on the gas outlet pipe 401, a check valve 7 is arranged on the steam pipe 502, and a check valve 7 is arranged on a pipeline connecting the middle distillation tank 402 and the rectification tank 4; the check valve 7 is provided with a motor valve 702.
The tail end of the feeding inlet 2 is provided with five connecting pipelines, and the five connecting pipelines are dispersed into sulfuric acid liquid inside the water removing tank 3, so that the effect of filtering water vapor in gas is improved.
The bottom of the water separation tank 5 is provided with a heating furnace wire, and the water separation tank 5 is communicated with the sulfuric acid solution in the water removal tank 3. Except that water pitcher 3 and 5 interconnect of water pitcher, through 5 heats of water pitcher, make the steam evaporation in the sulfuric acid solution enter into water storage tank 503, remaining sulfuric acid solution obtains the purification, cools off through cooling tube 504 and flows back to except that water pitcher 3, makes the sulfuric acid solution can recycle, reduces the artifical number of times of changing sulfuric acid, reduces test cost, promotes experimental security.
The middle part of the cooling pipe 504 is an arc-shaped circular pipeline, the middle part of the cooling pipe 504 is arc-shaped and has the same radian as the cooling pipe 6, the middle part of the cooling pipe 504 is adjacently distributed with the bottom of the cooling pipe 6, the contact area with the rectification tank 4 is increased, and the cooling effect is enhanced.
The continuous rectification device for nitrogen trifluoride described in this embodiment operates as follows:
the control console at the top of the main frame 1 controls the closing and starting of electric appliances such as each motor valve 702, the circulating pump 602 and the like, the check valve 7 is internally provided with a check groove 701, the bending direction and the flow direction of the check groove 701 are the same, the bent check groove 701 prevents the backflow of internal gas, the backflow gas returns to the positive direction under the guidance of the check groove 701, the check groove 701 reduces the diameter width of the internal part of the check valve 7, the gas speed is accelerated, the pressure is increased, the backflow is reduced, the backflow gas guided by the check groove 701 is taken away, five connecting pipelines are arranged at the tail end of the feeding inlet 2 and are dispersed into sulfuric acid liquid in the water removal tank 3, the effect of filtering water vapor in the gas is improved, the water removal tank 3 and the water separation tank 5 are connected with each other, the sulfuric acid is heated by the water separation tank 5, the water vapor in the sulfuric acid liquid is evaporated and enters the water storage tank, remove water pitcher 3 through cooling tube 504 cooling reflux, make sulphuric acid solution can recycle, reduce the artifical number of times of changing sulphuric acid, reduce test cost, promote experimental security, cooling tube 6 encircles and distributes at 4 outer walls of retort, increase and retort 4's area of contact, reinforcing cooling effect, cooling tube 6 reduces retort 4's temperature through inside liquid nitrogen, through the inside liquid nitrogen of circulating pump 602 cycle control, conveniently cool down the liquefaction processing to nitrogen trifluoride, need not manual contact operation, promote personnel's security, reduce the operation degree of difficulty, can make nitrogen trifluoride circulate back to retort 4 through well retort 402, realize nitrogen trifluoride multiple reaction and filtration, promote nitrogen trifluoride purity.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (7)
1. A continuous rectification device of nitrogen trifluoride is characterized in that: the device comprises a main frame (1); the top of the main frame (1) is provided with a control console, and the bottom of the main frame (1) is connected with a feeding inlet (2) in a penetrating way; the tail end of the feeding inlet (2) is communicated with the water removing tank (3); sulfuric acid solution is filled in the water removal tank (3), and the upper part of the water removal tank (3) is connected with the rectification tank (4) through a connecting pipe (301); the top of the rectifying tank (4) is connected with an air outlet pipe (401) in a run-through manner, the middle rectifying tank (402) is arranged on the outer side of the rectifying tank (4), the top of the middle rectifying tank (402) is connected with the upper part of the rectifying tank (4) through a pipeline, and the bottom of the middle rectifying tank (402) is connected with the lower part of the rectifying tank (4) through a pipeline; a cooling pipe (6) is arranged on the outer wall of the rectifying tank (4), liquid nitrogen is filled in the cooling pipe (6), the cooling pipe (6) is communicated with the filling port (601), the upper end and the lower end of the cooling pipe (6) are communicated with a circulating pump (602) positioned on one side of the cooling pipe through a pipeline, the circulating pump (602) drives the liquid nitrogen in the cooling pipe (6), and the bottom of the cooling pipe (6) is provided with a shunting port (603); the water separation tank (5) is connected with the lower part of the water removing tank (3) through a communicating pipe (501); the top of the water separation tank (5) is connected with the top of a water storage tank (503) through a steam pipe (502); the lower part of the water separation tank (5) is connected with the water removal tank (3) through a cooling pipe (504);
a check valve (7) is arranged on the connecting pipe (301), a check valve (7) is arranged on the air outlet pipe (401), a check valve (7) is arranged on the steam pipe (502), and a check valve (7) is arranged on a pipeline connecting the middle distillation tank (402) and the rectification tank (4); the check valve (7) is internally provided with a motor valve (702).
2. The continuous rectification apparatus of nitrogen trifluoride according to claim 1, wherein: check valve (7) are including check groove (701) and motor valve (702), check valve (7) and motor valve (702) through connection, and motor valve (702) are in the influent stream end, and check valve (7) inboard is encircleed and is connected with two check grooves (701), and check groove (701) are the curved arc strip of inside arch, and crooked direction is the same with the flow direction, and check groove (701) are in motor valve (702) rear end.
3. The continuous rectification apparatus of nitrogen trifluoride according to claim 1, wherein: the cooling pipe (6) is closely attached to the outer wall of the rectifying tank (4) to surround.
4. The continuous rectification apparatus of nitrogen trifluoride according to claim 1, wherein: the tail end of the feeding inlet (2) is provided with five connecting pipelines which are communicated with the water removing tank (3).
5. The continuous rectification apparatus of nitrogen trifluoride according to claim 1, wherein: the bottom of the water separation tank (5) is provided with a heating furnace wire.
6. The continuous rectification apparatus of nitrogen trifluoride according to claim 1, wherein: the middle part of the cooling pipe (504) is an arc-shaped circular pipeline, the middle part of the cooling pipe (504) is arc-shaped and has the same radian with the cooling pipe (6), and the middle part of the cooling pipe (504) is adjacent to the bottom of the cooling pipe (6).
7. The continuous rectification apparatus of nitrogen trifluoride according to claim 1, wherein: the check valve (7) comprises a check groove (701) and a motor valve (702), the check valve (7) is communicated with the motor valve (702), the motor valve (702) is positioned at the inflow end, the inner side of the check valve (7) is connected with two check grooves (701) in a surrounding manner, the check groove (701) is an arc-shaped strip which protrudes and bends inwards, the bending direction is the same as the flow direction, and the check groove (701) is positioned at the rear end of the motor valve (702);
the cooling pipe (6) is closely attached to the outer wall of the rectifying tank (4) to surround;
the middle part of the cooling pipe (504) is an arc-shaped circular pipeline, the arc shape of the middle part of the cooling pipe (504) is the same as the radian of the cooling pipe (6), and the middle part of the cooling pipe (504) and the bottom of the cooling pipe (6) are adjacently distributed;
five connecting pipelines are arranged at the tail end of the feeding inlet (2) and are communicated with the water removing tank (3);
the bottom of the water separation tank (5) is provided with a heating furnace wire.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011531168.7A CN112569623B (en) | 2020-12-22 | 2020-12-22 | Continuous rectification device of nitrogen trifluoride |
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| CN202011531168.7A CN112569623B (en) | 2020-12-22 | 2020-12-22 | Continuous rectification device of nitrogen trifluoride |
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| CN112569623A true CN112569623A (en) | 2021-03-30 |
| CN112569623B CN112569623B (en) | 2024-08-27 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117582684A (en) * | 2024-01-19 | 2024-02-23 | 大庆亿鑫化工股份有限公司 | Extraction element for production industrial alkane cleaner |
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| CN207429723U (en) * | 2017-10-19 | 2018-06-01 | 天津市贞好科技有限公司 | Rectification method prepares the device of high-purity Nitrogen trifluoride |
| US10647582B1 (en) * | 2019-09-11 | 2020-05-12 | Taiwan Speciality Chemicals Corporation | High efficiency synthesis and purification recycling system of higher silane |
| CN216092289U (en) * | 2020-12-22 | 2022-03-22 | 中船(邯郸)派瑞特种气体股份有限公司 | Continuous rectification device of nitrogen trifluoride |
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2020
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|---|---|---|---|---|
| EP1205232A2 (en) * | 2000-11-10 | 2002-05-15 | Organo Corporation | Gas separation apparatus and gas separation method |
| KR101245497B1 (en) * | 2011-10-27 | 2013-03-25 | 오씨아이머티리얼즈 주식회사 | Apparatus and method for recovering nitrogen trifluoride gas from high boiling point material |
| CN103768819A (en) * | 2013-12-13 | 2014-05-07 | 营口市风光化工有限公司 | Rectification system and method of aluminium ethyl crude product |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117582684A (en) * | 2024-01-19 | 2024-02-23 | 大庆亿鑫化工股份有限公司 | Extraction element for production industrial alkane cleaner |
| CN117582684B (en) * | 2024-01-19 | 2024-03-29 | 大庆亿鑫化工股份有限公司 | Extraction element for production industrial alkane cleaner |
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| CN112569623B (en) | 2024-08-27 |
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