CN112563092B - 单晶化抗蒸发的x射线球管阳极靶的制造工艺 - Google Patents
单晶化抗蒸发的x射线球管阳极靶的制造工艺 Download PDFInfo
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- CN112563092B CN112563092B CN202011443854.9A CN202011443854A CN112563092B CN 112563092 B CN112563092 B CN 112563092B CN 202011443854 A CN202011443854 A CN 202011443854A CN 112563092 B CN112563092 B CN 112563092B
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- Prior art keywords
- anode target
- target surface
- crystallization
- irradiation
- evaporation
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- 238000002425 crystallisation Methods 0.000 title claims abstract description 30
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 28
- 238000001704 evaporation Methods 0.000 title claims abstract description 18
- 230000008020 evaporation Effects 0.000 title claims abstract description 15
- 239000013078 crystal Substances 0.000 claims abstract description 19
- 230000008025 crystallization Effects 0.000 claims abstract description 18
- 238000002844 melting Methods 0.000 claims abstract description 14
- 230000008018 melting Effects 0.000 claims abstract description 14
- 238000001816 cooling Methods 0.000 claims abstract description 6
- 239000011521 glass Substances 0.000 claims abstract description 6
- 239000007789 gas Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 9
- 229910001080 W alloy Inorganic materials 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 8
- 239000011261 inert gas Substances 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 6
- 230000004927 fusion Effects 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 229910000691 Re alloy Inorganic materials 0.000 claims description 3
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 239000000843 powder Substances 0.000 claims description 3
- DECCZIUVGMLHKQ-UHFFFAOYSA-N rhenium tungsten Chemical compound [W].[Re] DECCZIUVGMLHKQ-UHFFFAOYSA-N 0.000 claims description 3
- 239000012780 transparent material Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 239000013081 microcrystal Substances 0.000 description 4
- 239000000112 cooling gas Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 241000282414 Homo sapiens Species 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 229910052702 rhenium Inorganic materials 0.000 description 2
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000004512 die casting Methods 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F3/00—Changing the physical structure of non-ferrous metals or alloys by special physical methods, e.g. treatment with neutrons
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B1/00—Single-crystal growth directly from the solid state
- C30B1/02—Single-crystal growth directly from the solid state by thermal treatment, e.g. strain annealing
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/52—Alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/085—Target treatment, e.g. ageing, heating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
设备名称 | 功率范围 |
等离子发生机 | 30~200KW |
激光发生机 | ≤30KW |
电子束辐照设备 | 10~180KW |
铼加热器 | 10~200KW |
中频加热设备 | 15~600KW |
高频加热设备 | 3~500KW |
超音频加热设备 | 100~300KW |
Claims (6)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011443854.9A CN112563092B (zh) | 2020-12-08 | 2020-12-08 | 单晶化抗蒸发的x射线球管阳极靶的制造工艺 |
PCT/CN2020/138831 WO2022120961A1 (zh) | 2020-12-08 | 2020-12-24 | 单晶化抗蒸发的x射线球管阳极靶的制造工艺 |
DE112020007828.0T DE112020007828T5 (de) | 2020-12-08 | 2020-12-24 | Verfahren zur Herstellung eines einkristallisierten, verdampfungsbeständigen Röntgenröhrenanodentargets |
GB2310150.4A GB2617028A (en) | 2020-12-08 | 2020-12-24 | Fabrication process for single-crystallization anti-evaporation X-ray tube anode target |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011443854.9A CN112563092B (zh) | 2020-12-08 | 2020-12-08 | 单晶化抗蒸发的x射线球管阳极靶的制造工艺 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN112563092A CN112563092A (zh) | 2021-03-26 |
CN112563092B true CN112563092B (zh) | 2022-09-23 |
Family
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Family Applications (1)
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---|---|---|---|
CN202011443854.9A Active CN112563092B (zh) | 2020-12-08 | 2020-12-08 | 单晶化抗蒸发的x射线球管阳极靶的制造工艺 |
Country Status (4)
Country | Link |
---|---|
CN (1) | CN112563092B (zh) |
DE (1) | DE112020007828T5 (zh) |
GB (1) | GB2617028A (zh) |
WO (1) | WO2022120961A1 (zh) |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4400824A (en) * | 1980-02-12 | 1983-08-23 | Tokyo Shibaura Denki Kabushiki Kaisha | X-Ray tube with single crystalline copper target member |
RU2168792C1 (ru) * | 1999-12-08 | 2001-06-10 | Отделение Научно-технический центр "Источники тока" Научно-исследовательского института Научно-производственного объединения "Луч" | Анод рентгеновской трубки |
US7194066B2 (en) * | 2004-04-08 | 2007-03-20 | General Electric Company | Apparatus and method for light weight high performance target |
US8699667B2 (en) * | 2007-10-02 | 2014-04-15 | General Electric Company | Apparatus for x-ray generation and method of making same |
JP6335729B2 (ja) * | 2013-12-06 | 2018-05-30 | キヤノン株式会社 | 透過型ターゲットおよび該透過型ターゲットを備えるx線発生管 |
CN110621986B (zh) * | 2017-03-22 | 2022-05-17 | 斯格瑞公司 | 执行x射线光谱分析的方法和x射线吸收光谱仪系统 |
CN108907630B (zh) * | 2018-08-14 | 2020-08-07 | 合肥工业大学 | 一种CT机X射线管用W/Mo/石墨复合阳极靶材的制造方法 |
CN109243948A (zh) * | 2018-09-30 | 2019-01-18 | 汕头高新区聚德医疗科技有限公司 | 一种高稳定性ct球管 |
CN208796945U (zh) * | 2018-09-30 | 2019-04-26 | 汕头高新区聚德医疗科技有限公司 | 一种ct球管的阳极靶盘 |
CN110303141A (zh) * | 2019-07-10 | 2019-10-08 | 株洲未铼新材料科技有限公司 | 一种x射线管用单晶铜固定阳极靶材及其制备方法 |
-
2020
- 2020-12-08 CN CN202011443854.9A patent/CN112563092B/zh active Active
- 2020-12-24 GB GB2310150.4A patent/GB2617028A/en active Pending
- 2020-12-24 DE DE112020007828.0T patent/DE112020007828T5/de active Pending
- 2020-12-24 WO PCT/CN2020/138831 patent/WO2022120961A1/zh active Application Filing
Also Published As
Publication number | Publication date |
---|---|
DE112020007828T5 (de) | 2023-09-28 |
WO2022120961A1 (zh) | 2022-06-16 |
GB202310150D0 (en) | 2023-08-16 |
CN112563092A (zh) | 2021-03-26 |
GB2617028A (en) | 2023-09-27 |
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Effective date of registration: 20221121 Address after: 528000 axis 1-16, floor 5, block C, North Guangdong new light source industrial base core area, Langsha Avenue, Luocun village, Shishan town, Nanhai District, Foshan City, Guangdong Province Patentee after: Zhu Huichong Address before: 528000 axis 1-16, floor 5, block C, North Guangdong new light source industrial base core area, Langsha Avenue, Luocun village, Shishan town, Nanhai District, Foshan City, Guangdong Province Patentee before: FOSHAN NINGYU TECHNOLOGY CO.,LTD. |
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Effective date of registration: 20240909 Address after: 528226 First Floor, Building 5, Zone C, Guangdong New Light Source Industrial Base, Luocun, Nanhai District, Foshan City, Guangdong Province Patentee after: FOSHAN NINGYU TECHNOLOGY CO.,LTD. Country or region after: China Address before: 528000 axis 1-16, floor 5, block C, North Guangdong new light source industrial base core area, Langsha Avenue, Luocun village, Shishan town, Nanhai District, Foshan City, Guangdong Province Patentee before: Zhu Huichong Country or region before: China |