CN112548327A - Nozzle, laser cutting device and machining method using same - Google Patents

Nozzle, laser cutting device and machining method using same Download PDF

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Publication number
CN112548327A
CN112548327A CN202011405388.5A CN202011405388A CN112548327A CN 112548327 A CN112548327 A CN 112548327A CN 202011405388 A CN202011405388 A CN 202011405388A CN 112548327 A CN112548327 A CN 112548327A
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CN
China
Prior art keywords
nozzle
gas
section
laser
air
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Pending
Application number
CN202011405388.5A
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Chinese (zh)
Inventor
钟诚
杨竹梅
陈湘文
陈少煌
王自
王海龙
张万年
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Songshan Lake Materials Laboratory
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Songshan Lake Materials Laboratory
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Publication date
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Priority to CN202011405388.5A priority Critical patent/CN112548327A/en
Publication of CN112548327A publication Critical patent/CN112548327A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462Nozzles; Features related to nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/52Ceramics

Abstract

A nozzle, a laser cutting device and a processing method using the same belong to the field of laser processing. The nozzle comprises an air inlet section and an air injection section which are connected with each other. Wherein, the air inlet section has an expanding neck part and a contracting neck part and is provided with an arc-shaped inner surface. The gas injection section has gas injection holes distributed in a plane parallel to the axial section thereof. The nozzle can effectively ensure excessive gas of gas ejected through the nozzle, thereby maintaining the directivity of the gas flow and the pressure of the ejected gas flow.

Description

Nozzle, laser cutting device and machining method using same
Technical Field
The present disclosure relates to the field of laser processing, and more particularly, to a nozzle, a laser cutting apparatus, and a processing method using the same.
Background
Due to the characteristics of hardness and brittleness, the aluminum oxide ceramics are mainly processed by adopting a laser technology.
The microporous process for rotary cutting alumina ceramic with optical fiber laser includes irradiating the surface of ceramic with laser beam, and melting and evaporating the ceramic with the energy released by the laser. Simultaneously, the laser beam and the material move relatively to form a narrow-width linear kerf; or, the two parts move relatively to each other in a circular way to form an annular kerf with narrow width, and the alumina ceramic in the annular kerf falls off to obtain a hole-micropore. However, the quality of the micropores obtained by the current processing mode is low, and the quality is mainly characterized in that particles are formed in the micropores to cause blocking influence on the micropores.
Disclosure of Invention
In order to improve, even solve and can form the low problem of the particulate matter that influences the quality in the micropore that aluminium oxide ceramic laser beam machining formed, this application has provided a nozzle.
The application is realized as follows:
in a first aspect, examples of the present application provide a nozzle comprising: a hollow air intake section and a hollow air injection section.
The air inlet section is provided with a trumpet-shaped first inner surface which is contracted from the neck expanding part to the neck contracting part along a first axial line, and the first inner surface forms an air inlet at the neck expanding part; wherein the gas injection section has a second inner surface of a straight cylindrical shape.
One end of the air injection section is provided with air injection ports distributed in a cross section perpendicular to the second axial line, and the other end of the air injection section is connected with the air inlet section at the position adjacent to the necking part, so that a fluid channel jointly limited by the first inner surface and the second inner surface is formed; the air inlet has an arc-shaped profile, and the air outlet has an arc-shaped profile; the first axial line is collinear with the second axial line; the section of the air inlet section along the first axial line and the intersection line of the first inner surface are arc lines.
According to one example of the application, the air injection ports are circular or oval.
According to one example of the application, the ratio of the area of the gas inlet to the area of the gas outlet is 1:1 to 4000: 1.
According to one example of the application, the air injection opening has an area of 0.25-2.25mm2The area of the air inlet is 2.25-1000mm2
In a second aspect, examples of the present application provide a laser cutting apparatus comprising the nozzle described above.
In a third aspect, examples of the present application provide a laser cutting device comprising: frame, carrier, functional head and nozzle.
Wherein the carrier is connected with the frame; the functional head has the casing and is fixed in laser generator and the gas generator in the casing, and this functional head passes through the casing connect in the frame. The nozzle is connected to the housing with a flared neck. The gas flow sprayed out of the gas generator and the light path of the laser generator are constrained to pass through the fluid channel and coaxially exit from the gas outlet.
According to an example of the present application, a laser generator is provided with a galvanometer for rotating laser light.
According to one example of the present application, a carrier includes a support table, a stage coupled to the support table by a first displacement mechanism.
According to one example of the application, a second displacement mechanism is included, by which the functional head is connected to the frame.
In a fourth aspect, examples of the present application provide a method of processing a target object with a laser cutting device.
In the implementation process, the nozzle provided by the embodiment of the application adopts a sectional structural design in structure and function, namely an air inlet section and an air injection section. The gas inlet section is provided with a horn-shaped arc inner surface, so that the vibration of gas entering the nozzle is restrained to a certain extent, and the vibration of the whole nozzle is reduced (the direction of gas spraying is prevented from being greatly changed due to vibration). Meanwhile, the air injection section is provided with a straight cylindrical inner surface, so that the air flow sprayed by the nozzle can be emitted to a target position in a directional mode. Further, since the air ejection section has the air ejection port parallel to the axial section thereof, the diffusion of the air flow at the air ejection port can be suppressed to some extent, thereby contributing to avoiding excessive reduction in the air flow pressure (strong air flow impingement).
In conclusion, by the improvement of the shape, the vibration of the nozzle caused by the air flow is reduced, the posture of the nozzle is stabilized, and the air flow can be prevented from being excessively dispersed to maintain a strong impact action so as to directionally impact the target position through the air flow.
Based on the characteristics of the nozzle, when the nozzle is applied to a laser cutting device, the nozzle can efficiently blow away a target cutting material melted by laser without staying at a cutting position, that is, keeping the cutting position clean, so that complete and clean cutting traces and shapes can be obtained.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive effort.
FIG. 1 is a schematic structural view of a nozzle in an embodiment of the present application;
FIG. 2 shows a front view of the nozzle of FIG. 1;
FIG. 3 shows a schematic cross-sectional view of the plane A-A of the nozzle of FIG. 2;
FIG. 4 shows a schematic view of a nozzle as compared to the nozzle of FIG. 1;
FIG. 5 shows a schematic cross-sectional view of the nozzle of FIG. 4;
FIG. 6 shows a schematic cross-sectional view of another nozzle as compared to the nozzle of FIG. 1;
fig. 7 shows a schematic structural diagram of a laser cutting device proposed in the present application example based on the nozzle of fig. 1;
fig. 8 shows a process flow chart of the laser cutting device based machining in the present application example.
Icon: 100-a nozzle; 101-an air inlet section; 1011-a first profile; 1011 a-first profile; 1012-air inlet; 1013-a first inner surface; 102-a gas injection section; 1021-a second contour; 1021 a-a second contour; 1022-an air jet; 1023-a second inner surface; 103-a fluid channel; 301-neck expansion; 302-necking down; 10-a cutting head; 30-processing platform.
Detailed Description
In the prior art, the problem of low micropore quality often exists in the fiber laser rotary cutting alumina ceramic micropore process. For this reason, it is generally necessary to perform appropriate secondary processing on the alumina ceramic workpiece after cutting. This results in poor product quality consistency and a prolonged manufacturing cycle, thereby greatly increasing the manufacturing cost.
The inventors have unexpectedly found, through analysis, that the reason for the above problems is the problem of the cooling device used in cooperation with the cutting process.
Specifically, alumina ceramics have a high thermal conductivity relative to other ceramics, and therefore, when a fiber laser beam is irradiated on the surface of the ceramics, the heat released from the laser beam is rapidly conducted to other adjacent regions outside the target cutting region.
Therefore, during the process of ring-cutting alumina by laser to make micropores, a great deal of heat is collected in and around the micropores, so that the alumina at these positions is rapidly in a molten state.
Aiming at the situation, in order to reduce the surface temperature of the alumina ceramic and avoid the cracking of the alumina ceramic caused by thermal expansion and cold contraction, the alumina ceramic is cooled by adopting modes such as air nozzle direct blowing and the like.
However, during the temperature reduction process of the air nozzle direct blowing, the flow direction of the air in the air nozzle blows the molten aluminum oxide into the pre-cut micropores. As the laser beam is further away, the temperature of the ceramic surface is gradually lowered, and thus, the molten alumina is re-solidified inside the micro-pores, thereby greatly affecting the quality of the micro-pores.
In other words, the air nozzles need to be arranged due to the special characteristics of the processing material, and the use of the air nozzles causes problems such as clogging or closing of the processed micropores, which causes difficulty for the operator.
Therefore, the method has great significance for the research and selection of the air nozzle.
Through intensive research, the inventor unexpectedly finds that the interior of the traditional air nozzle is of an oblique line type, so that gas can be greatly diffused to the periphery after being sprayed out of the air nozzle, the strength of gas jet flow is greatly reduced (the impact effect is reduced, the target processing material melted by laser is not easy to blow away), the directivity is poor, the cooling speed of slag (generated by melting a target processing object by the laser) is slow, and adverse effects are generated on the appearance and consistency of the aperture.
Based on the above knowledge, the nozzle 100 (see fig. 1) designed by the present application has an inner arc-shaped structure, and by optimizing the structure, not only stable directivity and impact force are achieved, but also the coaxiality of the direction of the gas and the direction of the light path is ensured, so that the cooling effect is greatly improved.
The nozzle 100 of the present application is designed based on the influence of the gas flow path on the fiber laser spin-on ceramic micro-holes, and the gas flow channel inside the nozzle 100 is changed into an inner arc shape, so that the stability and uniformity of the gas flow in the vertical direction are ensured. In the actual cutting process, the fluctuation (such as vibration and air flow intensity change) caused by air flow is reduced, and the consistency of the micropores of the fiber laser rotary-cut alumina ceramic is ensured. In addition, the structural design of the nozzle 100 ensures the coaxiality of the direction of the gas and the direction of the light path, and greatly improves the utilization effect of the gas.
It should be noted that the present application illustrates the use of the nozzle 100 as an example for fiber laser spun-on alumina ceramic micro-holes, but this is not intended to be limiting and the nozzle 100 of the present application can only be used in the above scenario. In fact, other scenarios that require directionality and stability of the blown air stream may use the nozzle 100 of the present application, particularly where the machining accuracy is high.
The nozzle 100 of the present example will now be described in more detail with reference to fig. 1-3.
The nozzle 100 in this example is a member capable of forming a restriction to fluid and the restriction to fluid is achieved by a channel defined by a surface of the interior of the nozzle 100. That is, the flow pattern of the fluid is substantially restricted by the inner surface, and the moving direction and the ejection manner/ejection form of the high-speed fluid are controlled.
In general, the internal passageway of the nozzle 100 has an arcuate region and a linear region. The arc-shaped area is used as an input part of the air flow, so that the disturbance of the air flow to the nozzle 100 (avoiding the vibration of the nozzle 100) when the air flow enters the nozzle 100 can be reduced, and the air flow can be smoothly and quietly conveyed in the nozzle 100; the linear region serves as an output portion such as an air flow to guide the air flow to a target position, and defines and restricts a jet shape of the air flow leaving the nozzle 100.
It should be appreciated that, since the nozzle 100 defines the delivery of the gas flow by the channels defined by the internal surfaces thereof, the shape of the external surface of the nozzle 100 is not particularly limited and may be suitably selected according to the specific application thereof or may have a different shape according to the manufacturing process (e.g., injection molding, extrusion molding, cutting, etc.) of the nozzle 100. In the present example, the outer surface and the inner surface of the nozzle 100 are configured in the same shape.
In addition, the material of the nozzle 100 may be adaptively selected according to the nature of the fluid to be delivered and the use scenario thereof, for example, according to weather resistance, environmental stability, and the like.
In the example, the nozzle 100 includes a hollow air intake section 101 and a hollow air injection section 102. The air inlet section 101 and the air injection section 102 may be integrally formed, or may be made in segments and detachably or non-detachably connected. For example, the air intake section 101 and the air injection section 102 may be fabricated as separate parts and then combined by means such as welding, bonding, screwing, etc.
It should be noted that, when the two sections of the nozzle 100 are separately manufactured and then combined together for use, it is advantageous for the air flow to be delivered because the inner surface of the joint between the two sections is smooth. This can be clearly illustrated by the following expression: the intersection of the section of the intake section 101 along its first axial line and the first inner surface 1013, which will be described later, is an arc, and the curvature thereof is gradually changed and is a smooth curve.
Further, the first axial line of the air intake section 101 and the second axial line of the air injection section 102 are collinear, so that the air flow can be more uniform when conveyed in the two flows.
The first inner surface 1013 of the intake section 101 has a shape that is tapered from the neck-expanding portion 301 to the neck-contracting portion 302 along a first axial line substantially along the first axial line, and thus the first inner surface 1013 of the intake section 101 has a trumpet-like structure (smooth surface). An air inlet 1012 is formed in the expanded neck portion 301, and an air injection section 102 is connected to the contracted neck portion 302.
The gas injection section 102 has a second inner surface 1023 having a straight cylindrical shape. By way of illustration, the inner surface of a (right) cylinder may be considered to be a right cylinder (the axis of a right cylinder is a straight line segment, i.e., a space formed by a rectangle rotated 360 degrees with one side of the rectangle as an axis).
One end of the gas injection section 102 is connected to the constricted portion 302 of the gas intake section 101, and the other end thereof forms a gas injection port 1022 through which the gas exits the nozzle 100, and the gas injection port 1022 may be formed in a circular or elliptical shape. In particular, to avoid directionality and excessive dispersion of the gas flow exiting the nozzle 100, the gas injection ports 1022 of the gas injection section 102 are distributed at one end thereof and are located on a section perpendicular to the second axial line of the gas injection section 102. In other words, the gas injection port 1022 is a flat port rather than a beveled port. To make it easier for a person skilled in the art to understand, fig. 6 shows an example of a bezel.
The cooperation of the air inlet section 101 and the air injection section 102 forms a fluid passage 103 defined by the first inner surface 1013 and the second inner surface 1023. Fluid ejection from the nozzle 100 is defined by the fluid path 103 (shown in FIG. 3).
In addition, the nozzle 100 has the following structural limitations:
the air inlet 1012 of the air inlet section 101 has an arcuate profile (first profile 1011) and the air outlet 1022 has an arcuate profile (second profile 1021). In contrast, FIG. 4 discloses a non-arcuate contoured nozzle structure, the internal structure of which is shown in FIG. 5. Wherein the first profile 1011a is hexagonal and the second profile 1021a is hexagonal. The nozzle 100 having the curved profile in the present example can reduce turbulent delivery of the fluid in local circulation, as compared to such a hexagonal configuration profile.
To ensure the efficiency and effectiveness of the gas jet (e.g., small vibration, small scattering, high directivity), the ratio of the area of the gas inlet 1012 to the area of the gas outlet 1022 may be limited to 1: 4000. For example, the air ports 1022 may have an area of 0.25 to 2.25mm2 and the air inlets 1012 may have an area of 2.25 to 1000mm 2.
Based on the nozzle 100, a laser cutting device with the nozzle 100 is also provided in the example.
Fig. 7 shows a schematic structural diagram of the main components of the laser cutting apparatus.
Laser processing is a method of performing a series of processes on a material using the property of a laser beam interacting with a substance. Generally, a laser processing system includes a laser, an optical path system, a processing machine, and a control system.
In some examples, the laser cutting apparatus may include a frame, a carrier, a function head, and a nozzle 100.
The carrier is connected to the frame and used for placing a target object to be processed. The target object may be, for example, a metal material such as a copper plate. Alternatively, the target object may be a ceramic material such as alumina ceramic (which may have a different thickness according to the laser energy, and illustratively, a thickness of 0.1 to 1.5 mm). Alternatively, the target object may be a material such as plastic.
The functional head comprises a shell, and a laser generator and a gas generator which are fixed in the shell. The functional head is connected to the carrier through the shell.
The nozzle 100 as described above is connected to the housing of the cutting head 10 by the flared portion 301 of its air inlet section 101. When the nozzle 100 is attached, the gas flow emitted from the gas generator and the optical path of the laser generator are ensured to be confined in the fluid passage 103 and coaxially emitted from the gas ejection port 1022. In other words, the nozzle 100 is disposed such that the axis of its fluid passage 103 coincides with the ejection axis of the gas generator, the laser emission axis, and more specifically, may be substantially coaxial.
Depending on the different processing requirements, the carrier and the functional head may be relatively fixed, so that the functional head can process the desired shape, pattern, etc. on the target processing object "still". Alternatively, either the carrier and the functional head may be arranged to be moved as desired, or further, the carrier and the functional head may be capable of relative movement (both being moved simultaneously) to enable the processing of more complex patterns. The carrier and the functional head can be driven by various displacement mechanisms (not shown) to perform relative movement.
Alternatively, the laser cutting device comprises a nozzle 100 and a laser device. Wherein the laser apparatus has a cutting head 10, a nozzle 100 is fixed to the cutting head 10 by means of a screw connection, and a processing platform 30 is provided below the cutting head 10 for placing a target object.
Corresponding to the aforementioned example of making the micro-holes by spin-cutting the alumina ceramic by fiber laser, the laser generator in the cutting head 10 may be provided with a galvanometer for rotating the laser. The galvanometer may be commercially available equipment and is not specifically limited or set forth herein.
The method for processing the target object can be implemented with high quality by using the laser cutting device. For example, a micro-hole is obtained by rotating the optical path by a galvanometer in the optical path of the fiber laser and performing circle-drawing cutting on alumina ceramic.
Referring to fig. 8, an exemplary process is as follows:
(1) target object
Alumina ceramics: a thickness of 0.1 to 1.5mm (0.5mm is selected in the example); processing the target: micropores with a diameter of 0.1 mm.
(2) Parameters of the equipment
The area of the air inlet hole of the nozzle is 100mm2, and the area of the air injection hole is 1.0mm 2.
The technological parameters are as follows: the inlet pressure is set to 0.6MPa, the power is 500W, the frequency is 20KHz, the duty ratio is 60%, and the like.
(3) Processing technology
And step S1, debugging equipment, and setting parameters such as laser frequency, pulse width, speed and focus.
And step S2, mounting the nozzle on the cutting head (the nozzle and the cutting head of the laser device are connected through the threaded hole).
Step S3, placing the product to be processed (0.5mm alumina ceramic) under the nozzle.
And step S4, starting machining.
In the processing process, the processing of the micropores is realized by adjusting gas parameters, laser parameters, platform parameters and other parameters.
The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (10)

1. A nozzle, comprising:
a hollow air intake section having a first inner surface of a trumpet shape that extends from a neck-expanding portion to a neck-contracting portion along a first axial line, the first inner surface forming an air intake at the neck-expanding portion;
a hollow gas injection section having a second inner surface of a straight cylinder shape;
one end of the gas injection section is provided with gas injection ports distributed in a cross section perpendicular to the second axial line, and the other end of the gas injection section is connected with the gas inlet section in the vicinity of the necking part so as to form a fluid channel jointly limited by the first inner surface and the second inner surface;
the air inlet has an arcuate profile and the air outlet has an arcuate profile;
the first axial line is collinear with the second axial line;
the section of the air inlet section along the first axial line and the intersection line of the first inner surface are arc lines.
2. The nozzle of claim 1, wherein the gas orifice is circular or elliptical.
3. The nozzle of claim 1 or 2, wherein the ratio of the area of the gas inlet to the area of the gas outlet is from 1:1 to 4000: 1.
4. A nozzle according to claim 1 or 2, wherein the gas injection port has an area of 0.25-2.25mm2The area of the air inlet is 2.25-1000mm2
5. A laser cutting device comprising a nozzle according to any one of claims 1 to 4.
6. A laser cutting apparatus, comprising:
a frame;
a carrier connected to the frame;
the functional head is provided with a shell, and a laser generator and a gas generator which are fixed in the shell, and the functional head is connected to the rack through the shell;
the nozzle of any one of claims 1 to 4;
the nozzle is connected to the housing with the neck-expanding portion;
the gas flow sprayed out by the gas generator and the light path of the laser generator are constrained to pass through the fluid channel and coaxially exit from the gas spraying port.
7. The laser cutting device according to claim 6, wherein the laser generator is provided with a galvanometer for rotating the laser.
8. The laser cutting apparatus according to claim 6, wherein the carrier includes a support table, and a stage connected to the support table by a first displacement mechanism.
9. The laser cutting device of claim 6, comprising a second displacement mechanism by which the functional head is connected to the frame.
10. A method of processing a target object using the laser cutting apparatus of any one of claims 5 to 9.
CN202011405388.5A 2020-12-03 2020-12-03 Nozzle, laser cutting device and machining method using same Pending CN112548327A (en)

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CN207735769U (en) * 2018-01-02 2018-08-17 江苏汇能激光智能科技有限公司 A kind of laser cutting machine nozzle and laser cutting machine
CN209256113U (en) * 2018-12-07 2019-08-16 深圳市万顺兴科技有限公司 Cutting nozzles, laser cutting component and laser cutting device
CN210281108U (en) * 2019-07-26 2020-04-10 深圳市特镁机电设备有限公司 Nozzle for laser cutting

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114905164A (en) * 2022-05-30 2022-08-16 镭诺光电科技(深圳)有限公司 Laser processing device and processing method thereof

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Application publication date: 20210326