CN112546807A - Adsorption type gas treatment equipment and treatment method thereof - Google Patents

Adsorption type gas treatment equipment and treatment method thereof Download PDF

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Publication number
CN112546807A
CN112546807A CN202011486837.3A CN202011486837A CN112546807A CN 112546807 A CN112546807 A CN 112546807A CN 202011486837 A CN202011486837 A CN 202011486837A CN 112546807 A CN112546807 A CN 112546807A
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China
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adsorption
main body
gas treatment
waste gas
treatment apparatus
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CN202011486837.3A
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Chinese (zh)
Inventor
莫薇
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Shenzhen Liweicheng Technology Co ltd
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Shenzhen Liweicheng Technology Co ltd
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Priority to CN202011486837.3A priority Critical patent/CN112546807A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0454—Controlling adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40011—Methods relating to the process cycle in pressure or temperature swing adsorption
    • B01D2259/4002—Production
    • B01D2259/40022—Production with two sub-steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/414—Further details for adsorption processes and devices using different types of adsorbents

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Of Gases By Adsorption (AREA)

Abstract

The invention discloses adsorption type gas treatment equipment and a treatment method thereof, wherein the adsorption type gas treatment equipment comprises an adsorption main body filled with adsorption fillers, wherein the first end of the adsorption main body is provided with an inlet and a ventilation interface, the second end of the adsorption main body is provided with an outlet, two adjacent different adsorption fillers are separated by a partition plate, and the partition plate can separate adsorption filler areas with different components, so that the adsorption fillers sequentially react with waste gas, and the phenomenon that the reaction sequence is disordered due to the fact that the adsorption fillers are mixed together due to shaking and oscillation in the transportation process of the equipment can be avoided, and the substantial effect of waste gas treatment is influenced. The invention has simple structure, adopts the mode of adsorption and interception for treatment, does not generate new waste, and avoids secondary pollution to water resources; the invention intercepts the toxic and harmful chemical components of the waste gas, so that the discharged gas meets the relevant requirements of national environmental protection; the invention ensures the isolation of the inside and the outside of the adsorption main body during transportation, plays a safety role and avoids polluting the transportation environment.

Description

Adsorption type gas treatment equipment and treatment method thereof
Technical Field
The invention belongs to the field of waste gas treatment, and particularly relates to adsorption type gas treatment equipment and a treatment method thereof.
Background
With the progress of science and technology in China, the application of semiconductors is more and more extensive, so that more and more factories and larger scale are used for producing semiconductors, and the generation of waste gas in the production process of semiconductors is greatly increased.
In the tail gas treatment method of the semiconductor manufacturing process in the market at present, dry adsorption equipment is adopted for adsorption, and the principle is that an adsorbent is used for removing tail gas through a physical or chemical adsorption method. The main body of the adsorbent filled therein is important, and how to make the gas smoothly pass through the gaps among various adsorbents and fully react becomes the key of the tail gas treatment technology in the semiconductor manufacturing process. And because the chemical gas used in the semiconductor manufacturing process has extremely high danger, the adsorption barrel is easy to have gas leakage. It is therefore important to have an adsorption gas treatment plant that overcomes the above-mentioned drawbacks.
Disclosure of Invention
In order to solve the technical problem, in one aspect, the invention provides an adsorption type gas treatment device, which comprises an adsorption main body filled with adsorption filler, wherein the first end of the adsorption main body is provided with an inlet and a ventilation interface, the second end of the adsorption main body is provided with an outlet, two adjacent different adsorption fillers are separated by a partition plate, the partition plate is provided with a through hole, the size of the through hole is smaller than that of particles in the adsorption filler, and the partition plate is fixed on the inner wall of the adsorption main body. The baffle can separate various different composition adsorption filler district, makes various adsorption filler react with waste gas in proper order, can avoid adsorption filler to shake in equipment transportation and vibrate and lead to multiple adsorption filler to mix and lead to the reaction sequence in disorder together to waste gas treatment's essential effect has been influenced.
The inlet is provided with an inlet valve, the inlet valve is connected with the bottom of the adsorption main body through a first connecting pipe, the first connecting pipe is a bent pipe, and the ventilation interface is arranged in the middle of the bent pipe. When the inside absorption saturation of absorption main part and need change the absorption filler, close the inlet valve, insert clear air through the interface of ventilating, and then sweep the clean remaining waste gas that is located the absorption main part, ensure when opening, there is not harmful waste gas's residue inside.
The outlet is provided with an outlet valve, the outlet valve is connected with the adsorption main body through a second connecting pipe, and a glass sight glass pipe is fixed on the second connecting pipe. The glass sight glass tube is filled with a color-changing agent corresponding to the treated gas, and whether the waste gas is completely treated or not or whether the adsorption filler in the adsorption main body fails or not can be judged by changing the color of the reagent.
When inlet valve and outlet valve were closed simultaneously, will form an airtight space in the absorption main part, can guarantee not to have dangerous gas to leak in the waste material transportation, avoid causing the injury to the transport personnel.
The adsorption main body is provided with a cooling interface. The cooling interface is arranged at the bottom of the adsorption main body and used for being connected with nitrogen to realize internal cooling. Adsorb the main part top and be fixed with temperature-detecting device, still include control system, temperature-detecting device sends temperature information to control system, and whether control system control cooling interface works. Wherein the temperature detection device can be a temperature sensing rod which is fixedly inserted at the top of the adsorption main body. According to the invention, through the arrangement of the control system, when the temperature detection device detects that the temperature in the adsorption main body is higher than 50 ℃, the control system controls the introduction of nitrogen to cool the adsorption main body, so that the temperature of the adsorption main body is maintained below 50 ℃.
A foldable handle is fixed on the adsorption main body. Collapsible handle is located the both sides of adsorbing the main part respectively, can conveniently lift up and carry when later maintenance. The universal wheel with the brake is fixed at the bottom of the adsorption main body, can be freely pushed, and facilitates the turnover and fixation of the adsorption main body.
The main adsorption body comprises a cylinder body, and a top cover and a base which are fixed at two ends of the cylinder body. The top cap passes through clamp and barrel fixed connection, still is equipped with the seal ring of taking T type draw-in groove between top cap and the barrel, and T type draw-in groove can make better being fixed in of seal ring adsorb main part upper portion, can adapt to positive negative pressure and change, all can keep good airtight effect under the application condition of difference. The replacement of the internal adsorption filler can be realized by connecting the top cover with the barrel through the hoop.
The baffle divides the equipment into a filler chamber, and the filler chamber comprises one or more of a dust removal filter layer, a dehumidification drying layer and a harmful substance neutralization layer. Wherein can select according to the needs of difference, can select dust removal filter layer and harmful substance neutralization layer to arrange in pairs, perhaps dust removal filter layer, dehumidification drying layer, harmful substance neutralization layer three arrange in pairs, wherein harmful substance neutralization layer can be provided with the multilayer, and different harmful substance react in filler and the waste gas through the absorption of difference.
In another aspect, the present invention provides a method for treating an adsorption gas treatment facility, comprising the steps of: when put into use: the waste gas enters from the inlet valve and then passes through the dedusting filter layer to filter and intercept large granular substances in the waste gas, so that the particles are prevented from blocking gaps in the adsorption filler, the treatment efficiency of the adsorption filler is improved, and the service life of the adsorption filler is prolonged; the waste gas passes through the dehumidification drying layer to absorb moisture in the waste gas, so that the waste gas which is subsequently reacted with the adsorption filler is kept dry, the absorption treatment of the adsorption filler on the waste gas is facilitated, and the service life of the adsorption filler is prolonged; the waste gas passes through a harmful substance neutralizing layer to neutralize and absorb toxic substances in the waste gas, namely different adsorption fillers are selected according to different chemical properties of the waste gas, so that the waste gas and the adsorption fillers are subjected to a neutralization reaction; the reacted gas is then discharged through an outlet valve.
Further comprising the steps of: whether the waste gas is treated cleanly or whether the adsorption filler fails or not is judged by judging whether the color changing agent in the glass sight glass changes color or not.
Compared with the prior art, the invention has the advantages that: the invention has simple structure, adopts the mode of adsorption and interception for treatment, does not generate new waste, and avoids secondary pollution to water resources; the invention intercepts the toxic and harmful chemical components of the waste gas, so that the discharged gas meets the relevant requirements of national environmental protection; the invention ensures the isolation of the inside and the outside of the adsorption main body during transportation, plays a safety role and avoids polluting the transportation environment.
Drawings
FIG. 1 is a schematic cross-sectional view of the present invention;
FIG. 2 is a perspective view of the present invention;
reference numerals: 1-an adsorption body; 2-a vent interface; 3-a separator; 4-adsorbing the filler; 5-an inlet valve; 6-bending the pipe; 7-a flange; an 8-outlet valve; 9-a second connecting tube; 10-glass optic tube; 11-a cooling interface; 12-temperature detection means; 13-a foldable handle; 14-a handle plate; 15-universal wheels; 16-a top cover; 17-a base; 18-a clamp; 19-roof handle.
Detailed Description
In order that those skilled in the art will better understand the invention and thus more clearly define the scope of the invention as claimed, it is described in detail below with respect to certain specific embodiments thereof. It should be noted that the following is only a few embodiments of the present invention, and the specific direct description of the related structures is only for the convenience of understanding the present invention, and the specific features do not of course directly limit the scope of the present invention.
Referring to the attached drawings, the invention adopts the following technical scheme that the adsorption type gas treatment equipment comprises an adsorption main body filled with adsorption filler, wherein the first end of the adsorption main body is provided with an inlet and a ventilation interface, the second end of the adsorption main body is provided with an outlet, two adjacent different adsorption fillers are separated by a partition plate, the partition plate is provided with a through hole, the size of the through hole is smaller than that of particles in the adsorption filler, and the partition plate is fixed on the inner wall of the adsorption main body. The baffle can separate various different composition adsorption filler district, makes various adsorption filler react with waste gas in proper order, can avoid adsorption filler to shake in equipment transportation and vibrate and lead to multiple adsorption filler to mix and lead to the reaction sequence in disorder together to waste gas treatment's essential effect has been influenced.
The inlet is provided with an inlet valve, the inlet valve is connected with the bottom of the adsorption main body through a first connecting pipe, the first connecting pipe is a bent pipe, and the ventilation interface is arranged in the middle of the bent pipe. When the inside absorption saturation of absorption main part and need change the absorption filler, close the inlet valve, insert clear air through the interface of ventilating, and then sweep the clean remaining waste gas that is located the absorption main part, ensure when opening, there is not harmful waste gas's residue inside. Wherein an inlet valve is fixedly connected to a flange on the first connecting pipe.
The outlet is provided with an outlet valve, one end of the second connecting pipe is connected with the adsorption main body, the other end of the second connecting pipe is fixed with a glass sight glass pipe, and the glass sight glass pipe is connected with the outlet valve. The glass sight glass tube is filled with a color-changing agent corresponding to the treated gas. Wherein, the glass sight glass tube is internally provided with a cavity for placing a color-changing agent in an integrated manner, and the cavity is provided with a small hole for communicating with the adsorbed waste gas.
When inlet valve and outlet valve were closed simultaneously, will form an airtight space in the absorption main part, can guarantee not to have dangerous gas to leak in the waste material transportation, avoid causing the injury to the transport personnel.
The adsorption main body is provided with a cooling interface, and the cooling interface is arranged at the bottom of the adsorption main body and used for being connected with nitrogen to realize internal cooling. Adsorb the main part top and be fixed with temperature-detecting device, still include control system, temperature-detecting device sends temperature information to control system, and whether control system control cooling interface works. Wherein the temperature detection device can be a temperature sensing rod which is fixedly inserted at the top of the adsorption main body. According to the invention, through the arrangement of the control system, when the temperature detection device detects that the temperature in the adsorption main body is higher than 50 ℃, the control system controls the introduction of nitrogen to cool the adsorption main body, so that the temperature of the adsorption main body is maintained below 50 ℃.
Adsorb and be fixed with collapsible handle in the main part, adsorb and be fixed with the handle board in the main part, be provided with collapsible handle with articulated mode or hub connection mode on the handle board, the handle board is located the both sides of adsorbing the main part respectively, can conveniently lift up and carry when later maintenance. The universal wheel with the brake is fixed at the bottom of the adsorption main body, can be freely pushed, and facilitates the turnover and fixation of the adsorption main body.
The main adsorption body comprises a cylinder body, and a top cover and a base which are fixed at two ends of the cylinder body. The top cap passes through clamp and barrel fixed connection, still is equipped with the seal ring of taking T type draw-in groove between top cap and the barrel, current T type sealing washer promptly, and T type draw-in groove can make better being fixed in of sealing washer adsorb main part upper portion, can adapt to positive negative pressure and change, all can keep good airtight effect under the application condition of difference. The replacement of the internal adsorption filler can be realized by connecting the top cover with the barrel through the hoop. Wherein a top cover handle is also fixed on the top cover.
The baffle divides the equipment into a filler chamber, and the filler chamber comprises one or more of a dust removal filter layer, a dehumidification drying layer and a harmful substance neutralization layer. Wherein can select according to the needs of difference, can select dust removal filter layer and harmful substance neutralization layer to arrange in pairs, perhaps dust removal filter layer, dehumidification drying layer, harmful substance neutralization layer three arrange in pairs, wherein harmful substance neutralization layer can be provided with the multilayer, and different harmful substance react in filler and the waste gas through the absorption of difference.
In another aspect, the present invention provides a method for treating an adsorption gas treatment facility, comprising the steps of: when put into use: the waste gas enters from the inlet valve and then passes through the dedusting filter layer to filter and intercept large granular substances in the waste gas, so that the particles are prevented from blocking gaps in the adsorption filler, the treatment efficiency of the adsorption filler is improved, and the service life of the adsorption filler is prolonged; the waste gas passes through the dehumidification drying layer to absorb moisture in the waste gas, so that the waste gas which is subsequently reacted with the adsorption filler is kept dry, the absorption treatment of the adsorption filler on the waste gas is facilitated, and the service life of the adsorption filler is prolonged; the waste gas passes through a harmful substance neutralization layer to carry out neutralization reaction, and toxic substances in the waste gas are neutralized and absorbed, namely different adsorption fillers are selected according to different chemical properties of the waste gas, so that the waste gas and the waste gas are subjected to neutralization reaction; the reacted gas is then discharged through an outlet valve. The invention can judge whether the waste gas is completely treated or whether the adsorption filler fails or not by judging whether the color changing agent in the glass sight glass changes color or not.
When the adsorption type semiconductor device is put into use, chemical waste gas generated in the semiconductor manufacturing process is connected to the inlet valve, the waste gas enters the adsorption main body through the inlet valve and the first connecting pipe and reacts with the adsorption filler filled in the adsorption main body in advance, generated solids are trapped in the adsorption main body, and the generated solids and harmless gas are conveyed to the exhaust pipeline from the outlet valve.
Compared with the prior art, the invention has the advantages that: the invention has simple structure, adopts the mode of adsorption and interception for treatment, does not generate new waste, and avoids secondary pollution to water resources; the invention intercepts the toxic and harmful chemical components of the waste gas, so that the discharged gas meets the relevant requirements of national environmental protection; the invention ensures the isolation of the inside and the outside of the adsorption main body during transportation, plays a safety role and avoids polluting the transportation environment.
The above description is not intended to limit the present invention, and the present invention is not limited to the above examples, and variations, modifications, additions and substitutions which may be made by those skilled in the art within the spirit of the present invention are within the scope of the present invention.

Claims (10)

1. An adsorption-type gas treatment apparatus comprising an adsorption main body (1) containing an adsorption packing (4), characterized in that: the adsorption device is characterized in that an inlet and a ventilation interface (2) are formed in the first end of the adsorption main body (1), an outlet is formed in the second end of the adsorption main body (1), two adjacent different adsorption fillers (4) are separated through a partition plate (3), and a through hole is formed in the partition plate (3).
2. The adsorptive gas treatment apparatus according to claim 1, wherein: the entry is equipped with inlet valve (5), and inlet valve (5) are connected the bottom of adsorbing main part (1) through first connecting pipe, and first connecting pipe is return bend (6), and interface of ventilating (2) are seted up in return bend (6) middle part.
3. The adsorptive gas treatment apparatus according to claim 1, wherein: the outlet is provided with an outlet valve (8), the outlet valve (8) is connected with the adsorption main body (1) through a second connecting pipe (9), and a glass sight glass pipe (10) is fixed on the second connecting pipe (9).
4. The adsorptive gas treatment apparatus according to claim 3, wherein: the glass sight glass tube (10) is filled with a color-changing agent corresponding to the treated gas.
5. The adsorptive gas treatment apparatus according to claim 1, wherein: the adsorption main body (1) is provided with a cooling interface (11).
6. The adsorptive gas treatment apparatus according to claim 5, wherein: adsorb main part (1) top and be fixed with temperature-detecting device (12), still include control system, temperature-detecting device (12) send temperature information to control system, and whether control system control cooling interface (11) work.
7. The adsorptive gas treatment apparatus according to claim 1, wherein: the size of the perforations is smaller than the size of the particles in the adsorption filler (4).
8. The adsorptive gas treatment apparatus according to claim 1, wherein: the baffle plate divides the equipment into a filler chamber, and the filler chamber comprises one or more of a dust removal filter layer, a dehumidification drying layer and a harmful substance neutralization layer.
9. A method of treating an adsorption gas treatment plant according to any one of claims 1 to 8, characterized in that: the method comprises the following steps:
when put into use: the waste gas enters from the inlet valve and then passes through the dedusting filter layer to filter and intercept large particle substances in the waste gas;
the exhaust gas passes through the dehumidification drying layer to absorb moisture in the exhaust gas;
the waste gas passes through a harmful substance neutralization layer to carry out neutralization reaction, and toxic substances in the waste gas are neutralized and absorbed;
the reacted gas is then discharged through an outlet valve.
10. The process of claim 9, wherein: further comprising the steps of: whether the waste gas is treated cleanly or whether the adsorption filler fails or not is judged by judging whether the color changing agent in the glass sight glass changes color or not.
CN202011486837.3A 2020-12-16 2020-12-16 Adsorption type gas treatment equipment and treatment method thereof Pending CN112546807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011486837.3A CN112546807A (en) 2020-12-16 2020-12-16 Adsorption type gas treatment equipment and treatment method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011486837.3A CN112546807A (en) 2020-12-16 2020-12-16 Adsorption type gas treatment equipment and treatment method thereof

Publications (1)

Publication Number Publication Date
CN112546807A true CN112546807A (en) 2021-03-26

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011486837.3A Pending CN112546807A (en) 2020-12-16 2020-12-16 Adsorption type gas treatment equipment and treatment method thereof

Country Status (1)

Country Link
CN (1) CN112546807A (en)

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