CN214209973U - Adsorption type gas treatment device - Google Patents
Adsorption type gas treatment device Download PDFInfo
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- CN214209973U CN214209973U CN202023042990.5U CN202023042990U CN214209973U CN 214209973 U CN214209973 U CN 214209973U CN 202023042990 U CN202023042990 U CN 202023042990U CN 214209973 U CN214209973 U CN 214209973U
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- 238000001179 sorption measurement Methods 0.000 title claims abstract description 84
- 239000000126 substance Substances 0.000 claims abstract description 22
- 238000012856 packing Methods 0.000 claims abstract description 8
- 239000000945 filler Substances 0.000 claims description 46
- 239000011521 glass Substances 0.000 claims description 20
- 238000001816 cooling Methods 0.000 claims description 13
- 238000006386 neutralization reaction Methods 0.000 claims description 13
- 238000007791 dehumidification Methods 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 7
- 239000000428 dust Substances 0.000 claims description 7
- 239000003795 chemical substances by application Substances 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 3
- 238000009423 ventilation Methods 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims 2
- 238000010521 absorption reaction Methods 0.000 abstract description 41
- 239000002912 waste gas Substances 0.000 abstract description 41
- 239000007789 gas Substances 0.000 abstract description 27
- 230000000694 effects Effects 0.000 abstract description 5
- 239000002699 waste material Substances 0.000 abstract description 5
- 230000009471 action Effects 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 230000007613 environmental effect Effects 0.000 abstract description 3
- 238000002955 isolation Methods 0.000 abstract description 3
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- 238000012545 processing Methods 0.000 abstract description 3
- 231100000331 toxic Toxicity 0.000 abstract description 3
- 230000002588 toxic effect Effects 0.000 abstract description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 4
- 230000002035 prolonged effect Effects 0.000 description 4
- 239000003463 adsorbent Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 208000027418 Wounds and injury Diseases 0.000 description 2
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- 229910052757 nitrogen Inorganic materials 0.000 description 2
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- Treating Waste Gases (AREA)
Abstract
The utility model discloses an absorption formula gas processing apparatus, including the absorption main part that is equipped with adsorption packing, the entry has been seted up and the interface of ventilating to the first end of absorption main part, the export has been seted up to the second end of absorption main part, two adjacent different adsorption packing pass through the baffle and separate, the baffle can separate various different composition adsorption packing district, make various adsorption packing react with waste gas in proper order, can avoid adsorption packing shake in equipment transportation vibrate to lead to multiple adsorption packing to mix and lead to the reaction sequence in disorder together, thereby the essential effect of exhaust-gas treatment has been influenced. The utility model has simple structure, adopts the mode of adsorption and interception for treatment, does not generate new waste, and avoids the secondary pollution to water resources; the utility model intercepts the toxic and harmful chemical components in the waste gas, so that the discharged gas meets the relevant requirements of national environmental protection; the utility model discloses adsorb the inside and outside isolation of main part when ensureing the transportation, play the safety action and avoided polluting the transportation environment again.
Description
Technical Field
The utility model relates to a waste gas treatment field, concretely relates to adsorption type gas treatment device.
Background
With the progress of science and technology in China, the application of semiconductors is more and more extensive, so that more and more factories and larger scale are used for producing semiconductors, and the generation of waste gas in the production process of semiconductors is greatly increased.
In the tail gas treatment method of the semiconductor manufacturing process in the market at present, dry adsorption equipment is adopted for adsorption, and the principle is that an adsorbent is used for removing tail gas through a physical or chemical adsorption method. The main body of the adsorbent filled therein is important, and how to make the gas smoothly pass through the gaps among various adsorbents and fully react becomes the key of the tail gas treatment technology in the semiconductor manufacturing process. And because the chemical gas used in the semiconductor manufacturing process has extremely high danger, the adsorption barrel is easy to have gas leakage. It is therefore important to have an adsorption gas treatment device that overcomes the above-mentioned drawbacks.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides an adsorption type gas treatment device, including the absorption main part that is equipped with the absorption filler, the entry has been seted up and the interface of ventilating to the first end of absorption main part, and the export has been seted up to the second end of absorption main part, and two adjacent different absorption fillers pass through the baffle and separate, have seted up the perforation on the baffle, and the fenestrate size is less than the size of absorption filler interior granule, and the baffle is fixed at the absorption main part inner wall. The baffle can separate various different composition adsorption filler district, makes various adsorption filler react with waste gas in proper order, can avoid adsorption filler to shake in equipment transportation and vibrate and lead to multiple adsorption filler to mix and lead to the reaction sequence in disorder together to waste gas treatment's essential effect has been influenced.
The inlet is provided with an inlet valve, the inlet valve is connected with the bottom of the adsorption main body through a first connecting pipe, the first connecting pipe is a bent pipe, and the ventilation interface is arranged in the middle of the bent pipe. When the inside absorption saturation of absorption main part and need change the absorption filler, close the inlet valve, insert clear air through the interface of ventilating, and then sweep the clean remaining waste gas that is located the absorption main part, ensure when opening, there is not harmful waste gas's residue inside.
The outlet is provided with an outlet valve, the outlet valve is connected with the adsorption main body through a second connecting pipe, and a glass sight glass pipe is fixed on the second connecting pipe. The glass sight glass tube is filled with a color-changing agent corresponding to the treated gas, and whether the waste gas is completely treated or not or whether the adsorption filler in the adsorption main body fails or not can be judged by changing the color of the reagent.
When inlet valve and outlet valve were closed simultaneously, will form an airtight space in the absorption main part, can guarantee not to have dangerous gas to leak in the waste material transportation, avoid causing the injury to the transport personnel.
The adsorption main body is provided with a cooling interface. The cooling interface is arranged at the bottom of the adsorption main body and used for being connected with nitrogen to realize internal cooling. Adsorb the main part top and be fixed with temperature-detecting device, still include control system, temperature-detecting device sends temperature information to control system, and whether control system control cooling interface works. Wherein the temperature detection device can be a temperature sensing rod which is fixedly inserted at the top of the adsorption main body. The utility model discloses accessible control system's setting, when temperature-detecting device detected that the temperature in the absorption main part is higher than 50 degrees centigrade, control system control lets in nitrogen gas, gives the absorption main part cooling, realizes that the temperature of absorption main part maintains below 50 degrees centigrade.
A foldable handle is fixed on the adsorption main body. Collapsible handle is located the both sides of adsorbing the main part respectively, can conveniently lift up and carry when later maintenance. The universal wheel with the brake is fixed at the bottom of the adsorption main body, can be freely pushed, and facilitates the turnover and fixation of the adsorption main body.
The main adsorption body comprises a cylinder body, and a top cover and a base which are fixed at two ends of the cylinder body. The top cap passes through clamp and barrel fixed connection, still is equipped with the seal ring of taking T type draw-in groove between top cap and the barrel, and T type draw-in groove can make better being fixed in of seal ring adsorb main part upper portion, can adapt to positive negative pressure and change, all can keep good airtight effect under the application condition of difference. The replacement of the internal adsorption filler can be realized by connecting the top cover with the barrel through the hoop.
The baffle divides the equipment into a filler chamber, and the filler chamber comprises one or more of a dust removal filter layer, a dehumidification drying layer and a harmful substance neutralization layer. Wherein can select according to the needs of difference, can select dust removal filter layer and harmful substance neutralization layer to arrange in pairs, perhaps dust removal filter layer, dehumidification drying layer, harmful substance neutralization layer three arrange in pairs, wherein harmful substance neutralization layer can be provided with the multilayer, and different harmful substance react in filler and the waste gas through the absorption of difference.
On the other hand, the utility model provides a processing method of adsorption type gas processing apparatus, including following step: when put into use: the waste gas enters from the inlet valve and then passes through the dedusting filter layer to filter and intercept large granular substances in the waste gas, so that the particles are prevented from blocking gaps in the adsorption filler, the treatment efficiency of the adsorption filler is improved, and the service life of the adsorption filler is prolonged; the waste gas passes through the dehumidification drying layer to absorb moisture in the waste gas, so that the waste gas which is subsequently reacted with the adsorption filler is kept dry, the absorption treatment of the adsorption filler on the waste gas is facilitated, and the service life of the adsorption filler is prolonged; the waste gas passes through a harmful substance neutralizing layer to neutralize and absorb toxic substances in the waste gas, namely different adsorption fillers are selected according to different chemical properties of the waste gas, so that the waste gas and the adsorption fillers are subjected to a neutralization reaction; the reacted gas is then discharged through an outlet valve.
Further comprising the steps of: whether the waste gas is treated cleanly or whether the adsorption filler fails or not is judged by judging whether the color changing agent in the glass sight glass changes color or not.
Compared with the prior art, the utility model has the advantages of: the utility model has simple structure, adopts the mode of adsorption and interception for treatment, does not generate new waste, and avoids the secondary pollution to water resources; the utility model intercepts the toxic and harmful chemical components in the waste gas, so that the discharged gas meets the relevant requirements of national environmental protection; the utility model discloses adsorb the inside and outside isolation of main part when ensureing the transportation, play the safety action and avoided polluting the transportation environment again.
Drawings
FIG. 1 is a schematic cross-sectional view of the present invention;
FIG. 2 is a perspective view of the present invention;
reference numerals: 1-an adsorption body; 2-a vent interface; 3-a separator; 4-adsorbing the filler; 5-an inlet valve; 6-bending the pipe; 7-a flange; an 8-outlet valve; 9-a second connecting tube; 10-glass optic tube; 11-a cooling interface; 12-temperature detection means; 13-a foldable handle; 14-a handle plate; 15-universal wheels; 16-a top cover; 17-a base; 18-a clamp; 19-roof handle.
Detailed Description
In order to better understand the invention for those skilled in the art and to define the claimed scope more clearly, the invention will be described in detail below with respect to certain specific embodiments of the invention. It should be noted that the following description is only a few examples of the present invention, and the specific and direct descriptions of the related structures are only for the convenience of understanding the present invention, and the specific features do not naturally and directly limit the scope of the present invention.
Referring to the drawings, the utility model discloses a following technical scheme, an adsorption type gas treatment device, including the absorption main part that is equipped with the absorption filler, the entry has been seted up and the interface of ventilating to the first end of absorption main part, and the export has been seted up to the second end of absorption main part, and two adjacent different absorption fillers pass through the baffle and separate, have seted up the perforation on the baffle, and the fenestrate size is less than the size of absorption filler interior granule, and the baffle is fixed at absorption main part inner wall. The baffle can separate various different composition adsorption filler district, makes various adsorption filler react with waste gas in proper order, can avoid adsorption filler to shake in equipment transportation and vibrate and lead to multiple adsorption filler to mix and lead to the reaction sequence in disorder together to waste gas treatment's essential effect has been influenced.
The inlet is provided with an inlet valve, the inlet valve is connected with the bottom of the adsorption main body through a first connecting pipe, the first connecting pipe is a bent pipe, and the ventilation interface is arranged in the middle of the bent pipe. When the inside absorption saturation of absorption main part and need change the absorption filler, close the inlet valve, insert clear air through the interface of ventilating, and then sweep the clean remaining waste gas that is located the absorption main part, ensure when opening, there is not harmful waste gas's residue inside. Wherein an inlet valve is fixedly connected to a flange on the first connecting pipe.
The outlet is provided with an outlet valve, one end of the second connecting pipe is connected with the adsorption main body, the other end of the second connecting pipe is fixed with a glass sight glass pipe, and the glass sight glass pipe is connected with the outlet valve. The glass sight glass tube is filled with a color-changing agent corresponding to the treated gas. Wherein, the glass sight glass tube is internally provided with a cavity for placing a color-changing agent in an integrated manner, and the cavity is provided with a small hole for communicating with the adsorbed waste gas.
When inlet valve and outlet valve were closed simultaneously, will form an airtight space in the absorption main part, can guarantee not to have dangerous gas to leak in the waste material transportation, avoid causing the injury to the transport personnel.
The adsorption main body is provided with a cooling interface, and the cooling interface is arranged at the bottom of the adsorption main body and used for being connected with nitrogen to realize internal cooling. Adsorb the main part top and be fixed with temperature-detecting device, still include control system, temperature-detecting device sends temperature information to control system, and whether control system control cooling interface works. Wherein the temperature detection device can be a temperature sensing rod which is fixedly inserted at the top of the adsorption main body. The utility model discloses accessible control system's setting, when temperature-detecting device detected that the temperature in the absorption main part is higher than 50 degrees centigrade, control system control lets in nitrogen gas, gives the absorption main part cooling, realizes that the temperature of absorption main part maintains below 50 degrees centigrade.
Adsorb and be fixed with collapsible handle in the main part, adsorb and be fixed with the handle board in the main part, be provided with collapsible handle with articulated mode or hub connection mode on the handle board, the handle board is located the both sides of adsorbing the main part respectively, can conveniently lift up and carry when later maintenance. The universal wheel with the brake is fixed at the bottom of the adsorption main body, can be freely pushed, and facilitates the turnover and fixation of the adsorption main body.
The main adsorption body comprises a cylinder body, and a top cover and a base which are fixed at two ends of the cylinder body. The top cap passes through clamp and barrel fixed connection, still is equipped with the seal ring of taking T type draw-in groove between top cap and the barrel, current T type sealing washer promptly, and T type draw-in groove can make better being fixed in of sealing washer adsorb main part upper portion, can adapt to positive negative pressure and change, all can keep good airtight effect under the application condition of difference. The replacement of the internal adsorption filler can be realized by connecting the top cover with the barrel through the hoop. Wherein a top cover handle is also fixed on the top cover.
The baffle divides the equipment into a filler chamber, and the filler chamber comprises one or more of a dust removal filter layer, a dehumidification drying layer and a harmful substance neutralization layer. Wherein can select according to the needs of difference, can select dust removal filter layer and harmful substance neutralization layer to arrange in pairs, perhaps dust removal filter layer, dehumidification drying layer, harmful substance neutralization layer three arrange in pairs, wherein harmful substance neutralization layer can be provided with the multilayer, and different harmful substance react in filler and the waste gas through the absorption of difference.
On the other hand, the utility model provides a processing method of adsorption type gas processing apparatus, including following step: when put into use: the waste gas enters from the inlet valve and then passes through the dedusting filter layer to filter and intercept large granular substances in the waste gas, so that the particles are prevented from blocking gaps in the adsorption filler, the treatment efficiency of the adsorption filler is improved, and the service life of the adsorption filler is prolonged; the waste gas passes through the dehumidification drying layer to absorb moisture in the waste gas, so that the waste gas which is subsequently reacted with the adsorption filler is kept dry, the absorption treatment of the adsorption filler on the waste gas is facilitated, and the service life of the adsorption filler is prolonged; the waste gas passes through a harmful substance neutralization layer to carry out neutralization reaction, and toxic substances in the waste gas are neutralized and absorbed, namely different adsorption fillers are selected according to different chemical properties of the waste gas, so that the waste gas and the waste gas are subjected to neutralization reaction; the reacted gas is then discharged through an outlet valve. The utility model discloses in can also be through judging whether discolour of the interior discoloring agent of glass sight, and then judge whether the exhaust gas is handled totally or the adsorption packing has or not inefficacy.
The utility model discloses when putting into use, the chemical waste gas that produces in the semiconductor manufacturing process is connected to the inlet valve, and this waste gas gets into the absorption main part after through inlet valve and first connecting pipe, and the absorption that packs in advance with inside is packed and is reacted, and the solid of production is detained in the absorption main part, and it will be carried to exhaust duct from the outlet valve with harmless gas.
Compared with the prior art, the utility model has the advantages of: the utility model has simple structure, adopts the mode of adsorption and interception for treatment, does not generate new waste, and avoids the secondary pollution to water resources; the utility model intercepts the toxic and harmful chemical components in the waste gas, so that the discharged gas meets the relevant requirements of national environmental protection; the utility model discloses adsorb the inside and outside isolation of main part when ensureing the transportation, play the safety action and avoided polluting the transportation environment again.
The above description is not intended to limit the present invention, and the present invention is not limited to the above examples, and the changes, modifications, additions or substitutions made by those skilled in the art within the scope of the present invention should also belong to the protection scope of the present invention.
Claims (8)
1. An adsorption-type gas treatment device, comprising an adsorption main body (1) provided with an adsorption packing (4), characterized in that: the adsorption device is characterized in that an inlet and a ventilation interface (2) are formed in the first end of the adsorption main body (1), an outlet is formed in the second end of the adsorption main body (1), two adjacent different adsorption fillers (4) are separated through a partition plate (3), and a through hole is formed in the partition plate (3).
2. The adsorption gas treatment device according to claim 1, wherein: the entry is equipped with inlet valve (5), and inlet valve (5) are connected the bottom of adsorbing main part (1) through first connecting pipe, and first connecting pipe is return bend (6), and interface of ventilating (2) are seted up in return bend (6) middle part.
3. The adsorption gas treatment device according to claim 1, wherein: the outlet is provided with an outlet valve (8), the outlet valve (8) is connected with the adsorption main body (1) through a second connecting pipe (9), and a glass sight glass pipe (10) is fixed on the second connecting pipe (9).
4. The adsorption gas treatment device according to claim 3, wherein: the glass sight glass tube (10) is filled with a color-changing agent corresponding to the treated gas.
5. The adsorption gas treatment device according to claim 1, wherein: the adsorption main body (1) is provided with a cooling interface (11).
6. The adsorption gas treatment device according to claim 5, wherein: adsorb main part (1) top and be fixed with temperature-detecting device (12), still include control system, temperature-detecting device (12) send temperature information to control system, and whether control system control cooling interface (11) work.
7. The adsorption gas treatment device according to claim 1, wherein: the size of the perforations is smaller than the size of the particles in the adsorption filler (4).
8. The adsorption gas treatment device according to claim 1, wherein: the baffle plate divides the equipment into a filler chamber, and the filler chamber comprises one or more of a dust removal filter layer, a dehumidification drying layer and a harmful substance neutralization layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023042990.5U CN214209973U (en) | 2020-12-16 | 2020-12-16 | Adsorption type gas treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023042990.5U CN214209973U (en) | 2020-12-16 | 2020-12-16 | Adsorption type gas treatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214209973U true CN214209973U (en) | 2021-09-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202023042990.5U Active CN214209973U (en) | 2020-12-16 | 2020-12-16 | Adsorption type gas treatment device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214209973U (en) |
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2020
- 2020-12-16 CN CN202023042990.5U patent/CN214209973U/en active Active
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Address after: Building 505, Building 3, No. 8 Guansheng Fifth Road, Luhu Community, Guanhu Street, Longhua District, Shenzhen City, Guangdong Province, 518000 Patentee after: Shenzhen liweicheng Technology Co.,Ltd. Address before: 518000 1107, Yingfei Haocheng Science Park, Guansheng fifth road, Luhu community, Guanhu street, Longhua District, Shenzhen City, Guangdong Province Patentee before: Shenzhen liweicheng Technology Co.,Ltd. |
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