CN112540527B - Rapid convergence laminated imaging device for synchronously acquiring double-defocusing diffraction patterns - Google Patents

Rapid convergence laminated imaging device for synchronously acquiring double-defocusing diffraction patterns Download PDF

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CN112540527B
CN112540527B CN202011416661.4A CN202011416661A CN112540527B CN 112540527 B CN112540527 B CN 112540527B CN 202011416661 A CN202011416661 A CN 202011416661A CN 112540527 B CN112540527 B CN 112540527B
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focusing
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beam splitter
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CN112540527A (en
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窦健泰
武俊超
厉淑贞
胡友友
张明明
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Jiangsu University of Science and Technology
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Abstract

The invention discloses a rapid convergence laminated imaging device for synchronously collecting double-defocusing diffraction patterns, which comprises a light source, a focusing lens, a sample and a beam splitter prism which are sequentially arranged, wherein light emitted by the light source forms a focusing beam after passing through the focusing lens, the focusing beam is divided into a transmission part and a reflection part by the beam splitter prism after acting with the sample, and a first CCD and a second CCD are respectively arranged at positions of different distances from the focus of the focusing beam on a transmission light path and a reflection light path, wherein the first CCD is arranged in front of a focusing point, and the second CCD is arranged behind the focusing point. The invention can realize synchronous collection of a plurality of images of defocusing amount by utilizing the focusing lens, the beam splitter prism and the two CCDs, substitute the collected image information into the light intensity transmission equation to obtain the complex amplitude information of the CCD surface, construct a reasonable initial guess value of the object to be measured by utilizing the information, substitute the reasonable initial guess value into the laminated imaging algorithm, and greatly shorten the iteration time.

Description

Rapid convergence laminated imaging device for synchronously acquiring double-defocusing diffraction patterns
Technical Field
The invention relates to a rapid convergence laminated imaging device, in particular to a rapid convergence laminated imaging device for synchronously acquiring double-defocusing diffraction patterns.
Background
To obtain phase information of an object while extending the application of coherent diffraction imaging techniques, the Rodenburg university of sheffield, 2004, proposed a stacked imaging method (PIE) that uses a two-dimensional moving illumination probe to perform overlapping scans of a sample, and large-field imaging of the sample is achieved using redundancy of adjacent scans and alternating projection iterations. Compared with the traditional coherent diffraction imaging technology, the method has the advantages of higher convergence speed, larger imaging field of view and stronger robustness.
In order to further improve the convergence rate of laminated imaging and shorten the iterative computation time, domestic and foreign scholars propose three types of methods. One is adding constraint conditions, for example, in a Multi-probe ptychographic iterative algorithm method published by Sun a et al in 2018, a pinhole array is adopted to realize Multi-probe illumination, and the sample reconstruction speed is further accelerated; one is to optimize the update function and select a reasonable weight factor, for example, in an Adaptive step-size reconstruction for noise-robust Fourier transform graphical microscopical article published by Chao Zuo et al in 2016, it is found that the phase reconstruction quality is closely related to the selection of the step size, and the stability and robustness of the reconstruction process to noise are significantly improved by introducing an Adaptive step size method, so that the convergence speed is higher. The other is to construct a reasonable initial guess and probe, for example, in a Single-shot radiographic estimated based on chromatographic analysis article published by Jiantai Dou et al in 2019, the reasonable initial guess is constructed by using a spectral synthesis method, so that the rapid convergence of the algorithm is realized, but the method is only suitable for RGB and multi-wavelength illumination.
Disclosure of Invention
The purpose of the invention is as follows: the invention aims to provide a rapid convergence laminated imaging device for synchronously acquiring double-defocusing diffraction patterns, and the aim of accelerating algorithm convergence is fulfilled.
The technical scheme is as follows: the device comprises a light source, a focusing lens, a sample and a beam splitter prism which are sequentially arranged, wherein light emitted by the light source forms a focusing light beam after passing through the focusing lens, the focusing light beam is divided into a transmission part and a reflection part after acting with the sample through the beam splitter prism, and a first CCD and a second CCD are respectively arranged at positions of different distances from the focus of the focusing light beam on a transmission light path and a reflection light path, wherein the first CCD is arranged in front of a focusing point, and the second CCD is arranged behind the focusing point.
The distance between the first CCD and the focus point is less than or equal to 1 mm.
The distance between the second CCD and the focusing point is less than or equal to 100 mm.
The distance difference between the first CCD and the second CCD and the beam splitter prism is between (0,100 mm).
The first CCD and the second CCD adopt two CCDs with the same model and different defocusing amounts.
The sample and the beam splitter prism are both positioned in front of the focusing point, and the focal length of the focusing lens ensures that the sample and the beam splitter prism can be fully placed at the distance in front of the focusing point.
The sample is placed on a displacement table.
When the displacement table moves each time, the first CCD and the second CCD can simultaneously obtain images with different defocusing amounts, and the recorded imagesSubstituting the information into a light intensity transmission equation to obtain complex amplitude information of a recording plane, and constructing an initial guess value of the object to be detected by using the information:
Figure BDA0002820274470000021
wherein, P0(r) initial probe complex amplitude, phi, obtained without placing the sample to be measuredobj(r,sj) Is the complex amplitude of the object plane, r is the coordinate of the object plane, sjThe position of the jth diffraction spot.
Has the advantages that: the invention can realize synchronous collection of a plurality of images of defocusing amount by utilizing the focusing lens, the beam splitter prism and the two CCDs, substitute the collected image information into the light intensity transmission equation to obtain the complex amplitude information of the CCD surface, construct a reasonable initial guess value of the object to be measured by utilizing the information, substitute the reasonable initial guess value into the laminated imaging algorithm, and greatly shorten the iteration time.
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FIG. 1 is a schematic structural diagram of the present invention.
Detailed Description
The invention will be further explained with reference to the drawings.
As shown in fig. 1, the present invention includes a coherent light source 1, a focusing lens 2, a sample 4 and a beam splitter prism 5, which are sequentially arranged, wherein the sample 4 is placed on an X-Y two-dimensional displacement table 3, the sample 4 and the beam splitter prism 5 need to be placed behind the focusing lens 2 and in front of a focusing point, and the focal length of the focusing lens 2 should ensure that the sample 4 and the beam splitter prism 5 can be fully placed at a distance in front of the focusing point. Light emitted by the coherent light source 1 forms a focused light beam after passing through the focusing lens 2, the focused light beam is acted on a sample 4 placed on the X-Y two-dimensional displacement table 3 and is divided into a transmission part and a reflection part by the beam splitter prism 5, and a first CCD6-1 and a second CCD6-2 are respectively placed at different positions of a transmission light path and a reflection light path from a focus of the focused light beam. The first CCD6-1 and the second CCD6-2 are two CCDs with the same model and different defocusing amounts. The first CCD6-1 is placed in front of the focusing point and the distance to the focusing point is less than or equal to 1mm, and the second CCD6-2 is placed behind the focusing point and the distance to the focusing point is less than or equal to 100 mm. As shown in FIG. 1, z1Denotes a distance, z, from the beam splitter prism 5 to the first CCD6-12Prism for indicating light splitting5 to the second CCD6-2, the distance difference between the two should satisfy | z is more than or equal to 01-z2The | < 100 mm. The first CCD6-1 and the second CCD6-2 can simultaneously obtain images having different defocus amounts each time the X-Y two-dimensional translation stage 3 moves.
The recorded image information is substituted into a light intensity transmission equation to obtain the complex amplitude information of the recording plane, and the information is utilized to construct a reasonable initial guess value of the object to be measured, wherein the initial guess value is as follows:
Figure BDA0002820274470000031
wherein, P0(r) initial probe complex amplitude, phi, obtained without placing the sample to be measuredobj(r,sj) Is the complex amplitude of the object plane, r is the coordinate of the object plane, sjAnd the initial guess value of the object to be measured is input into the laminated imaging iterative algorithm for the position of the jth diffraction spot, so that the convergence speed of the algorithm can be increased.
The m-th iteration process of the stacked imaging iterative algorithm is specifically described as follows:
1) diffracted light field psi emerging from the object to be measuredm,obj(r,sj)=Om(r,sj)·Pm(r) transmitting to the first CCD6-1 plane to obtain a corresponding wavefront Ψm,CCD6-1(u,sj)=F{ψm,obj(r,sj) F is angular spectrum diffraction transmission;
2) by using
Figure BDA0002820274470000032
Replacement of Ψm,CCD6-1(u,sj) Transmits the corrected wavefront back to the object plane to obtain a corrected wavefront ψ'm,obj(r,sj) In which IFirst CCD6-1(u,sj) Indicating the intensity distribution recorded by the first CCD6-1 after the sample 4 was placed;
3) sample and probe calibration using the following update function
Figure BDA0002820274470000033
Figure BDA0002820274470000034
The value ranges of alpha and beta are [0,1], and delta is a normalization constant, so that the stability of the numerical value is ensured;
4) will Pm+1(r) substituting into angular spectrum diffraction algorithm, calculating wavefront of first CCD6-1 plane as psiillum,CCD6-1(u) use
Figure BDA0002820274470000035
Correcting Ψillum,CCD6-1(u) transmitting the corrected wavefront back to the object plane by angular spectrum diffraction to obtain the probe Pm+1(r) let Pm+1(r)=Pm+1(r) of (A). Wherein Iillum, first CCD6-1Indicating the light intensity information recorded by the first CCD6-1 when the sample 4 was not placed.
And repeating the steps 1) to 4) until a convergence condition is met.

Claims (6)

1. A fast convergence laminated imaging device for synchronously collecting double-defocusing diffraction patterns is characterized by comprising a light source (1), a focusing lens (2), a sample (4) and a beam splitter prism (5) which are sequentially arranged, wherein light emitted by the light source (1) forms a focusing beam after passing through the focusing lens (2), the focusing beam is divided into a transmission part and a reflection part by the beam splitter prism (5) after acting with the sample (4), a first CCD (6-1) and a second CCD (6-2) are respectively arranged at positions of different distances from the focal point of the focusing beam on a transmission light path and a reflection light path, the first CCD (6-1) is arranged in front of the focal point, the second CCD (6-2) is arranged behind the focal point, the sample (4) is arranged on a displacement table (3), and when the displacement table (3) moves each time, the first CCD (6-1) and the second CCD (6-2) can simultaneously obtain images containing different defocusing amounts, substituting the recorded image information into a light intensity transmission equation to obtain complex amplitude information of a recording plane, and constructing an initial guess value of the object to be detected by using the information:
Figure FDA0003070458930000011
wherein, P0(r) initial probe complex amplitude obtained without sample to be measured,P0R is P0(r) conjugate function, phiobj(r,sj) Is the complex amplitude of the object plane, r is the coordinate of the object plane, sjThe position of the jth diffraction spot.
2. A fast converging stacked imaging device for simultaneous acquisition of a bi-out-of-focus diffraction pattern according to claim 1, wherein the distance from the first CCD (6-1) to the focus point is less than or equal to 1 mm.
3. A fast converging stacked imaging device for simultaneous acquisition of a bi-out-of-focus diffraction pattern according to claim 1, wherein the distance from the second CCD (6-2) to the focus point is less than or equal to 100 mm.
4. The fast converging stacked imaging device for synchronously acquiring double-defocused diffraction patterns according to claim 1, wherein the distance difference between the first CCD (6-1) and the second CCD (6-2) and the beam splitter prism (5) is (0,100 mm).
5. The fast converging stacked imaging device for synchronously acquiring double-defocus diffraction patterns as claimed in claim 1 or 4, wherein the first CCD (6-1) and the second CCD (6-2) are two CCDs with the same model and different defocus amounts.
6. A rapidly converging stacked imaging device with simultaneous acquisition of a bi-out-of-focus diffraction pattern according to claim 1, characterized in that the sample (4) and the beam splitter prism (5) are both located in front of the focus point.
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