CN112536476A

CN112536476A - Wire saw and method for feeding workpiece into and out of wire saw

Info

Publication number: CN112536476A
Application number: CN202010971650.6A
Authority: CN
Inventors: 中村哲也; 河津知之; 长谷川靖夫; 阿部克彦; 高桥正明
Original assignee: Komatsu NTC Ltd
Current assignee: Komatsu NTC Ltd
Priority date: 2019-09-20
Filing date: 2020-09-16
Publication date: 2021-03-23
Also published as: JP2021049589A; JP7372097B2

Abstract

The invention provides a wire saw capable of improving productivity. A wire saw (1) is a cutting device for cutting a workpiece (W) with a wire (53). A wire saw (1) is provided with: temporary tables (11, 12) for supporting a workpiece (W); a conveying device (4) which comprises a slide block (45) for supporting the workpiece (W) and is used for sending the workpiece (W) into the processing chamber (R) and sending the workpiece (W) out of the processing chamber (R); a processing device (5) which is disposed in the processing chamber (R) and processes the workpiece (W); a chucking device (2) disposed in the processing chamber (R) and chucking the workpiece (W), and a lifting device (3) for lifting the chucking device (2). The transfer device (4) transfers the workpiece (W) from the temporary tables (11, 12) to the processing chamber (R).

Description

Wire saw and method for feeding workpiece into and out of wire saw

Technical Field

The present invention relates to a wire saw and a method of feeding and discharging a workpiece in the wire saw.

Background

Generally, in a wire saw for cutting a workpiece such as a semiconductor material or a magnetic material by a wire, a structure is adopted in which feeding of the workpiece is normally driven only in a vertical direction. Therefore, in a wire saw, when a workpiece is fed in or out from the outside of the wire saw, the workpiece is carried out by an additional device such as a workpiece transfer device as described in patent document 1, for example.

In the wire saw system described in patent document 1, when conveying a workpiece, an operator manually moves a workpiece conveying cart and a workpiece transfer device that are formed separately from the wire saw, thereby conveying the workpiece.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2010-149248.

Problems to be solved by the invention

However, in the wire saw system described in patent document 1, the wire saw cannot be operated when the workpiece is replaced by the workpiece transfer device. Therefore, when the workpiece is replaced by the workpiece transfer apparatus, the time for stopping and stopping the wire saw becomes a non-processing time, which causes a problem of lowering productivity.

Disclosure of Invention

The present invention addresses the above problems and provides a wire saw and a method of feeding and discharging a workpiece in a wire saw, which can improve productivity.

Means for solving the problems

In order to solve the above problem, a wire saw according to the present invention is a wire saw for cutting a workpiece by a wire, comprising: a temporary mounting table for supporting the workpiece; a transport device including a slider for supporting the workpiece, and configured to transport the workpiece into and out of a processing chamber; a processing device disposed in the processing chamber and configured to process the workpiece; a chucking device which is disposed in the processing chamber and chucks the workpiece; and a lifting device for lifting the chucking device, wherein the conveying device conveys the workpiece from the temporary placing table to the processing chamber.

Further, the present invention is a method for feeding and feeding a workpiece by using a wire saw, the method for feeding and feeding a workpiece by using a wire saw, comprising: a feeding step of feeding the machined workpiece to the unloading temporary mounting table through the slide block; a feeding step of feeding the unprocessed workpiece on the temporary mounting table to the processing chamber via the slider; a chucking step of chucking the unprocessed workpiece fed into the processing chamber by a chucking device; a retracting step of retracting the slide block into the processing chamber; a machining step of performing machining in a machining device by lifting the unprocessed workpiece using a lifting device; a removal mounting step of, when the unprocessed workpiece is processed, removing the processed workpiece mounted on the unloading temporary mounting table in the feeding step from the unloading temporary mounting table and mounting the unprocessed workpiece on the loading temporary mounting table.

Effects of the invention

The invention can provide a wire saw and a method for feeding and discharging a workpiece in the wire saw, which can improve productivity.

Drawings

Fig. 1 is a schematic side view showing a wire saw according to an embodiment of the present invention.

Fig. 2 is a schematic front view of a wire saw according to an embodiment of the present invention.

Fig. 3 is an enlarged schematic view of a main portion of fig. 2.

Fig. 4 is a schematic enlarged perspective view of a main portion showing an arrangement state of a work holder attached to a work and a slide for supporting the work holder.

Fig. 5 is an explanatory diagram showing a state in which an unprocessed workpiece is carried into the processing chamber.

Fig. 6 is an explanatory diagram showing a state when the slider is retracted to the retracted position.

Fig. 7 is an explanatory view showing a state where a machined workpiece is supported by the slide.

Fig. 8 is an explanatory diagram showing a state when the processed workpiece is sent out from the processing chamber.

Fig. 9 is an explanatory view showing a state in which an unprocessed workpiece is supported by the loading temporary mounting table and the workpiece processed by the processing apparatus is raised by the raising/lowering device.

Fig. 10 is an explanatory diagram showing a state where the transport device is moved to the loading side.

Fig. 11 is an explanatory diagram showing a state in which the conveying device is moved to the unloading side.

Fig. 12 is an explanatory diagram showing a state in which the conveying device is moved to the retracted position.

Fig. 13 is an explanatory diagram showing a state where the workpiece is lowered by the lifting device and processed.

Fig. 14 is an explanatory view showing a state in which a processed workpiece is removed from the unloading temporary mounting table and an unprocessed workpiece is mounted on the loading temporary mounting table during workpiece processing.

Fig. 15 is a process diagram showing a method of feeding a workpiece into and out of a wire saw according to an embodiment of the present invention.

Fig. 16 is a schematic side view showing a first modification of the wire saw according to the embodiment of the present invention.

Fig. 17 is a schematic side view showing a second modification of the wire saw according to the embodiment of the present invention.

Fig. 18 is a view showing a second modification of the wire saw according to the embodiment of the present invention, in which (a) is a main portion enlarged schematic side view showing a state where the slider is located at the loading position, and (b) is a main portion enlarged schematic side view showing a state where the slider is located at the unloading position.

Detailed Description

A wire saw and a method of feeding and discharging a workpiece by the wire saw according to the embodiment of the present invention will be described with reference to fig. 1 to 15.

The position of the temporary table 11 shown in fig. 1 is referred to as a loading position Lo (loading side), and the position of the temporary table 12 is referred to as an unloading position Un (unloading side). Note that the direction in which the temporary placement table 11 shown in fig. 1 is located is referred to as front (F), the direction in which the temporary placement table 12 is located is referred to as rear (B), the vertically upper side is referred to as upper (U), the vertically lower side is referred to as lower (D), the direction in which the motor M shown in fig. 2 is located is referred to as left (L), and the direction facing the left (L) side in which the motor M is located is referred to as right (R).

< workpiece >

As shown in fig. 1, the workpiece W is made of a hard and brittle material such as a semiconductor material, a magnetic material, or ceramics. The workpiece W is cut by pushing the workpiece W against the wire 53 arranged in the processing apparatus 5 of the wire saw 1.

< wire saw >

The wire saw 1 shown in fig. 1 is a cutting device for cutting a workpiece W by a wire 53 of a processing device 5. The wire saw 1 includes temporary tables 11 and 12, a chucking device 2, a lifting device 3, a conveying device 4, and a processing device 5.

< temporary mounting Table >

The temporary tables 11 and 12 are tables for supporting the workpiece W. The temporary tables 11 and 12 are disposed in front and rear of the outside of the processing chamber R of the wire saw 1. The temporary mounting table 11 (mounting temporary mounting table) on the loading position Lo side (front side) is used for mounting the workpiece W when the unprocessed workpiece W is sent from the loading position Lo side to the processing chamber R.

The temporary mounting table 12 (unloading temporary mounting table) on the unloading position Un side (rear side) is used for mounting the workpiece W after the machining is completed, which is sent out from the machining chamber R to the unloading position Un by the conveyor 4.

< clamping device >

The chucking device 2 is a holding mechanism for chucking an unprocessed workpiece W sent into the processing chamber R when the workpiece W is processed by the processing device 5. That is, the chucking device 2 indirectly chucks an unprocessed workpiece W fed into the processing chamber R from the loading position Lo via the workpiece retainer 23, then presses the workpiece W against the wire 53 of the processing device 5 to process the workpiece W, and holds the processed workpiece W until the workpiece W is placed on the conveyor 4 and then releases the workpiece W. The workpiece W released from the chucking device 2 is placed on the conveyor 4 and then sent out to the unloading position Un. As shown in fig. 2, the chucking device 2 has a plurality of (e.g., 4) chucking members 26 and a workpiece holding member 25 that holds the plurality of chucking members 26.

A metal workpiece holder 23 is detachably attached to the upper surface of the workpiece W via a glass plate 21 and a metal plate 22. The work holder 23 is provided on its upper surface with a plurality of fastened members 24.

The work holding member 25 is disposed above the wire 53 mounted between the

processing rollers

51 and 52, fastened to the lower end of the lifting device 3 by a bolt, and can be lifted by the lifting device 3. A plurality of chuck members 26 that can be engaged with and disengaged from the clamped member 24 are attached to the lower surface of the workpiece holding member 25.

< lifting device >

The lifting device 3 is a device that has a chucking device 2 for holding the workpiece W via a work holder 23 or the like at a lower end portion thereof and lifts and lowers the workpiece W. The lifting device 3 lifts the workpiece W from the slide 45, or pushes the workpiece W against the wire 53 of the machining device 5 to be machined, or lowers the machined workpiece W to be placed on the slide 45.

The lifting device 3 includes a moving mechanism (not shown) such as a ball screw for lifting the chucking device 2, a moving drive motor (not shown) such as a servo motor for operating the moving mechanism, and the like.

< conveying apparatus >

As shown in fig. 1, the transport device 4 is a transport device for transporting the workpiece W placed on the temporary mounting table 11 on the loading position Lo side into the processing chamber R or transporting the workpiece W processed by the processing device 5 from the processing chamber R to the unloading position Un. In other words, in the transport device 4 shown in fig. 1, the locking portion 23a of the workpiece retainer 23 to which the unprocessed workpiece W placed on the temporary mounting table 11 on the loading position Lo side is attached is supported by the support portion 45c of the slider 45, and the workpiece W is sent into the processing chamber R as shown in fig. 5. After being sent into the processing chamber R, as shown in fig. 6, the

support portions

45c and 45d of the slider 45 in the empty state are retracted to the retracted positions. As shown in fig. 7, the conveyor 4 moves the support portion 45d of the slider 45 in an empty state on the unloading position Un side to the processing chamber R. Then, as shown in fig. 8, the conveyor 4 delivers the support portion 45d supporting the processed workpiece W from the processing chamber R to the unloading position Un.

The conveying device 4 includes

slider coupling portions

41 and 42, a motor M, a drive gear 43, a switching gear 44, a slider 45, a guide 46, a bracket 47, and the temporary tables 11 and 12.

As shown in fig. 4, the

slider coupling portions

41 and 42 are members for coupling the front end portions and the rear end portions of the left and right sliders 45, respectively. The

slider coupling portions

41 and 42 are formed of plate-like members having a substantially inverted hat shape (substantially concave shape) in front view, and the plate-like members are bridged over the front end portion and the rear end portion of the slider 45 disposed on the left and right sides of the wire saw 1. Therefore, the

slider coupling portions

41 and 42 are integrally reciprocated between the loading position Lo and the processing chamber R and between the unloading position Un and the processing chamber R by the movement of the slider 45 in the front-rear direction.

As shown in fig. 1 to 3, the motor M is a power source for rotationally driving the drive gear 43. The motor M is disposed, for example, on the left side outside the process chamber housing 6.

The drive gear 43 is a gear for transmitting the rotation of the motor M to the switching gear 44. As shown in fig. 1 and 2, the drive gears 43 are disposed in the center portions of the wire saw 1 in the front-rear direction.

As shown in fig. 5, the conversion gear 44 is a gear that converts the rotation of the drive gear 43 into linear motion. The switching gear 44 is formed of a rack having a tooth-shaped portion formed by cutting teeth of a flat plate-like rod-shaped member extending in the front-rear direction. That is, the switching gear 44 as a rack is configured such that when a rotational force is applied to the driving gear 43 as a gear, the switching gear 44 moves in the horizontal direction.

The sliders 45 are a pair of left and right moving bodies that horizontally advance and retreat (reciprocate) in the front-rear direction via the switching gear 44 (see fig. 4). The slider 45 is provided above the switching gear 44, and is formed of a rail-like member extending in the front-rear direction in parallel along the switching gear 44. A support portion 45c is formed at the front end of the slider 45, and a support portion 45d is formed at the rear end of the slider 45. As shown in fig. 3, the slider 45 has a guide groove 45a, a stopper 45b, and

support portions

45c, 45 d.

As shown in fig. 4, guide grooves 45a having a recessed shape in a longitudinal section, which slidably engage with the plurality of guides 46, extend continuously from the front end to the rear end on the left and right outer sides of the left and right sliders 45. Stoppers 45b are formed on the upper left and right ends of the left and right sliders 45, respectively, and the stoppers 45b are used to position the left and right ends of the workpiece holder 23 by regulating the positions thereof when the workpiece W is engaged with the

slider coupling portions

41 and 42 having a substantially concave shape in front view.

Support portions

45c and 45d for supporting (placing) the locking portions 23a formed at the left and right end portions of the workpiece holder 23 are provided to protrude from the front and rear end portions of the left and right inner sides of the left and right sliders 45. Therefore, by supporting the engaging portion 23a on the supporting

portions

45c and 45d, the workpiece W fixed to the workpiece holder 23 can be placed on the slider 45.

As shown in fig. 1 and 5, the front support portion 45c supports the locking portion 23a of the work retainer 23 attached to the workpiece W when the unprocessed workpiece W is sent from the loading position Lo to the processing chamber R.

As shown in fig. 7 and 8, the rear support portion 45d supports the locking portion 23a of the work retainer 23 attached to the workpiece W when the workpiece W after the machining is delivered from the machining chamber R to the unloading position Un. The

support portions

45c, 45d are formed at the front and rear end portions of the left and right sliders 45.

As shown by the two-dot chain line in fig. 4, between the left and right sliders 45, between the front supporting portion 45c and the rear supporting portion 45d, the engaging portion 23a is separated from the slider 45, and therefore the workpiece W is arranged so as to be vertically movable. Therefore, by disposing the engagement portion 23a between the

support portions

45c, 45d at the front and rear end portions of the slider 45, the workpiece W can be lowered to the processing position where the wire 53 of the processing device 5 is located by the elevating device 3.

As shown in fig. 5, the guide 46 is a member that supports the slider 45 so as to be movable forward and backward in the front-rear direction. The guide 46 is formed of a substantially cylindrical rotating body in which a plurality of rollers are arranged at appropriate intervals in the front-rear direction above the bracket 47. The guide 46 is rotatably mounted on the upper right side of the bracket 47 by a bolt (see fig. 3).

The bracket 47 is a flat plate member that rotatably supports the drive gear 43 and extends in the front-rear direction. The bracket 47 is attached to the

slider coupling portions

41, 42 via the guide 46 and the slider 45.

< processing apparatus >

As shown in fig. 1, the machining device 5 is a cutting mechanism that machines an unprocessed workpiece W clamped by the clamping device 2. The processing device 5 includes a pair of

processing rollers

51 and 52 arranged horizontally to face each other at an appropriate interval, a wire 53 wound around the

processing rollers

51 and 52, and a drive motor (not shown) for rotationally driving the

processing rollers

51 and 52. The processing device 5 is provided with a column 14 on the base 13.

Above the machining device 5, a chucking device 2 for supporting the workpiece W is arranged on a column 14 so as to be movable up and down by an elevating device 3. Then, when the wire saw 1 is operated, the wire 53 moves between the processing

rollers

51 and 52, and the workpiece W held by the chucking device 2 is lowered toward the processing device 5 by the elevating device 3, is pushed against the wire 53, and is cut.

The

processing rollers

51 and 52 are configured to move the wire 53 between the processing

rollers

51 and 52 by being rotated by a drive motor (not shown). At least one pair of the

processing rollers

51 and 52 may be provided, and if the processing rollers are arranged in parallel with each other at a distance, the number of the processing rollers may be 3 or more.

The wire 53 is a processing wire made of, for example, 1 wire rod. The wire 53 is driven by the

processing rollers

51 and 52 so as to advance in steps as a whole or continuously in one direction by repeating a certain amount of advance and a certain amount of retreat.

< processing chamber housing >

As shown in fig. 1 and 2, the processing chamber housing 6 is a housing member that covers a processing area of the processing apparatus 5 to form a processing chamber R. The processing chamber housing 6 is formed of a box-shaped member provided to prevent the coolant supplied to the processing region of the workpiece W from scattering. The processing chamber housing 6 has a door (not shown) that opens and closes when the processing chamber R performs an operation of attaching and detaching the workpiece W.

[ Effect ]

Next, the operation of the wire saw 1 and the method for feeding and discharging the workpiece W into and from the wire saw 1 according to the embodiment of the present invention will be described in the order of the operation steps with reference to fig. 1 to 15 mainly in fig. 15.

As shown in fig. 9, the workpiece W after the completion of the processing is raised to the workpiece chucking and releasing position by the lifting and lowering device 3, the processing chamber housing 6 (see fig. 1) is opened, and as shown in fig. 10, the slide 45 of the transport device 4 is moved to the loading position Lo side, and the workpiece holder 23 attached to the workpiece W after the processing is supported by the support portion 45d of the slide 45. At this time, the workpiece holder 23 of the unprocessed workpiece W placed on the temporary mounting table 11 is supported by the support portion 45c of the slider 45. Next, the machined workpiece W clamped by the clamping device 2 is released, the clamping device 2 is raised to the retracted position, and as shown in fig. 11, the machined workpiece W is sent out to the unloading position Un by the conveyor 4, and the machined workpiece W is placed on the temporary placing table 12 at the unloading position Un from the support portion 45d of the slider 45 of the conveyor 4 (sending-out step S1), and at this time, the locking portion 23a of the workpiece retainer 23 attached to the unmachined workpiece W placed on the temporary placing table 11 at the loading position Lo is supported by the support portion 45c of the slider 45, and is sent into the machining chamber R by the conveyor 4 (sending-in step S2).

Next, the lifting/lowering device 3 is lowered to the workpiece chucking release position, and the clamping device 2 chucks the workpiece retainer 23 fixed to the unprocessed workpiece W fed into the processing chamber R (clamping step S3).

Next, as shown in fig. 12, in a state where no object is placed on the slider 45 of the transport device 4, the workpiece W is retracted so as to be positioned at the central portion in the front-rear direction of the slider 45 (retraction step S4). Next, the processing chamber housing 6 is closed (see fig. 1), and as shown in fig. 13, the workpiece holder 23 attached to the unprocessed workpiece W chucked by the chucking device 2 is raised and lowered by the raising and lowering device 3 and is pushed against the wire 53 of the processing device 5, thereby cutting the workpiece W (processing step S5).

Then, as shown in fig. 14, when the unprocessed workpiece W is processed, the processed workpiece W that is delivered to the unloading position Un by the delivery step S1 and supported on the temporary mounting table 12 is carried out of the wire saw 1. At this time, the unprocessed workpiece W is placed on the temporary mounting table 11 (the removal mounting step S6).

Thus, the machined workpiece W can be simultaneously fed out from the machining chamber R and the unprocessed workpiece W can be simultaneously fed into the machining chamber R, and therefore, the cutting process can be performed by the wire saw 1 while efficiently conveying the workpiece W.

The above feeding step S1 to the unloading step S6 are repeated, and the workpiece W is processed and produced in sequence.

As shown in fig. 1, the wire saw 1 for cutting a workpiece W with a wire 53 according to the present invention includes: temporary tables 11 and 12 for supporting a workpiece W; a transfer device 4 including a slider 45 for supporting the workpiece W and for transferring the workpiece W into and out of the processing chamber R; a processing device 5 disposed in the processing chamber R for processing the workpiece W; a chucking device 2 which chucks and conveys the workpiece W into the processing chamber R to chuck the workpiece W; and a lifting device 3 for lifting the chucking device 2, and a conveying device 4 for conveying the workpiece W from the temporary tables 11 and 12 to the processing chamber R.

Thus, by providing the wire saw 1 with the conveyor 4 for feeding the unprocessed workpiece W into the processing chamber R and feeding the processed workpiece W out of the processing chamber R, the time for stopping and stopping the wire saw 1 can be reduced, and the operating rate of the wire saw 1 can be improved. Therefore, the production time for producing the workpiece W can be shortened to improve productivity. Further, since the conveying device 4 does not require an additional device such as a work lifter which has been conventionally used, the structure of the wire saw 1 can be simplified to reduce the cost.

Further, the conveyor 4 includes: a motor M; a drive gear 43 rotated by a motor M; a conversion gear 44 that converts rotation of the drive gear 43 into linear motion; a slider 45 which advances and retreats through the switching gear 44; a guide 46 for supporting the slider 45 to advance and retreat; and

support portions

45c and 45d provided on the slider 45.

The conveying device 4 has the supporting

portions

45c and 45d that support the workpiece W and move in conjunction with the slider 45, so that the workpiece W can be replaced automatically and easily. As a result, the work efficiency in producing the work W can be improved to save labor.

As shown in fig. 1, 2, and 4, the workpiece W includes a workpiece holder 23 for holding the workpiece W, the sliders 45 are formed of a pair of members arranged in parallel with each other, and include support portions 45c for supporting the locking portions 23a provided to protrude on both sides of the side surfaces of the workpiece holder 23, and in the workpiece holder 23, the locking portions 23a are supported by the support portions 45c of the pair of sliders 45 when the workpiece W is conveyed, and the locking portions 23a are separated from the support portions 45c of the pair of sliders 45 and lowered between the pair of sliders 45 by the lifting device 3 when the workpiece W is machined.

Thus, when the workpiece W is conveyed, the workpiece retainer 23 is locked to the pair of sliders 45 by the locking portion 23a, and therefore the workpiece W can be conveyed by moving the sliders 45. Further, when the workpiece W is machined, the workpiece holder 23 can push and cut the workpiece W against the wire 53 of the machining device 5 disposed below by separating the engagement portion 23a from the support portion 45c of the pair of sliders 45 and lowering the workpiece between the pair of sliders 45 by the lifting device 3.

As shown in fig. 1, the tables 11 and 12 include a loading table 11 disposed on the loading side and an unloading table 12 disposed on the unloading side, the slider 45 includes a loading support 45c disposed on the loading side and an unloading support 45d disposed on the unloading side, and the transport device 4 transports the loading support 45c from the loading table 11 to the processing chamber R and transports the unloading support 45d from the processing chamber R to the unloading table 12.

Thus, the transport device 4 can transport the unprocessed workpiece W and the processed workpiece W in the same direction by supporting the unprocessed workpiece W placed on the loading temporary mounting table 11 by the loading support portion 45c and sending the unprocessed workpiece W into the processing chamber R, and sending the unloading support portion 45d supporting the processed workpiece W to the unloading temporary mounting table 12. Therefore, the problem of movement of both the unprocessed workpiece W and the processed workpiece W in the opposite directions can be solved, and the unprocessed workpiece W and the processed workpiece W can be simultaneously conveyed. As a result, since the workpiece W can be efficiently conveyed by shortening the conveyance time of the workpiece W, the productivity of the workpiece W can be improved.

Further, as shown in fig. 1 or fig. 15, the present invention is a method for feeding and feeding out a workpiece W by using a wire saw 1, the method for feeding in and feeding out a workpiece W by using a wire saw 1, including: a feeding step S1 of feeding the machined workpiece W to the unloading temporary mounting table 12 via the slide 45; a feeding step S2 of feeding the unprocessed workpiece W on the loading temporary table 11 into the processing chamber R via the slider 45; a chucking step S3 of chucking the unprocessed workpiece W fed into the processing chamber R by the chucking device 2; a retracting step S4 of retracting the slider 45 into the processing chamber R; a processing step S5 of moving the unprocessed workpiece W up and down by the lifting device 3 to perform processing in the processing device 5; in the removal mounting step S6, when the unprocessed workpiece W is to be machined, the machined workpiece W mounted on the unloading temporary mounting table 12 in the feeding step S1 is removed from the unloading temporary mounting table 12, and the unprocessed workpiece W is mounted on the loading temporary mounting table 11.

In this way, in the method for feeding and discharging the workpiece W in the wire saw 1, the unprocessed workpiece W can be easily fed into the processing chamber R by the slider 45 of the conveyor 4, and the processed workpiece W can be easily discharged from the processing chamber R, so that the downtime of the wire saw 1 for feeding and discharging the workpiece W can be reduced, and the productivity of the workpiece W can be improved.

[ first modification ]

The present invention is not limited to the above-described embodiments, and various modifications and changes can be made within the scope of the technical idea, and it goes without saying that the present invention also relates to the inventions after such modifications and changes.

Next, a first modification of the wire saw according to the embodiment of the present invention will be described with reference to fig. 16. The same reference numerals are attached to the already-described components, and the description thereof is omitted.

For example, the conveyor 4 of the wire saw 1 according to the present invention is not limited to the one shown in fig. 1, and is a conveyor that uses one motor M and one slider 45 to feed the workpiece W at the loading position Lo into the processing chamber R or to feed the processed workpiece W to the unloading position Un.

As shown in fig. 16, the conveyor 4A of the wire saw 1A may be a conveyor as follows: the apparatus includes two motors M1, M2, drive gears 43A1, 43A2 rotated by the two motors M1, M2, conversion gears 44A1, 44A2 converting the rotation of the drive gears 43A1, 43A2 into linear motion, sliders 45A1, 45A2 advanced and retracted by the conversion gears 44A1, 44A2, guides 46A1, 46A2 supporting the sliders 45A1, 45A2, respectively, and temporary tables 11, 53912 coupled to the sliders 45A1, 45A2, respectively.

That is, the transport device 4A may be configured by two devices, i.e., the loading device 4A1 and the unloading device 4A 2.

In the wire saw 1A of the first modification configured as described above, the conveyance device 4A including the feeding-in-dedicated feeding device 4A1 and the feeding-out-dedicated feeding device 4A2 is integrally provided with the wire saw 1A, whereby the feeding-in of the unprocessed workpiece W and the feeding-out of the processed workpiece W can be efficiently performed.

[ second modification ]

Fig. 18 is a schematic side view showing a main part of a second modification of the wire saw according to the embodiment of the present invention, in which (a) is an enlarged schematic side view showing a state where the slider is at the loading position, and (b) is an enlarged schematic side view showing a main part of a state where the slider is at the unloading position.

In the above-described embodiment and the first modification, the case where the unprocessed workpiece W is fed from the loading position Lo side to the processing chamber R and the processed workpiece W is fed from the processing chamber R to the unloading position Un side by using the transport devices 4 and 4A has been described, but the unprocessed workpiece W may be fed from the same position direction and fed in the direction of the feeding as in the transport device 4B shown in fig. 17 and (a) and (B) of fig. 18.

That is, the wire saw 1B may be reciprocated so as to feed the temporary mounting table 11B from the loading position Lo side to the processing chamber R by the conveyor 4B and return the processed workpiece W to the unloading position Un at the same position as the loading position Lo using the same temporary mounting table 11B.

Description of the reference numerals

1. 1A, 1B: wire sawing;

2: a clamping device;

3: a lifting device;

4. 4A, 4B: a conveyance device;

5: a processing device;

11. 11B: a temporary mounting table (mounting temporary mounting table);

12: a temporary mounting table (a temporary mounting table for unloading);

23: a workpiece holder;

23 a: a card-holding section;

41. 41A, 42A: a slider connecting portion;

43. 43A1, 43A 2: a drive gear;

44. 44A1, 44A 2: a switching gear;

45. 45A1, 45A 2: a slider;

45 c: a support portion (a support portion for mounting);

45 d: a support portion (unloading support portion);

46. 46A1, 46A 2: a guide member;

53: a metal wire;

lo: a loading position (loading position);

un: an unloading position (unloading);

m, M1, M2: a motor;

r: a processing chamber;

s1: a feeding-out step;

s2: feeding into a working procedure;

s3: a clamping procedure;

s4: a rollback procedure;

s5: a processing procedure;

s6: a loading and unloading process;

w: and (5) a workpiece.

Claims

1. A wire saw for cutting a workpiece by a wire, comprising:

a temporary mounting table for supporting the workpiece;

a transport device including a slider for supporting the workpiece, and configured to transport the workpiece into and out of a processing chamber;

a processing device disposed in the processing chamber and configured to process the workpiece;

a chucking device which is disposed in the processing chamber and chucks the workpiece; and

a lifting device which lifts the chucking device,

the transfer device transfers the workpiece from the temporary mounting table to the processing chamber.

2. The jigsaw of claim 1,

the conveying device is provided with:

a motor;

a drive gear rotated by the motor;

a conversion gear converting rotation of the drive gear into linear motion;

a slider which advances and retreats through the switching gear;

a guide member for supporting the slider to be movable forward and backward; and

and a support portion provided to the slider.

3. The jigsaw of claim 2,

the workpiece has a workpiece holder that holds the workpiece,

the slide block is composed of a pair of members arranged in parallel with each other, and has the support portion for supporting the locking portions respectively provided on both sides of the side surface of the work holder in a protruding manner,

in the work holder, the engaging portion is supported by the support portions of the pair of sliders when the work is conveyed, and the engaging portion is separated from the support portions of the pair of sliders and lowered between the pair of sliders by the lifting device when the work is machined.

4. Wire saw according to any one of claims 1 to 3,

the provisional table has a loading provisional table disposed on a loading side and an unloading provisional table disposed on an unloading side,

the slider has a loading support part arranged on a loading side and an unloading support part arranged on an unloading side,

the transport device carries the loading support portion from the loading temporary mounting table into the processing chamber and carries the unloading support portion from the processing chamber to the unloading temporary mounting table.

5. A method of feeding a workpiece into and out of a wire saw using the wire saw, comprising:

a feeding step of feeding the machined workpiece to the unloading temporary mounting table through the slide block;

a feeding step of feeding the unprocessed workpiece on the temporary mounting table to the processing chamber via the slider;

a chucking step of chucking the unprocessed workpiece fed into the processing chamber by a chucking device;

a retracting step of retracting the slide block into the processing chamber;

a machining step of machining the workpiece by lifting the unprocessed workpiece by a lifting device; and

a removal mounting step of, when the unprocessed workpiece is processed, removing the processed workpiece mounted on the unloading temporary mounting table in the feeding step from the unloading temporary mounting table and mounting the unprocessed workpiece on a loading temporary mounting table.