CN112532969A - Adjustable focal plane assembly position calibration method for collimator - Google Patents
Adjustable focal plane assembly position calibration method for collimator Download PDFInfo
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- CN112532969A CN112532969A CN202011156316.1A CN202011156316A CN112532969A CN 112532969 A CN112532969 A CN 112532969A CN 202011156316 A CN202011156316 A CN 202011156316A CN 112532969 A CN112532969 A CN 112532969A
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N17/00—Diagnosis, testing or measuring for television systems or their details
- H04N17/002—Diagnosis, testing or measuring for television systems or their details for television cameras
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B43/00—Testing correct operation of photographic apparatus or parts thereof
Abstract
In order to solve the technical problem that the measurement precision of an optical system of a camera is adversely affected due to the position deviation of an adjustable focal plane assembly, the invention provides a method for calibrating the position of the adjustable focal plane assembly for a collimator, and the method comprises the following steps of firstly calibrating and determining the focal plane position of the collimator; then, a high-precision cubic mirror, a precision pinhole and a laser are used for constructing an auto-collimation light path, and the moving direction of a translation stage in the adjustable focal plane assembly is led to the normal direction of one surface of the high-precision cubic mirror; thirdly, under the central view field posture of the collimator, the moving direction of the translation stage is adjusted to be parallel to the optical axis of the collimator through a high-precision cube mirror; and finally, adjusting the posture of the target plate to enable the plane where the target plate is located to be parallel to the focal plane of the collimator by observing the defocusing aberration of interference fringes formed by the plurality of field convergence points of the collimator passing through the self-alignment of the target plate, and enabling the center of the target plate to coincide with the field light spot convergence point of the center of the collimator, thereby finishing the position calibration work.
Description
Technical Field
The invention belongs to the technical field of optical precision measurement, and relates to a position calibration method for an adjustable focal plane assembly, which is suitable for calibrating the position relation of parts such as a translation table, a target plate and the like in the adjustable focal plane assembly relative to the optical axis and the focal plane of a collimator, and is particularly suitable for calibrating the position of the focal plane assembly of the collimator for simulating targets with different distances in the work such as photoelectric butt joint of a camera, focal plane presetting and the like.
Background
The collimator is used as key equipment for assembling an optical system and detecting the optical performance of the whole machine, can emit parallel light to simulate an infinite target, and can detect indexes such as a diffuse spot, a focal length, an identification rate, an MTF (modulation transfer function), distortion and the like of an optical lens and a camera by placing targets such as a star point plate, a glass plate, an identification rate plate, a fringe plate and the like on the focal plane of the collimator.
Generally, when the collimator is applied to optical performance detection of an optical lens and a camera, a target plate of the collimator is fixed at a focal plane position of the collimator, and performance of the optical lens and the camera when imaging an infinite target is detected at the time. When the collimator is applied to the photoelectric butt joint, focal plane presetting and other works of a camera, the target plate needs to be moved back and forth along the optical axis direction of the collimator, the over-focus test is carried out on the optical performance of the camera such as the diameter of a defocused spot, MTF and the like, the optical performance indexes of the collimator under different defocusing amounts are obtained, an over-focus curve is drawn, the distance between the light sensing surface of the detector of the camera and the focal plane of the optical lens of the camera is obtained, and when the distance value meets the expected tolerance requirement, the photoelectric butt joint, focal plane presetting and other works of the. The back and forth movement of the target plate needs to be realized by adopting an adjustable focal plane assembly, and the adjustable focal plane assembly comprises a translation table which can move back and forth along the optical axis direction of the collimator and a target plate fixing device which is fixed on the table surface of the translation table. The adjustable focal plane assembly needs to meet the following basic requirements:
a) the front-back movement direction of the translation table is parallel to the optical axis direction of the collimator;
b) the plane of the target plate is parallel to the focal plane of the collimator;
c) the central field of view of the collimator coincides with the center of the target plate.
Therefore, the position of the adjustable focal plane assembly needs to be strictly calibrated, otherwise, in the using process of the adjustable focal plane assembly, the defocusing amount of the target plate, the projection difference of the target plate and the deviation of the focal plane position of the collimator from the ideal focal plane position are caused, so that the aberration of the collimator is introduced during the detection of the optical performance of the camera, the test error of the optical performance of the camera is caused, and the working precision of photoelectric butt joint, focal plane presetting and the like is reduced. Therefore, the method has important significance in precisely calibrating the position of the adjustable focal plane assembly.
Disclosure of Invention
The invention provides a method for calibrating the position of an adjustable focal plane assembly for a collimator, which aims to solve the technical problem that the measurement precision of an optical system of a camera is adversely affected due to the position deviation of the adjustable focal plane assembly.
The invention has the following inventive concept:
firstly, according to the size of the focal plane of the collimator and the distribution characteristics of aberration, calibrating the wave aberration of the upper, lower, left, right and central view fields of the collimator through a laser interferometer, a plane mirror, a small-caliber plane mirror fixed on the back of the plane mirror and a high-precision angle measuring device, and determining the focal plane position of the collimator by combining the symmetry of the aberration of the collimator and the characteristics of good aberration correction at the focal plane;
then, a high-precision cubic mirror, a precision pinhole and a laser are used for constructing an auto-collimation light path, and the moving direction of a translation stage in the adjustable focal plane assembly is led to the normal direction of one surface of the high-precision cubic mirror;
thirdly, under the central view field posture of the collimator, the moving direction of the translation stage is adjusted to be parallel to the optical axis of the collimator through a high-precision cube mirror;
and finally, adjusting the posture of the target plate to enable the plane where the target plate is located to be parallel to the focal plane of the collimator by observing the defocusing aberration of interference fringes formed by the plurality of field convergence points of the collimator passing through the self-alignment of the target plate, and enabling the center of the target plate to coincide with the field light spot convergence point of the center of the collimator, thereby completing the position calibration work of the adjustable collimator focal plane component.
Based on the inventive concept, the technical solution of the invention is as follows:
the position calibration method of the adjustable focal plane assembly for the collimator comprises the steps that the adjustable focal plane assembly comprises a translation table and a target plate fixing device arranged on the translation table; the method is characterized by comprising the following steps:
and 6, after the positions of the translation stages are consistent when the measured out-of-focus image differences under each view field of the collimator are the minimum, adjusting the position of the target plate fixing device on the translation stage to the position when the center of the target plate arranged on the target plate fixing device is superposed with the light spot convergence point of the standard lens under the central view field of the collimator, and finishing the position calibration work of the adjustable focal plane assembly.
Further, the step 1 specifically comprises:
1.1) building a collimator full-view wave aberration calibration unit, wherein the collimator full-view wave aberration calibration unit comprises a laser interferometer, a standard lens, a plane reflector, a small-caliber plane reflector and a high-precision angle measuring device which are sequentially arranged along the light path direction; the plane mirror can rotate in the azimuth direction and the pitching direction; the small-caliber plane reflector is fixed on the back of the plane reflector, and the reflecting surface of the small-caliber plane reflector faces to the high-precision angle measuring device;
1.2) detecting wave aberration of different fields of view of the collimator by using rotation of the plane mirror and translation of the laser interferometer, so as to determine the focal plane position of the collimator;
1.3) recording the rotation angle of the plane mirror corresponding to the focal plane position.
Further, the step 2 specifically includes:
fixedly mounting a high-precision cube mirror on a mounting table surface of a translation table, irradiating the high-precision cube mirror after collimated monochromatic light emitted by a laser passes through a precision pinhole, and forming a light spot on the precision pinhole after the collimated monochromatic light is reflected by the high-precision cube mirror; and moving the translation stage forwards and backwards, monitoring the position of the light spot on the precision pinhole, and adjusting the position and/or the posture of the high-precision cubic mirror until the light spot cannot be seen in the area outside the precision pinhole, wherein the moving direction of the translation stage is transferred to the direction of one plane normal of the high-precision cubic mirror.
Further, the step 3 specifically includes:
3.1) calibrating the central view field of the collimator through a laser interferometer, a standard lens and a plane mirror, and then removing the standard lens from the current light path;
and 3.2) inserting the translation stage with the high-precision cubic mirror adjusted in the step 2 into the current light path, wherein the high-precision cubic mirror and the laser interferometer form an auto-collimation light path, and adjusting the position of the translation stage until the defocusing aberration of interference fringes formed after the parallel light emitted by the laser interferometer is auto-collimated by the high-precision cubic mirror is minimum, and at the moment, the moving direction of the translation stage is parallel to the optical axis direction of the collimator.
Further, the step 4 specifically includes:
4.1) disassembling the high-precision cube mirror on the translation table and the fixing tool thereof from the translation table, installing the standard lens in front of the laser interferometer, installing a target plate fixing device on the table top of the translation table, detecting the wave aberration of the central field of view of the collimator, adjusting the defocusing aberration item to be minimum, inserting the target plate into the light path by fixing the target plate on the target plate fixing device, moving the translation table back and forth, adjusting the defocusing aberration item of the interference fringe formed by the self-collimation image reflected by the target plate through the laser interferometer to be minimum, and recording the position of the translation table at the moment;
4.2) calibrating and recording the position of the translation stage when the auto-collimation image reflected by the target plate forms the out-of-focus image difference of interference fringes through the laser interferometer according to the method of the 4.1) central view field in other multiple view fields respectively.
Further, the step 5 specifically includes:
and fitting an equation of the plane where the target plate is located, combining the equation of the focal plane of the collimator to obtain an inclination angle of the plane where the target plate is located relative to the focal plane of the collimator, and adjusting the posture of the target plate fixing device according to the inclination angle to enable the plane where the target plate is located to be parallel to the focal plane of the collimator.
Further, the tilt angle in step 5 is determined according to the following method:
step A: calibrating the position of the translation stage when the defocusing aberration corresponding to a plurality of view field positions of the collimator is minimum, and calculating the corresponding linear quantity at the corresponding view field angle of the collimator according to the following formula:
xi＝f tanθxi,yi＝f tanθyi (1)
in the formula: i is the serial number of the field angle of the collimator; x is the number ofi,yiThe image plane coordinates corresponding to the collimator at the ith field angle; f is the focal length of the collimator; thetaxi,θyiThe angle of view of the collimator is measured by the small-caliber plane reflector and the high-precision angle measuring device;
and B: position z of the translation stage when defocus aberrations are minimized for different fields of view using collimatoriAnd obtaining a plane equation of the target plate by adopting least square fitting, wherein the formula is as follows:
in the formula: min represents a minimization operation; a, B, C and D are coefficients of a fitting plane equation;
and C: the plane equation of the target plate is obtained by the formula (2), which is shown as follows:
Ax+By+Cz＝D (3)
step D: the equation for the ideal focal plane of the collimator is:
A0x+B0y+C0z＝D0 (4)
step E: according to the formula (3) and the formula (4), calculating to obtain the inclination angle of the target plate relative to the ideal focal plane of the collimator
Comprises the following steps:
the invention has the advantages that:
1. the steps of the method are basically independent, the coupling performance of the adjustable collimator focal plane assembly during position calibration is reduced, and the calibration efficiency is improved.
2. The invention can detect the view field position of the collimator in real time by fixing the small-caliber plane reflector and the high-precision angle measuring device behind the plane reflector for testing the wave aberration of the collimator, thereby ensuring that the fixed view field position of the collimator can be tested repeatedly when the focal plane component is calibrated, and being beneficial to the repeated implementation of the calibration timing adjustment link.
3. According to the invention, the high-precision cubic mirror is arranged on the translation stage in the adjustable collimator focal plane assembly, and the moving direction of the translation stage can be quickly led to the normal direction of one surface of the high-precision cubic mirror by combining the high-precision angle measuring device.
4. The invention adjusts the moving direction of the translation stage and the optical axis direction of the collimator to be parallel at one time through the self-alignment of the parallel light beam emitted by the interferometer when the high-precision cube mirror and the collimator center view field are used, thereby improving the integral calibration efficiency.
5. The invention can ensure that the relative position relation among the collimator optical axis, the image plane, the collimator target plate and the translation stage meets the design requirement, and ensures the working precision of photoelectric butt joint, image plane presetting and the like of the camera.
Drawings
FIG. 1 is a schematic diagram of a collimator full-field wave aberration calibration unit.
FIG. 2 is a schematic diagram of the calibration principle of the moving direction of the translation stage in the adjustable collimator focal plane assembly.
FIG. 3 is a schematic view of the switching device between the moving direction of the translation stage and the optical axis direction of the collimator.
FIG. 4 is a schematic diagram illustrating the switching between the moving direction of the translation stage and the optical axis direction of the collimator.
FIG. 5 is a schematic diagram of the principle of butt joint of the collimator focal plane target plate and the focal plane thereof.
FIG. 6 is a schematic view showing the distribution of the field-of-view points of the wavefront aberration detection when the collimator target plate is butted with the focal plane thereof.
Description of reference numerals:
1-a laser interferometer; 2-standard lens; 3-a collimator; 4-a plane mirror; 5-small-caliber plane reflector; 6-high precision angle measuring device; 7-high precision cube mirror; 8-a translation stage; 9-a laser; 10-precision pinhole; 11-target plate.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
The invention provides a method for calibrating the position of an adjustable focal plane assembly for a collimator, which comprises the following steps:
step 1: and determining the focal plane position of the collimator 3 by calibrating the wave aberration of different fields of view of the collimator 3.
The method comprises the following steps of constructing a collimator full-field wave aberration calibration unit shown in figure 1, wherein the calibration unit comprises a laser interferometer 1, a standard lens 2, a plane reflector 4, a small-caliber plane reflector 5 and a high-precision angle measuring device 6; the aperture of the small-aperture plane reflector 5 is convenient to fix on the plane reflector 4, and is generally about 25 mm; the high-precision angle measuring device 6 is an angle measuring device with angle measuring precision better than 1'.
The laser interferometer 1 is positioned behind the focal plane of the collimator 3, parallel light beams are emitted from the laser interferometer 1 and are converged by the standard lens 2 to form standard spherical waves, the standard spherical waves are collimated into parallel light by the collimator 3, and the parallel light is reflected by the plane reflector 4 to form an auto-collimation light path for detecting wave aberration of different fields of view of the collimator 3. The plane mirror 4 can rotate in the azimuth and pitch directions, and can detect the wave aberration of different fields of view of the collimator 3 by matching with the translation of the laser interferometer 1, thereby determining the focal plane position of the collimator 3.
The small-caliber plane mirror 5 is fixed on the back surface of the plane mirror 4, the reflecting surface of the small-caliber plane mirror faces to the high-precision angle measuring device 6, the rotation of the plane mirror 4 drives the small-caliber plane mirror 5 to rotate, the rotating angle value of the small-caliber plane mirror directly reflects the view field of the collimator 3, and therefore the view field angle of the collimator 3 can be detected in real time through the combination of the small-caliber plane mirror 5 and the plane mirror 4. The high-precision angle measuring device 6 is positioned behind the plane reflector 4, and parallel light beams emitted by the high-precision angle measuring device 6 are reflected by the small-caliber plane reflector 5 to form an auto-collimation light path for measuring the rotation angle of the plane reflector 4, so that the view field position of the collimator 3 during wave aberration detection is given.
After the focal plane position of the collimator 3 is determined by using the collimator full-field wave aberration calibration unit built in fig. 1, the rotation angle of the plane reflector 4 corresponding to the focal plane position of the collimator 3 is recorded at the same time, and the purpose of recording the rotation angle is to determine the central field position of the collimator 3, so that repeated calibration is facilitated.
Step 2: and leading out the moving direction of the translation stage 8 in the adjustable focal plane assembly.
A translation stage moving direction calibration unit shown in figure 2 is built and comprises a high-precision cube mirror 7, a laser 9 and a precision pinhole 10, the aperture of the precision pinhole 10 is smaller than 50 micrometers, the roundness is better than 1 micrometer, and the high-precision cube mirror 7 is a cube mirror with the included angle precision between all surfaces reaching the second level.
The high-precision cubic mirror 7 is fixedly arranged on the mounting table surface of the translation table 8, the laser 9 emits collimated monochromatic light, the collimated monochromatic light irradiates the high-precision cubic mirror 7 after passing through the precision pinhole 10, and a light spot is formed on the precision pinhole 10 after being reflected by the high-precision cubic mirror 7. And moving the translation stage 8 back and forth, monitoring the position of the light spot on the precision pinhole 10, and adjusting the position and/or the posture of the high-precision cubic mirror 7 until the light spot cannot be seen in the area outside the precision pinhole 10, wherein the moving direction of the translation stage 8 is transferred to one plane normal direction of the high-precision cubic mirror 7, namely the moving direction of the translation stage is parallel to one plane normal direction of the high-precision cubic mirror 7.
And step 3: the moving direction of the translation stage 8 in the adjustable focal plane assembly is adjusted to be parallel to the optical axis direction of the collimator 3.
Firstly, building a light path shown in FIG. 3, calibrating a central view field of a collimator 3 through a laser interferometer 1, a standard lens 2 and a plane reflector 4, and then removing the standard lens 2 from the light path; then, the translation stage 8 which is adjusted in step 2 and fixedly provided with the high-precision cube mirror 7 is inserted into the optical path, the high-precision cube mirror 7 and the laser interferometer 1 form a self-collimating optical path, and the position of the translation stage 8 is adjusted until the defocusing aberration of interference fringes formed after the collimated light emitted from the laser interferometer 1 is self-collimated by the high-precision cube mirror 7 is minimum (namely, straight interference fringes are formed), as shown in fig. 4, at this time, the moving direction of the translation stage 8 is parallel to the optical axis direction of the collimator 3.
And 4, step 4: the positions of the translation stages 8 are calibrated at a plurality of fields of view of the collimator 3, respectively.
As shown in fig. 5, the high-precision cube mirror 7 on the translation stage 8 and the fixing tool thereof are detached from the translation stage 8, the standard lens 2 is installed in front of the laser interferometer 1, the target plate fixing device is installed on the table surface of the translation stage 8, the central field-of-view wave aberration of the collimator 3 is detected, the defocusing aberration term is adjusted to be minimum, then the target plate 11 is inserted into the optical path by fixing the target plate 11 on the target plate fixing device, the translation stage 8 is moved back and forth, the defocusing aberration term of the interference fringes formed by the self-collimated image reflected by the target plate 11 through the laser interferometer 1 is adjusted to be minimum, and the position of the translation stage 8 at this time is recorded.
The position of the translation stage 8 at which the off-focus image difference of interference fringes formed by the laser interferometer from the autocollimator image reflected by the target plate 11 is minimized is calibrated and recorded in the other fields (for example, the upper, lower, left, and right fields shown in fig. 6) by the method of the central field.
And 5: the target plate 11 is adjusted to be parallel to the focal plane of the collimator 3.
And fitting an equation of the plane of the target plate 11, combining the equation of the focal plane of the collimator 3 to obtain the inclination angle of the plane of the target plate 11 relative to the focal plane of the collimator 3, and rotating the target plate fixing device according to the inclination angle to enable the plane of the target plate 11 mounted on the target plate fixing device to be parallel to the focal plane of the collimator 3.
The tilt angle of the plane in which the target plate 11 lies with respect to the focal plane of the collimator 3 is determined by the following method:
step A: according to the illustration in fig. 5 and fig. 6, the position of the translation stage 8 corresponding to the minimum defocus aberration at the plurality of view field positions of the collimator 3 is calibrated, and the corresponding linear quantity at the corresponding view field angle of the collimator 3 is calculated according to the following formula:
xi＝f tanθxi,yi＝f tanθyi (1)
in the formula: i is the serial number of the field angle of the collimator 3; x is the number ofi,yiThe image plane coordinate of the collimator 3 corresponding to the ith field angle; f is the focal length of the collimator 3; thetaxi,θyiIs the angle of view of the collimator 3 measured by the small-caliber plane mirror 5 and the high-precision angle measuring device 6.
And B: position z of the translation stage 8 using collimator 3 for minimizing defocusiAnd obtaining a plane equation of the target plate 11 by adopting least square fitting, wherein the formula is as follows:
in the formula: min represents a minimization operation; a, B, C and D are coefficients of a fitting plane equation.
And C: the plane equation of the target plate 11 is obtained by equation (2), as shown in the following equation:
Ax+By+Cz＝D (3)
step D: let the equation for the ideal focal plane of the collimator 3 (which can be obtained from the focal plane position determined in step 1) be:
A0x+B0y+C0z＝D0 (4)
step E: according to the formula (3) and the formula (4), the inclination angle of the target plate 11 relative to the ideal focal plane of the collimator 3 can be calculated
Comprises the following steps:
according to the angle of inclination
The target plate holding means is rotated so that the plane of the target plate 11 mounted thereon is parallel to the focal plane of the collimator 3.
Step 6: and after the positions of the translation table 8 are consistent when the measured out-of-focus image differences under each view field of the collimator 3 are minimum, adjusting the position of the target plate fixing device on the translation table 8 to the point where the center of the target plate 11 is superposed with the light spot convergence point of the standard lens 2 under the central view field of the collimator 3, and finishing the position calibration work of the adjustable focal plane assembly.
Claims (7)
1. The position calibration method of the adjustable focal plane assembly for the collimator comprises the steps that the adjustable focal plane assembly comprises a translation table (8) and a target plate fixing device arranged on the translation table (8); the method is characterized by comprising the following steps:
step 1, determining the focal plane position of a collimator (3) by calibrating wave aberration of different fields of view of the collimator (3);
step 2, constructing an auto-collimation optical path by using a high-precision cubic mirror (7), a precision pinhole (10) and a laser (9), wherein the high-precision cubic mirror (7) is fixedly arranged on a translation table (8), and the moving direction of the translation table (8) is led out to the normal direction of one surface of the high-precision cubic mirror (7);
step 3, adjusting the moving direction of the translation stage (8) with the high-precision cubic mirror (7) after being adjusted in the step 2 to be parallel to the optical axis direction of the collimator (3);
step 4, calibrating the positions of the translation stages (8) in a plurality of view fields of the collimator (3) respectively;
step 5, adjusting the posture of the target plate fixing device to enable the plane where the target plate (11) is located to be parallel to the focal plane of the collimator (3);
and 6, after the positions of the translation table (8) are consistent when the measured out-of-focus image differences under each view field of the collimator (3) are the minimum, adjusting the position of the target plate fixing device on the translation table (8) to the position when the center of the target plate (11) arranged on the target plate fixing device is superposed with the light spot convergence point of the standard lens (2) under the central view field of the collimator (3), and finishing the position calibration work of the adjustable focal plane assembly.
2. The adjustable focal plane assembly position calibration method for a collimator as claimed in claim 1, wherein: the step 1 specifically comprises the following steps:
1.1) building a collimator full-view wave aberration calibration unit, wherein the collimator full-view wave aberration calibration unit comprises a laser interferometer (1), a standard lens (2), a plane reflector (4), a small-caliber plane reflector (5) and a high-precision angle measuring device (6) which are sequentially arranged along the light path direction; the plane reflector (4) can rotate in the azimuth and the pitch direction; the small-caliber plane reflector (5) is fixed on the back of the plane reflector (4), and the reflecting surface of the small-caliber plane reflector faces to the high-precision angle measuring device (6);
1.2) detecting wave aberration of different fields of view of the collimator (3) by utilizing rotation of the plane reflector (4) and translation of the laser interferometer (1), so as to determine the position of a focal plane of the collimator (3);
1.3) recording the rotation angle of the plane mirror (4) corresponding to the focal plane position.
3. The adjustable focal plane assembly position calibration method for a collimator as claimed in claim 1, wherein: the step 2 specifically comprises the following steps:
fixedly mounting a high-precision cubic mirror (7) on a mounting table surface of a translation table (8), irradiating the high-precision cubic mirror (7) after collimated monochromatic light emitted by a laser (9) passes through a precision pinhole (10), and forming a light spot on the precision pinhole (10) after the collimated monochromatic light is reflected by the high-precision cubic mirror (7); and moving the translation stage (8) back and forth, monitoring the position of the light spot on the precision pinhole (10), and adjusting the position and/or the posture of the high-precision cubic mirror (7) until the light spot cannot be seen in the area outside the precision pinhole (10), wherein the moving direction of the translation stage (8) is transferred to the direction of one plane normal of the high-precision cubic mirror (7).
4. The adjustable focal plane assembly position calibration method for a collimator as claimed in claim 3, wherein: the step 3 specifically comprises the following steps:
3.1) calibrating the central view field of the collimator (3) through the laser interferometer (1), the standard lens (2) and the plane reflector (4), and then removing the standard lens (2) from the current light path;
3.2) inserting the translation stage (8) with the high-precision cubic mirror (7) adjusted in the step 2 into the current optical path, wherein the high-precision cubic mirror (7) and the laser interferometer (1) form an auto-collimation optical path, adjusting the position of the translation stage (8) until the defocusing aberration of interference fringes formed after the parallel light emitted by the laser interferometer (1) is auto-collimated through the high-precision cubic mirror (7) is minimum, and at the moment, the moving direction of the translation stage (8) is parallel to the optical axis direction of the collimator (3).
5. The adjustable focal plane assembly position calibration method for a collimator as claimed in claim 1, wherein: the step 4 specifically comprises the following steps:
4.1) disassembling a high-precision cube mirror (7) on a translation table (8) and a fixing tool thereof from the translation table (8), installing a standard lens (2) in front of a laser interferometer (1), installing a target plate fixing device on the table surface of the translation table (8), detecting the central view field wave aberration of a collimator (3), adjusting the defocusing aberration to be minimum, then inserting a target plate (11) into a light path by fixing the target plate (11) on the target plate fixing device, moving the translation table (8) back and forth, adjusting the defocusing aberration of interference fringes formed by a self-collimation image reflected by the target plate (11) through the laser interferometer (1) to be minimum, and recording the position of the translation table (8) at the moment;
4.2) calibrating and recording the position of the translation stage (8) when the auto-collimation image reflected by the target plate (11) forms the out-of-focus image difference of interference fringes through a laser interferometer according to the method of the central field of view of the other fields according to the 4.1).
6. The adjustable focal plane assembly position calibration method for a collimator as claimed in claim 5, wherein: the step 5 specifically comprises the following steps:
and fitting an equation of the plane where the target plate (11) is located, combining with an equation of the focal plane of the collimator (3) to obtain an inclination angle of the plane where the target plate (11) is located relative to the focal plane of the collimator (3), and adjusting the posture of the target plate fixing device according to the inclination angle to enable the plane where the target plate (11) is located to be parallel to the focal plane of the collimator (3).
7. The adjustable focal plane assembly position calibration method for a collimator as claimed in claim 6, wherein: the tilt angle in step 5 is determined according to the following method:
step A: calibrating the position of the translation stage (8) when the defocusing aberration corresponding to a plurality of view field positions of the collimator (3) is minimum, and calculating the corresponding linear quantity at the corresponding view field angle of the collimator (3) according to the following formula:
xi＝f tanθxi,yi＝f tanθyi (1)
in the formula: i is the serial number of the field angle of the collimator (3); x is the number ofi,yiThe image plane coordinate corresponding to the collimator (3) under the ith field angle; f is the focal length of the collimator (3); thetaxi,θyiThe angle of view of the collimator (3) is measured by the small-caliber plane reflector (5) and the high-precision angle measuring device (6);
and B: the position z of the translation stage (8) when the defocusing aberration of different fields of view of the collimator (3) is minimum is utilizediBy using the minimumThe plane equation of the target plate (11) is obtained by two-step multiplication fitting, and the formula is as follows:
in the formula: min represents a minimization operation; a, B, C and D are coefficients of a fitting plane equation;
and C: the plane equation of the target plate (11) is obtained by the formula (2), which is shown as follows:
Ax+By+Cz＝D (3)
step D: the equation of the ideal focal plane of the collimator (3) is as follows:
A0x+B0y+C0z＝D0 (4)
step E: according to the formula (3) and the formula (4), calculating to obtain the inclination angle of the target plate (11) relative to the ideal focal plane of the collimator (3)
Comprises the following steps:
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| WO2023070871A1 (en) * | 2021-10-29 | 2023-05-04 | 中国科学院深圳先进技术研究院 | Method and device for moving target in optical axis direction of camera |
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| CN111650747A (en) * | 2020-05-20 | 2020-09-11 | 中国科学院西安光学精密机械研究所 | Method and device for real-time correction of defocusing aberration of collimator |
| CN111707451A (en) * | 2020-05-27 | 2020-09-25 | 中国科学院西安光学精密机械研究所 | Device and method for calibrating orientation elements and distortion in interference type imaging spectrometer |
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| US20110134249A1 (en) * | 2009-12-04 | 2011-06-09 | Lockheed Martin Corporation | Optical Detection and Ranging Sensor System For Sense and Avoid, and Related Methods |
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