CN112530772A - Double-shaft linkage structure for vacuum motion platform in scanning electron microscope - Google Patents
Double-shaft linkage structure for vacuum motion platform in scanning electron microscope Download PDFInfo
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- CN112530772A CN112530772A CN202011395819.4A CN202011395819A CN112530772A CN 112530772 A CN112530772 A CN 112530772A CN 202011395819 A CN202011395819 A CN 202011395819A CN 112530772 A CN112530772 A CN 112530772A
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- linkage structure
- motion platform
- linear motion
- platform
- vacuum
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/201—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated for mounting multiple objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20214—Rotation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20221—Translation
- H01J2237/20228—Mechanical X-Y scanning
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention discloses a double-shaft linkage structure for a vacuum motion platform in a scanning electron microscope, which is used for driving a linear motion platform to slide along a guide rail under the action of a sliding block through a coupling and a screw rod in the using process of the double-shaft linkage structure for the vacuum motion platform in the scanning electron microscope. In a word, this a biax linkage structure for vacuum motion platform among scanning electron microscope structural design scientific and reasonable is reliable, can realize the diaxon linkage, can reliably fix a position the sample on the sample bench fast, and the trade appearance is convenient and fast, can accomplish compact structure, small, convenient assembling, can be applied to under the ultra-high vacuum environment such as field emission.
Description
Technical Field
The invention relates to the technical field of scanning electron microscopes, in particular to a double-shaft linkage structure for a vacuum motion platform in a scanning electron microscope.
Background
With the development and demand of science and technology, scanning electron microscopes are widely used in various departments, research, enterprises and public institutions. The scanning electron microscope generates high-speed electrons by utilizing high voltage between a cathode and an anode, forms superfine electron beams through several stages of focusing, scans and excites various signals on the surface of a sample point by point, and finally collects and images through different sensors. In order to reduce the time consumption of sample changing and vacuumizing and increase the detection efficiency, several or even more than ten different samples can be loaded in one test of the electron microscope, so that different-axis transmission needs to be carried out in a narrow vacuum cavity, and the samples on different sample supports on the sample table are moved to the electron beam for observation.
The structure of the original vacuum platform is complex, the original vacuum platform is difficult to process and assemble and debug, the structure of the original vacuum platform is not compact, the volume of a vacuum cavity is too large, and the vacuumizing time and the cost are increased.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a double-shaft linkage structure for a vacuum motion platform in a scanning electron microscope, and aims to solve the problems of larger volume and high cost in the use process of the original structure.
In order to achieve the purpose, the invention adopts the technical scheme that: a double-shaft linkage structure for a vacuum motion platform in a scanning electron microscope comprises a base platform, guide rails, a stepping motor and a vacuum motor, wherein the stepping motor is fixed at one end of the base platform through a motor fixing seat, the vacuum motor is fixed at the other end of the base platform through a motor fixing seat, two guide rails which are parallel to each other are fixed on the base platform, a sliding block is arranged on each guide rail, a linear motion platform is fixed on each sliding block, a turbine is arranged in the middle of the linear motion platform, a rotary table is fixed on each turbine, the vacuum motor is connected with a screw rod through a coupling, the screw rod penetrates through the linear motion platform, the vacuum motor can drive the linear motion platform to slide along the guide rails under the action of the sliding block through the coupling and the screw rod, and the stepping motor is connected with a rotary table driving shaft through the coupling, the revolving stage drive shaft passes in the worm, the worm is placed the seat through the worm and is set up on linear motion platform, step motor can drive the turbine rotation through coupling, revolving stage drive shaft and worm, the turbine can drive the revolving stage rotation, it holds in the palm to be equipped with a plurality of samples on the revolving stage.
Preferably, a screw limiting block is fixed on the base platform, and the screw penetrates through the screw limiting block.
Preferably, linear motion platform travel switches are respectively fixed at two ends of the base platform corresponding to the linear motion platforms.
Preferably, a plurality of sample holders are provided on the rotary stage.
Preferably, a plurality of sample holders are detachably arranged on the rotating platform through glass bead jackscrews.
Preferably, a rotary table travel switch is fixed on the linear motion platform corresponding to the rotary table.
Preferably, the linear motion platform is provided with a damping block corresponding to the turbine.
Preferably, the top end of the screw limiting block is provided with a limiting guide groove, and the end head of the driving shaft of the rotating table is placed in the limiting guide groove.
The invention relates to a double-shaft linkage structure for a vacuum motion platform in a scanning electron microscope, which is characterized in that a vacuum motor can drive a linear motion platform to slide along a guide rail under the action of a sliding block through a coupling and a screw rod in the using process, meanwhile, a stepping motor can drive a turbine to rotate through the coupling, a rotating platform driving shaft and a worm, and the turbine can drive the rotating platform to rotate, so that a sample to be observed of a sample support can rotate along with the rotating platform while moving linearly; linear motion platform travel switches are respectively fixed at two ends of the base platform corresponding to the linear motion platforms, and the linear motion platform travel switches can accurately limit the displacement of the linear motion platforms; a plurality of sample holders are detachably arranged on the rotating table through glass bead jackscrews, and the sample holders are detachably designed, so that the samples can be rapidly replaced and placed conveniently; a rotary table travel switch is fixed on the linear motion platform corresponding to the rotary table and used for detecting the initial point and the rotation angle of the rotary table; the linear motion platform is provided with a damping block corresponding to the turbine, and the damping block can be used for adjusting the rotating speed of the rotating platform. In a word, this a biax linkage structure for vacuum motion platform among scanning electron microscope structural design scientific and reasonable is reliable, can realize the diaxon linkage, can reliably fix a position the sample on the sample bench fast, and the trade appearance is convenient and fast, can accomplish compact structure, small, convenient assembling, can be applied to under the ultra-high vacuum environment such as field emission.
Drawings
FIG. 1 is a schematic diagram of an overall structure of a biaxial linkage structure of a vacuum motion platform for a scanning electron microscope according to the present invention;
FIG. 2 is a schematic view of an overall structure of a dual-axis linkage structure of a vacuum motion platform in a scanning electron microscope according to the present invention;
FIG. 3 is a top view of a dual-axis linkage structure for a vacuum motion stage in a scanning electron microscope in accordance with the present invention;
FIG. 4 is a front view of a dual-axis linkage structure for a vacuum motion stage in a scanning electron microscope in accordance with the present invention;
in the figure: 1. a base platform; 2. a guide rail; 3. a slider; 4. a stepping motor; 5. a motor fixing seat; 6. a coupling; 7. a screw; 8. a screw limiting block; 9. a linear motion platform; 10. a vacuum motor; 11. a rotary table drive shaft; 12. a worm; 13. a turbine; 14. a limiting guide groove; 15. a rotating table; 16. a damping block; 17. a sample holder; 18. a linear motion platform travel switch; 19. a worm placing seat; 20. a rotary table travel switch; 21. and (4) carrying out glass bead top thread.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.
As shown in fig. 1-4, a double-shaft linkage structure for a vacuum motion platform in a scanning electron microscope includes a base platform 1, a guide rail 2, a stepping motor 4 and a vacuum motor 10, wherein one end of the base platform 1 is fixed with the stepping motor 4 through a motor fixing seat 5, the other end of the base platform 1 is fixed with the vacuum motor 10 through the motor fixing seat 5, two parallel guide rails 2 are fixed on the base platform 1, a sliding block 3 is arranged on the guide rail 2, a linear motion platform 9 is fixed on the sliding block 3, a turbine 13 is arranged in the middle of the linear motion platform 9, a rotary table 15 is fixed on the turbine 13, the vacuum motor 10 is connected with a screw rod 7 through a coupling 6, the screw rod 7 passes through the linear motion platform 9, the vacuum motor 10 can drive the linear motion platform 9 to slide along the guide rail 2 through the coupling 6 and the screw rod 7, the step motor 4 is connected with a rotary table driving shaft 11 through a coupling 6, the rotary table driving shaft 11 passes through a worm 12, the worm 12 is arranged on a linear motion platform 9 through a worm placing seat 19, the step motor 4 can drive a turbine 13 to rotate through the coupling 6, the rotary table driving shaft 11 and the worm 12, the turbine 13 can drive a rotary table 15 to rotate, a plurality of sample holders 17 are arranged on the rotary table 15, a screw limiting block 8 is fixed on the base platform 1, a screw 7 passes through the screw limiting block 8, linear motion platform stroke switches 18 are respectively fixed at two ends of the base platform 1 corresponding to the linear motion platform 9, a plurality of sample holders 17 are arranged on the rotary table 15, a plurality of sample holders 5 can be detachably arranged on the rotary table 4 through a glass bead top wire 21, and a rotary stroke switch 20 is fixed on the linear motion platform 9 corresponding to the rotary table 15, the linear motion platform 9 is provided with a damping block 13 corresponding to the turbine 13, the top end of the screw limiting block 8 is provided with a limiting guide groove 14, and the end of the rotating table driving shaft 11 is placed in the limiting guide groove 14.
The invention relates to a double-shaft linkage structure for a vacuum motion platform in a scanning electron microscope, in the using process, a vacuum motor 10 can drive a linear motion platform 9 to slide along a guide rail 2 under the action of a sliding block 3 through a coupling 6 and a screw 7, meanwhile, a stepping motor 4 can drive a turbine 13 to rotate through the coupling 6, a rotating platform driving shaft 11 and a worm 12, and the turbine 13 can drive a rotating platform 15 to rotate, so that a sample to be observed of a sample support 17 can rotate along with the rotating platform 15 while moving linearly; linear motion platform travel switches 18 are respectively fixed at two ends of the base platform 1 corresponding to the linear motion platforms 9, and the linear motion platform travel switches 18 can accurately limit the displacement of the linear motion platforms 9; a plurality of sample holders 5 are detachably arranged on the rotating table 4 through the glass bead jackscrews 21, and the sample holders 5 are detachably designed, so that the samples can be rapidly replaced and placed conveniently; a rotary table travel switch 20 is fixed on the linear motion platform 9 corresponding to the rotary table 15, and the rotary table travel switch 20 is used for detecting the initial point and the rotation angle of the rotary table 15; the linear motion platform 9 is provided with a damping block 13 corresponding to the turbine 13, and the damping block 13 can be used for adjusting the rotating speed of the rotating platform 15. In a word, this a biax linkage structure for vacuum motion platform among scanning electron microscope structural design scientific and reasonable is reliable, can realize the diaxon linkage, can reliably fix a position the sample on the sample bench fast, and the trade appearance is convenient and fast, can accomplish compact structure, small, convenient assembling, can be applied to under the ultra-high vacuum environment such as field emission.
It is noted that, herein, relational terms such as first and second (a, b, etc.) and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (8)
1. The utility model provides a biax linkage structure for vacuum motion platform among scanning electron microscope, includes base platform (1), guide rail (2), step motor (4) and vacuum motor (10), its characterized in that: one end of the base platform (1) is fixed with a stepping motor (4) through a motor fixing seat (5), the other end of the base platform (1) is fixed with a vacuum motor (10) through the motor fixing seat (5), the base platform (1) is fixed with two parallel guide rails (2), a sliding block (3) is arranged on the guide rails (2), a linear motion platform (9) is fixed on the sliding block (3), a turbine (13) is arranged in the middle of the linear motion platform (9), a rotary table (15) is fixed on the turbine (13), the vacuum motor (10) is connected with a screw rod (7) through a coupling (6), the screw rod (7) penetrates through the linear motion platform (9), and the vacuum motor (10) can drive the linear motion platform (9) to slide along the guide rails (2) under the action of the sliding block (3) through the coupling (6) and the screw rod (7), step motor (4) are connected with revolving stage drive shaft (11) through shaft coupling (6), revolving stage drive shaft (11) pass in worm (12), worm (12) are placed seat (19) through the worm and are set up on linear motion platform (9), step motor (4) can drive turbine (13) rotation through shaft coupling (6), revolving stage drive shaft (11) and worm (12), turbine (13) can drive revolving stage (15) rotatory, be equipped with a plurality of sample on revolving stage (15) and hold in the palm (17).
2. The dual-axis linkage structure of claim 1, wherein the linkage structure comprises: a screw limiting block (8) is fixed on the base platform (1), and the screw (7) penetrates through the screw limiting block (8).
3. The dual-axis linkage structure of claim 1, wherein the linkage structure comprises: and linear motion platform travel switches (18) are respectively fixed at two ends of the base platform (1) corresponding to the linear motion platforms (9).
4. The dual-axis linkage structure of claim 1, wherein the linkage structure comprises: the rotating platform (15) is provided with a plurality of sample holders (17).
5. The dual-axis linkage structure of claim 1, wherein the linkage structure comprises: a plurality of sample holders (5) are detachably arranged on the rotating table (4) through glass bead jackscrews (21).
6. The dual-axis linkage structure of claim 1, wherein the linkage structure comprises: and a rotary table travel switch (20) is fixed on the linear motion platform (9) corresponding to the rotary table (15).
7. The dual-axis linkage structure of claim 1, wherein the linkage structure comprises: and a damping block (13) is arranged on the linear motion platform (9) corresponding to the turbine (13).
8. The dual-axis linkage structure of claim 2, wherein the linkage structure comprises: the top end of the screw limiting block (8) is provided with a limiting guide groove (14), and the end of the rotating table driving shaft (11) is placed in the limiting guide groove (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011395819.4A CN112530772A (en) | 2020-12-03 | 2020-12-03 | Double-shaft linkage structure for vacuum motion platform in scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011395819.4A CN112530772A (en) | 2020-12-03 | 2020-12-03 | Double-shaft linkage structure for vacuum motion platform in scanning electron microscope |
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| Publication Number | Publication Date |
|---|---|
| CN112530772A true CN112530772A (en) | 2021-03-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011395819.4A Pending CN112530772A (en) | 2020-12-03 | 2020-12-03 | Double-shaft linkage structure for vacuum motion platform in scanning electron microscope |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114300328A (en) * | 2022-03-11 | 2022-04-08 | 国仪量子(合肥)技术有限公司 | Sample platform of scanning electron microscope and scanning electron microscope |
-
2020
- 2020-12-03 CN CN202011395819.4A patent/CN112530772A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114300328A (en) * | 2022-03-11 | 2022-04-08 | 国仪量子(合肥)技术有限公司 | Sample platform of scanning electron microscope and scanning electron microscope |
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