CN112526699A - Three-dimensional objective lens positioning device and mounting method thereof - Google Patents

Three-dimensional objective lens positioning device and mounting method thereof Download PDF

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Publication number
CN112526699A
CN112526699A CN202010922734.0A CN202010922734A CN112526699A CN 112526699 A CN112526699 A CN 112526699A CN 202010922734 A CN202010922734 A CN 202010922734A CN 112526699 A CN112526699 A CN 112526699A
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China
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mounting plane
sapphire sheet
ceramic stack
thirty
piezoelectric ceramic
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Granted
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CN202010922734.0A
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Chinese (zh)
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CN112526699B (en
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边珂
郑闻天
江颖
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Peking University
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Peking University
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses

Abstract

The invention relates to the technical field of precise actuation, in particular to a three-dimensional objective lens positioning device and an installation method thereof. The device comprises an objective lens, a longitudinal actuating mechanism, a first transverse actuating mechanism, a second transverse actuating mechanism, a longitudinal fine focusing mechanism and a two-dimensional scanning platform. According to the invention, the longitudinal actuating mechanism, the first transverse actuating mechanism and the second transverse actuating mechanism are stacked and arranged, and the longitudinal fine focusing mechanism is integrated in the longitudinal actuating mechanism, so that the whole device has a more compact and stable structure and small occupied volume. Meanwhile, the improved Pan-type stepping motor structure with high driving capability is adopted, so that the three-dimensional positioning and moving device is high in positioning accuracy, large in moving range and strong in load bearing capacity.

Description

Three-dimensional objective lens positioning device and mounting method thereof
Technical Field
The invention relates to the technical field of precise actuation, in particular to a three-dimensional objective lens positioning device and an installation method thereof.
Background
Precision actuation refers to a technique for controlling a load to achieve nanometer-scale precision motion along a given direction, and generally includes both linear actuation and rotational motion. The technology is widely applied to the fields of precise surface characterization, optical positioning adjustment, micro-nano processing and the like. For the research of surface science properties under an optical field and the in-situ collection of weak fluorescent signals on the surface, a set of precise three-dimensional objective lens positioning device integrated in a scanning probe of a scanning probe microscope system is necessary. On one hand, because the working distance of the objective lens is short, the high-precision and large-range (>10mm) continuous positioning of a focusing light spot needs to be realized, so that the replacement operation of a sample and a needle point of a scanning probe microscope system is not influenced; on the other hand, the apparatus itself must be compact and robust enough to accommodate the basic requirements of a highly shock resistant scanning probe system.
For the existing commercial three-dimensional positioning device, on one hand, if high-quality load and large-scale movement are to be realized, a servo motor is generally adopted, the structural stability is low, the volume and the weight of the motor are large, the limited assembly space in a scanning probe cannot be compatible, and the mechanical stability of a scanning probe microscope system can be influenced; on the other hand, commercial high-precision piezoelectric stepping motors generally adopt a sliding rod type design, the motor has poor load capacity and mechanical stability, and is difficult to stably maintain the positioning of high-quality loads (such as a microscope objective and a two-dimensional scanning table), and cause the jitter of an imaging plane.
Disclosure of Invention
The present invention is directed to a three-dimensional objective positioning device and a method for mounting the same to improve the above-mentioned problems. In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
in one aspect, embodiments of the present application provide a three-dimensional objective lens positioning device, including a longitudinal actuating mechanism, a first lateral actuating mechanism, and a second lateral actuating mechanism: the longitudinal actuating mechanism comprises a longitudinal moving part and a longitudinal driving part for driving the longitudinal moving part to do longitudinal linear motion; the first transverse actuating mechanism comprises a first transverse moving component and a first transverse driving component for driving the first transverse moving component to do transverse linear motion along a first direction; the second transverse actuating mechanism comprises a second transverse moving component and a second transverse driving component which drives the second transverse moving component to do transverse linear motion along a second direction; the top of the longitudinal actuating mechanism is connected with the two-dimensional scanning table; the longitudinal actuating mechanism, the first transverse actuating mechanism and the second transverse actuating mechanism are connected in a stacking mode from top to bottom; the first direction and the second direction are perpendicular.
Optionally, a longitudinal fine focusing mechanism is disposed inside the longitudinal actuating mechanism, and the two-dimensional scanning stage is disposed above the longitudinal fine focusing mechanism.
Optionally, the top of the longitudinal moving part is connected with a first connecting piece, and the top of the first connecting piece is connected with the two-dimensional scanning table; the top of the first transverse driving part is connected with a second connecting piece, and the top of the second connecting piece is connected with the longitudinal driving part; the top of the second transverse driving part is connected with a third connecting piece, and the top of the third connecting piece is connected with the first transverse moving part; the bottom of the second transverse moving part is connected with a fourth connecting piece, and the fourth connecting piece is connected with the base.
Optionally, the longitudinal drive member comprises a first bracket, the first bracket having a hexagonal cross-section; the first support groove is internally provided with a first load prism, a ninth piezoelectric ceramic stack is arranged between the first load prism and the first support groove, one end of the ninth piezoelectric ceramic stack is fixedly connected with the first support groove, and the other end of the ninth piezoelectric ceramic stack is in close contact with the first load prism.
Optionally, the first bracket includes a seventh mounting plane, an eighth mounting plane and a ninth mounting plane are respectively disposed at two ends of the seventh mounting plane, a seventh mounting plane and a first continuation plane are respectively disposed at two ends of the eighth mounting plane, and a tenth mounting plane is disposed at an end of the first continuation plane; a seventh mounting plane and a second extension plane are respectively arranged at two ends of the ninth mounting plane, and an eleventh mounting plane is arranged at the end part of the second extension plane; a twelfth mounting plane, a thirteenth mounting plane and a fourteenth mounting plane are arranged on the outer side of the first load prism, a first sapphire sheet is arranged on the outer side of the twelfth mounting plane in an adhering mode, a second sapphire sheet is arranged on the outer side of the thirteenth mounting plane in an adhering mode, and a third sapphire sheet is arranged on the outer side of the fourteenth mounting plane in an adhering mode; a first piezoelectric ceramic stack and a second piezoelectric ceramic stack are arranged between the eighth mounting plane and the first sapphire sheet, and a third piezoelectric ceramic stack and a fourth piezoelectric ceramic stack are arranged between the ninth mounting plane and the third sapphire sheet; an elastic piece group is arranged between the tenth mounting plane and the eleventh mounting plane and comprises a first elastic piece and a second elastic piece which are parallel to each other; and a first piezoelectric ceramic stacking group is arranged between the elastic element group and the second sapphire sheet.
Optionally, the first lateral drive member comprises a second bracket, the second bracket having a trapezoidal cross-section; a second load prism is arranged in the second supporting groove, an eighteenth piezoelectric ceramic stack is arranged between the second load prism and the second supporting groove, one end of the eighteenth piezoelectric ceramic stack is fixedly connected with the second supporting groove, and the other end of the eighteenth piezoelectric ceramic stack is in close contact with the second load prism.
Optionally, the second bracket comprises a nineteenth mounting plane, and the nineteenth mounting plane and the second connector are connected through a bolt; a twentieth mounting plane and a twenty-first mounting plane are respectively arranged at two ends of the nineteenth mounting plane, a nineteenth mounting plane and a third continuation plane are respectively arranged at two ends of the twentieth mounting plane, and a twenty-second mounting plane is arranged at the end part of the third continuation plane; a nineteenth mounting plane and a fourth continuation plane are respectively arranged at two ends of the twenty-first mounting plane, and a twenty-third mounting plane is arranged at the end part of the fourth continuation plane; a twenty-fourth mounting plane and a twenty-fifth mounting plane are respectively arranged on the outer end faces of two sides of the second load prism, and a twenty-sixth mounting plane is arranged in the middle of the lower end face of the second load prism; a fourth sapphire sheet and a fifth sapphire sheet are bonded to the outer side of the twenty-fourth mounting plane, a sixth sapphire sheet and a seventh sapphire sheet are bonded to the outer side of the twenty-fifth mounting plane, and an eighth sapphire sheet and a ninth sapphire sheet are bonded to the outer side of the twenty-sixth mounting plane; a second piezo ceramic stack group is disposed between the twentieth mounting plane and the twenty-fourth mounting plane, the second piezo ceramic stack group including a tenth piezo ceramic stack and an eleventh piezo ceramic stack, the tenth piezo ceramic stack disposed between the twentieth mounting plane and the fourth sapphire sheet, the eleventh piezo ceramic stack disposed between the twentieth mounting plane and the fifth sapphire sheet; a third piezo ceramic stack group is disposed between the twenty-first mounting plane and the twenty-fifth mounting plane, the third piezo ceramic stack group comprising a twelfth piezo ceramic stack and a thirteenth piezo ceramic stack, the twelfth piezo ceramic stack disposed between the twenty-first mounting plane and the sixth sapphire sheet, the thirteenth piezo ceramic stack disposed between the twenty-first mounting plane and the seventh sapphire sheet; a third elastic piece and a fourth elastic piece which are parallel to each other are arranged between the twenty-second installation plane and the twenty-third installation plane; a fifth piezoelectric ceramic stack is arranged between the third elastic piece and the eighth sapphire piece; and a sixth piezoelectric ceramic stack is arranged between the fourth elastic piece and the ninth sapphire piece.
Optionally, the second lateral drive member comprises a third bracket, the third bracket having a trapezoidal cross-section; a third load prism is arranged in the third support groove, a nineteenth piezoelectric ceramic stack is arranged between the third load prism and the third support groove, one end of the nineteenth piezoelectric ceramic stack is fixedly connected with the third support groove, and the other end of the nineteenth piezoelectric ceramic stack is in close contact with the third load prism.
Optionally, the third bracket comprises a thirty-first mounting plane, and the thirty-first mounting plane and the third connector are connected by a bolt; a thirty-second mounting plane and a thirty-third mounting plane are respectively arranged at two ends of the thirty-first mounting plane, a thirty-first mounting plane and a fifth extension plane are respectively arranged at two ends of the thirty-second mounting plane, and a thirty-fourth mounting plane is arranged at the end part of the fifth extension plane; a thirty-first mounting plane and a sixth extension plane are respectively arranged at two ends of the thirty-third mounting plane, and a thirty-fifth mounting plane is arranged at the end part of the sixth extension plane; a thirty-sixth mounting plane and a thirty-seventh mounting plane are respectively arranged on the outer end face of the third load prism, and a thirty-eighth mounting plane is arranged in the middle of the lower end face of the third load prism; a tenth sapphire sheet and an eleventh sapphire sheet are bonded and arranged on the outer side of the thirty-sixth mounting plane, a twelfth sapphire sheet and a thirteenth sapphire sheet are bonded and arranged on the outer side of the thirty-seventh mounting plane, and a fourteenth sapphire sheet and a fifteenth sapphire sheet are bonded and arranged on the outer side of the thirty-eighth mounting plane; a fourth piezo ceramic stack group is disposed between the thirty second mounting plane and the thirty sixth mounting plane, the fourth piezo ceramic stack group including a fourteenth piezo ceramic stack and a fifteenth piezo ceramic stack, the fourteenth piezo ceramic stack disposed between the thirty second mounting plane and the tenth sapphire sheet, the fifteenth piezo ceramic stack disposed between the thirty second mounting plane and the eleventh sapphire sheet; a fifth piezo ceramic stack group is disposed between the thirty-third mounting plane and the thirty-seventh mounting plane, the fifth piezo ceramic stack group including a sixteenth piezo ceramic stack and a seventeenth piezo ceramic stack, the sixteenth piezo ceramic stack disposed between the thirty-third mounting plane and the twelfth sapphire sheet, the seventeenth piezo ceramic stack disposed between the thirty-third mounting plane and the thirteenth sapphire sheet; a fifth elastic piece and a sixth elastic piece which are parallel to each other are arranged between the thirty-fourth installation plane and the thirty-fifth installation plane; a seventh piezoelectric ceramic stack is arranged between the fifth elastic piece and the fourteenth sapphire sheet; an eighth piezoelectric ceramic stack is arranged between the sixth elastic piece and the fifteenth sapphire piece.
In another aspect, an embodiment of the present invention provides an installation method for a three-dimensional objective positioning device, including:
connecting one end of the first piezoelectric ceramic stacking group with the first elastic piece, and connecting the other end of the first piezoelectric ceramic stacking group with the second elastic piece; fixing the first piezoelectric ceramic stack and the second piezoelectric ceramic stack on an eighth mounting plane; fixing the third piezoelectric ceramic stack and the fourth piezoelectric ceramic stack on a ninth mounting plane;
fixing a first sapphire sheet on a twelfth mounting plane through insulating cement, fixing a second sapphire sheet on a thirteenth mounting plane through insulating cement, and fixing a third sapphire sheet on a fourteenth mounting plane through insulating cement; the first piezoelectric ceramic stacking group is attached to the second sapphire sheet, and the pressure between the first piezoelectric ceramic stacking group and the second sapphire sheet, the pressure between the first piezoelectric ceramic stacking group and the first sapphire sheet, the pressure between the second piezoelectric ceramic stacking group and the first sapphire sheet, the pressure between the third piezoelectric ceramic stacking group and the third sapphire sheet and the pressure between the fourth piezoelectric ceramic stacking group and the third sapphire sheet are adjusted by using bolts through changing the deformation degrees of the first elastic piece and the second elastic piece;
fixing the first wiring platform with pins to the outer side of the eighth mounting plane through bolts; fixing a second wiring platform with pins to the outer side of the ninth mounting plane through bolts; fixing a third wiring platform with pins to the outer side of the tenth mounting plane through bolts;
fixing the second piezoelectric ceramic stack group on a twentieth mounting plane; fixing a third piezoelectric ceramic stacking group on a twenty-first mounting plane; connecting the fifth piezoelectric ceramic stack with the third elastic element, and connecting the sixth piezoelectric ceramic stack with the fourth elastic element;
fixing a fourth sapphire sheet and a fifth sapphire sheet on a twenty-fourth mounting plane through insulating cement, fixing a sixth sapphire sheet and a seventh sapphire sheet on a twenty-fifth mounting plane through insulating cement, and fixing an eighth sapphire sheet and a ninth sapphire sheet on a twenty-sixth mounting plane through insulating cement; attaching the fifth piezoelectric ceramic stack to the eighth sapphire sheet, and attaching the sixth piezoelectric ceramic stack to the ninth sapphire sheet; the deformation degree of the third elastic piece and the fourth elastic piece is changed through bolts to adjust the pressure between the fifth piezoelectric ceramic stack and the eighth sapphire sheet, the pressure between the sixth piezoelectric ceramic stack and the ninth sapphire sheet, the pressure between the second piezoelectric ceramic stack group and the fourth sapphire sheet, the pressure between the second piezoelectric ceramic stack group and the fifth sapphire sheet, the pressure between the third piezoelectric ceramic stack group and the sixth sapphire sheet and the pressure between the third piezoelectric ceramic stack group and the seventh sapphire sheet;
fixing a fourth wiring platform with pins to the outer side of the twenty-first mounting plane through bolts; fixing a fifth wiring platform with pins to the outer side of the twentieth mounting plane through bolts;
fixing a fourth piezoelectric ceramic stack group on a thirty-second mounting plane; fixing a fifth piezoelectric ceramic stack group on a thirty-third mounting plane; connecting the seventh piezoelectric ceramic stack with the fifth elastic element, and connecting the eighth piezoelectric ceramic stack with the sixth elastic element;
fixing a tenth sapphire sheet and an eleventh sapphire sheet on a thirty-sixth mounting plane through insulating cement, fixing a twelfth sapphire sheet and a thirteenth sapphire sheet on a thirty-seventh mounting plane through insulating cement, and fixing a fourteenth sapphire sheet and a fifteenth sapphire sheet on a thirty-eighth mounting plane through insulating cement; attaching the seventh piezoelectric ceramic stack to the fourteenth sapphire sheet, and attaching the eighth piezoelectric ceramic stack to the fifteenth sapphire sheet; the deformation degree of the fifth elastic piece and the sixth elastic piece is changed through bolts to adjust the pressure between the seventh piezoelectric ceramic stack and the fourteenth sapphire sheet, the pressure between the eighth piezoelectric ceramic stack and the fifteenth sapphire sheet, the pressure between the fourth piezoelectric ceramic stack group and the tenth sapphire sheet, the pressure between the fourth piezoelectric ceramic stack group and the eleventh sapphire sheet, the pressure between the fifth piezoelectric ceramic stack group and the twelfth sapphire sheet and the pressure between the fifth piezoelectric ceramic stack group and the thirteenth sapphire sheet;
fixing a sixth wiring platform with pins to the outer side of a thirty-second mounting plane through bolts; fixing a seventh wiring platform with pins to the outer side of the thirty-third mounting plane through bolts;
connecting the first connecting piece with the longitudinal fine focusing mechanism; connecting the first longitudinal fixing part, the second longitudinal fixing part and the third longitudinal fixing part with the first bracket respectively; connecting the first longitudinal fixing part, the second longitudinal fixing part and the third longitudinal fixing part with the second connecting piece respectively;
connecting a second connecting piece with a second bracket; connecting the first transverse fixing component and the second transverse fixing component with two ends of the second load prism respectively; connecting the first transverse fixing part and the second transverse fixing part with a third connecting piece respectively;
the third connecting piece is connected with the third bracket; connecting a third transverse fixing component and a fourth transverse fixing component with two ends of a third load prism respectively; connecting the third transverse fixing part and the fourth transverse fixing part with a fourth connecting piece respectively;
mounting a two-dimensional scanning table on a first connecting piece; mounting an objective lens on a two-dimensional scanning table; and connecting the fourth connecting piece with the base.
The invention has the beneficial effects that:
according to the invention, an incident beam is focused by the objective lens, the longitudinal actuating mechanism completes the coarse movement of the objective lens in the Z direction, the first transverse actuating mechanism completes the coarse movement of the objective lens in the X direction, the second transverse actuating mechanism completes the coarse movement of the objective lens in the Y direction, the longitudinal fine focusing mechanism completes the fine continuous focusing of the objective lens on a sample plane, the two-dimensional scanning platform completes the fine transverse scanning of the objective lens in the sample plane, and finally, the function of realizing the arbitrary positioning of a focusing light spot on the sample plane while precisely focusing the light beam is completed. According to the invention, the longitudinal actuating mechanism, the first transverse actuating mechanism and the second transverse actuating mechanism are stacked and arranged, and the longitudinal fine focusing mechanism is integrated in the longitudinal actuating mechanism, so that the whole device has a more compact and stable structure and small occupied volume. Meanwhile, the improved Pan-type stepping motor structure with high driving capability is adopted, so that the three-dimensional positioning and moving device is high in positioning accuracy, large in moving range and strong in load bearing capacity.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the embodiments of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic view of an installation structure of a three-dimensional objective positioning device according to an embodiment of the present invention;
FIG. 2 is an exploded view of a three-dimensional objective positioning device according to an embodiment of the present invention;
FIG. 3 is a first perspective view of the longitudinal actuation mechanism of the embodiment of the present invention;
FIG. 4 is a second perspective view of the longitudinal actuation mechanism of the embodiment of the present invention;
FIG. 5 is a schematic top view of a longitudinal actuator mechanism according to an embodiment of the present invention;
FIG. 6 is a schematic perspective view of a first lateral actuation mechanism according to an embodiment of the present invention;
FIG. 7 is a schematic front view of a first lateral actuator according to an embodiment of the present invention;
FIG. 8 is a first exploded view of a first lateral actuation mechanism configuration according to an embodiment of the present invention;
FIG. 9 is a second exploded view of the first lateral actuation mechanism configuration in accordance with an embodiment of the present invention;
FIG. 10 is a perspective view of a second lateral actuation mechanism according to an embodiment of the present invention;
FIG. 11 is a schematic front view of a second lateral actuator according to an embodiment of the present invention;
FIG. 12 is a first exploded view of a second lateral actuation mechanism configuration according to an embodiment of the present invention;
FIG. 13 is a second exploded view of a second lateral actuation mechanism configuration according to an embodiment of the present invention;
fig. 14 is a graph of a sawtooth voltage waveform as described in the examples of the present invention.
The labels in the figure are: 1. an objective lens; 2. a longitudinal actuation mechanism; 3. a first lateral actuation mechanism; 4. a second lateral actuation mechanism; 5. a longitudinal fine focusing mechanism; 6. a two-dimensional scanning stage; 7. a base; 10. a longitudinal driving member; 20. a longitudinal moving member; 30. a first lateral drive member; 40. a first lateral moving member; 50. a second lateral drive member; 60. a second lateral moving member; 101. a first connecting member; 201. a first longitudinal fixing member; 202. a second longitudinal securing member; 203. a third longitudinal fixing member; 204. a first mounting plane; 205. a second mounting plane; 206. a third mounting plane; 207. a fourth mounting plane; 208. a fifth mounting plane; 209. a sixth mounting plane; 210. a first bracket; 211. a first load prism; 212. a seventh mounting plane; 213. an eighth mounting plane; 214. a ninth mounting plane; 215. a tenth mounting plane; 216. an eleventh mounting plane; 217. a twelfth mounting plane; 218. a thirteenth mounting plane; 219. a fourteenth mounting plane; 220. a first sapphire sheet; 221. a second sapphire sheet; 222. a third sapphire sheet; 223. a first piezoelectric ceramic stack; 224. a second piezoelectric ceramic stack; 225. a third piezoelectric ceramic stack; 226. a fourth piezoelectric ceramic stack; 227. a first piezo ceramic stack group; 228. a first elastic member; 229. a second elastic member; 230. a first terminal block; 231. a second terminal block; 232. a third terminal block; 301. a second connecting member; 302. a first lateral securing member; 303. a second lateral securing member; 304. a fifteenth mounting plane; 305. a sixteenth mounting plane; 306. a seventeenth mounting plane; 307. an eighteenth mounting plane; 308. a second bracket; 309. a second load prism; 310. a nineteenth mounting plane; 311. a twentieth mounting plane; 312. a twenty-first mounting plane; 313. a twenty-second mounting plane; 314. a twenty-third mounting plane; 315. a twenty-fourth mounting plane; 316. a twenty-fifth mounting plane; 317. a twenty-sixth mounting plane; 318. a fourth sapphire sheet; 319. a fifth sapphire sheet; 320. a sixth sapphire sheet; 321. a seventh sapphire sheet; 322. an eighth sapphire sheet; 323. a ninth sapphire sheet; 324. a second piezo-ceramic stack group; 325. a third piezo-ceramic stack group; 326. a fifth piezoelectric ceramic stack; 327. a sixth piezoelectric ceramic stack; 328. a third elastic member; 329. a fourth elastic member; 330. a fourth terminal block; 331. a fifth junction box; 401. a third connecting member; 402. a third lateral securing member; 403. a fourth lateral securing member; 404. a twenty-seventh mounting plane; 405. a twenty-eighth mounting plane; 406. a twenty-ninth mounting plane; 407. a thirtieth mounting plane; 408. a third bracket; 409. a third load prism; 410. a thirty-first mounting plane; 411. a thirty-second mounting plane; 412. a thirty-third mounting plane; 413. a thirty-fourth mounting plane; 414. a thirty-fifth mounting plane; 415. a thirty-sixth mounting plane; 416. a thirty-seventh mounting plane; 417. a thirty-eighth mounting plane; 418. a tenth sapphire sheet; 419. an eleventh sapphire sheet; 420. a twelfth sapphire sheet; 421. a thirteenth sapphire sheet; 422. a fourteenth sapphire sheet; 423. a fifteenth sapphire sheet; 424. a fourth piezo-ceramic stack group; 425. a fifth piezo-electric ceramic stack group; 426. a seventh piezoelectric ceramic stack; 427. eighth piezo-electric ceramic stack; 428. a fifth elastic member; 429. a sixth elastic member; 430. a sixth junction box; 431. a seventh junction box; 501. and a fourth connecting piece.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures. Meanwhile, in the description of the present invention, the terms "first", "second", and the like are used only for distinguishing the description, and are not to be construed as indicating or implying relative importance.
In one aspect, as shown in fig. 1 to 13, the present embodiment provides a three-dimensional objective lens positioning device, which includes a longitudinal actuator 2, a first lateral actuator 3, and a second lateral actuator 4, where the longitudinal actuator 2 includes a longitudinal moving part 20 and a longitudinal driving part 10 for driving the longitudinal moving part 20 to perform a longitudinal linear motion; the first transverse actuating mechanism 3 comprises a first transverse moving component 40 and a first transverse driving component 30 which drives the first transverse moving component 40 to do transverse linear motion along a first direction; the second transverse actuating mechanism 4 comprises a second transverse moving component 60 and a second transverse driving component 50 for driving the second transverse moving component 60 to do transverse linear motion along the second direction; the bottom of the second lateral actuator 4 is connected to a base 7.
The top of the longitudinal actuating mechanism 2 is connected with a two-dimensional scanning table 6; the top of the two-dimensional scanning platform 6 is fixedly connected with the objective lens 1, and the objective lens 1, the two-dimensional scanning platform 6, the longitudinal actuating mechanism 2, the first transverse actuating mechanism 3, the second transverse actuating mechanism 4 and the base 7 are connected in a stacking manner in sequence from top to bottom.
The first direction and the second direction are perpendicular. As shown in fig. 2, the first direction may be an X-axis direction, and the second direction may be a Y-axis direction.
Optionally, a longitudinal fine focusing mechanism 5 is disposed inside the longitudinal actuating mechanism 2, and the two-dimensional scanning stage 6 is disposed above the longitudinal fine focusing mechanism 5. Specifically, the longitudinal moving member 20 may be disposed inside the longitudinal driving member 10, and the longitudinal fine focusing mechanism 5 may be disposed on the top of the longitudinal moving member 20.
Optionally, the longitudinal fine focusing mechanism 5 includes a first piezo ceramic stack 223, a second piezo ceramic stack 224, and a third piezo ceramic stack 225, where the first piezo ceramic stack 223 is driven by a first piezo stack actuator, the second piezo ceramic stack 224 is driven by a second longitudinal piezo stack actuator, and the third piezo ceramic stack 225 is driven by a third longitudinal piezo stack actuator, each longitudinal piezo stack actuator includes a connection plate on both sides, and the connection plate has a threaded hole and is connected to the first connection member 101 and the first loading prism 211, respectively.
Optionally, the top of the longitudinal moving part 20 is connected with a first connector 101, and the top of the first connector 101 is connected with the two-dimensional scanning table 6; the top of the first transverse driving part 30 is connected with a second connecting piece 301, and the top of the second connecting piece 301 is connected with the longitudinal driving part 10; the top of the second transverse driving part 50 is connected with a third connecting part 401, and the top of the third connecting part 401 is connected with the first transverse moving part 40; the bottom of the second traverse member 60 is connected to a fourth connecting member 501, and the fourth connecting member 501 is connected to the base 7.
The centers of the longitudinal actuating mechanism 2, the first transverse actuating mechanism 3, the second transverse actuating mechanism 4, the longitudinal fine focusing mechanism 5, the two-dimensional scanning table 6, the base 7, the first connecting piece 101, the second connecting piece 301, the third connecting piece 401 and the fourth connecting piece 501 are all provided with a light-transmitting aperture.
Optionally, the longitudinal driving part 10 comprises a first longitudinal fixing part 201, a second longitudinal fixing part 202 and a third longitudinal fixing part 203; the first longitudinal fixation member 201 comprises a first mounting plane 204 and a second mounting plane 205, the second longitudinal fixation member 202 comprises a third mounting plane 206 and a fourth mounting plane 207, and the third longitudinal fixation member 203 comprises a fifth mounting plane 208 and a sixth mounting plane 209. The first mounting plane 204 and the second mounting plane 205 are vertically arranged, the third mounting plane 206 and the fourth mounting plane 207 are vertically arranged, and the fifth mounting plane 208 and the sixth mounting plane 209 are vertically arranged; the first, third and fifth mounting planes 204, 206 and 208 are all bolted to the longitudinal driving member 10. The second, fourth and sixth mounting planes 205, 207 and 209 are coplanar, and the second, fourth and sixth mounting planes 205, 207 and 209 and the second connector 301 are all connected by bolts.
Optionally, the longitudinal driving member 10 comprises a first bracket 210, the first bracket 210 having a hexagonal cross-section; a first load prism 211 is arranged in the first bracket 210, a ninth piezoelectric ceramic stack is arranged between the first load prism 211 and the first bracket 210, one end of the ninth piezoelectric ceramic stack is fixedly connected with the first bracket 210, and the other end of the ninth piezoelectric ceramic stack is in close contact with the first load prism 211.
Optionally, the first bracket 210 includes a seventh mounting plane 212, both ends of the seventh mounting plane 212 are respectively provided with an eighth mounting plane 213 and a ninth mounting plane 214, both ends of the eighth mounting plane 213 are respectively provided with a seventh mounting plane 212 and a first extended plane, and an end of the first extended plane is provided with a tenth mounting plane 215; a seventh mounting plane 212 and a second continuation plane are respectively arranged at two ends of the ninth mounting plane 214, and an eleventh mounting plane 216 is arranged at the end of the second continuation plane; a twelfth mounting plane 217, a thirteenth mounting plane 218 and a fourteenth mounting plane 219 are disposed at the outer side of the first load prism 211; a first sapphire sheet 220 is bonded to the outer side of the twelfth mounting plane 217, a second sapphire sheet 221 is bonded to the outer side of the thirteenth mounting plane 218, and a third sapphire sheet 222 is bonded to the outer side of the fourteenth mounting plane 219; a first piezoelectric ceramic stack 223 and a second piezoelectric ceramic stack 224 are arranged between eighth mounting plane 213 and first sapphire sheet 220, and a third piezoelectric ceramic stack 225 and a fourth piezoelectric ceramic stack 226 are arranged between ninth mounting plane 214 and third sapphire sheet 222; an elastic member set is arranged between the tenth mounting plane 215 and the eleventh mounting plane 216, and comprises a first elastic member 228 and a second elastic member 229 which are parallel to each other; a first piezoelectric ceramic stack group 227 is arranged between the elastic element group and the second sapphire sheet 221.
Alternatively, the first and second elastic members 228 and 229 are connected to the tenth mounting plane 215 at one end and the eleventh mounting plane 216 at the other end; each of first piezoceramic stack 223, second piezoceramic stack 224, third piezoceramic stack 225 and fourth piezoceramic stack 226 comprises a tangential piezoceramic actuator and a connecting plate; said first set 227 of piezoceramic stacks comprises two tangential piezoceramic actuators and one connection plate; each tangential piezoelectric ceramic actuator comprises eight tangential piezoelectric ceramic plates and two sapphire insulation plates.
Optionally, a first terminal block 230 is disposed on the eighth mounting plane 213; a second wiring platform 231 is arranged on the ninth mounting plane 214; a third terminal block 232 is disposed on the tenth mounting plane 215.
Optionally, the first lateral actuation mechanism 3 further comprises a first lateral fixation member 302 and a second lateral fixation member 303; the first lateral securing member 302 includes a fifteenth mounting plane 304 and a sixteenth mounting plane 305, the second lateral securing member 303 includes a seventeenth mounting plane 306 and an eighteenth mounting plane 307; the fifteenth mounting plane 304 and the eighteenth mounting plane 307 are parallel to each other, and the fifteenth mounting plane 304 and the eighteenth mounting plane 307 are connected with the first lateral moving member 40 by bolts; the sixteenth mounting plane 305 and the seventeenth mounting plane 306 are coplanar, and the sixteenth mounting plane 305 and the seventeenth mounting plane 306 are connected to the third connecting member 401 through bolts.
Further, the first lateral drive member 30 includes a second bracket 308, the second bracket 308 having a trapezoidal cross-section; a second load prism 309 is arranged in the second bracket 308, an eighteenth piezoelectric ceramic stack is arranged between the second load prism 309 and the second bracket 308, one end of the eighteenth piezoelectric ceramic stack is fixedly connected with the second bracket 308, and the other end of the eighteenth piezoelectric ceramic stack is in close contact with the second load prism 309.
The second bracket 308 includes a nineteenth mounting plane 310; the nineteenth mounting plane 310 and the second connector 301 are connected by bolts; a twentieth mounting plane 311 and a twenty-first mounting plane 312 are respectively arranged at two ends of the nineteenth mounting plane 310, a nineteenth mounting plane 310 and a third continuation plane are respectively arranged at two ends of the twentieth mounting plane 311, and a twenty-second mounting plane 313 is arranged at the end part of the third continuation plane; a nineteenth mounting plane 310 and a fourth continuation plane are respectively arranged at two ends of the twenty-first mounting plane 312, and a twenty-third mounting plane 314 is arranged at the end of the fourth continuation plane; a twenty-fourth mounting plane 315 and a twenty-fifth mounting plane 316 are respectively arranged on the outer end faces of two sides of the second load prism 309, and a twenty-sixth mounting plane 317 is arranged in the middle of the lower section of the second load prism 309; a fourth sapphire sheet 318 and a fifth sapphire sheet 319 are bonded to the outer side of the twenty-fourth mounting plane 315, a sixth sapphire sheet 320 and a seventh sapphire sheet 321 are bonded to the outer side of the twenty-fifth mounting plane 316, and an eighth sapphire sheet 322 and a ninth sapphire sheet 323 are bonded to the outer side of the twenty-sixth mounting plane 317. A second piezo ceramic stack group 324 is disposed between the twentieth mounting plane 311 and the twenty-fourth mounting plane 315, the second piezo ceramic stack group 324 including a tenth piezo ceramic stack and an eleventh piezo ceramic stack, the tenth piezo ceramic stack being disposed between the twentieth mounting plane 311 and the fourth sapphire sheet 318, the eleventh piezo ceramic stack being disposed between the twentieth mounting plane 311 and the fifth sapphire sheet 319; a third piezo ceramic stack group 325 is disposed between the twenty-first mounting plane 312 and the twenty-fifth mounting plane 316, the third piezo ceramic stack group 325 including a twelfth piezo ceramic stack and a thirteenth piezo ceramic stack, the twelfth piezo ceramic stack being disposed between the twenty-first mounting plane 312 and the sixth sapphire sheet 320, the thirteenth piezo ceramic stack being disposed between the twenty-first mounting plane 312 and the seventh sapphire sheet 321; a third elastic member 328 and a fourth elastic member 329 which are parallel to each other are arranged between the twenty-second mounting plane 313 and the twenty-third mounting plane 314; a fifth piezoceramic stack 326 is disposed between third elastic element 328 and eighth sapphire sheet 322; a sixth piezo ceramic stack 327 is disposed between fourth spring 329 and ninth sapphire sheet 323.
Alternatively, one end of the third elastic member 328 is connected to the twenty-second mounting plane 313, the other end is connected to the twenty-third mounting plane 314, one end of the fourth elastic member 329 is connected to the twenty-second mounting plane 313, and the other end is connected to the twenty-third mounting plane 314; second set 324 and third set 325 each include two tangential piezo ceramic actuators and a connecting plate; fifth piezoceramic stack 326 and sixth piezoceramic stack 327 each include a tangential piezoceramic actuator and a connecting plate; each tangential piezoelectric ceramic actuator comprises six tangential piezoelectric ceramic plates and two sapphire insulation plates.
Optionally, a fourth terminal block 330 is disposed on the twentieth mounting plane 311; a fifth junction table 331 is disposed on the twenty-first mounting plane 312.
Optionally, the second lateral actuation mechanism 4 further comprises a third lateral fixation member 402 and a fourth lateral fixation member 403; the third lateral securing member 402 comprises a twenty-seventh mounting plane 404 and a twenty-eighth mounting plane 405, the fourth lateral securing member 403 comprises a twenty-ninth mounting plane 406 and a thirtieth mounting plane 407; the twenty-seventh and twenty-ninth mounting planes 404 and 406 are parallel to each other, and the twenty-seventh and twenty-ninth mounting planes 404 and 406 are each connected to the second traverse member 60 by a bolt. The twenty-eighth and thirtieth mounting planes 405 and 407 are coplanar, and the twenty-eighth and thirtieth mounting planes 405 and 407 are each connected to the fourth connector 501 by bolts.
Further, the second lateral drive member 50 includes a third bracket 408; the section of the third bracket 408 is trapezoidal; a third load prism 409 is arranged in the third bracket 408, a nineteenth piezoelectric ceramic stack is arranged between the third load prism 409 and the third bracket 408, one end of the nineteenth piezoelectric ceramic stack is fixedly connected with the third bracket 408, and the other end of the nineteenth piezoelectric ceramic stack is in close contact with the third load prism 409.
The third bracket 408 comprises a thirty-first mounting plane 410, and the thirty-first mounting plane 410 and the third connecting piece 401 are connected through bolts; a thirty-second mounting plane 411 and a thirty-third mounting plane 412 are respectively arranged at two ends of the thirty-first mounting plane 410, a thirty-first mounting plane 410 and a fifth continuation plane are respectively arranged at two ends of the thirty-second mounting plane 411, and a thirty-fourth mounting plane 413 is arranged at an end of the fifth continuation plane; a thirty-first mounting plane 410 and a sixth continuation plane are respectively arranged at two ends of the thirty-third mounting plane 412, a thirty-fifth mounting plane 414 is arranged at the end of the sixth continuation plane, the fifth continuation plane and the sixth continuation plane are parallel to each other, and the fifth continuation plane and the sixth continuation plane are both perpendicular to the thirty-first mounting plane 410 in space; a thirty-sixth mounting plane 415 and a thirty-seventh mounting plane 416 are respectively arranged on the outer end face of the third load prism 409, and a thirty-eighth mounting plane 417 is arranged in the middle of the lower end face of the third load prism 409; a tenth sapphire plate 418 and an eleventh sapphire plate 419 are bonded to the outer side of the thirty-sixth mounting plane 415, a twelfth sapphire plate 420 and a thirteenth sapphire plate 421 are bonded to the outer side of the thirty-seventh mounting plane 416, and a fourteenth sapphire plate 422 and a fifteenth sapphire plate 423 are bonded to the outer side of the thirty-eighth mounting plane 417. A fourth piezo ceramic stack group 424 is disposed between the thirty second mounting plane 411 and the thirty sixth mounting plane 415, the fourth piezo ceramic stack group 424 comprising a fourteenth piezo ceramic stack and a fifteenth piezo ceramic stack, the fourteenth piezo ceramic stack being disposed between the thirty second mounting plane 411 and the tenth sapphire sheet 418, the fifteenth piezo ceramic stack being disposed between the thirty second mounting plane 411 and the eleventh sapphire sheet 419; a fifth piezo ceramic stack group 425 is disposed between the thirty-third mounting plane 412 and the thirty-seventh mounting plane 416, the fifth piezo ceramic stack group 425 comprising a sixteenth piezo ceramic stack disposed between the thirty-third mounting plane 412 and the twelfth sapphire sheet 420 and a seventeenth piezo ceramic stack disposed between the thirty-third mounting plane 412 and the thirteenth sapphire sheet 421; a fifth elastic member 428 and a sixth elastic member 429 which are parallel to each other are arranged between the thirty-fourth installation plane 413 and the thirty-fifth installation plane 414; a seventh piezoceramic stack 426 is arranged between the fifth elastic piece 428 and the fourteenth sapphire sheet 422; an eighth piezoceramic stack 427 is provided between the sixth spring 429 and the fifteenth sapphire sheet 423.
Optionally, one end of the fifth elastic member 428 is connected to the thirty-fourth mounting plane 413, the other end is connected to the thirty-fifth mounting plane 414, one end of the sixth elastic member 429 is connected to the thirty-fourth mounting plane 413, and the other end is connected to the thirty-fifth mounting plane 414; fourth piezo-ceramic stack group 424 and fifth piezo-ceramic stack group 425 each comprise two tangential piezo-ceramic actuators and a connecting plate; seventh piezoceramic stack 426 and eighth piezoceramic stack 427 each comprise a tangential piezoceramic actuator and a connecting plate; each tangential piezoelectric ceramic actuator comprises six tangential piezoelectric ceramic plates and two sapphire insulation plates.
Optionally, a sixth junction block 430 is disposed on the thirty-second mounting plane 411; a seventh land 431 is disposed on the thirty-third mounting plane 412.
The working process of the three-dimensional objective lens positioning device in the embodiment is as follows: firstly, a sawtooth voltage pattern is applied to all the piezoceramic stacks in the second transverse actuation mechanism 3 at the same time, the waveform of the sawtooth voltage pattern is shown in fig. 14, the rising edge of the sawtooth voltage pattern is very steep, and the piezoceramic stacks in the second transverse actuation mechanism 4 can rapidly respond and generate tangential deformation, so that the third bracket 408 is driven by friction force to have a tiny relative displacement of about tens of nanometers in the guide rail direction Y relative to the original position. The opposite falling edge of the sawtooth voltage signal is slow, and the piezo-ceramic stack in the second lateral actuator 4 will slowly return to its original shape, so that there is relative movement between the piezo-ceramic stack and the third bracket 408, and after the whole process, the third bracket 408 has moved forward one step in the Y-direction. The above process is repeated continuously, and the third bracket 408 is continuously moved in the Y direction.
A similar process then also takes place in the first lateral actuation mechanism 3, enabling any continuous movement of the second bracket 308 in the X direction. Since the third bracket 408 is fixedly connected to the first lateral moving member 40 via the third link 401, it corresponds to the first lateral actuating mechanism 3 that is driven in the X direction based on the movement in the Y direction.
Further, on the basis of the X and Y movements, the piezoelectric ceramics of the longitudinal driving part 10 drives the longitudinal moving part 20 in the middle part to move up and down. The longitudinal moving means 20 incorporates the longitudinal fine focusing mechanism 5. The longitudinal actuation part 1 is used for a large range of movement of the objective lens in the Z-direction, while the longitudinal fine focus mechanism 5 is used for further fine adjustment of the focal plane of the objective lens in the Z-direction.
On the other hand, the present embodiment provides a three-dimensional objective lens positioning device mounting method including step S01, step S02, step S03, step S04, step S05, step S06, step S07, step S08, step S09, step S10, step S11, step S12, and step S13.
S01, fixing two tangential piezoelectric ceramic actuators on a connecting plate through insulating glue to form a first piezoelectric ceramic stacking group 227; first piezo-ceramic stack set 227 is connected at one end to first resilient member 228 and at the other end to second resilient member 229; a tangential piezoelectric ceramic actuator is fixed on the connecting plate through insulating glue to respectively form a first piezoelectric ceramic stack 223, a second piezoelectric ceramic stack 224, a third piezoelectric ceramic stack 225 and a fourth piezoelectric ceramic stack 226; fixing the first piezoelectric ceramic stack 223 and the second piezoelectric ceramic stack 224 on the eighth mounting plane 213; third piezoceramic stacks 225 and fourth piezoceramic stacks 226 are fixed to ninth mounting plane 214;
step S02, fixing a first sapphire sheet 220 on a twelfth mounting plane 217 through insulating glue, fixing a second sapphire sheet 221 on a thirteenth mounting plane 218 through insulating glue, and fixing a third sapphire sheet 222 on a fourteenth mounting plane 219 through insulating glue; bonding the first piezoelectric ceramic stack group 227 to the second sapphire sheet 221, and adjusting the pressure between the first piezoelectric ceramic stack group 227 and the second sapphire sheet 221, the pressure between the first piezoelectric ceramic stack 223 and the first sapphire sheet 220, the pressure between the second piezoelectric ceramic stack 224 and the first sapphire sheet 220, the pressure between the third piezoelectric ceramic stack 225 and the third sapphire sheet 222, and the pressure between the fourth piezoelectric ceramic stack 226 and the third sapphire sheet 222 by using bolts through changing the deformation degrees of the first elastic member 228 and the second elastic member 229;
step S03, fixing the first wiring platform 230 with pins to the outer side of the eighth mounting plane 213 through bolts; the second wire connecting table 231 with pins is fixed to the outer side of the ninth mounting plane 214 by bolts; the third wire connecting table 232 with pins is fixed to the outside of the tenth mounting plane 215 by bolts;
s04, fixing the two tangential piezoelectric ceramic actuators on a connecting plate through insulating glue to form a second piezoelectric ceramic stacking group 324; securing second piezo-ceramic stack group 324 to twentieth mounting plane 311; fixing the two tangential piezoceramic actuators on the connecting plate through insulating glue to form a third piezoceramic stack group 325; securing third piezoceramic stack set 325 on a twenty-first mounting plane 312; a tangential piezoceramic actuator is fixed on the connecting plate through insulating glue to respectively form a fifth piezoceramic stack 326 and a sixth piezoceramic stack 327; connecting fifth piezoceramic stack 326 with third elastic element 328 and sixth piezoceramic stack 327 with fourth elastic element 329;
step S05, fixing a fourth sapphire sheet 318 and a fifth sapphire sheet 319 on a twenty-fourth mounting plane 315 through insulating cement, fixing a sixth sapphire sheet 320 and a seventh sapphire sheet 321 on a twenty-fifth mounting plane 316 through insulating cement, and fixing an eighth sapphire sheet 322 and a ninth sapphire sheet 323 on a twenty-sixth mounting plane 317 through insulating cement; bonding fifth piezoelectric ceramic stack 326 to eighth sapphire sheet 322 and sixth piezoelectric ceramic stack 327 to ninth sapphire sheet 323; changing the deformation degree of third elastic member 328 and fourth elastic member 329 by bolts is used to adjust the pressure between fifth piezoceramic stack 326 and eighth sapphire sheet 322, the pressure between sixth piezoceramic stack 327 and ninth sapphire sheet 323, the pressure between second piezoceramic stack group 324 and fourth sapphire sheet 318, the pressure between second piezoceramic stack group 324 and fifth sapphire sheet 319, the pressure between third piezoceramic stack group 325 and sixth sapphire sheet 320, and the pressure between third piezoceramic stack group 325 and seventh sapphire sheet 321;
step S06, fixing a fourth wiring platform 330 with pins to the outer side of the twenty-first mounting plane 312 through bolts; the fifth wire connection table 331 with pins is fixed to the outside of the twentieth mounting plane 311 by bolts;
step S07, fixing the two tangential piezoelectric ceramic actuators on the connecting plate through insulating glue to form a fourth piezoelectric ceramic stacking group 424; securing fourth piezo-ceramic stack group 424 on thirty-second mounting plane 411; fixing two tangential piezoceramic actuators on the connecting plate through insulating glue to form a fifth piezoceramic stack group 425; securing fifth piezo-ceramic stack group 425 to thirty-third mounting plane 412; a tangential piezoceramic actuator is fixed on the connecting plate through insulating glue to respectively form a seventh piezoceramic stack 426 and an eighth piezoceramic stack 427; seventh piezo-ceramic stack 426 is connected to fifth spring 428, and eighth piezo-ceramic stack 427 is connected to sixth spring 429;
step S08, fixing a tenth sapphire sheet 418 and an eleventh sapphire sheet 419 on a thirty-sixth mounting plane 415 through insulating glue, fixing a twelfth sapphire sheet 420 and a thirteenth sapphire sheet 421 on a thirty-seventh mounting plane 416 through insulating glue, and fixing a fourteenth sapphire sheet 422 and a fifteenth sapphire sheet 423 on a thirty-eighth mounting plane 417 through insulating glue; bonding seventh piezoelectric ceramic stack 426 to fourteenth sapphire sheet 422, and bonding eighth piezoelectric ceramic stack 427 to fifteenth sapphire sheet 423; the deformation degree of the fifth elastic member 428 and the sixth elastic member 429 is changed through bolts to adjust the pressure between the seventh piezoelectric ceramic stack 426 and the fourteenth sapphire plate 422, the pressure between the eighth piezoelectric ceramic stack 427 and the fifteenth sapphire plate 423, the pressure between the fourth piezoelectric ceramic stack group 424 and the tenth sapphire plate 418, the pressure between the fourth piezoelectric ceramic stack group 424 and the eleventh sapphire plate 419, the pressure between the fifth piezoelectric ceramic stack group 425 and the twelfth sapphire plate 420, and the pressure between the fifth piezoelectric ceramic stack group 425 and the thirteenth sapphire plate 421;
step S09, fixing a sixth wiring platform 430 with pins to the outer side of a thirty-second mounting plane 411 through bolts; the seventh wire connecting platform 431 with pins is fixed to the outer side of the thirty-third mounting plane 412 by bolts.
S10, connecting a first connecting piece 101 with a longitudinal fine focusing mechanism 5; connecting the first longitudinal fixing member 201, the second longitudinal fixing member 202 and the third longitudinal fixing member 203 with the first bracket 210, respectively; connecting the first longitudinal fixing part 201, the second longitudinal fixing part 202 and the third longitudinal fixing part 203 with the second connecting piece 301 respectively;
s11, connecting the second connecting piece 301 with the second bracket 308; connecting the first lateral fixing member 302 and the second lateral fixing member 303 to both ends of the second load prism 309, respectively; connecting the first lateral fixing member 302 and the second lateral fixing member 303 with the third connecting member 401, respectively;
s12, connecting a third connecting piece 401 with a third bracket 408; connecting the third lateral securing member 402 and the fourth lateral securing member 403 to both ends of the third load prism 409; connecting the third transverse fixing part 402 and the fourth transverse fixing part 403 with the fourth connecting piece 501 respectively;
s13, mounting the two-dimensional scanning table 6 on a first connecting piece 101; mounting the objective lens 1 on a two-dimensional scanning table 6; the fourth connecting member 501 is connected to the base 7.
The implementation principle and the generated technical effects of the method for installing the three-dimensional objective lens positioning device provided by the embodiment of the invention are the same as those of the device embodiment, and for brief description, the corresponding contents in the device embodiment can be referred to where the method embodiment is not mentioned.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. A three-dimensional objective lens positioning device, comprising:
the longitudinal actuating mechanism (2), the longitudinal actuating mechanism (2) comprises a longitudinal moving part (20) and a longitudinal driving part (10) for driving the longitudinal moving part (20) to do longitudinal linear motion;
a first lateral actuating mechanism (3), wherein the first lateral actuating mechanism (3) comprises a first lateral moving component (40) and a first lateral driving component (30) for driving the first lateral moving component (40) to do lateral linear motion along a first direction; and
a second lateral actuating mechanism (4), wherein the second lateral actuating mechanism (4) comprises a second lateral moving component (60) and a second lateral driving component (50) for driving the second lateral moving component (60) to do lateral linear motion along a second direction;
the top of the longitudinal actuating mechanism (2) is connected with a two-dimensional scanning table (6); the longitudinal actuating mechanism (2), the first transverse actuating mechanism (3) and the second transverse actuating mechanism (4) are connected in a stacking manner in the order from top to bottom; the first direction and the second direction are perpendicular.
2. The three-dimensional objective lens positioning device according to claim 1, wherein: the inside of vertical actuating mechanism (2) is provided with vertical fine focus mechanism (5), two-dimensional scanning platform (6) set up the top of vertical fine focus mechanism (5).
3. The three-dimensional objective lens positioning device according to claim 1, wherein: the top of the longitudinal moving part (20) is connected with a first connecting piece (101), and the top of the first connecting piece (101) is connected with the two-dimensional scanning table (6); the top of the first transverse driving component (30) is connected with a second connecting piece (301), and the top of the second connecting piece (301) is connected with the longitudinal driving component (10); the top of the second transverse driving component (50) is connected with a third connecting piece (401), and the top of the third connecting piece (401) is connected with the first transverse moving component (40); the bottom of the second transverse moving component (60) is connected with a fourth connecting piece (501), and the fourth connecting piece (501) is connected with the base (7).
4. The three-dimensional objective lens positioning device according to claim 1, wherein: the longitudinal driving part (10) comprises a first bracket (210), and the cross section of the first bracket (210) is hexagonal; a first load prism (211) is arranged in the first bracket (210), a ninth piezoelectric ceramic stack is arranged between the first load prism (211) and the first bracket (210), one end of the ninth piezoelectric ceramic stack is fixedly connected with the first bracket (210), and the other end of the ninth piezoelectric ceramic stack is tightly contacted with the first load prism (211).
5. The three-dimensional objective lens positioning device according to claim 4, wherein: the first bracket (210) comprises a seventh mounting plane (212), an eighth mounting plane (213) and a ninth mounting plane (214) are respectively arranged at two ends of the seventh mounting plane (212), a seventh mounting plane (212) and a first continuation plane are respectively arranged at two ends of the eighth mounting plane (213), and a tenth mounting plane (215) is arranged at the end part of the first continuation plane; a seventh mounting plane (212) and a second continuation plane are respectively arranged at two ends of the ninth mounting plane (214), and an eleventh mounting plane (216) is arranged at the end part of the second continuation plane; a twelfth mounting plane (217), a thirteenth mounting plane (218) and a fourteenth mounting plane (219) are arranged on the outer side of the first load prism (211), a first sapphire sheet (220) is arranged on the outer side of the twelfth mounting plane (217) in an adhering mode, a second sapphire sheet (221) is arranged on the outer side of the thirteenth mounting plane (218) in an adhering mode, and a third sapphire sheet (222) is arranged on the outer side of the fourteenth mounting plane (219) in an adhering mode; a first piezoelectric ceramic stack (223) and a second piezoelectric ceramic stack (224) are arranged between the eighth mounting plane (213) and the first sapphire sheet (220), and a third piezoelectric ceramic stack (225) and a fourth piezoelectric ceramic stack (226) are arranged between the ninth mounting plane (214) and the third sapphire sheet (222); an elastic piece group is arranged between the tenth mounting plane (215) and the eleventh mounting plane (216), and comprises a first elastic piece (228) and a second elastic piece (229) which are parallel to each other; a first piezoelectric ceramic stack group (227) is arranged between the elastic element group and the second sapphire sheet (221).
6. The three-dimensional objective lens positioning device according to claim 3, wherein: the first lateral drive member (30) comprises a second bracket (308), the second bracket (308) having a trapezoidal cross-section; a second load prism (309) is arranged in the second bracket (308), an eighteenth piezoelectric ceramic stack is arranged between the second load prism (309) and the second bracket (308), one end of the eighteenth piezoelectric ceramic stack is fixedly connected with the second bracket (308), and the other end of the eighteenth piezoelectric ceramic stack is tightly contacted with the second load prism (309).
7. The three-dimensional objective lens positioning device according to claim 6, wherein: the second bracket (308) comprises a nineteenth mounting plane (310), and the nineteenth mounting plane (310) and the second connecting piece (301) are connected through a bolt; a twentieth mounting plane (311) and a twenty-first mounting plane (312) are respectively arranged at two ends of the nineteenth mounting plane (310), a nineteenth mounting plane (310) and a third continuation plane are respectively arranged at two ends of the twentieth mounting plane (311), and a twenty-second mounting plane (313) is arranged at the end part of the third continuation plane; a nineteenth mounting plane (310) and a fourth continuation plane are respectively arranged at two ends of the twenty-first mounting plane (312), and a twenty-third mounting plane (314) is arranged at the end part of the fourth continuation plane; a twenty-fourth mounting plane (315) and a twenty-fifth mounting plane (316) are respectively arranged on the outer end faces of two sides of the second load prism (309), and a twenty-sixth mounting plane (317) is arranged in the middle of the lower end face of the second load prism (309); a fourth sapphire sheet (318) and a fifth sapphire sheet (319) are bonded to the outer side of the twenty-fourth mounting plane (315), a sixth sapphire sheet (320) and a seventh sapphire sheet (321) are bonded to the outer side of the twenty-fifth mounting plane (316), and an eighth sapphire sheet (322) and a ninth sapphire sheet (323) are bonded to the outer side of the twenty-sixth mounting plane (317); a second piezo ceramic stack group (324) is disposed between the twentieth mounting plane (311) and the twenty-fourth mounting plane (315), the second piezo ceramic stack group (324) comprising a tenth piezo ceramic stack disposed between the twentieth mounting plane (311) and the fourth sapphire sheet (318) and an eleventh piezo ceramic stack disposed between the twentieth mounting plane (311) and the fifth sapphire sheet (319); a third piezo ceramic stack group (325) is disposed between the twenty-first mounting plane (312) and the twenty-fifth mounting plane (316), the third piezo ceramic stack group (325) comprising a twelfth piezo ceramic stack and a thirteenth piezo ceramic stack, the twelfth piezo ceramic stack disposed between the twenty-first mounting plane (312) and the sixth sapphire sheet (320), the thirteenth piezo ceramic stack disposed between the twenty-first mounting plane (312) and the seventh sapphire sheet (321); a third elastic piece (328) and a fourth elastic piece (329) which are parallel to each other are arranged between the twenty-second installation plane (313) and the twenty-third installation plane (314); a fifth piezoelectric ceramic stack (326) is arranged between the third elastic piece (328) and the eighth sapphire sheet (322); and a sixth piezoelectric ceramic stack (327) is arranged between the fourth elastic piece (329) and the ninth sapphire sheet (323).
8. The three-dimensional objective lens positioning device according to claim 3, wherein: the second lateral drive member (50) comprises a third bracket (408), the third bracket (408) having a trapezoidal cross-section; a third load prism (409) is arranged in the third bracket (408), a nineteenth piezoelectric ceramic stack is arranged between the third load prism (409) and the third bracket (408), one end of the nineteenth piezoelectric ceramic stack is fixedly connected with the third bracket (408), and the other end of the nineteenth piezoelectric ceramic stack is tightly contacted with the third load prism (409).
9. The three-dimensional objective lens positioning device according to claim 8, wherein: the third bracket (408) comprises a thirty-first mounting plane (410), and the thirty-first mounting plane (410) and the third connecting piece (401) are connected through a bolt; a thirty-second mounting plane (411) and a thirty-third mounting plane (412) are respectively arranged at two ends of the thirty-first mounting plane (410), a thirty-first mounting plane (410) and a fifth continuation plane are respectively arranged at two ends of the thirty-second mounting plane (411), and a thirty-fourth mounting plane (413) is arranged at the end part of the fifth continuation plane; a thirty-first mounting plane (410) and a sixth extension plane are respectively arranged at two ends of the thirty-third mounting plane (412), and a thirty-fifth mounting plane (414) is arranged at the end part of the sixth extension plane; a thirty-sixth mounting plane (415) and a thirty-seventh mounting plane (416) are respectively arranged on the outer end face of the third load prism (409), and a thirty-eighth mounting plane (417) is arranged in the middle of the lower end face of the third load prism (409); a tenth sapphire sheet (418) and an eleventh sapphire sheet (419) are bonded to the outer side of the thirty-sixth mounting plane (415), a twelfth sapphire sheet (420) and a thirteenth sapphire sheet (421) are bonded to the outer side of the thirty-seventh mounting plane (416), and a fourteenth sapphire sheet (422) and a fifteenth sapphire sheet (423) are bonded to the outer side of the thirty-eighth mounting plane (417); a fourth piezo ceramic stack group (424) is disposed between the thirty second mounting plane (411) and the thirty sixth mounting plane (415), the fourth piezo ceramic stack group (424) comprising a fourteenth piezo ceramic stack and a fifteenth piezo ceramic stack, the fourteenth piezo ceramic stack disposed between the thirty second mounting plane (411) and the tenth sapphire sheet (418), the fifteenth piezo ceramic stack disposed between the thirty second mounting plane (411) and the eleventh sapphire sheet (419); a fifth piezo ceramic stack group (425) disposed between the thirty-third mounting plane (412) and the thirty-seventh mounting plane (416), the fifth piezo ceramic stack group (425) comprising a sixteenth piezo ceramic stack and a seventeenth piezo ceramic stack, the sixteenth piezo ceramic stack disposed between the thirty-third mounting plane (412) and the twelfth sapphire sheet (420), the seventeenth piezo ceramic stack disposed between the thirty-third mounting plane (412) and the thirteenth sapphire sheet (421); a fifth elastic piece (428) and a sixth elastic piece (429) which are parallel to each other are arranged between the thirty-fourth installation plane (413) and the thirty-fifth installation plane (414); a seventh piezoceramic stack (426) is arranged between the fifth elastic piece (428) and the fourteenth sapphire sheet (422); an eighth piezoceramic stack (427) is arranged between the sixth elastic element (429) and the fifteenth sapphire sheet (423).
10. A method of mounting a three-dimensional objective positioning device, comprising:
connecting one end of the first piezoceramic stack group (227) to a first elastic element (228) and the other end to a second elastic element (229); fixing the first piezoceramic stack (223) and the second piezoceramic stack (224) on an eighth mounting plane (213); -fixing a third piezoceramic stack (225) and a fourth piezoceramic stack (226) on a ninth mounting plane (214);
fixing a first sapphire sheet (220) on a twelfth mounting plane (217) through insulating glue, fixing a second sapphire sheet (221) on a thirteenth mounting plane (218) through insulating glue, and fixing a third sapphire sheet (222) on a fourteenth mounting plane (219) through insulating glue; bonding the first piezoelectric ceramic stack group (227) and the second sapphire sheet (221), and adjusting the pressure between the first piezoelectric ceramic stack group (227) and the second sapphire sheet (221), the pressure between the first piezoelectric ceramic stack (223) and the first sapphire sheet (220), the pressure between the second piezoelectric ceramic stack (224) and the first sapphire sheet (220), the pressure between the third piezoelectric ceramic stack (225) and the third sapphire sheet (222) and the pressure between the fourth piezoelectric ceramic stack (226) and the third sapphire sheet (222) by changing the deformation degrees of the first elastic member (228) and the second elastic member (229) through bolts;
fixing the first wiring platform (230) with pins to the outer side of the eighth mounting plane (213) through bolts; fixing the second wiring platform (231) with pins to the outer side of the ninth mounting plane (214) through bolts; bolting a third wire connection platform (232) with pins to the outside of the tenth mounting plane (215);
-fixing a second set (324) of piezo-ceramic stacks on a twentieth mounting plane (311); securing a third set of piezo ceramic stacks (325) on a twenty-first mounting plane (312); connecting the fifth piezoceramic stack (326) to a third elastic element (328) and the sixth piezoceramic stack (327) to a fourth elastic element (329);
fixing a fourth sapphire sheet (318) and a fifth sapphire sheet (319) on a twenty-fourth mounting plane (315) through insulating cement, fixing a sixth sapphire sheet (320) and a seventh sapphire sheet (321) on a twenty-fifth mounting plane (316) through insulating cement, and fixing an eighth sapphire sheet (322) and a ninth sapphire sheet (323) on a twenty-sixth mounting plane (317) through insulating cement; bonding a fifth piezoelectric ceramic stack (326) to an eighth sapphire sheet (322), and bonding a sixth piezoelectric ceramic stack (327) to a ninth sapphire sheet (323); changing the deformation degree of the third elastic member (328) and the fourth elastic member (329) through bolts to adjust the pressure between the fifth piezoelectric ceramic stack (326) and the eighth sapphire sheet (322), the pressure between the sixth piezoelectric ceramic stack (327) and the ninth sapphire sheet (323), the pressure between the second piezoelectric ceramic stack group (324) and the fourth sapphire sheet (318), the pressure between the second piezoelectric ceramic stack group (324) and the fifth sapphire sheet (319), the pressure between the third piezoelectric ceramic stack group (325) and the sixth sapphire sheet (320) and the pressure between the third piezoelectric ceramic stack group (325) and the seventh sapphire sheet (321);
bolting a fourth wire connecting platform (330) with pins to the outer side of the twenty-first mounting plane (312); fixing a fifth wiring platform (331) with pins to the outer side of the twentieth mounting plane (311) through bolts;
securing a fourth piezo-ceramic stack group (424) to a thirty-second mounting plane (411); securing a fifth set of piezo ceramic stacks (425) to a thirty-third mounting plane (412); connecting the seventh piezoceramic stack (426) to the fifth spring element (428) and the eighth piezoceramic stack (427) to the sixth spring element (429);
fixing a tenth sapphire sheet (418) and an eleventh sapphire sheet (419) on a thirty-sixth mounting plane (415) through insulating cement, fixing a twelfth sapphire sheet (420) and a thirteenth sapphire sheet (421) on a thirty-seventh mounting plane (416) through insulating cement, and fixing a fourteenth sapphire sheet (422) and a fifteenth sapphire sheet (423) on a thirty-eighth mounting plane (417) through insulating cement; bonding a seventh piezoelectric ceramic stack (426) to a fourteenth sapphire sheet (422), and bonding an eighth piezoelectric ceramic stack (427) to a fifteenth sapphire sheet (423); changing the deformation degree of the fifth elastic member (428) and the sixth elastic member (429) through bolts to adjust the pressure between the seventh piezoelectric ceramic stack (426) and the fourteenth sapphire sheet (422), the pressure between the eighth piezoelectric ceramic stack (427) and the fifteenth sapphire sheet (423), the pressure between the fourth piezoelectric ceramic stack group (424) and the tenth sapphire sheet (418), the pressure between the fourth piezoelectric ceramic stack group (424) and the eleventh sapphire sheet (419), the pressure between the fifth piezoelectric ceramic stack group (425) and the twelfth sapphire sheet (420), and the pressure between the fifth piezoelectric ceramic stack group (425) and the thirteenth sapphire sheet (421);
fixing a sixth wiring platform (430) with pins to the outer side of a thirty-second mounting plane (411) through bolts; bolting a seventh stitched lug (431) to an outer side of the thirty-third mounting plane (412);
connecting the first connecting piece (101) with the longitudinal fine focusing mechanism (5); connecting a first longitudinal fixing part (201), a second longitudinal fixing part (202) and a third longitudinal fixing part (203) with a first bracket (210) respectively; respectively connecting the first longitudinal fixing part (201), the second longitudinal fixing part (202) and the third longitudinal fixing part (203) with the second connecting piece (301);
connecting the second connecting piece (301) with the second bracket (308); connecting a first lateral fixing member (302) and a second lateral fixing member (303) to both ends of a second load prism (309), respectively; connecting the first transverse fixing component (302) and the second transverse fixing component (303) with a third connecting piece (401) respectively;
the third connecting piece (401) is connected with the third bracket (408); connecting a third lateral securing member (402) and a fourth lateral securing member (403) to both ends of a third load prism (409), respectively; connecting the third transverse fixing part (402) and the fourth transverse fixing part (403) with a fourth connecting piece (501) respectively;
mounting a two-dimensional scanning table (6) on a first connecting piece (101); mounting an objective lens (1) on a two-dimensional scanning table (6); the fourth connecting piece (501) is connected with the base (7).
CN202010922734.0A 2020-09-04 2020-09-04 Three-dimensional objective lens positioning device and mounting method thereof Active CN112526699B (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010283938A (en) * 2009-06-03 2010-12-16 Nikon Corp Piezoelectric actuator, lens barrel and camera
CN102053452A (en) * 2009-11-10 2011-05-11 三星电机株式会社 Image stabilization mechanism of camera module
CN106646860A (en) * 2016-11-18 2017-05-10 清华大学 Jogging device, microscope scanning head and microscope apparatus
CN210323540U (en) * 2019-08-12 2020-04-14 睿恩光电有限责任公司 Piezoelectric USM lens driving device for auto-focusing and camera device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010283938A (en) * 2009-06-03 2010-12-16 Nikon Corp Piezoelectric actuator, lens barrel and camera
CN102053452A (en) * 2009-11-10 2011-05-11 三星电机株式会社 Image stabilization mechanism of camera module
CN106646860A (en) * 2016-11-18 2017-05-10 清华大学 Jogging device, microscope scanning head and microscope apparatus
CN210323540U (en) * 2019-08-12 2020-04-14 睿恩光电有限责任公司 Piezoelectric USM lens driving device for auto-focusing and camera device

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