CN112525325A - Optical principle-based vibration measurement system for rotor shaft of rotating equipment - Google Patents
Optical principle-based vibration measurement system for rotor shaft of rotating equipment Download PDFInfo
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- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
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Abstract
The invention provides a system for measuring rotor shaft vibration of rotating equipment based on an optical principle, which comprises: the laser is used for injecting laser beams to a measured object; the focusing lens is used for receiving reflected light of the incident laser beam on the surface of the object to be measured and imaging the reflected light on the light receiving element; the signal processor is in signal connection with the light receiving element and is used for receiving the electric signal of the spot position of the imaging point output by the light receiving element and calculating the surface displacement of the object to be measured according to the electric signal; and the terminal is in signal connection with the signal processor and is used for displaying the displacement data of the light spots of the imaging points in real time and performing spectrum analysis on the displacement data. Based on the optical principle, the invention realizes the non-contact measurement and analysis of the shaft vibration of the rotor of the high-speed rotating equipment; the device has the advantages of simple structure, low cost, high precision, simple operation and movable measurement function.
Description
Technical Field
The invention relates to the technical field of vibration measurement, in particular to a rotor shaft vibration measurement system of rotary equipment based on an optical principle.
Background
Large-scale rotating machinery equipment is important equipment in industrial production in China and is widely distributed in the industries of electric power, chemical engineering, petroleum, metallurgy and the like in China. In a thermal power plant and a nuclear power station, a plurality of large pumps and fans are applied to a production field, particularly, a steam turbine drags a generator to produce electric energy, and a steam turbine generator unit provides about 80% of electric energy for human beings, so that the steam turbine generator unit is important power mechanical equipment in modern countries. The power generation enterprise monitors the rotor of the large-scale rotating equipment mainly through acquiring a series of state characteristic parameters, wherein the state characteristic parameters comprise vibration, temperature, eccentricity, axial displacement and the like, particularly vibration signals are taken as main parameters, and the rotor is called as a thermometer of the rotor, and the health condition of the rotor is directly reflected. When one unit normally operates, the vibration value and the vibration change value of the unit are small, and once the vibration value of the unit becomes large or the vibration becomes unstable, the equipment has a certain fault. A large amount of information is stored in the vibration signals of the equipment, characteristic information in the vibration data is detected, the reason for generating vibration is analyzed, and more attention is paid to production enterprises.
In the existing spectrum analysis instrument applied to the industrial field, a probe adopts an acceleration type piezoelectric system, when in measurement, the probe needs to be fixed on a measured surface and vibrates along with the measured surface, and the probe converts a sensed vibration signal into an electric signal for analysis and processing. The acceleration type system has high vibration sensitivity in the high-frequency measurement range and obvious advantages. However, the contact measurement method has the disadvantages that the probe and the measured surface must be fixed in a handheld or other mode, and the vibration of the high-speed rotating shaft cannot be directly measured, so that the use of the instrument has certain limitation.
Disclosure of Invention
Based on the technical problems in the background art, the invention provides a rotor shaft vibration measuring system of a rotating device based on an optical principle.
The invention provides a system for measuring rotor shaft vibration of rotating equipment based on an optical principle, which comprises:
the laser is used for injecting laser beams to a measured object;
the focusing lens is used for receiving reflected light of the incident laser beam on the surface of the object to be measured and imaging the reflected light on the light receiving element;
the signal processor is in signal connection with the light receiving element and is used for receiving the electric signal of the spot position of the imaging point output by the light receiving element and calculating the surface displacement of the object to be measured according to the electric signal;
and the terminal is in signal connection with the signal processor and is used for displaying the displacement data of the light spots of the imaging points in real time and performing spectrum analysis on the displacement data.
Preferably, the displacement y on the surface of the measured object satisfies
Wherein: alpha is the angle between the incident laser beam of the laser and the optical axis of the focusing lens, beta is the angle between the optical axis of the focusing lens and the light receiving element, and l1For focusing the object distance of the lens,/2The x is the displacement of the imaging spot on the light receiving element for the image distance of the focusing lens.
Preferably, |1、l2The following relationship is satisfied:
l1tanα＝l2tanβ；
where f is the focal length of the focusing lens.
Preferably, the angle α between the incident laser beam of the laser and the optical axis of the focusing lens is 20 ° to 40 °.
Preferably, the laser device further comprises a housing, the laser device, the focusing lens, the light receiving element and the signal processor are all mounted in the housing, and the housing is provided with a light through port through which incident laser beams and diffuse reflection light of the laser device pass.
Preferably, a narrow-band filter is installed in the light-transmitting opening.
Preferably, the bottom end of the shell is provided with a fixing piece.
Preferably, the shell is provided with a threading hole.
Preferably, the laser is a semiconductor laser with wavelength of 632-635 nm.
Preferably, the light receiving element employs a position sensitive detector.
The invention provides a rotor shaft vibration measuring system of rotating equipment based on an optical principle, which is characterized in that a laser beam irradiates on the surface of a measured object to form a light spot on the surface of the measured object, the laser generates diffuse reflection or mirror reflection at the position of the light spot, reflected light is imaged on a light receiving element through a focusing lens, when the measured object moves, an incident light spot moves, an image formed on the light receiving element also moves, the position of the light spot of an imaging point is output by the light receiving element, and finally the actual displacement of the measured surface is calculated according to the object-image relationship.
Based on the optical principle, the invention realizes the non-contact measurement and analysis of the shaft vibration of the rotor of the high-speed rotating equipment; the device has the advantages of simple structure, low cost, high precision, simple operation and movable measurement function.
Drawings
FIG. 1 is a schematic structural diagram of a rotor shaft vibration measurement system of a rotating device based on an optical principle according to the present invention;
FIG. 2 is a partial structural schematic diagram of a rotor shaft vibration measurement system of a rotating device based on an optical principle according to the present invention;
FIG. 3 is a schematic structural diagram of a housing of a rotor shaft vibration measurement system of a rotating device based on an optical principle according to the present invention;
FIG. 4 is a direct laser schematic diagram of a rotor shaft vibration measurement system of a rotating device based on optical principle according to the present invention;
FIG. 5 is a schematic diagram of an oblique laser beam of a rotor shaft vibration measurement system of a rotating device based on optical principles;
FIG. 6 shows the minimum sensitivity S at an operating angle α of 20 ° according to the present inventionminObject following distance l1And a graph of the change in focal length f;
FIG. 7 shows the minimum sensitivity S at different focal lengths f of the lens for an operating angle α of 20 ° according to the present inventionminObject distance l with lens1A graph of the relationship of the changes;
FIG. 8 shows the operating angle α of the present invention at a different angle of 20 °1Lower minimum sensitivity SminA graph of the relationship as a function of the focal length f of the lens;
FIG. 9 shows the minimum sensitivity S for an operating angle α of 30 ° according to the present inventionminObject following distance l1And a graph of the change in focal length f;
FIG. 10 shows the minimum sensitivity S at different focal lengths f of the lens for an operating angle α of 30 ° according to the present inventionminObject distance l with lens1A graph of the relationship of the changes;
FIG. 11 shows the operating angle α of the present invention at 30 ° with a difference of1Lower minimum sensitivity SminA graph of the relationship as a function of the focal length f of the lens;
FIG. 12 shows the minimum sensitivity S for a working angle α of 40 ° according to the present inventionminObject following distance l1And a graph of the change in focal length f;
FIG. 13 shows the minimum sensitivity S at different focal lengths f for the lens of the present invention at an operating angle α of 40minObject distance l with lens1A graph of the relationship of the changes;
FIG. 14 shows the angle α of 40 ° for the present invention at different angles1Lower minimum sensitivity SminGraph of the relationship as a function of the focal length f of the lens.
Detailed Description
Referring to fig. 1-3, the present invention provides an optical principle-based vibration measurement system for a rotor shaft of a rotating device, comprising:
the laser 1 is used for injecting laser beams to a measured object.
The device comprises a focusing lens 2 and a light receiving element 3, wherein the focusing lens is used for receiving the reflected light of the incident laser beam on the surface of the measured object and imaging the reflected light on the light receiving element 3.
And the signal processor 4 is in signal connection with the light receiving element 3 and is used for receiving the electric signal of the imaging point light spot position output by the light receiving element 3 and calculating displacement data of the imaging point light spot on the light receiving element 3 according to the electric signal.
And the terminal is in signal connection with the signal processor and is used for displaying the displacement data of the light spots of the imaging points in real time and performing spectrum analysis on the displacement data. The terminal adopts a notebook computer, the system is powered by the USB, and the data measured by the system is transmitted to the computer end by the USB, so that the problems of power supply and data transmission are solved, and the whole measuring system has handheld mobile measurement.
This embodiment still includes ferrous metal casing 5, laser instrument 1, focusing lens 2, light receiving element 3, signal processor 4 are all installed in casing 5, offer the logical light mouth that supplies the incident laser beam and the diffuse reflection light of laser instrument 1 to pass on casing 5, install narrowband filter 6 in the logical light mouth.
In this embodiment, the bottom end of the housing 5 is provided with a fixing member 7, and the housing is provided with a threading hole 8.
In this embodiment, the laser 1 selects a DI635-1-3 semiconductor laser as a laser light source, and the wavelength of the laser light source is 635 nm.
In this embodiment, the focusing lens 2 of type GLA12-025-035-A with a design wavelength around 635nm is used.
In this embodiment, the light receiving element 3 adopts a position sensitive detector PSD. The PSD is an element based on the transverse photoelectric effect, is a continuous device, and the output current can continuously and directly calculate the gravity center position of the light spot.
When the measured object moves, the incident light spot moves, the image formed on the light receiving element also moves, the light receiving element outputs the position of the imaging point light spot, and finally the actual displacement of the measured surface is calculated according to the object-image relationship.
According to the difference of the incident angle of the laser beam on the measured surface, the laser can be divided into direct-projection type and oblique-projection type.
1. Direct laser
The direct laser schematic diagram is shown in fig. 4, the laser beam is vertically incident to the surface of the object to be measured, when the surface of the object to be measured is rough, diffuse reflection occurs at the incident point, the incident light of the light receiving element PSD is adjusted within a proper angle range, and when enough light intensity enters the PSD, an incident light spot is formed on the photosensitive surface. When the surface of the object to be measured is displaced in the incident direction of the laser beam due to vibration, the incident light spot on the photosensitive surface is also displaced, the PSD converts the displacement signal into a current signal, and the displacement of the surface of the object to be measured is calculated by the signal processor.
The relation between the displacement y of the measured surface and the position change x of the corresponding reflected light spot on the light receiving element can be obtained from the geometric relation
Wherein: alpha is the angle between the incident laser beam of the laser and the optical axis of the focusing lens, beta is the angle between the optical axis of the focusing lens and the light receiving element, and l1For focusing the object distance of the lens,/2The image distance of the focusing lens is, x is the displacement of the imaging point a 'to B', and y is the displacement of the measured surface a to B.
Furthermore, according to the Gaussian theorem, when the light spot projected on the measured surface is exactly located on the optical axis of the lens (this position can be used as the reference zero point for measurement), it is necessary to make the light spot form a clear image on the PSD through the lens
Where f is the focal length of the focusing lens. This gives:
2. oblique laser
The principle of oblique laser is shown in fig. 5, the laser beam is not vertically incident on the surface of the object to be measured, but is incident on the surface of the object to be measured at a certain angle, and generally the surface of the object to be measured is required to be a mirror surface with good smoothness, the incident ray angle of the PSD is specific, otherwise the measurement cannot be completed because no ray with sufficient light intensity enters the PSD.
Similarly, the relation between the displacement y of the measured surface and the position change x of the corresponding reflected light spot on the light receiving element can be obtained from the geometric relation
Wherein: θ is the angle of incidence of the laser.
In summary, (1) oblique-incidence lasers are suitable for smooth surfaces that can undergo specular reflection, and direct-incidence lasers are suitable for rough surfaces that can undergo diffuse reflection. (2) The laser beam has certain size, and laser facula geometric dimension can increase gradually along with the incident angle increase, forms oval form facula, and when the laser beam vertical incidence, the facula is minimum. The elliptic light spot can produce great diffuse speckle after the PSD formation of image is incided to at rough surface through diffuse reflection, brings the error for the measurement, should choose the direct-injection formula more to have the advantage this moment. (3) When the object to be measured is displaced, the light spots on the object are irradiated at different positions, so that the displacement of a specific point cannot be known, and the light spots and the positions of the direct laser are in one-to-one correspondence. (4) As can be seen from comparison between fig. 2 and fig. 3, when the surface of the object to be measured has the same displacement, the displacement of the light spot generated on the PSD photosensitive surface is greater in the oblique mode than in the direct mode. Therefore, the resolution of the oblique laser is greater than that of the direct laser, and accordingly, the measurement range is smaller than that of the direct laser.
In the vertical analysis, the surface of the steam turbine rotor shaft to be measured belongs to a diffuse reflection measured surface, and in the actual production, the vibration of the rotating shaft refers to the vibration of a certain point on the rotating shaft, so the direct laser design is selected in the embodiment. In order to maintain focus all the time, either direct or oblique lasers must satisfy the scheimpfigug condition: l1tanα＝l2tanβ。
In the size limit range of the photosensitive element, parameters such as a working distance L, a working angle alpha, a receiving angle beta, a focusing lens and the like are reasonably selected to obtain the optimal sensitivity.
The relation of the variation x of the light spot on the PSD photosensitive surface when the displacement y of the measured surface occurs can be obtained by the triangular geometrical relation of the direct laser
The relation of x to y transformed by the formula is
The derivative of Y is calculated on both sides, and the system sensitivity S can be obtained
Simultaneous equations
Further simplified, can obtain
From the above formula, the system sensitivity S is related to the working angle α and the lens object distance l1A lens focal length f and a polynomial of the movement displacement y of the measured object. As can be seen from the above equation, when the system parameter is constant, the sensitivity S decreases nonlinearly as it increases, and the minimum value S is obtained at the maximum displacement (y 1.5mm)min。
SminThe size is the first parameter to be considered in designing the system, the size of the selected PSD photosurface is 9mm, the measurement range of the system design is +/-1.5 mm, and two reasons are considered:
(1) we discuss that at maximum displacement, the minimum sensitivity is obtained;
(2) the light spot is within 90% of the PSD photosensitive surface from the center, so that better linearity is achieved;
therefore, the minimum sensitivity SminThe value is preferably between 2 and 2.5.
Each parameter pair S is discussed separately belowminAnd selecting the optimal parameters.
1. Working distance L
The working distance is the distance between the side edge of the system close to the measured object and the measured object. A larger working distance will also result in a corresponding increase in the lens object distance. Considering the working environment of the site, the temporary working distance L is 30 mm.
2、SminAnd alpha, l1、f
The embodiment utilizes laser beams to irradiate the surface of a measured object, and the reflected laser beams have bright enough light rays to enter a PSD photosurface for measurement.
The light spot formed by the light beam projected on an ideal diffuse reflection surface is called a lambertian body, which refers to the phenomenon that incident light takes an incident point as a center and reflects light rays isotropically to the periphery in the whole hemispherical space, the light intensity distribution of the reflected light is irrelevant to the incident light rays and only relevant to the light intensity and the reflection angle in the normal direction, and the cosine formula is satisfied:
Iα＝INcosα
wherein INIs the intensity of the light in the direction of the normal to the reflector surface, IαIs the intensity of light at an angle alpha to the normal direction and is also known as a cosine radiator.
However, a general rough reflecting surface is a non-ideal diffuse reflecting surface, the distribution of diffuse reflection light is concentrated near the normal direction, and the light intensity under the same reflection angle is obviously smaller than that of the diffuse reflection light of an ideal diffuse reflector. The working angle alpha cannot be too large.
Meanwhile, in order to obtain a clear object image at any moment, the light path needs to satisfy a Scheimpflug constant focusing light path formula, if the working angle alpha is too small, the light beam incidence angle beta of the PSD photosurface is too small, and a good imaging effect cannot be obtained, so the working angle alpha is preferably between 20 and 40 degrees.
(1) Working angle alpha is 20 °
Minimum sensitivity SminObject following distance l1And the focal length f are plotted in fig. 6. Given different focal lengths f of the lens, the minimum sensitivity SminObject distance l with lens1The relationship of the changes is shown in fig. 7. Given different l1Minimum sensitivity SminThe relationship with the change of the lens focal length f is shown in fig. 8.
Therefore, the focal length f is 25-40mm, the working distance is 40-55mm, and the minimum sensitivity is 2-3. However, in the interval, the incidence angle beta of the photosurface is small and is between 0 and 12.5 degrees, and the imaging is not ideal and is not considered.
(2) Working angle alpha is 30 °
Minimum sensitivitySminObject following distance l1And the focal length f are shown in fig. 9. Given different focal lengths f of the lens, the minimum sensitivity SminObject distance l with lens1The relationship of the changes is shown in fig. 10. Given different l1Minimum, isSensitivity SminThe relationship with the change of the lens focal length f is shown in fig. 11.
Therefore, the focal length f is 30-45mm, the working distance is 45-60mm, and the minimum sensitivity is 2-3. The incidence angle beta of the photosensitive surface is between 16 and 20 degrees, and the imaging condition is ideal.
Table-angle of incidence α -30 ° parameter comparison
(3) Working angle alpha is 40 °
Minimum sensitivity SminObject following distance l1And the focal length f are shown in fig. 12. Given different focal lengths f of the lens, the minimum sensitivity SminObject distance l with lens1The relationship of the changes is shown in fig. 13. Given different l1Minimum sensitivity SminThe relationship with the change of the lens focal length f is shown in fig. 14.
Therefore, the focal length f is 30-50mm, and the object distance l is1At 45-70mm, the minimum sensitivity is between 2-3. The incidence angle beta of the photosensitive surface is between 22 and 26 degrees, and the imaging condition is optimal.
Table two angle of incidence α -40 parameter comparison
| Array of elements | Focal length f | Object distance l1 | Angle of incidence beta | Dimension α [ (/)1+l2) | |
| 1 | 30 | 46 | 24.2 | 5292 | 2.568 |
| 2 | 30 | 47 | 25.4 | 5200 | 2.318 |
| 3 | 35 | 54 | 24.4 | 6120 | 2.540 |
| 4 | 35 | 55 | 25.4 | 6484 | 2.327 |
| 5 | 40 | 63 | 25.7 | 6904 | 2.334 |
By combining the above analysis, the minimum sensitivity of the parameters of the working angle α -30 ° hours group 1 and the working angle α -5, the working angle α -40 ° hours group 2, the working angle α -4, and the working angle α -5 are within the target range, and in order to improve the sensitivity and the accuracy as much as possible, we screened the working angle α -30 ° working angle array 5, and the working angle α -40 ° working angle array 5. In the case of an approximately minimum sensitivity, a smaller system volume can be better adapted to different measurement environments, so that α × (l) is selected1+l2) The volume of the system is characterized and an array 5 with an operating angle alpha of 30 deg. is selected.
3. y and alpha, beta, l1、l2
In the process of manufacturing and installing the system, the processing error of each element and the human error in the process of installing personnel are inevitable, so that the parameters alpha, beta and l need to be researched1、l2The influence factor of the error introduction on the displacement y of the measured object is as follows:
α、β、l2the denominator of the influence factors of the error introduction on the displacement y of the measured object is a square term, so the influence factors of the three parameters are small, and l is mainly considered1And the influence factor on the displacement y of the measured object. Image distance l1Far greater than the displacement x of the photosensitive surface, and can be simplified into
If it is desired to reduce l1Influence ability of error on displacement y of the object to be measured, l2The larger α is better, but also causes an increase in the system size.
And (3) synthesizing the analysis, and selecting the parameters of the system: working angle α is 30 °, incident angle β is approximately 18.29 °, object distance l155mm, 35mm focal length f, image distance l296mm, and the measurement range y is +/-1.5 mm;
the above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (10)
1. An optical-principle-based rotary-device rotor-shaft vibration measurement system, comprising:
the laser is used for injecting laser beams to a measured object;
the focusing lens is used for receiving reflected light of the incident laser beam on the surface of the object to be measured and imaging the reflected light on the light receiving element;
the signal processor is in signal connection with the light receiving element and is used for receiving the electric signal of the spot position of the imaging point output by the light receiving element and calculating the surface displacement of the object to be measured according to the electric signal;
and the terminal is in signal connection with the signal processor and is used for displaying the displacement data of the light spots of the imaging points in real time and performing spectrum analysis on the displacement data.
2. An optical-principle-based rotary-device rotor-shaft vibration measurement system according to claim 1, wherein the measured-object-surface displacement amount y satisfies
Wherein: alpha is the angle between the incident laser beam of the laser and the optical axis of the focusing lens, beta is the angle between the optical axis of the focusing lens and the light receiving element, and l1For focusing the object distance of the lens,/2The x is the displacement of the imaging spot on the light receiving element for the image distance of the focusing lens.
3. An optical-principle-based rotary-device rotor-shaft vibration measurement system as claimed in claim 2, wherein/1、l2The following relationship is satisfied:
l1tanα＝l2tanβ；
where f is the focal length of the focusing lens.
4. An optical-principle-based rotary-device rotor-shaft vibration measurement system as claimed in claim 2, characterized in that the angle α between the incident laser beam of the laser and the optical axis of the focusing lens is 20 ° -40 °.
5. The system for measuring the vibration of the rotor shaft of the rotating equipment based on the optical principle of any one of claims 1 to 4, further comprising a housing, wherein the laser, the focusing lens, the light receiving element and the signal processor are all mounted in the housing, and the housing is provided with a light through port for passing an incident laser beam and diffuse reflected light of the laser.
6. An optical-principle-based rotary-device rotor-shaft vibration measurement system according to claim 5, wherein a narrow-band filter is installed in the light-passing opening.
7. An optical-principle-based rotary-device rotor-shaft vibration measurement system according to claim 6, wherein the bottom end of the housing is provided with a fixture.
8. The optical-principle-based rotor shaft vibration measurement system of a rotating device according to claim 6, wherein the housing is provided with a threading hole.
9. Optical-principle-based rotor-shaft vibration measuring system of a rotating device according to any of claims 1-4, characterized in that the laser is a semiconductor laser with wavelength of 632-635 nm.
10. An optical-principle-based rotary-device rotor-shaft vibration measurement system according to any one of claims 1-4, wherein the light-receiving element employs a position-sensitive detector.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116399440A (en) * | 2023-06-08 | 2023-07-07 | 中国船舶集团有限公司第七一九研究所 | Propeller vibration measuring device and method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05322529A (en) * | 1992-05-20 | 1993-12-07 | Hitachi Ltd | Surface shape measuring device |
| CN2919188Y (en) * | 2006-03-27 | 2007-07-04 | 西安北方光电有限公司 | Laser non-contact online detecting device |
| CN103913217A (en) * | 2014-04-02 | 2014-07-09 | 太原理工大学 | Elevator spindle vibration detection method based on PSD laser triangulation method |
| CN110132374A (en) * | 2019-05-20 | 2019-08-16 | 哈尔滨理工大学 | A kind of self-compensation type laser liquid-level measuring system |
-
2020
- 2020-11-10 CN CN202011244006.5A patent/CN112525325A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05322529A (en) * | 1992-05-20 | 1993-12-07 | Hitachi Ltd | Surface shape measuring device |
| CN2919188Y (en) * | 2006-03-27 | 2007-07-04 | 西安北方光电有限公司 | Laser non-contact online detecting device |
| CN103913217A (en) * | 2014-04-02 | 2014-07-09 | 太原理工大学 | Elevator spindle vibration detection method based on PSD laser triangulation method |
| CN110132374A (en) * | 2019-05-20 | 2019-08-16 | 哈尔滨理工大学 | A kind of self-compensation type laser liquid-level measuring system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116399440A (en) * | 2023-06-08 | 2023-07-07 | 中国船舶集团有限公司第七一九研究所 | Propeller vibration measuring device and method |
| CN116399440B (en) * | 2023-06-08 | 2023-08-04 | 中国船舶集团有限公司第七一九研究所 | Propeller vibration measuring device and method |
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Application publication date: 20210319 |