CN106568395A - Digital grating and physical grating combined tiny object surface three-dimensional measurement system - Google Patents
Digital grating and physical grating combined tiny object surface three-dimensional measurement system Download PDFInfo
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- CN106568395A CN106568395A CN201610945809.0A CN201610945809A CN106568395A CN 106568395 A CN106568395 A CN 106568395A CN 201610945809 A CN201610945809 A CN 201610945809A CN 106568395 A CN106568395 A CN 106568395A
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- digital raster
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
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- Computer Vision & Pattern Recognition (AREA)
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention provides a digital grating and physical grating combined tiny object surface three-dimensional measurement system which is composed of a computer, collimated laser beams, a digital micromirror device (DMD), digital gratings, physical gratings, three lens groups, an object to be measured, an object table and a CCD image detector. The computer generates light and dark graphs to be transmitted to the DMD. The collimated laser beams irradiate the DMD to be reflected and then generate the digital gratings through the first lens group, and then the digital gratings reach the surface of the object to be measured on the object table through the second lens group. The digital gratings modulated by the object to be measured are imaged on the surface of the physical gratings through the second and third lens groups. The digital grating and the physical gratings are superposed at a certain gap, and multiple times of diffraction occurs so that the amplified Moire interference fringes are formed and then imaged on the CCD image detector, and image acquisition and processing are performed through the computer so that three-dimensional information of the object to be measured can be acquired. The system is high in precision, easy to operate and high in anti-interference capacity and has high application value.
Description
Technical field
The present invention relates to a kind of digital raster small items surface three dimension measuring system in combination with physical grating, belongs to survey
Amount technical field.
Background technology
Industrial design detection with and micro-nano technology field, by traditional optical microscope or scanning electron microscope, we
The two-dimensional signal of testee can be obtained.But, at some to the specific occasion that needs to do quantitative analyses, the such as reality of electronic component
When detect, the field such as the three-dimensional dimension of micro-nano device is obtained, traditional two-dimensional signal measurement can not then meet measurement demand, and two
Height or depth information measurement outside dimension information seems and is even more important.
In recent years, non-contact measurement is fast with its measuring speed, and certainty of measurement is high, obtains the advantages of easy automatic business processing
It is widely applied.Existing non-contact measurement method has stereo-visiuon measurement method, interferometry, structural light measurement method etc..Its
In, stereo-visiuon measurement is reconstructed by the computer stereo vision of several two-dimensional intensity images, according to detected space point in difference
Relation is mutually matched in image planes captured by position, it is extensive by steps such as feature extraction, matching, reconstruction, trigonometric ratio and fusions
The three dimensional structure information of repetitive generation target object.But such method system structure is slow with algorithm complexity, processing speed, it is impossible to reach
It is convenient, fast with high-precision requirement in three-dimensional measurement.The ultimate principle of interferometry is with object wave wavefront and reference
Wavefront interferes generation interference fringe, and from the deformation interpretation of interference fringe the geometry of measured object, such method are gone out
It is one of conventional high accuracy, high-resolution survey method, but its requirement to measuring environment is very high, and systematic survey is stable
Property be vulnerable to the factors such as optical features, vibrations, humidity, air pressure and temperature impact.Structure light method is by actively projecting light field, Jing
Received by sensors such as CCD after testee modulation, then demodulate from the observation light field for carry 3 d shape information and obtain
Three dimensional structure information, such method measuring speed is fast, and certainty of measurement is high, there is larger application in industrial detection, product design
Prospect.But in the measurement to small items, its light field projection and imaging system structure easily cause certain to certainty of measurement
Affect.The present invention based on double grating space phase interference imaging principle and image procossing Phase-Resolved Analysis principle, by extracting phase
Move three-dimensional information of the phase place of interference Moire fringe to obtain small items to measure.There is in theory preferable capacity of resisting disturbance, energy
Realize small items high precision three-dimensional measurement.
The content of the invention
The technical problem to be solved in the invention is：Overcome the deficiencies in the prior art, there is provided a kind of digital raster and physics
Grating combines small items surface three dimension measuring system.The system is not easily susceptible to optical features impact, air pressure and temperature etc.
Factor, certainty of measurement is higher, and operation is simple.
To reach the purpose, the present invention provides a kind of small items surface three dimension measurement in combination with physical grating of digital raster
System, it is characterised in that including computer, collimated laser beam, digital micromirror array（Abbreviation DMD）, digital raster, physical grating,
3 lens groups, object under test, object stage, ccd image detectors.Wherein, by computer generate light and dark graphics transport to
DMD, then collimated laser beam illuminate formed after DMD figure reflection at a certain angle, and along the first lens group optical axis the
The Surface Creation digital raster of two lens groups, the lens groups of digital raster Jing second, then incides at a certain angle positioned at loading
Object under test Surface Creation digital raster picture on platform, due to the reflection on object under test surface, the number Jing after object under test modulation
Word grating image passes through the second lens group with the 3rd lens re-imaging on the surface of physical grating, when after the 3rd lens group
When the picture of digital raster is close with the two of physical grating screen periods, the picture and physical grating of digital raster is with certain interval weight
It is folded, then there is multiple diffraction, certain two beams peer diffraction light interferes superposition, physical grating surface formation cycle phase for
The exaggerated phase shift Moire fringe of physical grating, then images on ccd image detector and by computer to image
It is acquired process.Several light and dark figures with certain phase shift are generated by computer, several phase-shifted digitals are formed
Grating loss, finally gathering several phase shift Moire fringes carries out processing the phase place of extractable Moire fringe, Jin Erji
Calculate the three-dimensional information of object under test.
Preferred embodiment：A kind of described digital raster small items surface three dimension measurement system in combination with physical grating
System, it is characterised in that digital raster is to generate light and dark graphics transport to DMD by computer, then by collimation laser
Figure reflection is formed after Shu Zhaoming DMD, and the Fictitious data base being close with the physical grating cycle is dwindled into along the first lens group
Image.
Preferred embodiment：A kind of described digital raster small items surface three dimension measurement system in combination with physical grating
System, it is characterised in that described digital raster cycle P1With object screen periods P2Between proportionality coefficient be K (0.75<K<
1.3)。
Preferred embodiment：A kind of described digital raster small items surface three dimension measurement system in combination with physical grating
System, it is characterised in that the phase shift of described digital raster is that the distribution by computer to light and dark striated pattern is put down
Row is mobile to be obtained.
Compared with the prior art, the invention has the advantages that：
（1）The present invention directly carries out small items three-dimensional information measurement according to spatial phase feature, it is not necessary to which mechanical movement is formed
Phase shift, can avoid the factors such as optical features, vibrations, humidity, air pressure and temperature from affecting, and reach nano high-precision, resist dry
Disturb ability strong.
（2）There is diffraction imaging by digital raster and the physical grating of design in the present invention, then by simple image procossing, i.e.,
Three-dimensional measurement can be directly realized by, with low cost, the advantages of production efficiency is high.
Description of the drawings
Fig. 1 is general structure schematic diagram of the present invention；
Fig. 2 is overall procedure block diagram of the present invention.
Specific embodiment
To make the object, technical solutions and advantages of the present invention become more apparent, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in more detail.
The present invention proposes a kind of digital raster small items surface three dimension measuring system, such as Fig. 1 in combination with physical grating
It is shown, by computer 1, collimated laser beam 2, digital micromirror array（Abbreviation DMD）3rd, the first lens group 4, digital raster 5, second
Lens group 6, object under test 7, object stage 8, the 3rd lens group 9, physical grating 10, ccd image detector 11 are constituted.Wherein, by
Computer 1 generates light and dark graphics transport to DMD 3, and then (incident light wave is a length of in this embodiment for collimated laser beam 2
550nm) at a certain angle（Angle of incidence is in this embodiment）Figure reflection is formed after illumination DMD 3, and along the first lens
The optical axis of group 4 forms digital raster on the surface of the second lens group 6（5）, digital raster Jing is into the second lens group 6 with certain angle
Degree（Ranges of incidence angles is to angle of incidence is elected as in this embodiment）Incide the surface of object under test 7 life on object stage 8
Into digital raster picture, due to the reflection on the surface of object under test 7, the digital raster picture Jing after object under test 7 is modulated is saturating by second
Microscope group 6 and the re-imaging of the 3rd lens group 9 on the surface of physical grating 10, when the digital raster after the 3rd lens group 9
When picture is close with two screen periods of physical grating 10, (gap is big with certain interval for picture and the physical grating 10 of digital raster
It is little for 100nm to 200μM) overlap, then multiple diffraction occurs, certain two beams peer diffraction light interferes superposition, in physical grating
10 surface forms cycle phase for the phase shift Moire fringe that physical grating 10 is exaggerated, and then images in ccd image spy
Survey on device 10；Finally, deforming stripe image is acquired by computer 1 and processes the phase place for extracting Moire fringe, entered
And calculate the three-dimensional information of object under test.
As shown in Fig. 2 the measurement procedure of this embodiment is：First several are generated by computer 1 and there is the bright of phase shift
To DMD 3, collimated laser beam 2 is projected and generate after the first lens group 4 phase-shifted digital grating 5 graphics transport between dark phase（This
In embodiment, the cycle P of digital raster picture1For 6.8μm）Arrival object under test 7 after the second lens group 6 is again passed by, due to
The height relief of object under test 7 is modulated to digital raster phase, it is modulated after digital raster as the second lens groups of Jing 6
With after the 3rd lens group 9 with physical grating 10（In this embodiment, the cycle P of physical grating2For 6μM, cycle P1With P2Ratio
Example COEFFICIENT K is 1.13）Superposition is interfered, and forms several phase shift deformation Moire fringes for amplifying, and then images in ccd detector 10
On, by the computer acquisition phase shift deforming stripe of computer 1 go forward side by side line phase parsing obtain it is related to the three-dimensional information of object under test 7
Phase information, eventually through three-dimensionalreconstruction algorithm obtain the three-dimensional information of object under test 7.
Pass through computer 1 in this embodiment to control DMD 3 and ultimately generate three width phase-shifted digital gratings, three width phase shifts
Digital raster figure causes final phase shift to deform Moire fringe intensityI 1, I 2WithI 3, the phase contrast between them is respectively 0,
π/3 and 2 π/3；Then it is to deforming Moire fringe intensity by three step phase shift formulaI 1, I 2WithI 3, carry out process can obtain with
The related phase information of the three-dimensional information of object under test 7.
Non-elaborated part of the present invention belongs to techniques well known.
The above, the only specific embodiment in the present invention, but protection scope of the present invention is not limited thereto, and appoints
What be familiar with the people of the technology disclosed herein technical scope in, it will be appreciated that the conversion expected or replacement, all should cover
The present invention include within the scope of.
Claims (4)
1. a kind of digital raster small items surface three dimension measuring system in combination with physical grating, it is characterised in that by computer
（1）, collimated laser beam（2）, digital micromirror array（Abbreviation DMD）（3）, the first lens group（4）, digital raster（5）, the second lens
Group（6）Object under test（7）, object stage（8）, the 3rd lens group（9）, physical grating（10）, ccd image detector（11）Composition；
Wherein, by computer（1）Light and dark graphics transport is generated to DMD（3）, then collimated laser beam（2）At a certain angle according to
Bright DMD（3）Figure reflection is formed afterwards, and along the first lens group（4）Optical axis in the second lens group Surface Creation digital raster
（5）, the lens groups of digital raster Jing second（6）Incide at a certain angle positioned at object stage（8）On object under test（7）Give birth on surface
Into digital raster picture, due to object under test（7）The reflection on surface, Jing objects under test（7）Digital raster picture after modulation is by the
Two lens groups（6）With the 3rd lens group（9）Re-imaging is in physical grating（10）Surface on, when through the 3rd lens group（9）
The picture and physical grating of digital raster afterwards（10）Two screen periods it is close when, the picture and physical grating of digital raster（10）With
Certain interval is overlapped, then multiple diffraction occurs, and certain two beams peer diffraction light interferes superposition, in physical grating（10）Surface
Cycle phase is formed for physical grating（10）Exaggerated Moire fringe, then images in ccd image detector（11）On
And by computer（1）Process is acquired to image；By computer（1）Generate several and there is the light and dark of certain phase shift
Figure, form several phase-shifted digital gratings（5）Projected, finally gather several phase shift Moire fringes carry out process can
The phase place of Moire fringe is extracted, and then calculates the three-dimensional information of object under test.
2. a kind of digital raster according to claim 1 small items surface three dimension in combination with physical grating measures system
System, it is characterised in that digital raster（5）It is by computer（1）Light and dark graphics transport is generated to DMD (3), is then passed through
Collimated laser beam（2）Illumination DMD（3）Figure reflection is formed afterwards, and along the first lens group（4）Dwindle into and physical grating（10）
The Fictitious data base image that cycle is close.
3. a kind of digital raster according to claim 1 small items surface three dimension in combination with physical grating measures system
System, it is characterised in that described digital raster（5）Cycle P1With object grating（9）Cycle P2Between proportionality coefficient be K (0.75
<K<1.3)。
4. a kind of digital raster according to claim 1 small items surface three dimension in combination with physical grating measures system
System, it is characterised in that described digital raster（5）Phase shift be carried out by the distribution of the light and dark figure of computer 1 it is parallel
It is mobile to obtain.
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Cited By (8)
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| CN108548490A (en) * | 2018-04-17 | 2018-09-18 | 中科晶源微电子技术（北京）有限公司 | Method and apparatus for determining displacement of the grating image on imaging plane and the method and apparatus for determining object height |
| CN108871206A (en) * | 2018-08-23 | 2018-11-23 | 业成科技（成都）有限公司 | Surface measurement method and surface measuring device |
| CN110411374A (en) * | 2019-08-26 | 2019-11-05 | 湖北工业大学 | A kind of dynamic 3 D surface shape measurement method and system |
| WO2020097941A1 (en) * | 2018-11-16 | 2020-05-22 | 北京闻亭泰科技术发展有限公司 | Optical engine used for three-dimensional detection and three-dimensional detection device |
| CN113566698A (en) * | 2021-07-09 | 2021-10-29 | 汕头大学 | Interference fringe counting method and device |
| CN114688972A (en) * | 2020-12-31 | 2022-07-01 | 深圳中科飞测科技股份有限公司 | Detection device and detection method thereof |
| CN114688973A (en) * | 2020-12-31 | 2022-07-01 | 深圳中科飞测科技股份有限公司 | Detection device and detection method thereof |
| CN116659381A (en) * | 2023-05-29 | 2023-08-29 | 惠州市施莱格科技有限公司 | Measuring grating and measuring control method thereof |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108548490A (en) * | 2018-04-17 | 2018-09-18 | 中科晶源微电子技术（北京）有限公司 | Method and apparatus for determining displacement of the grating image on imaging plane and the method and apparatus for determining object height |
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| CN108871206B (en) * | 2018-08-23 | 2021-06-22 | 业成科技（成都）有限公司 | Surface measuring method and surface measuring device |
| WO2020097941A1 (en) * | 2018-11-16 | 2020-05-22 | 北京闻亭泰科技术发展有限公司 | Optical engine used for three-dimensional detection and three-dimensional detection device |
| CN112867905A (en) * | 2018-11-16 | 2021-05-28 | 北京闻亭泰科技术发展有限公司 | Optical engine for three-dimensional detection and three-dimensional detection equipment |
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| CN114688972B (en) * | 2020-12-31 | 2024-04-02 | 深圳中科飞测科技股份有限公司 | Detection device and detection method thereof |
| CN114688972A (en) * | 2020-12-31 | 2022-07-01 | 深圳中科飞测科技股份有限公司 | Detection device and detection method thereof |
| CN114688973A (en) * | 2020-12-31 | 2022-07-01 | 深圳中科飞测科技股份有限公司 | Detection device and detection method thereof |
| CN114688973B (en) * | 2020-12-31 | 2024-06-04 | 深圳中科飞测科技股份有限公司 | Detection device and detection method thereof |
| CN113566698A (en) * | 2021-07-09 | 2021-10-29 | 汕头大学 | Interference fringe counting method and device |
| CN116659381B (en) * | 2023-05-29 | 2024-02-02 | 惠州市施莱格科技有限公司 | Measuring grating and measuring control method thereof |
| CN116659381A (en) * | 2023-05-29 | 2023-08-29 | 惠州市施莱格科技有限公司 | Measuring grating and measuring control method thereof |
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