CN112524012B - Method and device for testing performance of vacuum pump - Google Patents
Method and device for testing performance of vacuum pump Download PDFInfo
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- CN112524012B CN112524012B CN201910881826.6A CN201910881826A CN112524012B CN 112524012 B CN112524012 B CN 112524012B CN 201910881826 A CN201910881826 A CN 201910881826A CN 112524012 B CN112524012 B CN 112524012B
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- 238000012360 testing method Methods 0.000 title claims abstract description 135
- 238000000034 method Methods 0.000 title claims abstract description 31
- 238000005086 pumping Methods 0.000 claims abstract description 33
- 238000011056 performance test Methods 0.000 claims abstract description 19
- 238000010998 test method Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000012423 maintenance Methods 0.000 description 5
- 230000005856 abnormality Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000013100 final test Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B51/00—Testing machines, pumps, or pumping installations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Control Of Positive-Displacement Pumps (AREA)
Abstract
The invention provides a performance test method and a device for a vacuum pump. The performance test method of the vacuum pump comprises the following steps: acquiring a trigger signal for testing the performance of the vacuum pump; carrying out vacuum pumping test on the vacuum pump according to the trigger signal and preset pumping time; receiving a first packet and a second packet, wherein the first packet comprises: a plurality of test vacuum degrees of the first vacuum sensor are recorded every preset time, and the second data packet comprises: recording a plurality of real-time vacuum degrees of the second vacuum sensor every preset time; and determining a performance condition of the vacuum pump based on the first data packet and the second data packet. According to the scheme of the invention, the first data packet and the second data packet are automatically received after the trigger signal is acquired, and the performance condition of the vacuum pump is determined according to the first data packet and the second data packet, so that the intelligent degree of the whole testing process is high, the flow is effectively simplified, and the testing efficiency is improved.
Description
Technical Field
The invention relates to the technical field of testing, in particular to a method and a device for testing the performance of a vacuum pump.
Background
There are a large number of different types of vacuum pumps, but the testing means for vacuum pumps is relatively single. Also, the test for the vacuum pump has the following problems: only whether the detection result meets the process requirements or not can be detected, and the stability of the vacuum pump cannot be detected; the testing process needs manual judgment and recording, and manpower is wasted; the testing process is complex, the efficiency is low, and the error rate is high; and the maintenance and repair cost is high after the abnormality of the vacuum pump is found according to the result data.
Disclosure of Invention
The invention aims to simplify the performance test process of the vacuum pump and improve the test efficiency.
A further object of the present invention is to find out abnormality of a vacuum pump in time to reduce maintenance cost.
Particularly, the invention provides a performance test method of a vacuum pump, wherein the vacuum pump is connected with a first vacuum sensor through an evacuation rubber tube, the vacuum pump is provided with a second vacuum sensor, and the performance test method of the vacuum pump comprises the following steps: acquiring a trigger signal for performing a performance test on the vacuum pump; carrying out vacuum pumping test on the vacuum pump according to the preset vacuum pumping time according to the trigger signal; receiving a first data packet and a second data packet, wherein the first data packet comprises: a plurality of test vacuum degrees of the first vacuum sensor recorded every preset time period, the second data packet comprising: recording a plurality of real-time vacuum degrees of the second vacuum sensor every preset time; and determining a performance condition of the vacuum pump based on the first data packet and the second data packet.
Optionally, the step of determining the performance condition of the vacuum pump from the first data packet and the second data packet comprises: calculating the error of the last test vacuum degree and the last real-time vacuum degree; judging whether the error is less than or equal to a preset error threshold value; and if so, determining that the vacuum pump is qualified for vacuum pumping.
Optionally, the step of determining the performance condition of the vacuum pump according to the first data packet and the second data packet further comprises: judging whether the last test vacuum degree is greater than a preset limit threshold value or not; and if so, determining that the vacuum pump has insufficient evacuation capacity or a gas leak failure.
Optionally, the step of determining the performance condition of the vacuum pump according to the first data packet and the second data packet further comprises: a test curve is generated from a plurality of test vacuum degrees to determine the stability of the vacuum pump.
Optionally, the first data packet and the second data packet each include: the number information of the vacuum pump, and further comprising, before the step of determining the performance condition of the vacuum pump from the first data packet and the second data packet: judging whether the serial number information of the vacuum pumps in the first data packet and the second data packet is the same; and if so, determining that the first data packet and the second data packet belong to the same vacuum pump, and executing the step of determining the performance condition of the vacuum pump according to the first data packet and the second data packet.
According to another aspect of the present invention, there is also provided a performance testing apparatus of a vacuum pump, including: the first vacuum sensor is connected with the vacuum pump through a vacuumizing rubber tube; a second vacuum sensor disposed on the vacuum pump, and a host module configured to: acquiring a trigger signal for performing a performance test on the vacuum pump; carrying out vacuum pumping test on the vacuum pump according to the preset vacuum pumping time according to the trigger signal; receiving a first data packet and a second data packet, wherein the first data packet comprises: a plurality of test vacuum degrees of the first vacuum sensor recorded every preset time period, the second data packet comprising: recording a plurality of real-time vacuum degrees of the second vacuum sensor every preset time; a performance condition of the vacuum pump is determined based on the first data packet and the second data packet.
Optionally, the host module is further configured to: calculating the error of the last test vacuum degree and the last real-time vacuum degree; judging whether the error is less than or equal to a preset error threshold value; if so, determining that the vacuum degree of the vacuum pump is qualified, and judging whether the last test vacuum degree is greater than a preset limit threshold value; and if so, determining that the vacuum pump has insufficient pumping capacity or air leakage fault, and generating a test curve according to a plurality of test vacuum degrees to determine the stability of the vacuum pump.
Optionally, the performance testing apparatus of the vacuum pump further includes: and the card reading module is configured to read the information card of the vacuum pump so as to acquire the coded information in the first data packet.
Optionally, the performance testing apparatus of the vacuum pump further includes: a wireless module configured to upload the first data packet and the second data packet to the host module.
Optionally, the host module comprises: the test button is clicked by the user, and the operation of clicking the test button is a trigger signal.
The invention relates to a method and a device for testing the performance of a vacuum pump, wherein the vacuum pump is connected with a first vacuum sensor through an evacuation rubber tube, the vacuum pump is provided with a second vacuum sensor, and the method for testing the performance of the vacuum pump comprises the following steps: acquiring a trigger signal for performing a performance test on the vacuum pump; carrying out vacuum pumping test on the vacuum pump according to the preset vacuum pumping time according to the trigger signal; receiving a first data packet and a second data packet, wherein the first data packet comprises: a plurality of test vacuum degrees of the first vacuum sensor recorded every preset time period, the second data packet comprising: recording a plurality of real-time vacuum degrees of the second vacuum sensor every preset time; a performance condition of the vacuum pump is determined based on the first data packet and the second data packet. The first data packet and the second data packet are automatically received after the trigger signal is obtained, and the performance condition of the vacuum pump is determined according to the first data packet and the second data packet.
Further, the method and apparatus for testing the performance of a vacuum pump according to the present invention, wherein the step of determining the performance status of the vacuum pump according to the first data packet and the second data packet comprises: calculating the error of the last test vacuum degree and the last real-time vacuum degree; judging whether the error is less than or equal to a preset error threshold value; and if so, determining that the vacuum pump is qualified for vacuum pumping. Judging whether the last test vacuum degree is greater than a preset limit threshold value or not; and if so, determining that the vacuum pump has insufficient evacuation capacity or a gas leak failure. A test curve is generated from a plurality of test vacuum degrees to determine the stability of the vacuum pump. The stability of the vacuum pump can be determined through the test curve, the abnormity of the vacuum pump can be found in time, and the maintenance cost is effectively reduced.
The above and other objects, advantages and features of the present invention will become more apparent to those skilled in the art from the following detailed description of specific embodiments thereof, taken in conjunction with the accompanying drawings.
Drawings
Some specific embodiments of the invention will be described in detail hereinafter, by way of illustration and not limitation, with reference to the accompanying drawings. The same reference numbers in the drawings identify the same or similar elements or components. Those skilled in the art will appreciate that the drawings are not necessarily drawn to scale. In the drawings:
FIG. 1 is a schematic diagram of a method of testing the performance of a vacuum pump according to one embodiment of the present invention;
FIG. 2 is a detailed flow chart of a method of testing the performance of a vacuum pump according to one embodiment of the present invention;
FIG. 3 is a detailed flow chart of a method of testing the performance of a vacuum pump according to yet another embodiment of the present invention;
FIG. 4 is a detailed flow chart of a method of testing the performance of a vacuum pump according to yet another embodiment of the present invention;
fig. 5 is a block diagram of a structure of a performance testing apparatus of a vacuum pump according to an embodiment of the present invention; and
fig. 6 is a block diagram showing a structure of a performance testing apparatus of a vacuum pump according to another embodiment of the present invention.
Detailed Description
The embodiment firstly provides a performance testing method for the vacuum pump, which automatically receives the first data packet and the second data packet after the trigger signal is obtained, and determines the performance condition of the vacuum pump according to the first data packet and the second data packet. FIG. 1 is a schematic diagram of a method of testing the performance of a vacuum pump according to one embodiment of the present invention. As shown in fig. 1, the performance testing method of the vacuum pump may perform the following steps:
step S102, acquiring a trigger signal for performing performance test on the vacuum pump;
step S104, carrying out vacuum pumping test on the vacuum pump according to the preset pumping time according to the trigger signal;
step S106, receiving a first data packet and a second data packet;
and step S108, determining the performance condition of the vacuum pump according to the first data packet and the second data packet.
The vacuum pump in this embodiment is connected to the first vacuum sensor 510 through an evacuation hose, and the vacuum pump is provided with the second vacuum sensor 520. The first packet in step S106 includes: a plurality of test vacuum levels of the first vacuum sensor 510 recorded every predetermined period of time, the second data packet comprising: the plurality of real-time vacuum levels of the second vacuum sensor 520 are recorded every preset time period. In practice, the test vacuum level and the real-time vacuum level are recorded every preset time period during the preset evacuation time. For example, within 5 minutes, the test vacuum and real-time vacuum are recorded every 0.5 seconds, and finally 600 test vacuums and 600 real-time vacuums can be obtained.
In step S108, the performance status of the vacuum pump is determined according to the first data packet and the second data packet, and in a specific embodiment, the error between the last test vacuum degree and the last real-time vacuum degree can be calculated; judging whether the error is less than or equal to a preset error threshold value; and if so, determining that the vacuum pump is qualified for vacuum pumping. In another specific embodiment, it may be determined whether the last test vacuum level is greater than a preset limit threshold; and if so, determining that the vacuum pump has insufficient evacuation capacity or a gas leak failure. In yet another specific embodiment, a test curve may also be generated from a plurality of test vacuum levels to determine the stability of the vacuum pump.
Furthermore, the first data packet and the second data packet may each further include: number information of the vacuum pump. Before determining the performance condition of the vacuum pump according to the first data packet and the second data packet in step S108, the method may further include: judging whether the serial number information of the vacuum pumps in the first data packet and the second data packet is the same; and if so, determining that the first data packet and the second data packet belong to the same vacuum pump, and executing step S108. The testing vacuum degree of the first data packet and the real-time vacuum degree of the second data packet are ensured to come from the same vacuum pump, and the testing result is ensured to be effective and accurate.
According to the performance testing method of the vacuum pump, the first data packet and the second data packet are automatically received after the trigger signal is obtained, the performance condition of the vacuum pump is determined according to the first data packet and the second data packet, the intelligent degree of the whole testing process is high, the process is effectively simplified, and the testing efficiency is improved.
In some optional embodiments, a higher technical effect may be achieved by further optimizing and configuring the above steps, and the following detailed description is provided with reference to an optional execution flow of the present embodiment, where the embodiment is merely an illustration of the execution flow, and in a specific implementation, an execution sequence of partial steps and an operation condition may be modified according to specific implementation requirements. Fig. 2 is a detailed flowchart of a method for testing the performance of a vacuum pump according to an embodiment of the present invention, the method comprising the steps of:
step S202, acquiring a trigger signal for performing performance test on the vacuum pump;
step S204, carrying out vacuum pumping test on the vacuum pump according to the preset pumping time according to the trigger signal;
step S206, receiving a first data packet and a second data packet;
step S208, calculating the error of the last test vacuum degree and the last real-time vacuum degree;
step S210, judging whether the error is less than or equal to a preset error threshold value, if so, executing step S212;
step S212, determining that the vacuum pump is qualified for vacuum pumping.
In the above steps, errors of the last test vacuum degree and the last real-time vacuum degree, which refer to the last one of the test vacuum degrees and the real-time vacuum degrees recorded every preset time period, are calculated in step S208. The performance test method of the vacuum pump of the embodiment can accurately determine whether the vacuum pump is qualified or not through the error of the last test vacuum degree and the last real-time vacuum degree.
Fig. 3 is a detailed flowchart of a performance testing method of a vacuum pump according to still another embodiment of the present invention. As shown in fig. 3, the method for testing the performance of the vacuum pump of the present embodiment may further perform the following steps:
step S302, acquiring a trigger signal for performing performance test on the vacuum pump;
step S304, carrying out vacuum pumping test on the vacuum pump according to the trigger signal and preset pumping time;
step S306, receiving a first data packet and a second data packet;
step S308, judging whether the last test vacuum degree is greater than a preset limit threshold value, if so, executing step S310;
in step S310, it is determined that the vacuum pump has insufficient evacuation capability or a gas leakage failure exists.
In the above steps, in step S308, it is determined whether the last test vacuum degree is greater than the preset limit threshold, that is, it is determined whether the test vacuum degree at the end of evacuation is greater than the preset limit threshold, and if yes, it indicates that the evacuation capability of the vacuum pump is insufficient or there is an air leakage fault. The leakage fault may be the situation that the pipeline fixes the vacuum pump and leaks gas when the vacuum pump is out of position, the pipeline in the vacuum pump leaks, the pipeline and the valve joint are sealed badly, and the like. The performance test method of the vacuum pump of the embodiment can accurately determine the pumping capacity of the vacuum pump and whether the air leakage fault exists through the last test vacuum degree.
Fig. 4 is a detailed flowchart of a performance testing method of a vacuum pump according to still another embodiment of the present invention. As shown in fig. 4, the performance testing method of the vacuum pump of the present embodiment may further perform the following steps:
step S402, acquiring a trigger signal for performing performance test on the vacuum pump;
step S404, carrying out vacuum pumping test on the vacuum pump according to the preset pumping time according to the trigger signal;
step S406, receiving a first data packet and a second data packet;
and step S408, generating a test curve according to the plurality of test vacuum degrees to determine the stability of the vacuum pump.
In the above step, the first data packet and the second data packet in step S406 may also each include data of a time relay. In step S408, a test curve is generated according to a plurality of test vacuum degrees, specifically, the abscissa of the test curve may be time, and the ordinate may be the test vacuum degree. For example, within 5 minutes, the test vacuum degree is recorded every 0.5 second, and finally 600 test vacuum degrees can be obtained, and a corresponding test curve can be generated according to the 600 test vacuum degrees. From the test curve the stability of the vacuum pump can be determined. The test curve, unlike a single data point, may reflect the overall performance trend of the vacuum pump. Compared with the method for determining the abnormality of the vacuum pump according to the final test result, the method can find the abnormality of the vacuum pump in time, and effectively reduce the maintenance cost.
The present embodiment further provides a performance testing apparatus 500 of a vacuum pump, and fig. 5 is a block diagram of the performance testing apparatus 500 of the vacuum pump according to an embodiment of the present invention. As shown in fig. 5, the performance testing apparatus 500 of the vacuum pump may generally include: a first vacuum sensor 510, a second vacuum sensor 520, and a host module 530.
Wherein the first vacuum sensor 510 may be connected to a vacuum pump through an evacuation hose. The second vacuum sensor 520 may be disposed on the vacuum pump. The host module 530 may be configured to: acquiring a trigger signal for performing a performance test on the vacuum pump; carrying out vacuum pumping test on the vacuum pump according to the preset vacuum pumping time according to the trigger signal; receiving a first data packet and a second data packet, wherein the first data packet comprises: a plurality of test vacuum levels of the first vacuum sensor 510 recorded every predetermined period of time, the second data packet comprising: a plurality of real-time vacuum degrees of the second vacuum sensor 520 recorded every preset time period; a performance condition of the vacuum pump is determined based on the first data packet and the second data packet.
The performance testing device 500 of the vacuum pump in this embodiment automatically receives the first data packet and the second data packet after acquiring the trigger signal, and determines the performance status of the vacuum pump according to the first data packet and the second data packet, so that the intelligent degree of the whole testing process is high, the flow is effectively simplified, and the testing efficiency is improved.
Fig. 6 is a block diagram of a performance testing apparatus 500 of a vacuum pump according to another embodiment of the present invention, which can be flexibly added to the above embodiment: the card reading module 540, the wireless module 550, and the host module 530 may include a test button 531.
The host module 530 of this embodiment may also be configured to: calculating the error of the last test vacuum degree and the last real-time vacuum degree; judging whether the error is less than or equal to a preset error threshold value; and if so, determining that the vacuum pump is qualified for vacuum pumping. The host module 530 of this embodiment may also be configured to: judging whether the last test vacuum degree is greater than a preset limit threshold value or not; and if so, determining that the vacuum pump has insufficient evacuation capacity or a gas leak failure. The host module 530 of this embodiment may also be configured to: a test curve is generated from a plurality of test vacuum degrees to determine the stability of the vacuum pump.
The card reading module 540 may be configured to read an information card of the vacuum pump to obtain the encoded information in the first data packet. The wireless module 550 may be configured to upload the first and second data packets to the host module 530. For the test button 531, an operation of clicking the test button 531 by the user may be a trigger signal. That is, the trigger signal for performing the performance test on the vacuum pump is acquired by acquiring the operation of the user clicking the test button 531.
In one embodiment, the host module 530 may further include a display screen that may display encoded information of the vacuum pump for manual verification to identify the vacuum pump under test. In addition, the display screen can also display a plurality of test vacuum degree generation test curves so that a user can determine the stability of the vacuum pump according to the test curves.
In the performance testing apparatus 500 of the vacuum pump of the present embodiment, the host module 530 may be further configured to: a test curve is generated from a plurality of test vacuum degrees to determine the stability of the vacuum pump. The stability of the vacuum pump can be determined through the test curve, the abnormity of the vacuum pump can be found in time, and the maintenance cost is effectively reduced.
Thus, it should be appreciated by those skilled in the art that while a number of exemplary embodiments of the invention have been illustrated and described in detail herein, many other variations or modifications consistent with the principles of the invention may be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the invention. Accordingly, the scope of the invention should be understood and interpreted to cover all such other variations or modifications.
Claims (10)
1. A performance test method of a vacuum pump, wherein the vacuum pump is connected with a first vacuum sensor through an evacuation hose, the vacuum pump is provided with a second vacuum sensor, and the performance test method of the vacuum pump comprises the following steps:
acquiring a trigger signal for testing the performance of the vacuum pump;
carrying out vacuum pumping test on the vacuum pump according to the trigger signal and preset pumping time;
receiving a first data packet and a second data packet, wherein the first data packet comprises: a plurality of test vacuum degrees of the first vacuum sensor are recorded every preset time period, and the second data packet comprises: recording a plurality of real-time vacuum degrees of the second vacuum sensor every other preset time length; and
determining a performance condition of the vacuum pump based on the first data packet and the second data packet.
2. The method of testing the performance of a vacuum pump of claim 1, wherein the step of determining the performance condition of the vacuum pump from the first data packet and the second data packet comprises:
calculating the error of the last test vacuum degree and the last real-time vacuum degree;
judging whether the error is less than or equal to a preset error threshold value; and
if yes, determining that the vacuum pump is qualified for vacuum pumping.
3. The method for testing the performance of a vacuum pump of claim 2, wherein the step of determining the performance condition of the vacuum pump from the first data packet and the second data packet further comprises:
judging whether the last test vacuum degree is greater than a preset limit threshold value or not; and
if yes, determining that the vacuum pump has insufficient pumping capacity or air leakage fault.
4. The method for testing the performance of a vacuum pump of claim 3, wherein the step of determining the performance condition of the vacuum pump from the first data packet and the second data packet further comprises:
generating a test curve according to the plurality of test vacuum degrees to determine the stability of the vacuum pump.
5. The method for testing the performance of a vacuum pump according to claim 1,
the first data packet and the second data packet each include: the number information of the vacuum pump, and
prior to the step of determining a performance condition of the vacuum pump from the first data packet and the second data packet, further comprising:
judging whether the serial number information of the vacuum pump in the first data packet is the same as that of the vacuum pump in the second data packet; and
if yes, determining that the first data packet and the second data packet belong to the same vacuum pump, and executing a step of determining the performance status of the vacuum pump according to the first data packet and the second data packet.
6. A performance testing apparatus of a vacuum pump, comprising:
the first vacuum sensor is connected with the vacuum pump through an evacuation rubber tube;
a second vacuum sensor disposed on the vacuum pump, an
A host module configured to: acquiring a trigger signal for performing a performance test on the vacuum pump; carrying out vacuum pumping test on the vacuum pump according to the trigger signal and preset pumping time; receiving a first data packet and a second data packet, wherein the first data packet comprises: recording a plurality of test vacuum degrees of the first vacuum sensor every preset time, wherein the second data packet comprises: recording a plurality of real-time vacuum degrees of the second vacuum sensor every other preset time length; determining a performance condition of the vacuum pump based on the first data packet and the second data packet.
7. The vacuum pump performance testing apparatus of claim 6, wherein the host module is further configured to:
calculating the error of the last test vacuum degree and the last real-time vacuum degree; judging whether the error is less than or equal to a preset error threshold value; and if so, determining that the vacuum pump is qualified for vacuum pumping,
judging whether the last test vacuum degree is greater than a preset limit threshold value or not; and if so, determining that the vacuum pump has insufficient pumping capacity or air leakage fault,
generating a test curve according to the plurality of test vacuum degrees to determine the stability of the vacuum pump.
8. The performance testing apparatus of the vacuum pump according to claim 6, further comprising:
and the card reading module is configured to read an information card of the vacuum pump so as to acquire the coding information in the first data packet.
9. The performance testing apparatus of the vacuum pump according to claim 6, further comprising:
a wireless module configured to upload the first data packet and the second data packet to the host module.
10. The performance testing apparatus of a vacuum pump according to claim 6,
the host module includes: and testing the button, wherein the operation of clicking the testing button by the user is the trigger signal.
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| CN201910881826.6A CN112524012B (en) | 2019-09-18 | 2019-09-18 | Method and device for testing performance of vacuum pump |
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| CN201910881826.6A CN112524012B (en) | 2019-09-18 | 2019-09-18 | Method and device for testing performance of vacuum pump |
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| CN101713396A (en) * | 2009-10-16 | 2010-05-26 | 孙广雨 | Intelligent detection control method of vacuum pump and device thereof |
| CN104632604A (en) * | 2013-11-15 | 2015-05-20 | 中国科学院沈阳科学仪器股份有限公司 | Test method and text system for simulating air exhaust technology of dry vacuum pump |
| CN108443135A (en) * | 2018-05-19 | 2018-08-24 | 芜湖筱笙机电科技有限公司 | A kind of vacuum pump integrated test system for performance and method |
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