CN114459697B - Multi-station leakage detection system and method for infrared imaging system detector packaging Dewar - Google Patents
Multi-station leakage detection system and method for infrared imaging system detector packaging Dewar Download PDFInfo
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- CN114459697B CN114459697B CN202111598480.2A CN202111598480A CN114459697B CN 114459697 B CN114459697 B CN 114459697B CN 202111598480 A CN202111598480 A CN 202111598480A CN 114459697 B CN114459697 B CN 114459697B
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- 238000001514 detection method Methods 0.000 title claims abstract description 115
- 238000004806 packaging method and process Methods 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 title claims abstract description 44
- 238000003331 infrared imaging Methods 0.000 title claims abstract description 24
- 238000009825 accumulation Methods 0.000 claims abstract description 13
- 238000001819 mass spectrum Methods 0.000 claims description 114
- 239000001307 helium Substances 0.000 claims description 87
- 229910052734 helium Inorganic materials 0.000 claims description 87
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 77
- 238000005086 pumping Methods 0.000 claims description 55
- 108010083687 Ion Pumps Proteins 0.000 claims description 36
- 238000012360 testing method Methods 0.000 claims description 34
- 239000007789 gas Substances 0.000 claims description 18
- 230000000630 rising effect Effects 0.000 claims description 14
- 238000012423 maintenance Methods 0.000 claims description 13
- 238000004949 mass spectrometry Methods 0.000 claims description 6
- 238000013524 data verification Methods 0.000 claims description 3
- 230000001186 cumulative effect Effects 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 125000004122 cyclic group Chemical group 0.000 abstract description 2
- 238000007689 inspection Methods 0.000 abstract description 2
- -1 helium ion Chemical class 0.000 description 7
- 238000007789 sealing Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 238000012795 verification Methods 0.000 description 2
- 206010020751 Hypersensitivity Diseases 0.000 description 1
- 208000026935 allergic disease Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000009610 hypersensitivity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
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- Examining Or Testing Airtightness (AREA)
Abstract
The invention discloses an infrared imaging system detector package Dewar multi-station leak detection system and method. The invention realizes the accurate inspection of the tightness of the detector packaging Dewar by utilizing the vacuum standard small leak holes, and can screen the leak rate range of 10 by adopting a comparison method ‑5 ‑10 ‑12 Pa·m 3 Detector package Dewar between/s, and the leakage rate range of 10 can be screened by using the accumulation method ‑13 ‑10 ‑15 Pa·m 3 The detector packaging Dewar between/s has the average leak detection time less than or equal to 30min, high leak detection sensitivity, wide leak detection range and high leak detection efficiency. The invention can also realize multi-station cyclic detection and improve batch detection efficiency.
Description
Technical Field
The invention relates to the technical field of tightness test, in particular to a multi-station ultrasensitive leakage detection system and method applied to an infrared imaging system detector packaging Dewar.
Background
The sealing performance of the detector package dewar in the infrared imaging system is one of important indexes for evaluating the reliability of the detector of the infrared imaging system. Due to the functional specificity, the leakage rate of the detector package Dewar in the infrared imaging system is up to 10 -14 Or 10 -15 Pa·m 3 If the sealing performance is poor, the service life of the infrared imaging system is reduced, and if the sealing performance is poor, the function of the infrared imaging system is completely lost, so that the infrared imaging system is installedWeaponry of the infrared imaging system is scrapped. Therefore, it is necessary to measure the leak rate of the probe package dewar. Performance screening is performed before the installation of the sealing device, so that the sealing performance of the sealing device is qualified.
At present, helium mass spectrometry leak detection methods are generally adopted, and the leak detection method can only detect that the leak rate is more than 10 at most -12 Pa·m 3 Leak rate of the order of/s, the smaller leak rate of the detector package dewar cannot be effectively screened. In addition, the leak detection method needs longer time, and has the problem of low leak detection efficiency for mass production leak detection.
Therefore, the leak rate detection technology of the sealing performance of the prior detector packaging Dewar has the defects of low leak detection sensitivity, narrow leak detection range, high possibility of misjudgment of leak rate and low leak detection efficiency.
Disclosure of Invention
In view of the above, the invention provides a multi-station leakage detection system and method for an infrared imaging system detector package Dewar, which can realize the minimum 10 -15 Pa·m 3 The leakage rate/s has the advantages of high sensitivity leakage detection, wide detection range, extremely low possibility of misjudgment of the leakage rate, capability of detecting leakage at multiple stations and high efficiency.
The invention relates to an infrared imaging system detector packaging Dewar multi-station leak detection system which comprises a station detection unit, an acquisition test unit and a vacuum maintenance unit;
the station detection unit is used for installing a detector packaging Dewar to be detected; the acquisition test unit comprises a mass spectrum chamber 6, a first standard leak hole 16 and a second standard leak hole 17, wherein the leak rate of the first standard leak hole 16 is 10 -9 Pa·m 3 The leak rate of the second standard leak hole 17 is 10 -11 Pa·m 3 S; the vacuum maintaining unit comprises a backing pump 1, a molecular pump 3, a suction pump 8 and an ion pump 13 and is used for maintaining the vacuum degree of the acquisition testing unit;
the forepump 1 is connected with the mass spectrum chamber 6 after being connected with the molecular pump 3 in series through the pre-pumping valve one 2, and is directly connected with the mass spectrum chamber 6 through the pre-pumping valve five 25; the backing pump 1 is connected with a station detection unit through a second pre-pumping valve 24, a fourth pre-pumping valve 22 and a station valve; the molecular pump 3 is connected with a station detection unit through a third pre-pumping valve 23, a fourth pre-pumping valve 22 and a station valve; the getter pump 8 is connected with the mass spectrum chamber 6; the ion pump 12 is connected with the mass spectrum chamber 6 through an ion pump valve 12, and is connected with the station detection unit through the ion pump valve 12 and a mass spectrum chamber valve 11; the first standard leak hole 16 is connected with the mass spectrum chamber 6 through the first standard leak hole valve 14 and the mass spectrum chamber valve 11, and the second standard leak hole 15 is connected with the mass spectrum chamber 6 through the second standard leak hole valve 15 and the mass spectrum chamber valve 11; the station detection unit is connected with the mass spectrum chamber 6 through a station valve and a mass spectrum chamber valve 11.
Preferably, the device comprises a plurality of station detection units, and the station detection units are connected with the acquisition test unit and the vacuum maintenance unit through respective station valves.
The invention also provides a leak detection system based on the leak detection system, and a method for detecting the leak rate of the packaging Dewar of the detector to be detected by adopting a comparison method; the method specifically comprises the following steps:
step 1, starting a backing pump and a molecular pump, and pumping the mass spectrum chamber 6 to 10 -4 Pa or less; acquiring background data of a mass spectrum chamber 6; background data of the mass spectrum chamber 6 is shown at 10 -12 Pa·m 3 And/s or less;
step 2, mounting a detector package Dewar to be detected on a station detection unit, covering the detector package Du Washang with a helium cover 31, wherein the helium cover 31 is connected with a helium bag 33 through a helium bag valve 32;
step 3, a station valve, a pre-pumping valve IV 22 and a pre-pumping valve II 24 are opened, a pre-pump 1 is adopted to pre-pump the station detection unit, a pre-pumping valve III 23 is opened after the pre-pumping is completed, and a molecular pump 3 is adopted to pump the station detection unit to 10 -4 Pa or less;
step 4, opening the helium bag valve 32, and filling helium into the detector package Du Wahai gas hood 31; opening a valve 11 of the mass spectrum chamber, and measuring the vacuum degree in the mass spectrum chamber 6 by adopting a second vacuum gauge 10, when the vacuum degree of the mass spectrum chamber reaches 10 -4 After Pa or less, helium signal in the mass spectrometer chamber 6 is collected and detected by the mass spectrometer 9, and is denoted as i s ；
Step 5, closing the station valve, opening the first standard leak hole 16 and the first standard leak hole valve 14, and recording helium signal i after the mass spectrum chamber 6 is stabilized again sp ；
And 6, comparing the twice helium signal with the background helium signal, and calculating the leak rate of the detector packaging Dewar by combining the leak rate of the first standard leak hole.
Preferably, in the step 1, the first standard leak hole 16 is used to calibrate the background data of the mass spectrum chamber 6, specifically:
s11, vacuumizing the mass spectrum chamber 6 by using a backing pump and a molecular pump, measuring the vacuum degree of the mass spectrum chamber 6 by using a second vacuum gauge 10, and vacuumizing the mass spectrum chamber 6 to 10 -4 Pa or less, the mass spectrometer 9 is turned on to record helium signal i of the mass spectrometer chamber 6 0 ；
S12, opening the first standard leak hole 16, the first standard leak hole valve 14 and the mass spectrum chamber valve 11, and recording a stabilized helium signal i by adopting the mass spectrometer 9 sp ；
S13, closing the first standard leak valve 14, opening the station valve, and when the mass spectrum chamber 6 reaches 10 -4 After Pa or less, the mass spectrometer 9 is turned on to record helium signal i of the mass spectrometer chamber 6 s ；
S14, calculating background data of the mass spectrum chamber 6 according to the following formula:
preferably, the leakage detection system comprises a plurality of station detection units, and each detection unit is connected with the acquisition test unit and the vacuum maintenance unit through respective station valves; and when the detector packaging Dewar on the previous station detection unit is detected, the detector packaging Dewar on the next station detection unit is installed.
The invention also provides a leak detection system based on the leak detection system, and a method for detecting the leak rate of the packaging Dewar of the detector to be detected by adopting an accumulation method; the method specifically comprises the following steps:
step 1, starting a backing pump and a molecular pump, and pumping the mass spectrum chamber 6 to 10 -6 Pa or less; background data of the mass spectrum chamber 6 is acquired and verified based on an accumulation method, wherein the background data of the mass spectrum chamber 6 is 10 -12 Pa·m 3 And/s or less;
the background data verification based on the accumulation method specifically comprises the following steps:
closing the molecular pump valve, opening the getter pump valve and the ion pump valve, and opening the mass spectrometer 9 to test the rate of rise R of the helium signal in the mass spectrometer chamber 6 over a period of time 0 The method comprises the steps of carrying out a first treatment on the surface of the Closing the getter pump valve and the ion pump valve, opening the molecular pump valve, and pumping the mass spectrum chamber 6 to 10 again - 6 Pa or less; opening the second standard leak 17, the second standard leak valve 15 and the mass spectrum valve 11, closing the molecular pump valve, opening the gas suction pump valve and the ion pump valve, and opening the mass spectrometer 9 to test the rising rate R of helium ion flow in the same time period after the second standard leak is opened sp The method comprises the steps of carrying out a first treatment on the surface of the Closing the second standard leak valve 15, closing the getter pump valve and the ion pump valve, opening the station valve, opening the molecular pump valve, pumping the mass spectrometry chamber 6 to 10 again -6 Pa or less; closing the molecular pump valve, opening the getter pump valve and the ion pump valve, and opening the rate of rise R of the helium signal of the mass spectrometer in the same time of testing the mass spectrometer chamber s The method comprises the steps of carrying out a first treatment on the surface of the Background data for the mass spectrum chamber 6 was calculated according to the following formula:
step 2, mounting a detector package Dewar to be detected on a station detection unit, covering the detector package Du Washang with a helium cover 31, wherein the helium cover 31 is connected with a helium bag 33 through a helium bag valve 32;
step 3, a station valve, a pre-pumping valve IV 22 and a pre-pumping valve II 24 are opened, the station detection unit is pre-pumped by the backing pump 1, the pre-pumping valve III 23 is opened after the pre-pumping is completed, and the station detection unit is pumped to 10 by the molecular pump 3 -6 Pa or less;
step 4, opening a helium bag valve 32, filling helium into a helium cover 31, opening a mass spectrum chamber valve 11, closing a molecular pump valve, opening a gas suction pump valve and an ion pump valve, and opening a mass spectrometer 9 to test the rising rate of helium signals in a period of time of a mass spectrum chamber 6; closing the getter pump valve and the ion pump valve, opening the molecular pump valve, and pumping the mass spectrum chamber 6 to 10 again -6 Pa or less; opening the second standard leak hole 17, the second standard leak hole valve 15 and the mass spectrum valve 11, closing the molecular pump valve, opening the air suction pump valve and the ion pump valve, and opening the mass spectrometer 9 to test the opening of the second standardThe rising rate of helium ion flow in the same time period after the leak hole; the leak rate of the detector package dewar is calculated from the twice rate of rise and the leak rate of the second standard leak hole 16.
Preferably, the leakage detection system comprises a plurality of station detection units, and each detection unit is connected with the acquisition test unit and the vacuum maintenance unit through respective station valves; and when the detector packaging Dewar on the previous station detection unit is detected, the detector packaging Dewar on the next station detection unit is installed.
The beneficial effects are that:
the invention realizes the accurate inspection of the tightness of the detector packaging Dewar by utilizing the vacuum standard small leak holes, and can screen the leak rate range of 10 by adopting a comparison method -5 -10 -12 Pa·m 3 Detector package Dewar between/s, and the leakage rate range of 10 can be screened by using the accumulation method -13 -10 -15 Pa·m 3 The detector packaging Dewar between/s has the average leak detection time less than or equal to 30min, high leak detection sensitivity, wide leak detection range and high leak detection efficiency. The invention can also realize multi-station cyclic detection and improve batch detection efficiency.
Drawings
FIG. 1 is a schematic diagram of a leak detection system of the present invention.
FIG. 2 is a flow chart of a leak detection method of the present invention.
Fig. 3 is a schematic diagram of the structure of an infrared imaging system detector package dewar.
The device comprises a 1-forepump, a 2-pre-pump valve I, a 3-molecular pump, a 4-vacuum gauge, a 5-molecular pump valve, a 6-mass spectrum chamber, a 7-suction pump valve, an 8-suction pump, a 9-mass spectrometer, a 10-vacuum gauge II, a 11-mass spectrum chamber valve, a 12-ion pump valve, a 13-ion pump, a 14-first standard leak hole valve, a 15-second standard leak hole valve, a 16-first standard leak hole, a 17-second standard leak hole, a 18-fourth station valve, a 19-third station valve, a 20-second station valve, a 21-first station valve, a 22-pre-pump valve IV, a 23-pre-pump valve III, a 24-pre-pump valve II, a 25-pre-pump valve V, a 26-fourth station packaging Dewar, a 27-third station packaging Dewar, a 28-second station packaging Dewar, a 29-detector packaging Dewar, a 30-adaptor, a 31-gas helium mask, a 32-helium bag valve and a 33-gas bag.
Detailed Description
The invention will now be described in detail by way of example with reference to the accompanying drawings.
The invention provides an infrared imaging system detector package Dewar multi-station leak detection system, as shown in figure 1, comprising: the station detection unit, the acquisition test unit and the vacuum maintenance unit; the station detection unit is used for installing the detector packaging Dewar, the acquisition test unit is used for acquiring gas signals, and the vacuum maintenance unit is used for maintaining the vacuum degree of the acquisition test unit.
Specifically, the station detection unit comprises an adapter 30, a detector packaging Dewar 29, a helium cover 31, a helium bag 33, a helium bag valve 32, a station leakage detection interface and a station valve, wherein the detector packaging Dewar 29 is connected with the station leakage detection interface through the adapter, and the station leakage detection interface is connected with the acquisition test unit and the vacuum maintenance unit through the station valve; helium shield 31 is placed over probe package Dewar 29 and helium bag 33 is filled with helium gas through helium bag valve 32 into helium shield 31.
The device comprises a plurality of station detection units, wherein the station detection units are respectively connected with an acquisition test unit and a vacuum maintenance unit through corresponding station valves, so that leakage rate detection of a plurality of detector packaging dewars is realized, and the efficiency is improved.
The acquisition test unit comprises a mass spectrum chamber 6, a mass spectrometer 9 and two standard leak holes; the mass spectrum chamber 6 is connected with the station detection unit and the standard leak through a mass spectrum chamber valve 11 and is connected with the vacuum maintaining unit through a pump valve; the mass spectrometer 9 is in communication with the mass spectrometry chamber 6. The leak rate of the two standard leak holes is 10 respectively -9 Pa·m 3 /s and 10 -11 Pa·m 3 And/s, the mass spectrometry chamber 6 is connected through respective valves, mass spectrometry chamber valves 11.
The vacuum maintaining unit comprises a backing pump 1, a molecular pump 3, a suction pump 8 and an ion pump 13, wherein the backing pump 1 is connected with the molecular pump 3 through a first pre-pumping valve 2, is connected with the station detecting unit through a second pre-pumping valve 24 and a fourth pre-pumping valve 22, and is connected with the mass spectrum chamber 6 through a fifth pre-pumping valve 25; the molecular pump 3 is connected with the mass spectrum chamber 6 through a molecular pump valve 5, and is connected with the station detection unit through a pre-pumping valve III 23 and a pre-pumping valve IV 22; the suction pump 8 is connected with the mass spectrum chamber 6 through a suction pump valve 7; the ion pump 13 is connected with the mass spectrum chamber 6 through an ion pump valve 12, and is connected with the station detection unit through the ion pump valve 12 and a mass spectrum chamber valve 11; a first vacuum gauge 4 is arranged between the molecular pump valve 5 and the molecular pump 3; a second vacuum gauge 10 is arranged between the mass spectrum chamber 6 and the mass spectrum chamber valve 11.
The invention detects the leak rate of the packaging Dewar of the detector to be detected based on two standard leak holes with different level leak rates respectively based on a comparison method and an accumulation method.
The detection method of the invention comprises the following steps:
step 1, starting a backing pump and a molecular pump, and pumping the mass spectrum chamber 6 to 10 -6 Pa or less; acquiring background data of a mass spectrum chamber 6; background data of the mass spectrum chamber 6 is shown at 10 -12 Pa·m 3 And/s or less;
the background data can be verified by using the standard leak, and the background data of the mass spectrum chamber is verified by adopting a comparison method and an accumulation method based on the difference of leak rates of the two standard leak:
(1) Verification by contrast with the first standard leak 16
The comparison method check comprises the following steps:
s11, vacuumizing the mass spectrum chamber 6 by using a backing pump and a molecular pump, measuring the vacuum degree of the mass spectrum chamber 6 by using a second vacuum gauge 10, and when the mass spectrum chamber 6 reaches 10 -4 After Pa or less, the mass spectrometer 9 is turned on to record helium signal i of the mass spectrometer chamber 6 0 ；
S12, opening the first standard leak hole 16, the first standard leak hole valve 14 and the mass spectrum chamber valve 11, and recording a stabilized helium signal i by adopting the mass spectrometer 9 sp ；
S13, closing the first standard leak valve 14, opening the station valve, and when the mass spectrum chamber 6 reaches 10 -4 After Pa or less, the mass spectrometer 9 is turned on to record helium signal i of the mass spectrometer chamber 6 s ；
S13, according to the comparison of the three helium signals and the combination of the leak rate of the first standard leak hole 16, calculating the background data of the mass spectrum chamber 6 according to the following formula:
wherein Q is sp1 Is the standard leak rate of the first standard leak rate orifice 16.
(2) Verification is performed using a second standard leak 17 using a cumulative method.
The accumulation method check comprises the following steps:
s11, starting a backing pump and a molecular pump, vacuumizing the mass spectrum chamber 6, and measuring the vacuum degree of the mass spectrum chamber 6 by using a second vacuum gauge 10; when the mass spectrum chamber 6 reaches 10 -6 After Pa or below, closing the molecular pump valve, opening the gas suction pump valve and the ion pump valve, and opening the mass spectrometer to test the rising rate R of helium signal of the mass spectrum chamber 0 ；
S12, closing the air suction pump valve and the ion pump valve, opening the molecular pump valve, and pumping the mass spectrum chamber 6 to 10 again -6 Pa or less;
s13, opening a second standard leak hole 17, a second standard leak hole valve 15 and a mass spectrum valve 11, closing a molecular pump valve, opening an air suction pump valve and an ion pump valve, and opening a mass spectrometer 9 to test the rising rate R of helium ion flow in the same time period after the second standard leak hole is opened sp ；
S14, closing the second standard leak valve 15, closing the air suction pump valve and the ion pump valve, opening the station valve, opening the molecular pump valve, and pumping the mass spectrum chamber 6 to 10 again -6 Pa or less; closing the molecular pump valve, opening the getter pump valve and the ion pump valve, and opening the rate of rise R of the helium signal of the mass spectrometer in the same time of testing the mass spectrometer chamber s ；
S15, calculating background data of the mass spectrum chamber 6 according to the twice rising rate and the leak rate of the second standard leak hole 16:
wherein Q is sp2 The second standard leak rate is the standard leak rate of the second standard leak rate orifice.
Step 2, a detector package Du Waan of the first station detection unit is arranged on the first station leakage detection interface and is connected with the vacuum maintenance unit and the acquisition test unit through the first station valve 21; covering the detector package Du Washang with a helium cover 31, wherein the helium cover 31 is connected with a helium bag 33 through a helium bag valve 32;
step 3, vacuumizing the first station detection unit, wherein the step comprises the following steps:
the first station valve 21, the fourth pre-pumping valve 22 and the second pre-pumping valve 24 are opened, pre-pumping is realized by using the backing pump 1, the third pre-pumping valve 23 is opened after the pre-pumping is finished, and the molecular pump 3 is used for pumping to 10 -4 Pa or below, thereby reducing the pollution of the atmosphere in the detector packaging dewar to the mass spectrum chamber 6 and improving the detection efficiency.
Step 4, detecting the leak rate of the detector package Dewar of the first station detection unit by adopting a comparison method and an accumulation method based on 2 standard leak holes with different magnitudes:
(1) The leak rate of the first station detection unit detector package dewar is measured by using the first standard leak hole 16 by adopting a comparison method, and specifically comprises the following steps:
s41, opening the helium bag valve 32, and filling the detector package Du Wahai gas hood 31 with high-purity helium (99.999%);
s42, opening a mass spectrum chamber valve 11, measuring the vacuum degree in the mass spectrum chamber 6 by adopting a second vacuum gauge 10, and when the vacuum degree of the mass spectrum chamber reaches 10 -4 After Pa or less, the mass spectrometer 9 is turned on to collect and detect helium signals in the mass spectrometer chamber 6, denoted as i s ；
S43, closing the station valve, opening the first standard leak hole 16 and the first standard leak hole valve 14, and recording helium signal i after the mass spectrum chamber 6 is stabilized again sp Twice helium signal and background helium signal i 0 Comparing and combining the leak rate Q of the first standard leak hole sp1 The leak rate of the detector package Dewar is calculated as follows:
10 can be realized by using a first standard leak and adopting a comparison method -5 -10 -12 Pa·m 3 Leak rate in the range of/s.
(2) The second standard leak hole is utilized, and the leak rate of the first station detection unit detector package Dewar is measured by adopting an accumulation method, specifically comprising the following steps:
s41, opening the helium bag valve 32, and filling high-purity helium into the helium cover 31;
s42, opening a mass spectrum chamber valve 11, opening a gas suction pump valve and an ion pump valve, continuously pumping for a period of time, closing a molecular pump valve 5, enabling a first station to form an accumulated and sealed vacuum cavity, utilizing the non-adsorption characteristic of the gas suction pump 8 to helium gas, accumulating and amplifying the tiny helium ions leaked by a detector packaging Dewar, utilizing a mass spectrometer to measure the value of the helium ion flow in a period of time, and calculating the rising rate of the helium ion flow in the period of time through a least square method, and recording as Rs;
s43, closing the air suction pump valve and the ion pump valve, opening the molecular pump valve, and pumping the mass spectrum chamber 6 to 10 again -6 Pa or less;
s44, opening the second standard leak hole 17, the second standard leak hole valve 15 and the mass spectrum valve 11, closing the molecular pump valve, opening the gas suction pump valve and the ion pump valve, and opening the mass spectrometer 9 to test the rising rate Rsp of helium ion flow in the same time period after the second standard leak hole is opened;
s45, calculating the leak rate of the detector packaging Dewar according to the twice rising rate, the background rising rate R0 and the leak rate of the second standard leak hole 16, wherein the specific calculation formula is as follows:
wherein Q is sp2 The standard leak rate is the second standard leak rate small hole; r is R s And R is sp The rise rates caused by the packaging Dewar and the standard leak hole are respectively; r is R 0 And when the background data is verified, the rise rate of the background of the mass spectrum chamber is increased.
With the second standard leak, a minimum of 10 can be achieved by the accumulation method -15 Pa·m 3 Hypersensitivity leak detection of/s leak rate.
The invention can also carry out multi-station detection, namely, the first station detector package Du Washi is detected, the second station detector package Dewar is installed, and the installation time of the package Dewar is saved; after the detection of the first station detector packaging Dewar is finished, closing the mass spectrum valve 11 and the standard leak valve, and measuring the leak rate of the second station detector packaging Dewar according to the same mode of the steps 2-4; and by analogy, multi-station detection is realized.
In summary, the above embodiments are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. The multi-station leakage detection system for the infrared imaging system detector package Dewar is characterized by comprising a station detection unit, an acquisition test unit and a vacuum maintenance unit;
the station detection unit is used for installing a detector packaging Dewar to be detected; the acquisition test unit comprises a mass spectrum chamber (6), a first standard leak hole (16) and a second standard leak hole (17), wherein the leak rate of the first standard leak hole (16) is 10 -9 Pa·m 3 The leak rate of the second standard leak hole (17) is 10 -11 Pa·m 3 S; the vacuum maintaining unit comprises a backing pump (1), a molecular pump (3), a suction pump (8) and an ion pump (13) and is used for maintaining the vacuum degree of the acquisition testing unit;
the forepump (1) is connected with the mass spectrum chamber (6) after being connected with the molecular pump (3) in series through the first pre-pumping valve (2), and is directly connected with the mass spectrum chamber (6) through the fifth pre-pumping valve (25); the backing pump (1) is connected with a station detection unit through a second pre-pumping valve (24), a fourth pre-pumping valve (22) and a station valve; the molecular pump (3) is connected with a station detection unit through a third pre-pumping valve (23), a fourth pre-pumping valve (22) and a station valve; the getter pump (8) is connected with the mass spectrum chamber (6); the ion pump (12) is connected with the mass spectrum chamber (6) through the ion pump valve (12), and is connected with the station detection unit through the ion pump valve (12) and the mass spectrum chamber valve (11); the first standard leak hole (16) is connected with the mass spectrum chamber (6) through the first standard leak hole valve (14) and the mass spectrum chamber valve (11), and the second standard leak hole (15) is connected with the mass spectrum chamber (6) through the second standard leak hole valve (15) and the mass spectrum chamber valve (11); the station detection unit is connected with the mass spectrum chamber (6) through a station valve and a mass spectrum chamber valve (11).
2. The infrared imaging system detector package dewar multi-station leak detection system of claim 1, comprising a plurality of station detection units connected to the acquisition test unit and the vacuum maintenance unit through respective station valves.
3. An infrared imaging system detector packaging Dewar multi-station leak detection method based on the infrared imaging system detector packaging Dewar multi-station leak detection system as claimed in claim 1, which is characterized in that a comparison method is adopted to detect leak rate of the detector packaging Dewar to be detected; the method specifically comprises the following steps:
step 1, starting a backing pump and a molecular pump, and pumping the mass spectrum chamber (6) to 10 -4 Pa or less; acquiring background data of a mass spectrum chamber (6); background data of the mass spectrum chamber (6) is 10 -12 Pa·m 3 And/s or less;
step 2, mounting a detector packaging Dewar to be detected on a station detection unit, covering the detector packaging Du Washang with a helium cover (31), and connecting the helium cover (31) with a helium bag (33) through a helium bag valve (32);
step 3, a station valve, a pre-pumping valve IV (22) and a pre-pumping valve II (24) are opened, a pre-pump (1) is adopted to pre-pump the station detection unit, the pre-pumping valve III (23) is opened after the pre-pumping is completed, and a molecular pump (3) is adopted to pump the station detection unit to 10 -4 Pa or less;
step 4, opening a helium bag valve (32), and filling helium into a detector package Du Wahai gas hood (31); opening a mass spectrum chamber valve (11), and measuring the vacuum degree in the mass spectrum chamber (6) by adopting a second vacuum gauge (10), when the vacuum degree of the mass spectrum chamber reaches 10 -4 After Pa or below, helium signals in the mass spectrometer chamber (6) are collected and detected by a mass spectrometer (9), and the helium signals are marked as i s ；
Step 5, closing the station valve, opening the first standard leak hole (16) and the first standard leak hole valve (14), and recording helium signal i after the mass spectrum chamber (6) is stabilized again sp ；
And 6, comparing the twice helium signal with the background helium signal, and calculating the leak rate of the detector packaging Dewar by combining the leak rate of the first standard leak hole.
4. A method for detecting leakage of an infrared imaging system detector package dewar multi-station according to claim 3, wherein in the step 1, background data of a mass spectrum chamber (6) is calibrated by using a first standard leak (16), specifically:
s11, vacuumizing the mass spectrum chamber (6) by using a backing pump and a molecular pump, measuring the vacuum degree of the mass spectrum chamber (6) by using a second vacuum gauge (10), and vacuumizing the mass spectrum chamber (6) to 10 -4 Under Pa, a mass spectrometer (9) is started to record helium signal i of a mass spectrum chamber (6) 0 ；
S12, opening a first standard leak hole (16), a first standard leak hole valve (14) and a mass spectrum chamber valve (11), and recording a stabilized helium signal i by adopting a mass spectrometer (9) sp ；
S13, closing the first standard leak valve (14), opening the station valve, and when the mass spectrum chamber (6) reaches 10 -4 After Pa or below, the mass spectrometer (9) is started to record helium signal i of the mass spectrum chamber (6) s ；
S14, calculating background data of the mass spectrum chamber (6) according to the following formula:
5. the infrared imaging system detector package dewar multi-station leak detection method as claimed in claim 3, wherein the leak detection system comprises a plurality of station detection units, each detection unit is connected with the acquisition test unit and the vacuum maintenance unit through respective station valves; and when the detector packaging Dewar on the previous station detection unit is detected, the detector packaging Dewar on the next station detection unit is installed.
6. An infrared imaging system detector packaging Dewar multi-station leak detection method based on the infrared imaging system detector packaging Dewar multi-station leak detection system as claimed in claim 1, which is characterized in that a cumulative method is adopted to detect leak rate of the detector packaging Dewar to be detected; the method specifically comprises the following steps:
step 1, starting a backing pump and a molecular pump, and pumping the mass spectrum chamber (6) to 10 -6 Pa or less; background data of a mass spectrum chamber (6) is acquired, and background data verification is carried out based on an accumulation method, wherein the background data of the mass spectrum chamber (6) is 10 -12 Pa·m 3 And/s or less;
the background data verification based on the accumulation method specifically comprises the following steps:
closing the molecular pump valve, opening the getter pump valve and the ion pump valve, and opening the mass spectrometer (9) to test the rate of rise R of the helium signal in the mass spectrometer chamber (6) over a period of time 0 The method comprises the steps of carrying out a first treatment on the surface of the Closing the gas suction pump valve and the ion pump valve, opening the molecular pump valve, and pumping the mass spectrum chamber (6) to 10 again -6 Pa or less; opening a second standard leak hole (17), a second standard leak hole valve (15) and a mass spectrum valve (11), closing a molecular pump valve, opening an air suction pump valve and an ion pump valve, and opening a mass spectrometer (9) to test the rising rate R of helium ion flow in the same time period after the second standard leak hole is opened sp The method comprises the steps of carrying out a first treatment on the surface of the Closing the second standard leak valve (15), closing the gas suction pump valve and the ion pump valve, opening the station valve, opening the molecular pump valve, and pumping the mass spectrum chamber (6) to 10 again -6 Pa or less; closing the molecular pump valve, opening the getter pump valve and the ion pump valve, and opening the rate of rise R of the helium signal of the mass spectrometer in the same time of testing the mass spectrometer chamber s The method comprises the steps of carrying out a first treatment on the surface of the Background data for the mass spectrometry chamber (6) is calculated according to the following formula:
step 2, mounting a detector packaging Dewar to be detected on a station detection unit, covering the detector packaging Du Washang with a helium cover (31), and connecting the helium cover (31) with a helium bag (33) through a helium bag valve (32);
step 3, a station valve, a pre-pumping valve IV (22) and a pre-pumping valve II (24) are opened, the station detection unit is pre-pumped by using a backing pump (1), the pre-pumping valve III (23) is opened after the pre-pumping is completed, and the station detection unit is pumped by using a molecular pump (3)To 10 -6 Pa or less;
step 4, opening a helium bag valve (32), filling helium into a helium cover (31), opening a mass spectrum chamber valve (11), closing a molecular pump valve, opening a gas suction pump valve and an ion pump valve, and opening a mass spectrometer (9) to test the rising rate of helium signals in a period of time of a mass spectrum chamber (6); closing the gas suction pump valve and the ion pump valve, opening the molecular pump valve, and pumping the mass spectrum chamber (6) to 10 again -6 Pa or less; opening a second standard leak hole (17), a second standard leak hole valve (15) and a mass spectrum valve (11), closing a molecular pump valve, opening an air suction pump valve and an ion pump valve, and opening a mass spectrometer (9) to test the rising rate of helium ion flow in the same time period after the second standard leak hole is opened; and calculating the leak rate of the detector packaging Dewar according to the twice rising rate and the leak rate of the second standard leak hole (16).
7. The multi-station leak detection method for the infrared imaging system detector package Dewar of claim 6, wherein the leak detection system comprises a plurality of station detection units, and each detection unit is connected with the acquisition test unit and the vacuum maintenance unit through respective station valves; and when the detector packaging Dewar on the previous station detection unit is detected, the detector packaging Dewar on the next station detection unit is installed.
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