CN112492477A - Miniature microphone dust keeper and MEMS microphone - Google Patents
Miniature microphone dust keeper and MEMS microphone Download PDFInfo
- Publication number
- CN112492477A CN112492477A CN202011400333.5A CN202011400333A CN112492477A CN 112492477 A CN112492477 A CN 112492477A CN 202011400333 A CN202011400333 A CN 202011400333A CN 112492477 A CN112492477 A CN 112492477A
- Authority
- CN
- China
- Prior art keywords
- film
- dustproof
- protective film
- microphone
- miniature microphone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 title claims description 10
- 230000001681 protective effect Effects 0.000 claims abstract description 49
- 239000000463 material Substances 0.000 claims abstract description 19
- 239000007769 metal material Substances 0.000 claims description 11
- 239000000956 alloy Substances 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 229910052737 gold Inorganic materials 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- 229910052763 palladium Inorganic materials 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 6
- 229910052715 tantalum Inorganic materials 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 229910052721 tungsten Inorganic materials 0.000 claims description 6
- 238000002360 preparation method Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 7
- 238000001312 dry etching Methods 0.000 abstract description 6
- 238000003631 wet chemical etching Methods 0.000 abstract description 6
- 238000012797 qualification Methods 0.000 abstract description 4
- 238000012545 processing Methods 0.000 abstract description 2
- 239000012528 membrane Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000010410 layer Substances 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 238000002845 discoloration Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 238000007704 wet chemistry method Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2231/00—Details of apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor covered by H04R31/00, not provided for in its subgroups
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Manufacturing & Machinery (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
The invention provides a miniature microphone dustproof device and an MEMS (micro-electromechanical systems) microphone, wherein the miniature microphone dustproof device comprises a supporting carrier and a dustproof film arranged on one side of the supporting carrier; at least one layer of first protective film is covered on one side of the dustproof film, which is far away from the support carrier; the first protective film is made of a material different from that of the dustproof film. By utilizing the invention, the dustproof film can be protected by the first protective film, and is prevented from being subjected to dry or wet chemical etching in the processing process, so that the quality of products is improved, and the qualification rate is increased.
Description
Technical Field
The invention relates to the technical field of electronic products, in particular to a miniature microphone dustproof device and an MEMS (micro-electromechanical systems) microphone provided with the miniature microphone dustproof device.
Background
In order to prevent the chip inside the miniature microphone from being affected by external powder, particles and moisture, and therefore to reduce the service life of the miniature microphone, under normal circumstances, a dustproof device is required to be arranged at the communication position (such as a sound hole) between the inside of the miniature microphone and the outside, and the miniature microphone chip is separated from the external environment through the dustproof device, so that the miniature microphone chip is protected.
However, the conventional microphone dust-proof device usually includes a mesh part and a carrier part, and in the manufacturing process of the microphone dust-proof device, plasma treatment of fluorine-containing gas is required, and when the mesh part is a single-layer film of simple substance metal or alloy, the mesh part is easily attacked by plasma in the plasma treatment process, so that the problem of discoloration of the surface of the mesh part is caused, the appearance inspection of the product is unqualified, and the qualification rate is low.
Disclosure of Invention
In view of the above problems, an object of the present invention is to provide a micro microphone dust-proof device and an MEMS microphone, so as to solve the problem that the surface of the mesh part is etched, which affects the quality and yield of the finished product, etc. due to the fact that the mesh part of the conventional dust-proof device is easily subjected to external dry or wet chemical etching in the processing process.
The invention provides a dustproof device of a miniature microphone, which comprises a supporting carrier and a dustproof film arranged on one side of the supporting carrier; at least one layer of first protective film is covered on one side of the dustproof film, which is far away from the support carrier; the first protective film is made of a material different from that of the dustproof film.
In addition, the preferable technical proposal is that one side of the dustproof film close to the supporting carrier is covered with at least one layer of second protective film; the second protective film is made of a material different from that of the dustproof film.
In addition, the first protection film preferably includes at least one metal material selected from Cr, Al, Pt, Au, Pd, Co, Ni, Cu, Fe, Ti, Ta, and W; the second protective film comprises at least one metal material of Cr, Al, Pt, Au, Pd, Co, Ni, Cu, Fe, Ti, Ta and W.
In addition, it is preferable that the first protective film and the second protective film are made of the same material.
In addition, it is preferable that the first protective film and the second protective film are each a single metal film or an alloy film.
In addition, the preferred technical scheme is that the dustproof film is a single metal film or an alloy film.
In addition, the preferable technical proposal is that the support carrier comprises a support part and a through hole arranged at the center of the support part; the dustproof film is fixed on the supporting part through the second protective film.
In addition, the preferred technical scheme is that the dustproof film is of a grid structure; the first protective film and the second protective film have the same structure as the dust-proof film.
According to another aspect of the present invention, there is provided a MEMS microphone, comprising the above-mentioned miniature microphone dust-proof device; the miniature microphone dustproof device is arranged at the sound hole of the MEMS microphone; alternatively, the miniature microphone dust-proof device is arranged at the chip of the MEMS microphone.
Utilize above-mentioned miniature microphone dust keeper and MEMS microphone, keep away from the first protective film that supports the carrier at the dust-proof membrane one side cover at least one deck to make the material of first protective film different with the material of dust-proof membrane, in the dust-proof membrane preparation engineering, the first protective film of accessible protects the protective film, prevents that dry-type or wet-type chemical etching from causing the damage to the dust-proof membrane surface, and then ensures the integrality of dust-proof membrane, improves the qualification rate of product.
To the accomplishment of the foregoing and related ends, one or more aspects of the invention comprise the features hereinafter fully described. The following description and the annexed drawings set forth in detail certain illustrative aspects of the invention. These aspects are indicative, however, of but a few of the various ways in which the principles of the invention may be employed. Further, the present invention is intended to include all such aspects and their equivalents.
Drawings
Other objects and results of the present invention will become more apparent and more readily appreciated as the same becomes better understood by reference to the following description taken in conjunction with the accompanying drawings. In the drawings:
fig. 1 is a perspective view of a dust-proof device for a miniature microphone according to an embodiment of the present invention;
fig. 2 is a cross-sectional view of a dust-proof device for a miniature microphone according to an embodiment of the present invention.
Wherein the reference numerals include: support carrier 11, dust-proof membrane 12, filter screen 13, first protection film 14, second protection film 15.
The same reference numbers in all figures indicate similar or corresponding features or functions.
Detailed Description
In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of one or more embodiments. It may be evident, however, that such embodiment(s) may be practiced without these specific details. In other instances, well-known structures and devices are shown in block diagram form in order to facilitate describing one or more embodiments.
To describe the dust-proof device of a miniature microphone according to the present invention in detail, embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
Fig. 1 and 2 show schematic structures of a miniature microphone dust-proof device according to an embodiment of the present invention from different angles, respectively.
As shown in fig. 1 and fig. 2 together, the miniature microphone dust-proof device according to the embodiment of the present invention includes a support carrier 11 and a dust-proof film 12 disposed on one side of the support carrier 11; at least one layer of first protection film 14 covers one side of the dust-proof film 12 far away from the support carrier 11, the material of the first protection film 14 is set to be different from that of the dust-proof film 12, and then the first protection film 14 is used for isolating and protecting the dust-proof film 12, so that the micro microphone dust-proof device is prevented from being attacked by dry or wet chemistry in the manufacturing process, and the surface color stability and the structural integrity of the dust-proof film 12 are further ensured.
In order to further protect the protection film, at least one layer of second protection film 15 may be covered on the other side of the dustproof film 12 close to the support carrier 11, the material of the second protection film 15 is different from the material of the dustproof film 12, and further, by using a heterogeneous metal material which has etching resistance to attack of dry or wet chemical etching and does not cause discoloration as a protection film (including the first protection film 14 and the second protection film 15, the same applies hereinafter) to be stacked on the dustproof film 12, the effect of protecting the dustproof film 12 is achieved.
The number of the first protective film 14 and the second protective film 15 can be adjusted according to the production requirements of the product, one layer can be provided under normal conditions, and when the fluorine plasma attacks seriously during the treatment process, multiple layers of protective films can be provided according to specific production conditions; similarly, the protective film may be disposed on one side or both sides of the dustproof film.
Specifically, in the manufacturing process of the dustproof device, if the dry or wet chemical etching is attacked by other ions except fluorine, the material of the protective film can be adjusted according to the specific plasma, so that the protective film can resist the attack of the plasma, and the purpose of protecting the dustproof film 12 can be achieved.
In one embodiment of the present invention, the material of the first protection film 14 may include at least one metal material selected from Cr, Al, Pt, Au, Pd, Co, Ni, Cu, Fe, Ti, Ta, and W, and the first protection film 14 may be a single metal material or a mixture of the metal materials; correspondingly, the material of the second protection film 15 may include at least one metal material of Cr, Al, Pt, Au, Pd, Co, Ni, Cu, Fe, Ti, Ta, and W, and the second protection film 15 may be a single metal material or a mixture of the metal materials.
In other words, the first protection film 14 and the second protection film 15 may be provided as a single metal film or an alloy film, respectively. In addition, in a specific application process, the materials of the first protection film 14 and the second protection film 15 may be the same, that is, the materials of the first protection film 14 and the second protection film 15 are the same, or may be different materials.
In another embodiment of the present invention, the supporting carrier 11 further comprises a supporting portion and a through hole disposed at the center of the supporting portion, the dust-proof membrane 12 comprises a fixing portion fixedly connected with the supporting portion, and a filter screen 13 disposed inside the fixing portion and corresponding to the through hole; the first protective film 14 and the second protective film 15 are respectively provided on both sides of the dustproof film 12, that is, the fixing portion of the dustproof film 12 is fixed on the supporting portion through the second protective film 15.
In order to ensure that the protective film only plays a role of protection without affecting the dustproof and ventilation effects of the dustproof film 12, the structures of the first protective film 14 and the second protective film 15 are the same as the structure of the dustproof film 12, for example, the position of the protective film corresponding to the filter screen 13 can be set to be a corresponding grid structure, the first protective film 14 and the second protective film 15 can be arranged on the dustproof film by adopting various processes such as sticking, spraying, sputtering and the like, and the application does not limit the specifically adopted process means.
Corresponding to the micro microphone dustproof device, the invention also provides an MEMS microphone, which comprises the micro microphone dustproof device; the miniature microphone dustproof device can be arranged at the sound hole of the MEMS microphone; or the micro microphone dustproof device is arranged at the chip of the MEMS microphone, and the internal components of the MEMS microphone are isolated in a dustproof mode through the micro microphone dustproof device.
According to the miniature microphone dustproof device and the MEMS microphone, the protective films are respectively arranged on the two sides of the dustproof film, the protective films are made of materials different from those of the dustproof film, and therefore when dry or wet chemical treatment is carried out in the manufacturing process of the miniature microphone dustproof device, attack on the dustproof film by dry or wet chemical etching can be resisted through the protective films, the change of color of the dustproof film and etching caused on the surface of the dustproof film by the dry or wet chemical etching can be prevented, the completeness of the dustproof film is further ensured, and the performance and the qualification rate of products are improved.
The micro microphone dust-proofing device and the MEMS microphone according to the present invention are described above by way of example with reference to fig. 1 and 2. However, it will be understood by those skilled in the art that various modifications may be made to the above-described miniature microphone dust-proof device and MEMS microphone of the present invention without departing from the scope of the present invention. Therefore, the scope of the present invention should be determined by the contents of the appended claims.
Claims (9)
1. A dustproof device for a miniature microphone comprises a supporting carrier and a dustproof film arranged on one side of the supporting carrier; it is characterized in that the preparation method is characterized in that,
at least one first protective film is covered on one side, away from the supporting carrier, of the dustproof film;
the first protection film is made of a material different from that of the dustproof film.
2. The miniature microphone dust keeper of claim 1,
at least one layer of second protective film covers one side of the dustproof film close to the support carrier;
the second protective film is made of a material different from that of the dustproof film.
3. The miniature microphone dust keeper of claim 2,
the first protective film comprises at least one metal material of Cr, Al, Pt, Au, Pd, Co, Ni, Cu, Fe, Ti, Ta and W;
the second protective film comprises at least one metal material of Cr, Al, Pt, Au, Pd, Co, Ni, Cu, Fe, Ti, Ta and W.
4. The miniature microphone dust keeper of claim 2,
the first protective film and the second protective film are made of the same material.
5. The miniature microphone dust keeper of claim 2,
the first protective film and the second protective film are respectively a single metal film or an alloy film.
6. The miniature microphone dust keeper of claim 1 or 2,
the dustproof film is a single metal film or an alloy film.
7. The miniature microphone dust keeper of claim 2,
the support carrier comprises a support part and a through hole arranged in the center of the support part;
the dustproof film is fixed on the supporting part through the second protective film.
8. The miniature microphone dust keeper of claim 2,
the dustproof film is of a grid structure; and,
the first protective film and the second protective film have the same structure as the dust-proof film.
9. A MEMS microphone comprising the miniature microphone dust-proof device of any one of claims 1 to 8; wherein,
the miniature microphone dustproof device is arranged at the sound hole of the MEMS microphone; or, the miniature microphone dust-proof device is arranged at the chip of the MEMS microphone.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011400333.5A CN112492477A (en) | 2020-12-02 | 2020-12-02 | Miniature microphone dust keeper and MEMS microphone |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011400333.5A CN112492477A (en) | 2020-12-02 | 2020-12-02 | Miniature microphone dust keeper and MEMS microphone |
Publications (1)
Publication Number | Publication Date |
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CN112492477A true CN112492477A (en) | 2021-03-12 |
Family
ID=74939197
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202011400333.5A Pending CN112492477A (en) | 2020-12-02 | 2020-12-02 | Miniature microphone dust keeper and MEMS microphone |
Country Status (1)
Country | Link |
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CN (1) | CN112492477A (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100246877A1 (en) * | 2009-01-20 | 2010-09-30 | Fortemedia, Inc. | Miniature MEMS Condenser Microphone Package and Fabrication Method Thereof |
CN107946342A (en) * | 2017-11-14 | 2018-04-20 | 京东方科技集团股份有限公司 | Flexible display substrates and preparation method thereof, display device |
CN110958549A (en) * | 2019-12-31 | 2020-04-03 | 歌尔股份有限公司 | A dustproof construction and MEMS microphone packaging structure for MEMS device |
CN111147988A (en) * | 2018-11-06 | 2020-05-12 | 哈曼贝克自动系统股份有限公司 | Invisible ceiling microphone |
CN111711908A (en) * | 2020-06-30 | 2020-09-25 | 歌尔微电子有限公司 | Miniature microphone dust keeper and MEMS microphone |
-
2020
- 2020-12-02 CN CN202011400333.5A patent/CN112492477A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100246877A1 (en) * | 2009-01-20 | 2010-09-30 | Fortemedia, Inc. | Miniature MEMS Condenser Microphone Package and Fabrication Method Thereof |
CN107946342A (en) * | 2017-11-14 | 2018-04-20 | 京东方科技集团股份有限公司 | Flexible display substrates and preparation method thereof, display device |
CN111147988A (en) * | 2018-11-06 | 2020-05-12 | 哈曼贝克自动系统股份有限公司 | Invisible ceiling microphone |
CN110958549A (en) * | 2019-12-31 | 2020-04-03 | 歌尔股份有限公司 | A dustproof construction and MEMS microphone packaging structure for MEMS device |
CN111711908A (en) * | 2020-06-30 | 2020-09-25 | 歌尔微电子有限公司 | Miniature microphone dust keeper and MEMS microphone |
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PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
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Application publication date: 20210312 |