CN112484669A - Small-size two-dimensional vector optical fiber inclination angle sensing probe and sensing device - Google Patents
Small-size two-dimensional vector optical fiber inclination angle sensing probe and sensing device Download PDFInfo
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- CN112484669A CN112484669A CN202011433560.8A CN202011433560A CN112484669A CN 112484669 A CN112484669 A CN 112484669A CN 202011433560 A CN202011433560 A CN 202011433560A CN 112484669 A CN112484669 A CN 112484669A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
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Abstract
The invention discloses a small-volume two-dimensional vector optical fiber inclination angle sensing probe, wherein a first sensing structure comprises a first single-mode optical fiber, a polymer micro-hollow column and a first quartz column which are sequentially connected, a second single-mode optical fiber, a polymer microsphere and a second quartz column which are sequentially connected, the two single-mode optical fibers are arranged in parallel, one end of each single-mode optical fiber is connected with an optical fiber coupler, a first Fabry-Poro interference cavity is formed in the polymer micro-hollow column, and a second Fabry-Poro interference cavity is formed in the polymer microsphere. According to the optimally designed small-size two-dimensional vector optical fiber inclination angle sensing probe, when the detection surface is inclined, the stretching action of the gravity of the quartz column on the polymer micro-hollow column and the polymer microsphere is changed, and the polymer micro-hollow column has anisotropy in two directions relative to the polymer microsphere, so that the cavity length of the Fabry-Perot interference cavity is modulated through the inclination angle change, and the two-dimensional vector optical fiber inclination angle detection is realized; compact structure, flexible use, and greatly improved sensitivity based on polymer materials.
Description
Technical Field
The invention relates to the technical field of optical fiber sensing probes, in particular to a small-size two-dimensional vector optical fiber inclination angle sensing probe and a sensing device.
Background
The angle sensor has important significance in the fields of bridge erection, railway laying, civil engineering, oil drilling, aviation and navigation, industrial automation, intelligent platforms, machining and the like, and becomes an indispensable tool in the fields. Common angle sensors can be divided into electrical sensors and optical sensors. The electrical sensor is easy to be interfered by electromagnetic waves, signals are easy to attenuate, and the volume and the structure of the electrical sensor are large and complex. Optical sensors have some unique advantages, such as electromagnetic interference resistance, corrosion resistance, small structure and the like, and are widely applied in many fields at present.
Optical sensors are mainly fiber grating based sensors. When the inclination angle changes, the modulation of the common fiber grating on optical signals is very weak, the angle sensitivity is extremely low, and the angle demodulation is difficult to realize. It is therefore often necessary to sensitize the fiber grating structure with a mechanical structure to increase the angular response of the sensor. As shown in patent 200910097186.6, three fiber gratings are fixed on three swing arms of a mechanical pendulum, and the wavelength information of the three fiber gratings is demodulated to realize sensing of a two-dimensional tilt angle. However, such sensing structures are typically bulky, complex and difficult to fabricate.
Disclosure of Invention
In order to solve the technical problems in the background technology, the invention provides a small-size two-dimensional vector optical fiber inclination angle sensing probe and a sensing device.
The invention provides a small-volume two-dimensional vector optical fiber inclination angle sensing probe, which comprises: the sensing device comprises a first sensing structure, a second sensing structure and an optical fiber coupler;
the first sensing structure comprises a first single-mode fiber, a polymer micro hollow column and a first quartz column which are sequentially connected, the polymer micro hollow column is perpendicular to the first single-mode fiber and is arranged coaxially with the first single-mode fiber;
the second sensing structure comprises a second single-mode fiber, a polymer microsphere and a second quartz column which are sequentially connected, the spherical center of the polymer microsphere is positioned on the axis of the second single-mode fiber, and the second quartz column and the second single-mode fiber are coaxially arranged;
the first single-mode fiber and the second single-mode fiber are arranged in parallel, one end, far away from the polymer micro-hollow column, of the first single-mode fiber and one end, far away from the polymer microsphere, of the second single-mode fiber are both connected with the fiber coupler, a first Fabry-Perot interference cavity is formed in the polymer micro-hollow column, and a second Fabry-Perot interference cavity is formed in the polymer microsphere.
Preferably, the side wall of the polymer micro hollow column is connected with the first single-mode fiber and the first quartz column through ultraviolet curing glue;
and/or the side wall of the polymer microsphere is connected with the second single-mode fiber and the second quartz column through ultraviolet curing glue.
Preferably, the sensor further comprises an encapsulation shell, the first sensing structure is located in the encapsulation shell, the polymer micro hollow column and the first quartz column are arranged in a suspended mode, the second sensing structure is located in the encapsulation shell, and the polymer microsphere and the second quartz column are arranged in a suspended mode.
Preferably, the outer diameter of the first single mode fiber is 120-130 μm, and the diameter of the polymer micro hollow column is smaller than that of the first single mode fiber.
Preferably, the first quartz column and/or the second quartz column are made by cutting two ends of a single-mode optical fiber flat.
Preferably, the polymer micro hollow column is formed by ultraviolet curing colloid through ultraviolet laser exposure and curing which is coupled and output by a multimode fiber.
Preferably, the polymer microspheres are formed by injecting ultraviolet curing colloid into liquid to form spherical liquid drops and then exposing and curing the spherical liquid drops.
Preferably, the polymer micro-hollow cylinder is perpendicular to the plane of the axes of the first single-mode fiber and the second single-mode fiber.
According to the small-volume two-dimensional vector optical fiber inclination angle sensing probe, a first single-mode optical fiber, a polymer micro hollow column and a first quartz column which are sequentially connected are included in a first sensing structure, a second single-mode optical fiber, a polymer microsphere and a second quartz column are sequentially connected, the two single-mode optical fibers are arranged in parallel, one end of each single-mode optical fiber is connected with a photoelectric coupler, a first Fabry-Poro interference cavity is formed in the polymer micro hollow column, and a second Fabry-Poro interference cavity is formed in the polymer microsphere. According to the optimally designed small-size two-dimensional vector optical fiber inclination angle sensing probe, when the detection surface is inclined, the stretching action of the gravity of the quartz column on the polymer micro-hollow column and the polymer microsphere is changed, and the polymer micro-hollow column has anisotropy in two directions relative to the polymer microsphere, so that the cavity length of the Fabry-Perot interference cavity is modulated through the inclination angle change, and the two-dimensional vector optical fiber inclination angle detection is realized; compact structure, flexible use, and greatly improved sensitivity based on polymer materials.
The invention also provides a small-volume two-dimensional vector optical fiber inclination angle sensing device which comprises the small-volume two-dimensional vector optical fiber inclination angle sensing probe.
Preferably, the device further comprises a circulator, a light source and a spectrometer, and the optical fiber coupler is connected with the light source and the spectrometer through the circulator.
In the invention, the technical effect of the small-volume two-dimensional vector optical fiber inclination angle sensing device is similar to that of the small-volume two-dimensional vector optical fiber inclination angle sensing probe, and therefore, the description is omitted.
Drawings
Fig. 1 is a schematic structural diagram of a small-volume two-dimensional vector optical fiber tilt angle sensing probe according to the present invention.
Fig. 2 is a schematic side view of a first sensing structure of a small-volume two-dimensional vector optical fiber tilt sensing probe according to the present invention.
Fig. 3 is a schematic side view of a second sensing structure of a small-volume two-dimensional vector optical fiber tilt sensing probe according to the present invention.
Fig. 4 is a schematic structural diagram of a small-volume two-dimensional vector optical fiber tilt angle sensing device according to the present invention.
Detailed Description
As shown in fig. 1 to 4, fig. 1 is a schematic structural diagram of a small-volume two-dimensional vector optical fiber tilt angle sensing probe provided by the present invention, fig. 2 is a schematic structural diagram of a side view of a first sensing structure of the small-volume two-dimensional vector optical fiber tilt angle sensing probe provided by the present invention, fig. 3 is a schematic structural diagram of a side view of a second sensing structure of the small-volume two-dimensional vector optical fiber tilt angle sensing probe provided by the present invention, and fig. 4 is a schematic structural diagram of a small-volume two-dimensional vector optical fiber tilt angle sensing device provided by the present invention.
Referring to fig. 1 to 3, the invention provides a small-volume two-dimensional vector optical fiber tilt sensing probe, which includes: a first sensing structure, a second sensing structure and a fiber coupler 7;
the first sensing structure comprises a first single-mode fiber 1, a polymer micro hollow column 3 and a first quartz column 5 which are sequentially connected, the polymer micro hollow column 3 is perpendicular to the first single-mode fiber 1, and the first quartz column 5 and the first single-mode fiber 1 are coaxially arranged;
the second sensing structure comprises a second single-mode fiber 2, a polymer microsphere 4 and a second quartz column 6 which are sequentially connected, the spherical center of the polymer microsphere 4 is positioned on the axis of the second single-mode fiber 2, and the second quartz column 6 and the second single-mode fiber 2 are coaxially arranged;
the first single-mode fiber 1 and the second single-mode fiber 2 are arranged in parallel, one end, far away from the polymer micro-hollow column 3, of the first single-mode fiber 1 and one end, far away from the polymer microsphere 4, of the second single-mode fiber 2 are both connected with the fiber coupler 7, a first Fabry-Perot interference cavity is formed in the polymer micro-hollow column 3, and a second Fabry-Perot interference cavity is formed in the polymer microsphere 4.
In order to describe a specific detection method of the small-volume two-dimensional vector optical fiber tilt sensing probe of the present embodiment in detail, referring to fig. 4, the present embodiment further provides a small-volume two-dimensional vector optical fiber tilt sensing apparatus, including the small-volume two-dimensional vector optical fiber tilt sensing probe.
Specifically, the device further comprises a circulator 20, a light source 30 and a spectrometer 40, wherein the fiber coupler 7 is connected with the light source 30 and the spectrometer 40 through the circulator 20.
In the specific working process of the small-volume two-dimensional vector optical fiber inclination angle sensing probe, light emitted by a light source enters the sensing probe, enters two sensing structures which are arranged in parallel in a suspended mode, and forms a first Fabry-Perot interference cavity and a second Fabry-Perot interference cavity in a polymer micro hollow column and a polymer micro hollow sphere respectively. The spectrums generated by the two interference cavities are superposed to generate three-beam interference, and finally, an interference spectrum with two types of interference peaks is formed. The inclination angle response of the sensor comes from the stretching effect of the gravity of the quartz column on the polymer micro-hollow column and the polymer micro-sphere, and when the inclination angle of the plane where the two sensing structures are located changes, the acting force exerted on the micro-hollow column and the polymer micro-sphere changes, so that the length of an interference cavity is changed, and the interference spectrum drifts. The stretching action of the gravity of the quartz column on the polymer micro hollow column has anisotropic characteristics in two directions, so that the sensing structure has two-dimensional vector. While the gravity of the quartz column has anisotropic properties in one direction and isotropic properties in the other direction to the stretching of the polymer microspheres. The sensing probes of the two optical fiber inclination angle sensing structures which are arranged in parallel are constructed, so that the modulation effect of the vector inclination angle on the cavity length of the sensing structure is realized, and the spectral signals output by the optical fiber sensor are subjected to vector inclination angle modulation to form the optical fiber vector inclination angle sensor.
The vector dip angle demodulation principle of the invention is as follows: the first inclination angle is first fixed at 0 °, the second inclination angle increases from 0 ° to 360 °, and the interval is 30 °. The spectra were recorded for each angle point. The first inclination angles were fixed at 30 ° to 360 ° and the angular intervals were 30 °, respectively changing the second inclination angles as described above. Thus, the wavelength relation between the first inclination angle and the first type interference peak and the wavelength relation between the second inclination angle and the second type interference peak under the condition of different first inclination angles are obtained. In the process of measuring the vector inclination angle, firstly, the wavelength drift of the first-class interference peak is observed, the first inclination angle is obtained according to the wavelength relation between the first inclination angle and the first-class interference peak, the wavelength relation between the corresponding second inclination angle and the second-class interference peak is found according to the obtained first inclination angle, and the size of the second inclination angle is obtained by observing the movement of the second-class interference peak. Therefore, by this demodulation method, vector sensing of the tilt angle can be realized.
In this embodiment, in the small-volume two-dimensional vector optical fiber tilt angle sensing probe, a first single mode fiber, a polymer micro hollow column and a first quartz column, which are included in a first sensing structure, are sequentially connected, a second single mode fiber, a polymer microsphere and a second quartz column are sequentially connected, the two single mode fibers are arranged in parallel, one end of each single mode fiber is connected with a photoelectric coupler, a first fabry-perot interference cavity is formed in the polymer micro hollow column, and a second fabry-perot interference cavity is formed in the polymer microsphere. According to the optimally designed small-size two-dimensional vector optical fiber inclination angle sensing probe, when the detection surface is inclined, the stretching action of the gravity of the quartz column on the polymer micro-hollow column and the polymer microsphere is changed, and the polymer micro-hollow column has anisotropy in two directions relative to the polymer microsphere, so that the cavity length of the Fabry-Perot interference cavity is modulated through the inclination angle change, and the two-dimensional vector optical fiber inclination angle detection is realized; compact structure, flexible use, and greatly improved sensitivity based on polymer materials.
In a specific embodiment, the side wall of the polymer micro hollow column 3 is connected with the first single-mode fiber 1 and the first quartz column 5 through ultraviolet curing glue;
and/or the side wall of the polymer microsphere 4 is connected with the second single-mode fiber 2 and the second quartz column 6 through ultraviolet curing glue.
In a specific selection of the UV curable Adhesive, Norland Optical Adhesive NOA63, manufactured by Nolan corporation, was used.
In addition, in other embodiments, the polymer micro-hollow column 3 is perpendicular to the plane of the axes of the first single-mode fiber 1 and the second single-mode fiber 2.
In other specific embodiments, the sensor further comprises a packaging shell 8, the first sensing structure is located in the packaging shell 8, the polymer micro hollow column 3 and the first quartz column 5 are arranged in a suspended manner, the second sensing structure is located in the packaging shell 8, and the polymer micro ball 4 and the second quartz column 6 are arranged in a suspended manner; the sensing structure is protected by the package housing.
In the specific size selection, the outer diameters of the first single-mode fiber 1 and the second single-mode fiber 2 are 120-130 μm, and the diameters of the polymer micro-hollow column 3 and the polymer microsphere 4 are smaller than those of the single-mode fibers.
In a specific preparation mode of the quartz column, the first quartz column 5 and/or the second quartz column 6 are/is made by cutting two ends of a single-mode optical fiber flat, and the length is 2mm-3 mm.
In the concrete preparation method of the polymer micro hollow column, the polymer micro hollow column 3 is formed by ultraviolet curing colloid through ultraviolet laser exposure and curing which is coupled and output by multimode optical fibers.
Specifically, the polymer micro hollow column of the present embodiment comprises the following steps:
s1, dripping ultraviolet curing adhesive on the surface of the substrate, and forming an ultraviolet curing adhesive film through spin coating;
s2, arranging a multimode optical fiber and an ultraviolet laser, wherein laser generated by the ultraviolet laser irradiates the end face of the incident end of the multimode optical fiber through focusing, and the emergent end of the multimode optical fiber is controlled to emit annular laser beams by adjusting the incident angle of the laser;
s3, vertically inserting the emergent end of the multimode optical fiber into the ultraviolet curing adhesive film and keeping a preset distance with the substrate, opening a laser shutter, exposing the ultraviolet curing adhesive film by the annular laser beam, closing the laser shutter, and removing the multimode optical fiber;
and S4, cleaning and separating, and forming the polymer micro hollow column by the exposed ultraviolet curing glue on the surface of the substrate.
Correspondingly, the polymer microspheres 4 are formed by injecting ultraviolet curing colloid into liquid to form spherical liquid drops and then exposing and curing the spherical liquid drops.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (10)
1. A small-volume two-dimensional vector optical fiber tilt angle sensing probe, comprising: a first sensing structure, a second sensing structure and a fiber coupler (7);
the first sensing structure comprises a first single-mode fiber (1), a polymer micro hollow column (3) and a first quartz column (5) which are sequentially connected, the polymer micro hollow column (3) is perpendicular to the first single-mode fiber (1) and arranged, and the first quartz column (5) and the first single-mode fiber (1) are coaxially arranged;
the second sensing structure comprises a second single-mode fiber (2), a polymer microsphere (4) and a second quartz column (6) which are sequentially connected, the sphere center of the polymer microsphere (4) is positioned on the axis of the second single-mode fiber (2), and the second quartz column (6) and the second single-mode fiber (2) are coaxially arranged;
the first single-mode fiber (1) and the second single-mode fiber (2) are arranged in parallel, one end, far away from the polymer micro-hollow column (3), of the first single-mode fiber (1) and one end, far away from the polymer microsphere (4), of the second single-mode fiber (2) are both connected with the fiber coupler (7), a first Fabry-Perot interference cavity is formed in the polymer micro-hollow column (3), and a second Fabry-Perot interference cavity is formed in the polymer microsphere (4).
2. The small-volume two-dimensional vector optical fiber inclination angle sensing probe according to claim 1, characterized in that the side wall of the polymer micro-hollow column (3) is connected with the first single-mode optical fiber (1) and the first quartz column (5) through ultraviolet curing glue;
and/or the side wall of the polymer microsphere (4) is connected with the second single-mode fiber (2) and the second quartz column (6) through ultraviolet curing glue.
3. The small-volume two-dimensional vector optical fiber tilt angle sensing probe according to claim 1, further comprising a packaging shell (8), wherein the first sensing structure is located in the packaging shell (8), the polymer micro-hollow column (3) and the first quartz column (5) are arranged in a suspended manner, the second sensing structure is located in the packaging shell (8), and the polymer micro-sphere (4) and the second quartz column (6) are arranged in a suspended manner.
4. The small-volume two-dimensional vector optical fiber tilt sensing probe according to claim 1, wherein the outer diameter of the first single mode optical fiber (1) is 120-130 μm, and the diameter of the polymer micro hollow column (3) is smaller than that of the first single mode optical fiber (1).
5. The small-volume two-dimensional vector optical fiber tilt sensing probe according to claim 1, wherein the first silica column (5) and/or the second silica column (6) are made by cutting flat both ends of a single mode optical fiber.
6. The small-volume two-dimensional vector optical fiber tilt angle sensing probe according to claim 1, wherein the polymer micro hollow column (3) is formed by ultraviolet curing colloid through ultraviolet laser exposure and curing coupled by multimode optical fiber.
7. The small-volume two-dimensional vector optical fiber tilt sensing probe according to claim 1, wherein the polymer microsphere (4) is formed by injecting ultraviolet curing colloid into liquid to form spherical liquid drops and then performing exposure curing.
8. The small-volume two-dimensional vector optical fiber tilt sensing probe according to claim 1, wherein the polymer micro-hollow cylinder (3) is perpendicular to the plane of the axes of the first single mode optical fiber (1) and the second single mode optical fiber (2).
9. A small-volume two-dimensional vector optical fiber tilt sensing device, comprising a small-volume two-dimensional vector optical fiber tilt sensing probe according to any one of claims 1 to 8.
10. The small-volume two-dimensional vector optical fiber tilt angle sensing device according to claim 9, further comprising a circulator (20), a light source (30) and a spectrometer (40), wherein the optical fiber coupler (7) is connected with the light source (30) and the spectrometer (40) through the circulator (20).
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