CN106338348A - Miniature high-sensitivity optical fiber temperature sensing probe - Google Patents
Miniature high-sensitivity optical fiber temperature sensing probe Download PDFInfo
- Publication number
- CN106338348A CN106338348A CN201610712814.7A CN201610712814A CN106338348A CN 106338348 A CN106338348 A CN 106338348A CN 201610712814 A CN201610712814 A CN 201610712814A CN 106338348 A CN106338348 A CN 106338348A
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- CN
- China
- Prior art keywords
- microns
- hollow quartz
- optical fiber
- probe
- quartz ampoule
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
Abstract
The invention relates to a miniature high-sensitivity optical fiber temperature sensing probe, and belongs to the technical field of optical fiber sensing. The probe comprises single-mode optical fibers with coating layers removed, and a hollow quartz tube. The hollow quartz tube is fusion-welded between the two single-mode optical fibers. The hollow quartz tube is 80-120 microns long after fusion welding. The hollow quartz tube is filled with temperature-sensitive electronic sealant, and a sealed Fabry-Perot interference micro cavity is formed inside. The front single-mode optical fiber is provided with an inclined plane in a position which is 50-100 microns from the hollow quartz tube, thus forming a probe structure. The probe structure is compact, stable and reliable, and flexible in application. The diameter of the probe is only 125 microns. The effective length of the sensing area is less than 300 microns. The temperature sensing sensitivity is higher than 500pm/DEG C. The miniature high-sensitivity optical fiber temperature sensing probe is suitable for temperature sensing detection.
Description
Technical field
The present invention relates to a kind of temperature sensor, specifically a kind of miniature light being capable of highly sensitive temperature sensing
Fine temperature sensor probe.
Background technology
With the development of Fibre Optical Communication Technology, optical fiber sensing technology gradually out, becomes from derived from Fibre Optical Communication Technology
One important branch of field of sensing technologies.Optical fiber sensing technology using optical fiber as signal propagation media, with the light wave in optical fiber
As the carrier of transducing signal, perceive and detect the various information in life production environment by fiber optic sensing device.Wherein, temperature
Degree sensor measuring is an important applied field of optical fiber sensing technology, compared with traditional electronic temperature transmitter part, optical fiber
Temperature sensor anti-electromagnetic interference capability is strong, small volume, lightweight, in adverse circumstances (such as oil well, colliery) and high-grade, precision and advanced
Field (such as Aeronautics and Astronautics) equitemperature monitoring aspect is with a wide range of applications.
Temperature change can cause the change of the refractive index at fibre optic temperature sensor kernel core structure and volume, thus to light
Optical signal in fine temperature sensor is modulated.Different according to modulation system, fibre optic temperature sensor can be divided into intensity to adjust
Type processed, wavelength modulation type, phase modulation-type etc..Wherein, wavelength modulation type and phase modulation-type fibre optic temperature sensor all can profits
With broad spectrum light source and spectrogrph, the centre wavelength of the resonance peak presenting in sensor spectrum or interference peaks is monitored,
Thus demodulating ambient temperature, there is the advantages such as good stability, reliability height.But, due to the hot spectrum of ordinary optic fibre material
Number is only about 1 × 10-5/ c, thermal coefficient of expansion is only about 5 × 10-7/ c, leads to these temperature sensing based on pure fiber optic materials
The sensitivity of device is only below 50pm/ c.
In order to improve the detectivity of fibre optic temperature sensor, other temperature-sensitive materials (such as metal, can be had
Machine polymer etc.) combine with fibre optic temperature sensor, such as patent 201010176299.8 and 201310070860.8.But
The complex structure of these fibre optic temperature sensors probe, volume are larger at present, and probe diameter, more than millimeter magnitude, limits light
Application in point truly detects and accurate functional material is integrated for the fine temperature sensor.
Content of the invention
The technical problem to be solved is to overcome above-mentioned the deficiencies in the prior art, provides a kind of structure simple, tight
Gather, reliable and stable, the high miniature highly sensitive optical fiber sensing probe of sensitivity.
The present invention solves above-mentioned technical problem and the technical scheme is that a kind of miniature highly sensitive optical fiber sensing is visited
Pin it is characterised in that: it includes and removes the single-mode fiber of overlay and hollow quartz ampoule, and described hollow quartz ampoule welding is two
Between section single-mould fiber, the hollow quartz length of tube after welding is 80 ~ 120 microns, internal filling temp responsive type electronic seal
Glue, forms sealing Fabry Perot and interferes microcavity, and a section single-mould fiber of described front end is at 50 ~ 100 microns of hollow quartz ampoule
It is provided with inclined plane, form probe structure.
Single-mode fiber of the present invention is common communications single-mode fiber smf-28e, 125 microns of fibre cladding diameter, light
8 ~ 9 microns of long and slender core diameter.
Hollow quartz ampoule external diameter of the present invention is 125 microns, 40 ~ 60 microns of internal diameter.
Micropore, 10 ~ 15 microns of micro-pore diameter are drilled with the side wall of hollow quartz ampoule of the present invention；Liquid electronic seal
Glue is full of in hollow quartz ampoule by micropore, constant temperature 30 minutes under the conditions of 120 c, liquid electronic seal adhesive curing.
The present invention adopts technique scheme, the miniature highly sensitive optical fiber sensing probe of preparation, and probe diameter is only
125 microns, sensitive zones effective length is less than 300 microns, and temperature sensing sensitivity is higher than 500pm/ c, and this probe structure is tight
Gather, reliable and stable, application flexibly.In temperature sensing field of detecting, there is significant application value.
Brief description
The present invention is further described below in conjunction with the accompanying drawings.
Fig. 1 is the structural representation of the present invention.
The label of in figure is: 1. single-mode fiber, 2. hollow quartz ampoule, 3. single-mode fiber, 4. electronic seal glue, 5. micropore,
6. inclined plane.
Specific embodiment
It will be seen from figure 1 that a kind of miniature highly sensitive optical fiber sensing probe, it includes two sections of removal overlay
Single-mode fiber 1,3 and hollow quartz ampoule 2, sky between two section single-mould fibers 1,3, after welding for described hollow quartz ampoule 2 welding
Cardiolith English length of tube is 80 ~ 120 microns, internal filling temp responsive type electronic seal glue 4, forms sealing Fabry Perot and interferes
Microcavity, a section single-mould fiber 3 of described front end is provided with inclined plane 6 at 50 ~ 100 microns of hollow quartz ampoule, forms probe structure.
Single-mode fiber 1,3 of the present invention is common communications single-mode fiber smf-28e, 125 microns of fibre cladding diameter,
8 ~ 9 microns of fibre core diameter.
Hollow quartz ampoule 2 external diameter of the present invention is 125 microns, 40 ~ 60 microns of internal diameter.
Micropore 5,10 ~ 15 microns of micropore 5 diameter are drilled with the side wall of hollow quartz ampoule 2 of the present invention；The electricity of liquid
Sub- fluid sealant is full of in hollow quartz ampoule by micropore, constant temperature 30 minutes under the conditions of 120 c, liquid electronic seal adhesive curing.
Electronic seal glue 5 of the present invention is a kind of high transparency, low viscous silica gel compound, in certain temperature range
Under the conditions of transparent silica gel can be become with deep cure, belong to additional organosilicon casting glue.
Manufacturing process of the present invention is: first by the single-mode fiber 1 of removal overlay, hollow quartz ampoule 2, single-mode fiber 3 three
Section welding, forms sealing Fabry Perot and interferes microcavity, hollow quartz ampoule 2 length after welding is 80 ~ 120 microns；In latter end
Single-mode fiber 8 blocks along angle of inclination at 50 ~ 100 microns of hollow quartz ampoule, forms probe structure；Using the femtosecond after focusing on
Laser prepares microchannel in microcavity side wall, 120 after filling liquid electronic seal glueoAfter heating 30 minutes under c temperature environment,
Electronic seal glue 5 is made to solidify in microcavity.Hollow quartz ampoule inside solidification responsive to temperature type electronic seal glue 5 fill method is:
(1) the Side wall drill micropore 6 to the hollow quartz ampoule of sealing after welding using the femtosecond laser after focusing on, makes the hollow quartz ampoule of sealing
2 inside and outside connection, 10 ~ 15 microns of micropore 6 diameter.(2) liquid electronic seal glue is dropped in hollow quartz ampoule micropore 6
Place, waits 60 minutes, and liquid electronic seal glue 5 is full of hollow quartz ampoule 2.(3) under the conditions of probe structure being positioned over 120 c
Constant temperature 30 minutes, makes electronic seal glue 5 fully solidify.(4) using electronic seal gluing cleaning agent, probe is carried out, removes attached
The electronic seal glue outside hollow quartz ampoule.
In the preparation process of miniature highly sensitive optical fiber sensing probe of the present invention, single-mode fiber 1,3 with hollow
The cutting of quartz ampoule 2 uses optical-fibre precise cutter sweep；Optical-fibre precise cutter sweep is by Non-follow control stepping platform, optical fiber
Cutter, microscope are constituted, 10 microns of fiber cut precision.
Miniature highly sensitive optical fiber sensing probe of the present invention when using, by optical fiber circulator by its with wide
Spectroscopic light source and spectrogrph connect, and can observe Fabry Perot interference spectrum on spectrogrph, are spectrally done by monitoring
Relate to peak center Wavelength demodulation and go out ambient temperature, from different spectrogrph resolution, it is possible to achieve different temperature sensing precision.
The miniature highly sensitive optical fiber sensing probe of present invention preparation, probe diameter is only 125 microns, and sensitive zones have
Effect length is less than 300 microns, and temperature sensing sensitivity is higher than 500pm/ c, and this probe structure is compact, reliable and stable, application spirit
Live.In temperature sensing field of detecting, there is significant application value.
Claims (4)
1. a kind of miniature highly sensitive optical fiber sensing probe it is characterised in that: it includes the single-mode fiber removing overlay
With hollow quartz ampoule, described hollow quartz ampoule welding between two section single-mould fibers, after welding hollow quartz length of tube be 80 ~
120 microns, internal filling temp responsive type electronic seal glue, formed and seal Fabry Perot interference microcavity, the one of described front end
Section single-mould fiber is provided with inclined plane at 50 ~ 100 microns of hollow quartz ampoule, forms probe structure.
2. miniature highly sensitive optical fiber sensing probe according to claim 1 it is characterised in that: described single-mode fiber
For common communications single-mode fiber smf-28e, 125 microns of fibre cladding diameter, 8 ~ 9 microns of fibre core diameter.
3. miniature highly sensitive optical fiber sensing probe according to claim 1 it is characterised in that: described hollow quartz
Pipe external diameter is 125 microns, 40 ~ 60 microns of internal diameter.
4. miniature highly sensitive optical fiber sensing probe according to claim 1 it is characterised in that: described hollow quartz
Micropore, 10 ~ 15 microns of micro-pore diameter are drilled with the side wall of pipe；Liquid electronic seal glue is full of in hollow quartz ampoule by micropore,
Constant temperature 30 minutes under the conditions of 120 c, liquid electronic seal adhesive curing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610712814.7A CN106338348A (en) | 2016-08-24 | 2016-08-24 | Miniature high-sensitivity optical fiber temperature sensing probe |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610712814.7A CN106338348A (en) | 2016-08-24 | 2016-08-24 | Miniature high-sensitivity optical fiber temperature sensing probe |
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| CN106338348A true CN106338348A (en) | 2017-01-18 |
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| CN201610712814.7A Pending CN106338348A (en) | 2016-08-24 | 2016-08-24 | Miniature high-sensitivity optical fiber temperature sensing probe |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108731713A (en) * | 2018-05-31 | 2018-11-02 | 燕山大学 | A kind of triple clad quartz base special optical fiber micro-cavity structure sensor and preparation method |
| CN109507149A (en) * | 2018-11-13 | 2019-03-22 | 荆门博谦信息科技有限公司 | A kind of fibre optic interferometer and preparation method thereof |
| CN112484669A (en) * | 2020-12-10 | 2021-03-12 | 哈尔滨工业大学 | Small-size two-dimensional vector optical fiber inclination angle sensing probe and sensing device |
| CN112604925A (en) * | 2020-12-08 | 2021-04-06 | 哈尔滨工业大学 | Manufacturing method and film coating method based on hollow optical fiber light field resonance structure |
Citations (4)
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| CN104614092A (en) * | 2015-02-12 | 2015-05-13 | 哈尔滨理工大学 | Modular interface temperature sensor of liquid-core optical fiber |
| CN205015118U (en) * | 2015-08-17 | 2016-02-03 | 中国计量学院 | High sensitivity optic fibre microcavity baroceptor |
| CN205426410U (en) * | 2016-03-08 | 2016-08-03 | 中国计量学院 | Reflective FP chamber fiber grating atmospheric pressure temperature sensor |
| CN205483383U (en) * | 2016-01-21 | 2016-08-17 | 中国计量学院 | Reflective FP chamber optic fibre baroceptor |
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2016
- 2016-08-24 CN CN201610712814.7A patent/CN106338348A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104614092A (en) * | 2015-02-12 | 2015-05-13 | 哈尔滨理工大学 | Modular interface temperature sensor of liquid-core optical fiber |
| CN205015118U (en) * | 2015-08-17 | 2016-02-03 | 中国计量学院 | High sensitivity optic fibre microcavity baroceptor |
| CN205483383U (en) * | 2016-01-21 | 2016-08-17 | 中国计量学院 | Reflective FP chamber optic fibre baroceptor |
| CN205426410U (en) * | 2016-03-08 | 2016-08-03 | 中国计量学院 | Reflective FP chamber fiber grating atmospheric pressure temperature sensor |
Non-Patent Citations (1)
| Title |
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| 张煦等: "《光纤通信技术词典》", 28 February 1990 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108731713A (en) * | 2018-05-31 | 2018-11-02 | 燕山大学 | A kind of triple clad quartz base special optical fiber micro-cavity structure sensor and preparation method |
| CN108731713B (en) * | 2018-05-31 | 2020-09-25 | 燕山大学 | Three-clad quartz-based special optical fiber micro-cavity structure sensor and preparation method thereof |
| CN109507149A (en) * | 2018-11-13 | 2019-03-22 | 荆门博谦信息科技有限公司 | A kind of fibre optic interferometer and preparation method thereof |
| CN112604925A (en) * | 2020-12-08 | 2021-04-06 | 哈尔滨工业大学 | Manufacturing method and film coating method based on hollow optical fiber light field resonance structure |
| CN112604925B (en) * | 2020-12-08 | 2022-10-04 | 哈尔滨工业大学 | Manufacturing method and film coating method based on hollow optical fiber light field resonance structure |
| CN112484669A (en) * | 2020-12-10 | 2021-03-12 | 哈尔滨工业大学 | Small-size two-dimensional vector optical fiber inclination angle sensing probe and sensing device |
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