CN112474607B - A shock-proof mechanism for a laser cleaning machine - Google Patents

A shock-proof mechanism for a laser cleaning machine Download PDF

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CN112474607B
CN112474607B CN202011223750.7A CN202011223750A CN112474607B CN 112474607 B CN112474607 B CN 112474607B CN 202011223750 A CN202011223750 A CN 202011223750A CN 112474607 B CN112474607 B CN 112474607B
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laser
spring
magnetic suspension
groove
control system
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CN112474607A (en
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洪昭斌
袁和平
陈水宣
马林
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Xiamen University of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/06Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
    • F16F15/067Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only wound springs
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0052Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes measuring forces due to impact
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/12Measuring magnetic properties of articles or specimens of solids or fluids

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  • Engineering & Computer Science (AREA)
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  • General Engineering & Computer Science (AREA)
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  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Vibration Prevention Devices (AREA)

Abstract

本发明公开了一种激光清洗机的防震机构,涉及激光清洗技术领域,其技术方案要点是:包括机台以及激光主机,所述激光主机底部设有磁悬浮底座,所述机台上设有用于给磁悬浮底座提供磁悬浮力的磁悬浮装置,所述磁悬浮装置设于磁悬浮底座下方,所述磁悬浮装置连接有用于控制磁悬浮力的控制系统,所述机台底部设有支撑座,所述支撑座与机台之间设有用于提供缓冲力的缓冲件,所述缓冲件的一端连接于支撑座上,另一端连接有支撑片并通过支撑片抵触于机台底部。本发明能够提高减震效果,能够提高减震效果,且可根据需求调整磁悬浮力,满足不同工作环境下的减震需求,提高激光主机的稳定性,具有提高其激光束输出的稳定性的效果。

Figure 202011223750

The invention discloses an anti-vibration mechanism for a laser cleaning machine, which relates to the technical field of laser cleaning. The main points of the technical solution are: comprising a machine table and a laser main machine, the bottom of the laser main machine is provided with a magnetic suspension base, and the machine table is provided with a A magnetic levitation device for providing a magnetic levitation force to a magnetic levitation base, the magnetic levitation device is arranged below the magnetic levitation base, the magnetic levitation device is connected with a control system for controlling the magnetic levitation force, a support base is provided at the bottom of the machine table, and the support base is connected with the machine. A buffer piece for providing buffer force is arranged between the tables, one end of the buffer piece is connected to the support base, and the other end is connected with a support piece, and the support piece abuts against the bottom of the machine table. The invention can improve the shock absorption effect, can improve the shock absorption effect, and can adjust the magnetic levitation force according to the requirements, meet the shock absorption requirements in different working environments, improve the stability of the laser host, and has the effect of improving the stability of its laser beam output. .

Figure 202011223750

Description

一种激光清洗机的防震机构A shock-proof mechanism for a laser cleaning machine

技术领域technical field

本发明涉及激光清洗技术领域,更具体地说,它涉及一种激光清洗机的防震机构。The invention relates to the technical field of laser cleaning, and more particularly, to an anti-vibration mechanism of a laser cleaning machine.

背景技术Background technique

激光清洗具有无研磨、非接触、无热效应和适用于各种材质的物体等清洗特点,被认为是可靠有效的的清洁清洗方式。激光清洗过程中,对于环境的震动调节即为严苛,在工作现场对大工件进行清洗时,往往需要边激光清洗边移动激光清洗机,而激光清洗机的移动容易受外力作用而产生震动,进而影响到激光束的正常输出。现有技术中,激光清洗机通常在其底座上安装有减震弹簧,在其移动过程中产生的震动传递至减震弹簧并转化成减震弹簧的内能,由此减少对底座上各元件的震动,减少激光清洗机的震动情况。Laser cleaning has the characteristics of no grinding, non-contact, no thermal effect and is suitable for objects of various materials, and is considered to be a reliable and effective cleaning method. In the process of laser cleaning, the vibration adjustment of the environment is very strict. When cleaning large workpieces at the work site, it is often necessary to move the laser cleaning machine while laser cleaning, and the movement of the laser cleaning machine is easily affected by external forces. Vibration, This in turn affects the normal output of the laser beam. In the prior art, a shock-absorbing spring is usually installed on the base of the laser cleaning machine, and the vibration generated during its movement is transmitted to the shock-absorbing spring and converted into the internal energy of the shock-absorbing spring, thereby reducing the impact on the components on the base. vibration, reduce the vibration of the laser cleaning machine.

如授权公告号为CN209715925U,公告日为2019.12.03的中国专利公开了一种激光清洗设备的外壳,通过底座、左固定板、右固定板、后固定板、前固定框和前固定板构成本发明的主体结构,其中前固定板为可拆卸结构,方便检修,通过第一安装槽、支撑弹簧和支撑腿构成本发明的底部减震结构,行走轮移动过程中产生的震动传递至减震弹簧并转化成减震弹簧的内能,由此减少对底座上方各元件的震动,此外,通过安装条、第二安装槽、L形连接件、左面板和减震弹簧组成左固定板的防碰撞元件,左面板与障碍物直接碰撞接触时,左面板将碰撞力传递至减震弹簧,减震弹簧将其转化成内能,减少对本发明的内部元件的震荡,有效保护内部元件。For example, the Chinese patent with the authorization announcement number of CN209715925U and the announcement date of 2019.12.03 discloses a shell of a laser cleaning equipment, which consists of a base, a left fixing plate, a right fixing plate, a rear fixing plate, a front fixing frame and a front fixing plate. In the main structure of the invention, the front fixing plate is a detachable structure, which is convenient for maintenance. The first installation groove, the support spring and the support leg constitute the bottom shock absorption structure of the invention, and the vibration generated during the movement of the traveling wheel is transmitted to the shock absorption spring. And it is converted into the internal energy of the shock-absorbing spring, thereby reducing the vibration of the components above the base. In addition, the anti-collision of the left fixed plate is composed of the installation strip, the second installation slot, the L-shaped connecting piece, the left panel and the shock-absorbing spring. When the left panel directly collides with the obstacle, the left panel transmits the collision force to the shock absorbing spring, and the shock absorbing spring converts it into internal energy, reducing the shock to the internal components of the present invention and effectively protecting the internal components.

通过减震弹簧的设置,能够提供减震缓冲效果,减少震动时对内部元件的震动。但是减震弹簧的弹力固定,在减震时始终会造成内部元件的震荡晃动,导致激光束输出不够稳定,在应对不同的工作环境,会有减震偏差,减震效果较差,会对主体结构造成部分晃动,影响激光束的正常输出。Through the setting of the shock-absorbing spring, the shock-absorbing and buffering effect can be provided to reduce the vibration to the internal components during vibration. However, the elastic force of the shock-absorbing spring is fixed, which will always cause the internal components to vibrate and shake during shock-absorbing, resulting in unstable laser beam output. In response to different working environments, there will be shock-absorbing deviations, and the shock-absorbing effect is poor, which will affect the main body. The structure causes some shaking, which affects the normal output of the laser beam.

发明内容SUMMARY OF THE INVENTION

针对现有技术存在的不足,本发明的目的在于提供一种激光清洗机的防震机构,能够提高减震效果,且可根据需求调整磁悬浮力,满足不同工作环境下的减震需求,提高激光主机的稳定性,具有提高其激光束输出的稳定性的效果。In view of the deficiencies of the prior art, the purpose of the present invention is to provide a shock-proof mechanism for a laser cleaning machine, which can improve the shock-absorbing effect, and can adjust the magnetic levitation force according to the needs, so as to meet the shock-absorbing requirements in different working environments, and improve the laser host. It has the effect of improving the stability of its laser beam output.

为实现上述目的,本发明提供了如下技术方案:For achieving the above object, the present invention provides the following technical solutions:

一种激光清洗机的防震机构,包括机台以及设于机台上的激光主机,所述激光主机内设有能够产生激光束的激光发生器及相关主机,所述机台侧壁上设有至少一激光外接管路,所述激光主机底部设有磁悬浮底座,所述机台上设有用于给磁悬浮底座提供磁悬浮力的磁悬浮装置,所述磁悬浮装置设于磁悬浮底座下方,所述磁悬浮装置连接有用于控制磁悬浮力的控制系统,所述机台底部设有支撑座,所述支撑座与机台之间设有用于提供缓冲力的缓冲件,所述缓冲件的一端连接于支撑座上,另一端连接有支撑片并通过支撑片抵触于机台底部。An anti-vibration mechanism of a laser cleaning machine includes a machine table and a laser main machine arranged on the machine table, the laser main machine is provided with a laser generator and a related main machine capable of generating a laser beam, and the side wall of the machine table is provided with a laser generator and a related main machine. At least one laser external pipeline, the bottom of the laser host is provided with a magnetic levitation base, the machine table is provided with a magnetic levitation device for providing a magnetic levitation force to the magnetic levitation base, the magnetic levitation device is arranged below the magnetic levitation base, and the magnetic levitation device is connected There is a control system for controlling the magnetic levitation force, the bottom of the machine table is provided with a support seat, a buffer member for providing buffer force is arranged between the support seat and the machine table, and one end of the buffer member is connected to the support seat, The other end is connected with a support piece and abuts against the bottom of the machine table through the support piece.

进一步设置:所述缓冲件包括滑动穿入支撑座内的导向杆以及套设于导向杆外的复位弹簧,所述导向杆远离支撑座的一端固定连接于支撑片上,所述复位弹簧的两端分别抵触于支撑座与支撑片上,所述支撑座内开设有供导向杆滑动的导向槽,且所述导向槽下方设有限位槽,所述导向杆上设有限位环,所述限位环滑动设于限位槽内,且所述限位环抵触于限位槽的底部。Further arrangement: the buffer member includes a guide rod slidably penetrated into the support seat and a return spring sleeved outside the guide rod, one end of the guide rod away from the support seat is fixedly connected to the support sheet, and both ends of the return spring are They are respectively in contact with the support seat and the support sheet. The support seat is provided with a guide groove for the guide rod to slide, and a limit groove is provided under the guide groove. The guide rod is provided with a limit ring, and the limit ring It is slidably arranged in the limiting groove, and the limiting ring is in contact with the bottom of the limiting groove.

进一步设置:所述限位环上设有用于调整限位环位于导向杆上的位置的调节件,所述支撑座底部设有用于感应支撑座与环境碰撞受力大小的压力传感器,所述压力传感器与控制系统连接,所述调节件连接并受控于控制系统。Further settings: the limit ring is provided with an adjustment member for adjusting the position of the limit ring on the guide rod, and the bottom of the support seat is provided with a pressure sensor for sensing the magnitude of the collision force between the support seat and the environment, the pressure The sensor is connected with the control system, and the adjusting member is connected and controlled by the control system.

进一步设置:所述调节件包括设于限位环上的电机、与电机输出端连接的自锁式减速器以及与自锁式减速器输出端连接的齿轮,所述导向杆插入限位槽内的外壁上设有齿条,所述齿条的延伸方向与导向杆的轴向一致,所述齿轮与齿条啮合连接,所述电机连接并受控于控制系统上。Further setting: the adjusting member includes a motor arranged on the limit ring, a self-locking reducer connected with the output end of the motor, and a gear connected with the output end of the self-locking reducer, and the guide rod is inserted into the limit groove The outer wall of the gear rack is provided with a rack, the extension direction of the rack is consistent with the axial direction of the guide rod, the gear is meshed with the rack, and the motor is connected and controlled by the control system.

进一步设置:所述复位弹簧包括内缓冲弹簧与外缓冲弹簧,所述外缓冲弹簧套设于内缓冲弹簧外,且所述内缓冲弹簧与外缓冲弹簧的一端均连接于支撑座上,另一端均连接于支撑片上设置,所述内缓冲弹簧的弹力大于外缓冲弹簧的弹力设置。Further setting: the reset spring includes an inner buffer spring and an outer buffer spring, the outer buffer spring is sleeved outside the inner buffer spring, and one end of the inner buffer spring and the outer buffer spring is connected to the support seat, and the other end is connected to the support seat. They are all connected to the support piece, and the elastic force of the inner buffer spring is greater than that of the outer buffer spring.

进一步设置:所述机台的前后位置均滑动设有测试座,所述机台上开设有供测试座滑动的移动槽,所述测试座滑动于移动槽的一端连接测量弹簧,所述测量弹簧远离测试座的一端连接有压力测试计,所述压力测试计安装于移动槽内,且所述测量弹簧不受力时,所述测试座的底部不高于支撑座的底部的水平面,所述压力测试计与控制系统连接。Further settings: the front and rear positions of the machine table are slid with test seats, the machine table is provided with a moving groove for the test seat to slide, and the test seat slides on one end of the moving groove to connect a measurement spring, and the measurement spring One end away from the test seat is connected with a pressure tester, the pressure tester is installed in the moving groove, and when the measuring spring is not stressed, the bottom of the test seat is not higher than the horizontal plane of the bottom of the support seat, the The pressure tester is connected to the control system.

进一步设置:所述磁悬浮装置包括设于机台上的电磁铁、电连接于电磁铁上的供电器以及连接于电磁铁与供电器之间的输送电流调节器,所述磁悬浮底座设置为与电磁铁磁吸相斥的磁性座,所述供电器与输送电流调节器均连接并受控于控制系统上。Further setting: the magnetic suspension device includes an electromagnet set on the machine table, a power supply device electrically connected to the electromagnet, and a transmission current regulator connected between the electromagnet and the power supply device, and the magnetic suspension base is set to be connected with the electromagnetic device. The ferromagnetic attracts and repels the magnetic base, the power supply and the delivery current regulator are both connected and controlled by the control system.

进一步设置:所述磁悬浮底座侧壁上设置有升降导向槽,所述升降导向槽内升降滑动设有导向块,所述导向块上连接有位移杆,所述机台侧壁上设置有位移槽,所述位移槽内升降滑动设有移动块,所述位移杆远离导向块的一端滑动穿设过移动块与机台外设置,所述位移杆上套有定位弹簧,所述定位弹簧的两端分别连接于移动块与导向块上。Further setting: a lifting guide groove is arranged on the side wall of the magnetic suspension base, a guide block is arranged for lifting and sliding in the lifting guide groove, a displacement rod is connected to the guide block, and a displacement groove is arranged on the side wall of the machine table A moving block is installed in the displacement groove for lifting and sliding, and one end of the displacement rod away from the guide block slides through the moving block and is set outside the machine table. The displacement rod is sleeved with a positioning spring, and two parts of the positioning spring The ends are respectively connected to the moving block and the guide block.

进一步设置:所述磁悬浮底座上设置有用于测试磁力大小的第一测力计,所述第一测力计连接于控制系统上。Further setting: the magnetic suspension base is provided with a first dynamometer for testing the magnitude of the magnetic force, and the first dynamometer is connected to the control system.

进一步设置:所述机台上设置有用于测量激光主机重力大小的第二测力计以及用于检测磁悬浮底座与机台之间的间距大小的测距传感器,所述第二测力计与测距传感器均连接于控制系统上。Further settings: the machine is provided with a second dynamometer for measuring the gravity of the laser host and a distance measuring sensor for detecting the distance between the magnetic suspension base and the machine. The distance sensors are all connected to the control system.

通过采用上述技术方案,本发明相对现有技术相比,具有以下优点:By adopting the above-mentioned technical scheme, the present invention has the following advantages compared with the prior art:

1、通过磁悬浮装置与磁悬浮底座的配合,能够将激光主机磁悬浮于机台上,从而在机台减震缓冲时,避免激光主机晃动,提高减震效果,且磁悬浮力能够由控制系统控制调整,满足不同工作环境下的减震需求,提高激光主机的稳定性,具有提高其激光束输出的稳定性的效果;1. Through the cooperation of the magnetic levitation device and the magnetic levitation base, the laser host can be magnetically suspended on the machine table, so that the laser host can be prevented from shaking when the machine is damped and buffered, and the shock absorption effect can be improved, and the magnetic levitation force can be controlled and adjusted by the control system. Meet the shock absorption requirements in different working environments, improve the stability of the laser host, and have the effect of improving the stability of its laser beam output;

2、通过缓冲件与调节件的配合,方便调整复位弹簧的弹力大小,从而调整缓冲件提供的缓冲作用力,满足不同工况下的减震需求,提高减震效果,减少机台晃动,进一步提高激光主机的稳定性,具有提高其激光束输出的稳定性的效果;2. It is convenient to adjust the elastic force of the return spring through the cooperation of the buffer part and the adjustment part, so as to adjust the buffer force provided by the buffer part to meet the shock absorption requirements under different working conditions, improve the shock absorption effect, reduce the shaking of the machine, and further Improve the stability of the laser host, with the effect of improving the stability of its laser beam output;

3、通过内缓冲弹簧与外缓冲弹簧的配合,提高缓冲力调节范围,并且提供减震缓冲时,利用二者的弹力配合提高缓冲力效果,有效提高防震效果;3. Through the cooperation of the inner buffer spring and the outer buffer spring, the adjustment range of the buffer force is improved, and when providing shock absorption, the elastic force of the two is used to improve the buffer force effect and effectively improve the shock resistance effect;

4、通过设置的测试座、测量弹簧以及压力测试机,能够在机台行进时先利用测试座测定减震弹力,反馈至控制系统上确定所需的弹力大小需求,再由控制系统进行调整,便于支撑座经过时能够稳定减震,提高减震效果;4. Through the set test seat, measuring spring and pressure testing machine, the test seat can be used to measure the shock-absorbing elastic force when the machine is traveling, and the feedback is sent to the control system to determine the required elastic force, and then the control system can adjust it. It is convenient for the support seat to be able to stabilize shock absorption and improve the shock absorption effect;

5、通过导向块与移动块的滑动配合于定位弹簧,能够提高磁悬浮底座受磁力悬浮时的稳定性,提高激光主机的稳定性,具有提高其激光束输出的稳定性的效果。5. Through the sliding fit of the guide block and the moving block to the positioning spring, it can improve the stability of the magnetic suspension base when it is suspended by magnetic force, improve the stability of the laser host, and has the effect of improving the stability of its laser beam output.

附图说明Description of drawings

图1为激光清洗机的防震机构的结构示意图;Fig. 1 is the structural schematic diagram of the shock-proof mechanism of the laser cleaning machine;

图2为激光清洗机的防震机构的剖视结构示意图;Fig. 2 is the sectional structure schematic diagram of the shock-proof mechanism of the laser cleaning machine;

图3为图2中A处的放大示意图。FIG. 3 is an enlarged schematic view of A in FIG. 2 .

图中:1、机台;2、激光主机;3、激光发生器;4、相关主机;5、激光外接管路;6、磁悬浮底座;61、升降导向槽;62、导向块;63、位移杆;7、磁悬浮装置;71、电磁铁;72、供电器;73、输送电流调节器;8、控制系统;9、支撑座;91、导向槽;92、限位槽;10、缓冲件;101、导向杆;102、复位弹簧;1021、内缓冲弹簧;1022、外缓冲弹簧;103、限位环;11、支撑片;12、调节件;121、电机;122、自锁式减速器;123、齿轮;124、齿条;13、压力传感器;14、测试座;15、移动槽;16、测量弹簧;17、压力测试计;18、位移槽;181、移动块;19、定位弹簧;20、第一测力计;21、第二测力计;22、测距传感器。In the figure: 1. Machine; 2. Laser host; 3. Laser generator; 4. Related host; 5. Laser external pipeline; 6. Magnetic suspension base; 61. Lifting guide groove; 62. Guide block; 63. Displacement Rod; 7. Magnetic levitation device; 71. Electromagnet; 72. Power supply; 73. Conveying current regulator; 8. Control system; 9. Support seat; 91. Guide slot; 92. Limit slot; 10. Buffer; 101, guide rod; 102, return spring; 1021, inner buffer spring; 1022, outer buffer spring; 103, limit ring; 11, support piece; 12, adjustment piece; 121, motor; 122, self-locking reducer; 123, gear; 124, rack; 13, pressure sensor; 14, test seat; 15, moving groove; 16, measuring spring; 17, pressure test gauge; 18, displacement groove; 181, moving block; 19, positioning spring; 20. The first dynamometer; 21. The second dynamometer; 22. The distance measuring sensor.

具体实施方式Detailed ways

参照图1至图3对激光清洗机的防震机构做进一步说明。The shock-proof mechanism of the laser cleaning machine will be further described with reference to FIG. 1 to FIG. 3 .

一种激光清洗机的防震机构,如图1所示,包括机台1以及设于机台1上的激光主机2,机台1与激光主机2安装于封闭壳体内,激光主机2内设有能够产生激光束的激光发生器3及相关主机4,机台1侧壁上设有至少一激光外接管路5,从而产生激光供清洗机进行使用。An anti-vibration mechanism of a laser cleaning machine, as shown in Figure 1, includes a machine 1 and a laser host 2 arranged on the machine 1. The machine 1 and the laser host 2 are installed in a closed shell, and the laser host 2 is provided with A laser generator 3 capable of generating a laser beam and a related host 4 have at least one laser external pipeline 5 on the side wall of the machine table 1, so as to generate laser light for the cleaning machine to use.

如图1和图2所示,在机台1底部设置有支撑座9,支撑座9与机台1之间设有用于提供缓冲力的缓冲件10,缓冲件10的一端连接于支撑座9上,另一端连接有支撑片11并通过支撑片11抵触于机台1底部,以便于减少机台1震动,提供防震效果。具体的,结合图3所示,缓冲件10包括滑动穿入支撑座9内的导向杆101以及套设于导向杆101外的复位弹簧102,所述导向杆101远离支撑座9的一端固定连接于支撑片11上,复位弹簧102的两端分别抵触于支撑座9与支撑片11上,支撑座9内开设有供导向杆101滑动的导向槽91,通过导向杆101与导向槽91的滑动导向配合,方便复位弹簧102稳定提供缓冲复位弹力,减少震动。As shown in FIG. 1 and FIG. 2 , a support base 9 is provided at the bottom of the machine table 1 , a buffer member 10 for providing buffer force is provided between the support base 9 and the machine table 1 , and one end of the buffer member 10 is connected to the support base 9 The other end is connected with a support piece 11 and abuts against the bottom of the machine 1 through the support piece 11, so as to reduce the vibration of the machine 1 and provide a shockproof effect. Specifically, as shown in FIG. 3 , the buffer member 10 includes a guide rod 101 slidably penetrated into the support base 9 and a return spring 102 sleeved outside the guide rod 101 , and one end of the guide rod 101 away from the support base 9 is fixedly connected On the support sheet 11 , the two ends of the return spring 102 are in contact with the support seat 9 and the support sheet 11 respectively. The support seat 9 is provided with a guide groove 91 for the guide rod 101 to slide, and the guide rod 101 slides with the guide groove 91 The guide fit is convenient for the return spring 102 to stably provide a buffering return elastic force to reduce vibration.

如图2和图3所示,进一步的,复位弹簧102包括内缓冲弹簧1021与外缓冲弹簧1022,外缓冲弹簧1022套设于内缓冲弹簧1021外,且内缓冲弹簧1021与外缓冲弹簧1022的一端均连接于支撑座9上,另一端均连接于支撑片11上设置,且二者的轴线处于同一直线上,以利用二者的弹力配合提高缓冲力效果,有效提高防震效果。其中,内缓冲弹簧1021的弹力大于外缓冲弹簧1022的弹力设置,能够提高弹力调整范围,并且提供减震时,减少内缓冲弹簧1021的形变范围,避免其干涉外缓冲弹簧1022的弹性形变能力,保证稳定提供弹性缓冲作用。As shown in FIG. 2 and FIG. 3 , further, the return spring 102 includes an inner buffer spring 1021 and an outer buffer spring 1022 , the outer buffer spring 1022 is sleeved outside the inner buffer spring 1021 , and the inner buffer spring 1021 and the outer buffer spring 1022 are One end is connected to the support base 9, the other end is connected to the support sheet 11, and the axes of the two are on the same straight line, so as to use the elastic force of the two to improve the buffer force effect and effectively improve the shockproof effect. Among them, the elastic force of the inner buffer spring 1021 is greater than that of the outer buffer spring 1022, which can improve the adjustment range of the elastic force, and reduce the deformation range of the inner buffer spring 1021 when providing shock absorption, so as to prevent it from interfering with the elastic deformation ability of the outer buffer spring 1022. Ensure stability and provide elastic buffering.

如图2和图3所示,在导向槽91下方设有限位槽92,限位槽92与导向槽91导通,且限位槽92的横截面大于导向槽91的横截面棉结,导向杆101的一端穿入限位槽92内,且导向杆101穿入限位槽92内的位置上设有限位环103,限位环103滑动设于限位槽92内,且复位弹簧102不受力时,限位环103抵触于限位槽92的顶部,从而防止导向杆101脱离导向槽91,且在复位弹簧102复位时,能够配合于限位环103的限位作用,提高复位速度以及稳定性。其中,在限位环103上设有用于调整限位环103位于导向杆101上的位置的调节件12,方便调整限位环103在导向杆101上的位置,以调整导向杆101穿入限位槽92内的长度,从而调整支撑片11的高度,调整复位弹簧102的弹力,使其适用于多种场景的减震需求。其中,支撑座9底部设有用于感应支撑座9与环境碰撞受力大小的压力传感器13,压力传感器13与控制系统8连接,调节件12连接并受控于控制系统8,方便通过压力传感器13配合控制系统8,实现自动化调节,提高使用的便捷性。As shown in FIG. 2 and FIG. 3 , a limit groove 92 is provided below the guide groove 91, the limit groove 92 is connected to the guide groove 91, and the cross section of the limit groove 92 is larger than the cross section of the guide groove 91. One end of the rod 101 penetrates into the limit groove 92, and a limit ring 103 is provided at the position where the guide rod 101 penetrates into the limit groove 92. The limit ring 103 is slidably arranged in the limit groove 92, and the return spring 102 does not When the force is applied, the limit ring 103 abuts against the top of the limit groove 92, thereby preventing the guide rod 101 from detaching from the guide groove 91, and when the return spring 102 is reset, it can cooperate with the limit effect of the limit ring 103 to improve the reset speed. and stability. Wherein, the limit ring 103 is provided with an adjusting member 12 for adjusting the position of the limit ring 103 on the guide rod 101 , which is convenient to adjust the position of the limit ring 103 on the guide rod 101 to adjust the penetration limit of the guide rod 101 The length in the slot 92 can be adjusted to adjust the height of the support piece 11 and adjust the elastic force of the return spring 102 to make it suitable for shock absorption requirements in various scenarios. Among them, the bottom of the support base 9 is provided with a pressure sensor 13 for sensing the magnitude of the collision force between the support base 9 and the environment, the pressure sensor 13 is connected with the control system 8 , and the adjusting member 12 is connected and controlled by the control system 8, so that the pressure sensor 13 can be easily passed through. Cooperate with the control system 8 to realize automatic adjustment and improve the convenience of use.

如图2和图3所示,调节件12包括设于限位环103上的电机121、与电机121输出端连接的自锁式减速器122以及与自锁式减速器122输出端连接的齿轮123,导向杆101插入限位槽92内的外壁上固定设有齿条124,齿条124的延伸方向与导向杆101的轴向一致,齿轮123与齿条124啮合连接,电机121连接并受控于控制系统8上。通过电机121带动齿轮123转动,即可带动齿轮123沿齿条124延伸方向移动,从而带动限位环103移动,调整限位环103在导向杆101上的位置,调整支撑片11的高度位置,调整缓冲件10受力形态,以适应于对应的减震需求进行使用,提高减震使用效果。As shown in FIGS. 2 and 3 , the adjusting member 12 includes a motor 121 disposed on the limit ring 103 , a self-locking reducer 122 connected to the output end of the motor 121 , and a gear connected to the output end of the self-locking reducer 122 . 123. A rack 124 is fixed on the outer wall of the guide rod 101 inserted into the limit slot 92, the extension direction of the rack 124 is consistent with the axial direction of the guide rod 101, the gear 123 is meshed with the rack 124, the motor 121 is connected and is Controlled on the control system 8. By driving the gear 123 to rotate by the motor 121, the gear 123 can be driven to move along the extending direction of the rack 124, thereby driving the limit ring 103 to move, adjust the position of the limit ring 103 on the guide rod 101, and adjust the height of the support piece 11. The stress shape of the buffer member 10 is adjusted to suit the corresponding shock absorption requirements, so as to improve the shock absorption effect.

如图1和图2所示,在激光主机2底部设有磁悬浮底座6,机台1上设有用于给磁悬浮底座6提供磁悬浮力的磁悬浮装置7,磁悬浮装置7设于磁悬浮底座6下方,磁悬浮装置7连接有用于控制磁悬浮力的控制系统8。通过控制系统8自动化控制磁悬浮装置7的磁悬浮力,使得磁悬浮底座6与磁悬浮装置7之间的间距在震动时保持不变,从而保证激光主机2与激光外接管路5的相对位置仍处于同一光路线上,从而稳定持续性的提供激光清洗使用,提高减震效果。As shown in Figures 1 and 2, a magnetic suspension base 6 is provided at the bottom of the laser host 2, and a magnetic suspension device 7 for providing a magnetic suspension force to the magnetic suspension base 6 is provided on the machine table 1. The magnetic suspension device 7 is arranged below the magnetic suspension base 6, and the magnetic suspension The device 7 is connected to a control system 8 for controlling the magnetic levitation force. The magnetic levitation force of the magnetic levitation device 7 is automatically controlled by the control system 8, so that the distance between the magnetic levitation base 6 and the magnetic levitation device 7 remains unchanged during vibration, thereby ensuring that the relative positions of the laser host 2 and the laser external pipeline 5 are still in the same light. On the route, the laser cleaning can be provided stably and continuously, and the shock absorption effect can be improved.

如图2所示,进一步的,磁悬浮底座6侧壁上设置有升降导向槽61,升降导向槽61内升降滑动设有导向块62,导向块62上固定连接有位移杆63,在机台1侧壁上设置有位移槽18,位移槽18内升降滑动设有移动块181,且移动块181的滑动方向与导向块62的移动方向一致,且位移杆63远离导向块62的一端滑动穿设过移动块181设置,在位移杆63上套有定位弹簧19,定位弹簧19的两端分别连接于移动块181与导向块62上,能够提供磁悬浮底座6位置变化时的缓冲,进一步提高减震效果。通过导向块62与移动块181的导向移动配合,提高磁悬浮底座6上下浮动过程中的稳定性,并且配合于定位弹簧19能够减缓磁性力突变过程带来的晃动,提高减震效果,进一步提高磁悬浮底座6的稳定性,从而提高激光主机2的稳定性。As shown in FIG. 2 , further, a lifting guide groove 61 is provided on the side wall of the magnetic suspension base 6 , and a guide block 62 is provided for lifting and sliding in the lifting guide groove 61 , and a displacement rod 63 is fixedly connected to the guide block 62 . A displacement groove 18 is provided on the side wall, and a moving block 181 is provided in the displacement groove 18 for lifting and sliding, and the sliding direction of the moving block 181 is consistent with the moving direction of the guide block 62 , and the end of the displacement rod 63 away from the guide block 62 slides through. The positioning spring 19 is set on the displacement rod 63, and the two ends of the positioning spring 19 are respectively connected to the moving block 181 and the guide block 62, which can provide buffering when the position of the magnetic suspension base 6 changes, and further improve the shock absorption Effect. The guide block 62 cooperates with the moving block 181 to guide the movement to improve the stability of the magnetic suspension base 6 during the up and down floating process, and cooperate with the positioning spring 19 to slow down the shaking caused by the sudden change of the magnetic force, improve the shock absorption effect, and further improve the magnetic suspension. The stability of the base 6 improves the stability of the laser host 2 .

如图2所示,在机台1的前后位置均滑动设有测试座14,机台1上开设有供测试座14滑动的移动槽15,测试座14滑动于移动槽15的一端连接测量弹簧16,测量弹簧16远离测试座14的一端连接有压力测试计17,压力测试计17固定安装于移动槽15内,且测量弹簧16不受力时,测试座14的底部水平面与支撑座9的底部水平面的高度一致,压力测试计17与控制系统8连接。其中,测量弹簧16的弹力小于复位弹簧102,以便于测试座14在移动槽15移动,避免对机台造成晃动,从而方便压力测试计17测定数据,通过测试座14先对移动行径过程中所产生的震动进行初步判断分析,利用压力测试计17测得数据后,反馈至控制系统8中,从而方便控制系统8分析结果,并及时调整机台1上的磁悬浮力以及支撑片11的高度位置,以保证移动经过时激光发射仍高效持续性进行使用,提高激光清洗稳定性。As shown in FIG. 2 , a test seat 14 is slidably provided at the front and rear positions of the machine table 1, and a moving groove 15 for the sliding of the test seat 14 is provided on the machine table 1. The test seat 14 slides on one end of the moving groove 15 and is connected to the measuring spring 16. One end of the measuring spring 16 away from the test seat 14 is connected with a pressure tester 17, the pressure tester 17 is fixedly installed in the moving groove 15, and when the measuring spring 16 is not stressed, the bottom horizontal plane of the test seat 14 and the support seat 9 are connected. The height of the bottom horizontal plane is the same, and the pressure tester 17 is connected to the control system 8 . Among them, the elastic force of the measuring spring 16 is smaller than that of the return spring 102, so as to facilitate the movement of the test seat 14 in the moving groove 15 and avoid shaking the machine, so as to facilitate the measurement of data by the pressure tester 17. The vibration generated is subjected to preliminary judgment and analysis, and after the data is measured by the pressure tester 17, it is fed back to the control system 8, so as to facilitate the control system 8 to analyze the results, and to adjust the magnetic levitation force on the machine 1 and the height position of the support piece 11 in time , to ensure that the laser emission is still used efficiently and continuously when moving, and improve the stability of laser cleaning.

如图2所示,进一步的,在磁悬浮底座6上设置有用于测试磁力大小的第一测力计20,第一测力计20连接于控制系统8上,方便通过测量磁力大小,由控制系统8智能判断后控制磁悬浮装置7进行磁力的调整。其中,机台1上设置有用于测量激光主机2重力大小的第二测力计21以及用于检测磁悬浮底座6与机台1之间的间距大小的测距传感器22,第二测力计21与测距传感器22均连接于控制系统8上。通过第二测力计21与测距传感器22的配合,能够测定激光主机2重力大小,从而便于控制系统8确定磁悬浮的磁力大小,并且根据测距传感器22实时监控磁悬浮底座6与磁悬浮装置7之间的间距大小,方便控制系统8实时调整磁悬浮的磁力,以保证磁悬浮底座6的稳定性,提高激光主机2的稳定性。As shown in Figure 2, further, a first dynamometer 20 for testing the magnitude of the magnetic force is provided on the magnetic suspension base 6, and the first dynamometer 20 is connected to the control system 8, so that it is convenient for the control system to measure the magnitude of the magnetic force. 8. After intelligent judgment, control the magnetic suspension device 7 to adjust the magnetic force. The machine 1 is provided with a second dynamometer 21 for measuring the gravity of the laser host 2 and a distance measuring sensor 22 for detecting the distance between the magnetic suspension base 6 and the machine 1. The second dynamometer 21 The distance measuring sensor 22 is connected to the control system 8 . Through the cooperation of the second dynamometer 21 and the distance measuring sensor 22, the gravity of the laser host 2 can be measured, so that the control system 8 can determine the magnetic force of the magnetic levitation, and monitor the relationship between the magnetic levitation base 6 and the magnetic levitation device 7 in real time according to the distance measuring sensor 22. The size of the distance between them is convenient for the control system 8 to adjust the magnetic force of the magnetic suspension in real time, so as to ensure the stability of the magnetic suspension base 6 and improve the stability of the laser host 2 .

如图2所示,具体的,磁悬浮装置7包括设于机台1上的电磁铁71、电连接于电磁铁71上的供电器72以及连接于电磁铁71与供电器72之间的输送电流调节器73,磁悬浮底座6设置为与电磁铁71磁吸相斥的磁性座,供电器72与输送电流调节器73均连接并受控于控制系统8上。通过控制系统8控制供电器72向电磁铁71输送电源,能够使得电磁铁71产生磁力,从而对磁悬浮底座6实现磁悬浮作用,其中可结合输送电流调节器73控制电流输送大小,从而调整电磁铁71产生的磁力大小,以使其适应于磁悬浮底座6的稳定性要求,提高激光主机2使用的稳定性。As shown in FIG. 2 , specifically, the magnetic suspension device 7 includes an electromagnet 71 provided on the machine table 1 , a power supply 72 electrically connected to the electromagnet 71 , and a transmission current connected between the electromagnet 71 and the power supply 72 . The regulator 73 , the magnetic suspension base 6 is set as a magnetic base that magnetically repels the electromagnet 71 , the power supply 72 and the conveying current regulator 73 are both connected and controlled by the control system 8 . By controlling the power supply 72 to transmit power to the electromagnet 71 by the control system 8, the electromagnet 71 can generate a magnetic force, thereby realizing the magnetic levitation effect on the magnetic suspension base 6, and the current transmission size can be controlled in combination with the transmission current regulator 73, thereby adjusting the electromagnet 71 The magnitude of the generated magnetic force is adapted to the stability requirements of the magnetic suspension base 6 and improves the stability of the laser host 2 in use.

工作原理:使用时,利用控制系统8控制磁悬浮装置7,使得磁悬浮底座6能够磁悬浮于机台1上,并配合于定位弹簧19稳定定位于机台1上,使其激光主机2在机台1上相对于机台1的位置保持不变,从而稳定输送激光进行使用。在机台1的移动过程中,测试座14提前接触障碍物产生震动,使得测量弹簧16配合压力测试计17计量减震力,由控制系统8分析后预先调整磁悬浮装置7的磁吸力,保证经过时激光主机2处于稳定状态,从而保证激光束的正常输出,同时,控制系统8控制调节件12调整限位环103位于导向杆101上的位置,从而调整导向杆101穿入限位槽92内的深度,以调整支撑片11的高度位置,使得复位弹簧102的弹力得到调整,使其适应于对应的场景进行减震,从而在机台1经过的过程中,能够使得减震弹力适配于减震场景,提高减震效果,且经过时复位弹簧102利用内缓冲弹簧1021与外缓冲弹簧1022的配合,进一步提高减震效果,从而提高激光主机2的稳定性,保证激光束的正常输出。通过上述方案,本发明能够根据工作环境,调整所需要的减震缓冲力,并且利用磁悬浮将激光主机2稳定设于机台1上,在弹簧减震的过程中,始终保持激光主机2处于稳定状态,并且磁悬浮力能够根据工况实时调整,满足不同场景的切换使用,将磁悬浮配合于复位弹簧102的减震效果,提高减震效果,避免激光主机2造成晃动,保证激光束的正常输出,具有提高其激光束输出的稳定性的效果。Working principle: When in use, the control system 8 is used to control the magnetic suspension device 7, so that the magnetic suspension base 6 can be magnetically suspended on the machine table 1, and is stably positioned on the machine table 1 with the positioning spring 19, so that the laser host 2 is positioned on the machine table 1. The position of the upper part relative to the machine table 1 remains unchanged, so as to stably transport the laser for use. During the movement of the machine table 1, the test seat 14 contacts the obstacle in advance to generate vibration, so that the measuring spring 16 cooperates with the pressure tester 17 to measure the damping force, and the magnetic attraction force of the magnetic suspension device 7 is adjusted in advance after analysis by the control system 8 to ensure that the At the same time, the control system 8 controls the adjusting member 12 to adjust the position of the limit ring 103 on the guide rod 101, so as to adjust the guide rod 101 to penetrate into the limit groove 92 to adjust the height position of the support piece 11, so that the elastic force of the return spring 102 can be adjusted to adapt to the corresponding scene for shock absorption, so that in the process of the machine 1 passing through, the shock absorption elastic force can be adapted to In the shock absorption scene, the shock absorption effect is improved, and the return spring 102 uses the cooperation of the inner buffer spring 1021 and the outer buffer spring 1022 to further improve the shock absorption effect, thereby improving the stability of the laser host 2 and ensuring the normal output of the laser beam. Through the above solution, the present invention can adjust the required shock absorption and buffer force according to the working environment, and use the magnetic levitation to stably set the laser host 2 on the machine table 1. During the process of spring shock absorption, the laser host 2 is always kept in a stable state. The magnetic levitation force can be adjusted in real time according to the working conditions to meet the switching use of different scenarios. The magnetic levitation is matched with the shock absorption effect of the return spring 102 to improve the shock absorption effect, avoid the shaking of the laser host 2, and ensure the normal output of the laser beam. Has the effect of improving the stability of its laser beam output.

以上所述仅是本发明的优选实施方式,本发明的保护范围并不仅局限于上述实施例,凡属于本发明思路下的技术方案均属于本发明的保护范围。应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理前提下的若干改进和润饰,这些改进和润饰也应视为本发明的保护范围。The above are only the preferred embodiments of the present invention, and the protection scope of the present invention is not limited to the above-mentioned embodiments, and all technical solutions under the idea of the present invention belong to the protection scope of the present invention. It should be pointed out that for those skilled in the art, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims (8)

1. The utility model provides a shockproof mechanism of laser cleaning machine, includes board (1) and locates laser host (2) on board (1), be equipped with laser generator (3) and relevant host computer (4) that can produce the laser beam in laser host (2), be equipped with at least one laser external pipeline (5) on board (1) lateral wall, its characterized in that, laser host (2) bottom is equipped with magnetic suspension base (6), be equipped with magnetic suspension device (7) that are used for providing magnetic suspension power for magnetic suspension base (6) on board (1), magnetic suspension device (7) are located magnetic suspension base (6) below, magnetic suspension device (7) are connected with control system (8) that are used for controlling magnetic suspension power, board (1) bottom is equipped with supporting seat (9), be equipped with bolster (10) that are used for providing the buffer power between supporting seat (9) and board (1), one end of the buffer piece (10) is connected to the supporting seat (9), the other end of the buffer piece (10) is connected with the supporting sheet (11) and is abutted to the bottom of the machine table (1) through the supporting sheet (11), the buffer piece (10) comprises a guide rod (101) which penetrates into the supporting seat (9) in a sliding manner and a reset spring (102) which is sleeved outside the guide rod (101), one end of the guide rod (101) far away from the supporting seat (9) is fixedly connected to the supporting sheet (11), two ends of the reset spring (102) are abutted to the supporting seat (9) and the supporting sheet (11) respectively, a guide groove (91) for the guide rod (101) to slide is arranged in the supporting seat (9), a limit groove (92) is arranged below the guide groove (91), a limit ring (103) is arranged on the guide rod (101), the limit ring (103) is slidably arranged in the limit groove (92), and the limit ring (103) is abutted to the bottom of the limit groove (92), be equipped with regulating part (12) that are used for adjusting the position that spacing ring (103) are located guide bar (101) on spacing ring (103), supporting seat (9) bottom is equipped with and is used for responding to supporting seat (9) and environmental impact stress size's pressure sensor (13), pressure sensor (13) are connected with control system (8), regulating part (12) are connected and are controlled by control system (8).
2. The shockproof mechanism of the laser cleaning machine according to claim 1, wherein the adjusting member (12) comprises a motor (121) disposed on the limiting ring (103), a self-locking speed reducer (122) connected to an output end of the motor (121), and a gear (123) connected to an output end of the self-locking speed reducer (122), a rack (124) is disposed on an outer wall of the guiding rod (101) inserted into the limiting groove (92), an extending direction of the rack (124) is the same as an axial direction of the guiding rod (101), the gear (123) is engaged with the rack (124), and the motor (121) is connected to and controlled by the control system (8).
3. The shockproof mechanism of the laser cleaning machine according to claim 2, wherein the return spring (102) comprises an inner buffer spring (1021) and an outer buffer spring (1022), the outer buffer spring (1022) is sleeved outside the inner buffer spring (1021), one end of each of the inner buffer spring (1021) and the outer buffer spring (1022) is connected to the supporting base (9), the other end of each of the inner buffer spring (1021) and the outer buffer spring (1022) is connected to the supporting piece (11), and the elastic force of the inner buffer spring (1021) is greater than the elastic force of the outer buffer spring (1022).
4. The shockproof mechanism of the laser cleaning machine according to claim 1, wherein the machine table (1) is provided with a test seat (14) at both front and rear positions thereof in a sliding manner, the machine table (1) is provided with a moving groove (15) for the test seat (14) to slide, one end of the test seat (14) sliding in the moving groove (15) is connected with a measuring spring (16), one end of the measuring spring (16) far away from the test seat (14) is connected with a pressure tester (17), the pressure tester (17) is installed in the moving groove (15), and when the measuring spring (16) is not stressed, the bottom of the test seat (14) is not higher than the horizontal plane of the bottom of the support seat (9), and the pressure tester (17) is connected with the control system (8).
5. The shockproof mechanism of a laser cleaning machine according to claim 1, characterized in that the magnetic suspension device (7) comprises an electromagnet (71) disposed on the machine platform (1), a power supply (72) electrically connected to the electromagnet (71), and a power supply adjuster (73) connected between the electromagnet (71) and the power supply (72), the magnetic suspension base (6) is configured as a magnetic seat magnetically repelling the electromagnet (71), and the power supply (72) and the power supply adjuster (73) are both connected and controlled by the control system (8).
6. The shockproof mechanism of the laser cleaning machine according to claim 5, wherein a lifting guide groove (61) is disposed on a side wall of the magnetic suspension base (6), a guide block (62) is disposed in the lifting guide groove (61) in a lifting and sliding manner, a displacement rod (63) is connected to the guide block (62), a displacement groove (18) is disposed on a side wall of the machine platform (1), a moving block (181) is disposed in the displacement groove (18) in a lifting and sliding manner, one end of the displacement rod (63) far away from the guide block (62) is slidably disposed through the moving block (181) and is disposed outside the machine platform (1), a positioning spring (19) is sleeved on the displacement rod (63), and two ends of the positioning spring (19) are respectively connected to the moving block (181) and the guide block (62).
7. Shockproof mechanism according to claim 5, characterised in that the magnetically suspended base (6) is provided with a first dynamometer (20) for testing the magnitude of the magnetic force, the first dynamometer (20) being connected to the control system (8).
8. The shockproof mechanism of a laser cleaning machine according to claim 7, wherein the machine platform (1) is provided with a second dynamometer (21) for measuring the gravity of the laser host (2) and a distance measuring sensor (22) for detecting the distance between the magnetic suspension base (6) and the machine platform (1), and both the second dynamometer (21) and the distance measuring sensor (22) are connected to the control system (8).
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CN115283364A (en) * 2022-05-12 2022-11-04 成都启高科技有限公司 Laser cleaning equipment for chip packaging mold

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