CN112462108A

CN112462108A - Novel probe card device

Info

Publication number: CN112462108A
Application number: CN202011272645.2A
Authority: CN
Inventors: 顾良波; 王�华; 季海英; 凌俭波; 周建青; 吴勇佳
Original assignee: Sino IC Technology Co Ltd
Current assignee: Sino IC Technology Co Ltd
Priority date: 2020-11-13
Filing date: 2020-11-13
Publication date: 2021-03-09

Abstract

The invention discloses a novel probe card device, wherein each probe is provided with a receiving device, the probe is fixed on a lifting device, and the probe is fixed through a bracket. Different probes can be lifted according to the debugging requirement, one or more probes can be conveniently positioned to the pin feet with influence, the design and analysis reasons are convenient, and the direct other influences on the test of a certain module can be eliminated.

Description

Novel probe card device

Technical Field

The invention relates to the technical field of wafer testing, in particular to a novel probe card device.

Background

In wafer testing, conversion devices are typically used to connect the wafer to the tester resources, and in these conversion devices, the probe card is first brought into contact with the wafer. Generally, how many pins are needed, how many needles are made, and there is no way to add needles or reduce needles in the testing process. However, in the actual testing process, some test items may be interfered by some irrelevant pins, which affects the accuracy of the test value of the test item. Usually, the circuit is cut off by a relay inside or a peripheral relay of the testing machine, which can solve some problems, but the probe is stuck on the pad, and the probe does not pass through current and voltage, but is stuck on the pad like an antenna, which also affects the accuracy of the test value of the test item. In this time, if the test is accurate, the needle reduction needs to be carried out again, the needle reduction is single, the period is long, and the cost is high. And because the pins are multiplexed, the pins irrelevant to the test item A are related to the pins relevant to the test item B.

Disclosure of Invention

The invention provides a novel probe card device for solving the technical problems, which is the same as the traditional probe card, wherein needles are pricked on a wafer, but needle tails are not fixed and can be extended and retracted, and each needle tail can independently control the extension and retraction, and the specific technical scheme is as follows:

each probe is provided with a receiving device, the probes are fixed on the lifting device, and the probes are fixed through the support.

The novel probe card device is characterized in that: the wafer test is defaulted to be high level, the starting signal is low level, and the probe after receiving the starting signal is fixed by the lifting device; after the probe is fixed, a signal is sent to the lifting device, and after the lifting device receives the signal, the whole fixed probe is lifted upwards to be not in contact with the pad, and then debugging is carried out; after commissioning, the raised needle is restored if necessary.

Compared with the prior art, the invention has the following beneficial effects: different probes can be lifted according to the debugging requirement, one or more probes can be conveniently positioned to the pin feet with influence, the design and analysis reasons are convenient, and the direct other influences on the test of a certain module can be eliminated.

Drawings

Fig. 1 is a schematic structural diagram of a novel probe card device.

In the figure:

1 lifting device 2 support 3 receiving device 4 probe

Detailed Description

The invention is further described below with reference to the figures and examples.

pin: a pin;

arm: a transfer arm;

pad: and (4) nodes.

Each probe 4 is provided with a receiving device 3, the default is high level, the starting signal is low level, and the probe receiving the starting signal is fixed by the lifting device 1. After the fixing, a signal is sent to the lifting device 1, and after the lifting device 1 receives the signal, the whole fixed probe 4 is lifted upwards to be not in contact with the pad, and then debugging is carried out. After the debugging, the raised probe 4 is restored if necessary. In this way, different probes 4, one or more, can be raised according to the needs of the commissioning. The pin foot that can be convenient fix a position the influence, the design analysis reason of being convenient for also can get rid of direct other influences to certain module test.

Claims

1. The utility model provides a novel probe card device which characterized in that: each probe is provided with a receiving device, the probes are fixed on the lifting device, and the probes are fixed through the support.

2. The novel probe card apparatus of claim 1, wherein: the wafer test is defaulted to be high level, the starting signal is low level, and the probe after receiving the starting signal is fixed by the lifting device; after the probe is fixed, a signal is sent to the lifting device, and after the lifting device receives the signal, the whole fixed probe is lifted upwards to be not in contact with the pad, and then debugging is carried out; after commissioning, the raised needle is restored if necessary.