CN112453708A - Method for assembling and welding sheath - Google Patents
Method for assembling and welding sheath Download PDFInfo
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- CN112453708A CN112453708A CN202011303025.0A CN202011303025A CN112453708A CN 112453708 A CN112453708 A CN 112453708A CN 202011303025 A CN202011303025 A CN 202011303025A CN 112453708 A CN112453708 A CN 112453708A
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- welding
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- side wall
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/346—Working by laser beam, e.g. welding, cutting or boring in combination with welding or cutting covered by groups B23K5/00 - B23K25/00, e.g. in combination with resistance welding
- B23K26/348—Working by laser beam, e.g. welding, cutting or boring in combination with welding or cutting covered by groups B23K5/00 - B23K25/00, e.g. in combination with resistance welding in combination with arc heating, e.g. TIG [tungsten inert gas], MIG [metal inert gas] or plasma welding
Abstract
The invention provides a method for assembling and welding a sheath, which comprises the following steps: assembling the annular side wall of the sheath with the lower cover plate, and then sequentially performing gas shielded welding and laser welding to obtain a sheath semi-finished product; filling the component to be welded or the powder to be molded into the sheathed semi-finished product; and assembling the semi-finished sheath with the upper cover plate, sequentially performing gas shielded welding and laser welding, and vacuumizing to obtain the vacuum-sealed sheath. According to the method, the annular side wall of the sheath, the upper cover plate and the lower cover plate are combined in a gas shielded welding and laser welding mode, so that the stability of the welding process is guaranteed, the bonding strength of sheath welding is improved, and the welding quality is more stable; the method can effectively improve the production efficiency of sheath welding, thereby shortening the production period and reducing the production cost of the target material.
Description
Technical Field
The invention belongs to the technical field of target preparation, and relates to a method for assembling and welding a sheath.
Background
With the continuous development of semiconductor technology, the application field of the target material is more extensive. In the preparation and use process of the target material, a sheath is required to be used for hot isostatic pressing treatment in part of steps, for example, when the target material is manufactured by a powder metallurgy method, powder is easy to oxidize during isostatic pressing forming, the powder is required to be filled into the sheath, the sheath is welded, pumped out and then sealed, and then the sheath is put into hot isostatic pressing equipment for densification; when the target material and the back plate are subjected to diffusion welding, a corresponding sheath is required to be manufactured to prevent oxidation, the target material and the back plate are placed into the sheath, then welding and sealing are carried out, and hot isostatic pressing equipment is placed for welding the target material and the back plate.
For the hot isostatic pressing treatment of the target material, the welding and sealing of the sheath are also important early steps, and how to perform the rapid and compact welding of each component of the sheath plays an important role in influencing the production of the target material. At present, the welding method of the sheath is mainly argon arc welding, the problems of low welding efficiency and insufficient welding strength generally exist, the sealing performance is easily affected by cracking caused by subsequent hot isostatic pressing treatment, the sheath is in direct contact with a target material, diffusion adhesion is easily caused, the subsequent separation is difficult, and the target material structure is damaged, so that the assembly and the welding of the sheath need to be carried out by adopting a new method.
CN 102554571a discloses a sealing method of a degassing tube, wherein a first end of the degassing tube is connected with a vacuum device, and a second end of the degassing tube is connected with a vacuum sheath; after the vacuumizing treatment is carried out in the heating environment, the sealing method is carried out, and comprises the following steps: removing the first end of the degassing tube from the vacuum apparatus; carrying out heat treatment on the first end of the degassing pipe, wherein the heat treatment temperature is 900-1100 ℃; carrying out multiple flattening treatments on the first end subjected to the heat treatment to form a plurality of flattened parts; and performing pinch-off treatment on the pinch portion farthest from the vacuum sheath. The method mainly introduces how to carry out sealing treatment after the vacuum pumping of the sheath, and does not relate to welding and assembling before the vacuum pumping of the sheath.
CN 108247191A discloses a method for preventing adhesion of a welded component and a sheath by hot isostatic pressing, which specifically comprises the following steps: coating deposition, cleaning, baking and degassing, sheath assembly and clamping, hot isostatic pressing welding and sheath removal, wherein the sheath assembly and clamping comprises the following steps: assembling, welding, detecting leakage and clamping the treated sheath cover, the side sheath, the beryllium tile and the curved surface composite plate cooling base according to design requirements.
In summary, for the assembly welding of the sheath assembly, a proper welding process needs to be selected to improve the welding bonding strength of the sheath, and improve the welding quality and the welding efficiency.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a method for assembling and welding a sheath, which improves the bonding strength of sheath welding, ensures more stable welding quality, improves the welding production efficiency and shortens the production period by combining the annular side wall of the sheath with an upper cover plate and a lower cover plate by adopting gas shielded welding and laser welding.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a method for assembling and welding a sheath, which comprises the following steps:
(1) assembling the annular side wall of the sheath with the lower cover plate, and then sequentially performing gas shielded welding and laser welding to obtain a sheath semi-finished product;
(2) filling a component to be welded or powder to be molded into the sheathed semi-finished product obtained in the step (1);
(3) and (3) assembling the semi-finished sheath processed in the step (2) with an upper cover plate, then sequentially performing gas shielded welding and laser welding, and then performing vacuum pumping to obtain the vacuum sealed sheath.
In the invention, the sheath is usually used in the hot isostatic pressing treatment, so that the steps related to the hot isostatic pressing treatment in the preparation of the target product can be used, such as target powder forming, target backboard diffusion welding and the like; for the assembly welding of the sheath, according to the assembly sequence of each component, the annular side wall is welded with the lower cover plate firstly, the raw materials to be treated are filled in the annular side wall and then welded with the upper cover plate, wherein the welding mode adopts a mode of combining gas shielded welding and laser welding, the gas shielded welding is firstly adopted for welding and positioning, the main welding mode is laser welding, the sheath in the welding area can be rapidly fused and combined, the welding speed is high, the welding strength is high, the vacuum condition can be well maintained when the sheath is used in the hot isostatic pressing process, and the production of target products is facilitated.
The following technical solutions are preferred technical solutions of the present invention, but not limited to the technical solutions provided by the present invention, and technical objects and advantageous effects of the present invention can be better achieved and achieved by the following technical solutions.
As a preferable technical scheme of the invention, the sheath in the step (1) comprises an annular side wall, an upper cover plate and a lower cover plate.
Preferably, the annular side wall is of a hollow cylindrical structure, including a cylindrical structure or a prismatic structure.
Preferably, the shape and the size of the cross section of the annular side wall are the same as those of the upper cover plate and the lower cover plate.
According to the invention, the overall structure of the sheath is mainly used for matching with the structure of the target material or the target material assembly, the corresponding sheath structure is selected according to the target material structure, and the target material and the sheath with the circular or square cross section are mainly selected.
Preferably, the material of the sheath in the step (1) comprises aluminum or stainless steel.
As a preferred technical scheme of the invention, the gas shielded welding in the step (1) comprises inert gas shielded welding, preferably argon arc welding.
Preferably, in the step (1), the annular side wall and the lower cover plate are spot-welded by adopting the gas shielded welding, and the annular side wall and the lower cover plate are preliminarily fixed.
Preferably, the welding current of the argon arc welding is 100-200A, such as 100A, 120A, 140A, 150A, 160A, 180A or 200A, but not limited to the recited values, and other values not recited in the range of the values are also applicable.
Preferably, the argon arc welding is performed at an argon flow rate of 10-15L/min, such as 10L/min, 11L/min, 12L/min, 13L/min, 14L/min or 15L/min, but not limited to the recited values, and other values not recited in the range of the values are also applicable.
In the invention, the contact area of the annular side wall and the lower cover plate forms a whole ring shape, if laser welding is directly adopted, dislocation and deviation of the annular side wall and the lower cover plate are easily caused, therefore, in the invention, a spot welding mode is adopted firstly, a plurality of points are selected on the whole ring area for welding, the points are preliminarily fixed, so that subsequent laser welding can be smoothly carried out, and the selected points are usually the points which are arranged at equal intervals and symmetrically.
In the invention, during argon arc welding, the selection of welding current is different for different sheath materials, generally speaking, direct current is selected when the sheath is made of stainless steel, and alternating current is selected when the sheath is made of aluminum.
As a preferred technical solution of the present invention, step (1) welds the entire contact area of the annular sidewall and the lower cover plate by the laser welding.
Preferably, the laser power of the laser welding in step (1) is 2000-3000W, such as 2000W, 2200W, 2400W, 2500W, 2700W, 2800W, 3000W, etc., but not limited to the recited values, and other values not recited in the range of the recited values are also applicable.
Preferably, the laser scanning speed of the laser welding in the step (1) is 20-40 mm/s, such as 20mm/s, 25mm/s, 30mm/s, 35mm/s or 40mm/s, but not limited to the recited values, and other values in the range of the recited values are also applicable.
Preferably, the laser spot diameter of the laser welding in step (1) is 2-4 mm, such as 2mm, 2.5mm, 3mm, 3.5mm or 4mm, but not limited to the recited values, and other values not recited in the range of the recited values are also applicable.
In the invention, the selection of the technological parameters of laser welding is an important factor influencing the welding performance of the sheath, and corresponding selection and adjustment can be carried out on different materials so as to achieve the welding temperature suitable for the materials, ensure the smooth operation of the welding process and avoid the problem that the sealing performance of the sheath is influenced by insufficient welding or excessive welding; if the laser power is too high, the sheath is easy to be welded through, the structure and the sealing performance of the sheath are affected, and if the laser power is too low, incomplete welding and low welding strength can be caused.
As a preferable technical scheme of the invention, the assembly to be welded in the step (2) comprises a target material to be welded and a back plate.
Preferably, when the assembly to be welded in the step (2) is loaded into the sheathed semi-finished product, the back plate is positioned below, the target material is positioned above, and the welding surface of the target material is in contact with the welding surface of the back plate.
Preferably, the sputtering surface of the target faces upwards, and a partition plate is arranged between the sputtering surface of the target and the upper cover plate.
According to the invention, when the target material and the back plate are diffusion welded, the sputtering surface of the target material is contacted with the upper cover plate, and the sheathing cover plate and the target material are easy to be diffusion combined while the target material and the back plate are diffusion welded, so that the subsequent separation and use of the target material are influenced.
As a preferable technical scheme of the invention, the powder to be molded in the step (2) comprises a target powder raw material.
Preferably, when the molding powder is filled into the jacket semi-finished product, carbon paper is arranged at the bottom and the side surface of the jacket.
In the invention, when the sheath is used for hot isostatic pressing of powder, in order to avoid the problem that the formed part is difficult to separate from the sheath, carbon paper is laid on the inner surface of the sheath in advance to avoid direct contact of the powder and the sheath, and the carbon paper can be graphite paper generally, has strong stability and is difficult to react with target powder.
As a preferred technical scheme of the invention, the gas shielded welding in the step (3) comprises inert gas shielded welding, preferably argon arc welding.
Preferably, in the step (3), the annular side wall and the upper cover plate are spot-welded by adopting the gas shielded welding, and the annular side wall and the upper cover plate are preliminarily fixed.
Preferably, the argon arc welding has a welding current of 100 to 200A, such as 100A, 120A, 140A, 150A, 160A, 180A or 200A, but not limited to the values listed, and other values not listed in the range of values are also applicable.
Preferably, the argon arc welding is performed at an argon flow rate of 10-15L/min, such as 10L/min, 11L/min, 12L/min, 13L/min, 14L/min or 15L/min, but not limited to the recited values, and other values not recited in the range of the values are also applicable.
As a preferable technical solution of the present invention, step (3) welds the entire contact area of the annular sidewall and the upper cover plate by the laser welding.
Preferably, the laser power of the laser welding in step (3) is 2000-3000W, such as 2000W, 2200W, 2400W, 2500W, 2700W, 2800W, 3000W, etc., but not limited to the recited values, and other values not recited in the range of the recited values are also applicable.
Preferably, the laser scanning speed of the laser welding in the step (3) is 20-40 mm/s, such as 20mm/s, 25mm/s, 30mm/s, 35mm/s or 40mm/s, but not limited to the recited values, and other values in the range of the recited values are also applicable.
Preferably, the laser spot diameter of the laser welding in step (3) is 2-4 mm, such as 2mm, 2.5mm, 3mm, 3.5mm or 4mm, but not limited to the recited values, and other values not recited in the range of the recited values are also applicable.
As the preferable technical scheme of the invention, the annular side wall or the upper cover plate of the sheath is provided with an air outlet.
Preferably, during the vacuum pumping in step (3), the degassing port is connected with a vacuum device through a degassing pipe.
Preferably, after the vacuum pumping in the step (3) is finished, the degassing pipe is clamped off and then welded and sealed.
Preferably, after the vacuum pumping in the step (3) is completed, the pressure in the envelope reaches 2.0 x 10-3Pa or less, e.g. 2.0X 10-3Pa、1.8×10-3Pa、1.5×10-3Pa、1.2×10-3Pa、1.0×10-3Pa、8.0×10-4Pa or 5.0X 10-4Pa, etc., but are not limited to the recited values, and other values not recited within the range of values are also applicable.
In the invention, after the basic assembly of the sheath is welded, the subsequent vacuumizing is also an important operation step, and the sealing is required after the vacuumizing, otherwise, the vacuum environment is difficult to maintain, and the degassing port is difficult to directly seal, so that the mode of welding and sealing the clamping port after the degassing pipe is clamped is adopted.
As a preferred technical scheme of the invention, the method comprises the following steps:
(1) assembling an annular side wall of a sheath with a lower cover plate, wherein the shape and the size of the cross section of the annular side wall are the same as those of the lower cover plate, the material of the sheath comprises aluminum or stainless steel, then performing gas shielded welding and laser welding in sequence, performing spot welding on the annular side wall and the lower cover plate by adopting the gas shielded welding, preliminarily fixing the annular side wall and the lower cover plate, wherein the gas shielded welding is argon arc welding, the welding current of the argon arc welding is 100-200A, the flow of argon during the argon arc welding is 10-15L/min, welding the whole contact area of the annular side wall and the lower cover plate by adopting the laser welding, the laser power of the laser welding is 2000-3000W, the laser scanning speed is 20-40 mm/s, and the laser spot diameter is 2-4 mm, and obtaining a sheath semi-finished product;
(2) filling a component to be welded or powder to be molded into the sheathed semi-finished product obtained in the step (1), wherein the component to be welded comprises a target material to be welded and a back plate, when the component to be welded is filled into the sheathed semi-finished product, the back plate is positioned below the sheathed semi-finished product, the target material is positioned above the sheathed semi-finished product, the welding surface of the target material is contacted with the welding surface of the back plate, and a partition plate is arranged between the sputtering surface of the target material and the upper cover plate; the powder to be molded comprises a target powder raw material, and when the powder to be molded is filled into a sheathed semi-finished product, carbon paper is arranged at the bottom and the side surface of the sheath;
(3) with the equipment of the partly-finished canning after step (2) is handled and upper cover plate, the shape and the size of annular lateral wall cross section are the same with the upper cover plate in the partly-finished canning, then carry out gas shielded welding and laser welding in proper order, adopt gas shielded welding carries out spot welding to annular lateral wall and upper cover plate, fixes annular lateral wall and upper cover plate tentatively, gas shielded welding is argon arc welding, the welding current that argon arc welded is 100 ~ 200A, the flow of argon gas is 10 ~ 15L/min during argon arc welding, adopts laser welding is to the annular lateral wall and the upper cover plate the shape and the size of annular lateral wall cross section are all the sameWelding the whole contact area, wherein the laser power of laser welding is 2000-3000W, the laser scanning speed is 20-40 mm/s, the diameter of a laser spot is 2-4 mm, vacuumizing is performed, a degassing port formed in the annular side wall or the upper cover plate is connected with vacuum equipment through a degassing pipe in the vacuumizing process, after vacuumizing is completed, the degassing pipe is clamped off and then welded and sealed, and the pressure in the jacket reaches 2.0 x 10-3And obtaining the vacuum sealed sheath below Pa.
Compared with the prior art, the invention has the following beneficial effects:
(1) according to the method, the annular side wall of the sheath, the upper cover plate and the lower cover plate are combined by gas shielded welding and laser welding, so that the stability of the welding process is ensured, the welding bonding strength of the sheath is improved, the welding bonding strength can reach more than 1.2 times of the strength of the sheath main body, and the welding quality is more stable;
(2) the method can effectively improve the production efficiency of sheath welding, thereby shortening the production period and reducing the production cost of the target material.
Detailed Description
In order to better illustrate the present invention and facilitate the understanding of the technical solutions of the present invention, the present invention is further described in detail below. However, the following examples are only simple examples of the present invention and do not represent or limit the scope of the present invention, which is defined by the claims.
The invention provides a method for assembling and welding a sheath, which comprises the following steps:
(1) assembling the annular side wall of the sheath with the lower cover plate, and then sequentially performing gas shielded welding and laser welding to obtain a sheath semi-finished product;
(2) filling a component to be welded or powder to be molded into the sheathed semi-finished product obtained in the step (1);
(3) and (3) assembling the semi-finished sheath processed in the step (2) with an upper cover plate, then sequentially performing gas shielded welding and laser welding, and then performing vacuum pumping to obtain the vacuum sealed sheath.
The following are typical but non-limiting examples of the invention:
example 1:
the embodiment provides a method for assembling and welding a sheath, which comprises the following steps:
(1) assembling an annular side wall of a sheath with a lower cover plate, wherein the annular side wall is of a hollow cylindrical structure, the shape and the size of the cross section of the annular side wall are the same as those of the lower cover plate, the sheath is made of aluminum, argon arc welding and laser welding are sequentially performed, the argon arc welding is adopted to perform spot welding on the annular side wall and the lower cover plate, the annular side wall and the lower cover plate are preliminarily fixed, the welding current of the argon arc welding is 150A, the flow of argon during argon arc welding is 12L/min, the laser welding is adopted to weld the whole contact area of the annular side wall and the lower cover plate, the laser power of the laser welding is 2400W, the laser scanning speed is 30mm/s, the laser spot diameter is 3mm, and a sheath semi-finished product;
(2) putting a component to be welded into the sheathed semi-finished product obtained in the step (1), wherein the component to be welded comprises a target material to be welded and a back plate, when the component to be welded is put into the sheathed semi-finished product, the back plate is positioned below, the target material is positioned above, the welding surface of the target material is contacted with the welding surface of the back plate, and a partition plate is arranged between the sputtering surface of the target material and the upper cover plate;
(3) with the equipment of the canning semi-manufactured goods after step (2) is handled and upper cover plate, the shape and the size of annular lateral wall cross section are the same with the upper cover plate in the canning semi-manufactured goods, then carry out argon arc welding and laser welding in proper order, adopt argon arc welds annular lateral wall and upper cover plate and carries out spot welding, fixes annular lateral wall and upper cover plate tentatively, the welding current that argon arc welded is 150A, the flow of argon gas is 12L/min when argon arc welds, adopts laser welding welds annular lateral wall and upper cover plate's whole contact area, laser welding's laser power is 2400W, and laser scanning speed is 30mm/s, and laser facula diameter is 3mm, carries out the evacuation again, among the evacuation process, the degasification mouth that sets up on the annular lateral wall passes through degasification pipe and is connected with vacuum apparatus, after the evacuation is accomplished, weld sealed after the degasification pipe is disconnected, the pressure in the envelope reaches 2.0 x 10- 3And Pa, obtaining the vacuum sealed sheath.
Example 2:
the embodiment provides a method for assembling and welding a sheath, which comprises the following steps:
(1) assembling an annular side wall of a sheath with a lower cover plate, wherein the annular side wall is of a hollow quadrangular prism structure, the shape and the size of the cross section of the annular side wall are the same as those of the lower cover plate, the sheath is made of stainless steel, then argon arc welding and laser welding are sequentially carried out, spot welding is carried out on the annular side wall and the lower cover plate by adopting the argon arc welding, the annular side wall and the lower cover plate are preliminarily fixed, the welding current of the argon arc welding is 200A, the flow of argon during the argon arc welding is 15L/min, the whole contact area between the annular side wall and the lower cover plate is welded by adopting the laser welding, the laser power of the laser welding is 2800W, the laser scanning speed is 20mm/s, and the laser spot diameter is 2mm, so that;
(2) putting a component to be welded into the sheathed semi-finished product obtained in the step (1), wherein the component to be welded comprises a target material to be welded and a back plate, when the component to be welded is put into the sheathed semi-finished product, the back plate is positioned below, the target material is positioned above, the welding surface of the target material is contacted with the welding surface of the back plate, and a partition plate is arranged between the sputtering surface of the target material and the upper cover plate;
(3) assembling the semi-finished sheath product processed in the step (2) with an upper cover plate, wherein the cross section of the annular side wall of the semi-finished sheath product has the same shape and size as the upper cover plate, then performing argon arc welding and laser welding in sequence, adopting the argon arc welding to perform spot welding on the annular side wall and the upper cover plate, preliminarily fixing the annular side wall and the upper cover plate, wherein the welding current of the argon arc welding is 200A, the flow of argon during argon arc welding is 15L/min, adopting the laser welding to weld the whole contact area of the annular side wall and the upper cover plate, the laser power of the laser welding is 2800W, the laser scanning speed is 20mm/s, the diameter of a laser spot is 2mm, vacuumizing is performed again, a degassing port arranged on the annular side wall of the vacuumizing process is connected with a vacuum device through a degassing pipe, and the degassing pipe is welded and sealed after being broken after the vacuumizing is completed, the pressure in the envelope is up toTo 1.5X 10- 3And Pa, obtaining the vacuum sealed sheath.
Example 3:
the embodiment provides a method for assembling and welding a sheath, which comprises the following steps:
(1) assembling an annular side wall of a sheath with a lower cover plate, wherein the annular side wall is of a hollow cylindrical structure, the shape and the size of the cross section of the annular side wall are the same as those of the lower cover plate, the sheath is made of stainless steel, argon arc welding and laser welding are sequentially performed, the annular side wall and the lower cover plate are subjected to spot welding by adopting the argon arc welding, the annular side wall and the lower cover plate are preliminarily fixed, the welding current of the argon arc welding is 100A, the flow of argon during the argon arc welding is 10L/min, the whole contact area of the annular side wall and the lower cover plate is welded by adopting the laser welding, the laser power of the laser welding is 3000W, the laser scanning speed is 25mm/s, the laser spot diameter is 2.5mm, and a semi-finished sheath;
(2) filling powder to be molded into the sheathed semi-finished product obtained in the step (1), wherein the powder to be molded comprises a target powder raw material, and graphite paper is arranged at the bottom and the side surface of the sheath when the powder to be molded is filled into the sheathed semi-finished product;
(3) with the equipment of the canning semi-manufactured goods and the upper cover plate after step (2) is handled, the shape and the size of annular lateral wall cross section are the same with the upper cover plate in the canning semi-manufactured goods, then argon arc welding and laser welding are carried out in proper order, adopt argon arc welding carries out spot welding to annular lateral wall and upper cover plate, and is tentatively fixed with annular lateral wall and upper cover plate, the welding current that argon arc welded is 100A, the flow of argon gas is 10L/min when argon arc welds, adopts laser welding welds annular lateral wall and upper cover plate's whole contact area, laser welding's laser power is 3000W, and laser scanning speed is 25mm/s, and laser facula diameter is 2.5mm, carries out the evacuation again, among the evacuation process, the degasification mouth that sets up on the annular lateral wall passes through degasification pipe and is connected with vacuum apparatus, after the evacuation is accomplished, weld sealed after will degasification pipe is disconnected, the pressure in the envelope reaches 1.0 x 10- 3And Pa, obtaining the vacuum sealed sheath.
Example 4:
the embodiment provides a method for assembling and welding a sheath, which comprises the following steps:
(1) assembling an annular side wall of a sheath with a lower cover plate, wherein the annular side wall is of a hollow cylindrical structure, the shape and the size of the cross section of the annular side wall are the same as those of the lower cover plate, the sheath is made of aluminum alloy, then argon arc welding and laser welding are sequentially carried out, spot welding is carried out on the annular side wall and the lower cover plate by adopting the argon arc welding, the annular side wall and the lower cover plate are preliminarily fixed, the welding current of the argon arc welding is 120A, the flow of argon during argon arc welding is 14L/min, the whole contact area of the annular side wall and the lower cover plate is welded by adopting the laser welding, the laser power of the laser welding is 2000W, the laser scanning speed is 40mm/s, the laser spot diameter is 3.5mm, and a sheath;
(2) putting a component to be welded into the sheathed semi-finished product obtained in the step (1), wherein the component to be welded comprises a target material to be welded and a back plate, when the component to be welded is put into the sheathed semi-finished product, the back plate is positioned below, the target material is positioned above, and the welding surface of the target material is contacted with the welding surface of the back plate;
(3) with the equipment of the canning semi-manufactured goods and the upper cover plate after step (2) is handled, the shape and the size of annular lateral wall cross section are the same with the upper cover plate in the canning semi-manufactured goods, then carry out argon arc welding and laser welding in proper order, adopt argon arc welding carries out spot welding to annular lateral wall and upper cover plate, and is tentatively fixed with annular lateral wall and upper cover plate, the welding current that argon arc welded is 120A, the flow of argon gas is 14L/min when argon arc welds, adopts laser welding welds annular lateral wall and upper cover plate's whole contact area, laser welding's laser power is 2000W, and laser scanning speed is 40mm/s, and laser facula diameter is 3.5mm, carries out the evacuation again, among the evacuation process, the degasification mouth that sets up on the annular lateral wall passes through degasification pipe and is connected with vacuum apparatus, after the evacuation is accomplished, weld sealed after will degasification pipe is disconnected, the pressure in the envelope reaches 1.8 x 10- 3And Pa, obtaining the vacuum sealed sheath.
Example 5:
the embodiment provides a method for assembling and welding a sheath, which comprises the following steps:
(1) assembling an annular side wall of a sheath with a lower cover plate, wherein the annular side wall is of a hollow quadrangular prism structure, the shape and the size of the cross section of the annular side wall are the same as those of the lower cover plate, the sheath is made of stainless steel, then argon arc welding and laser welding are sequentially carried out, the argon arc welding is adopted to carry out spot welding on the annular side wall and the lower cover plate, the annular side wall and the lower cover plate are preliminarily fixed, the welding current of the argon arc welding is 180A, the flow of argon during argon arc welding is 13L/min, the whole contact area of the annular side wall and the lower cover plate is welded by the laser welding, the laser power of the laser welding is 2500W, the laser scanning speed is 32mm/s, the laser spot diameter is 4mm, and a sheath semi-;
(2) filling powder to be molded into the sheathed semi-finished product obtained in the step (1), wherein the powder to be molded comprises a target powder raw material, and graphite paper is arranged at the bottom and the side surface of the sheath when the powder to be molded is filled into the sheathed semi-finished product;
(3) the canning semi-finished product after being processed in the step (2) is assembled with the upper cover plate, the shape and the size of the cross section of the annular side wall in the canning semi-finished product are the same as those of the upper cover plate, argon arc welding and laser welding are sequentially carried out, spot welding is carried out on the annular side wall and the upper cover plate by adopting the argon arc welding, the annular side wall and the upper cover plate are preliminarily fixed, the welding current of the argon arc welding is 180A, the flow of argon during argon arc welding is 13L/min, the laser welding is adopted to weld the whole contact area of the annular side wall and the upper cover plate, the laser power of the laser welding is 2500W, the laser scanning speed is 32mm/s, the diameter of a laser spot is 4mm, vacuumizing is carried out again, a degassing port arranged on the annular side wall is connected with vacuum equipment through a degassing pipe in the vacuumizing process, and the degassing pipe is welded and sealed after being, the pressure in the bag can reach 8.0 x 10- 4And Pa, obtaining the vacuum sealed sheath.
Comparative example 1:
this comparative example provides a method of capsule assembly welding, which is comparable to the method of example 1, except that: and (3) integrally welding the annular side wall and the cover plate only in an argon arc welding mode without laser welding.
In the above embodiments 1 to 5, the welding of the sheath is performed by combining argon arc welding and laser welding, the welding process is stable, the bonding strength of the sheath welding is high, and the welding bonding strength can reach more than 1.2 times of the strength of the corresponding sheath main body; meanwhile, the welding speed is high, the welding time of the sheath is shortened, and the production efficiency is improved; in the comparative example 1, only the argon arc welding mode is adopted, the welding bonding strength is relatively low, the welding bonding strength is reduced by about 40% compared with that in the embodiment, meanwhile, the welding speed is low, and the production efficiency is relatively low.
It can be seen from the above examples and comparative examples that the method of the present invention combines the gas shielded welding and laser welding of the annular side wall of the sheath with the upper and lower cover plates, so as to improve the bonding strength of the sheath welding while ensuring the stability of the welding process, wherein the bonding strength of the welding can reach more than 1.2 times of the strength of the sheath main body, and the welding quality is more stable; the method can effectively improve the production efficiency of sheath welding, thereby shortening the production period and reducing the production cost of the target material.
The applicant states that the present invention is illustrated in detail by the above examples, but the present invention is not limited to the above detailed methods, i.e. it is not meant that the present invention must rely on the above detailed methods for its implementation. It will be apparent to those skilled in the art that any modifications to the present invention, equivalents of the method of the present invention and additions of ancillary steps, selection of specific means, etc., are within the scope and disclosure of the present invention.
Claims (10)
1. A method of weld-on assembly of a can, comprising the steps of:
(1) assembling the annular side wall of the sheath with the lower cover plate, and then sequentially performing gas shielded welding and laser welding to obtain a sheath semi-finished product;
(2) filling a component to be welded or powder to be molded into the sheathed semi-finished product obtained in the step (1);
(3) and (3) assembling the semi-finished sheath processed in the step (2) with an upper cover plate, then sequentially performing gas shielded welding and laser welding, and then performing vacuum pumping to obtain the vacuum sealed sheath.
2. The method of claim 1 wherein said capsule of step (1) comprises an annular sidewall, an upper cover plate and a lower cover plate;
preferably, the annular side wall is of a hollow cylindrical structure, including a cylindrical structure or a prismatic structure;
preferably, the shape and the size of the cross section of the annular side wall are the same as those of the upper cover plate and the lower cover plate;
preferably, the material of the sheath in the step (1) comprises aluminum or stainless steel.
3. The method according to claim 1 or 2, wherein the gas-shielded welding of step (1) comprises inert gas shielded welding, preferably argon arc welding;
preferably, in the step (1), spot welding is performed on the annular side wall and the lower cover plate by adopting the gas shielded welding, and the annular side wall and the lower cover plate are preliminarily fixed;
preferably, the welding current of the argon arc welding is 100-200A;
preferably, the flow of argon gas during argon arc welding is 10-15L/min.
4. The method according to any one of claims 1 to 3, wherein step (1) welds the entire contact area of the annular side wall and the lower cover plate using the laser welding;
preferably, the laser power of the laser welding in the step (1) is 2000-3000W;
preferably, the laser scanning speed of the laser welding in the step (1) is 20-40 mm/s;
preferably, the diameter of a laser spot of the laser welding in the step (1) is 2-4 mm.
5. The method according to any one of claims 1 to 4, wherein the component to be welded of step (2) comprises a target material to be welded and a backing plate;
preferably, when the assembly to be welded in the step (2) is loaded into the sheathed semi-finished product, the back plate is positioned below, the target material is positioned above, and the welding surface of the target material is contacted with the welding surface of the back plate;
preferably, the sputtering surface of the target faces upwards, and a partition plate is arranged between the sputtering surface of the target and the upper cover plate.
6. The method according to any one of claims 1 to 4, wherein the powder to be molded in step (2) comprises a target powder raw material;
preferably, when the molding powder is filled into the jacket semi-finished product, carbon paper is arranged at the bottom and the side surface of the jacket.
7. The method according to any one of claims 1 to 6, wherein the gas-shielded welding of step (3) comprises inert gas shielded welding, preferably argon arc welding;
preferably, in the step (3), spot welding is performed on the annular side wall and the upper cover plate by adopting the gas shielded welding, and the annular side wall and the upper cover plate are preliminarily fixed;
preferably, the welding current of the argon arc welding is 100-200A;
preferably, the flow of argon gas during argon arc welding is 10-15L/min.
8. The method according to any one of claims 1 to 7, wherein step (3) welds the entire contact area of the annular side wall and the upper lid plate using the laser welding;
preferably, the laser power of the laser welding in the step (3) is 2000-3000W;
preferably, the laser scanning speed of the laser welding in the step (3) is 20-40 mm/s;
preferably, the diameter of a laser spot of the laser welding in the step (3) is 2-4 mm.
9. The method according to any one of claims 1 to 8, wherein the annular side wall or the upper cover plate of the capsule is provided with a degassing port;
preferably, in the vacuumizing process in the step (3), the degassing port is connected with a vacuum device through a degassing pipe;
preferably, after the vacuumizing in the step (3) is finished, the degassing pipe is clamped and then welded and sealed;
preferably, after the vacuum pumping in the step (3) is completed, the pressure in the envelope reaches 2.0 x 10-3Pa or less.
10. Method according to any of claims 1-9, characterized in that the method comprises the steps of:
(1) assembling an annular side wall of a sheath with a lower cover plate, wherein the shape and the size of the cross section of the annular side wall are the same as those of the lower cover plate, the material of the sheath comprises aluminum or stainless steel, then performing gas shielded welding and laser welding in sequence, performing spot welding on the annular side wall and the lower cover plate by adopting the gas shielded welding, preliminarily fixing the annular side wall and the lower cover plate, wherein the gas shielded welding is argon arc welding, the welding current of the argon arc welding is 100-200A, the flow of argon during the argon arc welding is 10-15L/min, welding the whole contact area of the annular side wall and the lower cover plate by adopting the laser welding, the laser power of the laser welding is 2000-3000W, the laser scanning speed is 20-40 mm/s, and the laser spot diameter is 2-4 mm, and obtaining a sheath semi-finished product;
(2) filling a component to be welded or powder to be molded into the sheathed semi-finished product obtained in the step (1), wherein the component to be welded comprises a target material to be welded and a back plate, when the component to be welded is filled into the sheathed semi-finished product, the back plate is positioned below the sheathed semi-finished product, the target material is positioned above the sheathed semi-finished product, the welding surface of the target material is contacted with the welding surface of the back plate, and a partition plate is arranged between the sputtering surface of the target material and the upper cover plate; the powder to be molded comprises a target powder raw material, and when the powder to be molded is filled into a sheathed semi-finished product, carbon paper is arranged at the bottom and the side surface of the sheath;
(3) assembling the sheath semi-finished product treated in the step (2) with an upper cover plate, wherein the sheath semi-finished product is in a middle ring shapeThe shape and the size of lateral wall cross section are the same with the upper cover plate, then carry out gas shielded welding and laser welding in proper order, adopt gas shielded welding carries out spot welding to annular lateral wall and upper cover plate, and tentatively fix annular lateral wall and upper cover plate, gas shielded welding is argon arc welding, the welding current that argon arc welded is 100 ~ 200A, the flow of argon gas is 10 ~ 15L/min when argon arc welding, adopts laser welding welds the whole contact area of annular lateral wall and upper cover plate, laser power of laser welding is 2000 ~ 3000W, and laser scanning speed is 20 ~ 40mm/s, and laser facula diameter is 2 ~ 4mm, carries out the evacuation again, among the evacuation process, the degasification mouth that sets up on annular lateral wall or the upper cover plate passes through degasification pipe and is connected with vacuum apparatus, after the evacuation completion, weld sealed after will degasification pipe clamp breaks, the pressure in the envelope reaches 2.0 x 10-3And obtaining the vacuum sealed sheath below Pa.
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| CN202011303025.0A CN112453708A (en) | 2020-11-19 | 2020-11-19 | Method for assembling and welding sheath |
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| CN202011303025.0A CN112453708A (en) | 2020-11-19 | 2020-11-19 | Method for assembling and welding sheath |
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Application publication date: 20210309 |