CN214814798U - Sheath for isostatic pressing - Google Patents
Sheath for isostatic pressing Download PDFInfo
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- CN214814798U CN214814798U CN202022982670.1U CN202022982670U CN214814798U CN 214814798 U CN214814798 U CN 214814798U CN 202022982670 U CN202022982670 U CN 202022982670U CN 214814798 U CN214814798 U CN 214814798U
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- box
- sheath
- isostatic pressing
- cover plate
- jacket
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Abstract
The utility model provides a canning for isostatic compaction, the canning is in including a canning box and setting for isostatic compaction the apron of canning box opening part, the external diameter of a canning box with the diameter of apron is the same, the lateral wall of a canning box is provided with 1 hole. The utility model provides an isostatic compaction is with canning only need once weld, has promoted welding quality and production efficiency, has practiced thrift manufacturing cost.
Description
Technical Field
The utility model belongs to the technical field of magnetron sputtering, a canning is related to, especially relate to a canning is used in isostatic compaction.
Background
During powder isostatic pressing, a sheath is generally manufactured, powder is filled into the sheath, degassing treatment is carried out, the sheath is sealed, and then the sheath is placed into an isostatic pressing furnace for densification treatment. When the sputtering target material for the semiconductor is subjected to diffusion welding, a corresponding sheath is required to be manufactured firstly, the sheath is subjected to degassing treatment, then the sheath is sealed, and then the sheath is placed into an isostatic pressing furnace for welding. The sheath is made of various materials, mainly aluminum and stainless steel.
The traditional sheath consists of a cylinder and two cover plates, the three components can be welded into a whole to manufacture the sheath only by welding twice, and the problems of low production efficiency and unstable welding quality exist.
CN 111360261a discloses a processing method of a recyclable sheath, which comprises the following steps: (1) placing a product to be densified, a graphite cushion block and graphite paper in a jacket for assembly; (2) assembling the sheath cover plate and the sheath, and then assembling the sheath and the degassing pipe; (3) and (3) sequentially degassing and densifying the sheath obtained in the step (2), taking out the product, and correcting the sheath to obtain the reusable sheath. However, the sheath needs to be welded twice to sequentially fix the upper cover plate and the lower cover plate on the sheath, and the production efficiency needs to be further improved.
CN 111001920a discloses a method of hot isostatic pressing diffusion welding, the method comprising the steps of: (1) placing the combination of the target material, the back plate and the base plate in a metal sheath; (2) after the metal sheath is vacuumized and sealed, hot isostatic pressing treatment is carried out; in the combination of the target, the back plate and the backing plate in the step (1), the target is positioned between the back plate and the backing plate; and (3) during the hot isostatic pressing treatment in the step (2), diffusion welding the target material and the back plate under the pressure action of the backing plate. However, the invention also has the problem that the sheath needs to be welded twice during the manufacture, and the phenomenon of unstable welding quality cannot be avoided.
CN 110976876a discloses a method for increasing the yield of powder metallurgy target material, comprising the following steps: (1) providing two sheaths with the same structure and a plurality of reinforcing plates, wherein the sheaths are of box-shaped structures with one end faces being opened; (2) the periphery of the edge of one sheath is wrapped and welded with a reinforcing plate, after powder is filled in the sheath, the other sheath is welded on the other side of the reinforcing plate, and a complete powder metallurgy material surrounding structure is formed; (3) detecting leakage of the surrounding structure, wherein the qualified surrounding structure can enter the next step; (4) and degassing the surrounding structure, carrying out hot isostatic pressing, and then splitting the surrounding structure to obtain a target rough blank. However, the invention requires additional reinforcing plates, which increases the production cost.
Therefore, how to provide the sheath for isostatic pressing, which reduces the welding times, improves the welding quality and the production efficiency, saves the production cost, and becomes a problem to be solved by technical personnel in the field at present.
SUMMERY OF THE UTILITY MODEL
Not enough to prior art exists, the utility model aims to provide a canning for isostatic compaction, the canning only needs once welding for isostatic compaction, has promoted welding quality and production efficiency, has practiced thrift manufacturing cost.
To achieve the purpose, the utility model adopts the following technical proposal:
the utility model provides a sheath for isostatic compaction, which comprises a sheath box and a cover plate arranged at the opening of the sheath box; the outer diameter of the sleeve box is the same as the diameter of the cover plate; the lateral wall of the cover box is provided with 1 hole.
The utility model discloses in, the cover box is made by a punching press, compares in the method of the drum bottom welded bottom plate of traditional use, and a punching press cover box's wholeness is better, only needs an apron of opening part welding can realize the canning effect to backplate and target, and a welded quality is superior to twice welding, has promoted production efficiency, and then has practiced thrift manufacturing cost. The holes are arranged on the side wall of the sleeving box and are used for welding the degassing pipe during use so as to facilitate the subsequent degassing treatment.
Preferably, the outer diameter of the sleeve and the diameter of the cover plate are 520mm and 560mm, such as 520mm, 525mm, 530mm, 535mm, 540mm, 545mm, 550mm, 555mm or 560mm, but not limited to the values listed, and other values not listed in the range of the values are also applicable.
Preferably, the height of the kit is 40-60mm, for example 40mm, 42mm, 44mm, 46mm, 48mm, 50mm, 52mm, 54mm, 56mm, 58mm or 60mm, but is not limited to the values listed, and other values not listed in this range are equally applicable.
In the invention, the outer diameter and the height of the sheathing box and the diameter of the cover plate are all adapted to the sizes of the back plate and the target material to be sheathed, too small a sheath can lead the back plate and the target material to be incapable of being filled, and too large a sheath can influence the density of the target material after isostatic pressing, and can also cause resource waste.
Preferably, the thickness of the kit is 2-4mm, and may be, for example, 2mm, 2.2mm, 2.4mm, 2.6mm, 2.8mm, 3mm, 3.2mm, 3.4mm, 3.6mm, 3.8mm or 4mm, but is not limited to the recited values, and other values not recited in the range of values are equally applicable.
Preferably, the cover plate has a thickness of 2-4mm, and may be, for example, 2mm, 2.2mm, 2.4mm, 2.6mm, 2.8mm, 3mm, 3.2mm, 3.4mm, 3.6mm, 3.8mm or 4mm, but is not limited to the recited values, and other values not recited within the range of values are equally applicable.
In the invention, the material of the sleeve box and the cover plate can be aluminum, and the sleeve box and the cover plate need to bear certain pressure during isostatic pressing. When the thickness of the sheath box and the cover plate is less than 2mm, the sheath box and the cover plate are easy to be damaged in the using process; when the thickness of the sleeve box and the cover plate is larger than 4mm, resource waste is easily caused.
Preferably, the shape of the hole is circular.
Preferably, the center of the hole is 20-30mm away from the opening of the sleeve, such as 20mm, 21mm, 22mm, 23mm, 24mm, 25mm, 26mm, 27mm, 28mm, 29mm or 30mm, but not limited to the values listed, and other values not listed in the range of the values are also applicable.
Preferably, the holes have a diameter of 4-6mm, for example 4mm, 4.2mm, 4.4mm, 4.6mm, 4.8mm, 5mm, 5.2mm, 5.4mm, 5.6mm, 5.8mm or 6mm, but are not limited to the values listed, and other values not listed in this range are equally suitable.
In the invention, the shape and the diameter of the hole are both adapted to the section shape of the degassing pipe, so that the phenomenon of air leakage in the use process is avoided.
Preferably, the sheathing box is an aluminum sheathing box.
Preferably, the cover plate is an aluminum cover plate.
Compared with the prior art, the beneficial effects of the utility model are that:
(1) compared with the traditional sheath, the sheath for isostatic pressing provided by the utility model only needs one-time welding, thereby improving the welding quality and the production efficiency and saving the production cost;
(2) the utility model provides a size of canning for isostatic compaction suits with the backplate and the target size that want the canning, has promoted the qualification rate of target isostatic compaction.
Drawings
Fig. 1 is a schematic cross-sectional view of a sheath for isostatic pressing according to the present invention.
Wherein: 1-packaging the box; 2-cover plate; 3-holes.
Detailed Description
It is to be understood that in the description of the present invention, the terms "central," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for the purpose of convenience and simplicity of description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be construed as limiting the present invention.
It should be noted that, unless explicitly stated or limited otherwise, the terms "disposed," "connected" and "connected" in the description of the present invention are to be construed broadly, and may for example be fixedly connected, detachably connected or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.
Example 1
The present embodiment provides a jacket for isostatic pressing as shown in fig. 1, which includes a jacket box 1 and a cover plate 2 disposed at an opening of the jacket box, and the side wall of the jacket box is provided with 1 hole 3.
In this embodiment, the outer diameter of the sleeve box 1 and the diameter of the cover plate 2 are both 540mm, and the thickness is both 3 mm; the height of the sleeve packaging box 1 is 50 mm; the shape of hole 3 is the circular of diameter 5mm, and the centre of a circle is apart from the opening part 25mm of cover box 1.
In this embodiment, the sleeve case 1 and the cover plate 2 are made of aluminum.
Example 2
The present embodiment provides a jacket for isostatic pressing as shown in fig. 1, which includes a jacket box 1 and a cover plate 2 disposed at an opening of the jacket box, and the side wall of the jacket box is provided with 1 hole 3.
In this embodiment, the outer diameter of the sleeve box 1 and the diameter of the cover plate 2 are both 520 mm; the height of the sleeve packaging box 1 is 40mm, and the thickness is 2 mm; the thickness of the cover plate 2 is 4 mm; the shape of the hole 3 is a circle with the diameter of 4mm, and the distance between the circle center and the opening of the sleeve box 1 is 20 mm.
In this embodiment, the sleeve case 1 and the cover plate 2 are made of aluminum.
Example 3
The present embodiment provides a jacket for isostatic pressing as shown in fig. 1, which includes a jacket box 1 and a cover plate 2 disposed at an opening of the jacket box, and the side wall of the jacket box is provided with 1 hole 3.
In the embodiment, the outer diameter of the sleeve box 1 and the diameter of the cover plate 2 are both 560 mm; the height of the sleeve packing box 1 is 60mm, and the thickness is 4 mm; the thickness of the cover plate 2 is 2 mm; the shape of the hole 3 is a circle with the diameter of 6mm, and the distance between the circle center and the opening of the sleeve box 1 is 30 mm.
In this embodiment, the sleeve case 1 and the cover plate 2 are made of aluminum.
Example 4
This example provides a jacket for isostatic pressing as shown in fig. 1, which is the same as example 1 except that the height of the jacket box 1 is changed to 38mm, and the structure and dimensions are not described herein again.
Example 5
This example provides a jacket for isostatic pressing as shown in fig. 1, and the structure and dimensions of the jacket for isostatic pressing are the same as those of example 1 except that the thickness of the jacket box 1 is changed to 1.8mm, and thus, the details are not repeated herein.
Comparative example 1
This comparative example provides a canning, the canning is including the apron, drum and the bottom plate that stack gradually the setting, the lateral wall of drum is provided with 1 hole.
In the comparative example, the diameter of the cover plate, the outer diameter of the cylinder and the diameter of the bottom plate are all 540mm, and the thickness is all 3 mm; the height of the cylinder is 50 mm; the shape of the hole is a circle with the diameter of 5mm, and the distance between the circle center and the openings at the two ends of the cylinder is 25 mm.
In this comparative example, the cover plate, cylinder and bottom plate were all aluminum.
Application example 1
The application example uses the sheath for isostatic pressing provided in embodiment 1 to perform isostatic pressing of a target, and includes the following steps:
(1) placing a backboard and a target material combination in a sheath box, wherein the backboard is in contact with the bottom of the sheath box;
(2) welding the cover plate at the opening of the sheath box to form a closed space in the sheath box;
(3) assembling a degassing pipe in the hole, and sequentially performing degassing and densification treatment;
(4) and after densification, the cover plate is removed, and the back plate and the target material are combined and taken out.
The application example only needs one-time welding, so that the welding quality and the production efficiency are improved, and the production cost is saved; in addition, the size of the sheath for isostatic pressing provided in example 1 is adapted to the size of the back plate to be sheathed and the target, so that the yield of isostatic pressing of the target is improved.
Application example 2
The application example applies the sheath for isostatic pressing provided in embodiment 4 to perform isostatic pressing of the target, and the specific operations are as follows: and placing the combination of the back plate and the target material in a sheath box, wherein the back plate is contacted with the bottom of the sheath box. Because the height of the back plate is greater than that of the sheath box, the cover plate cannot be smoothly welded at the opening of the sheath box, and further isostatic pressing of the target cannot be realized.
Application example 3
The application example uses the sheath for isostatic pressing provided in embodiment 5 to perform isostatic pressing of a target, and includes the following steps:
(1) placing a backboard and a target material combination in a sheath box, wherein the backboard is in contact with the bottom of the sheath box;
(2) welding the cover plate at the opening of the sheath box to form a closed space in the sheath box;
(3) and assembling the degassing pipe in the hole, and sequentially performing degassing and densification treatment.
Because the thickness of the sheath box is too thin, the sheath is damaged in the isostatic pressing process, and the densification treatment of the target material cannot be continuously carried out.
Comparative application example 1
The comparative application example, which uses the sheath provided in comparative example 1 to perform isostatic pressing of a target, includes the following steps:
(1) placing the back plate and the target material combination in a cylinder;
(2) welding the bottom plate to the opening of the cylinder close to the back plate, and welding the cover plate to the opening of the cylinder close to the target material to form a closed space in the sheath;
(3) assembling a degassing pipe in the hole, and sequentially performing degassing and densification treatment;
(4) and after densification, the cover plate is removed, and the back plate and the target material are combined and taken out.
This comparison application needs twice welding, has reduced welding quality and production efficiency, is unfavorable for practicing thrift manufacturing cost.
Therefore, compared with the traditional sheath, the sheath for isostatic pressing provided by the utility model only needs one-time welding, thereby improving the welding quality and the production efficiency and saving the production cost; in addition, the size of the sheath for isostatic compaction is matched with the size of the back plate to be sheathed and the target material, so that the qualification rate of isostatic compaction of the target material is improved.
The applicant states that the above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and those skilled in the art should understand that any changes or substitutions easily conceivable by those skilled in the art within the technical scope of the present invention are within the protection scope and the disclosure scope of the present invention.
Claims (8)
1. The sheath for isostatic pressing is characterized by comprising a sheath box and a cover plate arranged at an opening of the sheath box;
the outer diameter of the sleeve box is the same as the diameter of the cover plate;
the side wall of the sleeve box is provided with 1 hole;
the height of the sleeve packaging box is 40-60 mm;
the distance between the circle center of the hole and the opening of the sleeve box is 20-30 mm.
2. The jacket for isostatic pressing as claimed in claim 1, wherein the outer diameter of said jacket box and the diameter of said cover plate are both 520mm and 560 mm.
3. The jacket for isostatic pressing as claimed in claim 2, wherein said jacket box has a thickness of 2-4 mm.
4. The jacket for isostatic pressing as claimed in claim 2, wherein said cover plate has a thickness of 2-4 mm.
5. The jacket for isostatic pressing as claimed in claim 2, wherein said holes are circular in shape.
6. The jacket for isostatic pressing as claimed in claim 1, wherein said holes have a diameter of 4-6 mm.
7. The jacket for isostatic pressing as claimed in claim 2, wherein said jacket box is an aluminum jacket box.
8. The jacket for isostatic pressing as claimed in claim 2, wherein said cover plate is an aluminum cover plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022982670.1U CN214814798U (en) | 2020-12-10 | 2020-12-10 | Sheath for isostatic pressing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022982670.1U CN214814798U (en) | 2020-12-10 | 2020-12-10 | Sheath for isostatic pressing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214814798U true CN214814798U (en) | 2021-11-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022982670.1U Active CN214814798U (en) | 2020-12-10 | 2020-12-10 | Sheath for isostatic pressing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214814798U (en) |
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- 2020-12-10 CN CN202022982670.1U patent/CN214814798U/en active Active
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