CN112439659B

CN112439659B - Cleaning method and sand blasting method

Info

Publication number: CN112439659B
Application number: CN202011292640.6A
Authority: CN
Inventors: 松永正文
Original assignee: Song Yongzhengwen; Mtek Smart Corp
Current assignee: Song Yongzhengwen; Mtek Smart Corp
Priority date: 2015-04-02
Filing date: 2016-03-28
Publication date: 2022-08-16
Anticipated expiration: 2036-03-28
Also published as: CN112439659A; WO2016158859A1; JP2018089543A; JP6684397B2; CN107614124A; CN107614124B; CN112018416A

Abstract

The invention provides a cleaning method and a blasting method. The cleaning method is a method of selecting at least one fluid from a liquid, a melt, a powder, a supercritical fluid, and a gas, and spraying the fluid in a gradually expanding manner using a spray nozzle, and is characterized by comprising: a step of arranging a plurality of spray nozzles in a row or substantially a row, or a plurality of rows, or in a circle when selecting at least one fluid from a cleaning liquid or dry ice to clean an object; and a step of ejecting the ejection streams from adjacent ejection nozzles of the plurality of ejection nozzles with timings shifted so that the ejection streams do not interfere with each other in the air or the object.

Description

Cleaning method and sand blasting method

The application has application date of 2016, 3 and 28, application number of 201680031793.0 and name of: a divisional application of the chinese patent application "a method of ejecting a fluid and a method of forming a film of a fluid".

Technical Field

The present invention relates to a method for ejecting a gas, a liquid, a melt, a powder, a supercritical fluid, or a fluid obtained by selecting and mixing them, or a method for ejecting these fluids to form a film on an object.

The ejection of the present invention is performed such that a fluid moves at a desired speed from an ejection port, an area of a pattern (english: pattern) of an ejection flow downstream of the ejection port is larger than an area of the ejection port, and the ejection of the present invention includes, for example, dropping, dispensing, and jetting. Therefore, the discharge port may be a fine hole or a composite shape such as a two-fluid discharge nozzle (hereinafter, referred to as a spray nozzle), regardless of the size of the shape. Examples of the final products related to the fluid or to be manufactured include a granulation method for granulating a liquid medicine in the air and using the liquid medicine in a medical product, and a fiber and/or nonwoven fabric manufactured by a melt-blowing method, an electrospinning method, or the like. The cleaning of the substrate may be performed by spraying a liquid such as deionized water or a solvent, or granulated dry ice. The method also includes blasting (blast) in which the powder or granule is ejected together with the compressed gas and brought into contact with or collided with the object to remove burrs. The film formation includes general coating in which a discharge flow moves toward an object such as a coating object and collides with or contacts the object to be coated, and also includes CVD (Chemical Vapor Deposition) in which a film is formed by contacting a source gas with a high-temperature object, or MOCVD (Metal Organic Vapor Deposition) in which a film is formed by moving an Organic Metal source with a carrier gas, such as bubbling (Vapor Deposition). The application method of applying particles and/or fibers to an object to be coated, such as powder particles to which a fluid mixed with a compressed gas is ejected from an ejection port and moved, or fluid such as liquid mixed with supercritical fluid, Air-assisted distributed Jet (Air-assisted distributed Jet), atomization (including fiberization) application (japanese: application), or electrostatic atomization (including fiberization), includes micro-curtain (english: micro-current) application.

The micro-screen is a method of performing coating by using a part of a liquid film before mist and reciprocating a coating object and a spray nozzle (english: over spray) when spraying a liquid or the like at a low pressure of 1MPa or less, preferably about 0.3MPa by using an airless spray nozzle (english: air spray nozzle) having a wide angle pattern, and does not generate overspray particles on a coating surface. Which changes to a haze when moved far away by excessive passage through the object being coated.

The atomization (fiberization) application is a method of applying or coating a liquid, a melt, or the like to an object by a method of producing particles and/or fibers by ultrasonic waves, rotation of electrospinning or the like, centrifugal force of a rotator, a melt blowing method, or the like, in addition to granulation by spraying.

Background

Conventionally, when a coating operation such as spraying (jetting) a material in a coating process or the like is performed using a material such as a liquid, a melt, or a powder, there is a phenomenon in which particles are scattered and adhere to a portion other than a coating object (referred to as overspray in the art). Since it is necessary to adhere a powder to an object to be coated such as a metal, a powder paint is often formed into a coating film by charging the powder with static electricity and adhering the powder to the object to be coated and melting the powder with an oven (english). In addition, in the case where the object to be coated is an electric conductor such as a metal, the liquid and/or the melt uses static electricity for further improving the coating efficiency. The coating material is a liquid and/or molten material, and can be applied to a substrate such as a non-uneven thin sheet or a long WEB (WEB) by being treated at high speed by a simple coating apparatus such as a roll coating, a curtain coating, or a slot nozzle. However, in order to coat an electrode slurry (electrode ink) on an uneven coating such as an LED (Light Emitting Diode) or the like and/or a Polymer Electrolyte Fuel Cell (PEFC) which is easily deformed by moisture or water instantaneously, only a method of spraying, ultrasonic atomization, or the like capable of uniformly coating a thin film by lamination, and the like, is applied.

In the case of ejecting a fluid by an ejection nozzle or the like, in order to coat a base material wider than the ejection pattern width and improve the production speed, it is necessary to use a head using the ejection pattern having a wide width so as to be orthogonal to the base material and to reciprocate at a high speed of 30 to 60 meters, for example, or to use a plurality of ejection heads so as to be arranged orthogonal to the base material. When the injection angle of the injection is large, there is a large amount of reasonable (japanese: rational り) bounce of incidence and reflection, and the injection flow is moved by a fan generated at a speed of reciprocating movement to lose its directivity, so that the coating efficiency is 30% or less in the case of two-fluid injection and 50% or less even in the case of no-air injection. Even in the latter case, the same applies to the bouncing, and when the spray is performed while the spray patterns are arranged so as to overlap each other, the spray patterns interfere with each other, and the patterns are disturbed and deformed, so that a uniform coating film distribution cannot be obtained. Therefore, there is a need to separately provide the respective spray patterns so as not to interfere with each other, which increases the control cost of the apparatus, and the apparatus has to be complicated and large.

In general, in a continuous jet apparatus, the nozzle diameter and/or the cross-sectional area of the flow rate regulating portion are generally increased in order to eliminate nozzle clogging. Therefore, when it is desired to apply a thin film to a substrate or the like, the amount of coating per unit area becomes excessive when the substrate is conveyed at a low speed, and therefore, it is necessary to perform coating while moving the substrate at a high speed or, in the case where the substrate can be conveyed at a low speed, reciprocating the spray device at a high speed in a direction perpendicular to the substrate. It is common knowledge in the art that when the jet stream moves at a high speed, the jet stream is fanned out as described above and the coating efficiency is extremely lowered. Therefore, in the field of general coating, the coating efficiency is low as shown below. In addition, in order to make the coating material have a good finish on the object to be coated, it is necessary to make the spray particles fine. When the particles are atomized and sprayed at a wide angle, the coating efficiency is 30% or less in a method using a so-called air spray or two-fluid spray. In addition, the coating efficiency by airless spraying was about 40% to 60% in the same specification. Even if static electricity is applied, the former is only about 40% to 60%, and the latter is only about 60% to 75%.

Patent document 1 is a conventional technique invented by the present inventors to solve the above-mentioned problems, and can reduce the flow rate per unit time by intermittently (pulsatorily) injecting with a nozzle having a large flow path in order to eliminate nozzle clogging.

Patent document 2 discloses a method for pulse coating of a powder object, which is invented by the present inventors, and which can adjust a flow rate by the number of pulses per unit time while increasing a jet pump pressure (hereinafter, referred to as "injector pump pressure") and stabilizing a coating amount.

Patent documents 3 and 4 are also cleaning methods invented by the present inventors, and disclose the following techniques: the cleaning medium is pulsed to strike the object to be cleaned to clean the object, so that the cleaning effect which cannot be obtained by continuous spraying is obtained.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open No. Sho 61-161175

Patent document 2: japanese laid-open patent publication No. 62-11574

Patent document 3: japanese laid-open patent publication No. H03-123681

Patent document 4: japanese laid-open patent publication Hei 03-196884

Disclosure of Invention

Problems to be solved by the invention

In a coating operation and/or a cleaning method by spraying in a general coating field, as described above, since continuous spraying is generally performed using a wide-angle nozzle in order to improve productivity, there are many cases where interference of a spray jet is not considered even when pulse spraying is performed using a plurality of spraying devices or heads. In the case where the interference is not caused, for example, the heads are provided so as to be spaced apart from each other in the flow direction of the object to be coated, and therefore, the apparatus becomes large in size and the control becomes complicated.

Means for solving the problems

The present invention has been made to solve the above-described problems, and an object of the present invention is to make an apparatus compact while improving productivity. The use efficiency of the material is improved. Another object is to perform perfect cleaning by applying impact (impact) to the object to be cleaned, for example, with a cleaning agent. Alternatively, a gas fluid, a liquid, or the like is uniformly formed into a film on the object. Further, stable quality granulation is performed in large quantities with a compact apparatus. In addition, effective sand blasting and the like are performed on the target object.

The present invention provides a method for ejecting a fluid from a plurality of ejection ports, the method being characterized in that ejection is performed at timings shifted so that ejection streams from adjacent ejection ports do not interfere downstream.

The present invention provides a method for ejecting a fluid, characterized in that the fluid is ejected in a pulse manner with timing shifted so that ejection flows from adjacent ejection ports do not interfere with each other.

The present invention provides a method for ejecting a fluid, characterized in that the fluid is a single fluid or a mixture of at least two selected from a liquid, a melt, a powder, a gas, and a supercritical fluid.

The invention provides a method for ejecting a fluid, which is characterized in that the fluid is charged with static electricity.

The invention provides a method for ejecting a fluid, characterized in that an ultrasonic wave is applied to the fluid at least in the vicinity of an ejection port.

The present invention provides a method for ejecting a fluid, characterized in that the ejected fluid is formed into particles or fibers.

The present invention provides a method for ejecting a fluid, characterized in that the number of pulses is 1 to 1000 per second.

The present invention provides a method for ejecting a fluid, including: a first step of providing a plurality of discharge ports downstream of one automatic opening/closing mechanism (valve) for fluid; a second step of providing a plurality of automatic opening/closing mechanisms; and a third step of selecting at least two automatic opening/closing mechanisms from the plurality of automatic opening/closing mechanisms and alternately arranging the downstream ejection ports adjacent to each other.

The present invention provides a fluid film forming method for ejecting a fluid from a plurality of ejection ports toward an object, the fluid film forming method including: a first step of arranging a plurality of ejection ports so that ejection patterns from adjacent ejection ports overlap on an object; a second step of performing pulse ejection with timings shifted from each other so that ejection from one of adjacent ejection orifices is not performed from the other ejection orifice; and a third step of causing the ejected fluid to collide with or come into contact with the object.

The present invention provides a method for forming a film on a fluid, characterized in that a plurality of ejection ports are present as a group in one line or substantially one line or a plurality of lines, the plurality of ejection ports move relative to an object, and the ejected fluid collides with or comes into contact with the object.

The present invention provides a method for forming a film on a fluid, wherein a plurality of discharge ports are arranged on a circle or a substantially circle, or are arranged on a circle or a substantially circle.

The present invention provides a method for forming a film on a fluid, comprising: a first step of adhering a fluid to an object so that patterns of pulsed ejection flows of the fluid from an ejection orifice group consisting of a plurality of ejection orifices arranged in a line or substantially a line or an ejection orifice group consisting of a plurality of ejection orifices arranged in one head do not overlap with each other; a second step of moving the object relative to the one-line or substantially one-line ejection port group or one-head ejection port group; and a third step of moving the substantially-aligned ejection orifice group or the ejection orifice group of one head back and forth by 1 to 30 mm orthogonally or substantially orthogonally to the object to eject the fluid in a pulse manner so that the fluid overlaps with the pattern to which the fluid adheres.

The present invention provides a method for forming a film on a fluid, comprising: a first step of preventing patterns of pulsed ejection flows of a fluid from an ejection orifice group consisting of a plurality of ejection orifices arranged in a line or a substantially line or an ejection orifice group consisting of a plurality of ejection orifices arranged in one head from overlapping on an object; a second step of arranging a plurality of ejection orifice groups of the one or substantially one row or ejection orifice groups of the head orthogonally or substantially orthogonally to a moving direction of the object; a third step of moving the object and the discharge port group relative to each other; and a fourth step of overlapping at least the pattern of the second line of the discharge pulse-like discharge stream with the pattern of the first line to which the fluid has adhered on the object.

The present invention provides a method for forming a film of a fluid, characterized in that the fluid includes a liquid, a melt, a powder, a gas, and a supercritical fluid or a mixture of at least two selected from them, and the ejected fluid is formed into a film on an object.

The present invention provides a method for forming a film by a fluid, characterized in that an object is a heated substrate, the fluid is a raw material gas or a solution for a spray pyrolysis method, and the spraying of the fluid is performed in a pulsed manner so as to overcome an updraft of the object.

According to the fluid discharge method and/or film forming method of the present invention, the fluid from the plurality of discharge ports is independently moved in a desired discharge flow pattern without interference, and can be applied to the object as a coating pattern as calculated, for example, as long as the fluid is a coating material such as a liquid or a powder.

The present invention can be applied to the following method of japanese patent laid-open No. h 04-004060: compressed gas is jetted from the surrounding compressed fluid jetting holes toward the outflow stream of the liquid and/or the melt and collides and deflected to obtain a circular, annular or the like pattern. For example, when four heads or devices are provided and outflow of liquid or the like is started at the same time, if the angle of the circle around the trajectory of the compressed gas ejection hole is set to 0 to 360 degrees, the first head may be set to 0 degree, the second head may be set to 90 degrees, the third head may be set to 180 degrees, and the fourth head may be set to 270 degrees. In this way, even if the pitch of the plurality of heads is made narrower than the pattern width, when the respective heads are reciprocated so that the respective ejection streams do not interfere at all, for example, by setting the pitch of the respective heads to 50mm and setting the annular pattern to 1 meter, a dense pattern can be formed on a wide web moving perpendicularly to the moving direction of the heads. And can be produced at a speed 4 times that of one head. The number of heads is 10 times that of 10 heads. Moreover, the device can be formed compactly almost invariably as compared with the case of one head. The swirl spray pattern (english: spiral spray pattern) described in this patent document forms a small-diameter circular pattern and/or annular pattern with a swirling flow of gas, but the method of this document can be applied as a method for further pursuing accuracy when a small-diameter pattern is desired because the pattern can be mechanically reliably rotated. In addition, since the pattern of the swirl-shaped spray varies depending on the outflow amount and/or the viscosity, it is difficult to adjust the pattern in order to obtain a desired pattern, but a pattern as calculated can be obtained in the present method. Of course, the number and pitch of the heads can be freely set according to the purpose, and the present invention is not limited to a liquid such as a paint or an adhesive and/or a heated melt, and can be applied to a paint or an adhesive for powder and granular materials, and a wide and uniform circular pattern can be obtained even when the powder and granular materials are electrostatically charged by an electric field. In addition, it is also suitable for mass granulation of medical supplies and the like. The scale and cost can be significantly reduced by a conventional rotary atomizing device using a plurality of heads.

When the discharge flow is deflected not only by the compressed gas as described above but also by providing the discharge head itself of the fluid at a desired angle to the outside of the rotator and rotating the central shaft, a desired annular pattern and/or circular pattern of a small diameter and/or a large diameter can be drawn. Even in this case, the ejection timing of each head attached to one or more rotators can be changed, and the ejection streams can be arranged without interference. In the case where a plurality of heads are attached to one revolving unit, the object and the revolving unit may move relative to each other. The ejection flow can also continuously draw a circular pattern and/or a ring pattern, or intermittently eject the ejection flow to draw a circular pattern and/or a ring pattern. The ejection may be performed by granulating the liquid and/or the melt by airless ejection, two-fluid ejection, or the like, or may be performed by ejecting the liquid and/or the melt in the form of beads directly in the shape of ejection holes. When a hot melt adhesive and/or a binder having a relatively low viscosity is discharged at a high speed from a nozzle having a diameter of 0.25 to 0.5 mm while the hydraulic pressure is set to 3.5MPa or more into the air of several meters, a fiber mass can be produced without using a high-temperature compressed gas like melt blowing. The method is not only suitable for spraying liquid, but also suitable for spraying powder and/or gas. In order to rotate the fluid discharge head disposed outward from the center of the shaft, a commercially available inexpensive rotary joint for a fluid or a multi-fluid (english: rotation joint) may be used. The fluid may be liquid, molten mass, mixture of powder and gas, etc., without limitation.

In addition, the method of japanese patent application laid-open No. 03-238061 is also configured to prepare a plurality of devices or heads and to make the ejection streams compact by the same method as described above without interference. Although the same object as described above can be achieved, the present method is particularly advantageous for cleaning and/or coating an object having irregularities because it can provide an impact when the distance to the object is shortened by reducing the ejection angle, whichever is preferable.

In the present invention, even if the pitch between the plurality of heads is narrower than the pattern width, ejection can be performed with the phases of pulses at the ejection timing of adjacent ejection heads out of the plurality of heads shifted, and the ejection streams do not interfere with each other in the air. Even if the pattern width when reaching the object is 250 mm, for example, and the distance between adjacent heads is 25 mm, interference does not occur at all, and therefore, the apparatus can be made compact and dense coating can be performed, and therefore, the cost is suppressed and the productivity is improved. Of course, the method can be applied to rotary atomizing coating of a bell (English) and a disc (English). The bell and/or the disk are electrostatically charged and coated, but in the present invention, since the discharge of the coating material to the atomizing head of the bell, the disk, or the like is performed in pulses, when the timing is shifted, the adjacent patterns can be prevented from interfering with each other in the air. Further, the particle diameter changes when the rotation speed of the cloche or the like is made constant and the flow rate of the paint or the like per unit time changes, but in the present invention, the flow rate can be controlled in pulses with the flow rate per unit time being made constant continuously, so that constant particles can be always obtained and quality control can be facilitated. In addition, when a conductive material such as an aqueous paint is electrostatically coated as a cloche, since discharge is performed in a pulsed manner, static electricity is insulated and hardly flows to the earth (earth), and thus, the electrostatic charging efficiency is also effective. Therefore, it is not necessary to insulate a large paint container and/or piping, and therefore, the facility cost can be reduced safely and significantly.

The present invention is effective for a uniform discharge pattern under a head having a plurality of fine discharge holes for liquid or the like, particularly, in a head having a wide width of, for example, 100 to 2000 mm, such as a head of a melt-blowing manufacturing apparatus or a liquid discharge head to which the mechanism is applied. A method for making nonwoven fabrics by melt blowing is described in, for example, US 3825380A. The following examples are described: the nonwoven fabric is produced by blowing molten resin from 20 to 30 nozzles having a diameter of 0.008 to 0.0022 inches per inch, blowing hot air from air grooves on both sides, elongating the resin at a high speed, fibrillating the resin, further elongating the resin, and winding the elongated resin. In the present invention, the ejection of the compressed gas can be independently performed from the periphery of the hole of the molten resin and/or the liquid, respectively, instead of the AIR SLOT (AIR SLOT) system. In the present invention, although the structure of the head is not limited, in order to improve the accuracy, the holes for the liquid and the like and the ejection ports for the compressed gas may be formed by etching a plurality of thin metal plates in a comb shape, for example, and processing the thin metal plates to form a square outflow hole for the liquid and the like and/or a separate ejection port for the square compressed gas in combination, thereby manufacturing the head at low cost with high accuracy. The plurality of thin plates of the processed head may be disassembled or welded to form a three-dimensional structure. The two or more systems of the upstream opening/closing mechanism for the plurality of fine outflow holes for liquid or the like and the downstream opening/closing mechanism for the fiberized or pelletized compressed gas may be arranged such that the downstream ejection holes are adjacent to each other and the phases of the respective pulses are shifted. When the compressed gas is discharged, the pattern expands downstream compared to the discharge aperture, so that if 5 to 10 discharge streams per inch, for example, are arranged so that 2 adjacent discharge streams do not interfere with each other, there is an effect on the production of a short-fiber web for bonding of a hot-melt adhesive and/or an adhesive having a low viscosity and/or the application of fine particles of a liquid. In the case where the liquid contains a solvent, it is important to allow solvent particles, solvent vapor, and the like to be present in the compressed gas circuit and to prevent the liquid outflow hole from being clogged so that the solid content of the liquid does not dry. For discharging other fluid such as powder, a plurality of systems such as a jet pump and an opening/closing mechanism upstream of a plurality of adjacent discharge ports may be used.

The conditions of the fluid, the ejection flow, the pulse, and the like are not particularly limited, but for example, if the ejection is performed in pulses of millisecond units, the distance from the ejection head to the object is 5 to 80 mm, the angle of the ejection (ejection) flow is within 20 degrees, preferably within 10 degrees, more preferably within 6 degrees, and the ejected particles have a certain velocity, even in the case of two-fluid ejection, the liquid or the like can be reliably attached to the target portion. When the spray angle is set to 10 degrees or less, the coating efficiency can be improved to 95% or more of the conventional coating efficiency in the case of coating the entire surface with a size of a 4. Therefore, when a plurality of heads are used and the method of the present invention is adopted, not only the quality of coating can be improved, but also the productivity can be improved. Of course, the above method is also effective for cleaning, and even in the case of the airless spray method, it is also effective when a plurality of spray heads are used with a spray angle of 45 degrees or less, preferably 30 degrees or less, a distance to the object to be cleaned of 150 mm or less, and a hydraulic pressure of 5 to 15 MPa.

The fluid ejected as described above includes: a gas including a raw material gas; powder and/or fluid which is mixed with gas by short fiber and is transported; liquid such as paint, liquid adhesive, cleaning agent, organic solvent, water, oil, etc.; melts such as hot melt adhesives and molten resins; a supercritical fluid in which the liquefied gas and the liquefied carbon dioxide are in a supercritical state; and mixtures thereof, regardless of the purpose downstream of the discharge stream.

In the present invention, the gas, liquid particles, molten particles, and fibers produced by a melt blowing method, an electrospinning method, or the like are electrostatically charged upstream and/or downstream of the ejection flow, and the particles and/or fibers are repelled from each other without being agglomerated, and thus easily adhere to a target object, such as a substrate. Sheet-like types such as a semiconductor substrate, an LED ceramic substrate, a wafer-level LED, and glass can be selected regardless of the shape, material, and size of the object; long sheet metal used for sheet-like films (english: film), paper, Roll-to-Roll, and the like; thin sheet glass, film, paper, carbon fiber, and like webs; or composites thereof, and the like. When the fluid is ejected, the sheet-like object to be coated may be placed on a tray, or a long web or the like may be adsorbed on the opposite side of the ejected fluid by a heated adsorption drum or the like.

In addition, an ultrasonic transducer and/or a horn (horn) can be added to a discharge port and/or a structure for ultrasonic ejection, airless ejection, two-fluid ejection, or the like, so that the fluid can be easily granulated.

The main object of the present invention is to prevent a plurality of ejection streams from interfering with each other in the air, but to make the distribution of the ejection streams after the liquid or the like has adhered thereto by colliding with or coming into contact with an object uniform, the plurality of ejection ports can be arranged so that a desired pattern of the plurality of ejection streams is superimposed on the object as desired. It is also important to shift the timing in a pulse manner so that the adjacent discharge streams do not interfere with each other until the streams collide with or are coated on the object. Further, it is possible to arrange a plurality of heads in the moving direction of the object so that one head having a plurality of ejection ports with which the patterns of the respective ejection streams do not interfere with the object is a single ejection stream group, or to move the ejection stream group relative to the object so that the pattern in which the respective 1 st ejection stream groups are ejected toward the object in a pulsed manner and the pattern in which the respective 2 nd or 3 rd head are overlapped with each other in a desired shape. Further, by arranging a plurality of rows of the groups in which the ejection streams of the ejection ports in one row are arranged so as not to interfere with each other on the object as one ejection stream group, similarly to the head described above, it is possible to attach the liquid or the like to the object in a uniform distribution by the same method as described above.

The above two methods can also be reciprocated, for example, by 1 to 30 mm, orthogonally or substantially orthogonally to the moving direction of the object, and the patterns of the ejection flows on the object of the ejection orifices of each head or each row are overlapped. The pattern width at the time of attachment when such short reciprocating movement (in english: shot traverse) is performed may be a small diameter of 2 to 40 mm or a pattern with a narrow angle of an ellipse. Although the pattern width is not limited, it is preferably 10mm or less, and the smaller the pattern width is, the more the adhesion efficiency of the fluid can be improved. The larger the number of ejection ports of one head or one row or substantially one row, the better in terms of productivity. From the viewpoint of cost and effect, 5 to 10 are preferable for a small-sized device such as an LED small for an object, and 10 to 100 or more are suitable for spraying a liquid and/or a melt onto a web or the like.

In addition, the present invention can be applied to CVD such as MOCVD, and can perform uniform film formation by pulsing a raw material gas and/or a solution for spray pyrolysis toward a heated object from a plurality of spray ports so as to collide or contact the heated object against an ascending gas flow of the object. When the raw material is a liquid, it may be vaporized by a bubble formation method or the like and transported as it is or together with another carrier gas. When an FTO film (a fluorine-doped SnO2 transparent conductive film) is formed on a glass plate heated to, for example, 400 to 600 ℃, the FTO film is pushed back by an updraft when sprayed in a pattern width of, for example, 100 mm, and therefore, this is not preferable.

ADVANTAGEOUS EFFECTS OF INVENTION

As described above, according to the present invention, the fluid from the plurality of discharge ports can be uniformly dispersed in a wide range at low cost. Therefore, it is needless to say that high-quality powder, granule, fiber, or the like can be produced, and film formation including coating on an object can be performed with high productivity by a compact apparatus.

Drawings

Fig. 1 is a pattern layout diagram of substantially one line in the embodiment of the present invention.

Fig. 2 is a timing diagram of an embodiment of the present invention.

Fig. 3 is a timing chart of two-fluid ejection according to the embodiment of the present invention.

Fig. 4 is a 2-column layout diagram of the embodiment of the present invention.

Fig. 5 is a 3-column layout diagram of the embodiment of the present invention.

Fig. 6 is a layout view on a circle of an embodiment of the present invention.

Detailed Description

Preferred embodiments of the present invention will be described below with reference to the accompanying drawings. The following embodiments are merely examples for facilitating understanding of the present invention, and do not exclude the case where addition, substitution, modification, and the like, which can be performed by a person skilled in the art, are performed within a range not departing from the technical spirit of the present invention.

The drawings are intended to show, by way of illustration, preferred embodiments of the invention.

In fig. 1, the ejection heads 1, 2, and 3 having the opening and closing function of the fluid are arranged such that the continuous ejection flows of the fluid interfere with each other downstream. As for the ejection timing, 1 and 3 can be ejected at the same timing. When the timing cycle is set to 100 msec/cycle, the discharge heads 1 and 3 discharge in the first 100 msec period. For example, ejection is started after 45 milliseconds, and ejection is stopped after 55 milliseconds. Reference numerals 4 and 5 denote pulse-like ejection streams of the heads 1 and 3, and move while gradually expanding. The adjacent ejection heads 2 of 1 and 3 similarly start ejection after 45 milliseconds and stop after 55 milliseconds in the 2 nd cycle delayed from the above cycle. 6 is a pulsed ejection flow of the head 2, and flies with a delay of 1 cycle. Similarly, 7 and 8 are ejection flows of the heads 1 and 3 of the 3 rd cycle, and similarly fly with a delay of 1 cycle again. This allows the discharge streams to fly without interfering with each other at all. Since the heads 1 and 3 need only have the same ejection timing, the downstream of one head provided with a fluid opening/closing mechanism may be branched into 2 ejection ports. Further, the downstream of the 2 opening/closing mechanisms of the fluid is branched to include many discharge ports, and the plural discharge ports downstream of the 2 opening/closing mechanisms must be arranged adjacently, and respective continuous discharge flows are provided so as to interfere with each other in the air or on the object. Further, when one of the adjacent ejection orifices is pulsed to eject with a delay of 1 cycle in the same manner as the timing of fig. 1, no interference occurs at all. The present invention can be applied to the production of MEA (Membrane Electrode Assembly) for PEFC type fuel cell vehicles, which has recently been drawing attention as a means for overcoming the problem of the environment. When an electrode slurry for a fuel cell, which is a fluid, is directly applied to an electrolyte membrane, which is an object, in a pulse manner with a width of 200 mm, it is possible to produce an ideal MEA (membrane electrode assembly) for a fuel cell vehicle with 6000 to 15000 stages in one year when an applicator having 56 ejection ports with an ejection pattern of 10mm is manufactured with the pitch of adjacent ejection ports set to 7.5 mm in both polarities. The throughput is proportional to the number of applicators, but the device can be very compact.

Fig. 2 is a time chart of fig. 1.

Fig. 3 is a time diagram of 1 cycle when the fluid is a liquid and/or a molten mass and granulation and/or fiberization is carried out with compressed gas. In the case of the pulse discharge, it is necessary to discharge the compressed gas before and after the discharge and/or outflow of the liquid or the like. The compressed gas needs to be ejected before and after 5 to 10 milliseconds longer than the timing of the discharge of the liquid.

Of course, the period may be longer than the above-described period, but the increase in the amount of consumption is not preferable from the viewpoint of resource saving.

Fig. 4 is a diagram in which the ejection heads and the ejection flow patterns are arranged in 2 rows. The heads 11 to 14 are disposed in the front row, and the heads 15 to 18 are disposed in the rear row. When the

heads

11 and 13, and the

heads

15 and 17 eject the fluid in the first cycle, the heads 12 and 14, and the

heads

16 and 18 do not eject but eject at a desired timing in the 2 nd cycle. Reference numerals 21 to 28 show patterns of the ejection flow. From the viewpoint of initial cost, one of the

heads

11, 13, 15, and 17, for example, an automatic valve for distribution or an automatic open/close spray gun having excellent high-speed response, may be branched into the downstream of one of the open/close mechanisms and used as the discharge ports, and the other of the

heads

12, 14, 16, and 18 may be branched into the downstream of the other open/close mechanism and used as the discharge ports.

Fig. 5 is a diagram of 3 columns in which heads are densely arranged. Only every 1 head 31, head 33, head 39, and head 41 of the front row and the rear row are ejected in the first cycle, every 1 head 36 and head 38 of the head of the middle row are ejected in the 2 nd cycle, and the fluid is ejected from the head 32, head 34, head 40, and head 42 of the front row and the rear row that are not ejected in the 3 rd cycle. Even if the patterns of the respective ejection flows, for example, 131, 136, 139 do not interfere with each other, when the liquid or the like is granulated with the compressed gas, the compressed gas may spread out of the pattern of the ejected particle flow and interfere with each other to disturb the pattern of the ejected particle flow, so that it is necessary to confirm in advance.

Fig. 6 shows an example in which the fluid is ejected onto a circle (circula), and the head 31, the head 33, the head 35, the head 37, and the head 39 are ejected in the first cycle to obtain an ejection pattern 41, an ejection pattern 43, an ejection pattern 45, an ejection pattern 47, and an ejection pattern 49. In the 2 nd cycle, the annular pattern can be obtained by ejecting from the

heads

32, 34, 36, 38, and 40. By increasing the number of heads, a denser annular pattern can be obtained.

As in fig. 6, a large number of heads or discharge ports are arranged inside a circle, and a full cone (english: full cone) pattern can be formed in the same step. The method is particularly effective for forming a film in a disk shape such as a silicon wafer (English).

The coating method of the present invention can be applied to the production of a high-value added product as described above. For example, the present invention can be applied to the formation of a fuel cell electrode such as PEFC. The fluid can be a fuel cell electrode catalyst slurry, and the coated object can be a GDL (Gas Diffusion layer) and/or an electrolyte membrane. When the electrode slurry is directly applied to the electrolyte membrane, the adhesion between the electrode and the electrolyte membrane is good and the electrical interface resistance is low, which is preferable. The slot nozzle of the die system known in high-speed productivity can perform intermittent coating with a wide width, so that there is no disadvantage in terms of productivity in terms of GDL, but it cannot be directly coated on a thin electrolyte membrane of 25 μm or less without a back sheet (backsheet), and it is difficult to form micropores, mesopores, macropores, etc. in terms of performance in the catalyst layer of the slot nozzle system. Therefore, a pulse jet coating method, which has been expected to produce ideal large pores and the like, has been desired in the past in the middle of MEA (Fuel Cell Vehicle) of FCV (Fuel Cell Vehicle) and the like. In particular, when a SLURRY (slury) containing an electrode catalyst, an electrolyte solution, and a solvent is applied by pulse spraying to an electrolyte membrane that is instantaneously deformed by moisture, it is necessary to perform coating by stacking thin films by reciprocating one or more spray heads while heating and adsorbing the electrolyte membrane, and therefore, the productivity is extremely low, and the method is not suitable for a roll-to-roll system. However, according to the method of the present invention, the diameter of the coating pattern of the ejection flow is set to 5 mm or less, so that the electrode can be formed without masking. Further, by arranging a plurality of rows, it is possible to obtain a very high productivity with a compact apparatus having a low total cost.

Industrial applicability of the invention

According to the present invention, a compact and low-cost apparatus can be realized regardless of the type of fluid, and therefore, productivity in all fields such as granulation, fiberization, cleaning, film formation, and the like can be improved. Further, the present invention can also be applied to an application (english: application) with a high added value.

Description of the reference numerals

1. 2, 3 discharge head

4. 5 1 st cycle ejection flow

6 nd cycle 2 ejection stream

7. 8 3 rd cycle ejection flow

11. 12, 13, 14 prostate

15. 16, 17, 18 rear row head

21. 21, 25, 27 1 st cycle ejection stream

22. 24, 26, 28 No. 2 cycle ejection stream

31. 32, 33, 34 prostate

35. 36, 37, 38 middle row head

39. 40, 41, 42 rear row head

131. 133, 136, 138, 139, 141 cycle 1 ejection stream

132. 134, 135, 137, 140, 142 No. 2 ejection flow

61. 62, 63-69, 70 round head

161. 163, 165, 167, 169 cycle 1 discharge stream

162. 164, 166, 168, 170 cycle 2 ejection stream

Claims

1. A cleaning method for selecting at least one fluid from a liquid, a molten material, a powder, a supercritical fluid, and a gas, and ejecting the fluid in a gradually expanding manner using an ejection nozzle, the method comprising:

a step of arranging a plurality of spray nozzles in a row, substantially a row, a plurality of rows, or a circle so that successive spray streams of the fluid from the plurality of spray nozzles interfere downstream when selecting at least one fluid from a cleaning liquid or dry ice to clean an object; and

and a step of ejecting the ejection streams from the adjacent ejection nozzles out of the plurality of ejection nozzles with timings shifted so as not to interfere with each other in the air or the object.

2. The cleaning method according to claim 1, comprising:

preparing the selected at least one fluid;

a step of providing an automatic opening/closing mechanism for opening/closing a downstream flow of the fluid, the automatic opening/closing mechanism being provided with a plurality of injection nozzles downstream;

a step of providing a plurality of automatic opening/closing mechanisms; and

selecting at least two automatic opening/closing mechanisms from the plurality of automatic opening/closing mechanisms and alternately arranging downstream injection nozzles adjacent to each other,

the timing of opening and closing the automatic opening and closing mechanism is shifted so that the gradually expanding jet flows from adjacent injection nozzles do not interfere with each other, and the respective jet flows do not interfere with each other in the air or on the object.

3. The cleaning method according to claim 1 or 2,

the injection is a two-fluid injection.

4. The cleaning method according to claim 1 or 2,

the injection is performed in pulses, and at least injection is performed in a manner that the injection flow of the adjacent injection nozzle does not interfere with each other, with pulse timing being shifted.

5. A blasting method for selecting at least one fluid from a liquid, a molten material, a powder, a supercritical fluid, and a gas, and ejecting the fluid in a gradually expanding manner using an ejection nozzle, the blasting method comprising:

a step of arranging a plurality of ejection nozzles in a row or substantially a row, or a plurality of rows, or within a circle so that continuous ejection flows of the fluid from the plurality of ejection nozzles interfere downstream when performing blasting by causing at least one fluid to collide with an object as blasting particles; and

6. The blasting method according to claim 5,