CN112398457A - 声表面波滤波器及其制造方法 - Google Patents
声表面波滤波器及其制造方法 Download PDFInfo
- Publication number
- CN112398457A CN112398457A CN202011327544.0A CN202011327544A CN112398457A CN 112398457 A CN112398457 A CN 112398457A CN 202011327544 A CN202011327544 A CN 202011327544A CN 112398457 A CN112398457 A CN 112398457A
- Authority
- CN
- China
- Prior art keywords
- acoustic wave
- surface acoustic
- wave filter
- matching
- metal electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 58
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 238000000034 method Methods 0.000 title claims description 8
- 229910052751 metal Inorganic materials 0.000 claims abstract description 34
- 239000002184 metal Substances 0.000 claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 19
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 10
- 238000004804 winding Methods 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 5
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 5
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- WPPDFTBPZNZZRP-UHFFFAOYSA-N aluminum copper Chemical compound [Al].[Cu] WPPDFTBPZNZZRP-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 229910052750 molybdenum Inorganic materials 0.000 claims description 5
- 239000011733 molybdenum Substances 0.000 claims description 5
- 229910052697 platinum Inorganic materials 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 9
- 239000000919 ceramic Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000004891 communication Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011327544.0A CN112398457A (zh) | 2020-11-24 | 2020-11-24 | 声表面波滤波器及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011327544.0A CN112398457A (zh) | 2020-11-24 | 2020-11-24 | 声表面波滤波器及其制造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN112398457A true CN112398457A (zh) | 2021-02-23 |
Family
ID=74607613
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202011327544.0A Pending CN112398457A (zh) | 2020-11-24 | 2020-11-24 | 声表面波滤波器及其制造方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN112398457A (zh) |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07263995A (ja) * | 1994-03-22 | 1995-10-13 | Hitachi Ltd | 弾性表面波装置およびそれを用いたアンテナ分波器 |
JPH0851334A (ja) * | 1993-10-08 | 1996-02-20 | Matsushita Electric Ind Co Ltd | 弾性表面波フィルタ |
JPH08330890A (ja) * | 1995-05-29 | 1996-12-13 | Kyocera Corp | 弾性表面波共振器 |
US20010024149A1 (en) * | 2000-03-21 | 2001-09-27 | Sanyo Electric Co., Ltd. | Surface acoustic wave device |
CN1394389A (zh) * | 2000-08-21 | 2003-01-29 | 株式会社村田制作所 | 声表面波滤波器件 |
JP2004156950A (ja) * | 2002-11-05 | 2004-06-03 | Mitsubishi Materials Corp | 表面弾性波素子モジュール及びその製造方法 |
CN1905365A (zh) * | 2005-07-28 | 2007-01-31 | 富士通媒体部品株式会社 | 谐振电路、滤波器以及天线双工器 |
CN105122645A (zh) * | 2013-04-11 | 2015-12-02 | 株式会社村田制作所 | 高频模块 |
CN105427570A (zh) * | 2015-12-29 | 2016-03-23 | 中电科技德清华莹电子有限公司 | 一种通用电抗型传感元件用无源无线遥测接口芯片 |
CN210519104U (zh) * | 2017-06-05 | 2020-05-12 | 株式会社村田制作所 | 线圈内置陶瓷基板 |
-
2020
- 2020-11-24 CN CN202011327544.0A patent/CN112398457A/zh active Pending
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0851334A (ja) * | 1993-10-08 | 1996-02-20 | Matsushita Electric Ind Co Ltd | 弾性表面波フィルタ |
JPH07263995A (ja) * | 1994-03-22 | 1995-10-13 | Hitachi Ltd | 弾性表面波装置およびそれを用いたアンテナ分波器 |
JPH08330890A (ja) * | 1995-05-29 | 1996-12-13 | Kyocera Corp | 弾性表面波共振器 |
US20010024149A1 (en) * | 2000-03-21 | 2001-09-27 | Sanyo Electric Co., Ltd. | Surface acoustic wave device |
CN1394389A (zh) * | 2000-08-21 | 2003-01-29 | 株式会社村田制作所 | 声表面波滤波器件 |
JP2004156950A (ja) * | 2002-11-05 | 2004-06-03 | Mitsubishi Materials Corp | 表面弾性波素子モジュール及びその製造方法 |
CN1905365A (zh) * | 2005-07-28 | 2007-01-31 | 富士通媒体部品株式会社 | 谐振电路、滤波器以及天线双工器 |
CN105122645A (zh) * | 2013-04-11 | 2015-12-02 | 株式会社村田制作所 | 高频模块 |
CN105427570A (zh) * | 2015-12-29 | 2016-03-23 | 中电科技德清华莹电子有限公司 | 一种通用电抗型传感元件用无源无线遥测接口芯片 |
CN210519104U (zh) * | 2017-06-05 | 2020-05-12 | 株式会社村田制作所 | 线圈内置陶瓷基板 |
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Li Honglang Inventor after: Xu Xin Inventor before: Li Honglang Inventor before: Xu Xin Inventor before: Other inventor requests not to publish the name |
|
CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: 510700 Room 202, building D, No. 136, Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant after: Guangdong Guangna Technology Development Co.,Ltd. Address before: 510700 room 1004, building D, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant before: Guangdong guangnaixin Technology Co.,Ltd. |
|
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20210816 Address after: 510535 Room 201, building D, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant after: Guangdong Guangdong Guangdong Hong Kong Macao Dawan District National Nanotechnology Innovation Research Institute Address before: 510700 Room 202, building D, No. 136, Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant before: Guangdong Guangna Technology Development Co.,Ltd. |
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TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20210913 Address after: 510700 room 1004, building D, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant after: Guangdong guangnaixin Technology Co.,Ltd. Address before: 510535 Room 201, building D, 136 Kaiyuan Avenue, Huangpu District, Guangzhou City, Guangdong Province Applicant before: Guangdong Guangdong Guangdong Hong Kong Macao Dawan District National Nanotechnology Innovation Research Institute |